A graphene-based resistive pressure sensor with record-high sensitivity in a wide pressure range

New Carbon Materials for Multifunctional Soft Electronics

Soft electronics are garnering significant attention due to their wide-ranging applications in artificial skin, health monitoring, human-machine interaction, artificial intelligence, and the Internet of Things. Various soft physical sensors such as mechanical sensors, temperature sensors, and humidity sensors are the fundamental building blocks for soft electronics. While the fast growth and widespread utilization of electronic devices have elevated life quality, the consequential electromagnetic interference (EMI) and radiation pose potential threats to device precision and human health. Another substantial concern pertains to overheating issues that occur during prolonged operation. Therefore, the design of multifunctional soft electronics exhibiting excellent capabilities in sensing, EMI shielding, and thermal management is of paramount importance. Because of the prominent advantages in chemical stability, electrical and thermal conductivity, and easy functionalization, new carbon materials including carbon nanotubes, graphene and its derivatives, graphdiyne, and sustainable natural-biomass-derived carbon are particularly promising candidates for multifunctional soft electronics. This review summarizes the latest advancements in multifunctional soft electronics based on new carbon materials across a range of performance aspects, mainly focusing on the structure or composite design, and fabrication method on the physical signals monitoring, EMI shielding, and thermal management. Furthermore, the device integration strategies and corresponding intriguing applications are highlighted. Finally, this review presents prospects aimed at overcoming current barriers and advancing the development of state-of-the-art multifunctional soft electronics.

Highly Aligned Graphene Aerogels for Multifunctional Composites

Stemming from the unique in-plane honeycomb lattice structure and the sp2 hybridized carbon atoms bonded by exceptionally strong carbon-carbon bonds, graphene exhibits remarkable anisotropic electrical, mechanical, and thermal properties. To maximize the utilization of graphene's in-plane properties, pre-constructed and aligned structures, such as oriented aerogels, films, and fibers, have been designed. The unique combination of aligned structure, high surface area, excellent electrical conductivity, mechanical stability, thermal conductivity, and porous nature of highly aligned graphene aerogels allows for tailored and enhanced performance in specific directions, enabling advancements in diverse fields. This review provides a comprehensive overview of recent advances in highly aligned graphene aerogels and their composites. It highlights the fabrication methods of aligned graphene aerogels and the optimization of alignment which can be estimated both qualitatively and quantitatively. The oriented scaffolds endow graphene aerogels and their composites with anisotropic properties, showing enhanced electrical, mechanical, and thermal properties along the alignment at the sacrifice of the perpendicular direction. This review showcases remarkable properties and applications of aligned graphene aerogels and their composites, such as their suitability for electronics, environmental applications, thermal management, and energy storage. Challenges and potential opportunities are proposed to offer new insights into prospects of this material.

Nanocarbon-based sensors for the structural health monitoring of smart biocomposites

Structural health monitoring (SHM) is a critical aspect of ensuring the safety and durability of smart biocomposite materials used as multifunctional materials. Smart biocomposites are composed of renewable or biodegradable materials and have emerged as eco-friendly alternatives of traditional non-biodegradable glass fiber-based composite materials. Although biocomposites exhibit fascinating properties and many desirable traits, real-time and early stage SHM is the most challenging issue to enable their long-term use. Smart biocomposites are integrated with sensors for in situ identification of the progress of damage and composite failure. The sensitivity of such smart biocomposites is a key functionality, which can be tuned by the introduction of an appropriate filler. In particular, nanocarbons hold promising potential to be incorporated in SHM applications of biocomposites. This review focused on the potential applications of nanocarbons in SHM of biocomposites. The aspects related to fabrication techniques and working mechanism of sensors are comprehensively discussed. Furthermore, their unique mechanical and electrical properties and sustainable nature ensure seamless integration into biocomposites, allowing for real-time monitoring without compromising the material's properties. These sensors offer multi-parameter sensing capabilities, such as strain, pressure, humidity, temperature, and chemical exposure, allowing a comprehensive assessment of biocomposite health. Additionally, their durability and longevity in harsh conditions, along with wireless connectivity options, provide cost-effective and sustainable SHM solutions. As research in this field advances, ongoing efforts seek to enhance the sensitivity and selectivity of these sensors, optimizing their performance for real-world applications. This review highlights the significant advances, ongoing efforts to enhance the sensitivity and selectivity, and performance optimization of nanocarbon-based sensors along with their working mechanism in the field of SHM for smart biocomposites. The key challenges and future research perspectives facing the conversion of nanocarbons to smart biocomposites are also displayed.

Mold-Free Manufacturing of Highly Sensitive and Fast-Response Pressure Sensors Through High-Resolution 3D Printing and Conformal Oxidative Chemical Vapor Deposition Polymers

A new manufacturing paradigm is showcased to exclude conventional mold-dependent manufacturing of pressure sensors, which typically requires a series of complex and expensive patterning processes. This mold-free manufacturing leverages high-resolution 3D-printed multiscale microstructures as the substrate and a gas-phase conformal polymer coating technique to complete the mold-free sensing platform. The array of dome and spike structures with a controlled spike density of a 3D-printed substrate ensures a large contact surface with pressures applied and extended linearity in a wider pressure range. For uniform coating of sensing elements on the microstructured surface, oxidative chemical vapor deposition is employed to deposit a highly conformal and conductive sensing element, poly(3,4-ethylenedioxythiophene) at low temperatures (<60 °C). The fabricated pressure sensor reacts sensitively to various ranges of pressures (up to 185 kPa-1 ) depending on the density of the multiscale features and shows an ultrafast response time (≈36 µs). The mechanism investigations through the finite element analysis identify the effect of the multiscale structure on the figure-of-merit sensing performance. These unique findings are expected to be of significant relevance to technology that requires higher sensing capability, scalability, and facile adjustment of a sensor geometry in a cost-effective manufacturing manner.

Flexible BaTiO3-PDMS Capacitive Pressure Sensor of High Sensitivity with Gradient Micro-Structure by Laser Engraving and Molding

The significant potential of flexible sensors in various fields such as human health, soft robotics, human-machine interaction, and electronic skin has garnered considerable attention. Capacitive pressure sensor is popular given their mechanical flexibility, high sensitivity, and signal stability. Enhancing the performance of capacitive sensors can be achieved through the utilization of gradient structures and high dielectric constant media. This study introduced a novel dielectric layer, employing the BaTiO3-PDMS material with a gradient micro-cones architecture (GMCA). The capacitive sensor was constructed by incorporating a dielectric layer GMCA, which was fabricated using laser engraved acrylic (PMMA) molds and flexible copper-foil/polyimide-tape electrodes. To examine its functionality, the prepared sensor was subjected to a pressure range of 0-50 KPa. Consequently, this sensor exhibited a remarkable sensitivity of up to 1.69 KPa-1 within the pressure range of 0-50 KPa, while maintaining high pressure-resolution across the entire pressure spectrum. Additionally, the pressure sensor demonstrated a rapid response time of 50 ms, low hysteresis of 0.81%, recovery time of 160 ms, and excellent cycling stability over 1000 cycles. The findings indicated that the GMCA pressure sensor, which utilized a gradient structure and BaTiO3-PDMS material, exhibited notable sensitivity and a broad linear pressure range. These results underscore the adaptability and viability of this technology, thereby facilitating enhanced flexibility in pressure sensors and fostering advancements in laser manufacturing and flexible devices for a wider array of potential applications.

Recent Development of Mechanical Stimuli Detectable Sensors, Their Future, and Challenges: A Review

By virtue of their wide applications in transportation, healthcare, smart home, and security, development of sensors detecting mechanical stimuli, which are many force types (pressure, shear, bending, tensile, and flexure) is an attractive research direction for promoting the advancement of science and technology. Sensing capabilities of various force types based on structural design, which combine unique structure and materials, have emerged as a highly promising field due to their various industrial applications in wearable devices, artificial skin, and Internet of Things (IoT). In this review, we focus on various sensors detecting one or two mechanical stimuli and their structure, materials, and applications. In addition, for multiforce sensing, sensing mechanism are discussed regarding responses in external stimuli such as piezoresistive, piezoelectric, and capacitance phenomena. Lastly, the prospects and challenges of sensors for multiforce sensing are discussed and summarized, along with research that has emerged.

Flexible Pressure Sensor with an Excellent Linear Response in a Broad Detection Range for Human Motion Monitoring

Pressure sensing is highly demanding in wearable devices, robotics, and artificial intelligence, whereas it is still a big challenge to develop a pressure sensor with an excellent linear response in a broad detection range. Herein, a flexible and porous carbon nanotube (CNT)/carbon black (CB)/carbonyl iron powder (CIP)/silicone composite is proposed by a simple strategy of mixing, curing, and washing. Due to the porous structure induced by the sacrifice of sugar particles, an excellent linear response (R² = 0.999) is achieved for the composite sensor by manipulating the contributions of contact resistance and tunnel resistance to the sensing performance via the alternation of CB and CNT contents. Moreover, the porous structure donates the composite sensor a low compressive modulus at a low pressure level, while the CIPs introduced lead to a high compressive modulus at a high pressure level with the assistance of an external magnetic field. As a result, the sensor produced has a wide linear response range of 80 Pa to 220 kPa, much wider than most of the linear response pressure sensors reported previously. The wide detection range is demonstrated by cyclic pressure tests in the frequency range of 0.1-5 Hz, durability tests, and monitoring human or robot motions including breathing, walking, lifting, and boxing, etc. Taking the advantages of low cost, high sensitivity, and excellent linear response in a wide pressure range, the current composite sensor is promising for precise monitoring of human motions and delicate controlling of robots.

Graphene oxide for photonics, electronics and optoelectronics

Graphene oxide (GO) was initially developed to emulate graphene, but it was soon recognized as a functional material in its own right, addressing an application space that is not accessible to graphene and other carbon materials. Over the past decade, research on GO has made tremendous advances in material synthesis and property tailoring. These, in turn, have led to rapid progress in GO-based photonics, electronics and optoelectronics, paving the way for technological breakthroughs with exceptional performance. In this Review, we provide an overview of the optical, electrical and optoelectronic properties of GO and reduced GO on the basis of their chemical structures and fabrication approaches, together with their applications in key technologies such as solar energy harvesting, energy storage, medical diagnosis, image display and optical communications. We also discuss the challenges of this field, together with exciting opportunities for future technological advances.

Combined Additive and Laser-Induced Processing of Functional Structures for Monitoring under Deformation

This research introduces a readily available and non-chemical combinatorial production approach, known as the laser-induced writing process, to achieve laser-processed conductive graphene traces. The laser-induced graphene (LIG) structure and properties can be improved by adjusting the laser conditions and printing parameters. This method demonstrates the ability of laser-induced graphene (LIG) to overcome the electrothermal issues encountered in electronic devices. To additively process the PEI structures and the laser-induced surface, a high-precision laser nScrypt printer with different power, speed, and printing parameters was used. Raman spectroscopy and scanning electron microscopy analysis revealed similar results for laser-induced graphene morphology and structural chemistry. Significantly, the 3.2 W laser-induced graphene crystalline size (La; 159 nm) is higher than the higher power (4 W; 29 nm) formation due to the surface temperature and oxidation. Under four-point probe electrical property measurements, at a laser power of 3.8 W, the resistivity of the co-processed structure was three orders of magnitude larger. The LIG structure and property improvement are possible by varying the laser conditions and the printing parameters. The lowest gauge factor (GF) found was 17 at 0.5% strain, and the highest GF found was 141.36 at 5%.

Dual-Mode Flexible Sensor Based on PVDF/MXene Nanosheet/Reduced Graphene Oxide Composites for Electronic Skin

MXene materials have the metallic conductivity of transition metal carbides. Among them, Ti₃C₂T_X with an accordion structure has great application prospects in the field of wearable devices. However, flexible wearable electronic devices face the problem of single function in practical application. Therefore, it is particularly important to study a flexible sensor with multiple functions for electronic skin. In this work, the near-field electrohydrodynamic printing (NFEP) method was proposed to prepare the composite thin film with a micro/nanofiber structure on the flexible substrate using a solution of poly(vinylidene fluoride)/MXene nanosheet/reduced graphene oxide (PMR) nanocomposites as the printing solution. A dual-mode flexible sensor for electronic skin based on the PMR nanocomposite thin film was fabricated. The flexible sensor had the detection capability of the piezoresistive mode and the piezoelectric mode. In the piezoresistive mode, the sensitivity was 29.27 kPa^-1 and the response/recovery time was 36/55 ms. In the piezoelectric mode, the sensitivity was 8.84 kPa^-1 and the response time was 18.2 ms. Under the synergy of the dual modes, functions that cannot be achieved by a single mode sensor can be accomplished. In the process of detecting the pressure or deformation of the object, more information is obtained, which broadens the application range of the flexible sensor. The experimental results show that the dual-mode flexible sensor has great potential in human motion monitoring and wearable electronic device applications.

Stretchable and Compliant Sensing of Strain, Pressure and Vibration of Soft Deformable Structures

Soft robotic and medical devices will greatly benefit from stretchable and compliant pressure sensors that can detect deformation and contact forces for control and task safety. In addition to traditional 2D buckling via planar substrates, 3D buckling via curved substrates has emerged as an alternative approach to generate tunable and highly convoluted hierarchical wrinkle morphologies. Such wrinkles may provide advantages in pressure sensing, such as increased sensitivity, ultra-stretchability, and detecting changing curvatures. In this work, we fabricated stretchable sensors using wrinkled MXene electrodes obtained from 3D buckling. We then characterized the sensors’ performance in detecting strain, pressure, and vibrations. The fabricated wrinkled MXene electrode exhibited high stretchability of up to 250% and has a strain sensitivity of 0.1 between 0 and 80%. The fabricated bilayer MXene pressure sensor exhibited a pressure sensitivity of 0.935 kPa−1 and 0.188 kPa−1 at the lower (<0.25 kPa) and higher-pressure regimes (0.25 kPa–2.0 kPa), respectively. The recovery and response timing of the wrinkled MXene pressure sensor was found to be 250 ms and 400 ms, respectively. The sensor was also capable of detecting changing curvatures upon mounting onto an inflating balloon.

Carbon nanotube-graphene hybrids for soft electronics, sensors, and actuators

Soft devices that are mechanically flexible and stretchable are considered as the building blocks for various applications ranging from wearable devices to robotics. Among the many candidate materials for constructing soft devices, carbon nanomaterials such as carbon nanotubes (CNTs) and graphene have been actively investigated owing to their outstanding characteristics, including their intrinsic flexibility, tunable conductivity, and potential for large-area processing. In particular, hybrids of CNTs and graphene can improve the performance of soft devices and provide them with novel capabilities. In this review, the advances in CNT-graphene hybrid-based soft electrodes, transistors, pressure and strain sensors, and actuators are discussed, highlighting the performance improvements of these devices originating from the synergistic effects of the hybrids of CNT and graphene. The integration of multidimensional heterogeneous carbon nanomaterials is expected to be a promising approach for accelerating the development of high-performance soft devices. Finally, current challenges and future opportunities are summarized, from the processing of hybrid materials to the system-level integration of multiple components.

MEMS-Based Tactile Sensors: Materials, Processes and Applications in Robotics

Commonly encountered problems in the manipulation of objects with robotic hands are the contact force control and the setting of approaching motion. Microelectromechanical systems (MEMS) sensors on robots offer several solutions to these problems along with new capabilities. In this review, we analyze tactile, force and/or pressure sensors produced by MEMS technologies including off-the-shelf products such as MEMS barometric sensors. Alone or in conjunction with other sensors, MEMS platforms are considered very promising for robots to detect the contact forces, slippage and the distance to the objects for effective dexterous manipulation. We briefly reviewed several sensing mechanisms and principles, such as capacitive, resistive, piezoresistive and triboelectric, combined with new flexible materials technologies including polymers processing and MEMS-embedded textiles for flexible and snake robots. We demonstrated that without taking up extra space and at the same time remaining lightweight, several MEMS sensors can be integrated into robotic hands to simulate human fingers, gripping, hardness and stiffness sensations. MEMS have high potential of enabling new generation microactuators, microsensors, micro miniature motion-systems (e.g., microrobots) that will be indispensable for health, security, safety and environmental protection.

Beyond Human Touch Perception: An Adaptive Robotic Skin Based on Gallium Microgranules for Pressure Sensory Augmentation

Robotic skin with human-skin-like sensing ability holds immense potential in various fields such as robotics, prosthetics, healthcare, and industries. To catch up with human skin, numerous studies are underway on pressure sensors integrated on robotic skin to improve the sensitivity and detection range. However, due to the trade-off between them, existing pressure sensors have achieved only a single aspect, either high sensitivity or wide bandwidth. Here, an adaptive robotic skin is proposed that has both high sensitivity and broad bandwidth with an augmented pressure sensing ability beyond the human skin. A key for the adaptive robotic skin is a tunable pressure sensor built with uniform gallium microgranules embedded in an elastomer, which provides large tuning of the sensitivity and the bandwidth, excellent sensor-to-sensor uniformity, and high reliability. Through the mode conversion based on the solid-liquid phase transition of gallium microgranules, the sensor provides 97% higher sensitivity (16.97 kPa^-1 ) in the soft mode and 262.5% wider bandwidth (≈1.45 MPa) in the rigid mode compared to the human skin. Successful demonstration of the adaptive robotic skin verifies its capabilities in sensing a wide spectrum of pressures ranging from subtle blood pulsation to body weight, suggesting broad use for various applications.

Micro-/Nano-Structured Biodegradable Pressure Sensors for Biomedical Applications

The interest in biodegradable pressure sensors in the biomedical field is growing because of their temporary existence in wearable and implantable applications without any biocompatibility issues. In contrast to the limited sensing performance and biocompatibility of initially developed biodegradable pressure sensors, device performances and functionalities have drastically improved owing to the recent developments in micro-/nano-technologies including device structures and materials. Thus, there is greater possibility of their use in diagnosis and healthcare applications. This review article summarizes the recent advances in micro-/nano-structured biodegradable pressure sensor devices. In particular, we focus on the considerable improvement in performance and functionality at the device-level that has been achieved by adapting the geometrical design parameters in the micro- and nano-meter range. First, the material choices and sensing mechanisms available for fabricating micro-/nano-structured biodegradable pressure sensor devices are discussed. Then, this is followed by a historical development in the biodegradable pressure sensors. In particular, we highlight not only the fabrication methods and performances of the sensor device, but also their biocompatibility. Finally, we intoduce the recent examples of the micro/nano-structured biodegradable pressure sensor for biomedical applications.

Large-Scale Integrated Flexible Tactile Sensor Array for Sensitive Smart Robotic Touch

In the long pursuit of smart robotics, it has been envisioned to empower robots with human-like senses, especially vision and touch. While tremendous progress has been made in image sensors and computer vision over the past decades, tactile sense abilities are lagging behind due to the lack of large-scale flexible tactile sensor array with high sensitivity, high spatial resolution, and fast response. In this work, we have demonstrated a 64 × 64 flexible tactile sensor array with a record-high spatial resolution of 0.9 mm (equivalently 28.2 pixels per inch) by integrating a high-performance piezoresistive film (PRF) with a large-area active matrix of carbon nanotube thin-film transistors. PRF with self-formed microstructures exhibited high pressure-sensitivity of ∼385 kPa^-1 for multi-walled carbon nanotubes concentration of 6%, while the 14% one exhibited fast response time of ∼3 ms, good linearity, broad detection range beyond 1400 kPa, and excellent cyclability over 3000 cycles. Using this fully integrated tactile sensor array, the footprint maps of an artificial honeybee were clearly identified. Furthermore, we hardware-implemented a smart tactile system by integrating the PRF-based sensor array with a memristor-based computing-in-memory chip to record and recognize handwritten digits and Chinese calligraphy, achieving high classification accuracies of 98.8% and 97.3% in hardware, respectively. The integration of sensor networks with deep learning hardware may enable edge or near-sensor computing with significantly reduced power consumption and latency. Our work could empower the building of large-scale intelligent sensor networks for next-generation smart robotics.

Improving the Sensing Properties of Graphene MEMS Pressure Sensor by Low-Temperature Annealing in Atmosphere

The high demand for pressure devices with miniaturization and a wide bearing range has encouraged researchers to explore new high-performance sensors from different approaches. In this study, a sensitive element based on graphene in-plane compression properties for realizing pressure sensing is experimentally prepared using microelectromechanical systems (MEMS) fabrication technology; it consists of a 50 µm thick, 1400 µm wide square multilayer component membrane and a graphene monolayer with a meander pattern. The prepared sample is extensively characterized and analyzed by using various techniques, including atomic force microscopy, Raman spectroscopy, infrared spectroscopy, X-ray photoelectron spectroscopy, COMSOL finite element method, and density functional theory. The sensing performance of the new pressure sensor based on the sensitive element are obtained by theoretical analysis for electromechanical measurements of the sensitive element before and after low-temperature annealing in atmosphere. Results demonstrate that atmospheric annealing at 300 °C enhances the pressure sensing sensitivity by 4 times compared to pristine graphene without annealing, which benefits from the desorption of hydroxyl groups on the graphene surface during annealing. The sensitivity is comparable and even better than that of previous sensors based on graphene in-plane properties. Our results provide new insights into realizing high-performance MEMS devices based on 2D sensitive materials.

From Materials to Devices: Graphene toward Practical Applications

Graphene, as an emerging 2D material, has been playing an important role in flexible electronics since its discovery in 2004. The representative fabrication methods of graphene include mechanical exfoliation, liquid-phase exfoliation, chemical vapor deposition, redox reaction, etc. Based on its excellent mechanical, electrical, thermo-acoustical, optical, and other properties, graphene has made a great progress in the development of mechanical sensors, microphone, sound source, electrophysiological detection, solar cells, synaptic transistors, light-emitting devices, and so on. In different application fields, large-scale, low-cost, high-quality, and excellent performance are important factors that limit the industrialization development of graphene. Therefore, laser scribing technology, roll-to-roll technology is used to reduce the cost. High-quality graphene can be obtained through chemical vapor deposition processes. The performance can be improved through the design of structure of the devices, and the homogeneity and stability of devices can be achieved by mechanized machining means. In total, graphene devices show promising prospect for the practical fields of sports monitoring, health detection, voice recognition, energy, etc. There is a hot issue for industry to create and maintain the market competitiveness of graphene products through increasing its versatility and killer application fields.

Wide-Range Flexible Capacitive Pressure Sensors Based on Dielectrics with Various Porosity

Wide-range flexible pressure sensors are in difficulty in research while in demand in application. In this paper, a wide-range capacitive flexible pressure sensor is developed with the foaming agent ammonium bicarbonate (NH₄HCO₃). By controlling the concentration of NH₄HCO₃ doped in the polydimethylsiloxane (PDMS) and repeating the curing process, pressure-sensitive dielectrics with various porosity are fabricated to expand the detection range of the capacitive pressure sensor. The shape and the size of each dielectric is defined by the 3D printed mold. To improve the dielectric property of the dielectric, a 1% weight ratio of multi-walled carbon nanotubes (MWCNTs) are doped into PDMS liquid. Besides that, a 5% weight ratio of MWCNTs is dispersed into deionized water and then coated on the electrodes to improve the contact state between copper electrodes and the dielectric. The laminated dielectric layer and two electrodes are assembled and tested. In order to verify the effectiveness of this design, some reference devices are prepared, such as sensors based on the dielectric with uniform porosity and a sensor with common copper electrodes. According to the testing results of these sensors, it can be seen that the sensor based on the dielectric with various porosity has higher sensitivity and a wider pressure detection range, which can detect the pressure range from 0 kPa to 1200 kPa and is extended to 300 kPa compared with the dielectric with uniform porosity. Finally, the sensor is applied to the fingerprint, finger joint, and knee bending test. The results show that the sensor has the potential to be applied to human motion detection.

Scalable Manufacturing Process and Multifunctional Performance of Cotton Fibre-Reinforced Poly(Lactic Acid) (PLA) Bio-Composites Coated by Graphene Oxide

Natural fibre biopolymer composites with both fibres and matrix being derived from biomaterials are increasingly used in demanding applications, such as sensing, packaging, building, and transport, and require good electrical, thermal, and flame retardant properties. Herein, an investigation of the effectiveness of functionalising nonwoven cotton/poly(lactic acid) (PLA) fibre mats with graphene oxide nanosheets has been reported by using a facile dip-coating method followed by thermal reduction for enhancing the electric, thermal, and abrasion-resistance properties. The manufacturing processes for preparing biocomposites and introducing functionality are readily scalable. Experimental results reveal that with the addition of less than 0.5 wt% graphene nanoplatelets, the biocomposites showed significant improvements in abrasion resistance, electrical conductivity, thermal conductivity, and diffusivity. Furthermore, the composite shows excellent piezo-resistivity to act as strain sensors with a gauge factor of 2.59 at strains up to 1%.

Soft CNT-Polymer Composites for High Pressure Sensors

Carbon−polymer composite-based pressure sensors have many attractive features, including low cost, easy integration, and facile fabrication. Previous studies on carbon−polymer composite sensors focused on very high sensitivities for low pressure ranges (10 s of kPa), which saturate quickly at higher pressures and thus are ill-suited to measure the high pressure ranges found in various applications, including those in underwater (>1 atm, 101 kPa) and industrial environments. Current sensors designed for high pressure environments are often difficult to fabricate, expensive, and, similarly to their low-pressure counterparts, have a narrow sensing range. To address these issues, this work reports the design, synthesis, characterization, and analysis of high-pressure TPU-MWCNT based composite sensors, which detect pressures from 0.5 MPa (4.9 atm) to over 10 MPa (98.7 atm). In this study, the typical approach to improve sensitivity by increasing conductive additive concentration was found to decrease sensor performance at elevated pressures. It is shown that a better approach to elevated pressure sensitivity is to increase sensor response range by decreasing the MWCNT weight percentage, which improves sensing range and resolution. Such sensors can be useful for measuring high pressures in many industrial (e.g., manipulator feedback), automotive (e.g., damping elements, bushings), and underwater (e.g., depth sensors) applications.

Morphological Engineering of Sensing Materials for Flexible Pressure Sensors and Artificial Intelligence Applications

Various morphological structures in pressure sensors with the resulting advanced sensing properties are reviewed comprehensively. Relevant manufacturing techniques and intelligent applications of pressure sensors are summarized in a complete and interesting way. Future challenges and perspectives of flexible pressure sensors are critically discussed.

Flexible microstructured pressure sensors: design, fabrication and applications

In recent years, flexible pressure sensors have caused widespread concern for their extensive applications in human activity and health monitoring, robotics and prosthesis, as well as human-machine interface. Flexible pressure sensors in these applications are required to have a high sensitivity, large detective limit, linear response, fast response time, and mechanical stability. The mechanisms of capacitive, piezoresistive, and piezoelectric pressure sensors and the strategies to improve their performance are introduced. Sensing layers with microstructures have shown capability to significantly improve the performances of pressure sensors. Various fabrication methods for these structures are reviewed in terms of their pros and cons. Besides, the interference caused by environmental stimuli and internal stress from different directions leads to the infidelity of the signal transmission. Therefore, the anti-interference ability of flexible pressure sensors is highly desired. Several potential applications for flexible pressure sensors are also briefly discussed. Last, we conclude the future challenges for facilely fabricating flexible pressure sensors with high performance and anti-interference ability.

Preparation of a Vertical Graphene-Based Pressure Sensor Using PECVD at a Low Temperature

Flexible pressure sensors have received much attention due to their widespread potential applications in electronic skins, health monitoring, and human-machine interfaces. Graphene and its derivatives hold great promise for two-dimensional sensing materials, owing to their superior properties, such as atomically thin, transparent, and flexible structure. The high performance of most graphene-based pressure piezoresistive sensors relies excessively on the preparation of complex, post-growth transfer processes. However, the majority of dielectric substrates cannot hold in high temperatures, which can induce contamination and structural defects. Herein, a credibility strategy is reported for directly growing high-quality vertical graphene (VG) on a flexible and stretchable mica paper dielectric substrate with individual interdigital electrodes in plasma-enhanced chemical vapor deposition (PECVD), which assists in inducing electric field, resulting in a flexible, touchable pressure sensor with low power consumption and portability. Benefitting from its vertically directed graphene microstructure, the graphene-based sensor shows superior properties of high sensitivity (4.84 KPa^-1) and a maximum pressure range of 120 KPa, as well as strong stability (5000 cycles), which makes it possible to detect small pulse pressure and provide options for preparation of pressure sensors in the future.

A Review on the Applications of Graphene in Mechanical Transduction

A pressing need to develop low-cost, environmentally friendly, and sensitive sensors has arisen with the advent of the always-connected paradigm of the internet-of-things (IoT). In particular, mechanical sensors have been widely studied in recent years for applications ranging from health monitoring, through mechanical biosignals, to structure integrity analysis. On the other hand, innovative ways to implement mechanical actuation have also been the focus of intense research in an attempt to close the circle of human-machine interaction, and move toward applications in flexible electronics. Due to its potential scalability, disposability, and outstanding properties, graphene has been thoroughly studied in the field of mechanical transduction. The applications of graphene in mechanical transduction are reviewed here. An overview of sensor and actuator applications is provided, covering different transduction mechanisms such as piezoresistivity, capacitive sensing, optically interrogated displacement, piezoelectricity, triboelectricity, electrostatic actuation, chemomechanical and thermomechanical actuation, as well as thermoacoustic emission. A critical review of the main approaches is presented within the scope of a wider discussion on the future of this so-called wonder material in the field of mechanical transduction.

Design and fabrication of a large-range graphene/hexagonal boron nitride heterostructure based pressure sensor with poly(methyl methacrylate) substrate

Aiming at overpressure measurement, this paper presents a large-range graphene/hexagonal boron nitride (h-BN) heterostructure-based pressure sensor with a poly(methyl methacrylate) (PMMA) substrate. Graphene and h-BN are chosen as sensitive materials because they both have large Young's modulus, high intrinsic strength, high natural frequency, and atomic thickness at the same time. These characteristics provide favorable conditions for the application of the sensor in the high pressure and high frequency dynamic environment. Moreover, the photoresist-assisted transfer technology is proposed for transferring graphene from the growth substrate to the PMMA substrate and the lift-off method with exposure and development is developed to achieve metal patterning on the PMMA substrate. The sensor characterization results suggest that the graphene and h-BN films have good transfer qualities and the heterojunction possesses excellent electrical performance. The static pressure loading experiments confirm that the sensor has a pressure range of up to 85 MPa and its piezoresistive coefficient is 0.7 GPa^-1, which indicates that the designed sensor is suitable for overpressure fields. This study provides a novel method for determining overpressure and lays a foundation for the fabrication of graphene-based electronic devices with an organic substrate.

Towards Repeatable, Scalable Graphene Integrated Micro-Nano Electromechanical Systems (MEMS/NEMS)

The demand for graphene-based devices is rapidly growing but there are significant challenges for developing scalable and repeatable processes for the manufacturing of graphene devices. Basic research on understanding and controlling growth mechanisms have recently enabled various mass production approaches over the past decade. However, the integration of graphene with Micro-Nano Electromechanical Systems (MEMS/NEMS) has been especially challenging due to performance sensitivities of these systems to the production process. Therefore, ability to produce graphene-based devices on a large scale with high repeatability is still a major barrier to the commercialization of graphene. In this review article, we discuss the merits of integrating graphene into Micro-Nano Electromechanical Systems, current approaches for the mass production of graphene integrated devices, and propose solutions to overcome current manufacturing limits for the scalable and repeatable production of integrated graphene-based devices.

Highly Sensitive Flexible Tactile Sensors in Wide Sensing Range Enabled by Hierarchical Topography of Biaxially Strained and Capillary-Densified Carbon Nanotube Bundles

Flexible tactile sensors with high sensitivity have received considerable attention for their use in wearable electronics, human-machine interfaces, and health-monitoring devices. