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Tu X, Zhang Y, Zhou S, Tang W, Yan X, Rui Y, Wang W, Yan B, Zhang C, Ye Z, Shi H, Su R, Wan C, Dong D, Xu R, Zhao QY, Zhang LB, Jia XQ, Wang H, Kang L, Chen J, Wu P. Tamm-cavity terahertz detector. Nat Commun 2024; 15:5542. [PMID: 38956040 PMCID: PMC11219876 DOI: 10.1038/s41467-024-49759-z] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/27/2023] [Accepted: 06/11/2024] [Indexed: 07/04/2024] Open
Abstract
Efficiently fabricating a cavity that can achieve strong interactions between terahertz waves and matter would allow researchers to exploit the intrinsic properties due to the long wavelength in the terahertz waveband. Here we show a terahertz detector embedded in a Tamm cavity with a record Q value of 1017 and a bandwidth of only 469 MHz for direct detection. The Tamm-cavity detector is formed by embedding a substrate with an Nb5N6 microbolometer detector between an Si/air distributed Bragg reflector (DBR) and a metal reflector. The resonant frequency can be controlled by adjusting the thickness of the substrate layer. The detector and DBR are fabricated separately, and a large pixel-array detector can be realized by a very simple assembly process. This versatile cavity structure can be used as a platform for preparing high-performance terahertz devices and opening up the study of the strong interactions between terahertz waves and matter.
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Affiliation(s)
- Xuecou Tu
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China.
- Hefei National Laboratory, Hefei, 230088, China.
| | - Yichen Zhang
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
| | - Shuyu Zhou
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
| | - Wenjing Tang
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
| | - Xu Yan
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
| | - Yunjie Rui
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
| | - Wohu Wang
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
| | - Bingnan Yan
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
| | - Chen Zhang
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
| | - Ziyao Ye
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
| | - Hongkai Shi
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
| | - Runfeng Su
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
| | - Chao Wan
- Purple Mountain Laboratories, Nanjing, Jiangsu, 211111, China
| | - Daxing Dong
- Department of Applied Physics, Nanjing University of Aeronautics and Astronautics, Nanjing, 210016, China
| | - Ruiying Xu
- Nanjing Electronic Devices Institute, Nanjing, 210016, China
| | - Qing-Yuan Zhao
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
- Purple Mountain Laboratories, Nanjing, Jiangsu, 211111, China
| | - La-Bao Zhang
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
- Hefei National Laboratory, Hefei, 230088, China
| | - Xiao-Qing Jia
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
- Hefei National Laboratory, Hefei, 230088, China
| | - Huabing Wang
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
- Purple Mountain Laboratories, Nanjing, Jiangsu, 211111, China
| | - Lin Kang
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China.
- Hefei National Laboratory, Hefei, 230088, China.
| | - Jian Chen
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China
- Purple Mountain Laboratories, Nanjing, Jiangsu, 211111, China
| | - Peiheng Wu
- Research Institute of Superconductor Electronics (RISE), School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210023, China.
- Hefei National Laboratory, Hefei, 230088, China.
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Li F, Miao W, Yu C, He Z, Wang Q, Zhong J, Wu F, Wang Z, Zhou K, Ren Y, Zhang W, Li J, Shi S, Liu Q, Feng Z. Low-Temperature Thermal Transport Characteristics in Epitaxial Bilayer Graphene Microbridges. ACS OMEGA 2024; 9:23053-23059. [PMID: 38826519 PMCID: PMC11137710 DOI: 10.1021/acsomega.4c02727] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/20/2024] [Revised: 04/25/2024] [Accepted: 05/07/2024] [Indexed: 06/04/2024]
Abstract
In this paper, we present a study of the thermal transport of epitaxial bilayer graphene microbridges. The thermal conductance of three graphene microbridges with different lengths was measured at different temperatures using Johnson noise thermometry. We find that with the decrease of the temperature, the thermal transport in the graphene microbridges switches from electron-phonon coupling to electron diffusion, and the switching temperature is dependent on the length of the microbridge, which is in good agreement with the simulation based on a distributed hot-spot model. Moreover, the electron-phonon thermal conductance has a temperature power law of T3 as predicted for pristine graphene and the electron-phonon coupling coefficient σep is found to be approximately 0.18 W/(m2 K4), corresponding to a deformation potential D of 55 eV. In addition, the electron diffusion in the graphene microbridges adheres to the Wiedemann-Franz law, requiring no corrections to the Lorentz number.
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Affiliation(s)
- Feiming Li
- Purple
Mountain Observatory, Chinese Academy of Sciences, Nanjing 210033, China
- University
of Science and Technology of China, Hefei 230026, China
| | - Wei Miao
- Purple
Mountain Observatory, Chinese Academy of Sciences, Nanjing 210033, China
| | - Cui Yu
- National
Key Laboratory of Solid-State Microwave Devices and Circuits, Shijiazhuang 050051, China
| | - Zezhao He
- National
Key Laboratory of Solid-State Microwave Devices and Circuits, Shijiazhuang 050051, China
| | - Qingcheng Wang
- Purple
Mountain Observatory, Chinese Academy of Sciences, Nanjing 210033, China
- University
of Science and Technology of China, Hefei 230026, China
| | - Jiaqiang Zhong
- Purple
Mountain Observatory, Chinese Academy of Sciences, Nanjing 210033, China
| | - Feng Wu
- Purple
Mountain Observatory, Chinese Academy of Sciences, Nanjing 210033, China
| | - Zheng Wang
- Purple
Mountain Observatory, Chinese Academy of Sciences, Nanjing 210033, China
| | - Kangmin Zhou
- Purple
Mountain Observatory, Chinese Academy of Sciences, Nanjing 210033, China
| | - Yuan Ren
- Purple
Mountain Observatory, Chinese Academy of Sciences, Nanjing 210033, China
| | - Wen Zhang
- Purple
Mountain Observatory, Chinese Academy of Sciences, Nanjing 210033, China
| | - Jing Li
- Purple
Mountain Observatory, Chinese Academy of Sciences, Nanjing 210033, China
| | - Shengcai Shi
- Purple
Mountain Observatory, Chinese Academy of Sciences, Nanjing 210033, China
| | - Qingbin Liu
- National
Key Laboratory of Solid-State Microwave Devices and Circuits, Shijiazhuang 050051, China
| | - Zhihong Feng
- National
Key Laboratory of Solid-State Microwave Devices and Circuits, Shijiazhuang 050051, China
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Radamson HH, Miao Y, Zhou Z, Wu Z, Kong Z, Gao J, Yang H, Ren Y, Zhang Y, Shi J, Xiang J, Cui H, Lu B, Li J, Liu J, Lin H, Xu H, Li M, Cao J, He C, Duan X, Zhao X, Su J, Du Y, Yu J, Wu Y, Jiang M, Liang D, Li B, Dong Y, Wang G. CMOS Scaling for the 5 nm Node and Beyond: Device, Process and Technology. NANOMATERIALS (BASEL, SWITZERLAND) 2024; 14:837. [PMID: 38786792 PMCID: PMC11123950 DOI: 10.3390/nano14100837] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/19/2024] [Revised: 04/24/2024] [Accepted: 04/29/2024] [Indexed: 05/25/2024]
Abstract
After more than five decades, Moore's Law for transistors is approaching the end of the international technology roadmap of semiconductors (ITRS). The fate of complementary metal oxide semiconductor (CMOS) architecture has become increasingly unknown. In this era, 3D transistors in the form of gate-all-around (GAA) transistors are being considered as an excellent solution to scaling down beyond the 5 nm technology node, which solves the difficulties of carrier transport in the channel region which are mainly rooted in short channel effects (SCEs). In parallel to Moore, during the last two decades, transistors with a fully depleted SOI (FDSOI) design have also been processed for low-power electronics. Among all the possible designs, there are also tunneling field-effect transistors (TFETs), which offer very low power consumption and decent electrical characteristics. This review article presents new transistor designs, along with the integration of electronics and photonics, simulation methods, and continuation of CMOS process technology to the 5 nm technology node and beyond. The content highlights the innovative methods, challenges, and difficulties in device processing and design, as well as how to apply suitable metrology techniques as a tool to find out the imperfections and lattice distortions, strain status, and composition in the device structures.
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Affiliation(s)
- Henry H. Radamson
- Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China; (Z.Z.); (Y.R.); (H.L.); (J.C.); (C.H.); (X.D.); (Y.W.); (B.L.)
| | - Yuanhao Miao
- Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China; (Z.Z.); (Y.R.); (H.L.); (J.C.); (C.H.); (X.D.); (Y.W.); (B.L.)
| | - Ziwei Zhou
- Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China; (Z.Z.); (Y.R.); (H.L.); (J.C.); (C.H.); (X.D.); (Y.W.); (B.L.)
| | - Zhenhua Wu
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
| | - Zhenzhen Kong
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
| | - Jianfeng Gao
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
| | - Hong Yang
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
| | - Yuhui Ren
- Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China; (Z.Z.); (Y.R.); (H.L.); (J.C.); (C.H.); (X.D.); (Y.W.); (B.L.)
| | - Yongkui Zhang
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
| | - Jiangliu Shi
- Beijing Superstring Academy of Memory Technology, Beijing 100176, China; (J.S.); (J.X.); (M.J.); (D.L.)
| | - Jinjuan Xiang
- Beijing Superstring Academy of Memory Technology, Beijing 100176, China; (J.S.); (J.X.); (M.J.); (D.L.)
| | - Hushan Cui
- Jiangsu Leuven Instruments Co., Ltd., Xuzhou 221300, China;
| | - Bin Lu
- School of Physics and Information Engineering, Shanxi Normal University, Linfen 041004, China;
| | - Junjie Li
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
| | - Jinbiao Liu
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
| | - Hongxiao Lin
- Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China; (Z.Z.); (Y.R.); (H.L.); (J.C.); (C.H.); (X.D.); (Y.W.); (B.L.)
| | - Haoqing Xu
- Institute of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China;
| | - Mengfan Li
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
- Institute of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China;
| | - Jiaji Cao
- Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China; (Z.Z.); (Y.R.); (H.L.); (J.C.); (C.H.); (X.D.); (Y.W.); (B.L.)
| | - Chuangqi He
- Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China; (Z.Z.); (Y.R.); (H.L.); (J.C.); (C.H.); (X.D.); (Y.W.); (B.L.)
| | - Xiangyan Duan
- Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China; (Z.Z.); (Y.R.); (H.L.); (J.C.); (C.H.); (X.D.); (Y.W.); (B.L.)
| | - Xuewei Zhao
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
- Institute of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China;
| | - Jiale Su
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
| | - Yong Du
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
| | - Jiahan Yu
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
| | - Yuanyuan Wu
- Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China; (Z.Z.); (Y.R.); (H.L.); (J.C.); (C.H.); (X.D.); (Y.W.); (B.L.)
| | - Miao Jiang
- Beijing Superstring Academy of Memory Technology, Beijing 100176, China; (J.S.); (J.X.); (M.J.); (D.L.)
| | - Di Liang
- Beijing Superstring Academy of Memory Technology, Beijing 100176, China; (J.S.); (J.X.); (M.J.); (D.L.)
| | - Ben Li
- Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China; (Z.Z.); (Y.R.); (H.L.); (J.C.); (C.H.); (X.D.); (Y.W.); (B.L.)
| | - Yan Dong
- Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; (Z.W.); (Z.K.); (J.G.); (H.Y.); (Y.Z.); (J.L.); (J.L.); (M.L.); (X.Z.); (J.S.); (Y.D.); (J.Y.); (Y.D.)
| | - Guilei Wang
- Beijing Superstring Academy of Memory Technology, Beijing 100176, China; (J.S.); (J.X.); (M.J.); (D.L.)
- Hefei National Laboratory, University of Science and Technology of China, Hefei 230088, China
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Araki T, Li K, Suzuki D, Abe T, Kawabata R, Uemura T, Izumi S, Tsuruta S, Terasaki N, Kawano Y, Sekitani T. Broadband Photodetectors and Imagers in Stretchable Electronics Packaging. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2304048. [PMID: 37403808 DOI: 10.1002/adma.202304048] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/30/2023] [Revised: 06/22/2023] [Accepted: 07/03/2023] [Indexed: 07/06/2023]
Abstract
The integration of flexible electronics with optics can help realize a powerful tool that facilitates the creation of a smart society wherein internal evaluations can be easily performed nondestructively from the surface of various objects that is used or encountered in daily lives. Here, organic-material-based stretchable optical sensors and imagers that possess both bending capability and rubber-like elasticity are reviewed. The latest trends in nondestructive evaluation equipment that enable simple on-site evaluations of health conditions and abnormalities are discussed without subjecting the targeted living bodies and various objects to mechanical stress. Real-time performance under real-life conditions is becoming increasingly important for creating smart societies interwoven with optical technologies. In particular, the terahertz (THz)-wave region offers a substance- and state-specific fingerprint spectrum that enables instantaneous analyses. However, to make THz sensors accessible, the following issues must be addressed: broadband and high-sensitivity at room temperature, stretchability to follow the surface movements of targets, and digital transformation compatibility. The materials, electronics packaging, and remote imaging systems used to overcome these issues are discussed in detail. Ultimately, stretchable optical sensors and imagers with highly sensitive and broadband THz sensors can facilitate the multifaceted on-site evaluation of solids, liquids, and gases.
