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Li Y, Zhang W, Zhao C, Li W, Dong E, Xu M, Huang H, Yang Y, Li L, Zheng L, Mao M, Yao S, Wang L, Ma J, Wang X, Huang W. Breaking the Saturation of Sensitivity for Ultrawide Range Flexible Pressure Sensors by Soft-Strain Effect. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024:e2405405. [PMID: 39054938 DOI: 10.1002/adma.202405405] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/16/2024] [Revised: 07/15/2024] [Indexed: 07/27/2024]
Abstract
The flexible pressure sensors with a broad pressure range and unsaturated sensitivity are highly desired in practical applications. However, pressure sensors by piezoresistive effect are always limited by the compressibility of sensing layers, resulting in a theoretically decreasing sensitivity of less than 100%. Here, a unique strategy is proposed that utilizes the strain effect, simultaneously achieving a trade-off between a wider pressure detection range and unsaturated sensitivity. Ascribed to the strain effect of sensing layers induced by interlaced microdomes, the sensors possess an increased sensitivity (5.22-70 MPa-1) over an ultrawide pressure range (45 Pa-4.1 MPa), a high-pressure resolution (5 Pa), fast response/recovery time (30/45 ms), and a robust response under a high-pressure loading of 3.5 MPa for more than 5000 cycles. These superior sensing performances allow the sensor to monitor large pressure. The flexible pressure sensor array can assist doctors in restoring the neutral mechanical axis, tracking knee flexion angles, and extracting gait features. Moreover, the flexible sensing array can be integrated into the joint motion surveillance system to map the balance medial-lateral contact forces on the metal compartments in real time, demonstrating the potential for further development into precise medical human-machine interfaces during total knee replacement surgery.
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Affiliation(s)
- Yue Li
- Frontiers Science Center for Flexible Electronics & Institute of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- MIIT Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
| | - Weijie Zhang
- Department of Joint Surgery, Honghui Hospital, Health Science Center, Xi'an Jiaotong University, Xi'an, 710054, China
| | - Cheng Zhao
- MIIT Key Laboratory of Dynamics and Control of Complex Systems, Northwestern Polytechnical University, Xi'an, 710072, China
| | - Weiwei Li
- Frontiers Science Center for Flexible Electronics & Institute of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- MIIT Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- Shaanxi Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
| | - Enchun Dong
- State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710054, China
| | - Manzhang Xu
- Frontiers Science Center for Flexible Electronics & Institute of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- MIIT Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- Shaanxi Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
| | - He Huang
- Frontiers Science Center for Flexible Electronics & Institute of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- MIIT Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
| | - Yabao Yang
- Frontiers Science Center for Flexible Electronics & Institute of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- MIIT Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
| | - Lei Li
- Frontiers Science Center for Flexible Electronics & Institute of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- MIIT Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- Shaanxi Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
| | - Lu Zheng
- Frontiers Science Center for Flexible Electronics & Institute of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- MIIT Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- Shaanxi Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
| | - Mao Mao
- State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710054, China
| | - Shuxin Yao
- Department of Joint Surgery, Honghui Hospital, Health Science Center, Xi'an Jiaotong University, Xi'an, 710054, China
| | - Ling Wang
- State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710054, China
| | - Jianbing Ma
- Department of Joint Surgery, Honghui Hospital, Health Science Center, Xi'an Jiaotong University, Xi'an, 710054, China
| | - Xuewen Wang
- Frontiers Science Center for Flexible Electronics & Institute of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- MIIT Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- Shaanxi Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
| | - Wei Huang
- Frontiers Science Center for Flexible Electronics & Institute of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- MIIT Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- Shaanxi Key Laboratory of Flexible Electronics, Northwestern Polytechnical University, Xi'an, 710072, China
- State Key Laboratory of Organic Electronics and Information Displays, Institute of Advanced Materials, Nanjing University of Posts & Telecommunications, Nanjing, 210023, China
- Key Laboratory of Flexible Electronics and Institute of Advanced Materials, Nanjing Tech University, Nanjing, 211800, China
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Ma Z, Wang W, Xiong Y, Long Y, Shao Q, Wu L, Wang J, Tian P, Khan AU, Yang W, Dong Y, Yin H, Tang H, Dai J, Tahir M, Liu X, He L. Carbon Micro/Nano Machining toward Miniaturized Device: Structural Engineering, Large-Scale Fabrication, and Performance Optimization. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024:e2400179. [PMID: 39031523 DOI: 10.1002/smll.202400179] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/08/2024] [Revised: 07/03/2024] [Indexed: 07/22/2024]
Abstract
With the rapid development of micro/nano machining, there is an elevated demand for high-performance microdevices with high reliability and low cost. Due to their outstanding electrochemical, optical, electrical, and mechanical performance, carbon materials are extensively utilized in constructing microdevices for energy storage, sensing, and optoelectronics. Carbon micro/nano machining is fundamental in carbon-based intelligent microelectronics, multifunctional integrated microsystems, high-reliability portable/wearable consumer electronics, and portable medical diagnostic systems. Despite numerous reviews on carbon materials, a comprehensive overview is lacking that systematically encapsulates the development of high-performance microdevices based on carbon micro/nano structures, from structural design to manufacturing strategies and specific applications. This review focuses on the latest progress in carbon micro/nano machining toward miniaturized device, including structural engineering, large-scale fabrication, and performance optimization. Especially, the review targets an in-depth evaluation of carbon-based micro energy storage devices, microsensors, microactuators, miniaturized photoresponsive and electromagnetic interference shielding devices. Moreover, it highlights the challenges and opportunities in the large-scale manufacturing of carbon-based microdevices, aiming to spark further exciting research directions and application prospectives.
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Affiliation(s)
- Zeyu Ma
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Wenwu Wang
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Yibo Xiong
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Yihao Long
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Qi Shao
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Leixin Wu
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Jiangwang Wang
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Peng Tian
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Arif Ullah Khan
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Wenhao Yang
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Yixiao Dong
- Pritzker School of Molecular Engineering, University of Chicago, 5640 South Ellis Avenue, Chicago, IL, 60637, USA
| | - Hongbo Yin
- Department of Ophthalmology, West China Hospital, Sichuan University, Chengdu, 610041, P. R. China
| | - Hui Tang
- School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu, 611731, P. R. China
| | - Jun Dai
- School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
| | - Muhammad Tahir
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
- School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China
| | - Xiaoyu Liu
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
| | - Liang He
- School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China
- Med+X Center for Manufacturing, West China Hospital, Sichuan University, Chengdu, 610041, P. R. China
- Yibin Industrial Technology Research Institute of Sichuan University, Yibin R&D Park of Sichuan University, Yibin, 644005, P. R. China
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Xie L, Lei H, Liu Y, Lu B, Qin X, Zhu C, Ji H, Gao Z, Wang Y, Lv Y, Zhao C, Mitrovic IZ, Sun X, Wen Z. Ultrasensitive Wearable Pressure Sensors with Stress-Concentrated Tip-Array Design for Long-Term Bimodal Identification. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024:e2406235. [PMID: 39007254 DOI: 10.1002/adma.202406235] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/01/2024] [Revised: 06/23/2024] [Indexed: 07/16/2024]
Abstract
The great challenges for existing wearable pressure sensors are the degradation of sensing performance and weak interfacial adhesion owing to the low mechanical transfer efficiency and interfacial differences at the skin-sensor interface. Here, an ultrasensitive wearable pressure sensor is reported by introducing a stress-concentrated tip-array design and self-adhesive interface for improving the detection limit. A bipyramidal microstructure with various Young's moduli is designed to improve mechanical transfer efficiency from 72.6% to 98.4%. By increasing the difference in modulus, it also mechanically amplifies the sensitivity to 8.5 V kPa-1 with a detection limit of 0.14 Pa. The self-adhesive hydrogel is developed to strengthen the sensor-skin interface, which allows stable signals for long-term and real-time monitoring. It enables generating high signal-to-noise ratios and multifeatures when wirelessly monitoring weak pulse signals and eye muscle movements. Finally, combined with a deep learning bimodal fused network, the accuracy of fatigued driving identification is significantly increased to 95.6%.
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Affiliation(s)
- Lingjie Xie
- Institute of Functional Nano and Soft Materials (FUNSOM), Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University, Suzhou, 215123, P. R. China
- Department of Applied Mathematics, School of Mathematics and Physics, Xi'an Jiaotong-Liverpool University, Suzhou, 215123, P. R. China
- Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3GJ, UK
| | - Hao Lei
- Institute of Functional Nano and Soft Materials (FUNSOM), Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University, Suzhou, 215123, P. R. China
- Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3GJ, UK
- Department of Electrical and Electronic Engineering, School of Advanced Technology, Xi'an Jiaotong-Liverpool University, Suzhou, 215123, P. R. China
| | - Yina Liu
- Department of Applied Mathematics, School of Mathematics and Physics, Xi'an Jiaotong-Liverpool University, Suzhou, 215123, P. R. China
| | - Bohan Lu
- Department of Applied Mathematics, School of Mathematics and Physics, Xi'an Jiaotong-Liverpool University, Suzhou, 215123, P. R. China
| | - Xuan Qin
- Institute of Functional Nano and Soft Materials (FUNSOM), Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University, Suzhou, 215123, P. R. China
| | - Chengyi Zhu
- Institute of Functional Nano and Soft Materials (FUNSOM), Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University, Suzhou, 215123, P. R. China
| | - Haifeng Ji
- Institute of Functional Nano and Soft Materials (FUNSOM), Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University, Suzhou, 215123, P. R. China
| | - Zhenqiu Gao
- Institute of Functional Nano and Soft Materials (FUNSOM), Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University, Suzhou, 215123, P. R. China
| | - Yifan Wang
- Department of Applied Mathematics, School of Mathematics and Physics, Xi'an Jiaotong-Liverpool University, Suzhou, 215123, P. R. China
| | - Yangyang Lv
- Institute of Functional Nano and Soft Materials (FUNSOM), Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University, Suzhou, 215123, P. R. China
| | - Chun Zhao
- Department of Electrical and Electronic Engineering, School of Advanced Technology, Xi'an Jiaotong-Liverpool University, Suzhou, 215123, P. R. China
| | - Ivona Z Mitrovic
- Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3GJ, UK
| | - Xuhui Sun
- Institute of Functional Nano and Soft Materials (FUNSOM), Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University, Suzhou, 215123, P. R. China
| | - Zhen Wen
- Institute of Functional Nano and Soft Materials (FUNSOM), Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University, Suzhou, 215123, P. R. China
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4
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Kong Y, Cheng G, Zhang M, Zhao Y, Meng W, Tian X, Sun B, Yang F, Wei D. Highly efficient recognition of similar objects based on ionic robotic tactile sensors. Sci Bull (Beijing) 2024; 69:2089-2098. [PMID: 38777681 DOI: 10.1016/j.scib.2024.04.060] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/27/2023] [Revised: 03/05/2024] [Accepted: 04/22/2024] [Indexed: 05/25/2024]
Abstract
Tactile sensing provides robots the ability of object recognition, fine operation, natural interaction, etc. However, in the actual scenario, robotic tactile recognition of similar objects still faces difficulties such as low efficiency and accuracy, resulting from a lack of high-performance sensors and intelligent recognition algorithms. In this paper, a flexible sensor combining a pyramidal microstructure with a gradient conformal ionic gel coating was demonstrated, exhibiting excellent signal-to-noise ratio (48 dB), low detection limit (1 Pa), high sensitivity (92.96 kPa-1), fast response time (55 ms), and outstanding stability over 15,000 compression-release cycles. Furthermore, a Pressure-Slip Dual-Branch Convolutional Neural Network (PSNet) architecture was proposed to separately extract hardness and texture features and perform feature fusion. In tactile experiments on different kinds of leaves, a recognition rate of 97.16% was achieved, and surpassed that of human hands recognition (72.5%). These researches showed the great potential in a broad application in bionic robots, intelligent prostheses, and precise human-computer interaction.
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Affiliation(s)
- Yongkang Kong
- Chongqing Key Laboratory of Generic Technology and System of Service Robots, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China; School of Computer Science and Technology, Chongqing University of Posts and Telecommunications, Chongqing 400065, China
| | - Guanyin Cheng
- Chongqing Key Laboratory of Generic Technology and System of Service Robots, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China
| | - Mengqin Zhang
- Chongqing Key Laboratory of Generic Technology and System of Service Robots, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China
| | - Yongting Zhao
- Chongqing Key Laboratory of Generic Technology and System of Service Robots, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China
| | - Wujun Meng
- Chongqing Key Laboratory of Generic Technology and System of Service Robots, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China; School of Computer Science and Technology, Chongqing University of Posts and Telecommunications, Chongqing 400065, China
| | - Xin Tian
- Chongqing Key Laboratory of Generic Technology and System of Service Robots, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China
| | - Bihao Sun
- Chongqing Key Laboratory of Generic Technology and System of Service Robots, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China
| | - Fuping Yang
- School of Computer Science and Technology, Chongqing University of Posts and Telecommunications, Chongqing 400065, China
| | - Dapeng Wei
- Chongqing Key Laboratory of Generic Technology and System of Service Robots, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China; School of Computer Science and Technology, Chongqing University of Posts and Telecommunications, Chongqing 400065, China.
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5
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Yang J, Yuan G, Shen Y, Guo C, Li Z, Yan F, Chen X, Mei L, Wang T. Pushing Pressure Detection Sensitivity to New Limits by Modulus-Tunable Mechanism. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024:e2403779. [PMID: 38978349 DOI: 10.1002/advs.202403779] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/14/2024] [Revised: 06/15/2024] [Indexed: 07/10/2024]
Abstract
Only microstructures are used to improve the sensitivity of iontronic pressure sensors. By modulating the compressive modulus, a breakthrough in the sensitivity of the iontronic pressure sensor is achieved. Furthermore, it allows for programmatic tailoring of sensor performance according to the requirements of different applications. Such a new strategy pushes the sensitivity up to a record-high of 25 548.24 kPa-1 and expands the linear pressure range from 15 to 127 kPa. Additionally, the sensor demonstrates excellent mechanical stability over 10 000 compression-release cycles. Based on this, a well-controlled robotic hand that precisely tracks the pressure behavior inside a balloon to autonomously regulate the gripping angle is developed. This paves the way for the application of iontronic pressure sensors in precise sensing scenarios.
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Affiliation(s)
- Jing Yang
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
| | - Guojiang Yuan
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
| | - Yong Shen
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
| | - Caili Guo
- State Key Laboratory of Powder Metallurgy, Central South University, Changsha, Hunan, 410083, P. R. China
| | - Zhibin Li
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
| | - Fengling Yan
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
| | - Xiaolong Chen
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
| | - Lin Mei
- State Key Laboratory of Powder Metallurgy, Central South University, Changsha, Hunan, 410083, P. R. China
| | - Taihong Wang
- Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
- School of Microelectronics, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, P. R. China
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Huang Z, Yu S, Xu Y, Cao Z, Zhang J, Guo Z, Wu T, Liao Q, Zheng Y, Chen Z, Liao X. In-Sensor Tactile Fusion and Logic for Accurate Intention Recognition. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024:e2407329. [PMID: 38966893 DOI: 10.1002/adma.202407329] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/22/2024] [Revised: 06/28/2024] [Indexed: 07/06/2024]
Abstract
Touch control intention recognition is an important direction for the future development of human-machine interactions (HMIs). However, the implementation of parallel-sensing functional modules generally requires a combination of different logical blocks and control circuits, which results in regional redundancy, redundant data, and low efficiency. Here, a location-and-pressure intelligent tactile sensor (LPI tactile sensor) unprecedentedly combined with sensing, computing, and logic is proposed, enabling efficient and ultrahigh-resolution action-intention interaction. The LPI tactile sensor eliminates the need for data transfer among the functional units through the core integration design of the layered structure. It actuates in-sensor perception through feature transmission, fusion, and differentiation, thereby revolutionizing the traditional von Neumann architecture. While greatly simplifying the data dimensionality, the LPI tactile sensor achieves outstanding resolution sensing in both location (<400 µm) and pressure (75 Pa). Synchronous feature fusion and decoding support the high-fidelity recognition of action and combinatorial logic intentions. Benefiting from location and pressure synergy, the LPI tactile sensor demonstrates robust privacy as an encrypted password device and interaction intelligence through pressure enhancement. It can recognize continuous touch actions in real time, map real intentions to target events, and promote accurate and efficient intention-driven HMIs.
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Affiliation(s)
- Zijian Huang
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Shifan Yu
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Yijing Xu
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Zhicheng Cao
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Jinwei Zhang
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Ziquan Guo
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Tingzhu Wu
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Qingliang Liao
- Academy for Advanced Interdisciplinary Science and Technology, Key Laboratory of Advanced Materials and Devices for Post-Moore Chips Ministry of Education, University of Science and Technology Beijing, Beijing, 100083, China
- Beijing Key Laboratory for Advanced Energy Materials and Technologies, School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing, 100083, China
| | - Yuanjin Zheng
- School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798, Singapore
| | - Zhong Chen
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
| | - Xinqin Liao
- Department of Electronic Science, Xiamen University, Xiamen, 361005, China
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7
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Xiong W, Zhang F, Qu S, Yin L, Li K, Huang Y. Marangoni-driven deterministic formation of softer, hollow microstructures for sensitivity-enhanced tactile system. Nat Commun 2024; 15:5596. [PMID: 38961075 PMCID: PMC11222500 DOI: 10.1038/s41467-024-49864-z] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/03/2023] [Accepted: 06/18/2024] [Indexed: 07/05/2024] Open
Abstract
Microengineering the dielectric layers with three-dimensional microstructures has proven effective in enhancing the sensitivity of flexible pressure sensors. However, the widely employed geometrical designs of solid microstructures exhibit limited sensitivity over a wide range of pressures due to their inherent but undesired structural compressibility. Here, a Marangoni-driven deterministic formation approach is proposed for fabricating hollow microstructures, allowing for greater deformation while retarding structural stiffening during compression. Fluid convective deposition enables solute particles to reassemble in template microstructures, controlling the interior cavity with a void ratio exceeding 90%. The hollow micro-pyramid sensor exhibits a 10-fold sensitivity improvement across wider pressure ranges over the pressure sensor utilizing solid micro-pyramids, and an ultra-low detect limit of 0.21 Pa. With the advantages of facilitation, scalability, and large-area compatibility, such an approach for hollow microstructures can be expanded to other sensor types for superior performance and has considerable potential in robotic tactile and epidermal devices.
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Affiliation(s)
- Wennan Xiong
- State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, P.R. China
- Flexible Electronics Research Center, Huazhong University of Science and Technology, Wuhan, 430074, P.R. China
| | - Fan Zhang
- State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, P.R. China.
- Flexible Electronics Research Center, Huazhong University of Science and Technology, Wuhan, 430074, P.R. China.
| | - Shiyuan Qu
- State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, P.R. China
- Flexible Electronics Research Center, Huazhong University of Science and Technology, Wuhan, 430074, P.R. China
| | - Liting Yin
- State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, P.R. China
- Flexible Electronics Research Center, Huazhong University of Science and Technology, Wuhan, 430074, P.R. China
| | - Kan Li
- State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, P.R. China
- Flexible Electronics Research Center, Huazhong University of Science and Technology, Wuhan, 430074, P.R. China
| | - YongAn Huang
- State Key Laboratory of Intelligent Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, P.R. China.
- Flexible Electronics Research Center, Huazhong University of Science and Technology, Wuhan, 430074, P.R. China.
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8
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Zhou W, Yu Y, Xiao P, Deng F, Zhang Y, Chen T. A Suspended, 3D Morphing Sensory System for Robots to Feel and Protect. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2403447. [PMID: 38728424 DOI: 10.1002/adma.202403447] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/07/2024] [Revised: 04/22/2024] [Indexed: 05/12/2024]
Abstract
Artificial sensory systems with synergistic touch and pain perception hold substantial promise for environment interaction and human-robot communication. However, the realization of biological skin-like functional integration of sensors with sensitive touch and pain perception still remains a challenge. Here, a concept is proposed of suspended electronic skins enabling 3D deformation-mechanical contact interactions for achieving synergetic ultrasensitive touch and adjustable pain perception. The suspended sensory system can sensitively capture tiny touch stimuli as low as 0.02 Pa and actively perceive pain response with reliable 5200 cycles via 3D deformation and mechanical contact mechanism, respectively. Based on the touch-pain effect, a visualized feedback demo with miniaturized sensor arrays on artificial fingers is rationally designed to give a pain perception mapping on sharp surfaces. Furthermore, the capability is shown of the suspended electronic skin serving as a safe human-robot communication interface from active and passive view through a feedback control system, demonstrating potential in bionic electronics and intelligent robotics.
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Affiliation(s)
- Wei Zhou
- Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, China
- School of Chemical Sciences, University of Chinese Academy of Sciences, 19A Yuquan Road, Beijing, 100049, China
| | - Yi Yu
- Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, China
- School of Chemical Sciences, University of Chinese Academy of Sciences, 19A Yuquan Road, Beijing, 100049, China
| | - Peng Xiao
- Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, China
- School of Chemical Sciences, University of Chinese Academy of Sciences, 19A Yuquan Road, Beijing, 100049, China
| | - Feng Deng
- Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, China
- School of Chemical Sciences, University of Chinese Academy of Sciences, 19A Yuquan Road, Beijing, 100049, China
| | - Yi Zhang
- Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, China
- School of Chemical Sciences, University of Chinese Academy of Sciences, 19A Yuquan Road, Beijing, 100049, China
| | - Tao Chen
- Key Laboratory of Advanced Marine Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, 315201, China
- School of Chemical Sciences, University of Chinese Academy of Sciences, 19A Yuquan Road, Beijing, 100049, China
- College of Material Chemistry and Chemical Engineering, Key Laboratory of Organosilicon Chemistry and Material Technology, Ministry of Education, Hangzhou Normal University, Hangzhou, Zhejiang, 311121, China
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9
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Wang Y, Zhao J, Zeng X, Huang J, Wen Y, Brugger J, Zhang X. All-Printed Finger-Inspired Tactile Sensor Array for Microscale Texture Detection and 3D Reconstruction. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024; 11:e2400479. [PMID: 38696643 PMCID: PMC11234443 DOI: 10.1002/advs.202400479] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/12/2024] [Revised: 04/18/2024] [Indexed: 05/04/2024]
Abstract
Electronic skins are expected to replicate a human-like tactile sense, which significantly detects surface information, including geometry, material, and temperature. Although most texture features can be sensed in the horizontal direction, the lack of effective approaches for detecting vertical properties limits the development of artificial skin based on tactile sensors. In this study, an all-printed finger-inspired tactile sensor array is developed to realize the 3D detection and reconstruction of microscale structures. A beam structure with a suspended multilayer membrane is proposed, and a tactile sensor array of 12 units arranged in a dual-column layout is developed. This architecture enables the tactile sensor array to obtain comprehensive geometric information of micro-textures, including 3D morphology and clearance characteristics, and optimizes the 3D reconstruction patterns by self-calibration. Moreover, an innovative screen-printing technology incorporating multilayer printing and sacrificial-layer techniques is adopted to print the entire device. In additon, a Braille recognition system utilizing this tactile sensor array is developed to interpret Shakespeare's quotes printed in Grade 2 Braille. The abovementioned demonstrations reveal an attractive future vision for endowing bioinspired robots with the unique capability of touching and feeling the microscale real world and reconstructing it in the cyber world.
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Affiliation(s)
- Yilin Wang
- School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 611731, China
| | - Jiafeng Zhao
- School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 611731, China
| | - Xu Zeng
- School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 611731, China
| | - Jingwen Huang
- School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 611731, China
| | - Yading Wen
- School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 611731, China
| | - Juergen Brugger
- Microsystems Laboratory, Ecole Polytechnique Fédérale de Lausanne, Lausanne, 1015, Switzerland
| | - Xiaosheng Zhang
- School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 611731, China
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10
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Wu XP, Luo XM, Chen HL, Man Y, Bai YY, Qin TZ, Zhang B, Zhang GP. Fatigue crack-based strain sensors achieving flow detection and motion monitoring for reconnaissance robot applications. MATERIALS HORIZONS 2024. [PMID: 38915265 DOI: 10.1039/d4mh00419a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/26/2024]
Abstract
Crack-based flexible strain sensors with ultra-high sensitivity under tiny strain are highly desired for environmental perception and motion detection of novel flexible and miniature robots. However, previously reported methods for fabricating crack patterns have often sacrificed the cyclic stability of the sensor, leading to a trade-off relationship between the sensitivity and the cyclic stability. Here, a universal and simple strategy based on fatigue loading with an ultra-large cumulative strain of up to ∼1.2 × 107%, rather than the traditionally quasi-static pre-overloading methods, is proposed to introduce channel cracks in the sensing layer without sacrificing the cyclic stability. The developed flexible strain sensors exhibit high strain-sensitivity (gauge factor = 5798) under tiny strain (< 3%), high cyclic stability (15 000 cycles) and a low strain detecting limit (0.02%). Furthermore, a leaf-like mechanosensor is developed using the fatigue crack-based strain sensor for the realization of multifunctional applications in environment perception and micro-motion detection. Brilliant airflow sensing performance with a wide sensing range (0.93-11.93 m s-1) and a fast response time (0.28 s) for amphibious applications is demonstrated. This work provides a new strategy for overcoming limits of crack-based flexible strain sensors and the developed leaf-like mechanosensor shows great application potential in miniature and flexible reconnaissance robots.
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Affiliation(s)
- Xu-Ping Wu
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China.
- School of Materials Science and Engineering, University of Science and Technology of China, 72 Wenhua Road, Shenyang 110016, China
| | - Xue-Mei Luo
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China.
| | - Hong-Lei Chen
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China.
| | - Yi Man
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China.
- School of Materials Science and Engineering, University of Science and Technology of China, 72 Wenhua Road, Shenyang 110016, China
| | - Yao-Yao Bai
- Key Laboratory for Anisotropy and Texture of Materials, Ministry of Education, School of Materials Science and Engineering, Northeastern University, 3-11 Wenhua Road, Shenyang 110819, China
| | - Tian-Ze Qin
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China.
- School of Materials Science and Engineering, University of Science and Technology of China, 72 Wenhua Road, Shenyang 110016, China
| | - Bin Zhang
- Key Laboratory for Anisotropy and Texture of Materials, Ministry of Education, School of Materials Science and Engineering, Northeastern University, 3-11 Wenhua Road, Shenyang 110819, China
| | - Guang-Ping Zhang
- Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China.
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11
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Li Z, Li K, Wang W, Zhang T, Yang X. Ultrawide linear range, high sensitivity, and large-area pressure sensor arrays enabled by pneumatic spraying broccoli-like microstructures. MATERIALS HORIZONS 2024; 11:2271-2280. [PMID: 38439709 DOI: 10.1039/d3mh02232c] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 03/06/2024]
Abstract
Large-area pressure sensor arrays with a wide linear response range and high sensitivity are beneficial to map the inhomogeneous interface pressure, which is significant in practical applications. Here, we demonstrate a pneumatic spraying method to prepare large-area microstructure films (PSMF) for high performance pressure sensor arrays. The sprayed surface morphology is designable by controlling the spraying parameters. It is worth noting that the constructed "broccoli" like morphology with a swollen top and shrunken bottom inspired a new mechanism to enlarge the linear response range by decreasing the series resistance with pressure increasing. At the same time, the pneumatic sprayed "broccoli" has a rough surface due to droplet stacking, which reduces the initial current effectively. Hence, the sensor achieves a 10 000 kPa ultrawide linear response range with a high sensitivity (98.71 kPa-1), and low detection (5 Pa). The prepared sensor has a small static response error (4.4%) and 5000 cycle full-range dynamic response durability. Finally, the constructed sensor arrays can distinguish the pressure distribution in different ranges clearly, which indicates a great potential in health care, motion detection, and the tire industry.
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Affiliation(s)
- Zonglin Li
- State Key Laboratory of Polymer Physics and Chemistry, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China.
- School of Applied Chemistry and Engineering, University of Science and Technology of China, Hefei, 230026, China
- CAS Key Laboratory of High-Performance Synthetic Rubber and its Composite Materials, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China
| | - Kun Li
- State Key Laboratory of Polymer Physics and Chemistry, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China.
- School of Applied Chemistry and Engineering, University of Science and Technology of China, Hefei, 230026, China
- CAS Key Laboratory of High-Performance Synthetic Rubber and its Composite Materials, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China
| | - Weiwei Wang
- State Key Laboratory of Polymer Physics and Chemistry, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China.
- School of Applied Chemistry and Engineering, University of Science and Technology of China, Hefei, 230026, China
- CAS Key Laboratory of High-Performance Synthetic Rubber and its Composite Materials, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China
| | - Tong Zhang
- State Key Laboratory of Polymer Physics and Chemistry, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China.
- School of Applied Chemistry and Engineering, University of Science and Technology of China, Hefei, 230026, China
- Huangpu Institute of Materials, Changchun Institute of Applied Chemistry, Chinese Academy of Science, Guangzhou 510530, China
| | - Xiaoniu Yang
- State Key Laboratory of Polymer Physics and Chemistry, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China.
- School of Applied Chemistry and Engineering, University of Science and Technology of China, Hefei, 230026, China
- CAS Key Laboratory of High-Performance Synthetic Rubber and its Composite Materials, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China
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12
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Huang X, Bu T, Zheng Q, Liu S, Li Y, Fang H, Qiu Y, Xie B, Yin Z, Wu H. Flexible sensors with zero Poisson's ratio. Natl Sci Rev 2024; 11:nwae027. [PMID: 38577662 PMCID: PMC10989663 DOI: 10.1093/nsr/nwae027] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/27/2023] [Revised: 11/23/2023] [Accepted: 01/14/2024] [Indexed: 04/06/2024] Open
Abstract
Flexible sensors have been developed for the perception of various stimuli. However, complex deformation, usually resulting from forces or strains from multi-axes, can be challenging to measure due to the lack of independent perception of multiaxial stimuli. Herein, flexible sensors based on the metamaterial membrane with zero Poisson's ratio (ZPR) are proposed to achieve independent detection of biaxial stimuli. By deliberately designing the geometric dimensions and arrangement parameters of elements, the Poisson's ratio of an elastomer membrane can be modulated from negative to positive, and the ZPR membrane can maintain a constant transverse dimension under longitudinal stimuli. Due to the accurate monitoring of grasping force by ZPR sensors that are insensitive to curvatures of contact surfaces, rigid robotic manipulators can be guided to safely grasp deformable objects. Meanwhile, the ZPR sensor can also precisely distinguish different states of manipulators. When ZPR sensors are attached to a thermal-actuation soft robot, they can accurately detect the moving distance and direction. This work presents a new strategy for independent biaxial stimuli perception through the design of mechanical metamaterials, and may inspire the future development of advanced flexible sensors for healthcare, human-machine interfaces and robotic tactile sensing.
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Affiliation(s)
- Xin Huang
- Department of Mechanical Engineering, Flexible Electronics Research Center, State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Tianzhao Bu
- Department of Mechanical Engineering, Flexible Electronics Research Center, State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Qingyang Zheng
- Department of Mechanical Engineering, Flexible Electronics Research Center, State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Shaoyu Liu
- Department of Mechanical Engineering, Flexible Electronics Research Center, State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Yangyang Li
- Department of Mechanical Engineering, Flexible Electronics Research Center, State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Han Fang
- Department of Mechanical Engineering, Flexible Electronics Research Center, State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Yuqi Qiu
- Department of Mechanical Engineering, Flexible Electronics Research Center, State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Bin Xie
- Department of Mechanical Engineering, Flexible Electronics Research Center, State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Zhouping Yin
- Department of Mechanical Engineering, Flexible Electronics Research Center, State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
| | - Hao Wu
- Department of Mechanical Engineering, Flexible Electronics Research Center, State Key Laboratory of Intelligent Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
- Department of Electronic Science and Technology, School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan 430074, China
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13
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Papani R, Li Y, Wang S. Soft mechanical sensors for wearable and implantable applications. WILEY INTERDISCIPLINARY REVIEWS. NANOMEDICINE AND NANOBIOTECHNOLOGY 2024; 16:e1961. [PMID: 38723798 PMCID: PMC11108230 DOI: 10.1002/wnan.1961] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/24/2023] [Revised: 04/04/2024] [Accepted: 04/07/2024] [Indexed: 05/23/2024]
Abstract
Wearable and implantable sensing of biomechanical signals such as pressure, strain, shear, and vibration can enable a multitude of human-integrated applications, including on-skin monitoring of vital signs, motion tracking, monitoring of internal organ condition, restoration of lost/impaired mechanoreception, among many others. The mechanical conformability of such sensors to the human skin and tissue is critical to enhancing their biocompatibility and sensing accuracy. As such, in the recent decade, significant efforts have been made in the development of soft mechanical sensors. To satisfy the requirements of different wearable and implantable applications, such sensors have been imparted with various additional properties to make them better suited for the varied contexts of human-integrated applications. In this review, focusing on the four major types of soft mechanical sensors for pressure, strain, shear, and vibration, we discussed the recent material and device design innovations for achieving several important properties, including flexibility and stretchability, bioresorbability and biodegradability, self-healing properties, breathability, transparency, wireless communication capabilities, and high-density integration. We then went on to discuss the current research state of the use of such novel soft mechanical sensors in wearable and implantable applications, based on which future research needs were further discussed. This article is categorized under: Diagnostic Tools > Biosensing Diagnostic Tools > Diagnostic Nanodevices Implantable Materials and Surgical Technologies > Nanomaterials and Implants.
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Affiliation(s)
- Rithvik Papani
- Pritzker School of Molecular Engineering, The University of Chicago, Chicago, Illinois, USA
| | - Yang Li
- Pritzker School of Molecular Engineering, The University of Chicago, Chicago, Illinois, USA
| | - Sihong Wang
- Pritzker School of Molecular Engineering, The University of Chicago, Chicago, Illinois, USA
- Nanoscience and Technology Division and Center for Molecular Engineering, Argonne National Laboratory, Lemont, Illinois, United States
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14
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Liu Y, Tao J, Mo Y, Bao R, Pan C. Ultrasensitive Touch Sensor for Simultaneous Tactile and Slip Sensing. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2313857. [PMID: 38335503 DOI: 10.1002/adma.202313857] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/18/2023] [Revised: 02/05/2024] [Indexed: 02/12/2024]
Abstract
Touch is a general term to describe mechanical stimuli. It is extremely difficult to develop touch sensors that can detect different modes of contact forces due to their low sensitivity and data decoupling. Simultaneously conducting tactile and slip sensing presents significant challenges for the design, structure, and performance of sensors. In this work, a highly sensitive sandwich-structured sensor is achieved by exploiting the porosity and compressive modulus of the sensor's functional layer materials. The sensor shows an ultra-high sensitivity of 1167 kPa-1 and a low-pressure detection limit of 1.34 Pa due to its considerably low compression modulus of 23.8 Pa. Due to this ultra-high sensitivity, coupled with spectral analysis, it allows for dual-mode detection of both tactile and slip sensations simultaneously. This novel fabrication strategy and signal analysis method provides a new direction for the development of tactile/slip sensors.
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Affiliation(s)
- Yue Liu
- Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 101400, China
| | - Juan Tao
- Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 101400, China
| | - Yepei Mo
- Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 101400, China
| | - Rongrong Bao
- Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 101400, China
- Institute of Atomic Manufacturing, Beihang University, Beijing, 100191, P. R. China
| | - Caofeng Pan
- Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, 101400, China
- Institute of Atomic Manufacturing, Beihang University, Beijing, 100191, P. R. China
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15
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Wang S, Yao Y, Deng W, Chu X, Yang T, Tian G, Ao Y, Sun Y, Lan B, Ren X, Li X, Xu T, Huang L, Liu Y, Lu J, Yang W. Mass-Produced Skin-Inspired Piezoresistive Sensing Array with Interlocking Interface for Object Recognition. ACS NANO 2024; 18:11183-11192. [PMID: 38630641 DOI: 10.1021/acsnano.4c00112] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/19/2024]
Abstract
E-skins, capable of responding to mechanical stimuli, hold significant potential in the field of robot haptics. However, it is a challenge to obtain e-skins with both high sensitivity and mechanical stability. Here, we present a bioinspired piezoresistive sensor with hierarchical structures based on polyaniline/polystyrene core-shell nanoparticles polymerized on air-laid paper. The combination of laser-etched reusable templates and sensitive materials that can be rapidly synthesized enables large-scale production. Benefiting from the substantially enlarged deformation of the hierarchical structure, the developed piezoresistive electronics exhibit a decent sensitivity of 21.67 kPa-1 and a subtle detection limit of 3.4 Pa. Moreover, an isolation layer is introduced to enhance the interface stability of the e-skin, with a fracture limit of 66.34 N/m. Furthermore, the e-skin can be seamlessly integrated onto gloves without any detachment issues. With the assistance of deep learning, it achieves a 98% accuracy rate in object recognition. We anticipate that this strategy will render e-skin with more robust interfaces and heightened sensing capabilities, offering a favorable pathway for large-scale production.
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Affiliation(s)
- Shenglong Wang
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
- School of Chemistry, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Yelan Yao
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Weili Deng
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Xiang Chu
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Tao Yang
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Guo Tian
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Yong Ao
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Yue Sun
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Boling Lan
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Xiarong Ren
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Xuelan Li
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Tianpei Xu
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Longchao Huang
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Yang Liu
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Jun Lu
- School of Chemistry, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
| | - Weiqing Yang
- Key Laboratory of Advanced Technologies of Materials (Ministry of Education), School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
- Research Institute of Frontier Science, Southwest Jiaotong University, Chengdu, Sichuan 610031, People's Republic of China
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16
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Shi Y, Shen G. Haptic Sensing and Feedback Techniques toward Virtual Reality. RESEARCH (WASHINGTON, D.C.) 2024; 7:0333. [PMID: 38533183 PMCID: PMC10964227 DOI: 10.34133/research.0333] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/02/2023] [Accepted: 02/10/2024] [Indexed: 03/28/2024]
Abstract
Haptic interactions between human and machines are essential for information acquisition and object manipulation. In virtual reality (VR) system, the haptic sensing device can gather information to construct virtual elements, while the haptic feedback part can transfer feedbacks to human with virtual tactile sensation. Therefore, exploring high-performance haptic sensing and feedback interface imparts closed-loop haptic interaction to VR system. This review summarizes state-of-the-art VR-related haptic sensing and feedback techniques based on the hardware parts. For the haptic sensor, we focus on mechanism scope (piezoresistive, capacitive, piezoelectric, and triboelectric) and introduce force sensor, gesture translation, and touch identification in the functional view. In terms of the haptic feedbacks, methodologies including mechanical, electrical, and elastic actuators are surveyed. In addition, the interactive application of virtual control, immersive entertainment, and medical rehabilitation is also summarized. The challenges of virtual haptic interactions are given including the accuracy, durability, and technical conflicts of the sensing devices, bottlenecks of various feedbacks, as well as the closed-loop interaction system. Besides, the prospects are outlined in artificial intelligence of things, wise information technology of medicine, and multimedia VR areas.
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Affiliation(s)
- Yuxiang Shi
- School of Integrated Circuits and Electronics,
Beijing Institute of Technology, Beijing 100081, China
- Institute of Flexible Electronics,
Beijing Institute of Technology, Beijing 102488, China
| | - Guozhen Shen
- School of Integrated Circuits and Electronics,
Beijing Institute of Technology, Beijing 100081, China
- Institute of Flexible Electronics,
Beijing Institute of Technology, Beijing 102488, China
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17
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Lin S, Yang W, Zhu X, Lan Y, Li K, Zhang Q, Li Y, Hou C, Wang H. Triboelectric micro-flexure-sensitive fiber electronics. Nat Commun 2024; 15:2374. [PMID: 38490979 PMCID: PMC10943239 DOI: 10.1038/s41467-024-46516-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/12/2023] [Accepted: 02/29/2024] [Indexed: 03/18/2024] Open
Abstract
Developing fiber electronics presents a practical approach for establishing multi-node distributed networks within the human body, particularly concerning triboelectric fibers. However, realizing fiber electronics for monitoring micro-physiological activities remains challenging due to the intrinsic variability and subtle amplitude of physiological signals, which differ among individuals and scenarios. Here, we propose a technical approach based on a dynamic stability model of sheath-core fibers, integrating a micro-flexure-sensitive fiber enabled by nanofiber buckling and an ion conduction mechanism. This scheme enhances the accuracy of the signal transmission process, resulting in improved sensitivity (detectable signal at ultra-low curvature of 0.1 mm-1; flexure factor >21.8% within a bending range of 10°.) and robustness of fiber under micro flexure. In addition, we also developed a scalable manufacturing process and ensured compatibility with modern weaving techniques. By combining precise micro-curvature detection, micro-flexure-sensitive fibers unlock their full potential for various subtle physiological diagnoses, particularly in monitoring fiber upper limb muscle strength for rehabilitation and training.
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Affiliation(s)
- Shaomei Lin
- State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, College of Materials Science and Engineering, Donghua University, Shanghai, 201620, P. R. China
| | - Weifeng Yang
- State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, College of Materials Science and Engineering, Donghua University, Shanghai, 201620, P. R. China
| | - Xubin Zhu
- State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, College of Materials Science and Engineering, Donghua University, Shanghai, 201620, P. R. China
| | - Yubin Lan
- School of Software, Shanghai Jiao Tong University, Shanghai, 200240, P. R. China
| | - Kerui Li
- State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, College of Materials Science and Engineering, Donghua University, Shanghai, 201620, P. R. China
| | - Qinghong Zhang
- Engineering Research Center of Advanced Glasses Manufacturing Technology, Ministry of Education, Donghua University, Shanghai, 201620, P. R. China
| | - Yaogang Li
- Engineering Research Center of Advanced Glasses Manufacturing Technology, Ministry of Education, Donghua University, Shanghai, 201620, P. R. China
| | - Chengyi Hou
- State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, College of Materials Science and Engineering, Donghua University, Shanghai, 201620, P. R. China.
| | - Hongzhi Wang
- State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, College of Materials Science and Engineering, Donghua University, Shanghai, 201620, P. R. China.
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18
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Park J, Lee Y, Cho S, Choe A, Yeom J, Ro YG, Kim J, Kang DH, Lee S, Ko H. Soft Sensors and Actuators for Wearable Human-Machine Interfaces. Chem Rev 2024; 124:1464-1534. [PMID: 38314694 DOI: 10.1021/acs.chemrev.3c00356] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/07/2024]
Abstract
Haptic human-machine interfaces (HHMIs) combine tactile sensation and haptic feedback to allow humans to interact closely with machines and robots, providing immersive experiences and convenient lifestyles. Significant progress has been made in developing wearable sensors that accurately detect physical and electrophysiological stimuli with improved softness, functionality, reliability, and selectivity. In addition, soft actuating systems have been developed to provide high-quality haptic feedback by precisely controlling force, displacement, frequency, and spatial resolution. In this Review, we discuss the latest technological advances of soft sensors and actuators for the demonstration of wearable HHMIs. We particularly focus on highlighting material and structural approaches that enable desired sensing and feedback properties necessary for effective wearable HHMIs. Furthermore, promising practical applications of current HHMI technology in various areas such as the metaverse, robotics, and user-interactive devices are discussed in detail. Finally, this Review further concludes by discussing the outlook for next-generation HHMI technology.
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Affiliation(s)
- Jonghwa Park
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Youngoh Lee
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Seungse Cho
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Ayoung Choe
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Jeonghee Yeom
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Yun Goo Ro
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Jinyoung Kim
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Dong-Hee Kang
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Seungjae Lee
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Hyunhyub Ko
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
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19
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Liu A, Zhang X, Liu Z, Li Y, Peng X, Li X, Qin Y, Hu C, Qiu Y, Jiang H, Wang Y, Li Y, Tang J, Liu J, Guo H, Deng T, Peng S, Tian H, Ren TL. The Roadmap of 2D Materials and Devices Toward Chips. NANO-MICRO LETTERS 2024; 16:119. [PMID: 38363512 PMCID: PMC10873265 DOI: 10.1007/s40820-023-01273-5] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/30/2023] [Accepted: 10/30/2023] [Indexed: 02/17/2024]
Abstract
Due to the constraints imposed by physical effects and performance degradation, silicon-based chip technology is facing certain limitations in sustaining the advancement of Moore's law. Two-dimensional (2D) materials have emerged as highly promising candidates for the post-Moore era, offering significant potential in domains such as integrated circuits and next-generation computing. Here, in this review, the progress of 2D semiconductors in process engineering and various electronic applications are summarized. A careful introduction of material synthesis, transistor engineering focused on device configuration, dielectric engineering, contact engineering, and material integration are given first. Then 2D transistors for certain electronic applications including digital and analog circuits, heterogeneous integration chips, and sensing circuits are discussed. Moreover, several promising applications (artificial intelligence chips and quantum chips) based on specific mechanism devices are introduced. Finally, the challenges for 2D materials encountered in achieving circuit-level or system-level applications are analyzed, and potential development pathways or roadmaps are further speculated and outlooked.
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Affiliation(s)
- Anhan Liu
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100049, People's Republic of China
| | - Xiaowei Zhang
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100049, People's Republic of China
| | - Ziyu Liu
- School of Microelectronics, Fudan University, Shanghai, 200433, People's Republic of China
| | - Yuning Li
- School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing, 100044, People's Republic of China
| | - Xueyang Peng
- High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, People's Republic of China
- School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing, 100049, People's Republic of China
| | - Xin Li
- State Key Laboratory of Dynamic Measurement Technology, Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan, 030051, People's Republic of China
| | - Yue Qin
- State Key Laboratory of Dynamic Measurement Technology, Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan, 030051, People's Republic of China
| | - Chen Hu
- High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, People's Republic of China
- School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing, 100049, People's Republic of China
| | - Yanqing Qiu
- High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, People's Republic of China
- School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing, 100049, People's Republic of China
| | - Han Jiang
- School of Microelectronics, Fudan University, Shanghai, 200433, People's Republic of China
| | - Yang Wang
- School of Microelectronics, Fudan University, Shanghai, 200433, People's Republic of China
| | - Yifan Li
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100049, People's Republic of China
| | - Jun Tang
- State Key Laboratory of Dynamic Measurement Technology, Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan, 030051, People's Republic of China
| | - Jun Liu
- State Key Laboratory of Dynamic Measurement Technology, Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan, 030051, People's Republic of China
| | - Hao Guo
- State Key Laboratory of Dynamic Measurement Technology, Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan, 030051, People's Republic of China.
| | - Tao Deng
- School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing, 100044, People's Republic of China.
| | - Songang Peng
- High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, People's Republic of China.
- IMECAS-HKUST-Joint Laboratory of Microelectronics, Beijing, 100029, People's Republic of China.
| | - He Tian
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100049, People's Republic of China.
| | - Tian-Ling Ren
- School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100049, People's Republic of China.
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20
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Shao B, Lu MH, Wu TC, Peng WC, Ko TY, Hsiao YC, Chen JY, Sun B, Liu R, Lai YC. Large-area, untethered, metamorphic, and omnidirectionally stretchable multiplexing self-powered triboelectric skins. Nat Commun 2024; 15:1238. [PMID: 38336848 PMCID: PMC10858173 DOI: 10.1038/s41467-024-45611-6] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/08/2023] [Accepted: 01/30/2024] [Indexed: 02/12/2024] Open
Abstract
Large-area metamorphic stretchable sensor networks are desirable in haptic sensing and next-generation electronics. Triboelectric nanogenerator-based self-powered tactile sensors in single-electrode mode constitute one of the best solutions with ideal attributes. However, their large-area multiplexing utilizations are restricted by severe misrecognition between sensing nodes and high-density internal circuits. Here, we provide an electrical signal shielding strategy delivering a large-area multiplexing self-powered untethered triboelectric electronic skin (UTE-skin) with an ultralow misrecognition rate (0.20%). An omnidirectionally stretchable carbon black-Ecoflex composite-based shielding layer is developed to effectively attenuate electrostatic interference from wirings, guaranteeing low-level noise in sensing matrices. UTE-skin operates reliably under 100% uniaxial, 100% biaxial, and 400% isotropic strains, achieving high-quality pressure imaging and multi-touch real-time visualization. Smart gloves for tactile recognition, intelligent insoles for gait analysis, and deformable human-machine interfaces are demonstrated. This work signifies a substantial breakthrough in haptic sensing, offering solutions for the previously challenging issue of large-area multiplexing sensing arrays.
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Affiliation(s)
- Beibei Shao
- Soochow Institute of Energy and Material Innovations, Key Laboratory for Advanced Carbon Materials and Wearable Energy Technologies of Jiangsu Province, Institute of Functional Nano & Soft Materials (FUNSOM) and College of Energy, Soochow University, Suzhou, 215006, PR China
- Jiangsu Key Laboratory of Advanced Negative Carbon Technologies, Soochow University, Suzhou, 215123, PR China
| | - Ming-Han Lu
- Department of Materials Science and Engineering, National Chung Hsing University, Taichung, 40227, Taiwan
| | - Tai-Chen Wu
- Department of Materials Science and Engineering, National Chung Hsing University, Taichung, 40227, Taiwan
| | - Wei-Chen Peng
- Department of Materials Science and Engineering, National Chung Hsing University, Taichung, 40227, Taiwan
| | - Tien-Yu Ko
- Department of Materials Science and Engineering, National Chung Hsing University, Taichung, 40227, Taiwan
| | - Yung-Chi Hsiao
- Department of Materials Science and Engineering, National Chung Hsing University, Taichung, 40227, Taiwan
| | - Jiann-Yeu Chen
- Innovation and Development Center of Sustainable Agriculture, i-Center for Advanced Science and Technology, National Chung Hsing University, Taichung, 40227, Taiwan
| | - Baoquan Sun
- Soochow Institute of Energy and Material Innovations, Key Laboratory for Advanced Carbon Materials and Wearable Energy Technologies of Jiangsu Province, Institute of Functional Nano & Soft Materials (FUNSOM) and College of Energy, Soochow University, Suzhou, 215006, PR China.
- Jiangsu Key Laboratory of Advanced Negative Carbon Technologies, Soochow University, Suzhou, 215123, PR China.
- Macau Institute of Materials Science and Engineering MUST-SUDA Joint Research Center for Advanced Functional Materials Macau University of Science and Technology Macau, 999078, Macao, PR China.
| | - Ruiyuan Liu
- Soochow Institute of Energy and Material Innovations, Key Laboratory for Advanced Carbon Materials and Wearable Energy Technologies of Jiangsu Province, Institute of Functional Nano & Soft Materials (FUNSOM) and College of Energy, Soochow University, Suzhou, 215006, PR China.
- Jiangsu Key Laboratory of Advanced Negative Carbon Technologies, Soochow University, Suzhou, 215123, PR China.
| | - Ying-Chih Lai
- Department of Materials Science and Engineering, National Chung Hsing University, Taichung, 40227, Taiwan.
- Innovation and Development Center of Sustainable Agriculture, i-Center for Advanced Science and Technology, National Chung Hsing University, Taichung, 40227, Taiwan.
- Department of Physics, National Chung Hsing University, Taichung, 40227, Taiwan.
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21
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Lu C, Gao Y, Chan X, Yu W, Wang H, Hu L, Li L. A cross-scale honeycomb architecture-based flexible piezoresistive sensor for multiscale pressure perception and fine-grained identification. MATERIALS HORIZONS 2024; 11:510-518. [PMID: 37975415 DOI: 10.1039/d3mh01387a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/19/2023]
Abstract
Trade-off between sensitivity and the pressure sensing range remains a great challenge for flexible pressure sensors. Micro-nano surface structure-based sensors usually show high sensitivity only in a limited pressure regime, while porous structure-based sensors possess a broad pressure-response range with sensitivity being sacrificed. Here, we report a design strategy based on a cross-scale architecture consisting of a microscale tip and macroscale base, which provides continuous deformation ability over a broad pressure regime (10-4-104 kPa). The cross-scale honeycomb architecture (CHA)-based piezoresistive sensor exhibits an excellent sensitivity over a wide pressure range (0.5 Pa-0.56 kPa: S1 ∼ 27.97 kPa-1; 0.56-20.40 kPa: S2 ∼ 2.30 kPa-1; 20.40-460 kPa: S3 ∼ 0.13 kPa-1). As a result, the CHA-based sensor shows multiscale pressure perception and fine-grained identification ability from 0.5 Pa to 40 MPa. Additionally, the cross-scale architecture will be a general structure to design other types of sensors for highly sensitive pressure perception in a wide pressure range and its unit size from microscale to macroscale is beneficial for large-scale preparation, compared with micro-nano surface structures or internal pores.
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Affiliation(s)
- Chenxi Lu
- Key Laboratory of Novel Materials for Sensor of Zhejiang Province, College of Materials and Environmental Engineering, Hangzhou Dianzi University, Hangzhou 310012, P. R. China.
- State Key Laboratory of Silicon and Advanced Semiconductor Materials, Zhejiang University, Hangzhou 310027, P. R. China
| | - Yuan Gao
- Key Laboratory of Novel Materials for Sensor of Zhejiang Province, College of Materials and Environmental Engineering, Hangzhou Dianzi University, Hangzhou 310012, P. R. China.
| | - Xiaoao Chan
- Key Laboratory of Novel Materials for Sensor of Zhejiang Province, College of Materials and Environmental Engineering, Hangzhou Dianzi University, Hangzhou 310012, P. R. China.
| | - Wei Yu
- Key Laboratory of Electromagnetic Processing of Materials (Ministry of Education), School of Materials Science and Engineering, Northeastern University, Shenyang 110819, P. R. China
| | - Haifeng Wang
- Key Laboratory of Electromagnetic Processing of Materials (Ministry of Education), School of Materials Science and Engineering, Northeastern University, Shenyang 110819, P. R. China
| | - Liang Hu
- Key Laboratory of Novel Materials for Sensor of Zhejiang Province, College of Materials and Environmental Engineering, Hangzhou Dianzi University, Hangzhou 310012, P. R. China.
- State Key Laboratory of Silicon and Advanced Semiconductor Materials, Zhejiang University, Hangzhou 310027, P. R. China
| | - Lingwei Li
- Key Laboratory of Novel Materials for Sensor of Zhejiang Province, College of Materials and Environmental Engineering, Hangzhou Dianzi University, Hangzhou 310012, P. R. China.
- Key Laboratory of Electromagnetic Processing of Materials (Ministry of Education), School of Materials Science and Engineering, Northeastern University, Shenyang 110819, P. R. China
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22
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Chen Y, Huang Z, Hu F, Peng J, Huang T, Liu X, Luo C, Xu L, Yue K. Microstructured Polyfluoroacrylate Elastomeric Dielectric Layer for Highly Stretchable Wide-Range Capacitive Pressure Sensors. ACS APPLIED MATERIALS & INTERFACES 2023; 15:58700-58710. [PMID: 38065675 DOI: 10.1021/acsami.3c14064] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/22/2023]
Abstract
Capacitive pressure sensors capable of replicating human tactile senses have garnered tremendous attention. Introducing microstructures into the dielectric layer is an effective approach to improve the sensitivity of the sensors. However, most reported processes to fabricate microstructured dielectric layers are complicated and time-consuming and usually have adverse effects on the mechanical properties. Herein, we report a mechanically strong and highly stretchable dielectric layer fabricated from a microstructured fluorinated elastomer with a high dielectric constant (5.8 at 1000 Hz) via a simple and low-cost thermal decomposition process. Capacitive pressure sensors based on this microstructured fluorinated elastomer dielectric layer and soft ionotronic electrodes illustrate an impressing stretchability (>300%), a high pressure sensitivity (17 MPa-1), a wide detection range (70 Pa-800 kPa), and a fast response time (below 300 ms). Moreover, the multipixel capacitive pressure sensors sensing array maintains the unique spatial tactile sensing performance even under significant tensile deformation. It is believed that our microstructured fluorinated elastomer dielectric layer might find wide applications in stretchable ionotronic devices.
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Affiliation(s)
- Yutong Chen
- South China Advanced Institute for Soft Matter Science and Technology, School of Emergent Soft Matter South China University of Technology, Guangzhou 510640, China
| | - Zhenkai Huang
- School of Materials Science and Hydrogen Energy Foshan University, Foshan 528000, China
| | - Faqi Hu
- South China Advanced Institute for Soft Matter Science and Technology, School of Emergent Soft Matter South China University of Technology, Guangzhou 510640, China
| | - Jianping Peng
- School of Environmental and Chemical Engineering Foshan University, Foshan 528000, China
| | - Tianrui Huang
- South China Advanced Institute for Soft Matter Science and Technology, School of Emergent Soft Matter South China University of Technology, Guangzhou 510640, China
| | - Xiang Liu
- South China Advanced Institute for Soft Matter Science and Technology, School of Emergent Soft Matter South China University of Technology, Guangzhou 510640, China
| | - Chuan Luo
- South China Advanced Institute for Soft Matter Science and Technology, School of Emergent Soft Matter South China University of Technology, Guangzhou 510640, China
| | - Liguo Xu
- College of Light Chemical Industry and Materials Engineering Shunde Polytechnic, Foshan 528333, China
| | - Kan Yue
- South China Advanced Institute for Soft Matter Science and Technology, School of Emergent Soft Matter South China University of Technology, Guangzhou 510640, China
- Guangdong Provincial Key Laboratory of Functional and Intelligent Hybrid Materials and Devices South China University of Technology, Guangzhou 510640, China
- Jiangsu Province Cultivation Base for State Key Laboratory of Photovoltaic Science and Technology, Changzhou University, Changzhou 213164, Jiangsu, China
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23
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Li X, Lin Y, Cui L, Li C, Yang Z, Zhao S, Hao T, Wang G, Heo JY, Yu JC, Chang YW, Zhu J. Stretchable and Lithography-Compatible Interconnects Enabled by Self-Assembled Nanofilms with Interlocking Interfaces. ACS APPLIED MATERIALS & INTERFACES 2023; 15:56233-56241. [PMID: 37988740 DOI: 10.1021/acsami.3c11760] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/23/2023]
Abstract
Stretchable interconnects with miniature widths are vital for the high-density integration of deformable electronic components on a single substrate for targeted data logic or storage functions. However, it is still challenging to attain high-resolution patternability of stretchable conductors with robust circuit fabrication capability. Here, we report a self-assembled silver nanofilm firmly interlocked by an elastomeric nanodielectric that can be photolithographically patterned into microscale features while preserving high stretchability and conductivity. Both silver and dielectric nanofilms are fabricated by layer-by-layer assembly, ensuring wafer-scale uniformity and meticulous control of thicknesses. Without any thermal annealing, the as-fabricated nanofilms from silver nanoparticles (AgNPs) exhibit conductivity of 1.54 × 106 S m-1 and stretchability of ∼200%, which is due to the impeded crack propagation by the underlying PU nanodielectrics. Furthermore, it is revealed that AgNP microstrips defined by photolithography show higher stretchability when their widths are downscaled to 100 μm owing to confined cracks. However, further scaling restricts the stretchability, following the early development of cracks cutting across the strip. In addition, the resistance change of these silver interconnects can be decreased using serpentine architectures. As a demonstration, these self-assembled interconnects are used as stretchable circuit boards to power LEDs.
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Affiliation(s)
- Xiang Li
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, P. R. China
- National Institute for Advanced Materials, Nankai University, Tianjin 300350, P. R. China
| | - Yuxuan Lin
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, P. R. China
- National Institute for Advanced Materials, Nankai University, Tianjin 300350, P. R. China
| | - Lei Cui
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, P. R. China
- National Institute for Advanced Materials, Nankai University, Tianjin 300350, P. R. China
| | - Chenning Li
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, P. R. China
- National Institute for Advanced Materials, Nankai University, Tianjin 300350, P. R. China
| | - Zhenhua Yang
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, P. R. China
- National Institute for Advanced Materials, Nankai University, Tianjin 300350, P. R. China
| | - Sanchuan Zhao
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, P. R. China
- National Institute for Advanced Materials, Nankai University, Tianjin 300350, P. R. China
| | - Tailang Hao
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, P. R. China
- National Institute for Advanced Materials, Nankai University, Tianjin 300350, P. R. China
| | - Guoqi Wang
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, P. R. China
- National Institute for Advanced Materials, Nankai University, Tianjin 300350, P. R. China
| | - Jae-Young Heo
- Department of Materials and Chemical Engineering, BK21 FOUR ERICA-ACE Center, Hanyang University, Ansan, Gyeonggi 15588, Korea
| | - Jae-Chul Yu
- Department of Materials and Chemical Engineering, BK21 FOUR ERICA-ACE Center, Hanyang University, Ansan, Gyeonggi 15588, Korea
- R&D Center, Hepce Chem Co., Ltd., Siheung, Gyeonggi 15588, Korea
| | - Young-Wook Chang
- Department of Materials and Chemical Engineering, BK21 FOUR ERICA-ACE Center, Hanyang University, Ansan, Gyeonggi 15588, Korea
| | - Jian Zhu
- School of Materials Science and Engineering, Nankai University, Tianjin 300350, P. R. China
- National Institute for Advanced Materials, Nankai University, Tianjin 300350, P. R. China
- Laboratory for Rare Earth Materials and Applications, and Smart Sensing Interdisciplinary Science Center, Nankai University, Tianjin 300350, P. R. China
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24
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Chen C, Zhang H, Xu G, Hou T, Fu J, Wang H, Xia X, Yang C, Zi Y. Passive Internet of Events Enabled by Broadly Compatible Self-Powered Visualized Platform Toward Real-Time Surveillance. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2023; 10:e2304352. [PMID: 37870202 DOI: 10.1002/advs.202304352] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/29/2023] [Revised: 09/04/2023] [Indexed: 10/24/2023]
Abstract
Surveillance is an intricate challenge worldwide especially in those complicated environments such as nuclear plants, banks, crowded areas, barns, etc. Deploying self-powered wireless sensor nodes can increase the system's event detection capabilities by collecting environmental changes, while the incompatibility among components (energy harvesters, sensors, and wireless modules) limits their application. Here, a broadly compatible self-powered visualized platform (SPVP) is reported to construct a passive internet of events (IoE) network for surveillance systems. By encoding electric signals into reference and working LEDs, SPVP can visualize resistance change generated by commercial resistive sensors with a broad working range (<107 Ω) and the transmission distance is up to 30 meters. Visible light signals are captured by surveillance cameras and processed by the cloud to achieve real-time event monitoring and identification, which forms the passive IoE network. It is demonstrated that the passive-IoE-based surveillance system can detect intrusion, theft, fire alarm, and distress signals quickly (30 ms) for 106 cycles. Moreover, the confidential information can be encrypted by SPVPs and accessed through a phone application. This universal scheme may have huge potential for the construction of safe and smart cities.
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Affiliation(s)
- Chaojie Chen
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong Shatin, N.T. Hong Kong, Hong Kong, China
| | - Haoran Zhang
- Thrust of Sustainable Energy and Environment, The Hong Kong University of Science and Technology (Guangzhou), Nansha, Guangzhou, Guangdong, 511400, China
| | - Guoqiang Xu
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong Shatin, N.T. Hong Kong, Hong Kong, China
| | - Tingting Hou
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong Shatin, N.T. Hong Kong, Hong Kong, China
| | - Jingjing Fu
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong Shatin, N.T. Hong Kong, Hong Kong, China
| | - Haoyu Wang
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong Shatin, N.T. Hong Kong, Hong Kong, China
| | - Xin Xia
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong Shatin, N.T. Hong Kong, Hong Kong, China
- Thrust of Sustainable Energy and Environment, The Hong Kong University of Science and Technology (Guangzhou), Nansha, Guangzhou, Guangdong, 511400, China
| | - Cheng Yang
- Institute of Materials Research, Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, 518055, P. R. China
| | - Yunlong Zi
- Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong Shatin, N.T. Hong Kong, Hong Kong, China
- Thrust of Sustainable Energy and Environment, The Hong Kong University of Science and Technology (Guangzhou), Nansha, Guangzhou, Guangdong, 511400, China
- HKUST Shenzhen-Hong Kong Collaborative Innovation Research Institute, Futian, Shenzhen, Guangdong, 518048, China
- Guangzhou HKUST Fok Ying Tung Research Institute, Guangzhou, Guangdong, 511400, China
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25
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Wu S, Yang C, Hu J, Pan M, Meng W, Liu Y, Li P, Peng J, Zhang Q, Chen P, Wang H. Normal-Direction Graded Hemispheres for Ionic Flexible Sensors with a Record-High Linearity in a Wide Working Range. ACS APPLIED MATERIALS & INTERFACES 2023; 15:47733-47744. [PMID: 37782111 DOI: 10.1021/acsami.3c09580] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 10/03/2023]
Abstract
Flexible pressure sensors developed rapidly with increased sensitivity, a fast response time, high stability, and excellent deformability. These progresses have expanded the application of wearable electronics under high-pressure backgrounds while also bringing new challenges. In particular, the nonlinearity and narrow working range lead to a gradually insensitive response, principally because the microstructure deforms inconsistently on the device interfaces in the whole working range. Herein, we report an ionic flexible sensor with a record-high linearity (R2 = 0.99994) in a wide working range (up to 600 kPa). The linearity response comes from the normal-direction graded hemisphere (GH) microstructure. It is prepared from poly(dimethylsiloxane) (PDMS)/carbon nanotubes (CNTs)/Au into flexible and deformable electrodes, and its geometry is precisely designed from the linear elastic theory and optimized through finite element simulation. The sensor can achieve a high sensitivity of S = 165.5 kPa-1, a response-relaxation time of <30 ms, and superb consistency, allowing the device to detect vibration signals. Our sensor has been assembled with circuits and capsulation in order to monitor the function state of players in underwater sports in the frequency domain. This work deepens the theory of linearized design of microstructures and provides a strategy to make flexible pressure sensors that have combined the performances of ultrahigh linearity, high sensitivity, and a wide working range.
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Affiliation(s)
- Shaowei Wu
- College of Intelligence Science and Technology, National University of Defense Technology (NUDT), Deya Road 109, Changsha 410073, China
| | - Chengxiu Yang
- College of Intelligence Science and Technology, National University of Defense Technology (NUDT), Deya Road 109, Changsha 410073, China
| | - Jiafei Hu
- College of Intelligence Science and Technology, National University of Defense Technology (NUDT), Deya Road 109, Changsha 410073, China
| | - Mengchun Pan
- College of Intelligence Science and Technology, National University of Defense Technology (NUDT), Deya Road 109, Changsha 410073, China
| | - Weize Meng
- State Key Laboratory of CEMEE, College of Electronic Science and Technology, National University of Defense Technology, Deya Road 109, Changsha 410073, China
| | - Yan Liu
- College of Intelligence Science and Technology, National University of Defense Technology (NUDT), Deya Road 109, Changsha 410073, China
| | - Peisen Li
- College of Intelligence Science and Technology, National University of Defense Technology (NUDT), Deya Road 109, Changsha 410073, China
| | - Junping Peng
- College of Intelligence Science and Technology, National University of Defense Technology (NUDT), Deya Road 109, Changsha 410073, China
| | - Qi Zhang
- College of Intelligence Science and Technology, National University of Defense Technology (NUDT), Deya Road 109, Changsha 410073, China
| | - Pengteng Chen
- College of Intelligence Science and Technology, National University of Defense Technology (NUDT), Deya Road 109, Changsha 410073, China
| | - Haomiao Wang
- College of Intelligence Science and Technology, National University of Defense Technology (NUDT), Deya Road 109, Changsha 410073, China
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26
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Zhang T, Liu N, Xu J, Liu Z, Zhou Y, Yang Y, Li S, Huang Y, Jiang S. Flexible electronics for cardiovascular healthcare monitoring. Innovation (N Y) 2023; 4:100485. [PMID: 37609559 PMCID: PMC10440597 DOI: 10.1016/j.xinn.2023.100485] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/27/2023] [Accepted: 07/23/2023] [Indexed: 08/24/2023] Open
Abstract
Cardiovascular diseases (CVDs) are one of the most urgent threats to humans worldwide, which are responsible for almost one-third of global mortality. Over the last decade, research on flexible electronics for monitoring and treatment of CVDs has attracted tremendous attention. In contrast to conventional medical instruments in hospitals that are usually bulky, hard to move, monofunctional, and time-consuming, flexible electronics are capable of continuous, noninvasive, real-time, and portable monitoring. Notable progress has been made in this emerging field, and thus a number of significant achievements and concomitant research prospects deserve attention for practical implementation. Here, we comprehensively review the latest progress of flexible electronics for CVDs, focusing on new functions provided by flexible electronics. First, the characteristics of CVDs and flexible electronics and the foundation of their combination are briefly reviewed. Then, four representative applications of flexible electronics for CVDs are elaborated: blood pressure (BP) monitoring, electrocardiogram (ECG) monitoring, echocardiogram monitoring, and direct epicardium monitoring. Their operational principles, progress, merits and demerits, and future efforts are discussed. Finally, the remaining challenges and opportunities for flexible electronics for cardiovascular healthcare are outlined.
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Affiliation(s)
- Tianqi Zhang
- Hangzhou Institute of Technology, Xidian University, Hangzhou 311200, China
| | - Ning Liu
- Department of Gastrointestinal Surgery, Hainan General Hospital, Hainan Affiliated Hospital of Hainan Medical University, Haikou 570311, China
| | - Jing Xu
- State Key Laboratory of Cardiovascular Disease, Fuwai Hospital, National Center for Cardiovascular Diseases, Chinese Academy of Medical Sciences and Peking Union Medical College, Beijing 100037, China
| | - Zeye Liu
- Department of Structural Heart Disease, National Center for Cardiovascular Disease, China & Fuwai Hospital, Chinese Academy of Medical Sciences & Peking Union Medical College, Beijing 100037, China
| | - Yunlei Zhou
- Hangzhou Institute of Technology, Xidian University, Hangzhou 311200, China
| | - Yicheng Yang
- State Key Laboratory of Cardiovascular Disease, Fuwai Hospital, National Center for Cardiovascular Diseases, Chinese Academy of Medical Sciences and Peking Union Medical College, Beijing 100037, China
| | - Shoujun Li
- State Key Laboratory of Cardiovascular Disease, Fuwai Hospital, National Center for Cardiovascular Diseases, Pediatric Cardiac Surgery Center, Fuwai Hospital, Chinese Academy of Medical Sciences, and Peking Union Medical College, Beijing 100037, China
| | - Yuan Huang
- State Key Laboratory of Cardiovascular Disease, Fuwai Hospital, National Center for Cardiovascular Diseases, Pediatric Cardiac Surgery Center, Fuwai Hospital, Chinese Academy of Medical Sciences, and Peking Union Medical College, Beijing 100037, China
| | - Shan Jiang
- Hangzhou Institute of Technology, Xidian University, Hangzhou 311200, China
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Nan X, Xu Z, Cao X, Hao J, Wang X, Duan Q, Wu G, Hu L, Zhao Y, Yang Z, Gao L. A Review of Epidermal Flexible Pressure Sensing Arrays. BIOSENSORS 2023; 13:656. [PMID: 37367021 DOI: 10.3390/bios13060656] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/18/2023] [Revised: 06/11/2023] [Accepted: 06/14/2023] [Indexed: 06/28/2023]
Abstract
In recent years, flexible pressure sensing arrays applied in medical monitoring, human-machine interaction, and the Internet of Things have received a lot of attention for their excellent performance. Epidermal sensing arrays can enable the sensing of physiological information, pressure, and other information such as haptics, providing new avenues for the development of wearable devices. This paper reviews the recent research progress on epidermal flexible pressure sensing arrays. Firstly, the fantastic performance materials currently used to prepare flexible pressure sensing arrays are outlined in terms of substrate layer, electrode layer, and sensitive layer. In addition, the general fabrication processes of the materials are summarized, including three-dimensional (3D) printing, screen printing, and laser engraving. Subsequently, the electrode layer structures and sensitive layer microstructures used to further improve the performance design of sensing arrays are discussed based on the limitations of the materials. Furthermore, we present recent advances in the application of fantastic-performance epidermal flexible pressure sensing arrays and their integration with back-end circuits. Finally, the potential challenges and development prospects of flexible pressure sensing arrays are discussed in a comprehensive manner.
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Affiliation(s)
- Xueli Nan
- School of Automation and Software Engineering, Shanxi University, Taiyuan 030006, China
- School of Biomedical Engineering, Shanghai Jiao Tong University, Shanghai 200030, China
| | - Zhikuan Xu
- School of Automation and Software Engineering, Shanxi University, Taiyuan 030006, China
| | - Xinxin Cao
- School of Automation and Software Engineering, Shanxi University, Taiyuan 030006, China
| | - Jinjin Hao
- School of Automation and Software Engineering, Shanxi University, Taiyuan 030006, China
| | - Xin Wang
- School of Automation and Software Engineering, Shanxi University, Taiyuan 030006, China
| | - Qikai Duan
- School of Automation and Software Engineering, Shanxi University, Taiyuan 030006, China
| | - Guirong Wu
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361102, China
| | - Liangwei Hu
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361102, China
| | - Yunlong Zhao
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361102, China
- Discipline of Intelligent Instrument and Equipment, Xiamen University, Xiamen 361102, China
| | - Zekun Yang
- Key Laboratory of Instrumentation Science and Dynamic Measurement Ministry of Education, North University of China, Taiyuan 030051, China
| | - Libo Gao
- Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361102, China
- Innovation Laboratory for Sciences and Technologies of Energy Materials of Fujian Province (IKKEM), Xiamen 361005, China
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