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Affiliation(s)
- Teppei Araki
- SANKEN (The Institute of Scientific and Industrial Research), Osaka University, 8-1 Mihogaoka, Ibaraki-shi, 567-0047, Osaka, Japan
- Advanced Photonics and Biosensing Open Innovation Laboratory, National Institute of Advanced Industrial Science and Technology (AIST), 2-1 Yamada-Oka, Suita, 565-0871, Osaka, Japan
- Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, 565-0871, Osaka, Japan
| | - Kou Li
- Department of Electrical, Electronic, and Communication Engineering, Faculty of Science and Engineering, Chuo University, 1-13-27 Kasuga, Bunkyo-ku, 112-8551, Tokyo, Japan
| | - Daichi Suzuki
- Sensing System Research Center, National Institute of Advanced Industrial Science and Technology (AIST), 807-1, Shuku-machi, Tosu, 841-0052, Saga, Japan
| | - Takaaki Abe
- SANKEN (The Institute of Scientific and Industrial Research), Osaka University, 8-1 Mihogaoka, Ibaraki-shi, 567-0047, Osaka, Japan
| | - Rei Kawabata
- SANKEN (The Institute of Scientific and Industrial Research), Osaka University, 8-1 Mihogaoka, Ibaraki-shi, 567-0047, Osaka, Japan
- Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, 565-0871, Osaka, Japan
| | - Takafumi Uemura
- SANKEN (The Institute of Scientific and Industrial Research), Osaka University, 8-1 Mihogaoka, Ibaraki-shi, 567-0047, Osaka, Japan
- Advanced Photonics and Biosensing Open Innovation Laboratory, National Institute of Advanced Industrial Science and Technology (AIST), 2-1 Yamada-Oka, Suita, 565-0871, Osaka, Japan
| | - Shintaro Izumi
- SANKEN (The Institute of Scientific and Industrial Research), Osaka University, 8-1 Mihogaoka, Ibaraki-shi, 567-0047, Osaka, Japan
- Graduate School of Science, Technology and Innovation, Kobe University, 1-1 Rokkodai-cho, Nada-ku, 657-8501, Kobe, Japan
| | - Shuichi Tsuruta
- SANKEN (The Institute of Scientific and Industrial Research), Osaka University, 8-1 Mihogaoka, Ibaraki-shi, 567-0047, Osaka, Japan
| | - Nao Terasaki
- Sensing System Research Center, National Institute of Advanced Industrial Science and Technology (AIST), 807-1, Shuku-machi, Tosu, 841-0052, Saga, Japan
| | - Yukio Kawano
- Department of Electrical, Electronic, and Communication Engineering, Faculty of Science and Engineering, Chuo University, 1-13-27 Kasuga, Bunkyo-ku, 112-8551, Tokyo, Japan
- National Institute of Informatics, Tokyo, 101-8430, Japan
| | - Tsuyoshi Sekitani
- SANKEN (The Institute of Scientific and Industrial Research), Osaka University, 8-1 Mihogaoka, Ibaraki-shi, 567-0047, Osaka, Japan
- Advanced Photonics and Biosensing Open Innovation Laboratory, National Institute of Advanced Industrial Science and Technology (AIST), 2-1 Yamada-Oka, Suita, 565-0871, Osaka, Japan
- Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, 565-0871, Osaka, Japan
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5
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Si W, Zhou W, Liu X, Wang K, Liao Y, Yan F, Ji X. Recent Advances in Broadband Photodetectors from Infrared to Terahertz. MICROMACHINES 2024; 15:427. [PMID: 38675239 PMCID: PMC11051910 DOI: 10.3390/mi15040427] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/19/2024] [Revised: 03/15/2024] [Accepted: 03/19/2024] [Indexed: 04/28/2024]
Abstract
The growing need for the multiband photodetection of a single scene has promoted the development of both multispectral coupling and broadband detection technologies. Photodetectors operating across the infrared (IR) to terahertz (THz) regions have many applications such as in optical communications, sensing imaging, material identification, and biomedical detection. In this review, we present a comprehensive overview of the latest advances in broadband photodetectors operating in the infrared to terahertz range, highlighting their classification, operating principles, and performance characteristics. We discuss the challenges faced in achieving broadband detection and summarize various strategies employed to extend the spectral response of photodetectors. Lastly, we conclude by outlining future research directions in the field of broadband photodetection, including the utilization of novel materials, artificial microstructure, and integration schemes to overcome current limitations. These innovative methodologies have the potential to achieve high-performance, ultra-broadband photodetectors.
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Affiliation(s)
- Wei Si
- School of Electronic Science and Engineering, Nanjing University, Nanjing 210023, China
| | - Wenbin Zhou
- School of Electronic Science and Engineering, Nanjing University, Nanjing 210023, China
| | - Xiangze Liu
- School of Electronic Science and Engineering, Nanjing University, Nanjing 210023, China
| | - Ke Wang
- School of Electronic Science and Engineering, Nanjing University, Nanjing 210023, China
| | - Yiming Liao
- School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
| | - Feng Yan
- School of Electronic Science and Engineering, Nanjing University, Nanjing 210023, China
| | - Xiaoli Ji
- School of Electronic Science and Engineering, Nanjing University, Nanjing 210023, China
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Chen W, Wang D, Wang W, Kang Y, Liu X, Fang S, Li L, Luo Y, Liang K, Liu Y, Luo D, Memon MH, Yu H, Gu W, Liu Z, Hu W, Sun H. Manipulating Surface Band Bending of III-Nitride Nanowires with Ambipolar Charge-Transfer Characteristics: A Pathway Toward Advanced Photoswitching Logic Gates and Encrypted Optical Communication. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2307779. [PMID: 38009587 DOI: 10.1002/adma.202307779] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/03/2023] [Revised: 10/15/2023] [Indexed: 11/29/2023]
Abstract
The operational principle of semiconductor devices critically relies on the band structures that ultimately govern their charge-transfer characteristics. Indeed, the precise orchestration of band structure within semiconductor devices, notably at the semiconductor surface and corresponding interface, continues to pose a perennial conundrum. Herein, for the first time, this work reports a novel postepitaxy method: thickness-tunable carbon layer decoration to continuously manipulate the surface band bending of III-nitride semiconductors. Specifically, the surface band bending of p-type aluminum-gallium-nitride (p-AlGaN) nanowires grown on n-Si can be precisely controlled by depositing different carbon layers as guided by theoretical calculations, which eventually regulate the ambipolar charge-transfer behavior between the p-AlGaN/electrolyte and p-AlGaN/n-Si interface in an electrolyte environment. Enabled by the accurate modulation of the thickness of carbon layers, a spectrally distinctive bipolar photoresponse with a controllable polarity-switching-point over a wide spectrum range can be achieved, further demonstrating reprogrammable photoswitching logic gates "XOR", "NAND", "OR", and "NOT" in a single device. Finally, this work constructs a secured image transmission system where the optical signals are encrypted through the "XOR" logic operations. The proposed continuous surface band tuning strategy provides an effective avenue for the development of multifunctional integrated-photonics systems implemented with nanophotonics.
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Affiliation(s)
- Wei Chen
- School of Microelectronics, University of Science and Technology of China, Hefei, 230029, P. R. China
| | - Danhao Wang
- Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI, 48109, USA
| | - Weiyi Wang
- Hefei National Laboratory for Physical Science at the Microscale, Department of Chemical Physics, University of Science and Technology of China, Hefei, 230027, P. R. China
| | - Yang Kang
- School of Microelectronics, University of Science and Technology of China, Hefei, 230029, P. R. China
| | - Xin Liu
- School of Microelectronics, University of Science and Technology of China, Hefei, 230029, P. R. China
| | - Shi Fang
- School of Microelectronics, University of Science and Technology of China, Hefei, 230029, P. R. China
| | - Liuan Li
- School of Microelectronics, University of Science and Technology of China, Hefei, 230029, P. R. China
| | - Yuanmin Luo
- School of Microelectronics, University of Science and Technology of China, Hefei, 230029, P. R. China
| | - Kun Liang
- School of Microelectronics, University of Science and Technology of China, Hefei, 230029, P. R. China
| | - Yuying Liu
- National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, 230027, P. R. China
| | - Dongyang Luo
- School of Microelectronics, University of Science and Technology of China, Hefei, 230029, P. R. China
| | - Muhammad Hunain Memon
- School of Microelectronics, University of Science and Technology of China, Hefei, 230029, P. R. China
| | - Huabin Yu
- School of Microelectronics, University of Science and Technology of China, Hefei, 230029, P. R. China
| | - Wengang Gu
- School of Microelectronics, University of Science and Technology of China, Hefei, 230029, P. R. China
| | - Zhenghui Liu
- Suzhou Institute of Nano-Tech and Nano-Bionics Chinese Academy of Sciences Chinese Academy of Sciences (CAS), Suzhou, 215123, P. R. China
| | - Wei Hu
- Hefei National Laboratory for Physical Science at the Microscale, Department of Chemical Physics, University of Science and Technology of China, Hefei, 230027, P. R. China
| | - Haiding Sun
- School of Microelectronics, University of Science and Technology of China, Hefei, 230029, P. R. China
- Key Laboratory of Wireless-Optical Communications, Chinese Academy of Sciences, University of Science and Technology of China, Hefei, 230029, P. R. China
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7
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Qaderi F, Rosca T, Burla M, Leuthold J, Flandre D, Ionescu AM. Millimeter-wave to near-terahertz sensors based on reversible insulator-to-metal transition in VO 2. COMMUNICATIONS MATERIALS 2023; 4:34. [PMID: 38665394 PMCID: PMC11041681 DOI: 10.1038/s43246-023-00350-x] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/06/2022] [Accepted: 03/21/2023] [Indexed: 04/28/2024]
Abstract
In the quest for low power bio-inspired spiking sensors, functional oxides like vanadium dioxide are expected to enable future energy efficient sensing. Here, we report uncooled millimeter-wave spiking detectors based on the sensitivity of insulator-to-metal transition threshold voltage to the incident wave. The detection concept is demonstrated through actuation of biased VO2 switches encapsulated in a pair of coupled antennas by interrupting coplanar waveguides for broadband measurements, on silicon substrates. Ultimately, we propose an electromagnetic-wave-sensitive voltage-controlled spike generator based on VO2 switches in an astable spiking circuit. The fabricated sensors show responsivities of around 66.3 MHz.W-1 at 1 μW, with a low noise equivalent power of 5 nW.Hz-0.5 at room temperature, for a footprint of 2.5 × 10-5 mm2. The responsivity in static characterizations is 76 kV.W-1. Based on experimental statistical data measured on robust fabricated devices, we discuss stochastic behavior and noise limits of VO2 -based spiking sensors applicable for wave power sensing in mm-wave and sub-terahertz range.
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Affiliation(s)
- Fatemeh Qaderi
- Nanoelectronic devices laboratory (Nanolab), Department of Electrical Engineering, École polytechnique fédérale de Lausanne (EPFL), EPFL STI IEL NANOLAB, ELB 335, Station 11, Lausanne, 1015 Switzerland
| | - Teodor Rosca
- Nanoelectronic devices laboratory (Nanolab), Department of Electrical Engineering, École polytechnique fédérale de Lausanne (EPFL), EPFL STI IEL NANOLAB, ELB 335, Station 11, Lausanne, 1015 Switzerland
| | - Maurizio Burla
- Institute of Electromagnetic Fields (IEF), Eidgenössische Technische Hochschule Zürich (ETHZ), ETZ K 82, Gloriastrasse 35, Zürich, 8092 Switzerland
| | - Juerg Leuthold
- Institute of Electromagnetic Fields (IEF), Eidgenössische Technische Hochschule Zürich (ETHZ), ETZ K 82, Gloriastrasse 35, Zürich, 8092 Switzerland
| | - Denis Flandre
- ICTEAM, Ecole Polytechnique de Louvain (UCLouvain), ELEN, Place du Levant 3/L5.03.02, Louvain-la-Neuve, 1348 Belgium
| | - Adrian M. Ionescu
- Nanoelectronic devices laboratory (Nanolab), Department of Electrical Engineering, École polytechnique fédérale de Lausanne (EPFL), EPFL STI IEL NANOLAB, ELB 335, Station 11, Lausanne, 1015 Switzerland
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8
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Titova E, Mylnikov D, Kashchenko M, Safonov I, Zhukov S, Dzhikirba K, Novoselov KS, Bandurin DA, Alymov G, Svintsov D. Ultralow-noise Terahertz Detection by p-n Junctions in Gapped Bilayer Graphene. ACS NANO 2023; 17:8223-8232. [PMID: 37094175 DOI: 10.1021/acsnano.2c12285] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/03/2023]
Abstract
Graphene shows strong promise for the detection of terahertz (THz) radiation due to its high carrier mobility, compatibility with on-chip waveguides and transistors, and small heat capacitance. At the same time, weak reaction of graphene's physical properties on the detected radiation can be traced down to the absence of a band gap. Here, we study the effect of electrically induced band gap on THz detection in graphene bilayer with split-gate p-n junction. We show that gap induction leads to a simultaneous increase in current and voltage responsivities. At operating temperatures of ∼25 K, the responsivity at a 20 meV band gap is from 3 to 20 times larger than that in the gapless state. The maximum voltage responsivity of our devices at 0.13 THz illumination exceeds 50 kV/W, while the noise equivalent power falls down to 36 fW/Hz1/2.
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Affiliation(s)
- Elena Titova
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
- Programmable Functional Materials Lab, Brain and Consciousness Research Center, Moscow 121205, Russia
| | - Dmitry Mylnikov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
| | - Mikhail Kashchenko
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
- Programmable Functional Materials Lab, Brain and Consciousness Research Center, Moscow 121205, Russia
| | - Ilya Safonov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
- Programmable Functional Materials Lab, Brain and Consciousness Research Center, Moscow 121205, Russia
| | - Sergey Zhukov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
| | - Kirill Dzhikirba
- Institute of Solid State Physics, Russian Academy of Sciences, Chernogolovka 142432, Russian Federation
| | - Kostya S Novoselov
- Programmable Functional Materials Lab, Brain and Consciousness Research Center, Moscow 121205, Russia
- Institute for Functional Intelligent Materials, National University of Singapore, Singapore 117575, Singapore
| | - Denis A Bandurin
- Department of Materials Science and Engineering, National University of Singapore, Singapore 117575, Singapore
| | - Georgy Alymov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
| | - Dmitry Svintsov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny 141700, Russian Federation
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9
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Mylnikov DA, Titova EI, Kashchenko MA, Safonov IV, Zhukov SS, Semkin VA, Novoselov KS, Bandurin DA, Svintsov DA. Terahertz Photoconductivity in Bilayer Graphene Transistors: Evidence for Tunneling at Gate-Induced Junctions. NANO LETTERS 2023; 23:220-226. [PMID: 36546884 DOI: 10.1021/acs.nanolett.2c04119] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/17/2023]
Abstract
Photoconductivity of novel materials is the key property of interest for design of photodetectors, optical modulators, and switches. Despite the photoconductivity of most novel 2d materials having been studied both theoretically and experimentally, the same is not true for 2d p-n junctions that are necessary blocks of most electronic devices. Here, we study the sub-terahertz photocoductivity of gapped bilayer graphene with electrically induced p-n junctions. We find a strong positive contribution from junctions to resistance, temperature resistance coefficient, and photoresistivity at cryogenic temperatures T ∼ 20 K. The contribution to these quantities from junctions exceeds strongly the bulk values at uniform channel doping even at small band gaps of ∼10 meV. We further show that positive junction photoresistance is a hallmark of interband tunneling, and not of intraband thermionic conduction. Our results point to the possibility of creating various interband tunneling devices based on bilayer graphene, including steep-switching transistors and selective sensors.
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Affiliation(s)
- Dmitry A Mylnikov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny141700, Russia
| | - Elena I Titova
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny141700, Russia
- Programmable Functional Materials Lab, Brain and Consciousness Research Center, Moscow121205, Russia
| | - Mikhail A Kashchenko
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny141700, Russia
- Programmable Functional Materials Lab, Brain and Consciousness Research Center, Moscow121205, Russia
| | - Ilya V Safonov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny141700, Russia
- Programmable Functional Materials Lab, Brain and Consciousness Research Center, Moscow121205, Russia
| | - Sergey S Zhukov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny141700, Russia
| | - Valentin A Semkin
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny141700, Russia
| | - Kostya S Novoselov
- Programmable Functional Materials Lab, Brain and Consciousness Research Center, Moscow121205, Russia
- Institute for Functional Intelligent Materials, National University of Singapore, Singapore117575, Singapore
| | - Denis A Bandurin
- Department of Materials Science and Engineering, National University of Singapore, Singapore117575, Singapore
| | - Dmitry A Svintsov
- Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Dolgoprudny141700, Russia
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10
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Li Y, Liu L, Wang Z, Chang T, Li K, Xu W, Wu Y, Yang H, Jiang D. To Estimate Performance of Artificial Neural Network Model Based on Terahertz Spectrum: Gelatin Identification as an Example. Front Nutr 2022; 9:925717. [PMID: 35911115 PMCID: PMC9330513 DOI: 10.3389/fnut.2022.925717] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/21/2022] [Accepted: 06/17/2022] [Indexed: 11/13/2022] Open
Abstract
It is a necessity to determine significant food or traditional Chinese medicine (TCM) with low cost, which is more likely to achieve high accurate identification by THz-TDS. In this study, feedforward neural networks based on terahertz spectra are employed to predict the animal origin of gelatins, whose adaption to the mission is examined by parallel models built by random sample partition and initialization. It is found that the generalization performance of feedforward ANNs in original data is not satisfactory although prediction on trained samples can be accurate. A multivariate scattering correction is conducted to enhance prediction accuracy, and 20 additional models verify the effectiveness of such dispose. A special partition of total dataset is conducted based on statistics of parallel models, whose influence on ANN performance is investigated with another 20 models. The performance of the models is unsatisfactory because of notable differences in training and test sets according to principal component analysis. By comparing the distribution of the first two principal components before and after multivariate scattering correction, we found that the reciprocal of the minimum number of line segments required for error-free classification in 2-D feature space can be viewed as an index to describe linear separability of data. The rise of proposed linear separability would have a lower requirement for harsh parameter tuning of ANN models and tolerate random initialization. The difference in principal components of samples between a training set and a data set determines whether partition is acceptable or whether a model would have generality. A rapid way to estimate the performance of an ANN before sufficient tuning on a classification mission is to compare differences between groups and differences within groups. Given that a representative peak missing curve is discussed in this article, an analysis based on gelatin THz spectra may be helpful for studies on some other feature-less species.
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Affiliation(s)
- Yizhang Li
- Institute of Automation, Qilu University of Technology (Shandong Academy of Sciences), Key Laboratory of UWB & THz of Shandong Academy of Sciences, Jinan, China
| | - Lingyu Liu
- Institute of Automation, Qilu University of Technology (Shandong Academy of Sciences), Key Laboratory of UWB & THz of Shandong Academy of Sciences, Jinan, China
| | - Zhongmin Wang
- Institute of Automation, Qilu University of Technology (Shandong Academy of Sciences), Key Laboratory of UWB & THz of Shandong Academy of Sciences, Jinan, China
- *Correspondence: Zhongmin Wang,
| | - Tianying Chang
- Institute of Automation, Qilu University of Technology (Shandong Academy of Sciences), Key Laboratory of UWB & THz of Shandong Academy of Sciences, Jinan, China
| | - Ke Li
- Institute of Automation, Qilu University of Technology (Shandong Academy of Sciences), Key Laboratory of UWB & THz of Shandong Academy of Sciences, Jinan, China
| | - Wenqing Xu
- Institute of Automation, Qilu University of Technology (Shandong Academy of Sciences), Key Laboratory of UWB & THz of Shandong Academy of Sciences, Jinan, China
| | - Yong Wu
- Shandong Fupai Ejiao, Co., Ltd., Jinan, China
| | - Hua Yang
- Shandong Fupai Ejiao, Co., Ltd., Jinan, China
| | - Daoli Jiang
- Shandong Fupai Ejiao, Co., Ltd., Jinan, China
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11
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Wang L, An N, He X, Zhang X, Zhu A, Yao B, Zhang Y. Dynamic and Active THz Graphene Metamaterial Devices. NANOMATERIALS 2022; 12:nano12122097. [PMID: 35745433 PMCID: PMC9228136 DOI: 10.3390/nano12122097] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/29/2022] [Revised: 06/13/2022] [Accepted: 06/14/2022] [Indexed: 02/06/2023]
Abstract
In recent years, terahertz waves have attracted significant attention for their promising applications. Due to a broadband optical response, an ultra-fast relaxation time, a high nonlinear coefficient of graphene, and the flexible and controllable physical characteristics of its meta-structure, graphene metamaterial has been widely explored in interdisciplinary frontier research, especially in the technologically important terahertz (THz) frequency range. Here, graphene’s linear and nonlinear properties and typical applications of graphene metamaterial are reviewed. Specifically, the discussion focuses on applications in optically and electrically actuated terahertz amplitude, phase, and harmonic generation. The review concludes with a brief examination of potential prospects and trends in graphene metamaterial.
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Affiliation(s)
- Lan Wang
- Yangtze Delta Region Institute (Huzhou), University of Electronic Science and Technology of China, Huzhou 313001, China;
| | - Ning An
- Key Laboratory of Optical Fiber Sensing and Communications (Education Ministry of China), University of Electronic Science and Technology of China, Chengdu 610054, China;
| | - Xusheng He
- School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China; (X.H.); (X.Z.); (A.Z.)
| | - Xinfeng Zhang
- School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China; (X.H.); (X.Z.); (A.Z.)
| | - Ao Zhu
- School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China; (X.H.); (X.Z.); (A.Z.)
| | - Baicheng Yao
- Key Laboratory of Optical Fiber Sensing and Communications (Education Ministry of China), University of Electronic Science and Technology of China, Chengdu 610054, China;
- Correspondence: (B.Y.); (Y.Z.)
| | - Yaxin Zhang
- School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China; (X.H.); (X.Z.); (A.Z.)
- Correspondence: (B.Y.); (Y.Z.)
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12
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Dai C, Liu Y, Wei D. Two-Dimensional Field-Effect Transistor Sensors: The Road toward Commercialization. Chem Rev 2022; 122:10319-10392. [PMID: 35412802 DOI: 10.1021/acs.chemrev.1c00924] [Citation(s) in RCA: 57] [Impact Index Per Article: 28.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/07/2023]
Abstract
The evolutionary success in information technology has been sustained by the rapid growth of sensor technology. Recently, advances in sensor technology have promoted the ambitious requirement to build intelligent systems that can be controlled by external stimuli along with independent operation, adaptivity, and low energy expenditure. Among various sensing techniques, field-effect transistors (FETs) with channels made of two-dimensional (2D) materials attract increasing attention for advantages such as label-free detection, fast response, easy operation, and capability of integration. With atomic thickness, 2D materials restrict the carrier flow within the material surface and expose it directly to the external environment, leading to efficient signal acquisition and conversion. This review summarizes the latest advances of 2D-materials-based FET (2D FET) sensors in a comprehensive manner that contains the material, operating principles, fabrication technologies, proof-of-concept applications, and prototypes. First, a brief description of the background and fundamentals is provided. The subsequent contents summarize physical, chemical, and biological 2D FET sensors and their applications. Then, we highlight the challenges of their commercialization and discuss corresponding solution techniques. The following section presents a systematic survey of recent progress in developing commercial prototypes. Lastly, we summarize the long-standing efforts and prospective future development of 2D FET-based sensing systems toward commercialization.
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Affiliation(s)
- Changhao Dai
- State Key Laboratory of Molecular Engineering of Polymers, Department of Macromolecular Science, Fudan University, Shanghai 200433, China.,Laboratory of Molecular Materials and Devices, Fudan University, Shanghai 200433, China
| | - Yunqi Liu
- Laboratory of Molecular Materials and Devices, Fudan University, Shanghai 200433, China
| | - Dacheng Wei
- State Key Laboratory of Molecular Engineering of Polymers, Department of Macromolecular Science, Fudan University, Shanghai 200433, China.,Laboratory of Molecular Materials and Devices, Fudan University, Shanghai 200433, China
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13
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Ghosh Dastidar M, Thekkooden I, Nayak PK, Praveen Bhallamudi V. Quantum emitters and detectors based on 2D van der Waals materials. NANOSCALE 2022; 14:5289-5313. [PMID: 35322836 DOI: 10.1039/d1nr08193d] [Citation(s) in RCA: 7] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Light plays an essential role in our world, with several technologies relying on it. Photons will also play an important role in the emerging quantum technologies, which are primed to have a transformative effect on our society. The development of single-photon sources and ultra-sensitive photon detectors is crucial. Solid-state emitters are being heavily pursued for developing truly single-photon sources for scalable technology. On the detectors' side, the main challenge lies in inventing sensitive detectors operating at sub-optical frequencies. This review highlights the promising research being conducted for the development of quantum emitters and detectors based on two-dimensional van der Waals (2D-vdW) materials. Several 2D-vdW materials, from canonical graphene to transition metal dichalcogenides and their heterostructures, have generated a lot of excitement due to their tunable emission and detection properties. The recent developments in the creation, fabrication and control of quantum emitters hosted by 2D-vdW materials and their potential applications in integrated photonic devices are discussed. Furthermore, the progress in enhancing the photon-counting potential of 2D material-based detectors, viz. 2D photodetectors, bolometers and superconducting single-photon detectors functioning at various wavelengths is also reported.
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Affiliation(s)
- Madhura Ghosh Dastidar
- 2D Materials Research and Innovation Group, Micro Nano and Bio-Fluidics Group, Quantum Centers in Diamond and Emerging Materials (QuCenDiEM) Group, Department of Physics, Indian Institute of Technology Madras, Chennai 600036, India
| | - Immanuel Thekkooden
- Quantum Centers in Diamond and Emerging Materials (QuCenDiEM) Group, Department of Electrical Engineering, Indian Institute of Technology Madras, Chennai 600036, India
| | - Pramoda K Nayak
- 2D Materials Research and Innovation Group, Micro Nano and Bio-Fluidics Group, Department of Physics, Indian Institute of Technology Madras, Chennai 600036, India.
| | - Vidya Praveen Bhallamudi
- Quantum Centers in Diamond and Emerging Materials (QuCenDiEM) Group, Departments of Physics and Electrical Engineering, Indian Institute of Technology Madras, Chennai 600036, India.
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14
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Ma W, Gao Y, Shang L, Zhou W, Yao N, Jiang L, Qiu Q, Li J, Shi Y, Hu Z, Huang Z. Ultrabroadband Tellurium Photoelectric Detector from Visible to Millimeter Wave. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2022; 9:e2103873. [PMID: 34923772 PMCID: PMC8844568 DOI: 10.1002/advs.202103873] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/03/2021] [Revised: 11/18/2021] [Indexed: 05/19/2023]
Abstract
Ultrabroadband photodetection is of great significance in numerous cutting-edge technologies including imaging, communications, and medicine. However, since photon detectors are selective in wavelength and thermal detectors are slow in response, developing high performance and ultrabroadband photodetectors is extremely difficult. Herein, one demonstrates an ultrabroadband photoelectric detector covering visible, infrared, terahertz, and millimeter wave simultaneously based on single metal-Te-metal structure. Through the two kinds of photoelectric effect synergy of photoexcited electron-hole pairs and electromagnetic induced well effect, the detector achieves the responsivities of 0.793 A W-1 at 635 nm, 9.38 A W-1 at 1550 nm, 9.83 A W-1 at 0.305 THz, 24.8 A W-1 at 0.250 THz, 87.8 A W-1 at 0.172 THz, and 986 A W-1 at 0.022 THz, respectively. It also exhibits excellent polarization detection with a dichroic ratio of 468. The excellent performance of the detector is further verified by high-resolution imaging experiments. Finally, the high stability of the detector is tested by long-term deposition in air and high-temperature aging. The strategy provides a recipe to achieve ultrabroadband photodetection with high sensitivity and fast response utilizing full photoelectric effect.
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Affiliation(s)
- Wanli Ma
- State Key Laboratory of Infrared PhysicsShanghai Institute of Technical PhysicsChinese Academy of Sciences500 Yu Tian RoadShanghai200083P. R. China
- University of Chinese Academy of Sciences19 Yu Quan RoadBeijing100049P. R. China
| | - Yanqing Gao
- State Key Laboratory of Infrared PhysicsShanghai Institute of Technical PhysicsChinese Academy of Sciences500 Yu Tian RoadShanghai200083P. R. China
| | - Liyan Shang
- Technical Center for Multifunctional Magneto‐Optical Spectroscopy (Shanghai)Engineering Research Center of Nanophotonics & Advanced Instrument (Ministry of Education)Department of MaterialsSchool of Physics and Electronic ScienceEast China Normal University500 Dongchuan RoadShanghai200241P. R. China
| | - Wei Zhou
- State Key Laboratory of Infrared PhysicsShanghai Institute of Technical PhysicsChinese Academy of Sciences500 Yu Tian RoadShanghai200083P. R. China
| | - Niangjuan Yao
- State Key Laboratory of Infrared PhysicsShanghai Institute of Technical PhysicsChinese Academy of Sciences500 Yu Tian RoadShanghai200083P. R. China
| | - Lin Jiang
- State Key Laboratory of Infrared PhysicsShanghai Institute of Technical PhysicsChinese Academy of Sciences500 Yu Tian RoadShanghai200083P. R. China
| | - Qinxi Qiu
- State Key Laboratory of Infrared PhysicsShanghai Institute of Technical PhysicsChinese Academy of Sciences500 Yu Tian RoadShanghai200083P. R. China
- University of Chinese Academy of Sciences19 Yu Quan RoadBeijing100049P. R. China
| | - Jingbo Li
- State Key Laboratory of Infrared PhysicsShanghai Institute of Technical PhysicsChinese Academy of Sciences500 Yu Tian RoadShanghai200083P. R. China
- University of Chinese Academy of Sciences19 Yu Quan RoadBeijing100049P. R. China
| | - Yi Shi
- Donghua University2999 North Renmin RoadShanghai201620P. R. China
| | - Zhigao Hu
- Technical Center for Multifunctional Magneto‐Optical Spectroscopy (Shanghai)Engineering Research Center of Nanophotonics & Advanced Instrument (Ministry of Education)Department of MaterialsSchool of Physics and Electronic ScienceEast China Normal University500 Dongchuan RoadShanghai200241P. R. China
| | - Zhiming Huang
- State Key Laboratory of Infrared PhysicsShanghai Institute of Technical PhysicsChinese Academy of Sciences500 Yu Tian RoadShanghai200083P. R. China
- Key Laboratory of Space Active Opto‐Electronics TechnologyShanghai Institute of Technical PhysicsChinese Academy of Sciences500 Yu Tian RoadShanghai200083P. R. China
- Hangzhou Institute for Advanced StudyUniversity of Chinese Academy of Sciences1 Sub‐Lane XiangshanHangzhou310024P. R. China
- Institute of OptoelectronicsFudan University2005 Songhu RoadShanghai200438P. R. China
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15
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Xiong H, Cai J, Zhang W, Hu J, Deng Y, Miao J, Tan Z, Li H, Cao J, Wu X. Deep learning enhanced terahertz imaging of silkworm eggs development. iScience 2021; 24:103316. [PMID: 34778731 PMCID: PMC8577140 DOI: 10.1016/j.isci.2021.103316] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/05/2021] [Revised: 10/06/2021] [Accepted: 10/15/2021] [Indexed: 01/13/2023] Open
Abstract
Terahertz (THz) technology lays the foundation for next-generation high-speed wireless communication, nondestructive testing, food safety inspecting, and medical applications. When THz technology is integrated by artificial intelligence (AI), it is confidently expected that THz technology could be accelerated from the laboratory research stage to practical industrial applications. Employing THz video imaging, we can gain more insights into the internal morphology of silkworm egg. Deep learning algorithm combined with THz silkworm egg images, rapid recognition of the silkworm egg development stages is successfully demonstrated, with a recognition accuracy of ∼98.5%. Through the fusion of optical imaging and THz imaging, we further improve the AI recognition accuracy of silkworm egg development stages to ∼99.2%. The proposed THz imaging technology not only features the intrinsic THz imaging advantages, but also possesses AI merits of low time consuming and high recognition accuracy, which can be extended to other application scenarios.
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Affiliation(s)
- Hongting Xiong
- School of Electronic and Information Engineering, Beihang University, Beijing 100191, China
| | - Jiahua Cai
- School of Electronic and Information Engineering, Beihang University, Beijing 100191, China
| | - Weihao Zhang
- School of Cyber Science and Technology, Beihang University, Beijing 100191, China
| | - Jingsheng Hu
- College of Engineering, Peking University, Beijing 100191, China
| | - Yuexi Deng
- College of Engineering, Peking University, Beijing 100191, China
| | - Jungang Miao
- School of Electronic and Information Engineering, Beihang University, Beijing 100191, China
| | - Zhiyong Tan
- Key Laboratory of Terahertz Solid State Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Hua Li
- Key Laboratory of Terahertz Solid State Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 China
| | - Juncheng Cao
- Key Laboratory of Terahertz Solid State Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Xiaojun Wu
- School of Electronic and Information Engineering, Beihang University, Beijing 100191, China
- School of Cyber Science and Technology, Beihang University, Beijing 100191, China
- Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074 China
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16
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A Terahertz Detector Based on Double-Channel GaN/AlGaN High Electronic Mobility Transistor. MATERIALS 2021; 14:ma14206193. [PMID: 34683785 PMCID: PMC8539176 DOI: 10.3390/ma14206193] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/15/2021] [Revised: 10/10/2021] [Accepted: 10/16/2021] [Indexed: 11/21/2022]
Abstract
A double-channel (DC) GaN/AlGaN high-electron-mobility transistor (HEMT) as a terahertz (THz) detector at 315 GHz frequency is proposed and fabricated in this paper. The structure of the epitaxial layer material in the detector is optimized, and the performance of the GaN HEMT THz detector is improved. The maximum responsivity of 10 kV/W and minimum noise equivalent power (NEP) of 15.5 pW/Hz0.5 are obtained at the radiation frequency of 315 GHz. The results are comparable to and even more promising than the reported single-channel (SC) GaN HEMT detectors. The enhancement of THz response and the reduction of NEP of the DC GaN HEMT detector mainly results from the interaction of 2DEG in the upper and lower channels, which improves the self-mixing effect of the detector. The promising experimental results mean that the proposed DC GaN/AlGaN HEMT THz detector is capable of the practical applications of THz detection.
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Liu J, Li X, Jiang R, Yang K, Zhao J, Khan SA, He J, Liu P, Zhu J, Zeng B. Recent Progress in the Development of Graphene Detector for Terahertz Detection. SENSORS (BASEL, SWITZERLAND) 2021; 21:4987. [PMID: 34372224 PMCID: PMC8347591 DOI: 10.3390/s21154987] [Citation(s) in RCA: 7] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/10/2021] [Revised: 07/17/2021] [Accepted: 07/19/2021] [Indexed: 11/17/2022]
Abstract
Terahertz waves are expected to be used in next-generation communications, detection, and other fields due to their unique characteristics. As a basic part of the terahertz application system, the terahertz detector plays a key role in terahertz technology. Due to the two-dimensional structure, graphene has unique characteristics features, such as exceptionally high electron mobility, zero band-gap, and frequency-independent spectral absorption, particularly in the terahertz region, making it a suitable material for terahertz detectors. In this review, the recent progress of graphene terahertz detectors related to photovoltaic effect (PV), photothermoelectric effect (PTE), bolometric effect, and plasma wave resonance are introduced and discussed.
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Affiliation(s)
- Jianlong Liu
- National Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China; (J.L.); (X.L.); (R.J.); (K.Y.); (J.Z.); (J.H.); (B.Z.)
| | - Xin Li
- National Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China; (J.L.); (X.L.); (R.J.); (K.Y.); (J.Z.); (J.H.); (B.Z.)
| | - Ruirui Jiang
- National Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China; (J.L.); (X.L.); (R.J.); (K.Y.); (J.Z.); (J.H.); (B.Z.)
| | - Kaiqiang Yang
- National Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China; (J.L.); (X.L.); (R.J.); (K.Y.); (J.Z.); (J.H.); (B.Z.)
| | - Jing Zhao
- National Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China; (J.L.); (X.L.); (R.J.); (K.Y.); (J.Z.); (J.H.); (B.Z.)
| | - Sayed Ali Khan
- Institute of Electromagnetics and Acoustics, School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China;
| | - Jiancheng He
- National Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China; (J.L.); (X.L.); (R.J.); (K.Y.); (J.Z.); (J.H.); (B.Z.)
| | - Peizhong Liu
- Department of the Internet of Things Engineering, College of Engineering, Huaqiao University, Quanzhou 362000, China;
| | - Jinfeng Zhu
- Institute of Electromagnetics and Acoustics, School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China;
| | - Baoqing Zeng
- National Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China; (J.L.); (X.L.); (R.J.); (K.Y.); (J.Z.); (J.H.); (B.Z.)
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18
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Valušis G, Lisauskas A, Yuan H, Knap W, Roskos HG. Roadmap of Terahertz Imaging 2021. SENSORS (BASEL, SWITZERLAND) 2021; 21:4092. [PMID: 34198603 PMCID: PMC8232131 DOI: 10.3390/s21124092] [Citation(s) in RCA: 36] [Impact Index Per Article: 12.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/27/2021] [Revised: 06/07/2021] [Accepted: 06/08/2021] [Indexed: 01/01/2023]
Abstract
In this roadmap article, we have focused on the most recent advances in terahertz (THz) imaging with particular attention paid to the optimization and miniaturization of the THz imaging systems. Such systems entail enhanced functionality, reduced power consumption, and increased convenience, thus being geared toward the implementation of THz imaging systems in real operational conditions. The article will touch upon the advanced solid-state-based THz imaging systems, including room temperature THz sensors and arrays, as well as their on-chip integration with diffractive THz optical components. We will cover the current-state of compact room temperature THz emission sources, both optolectronic and electrically driven; particular emphasis is attributed to the beam-forming role in THz imaging, THz holography and spatial filtering, THz nano-imaging, and computational imaging. A number of advanced THz techniques, such as light-field THz imaging, homodyne spectroscopy, and phase sensitive spectrometry, THz modulated continuous wave imaging, room temperature THz frequency combs, and passive THz imaging, as well as the use of artificial intelligence in THz data processing and optics development, will be reviewed. This roadmap presents a structured snapshot of current advances in THz imaging as of 2021 and provides an opinion on contemporary scientific and technological challenges in this field, as well as extrapolations of possible further evolution in THz imaging.
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Affiliation(s)
- Gintaras Valušis
- Center for Physical Sciences and Technology (FTMC), Department of Optoelectronics, Saulėtekio Ave. 3, LT-10257 Vilnius, Lithuania
- Institute of Photonics and Nanotechnology, Department of Physics, Vilnius University, Saulėtekio Ave. 3, LT-10257 Vilnius, Lithuania
| | - Alvydas Lisauskas
- Institute of Applied Electrodynamics and Telecommunications, Vilnius University, Saulėtekio Ave. 3, LT-10257 Vilnius, Lithuania;
- CENTERA Laboratories, Institute of High Pressure Physics PAS, Sokolowska 29/37, 01-142 Warsaw, Poland;
| | - Hui Yuan
- Physikalisches Institut, Goethe-Universität, Max-von-Laue Straße 1, D-60438 Frankfurt am Main, Germany; (H.Y.); (H.G.R.)
| | - Wojciech Knap
- CENTERA Laboratories, Institute of High Pressure Physics PAS, Sokolowska 29/37, 01-142 Warsaw, Poland;
| | - Hartmut G. Roskos
- Physikalisches Institut, Goethe-Universität, Max-von-Laue Straße 1, D-60438 Frankfurt am Main, Germany; (H.Y.); (H.G.R.)
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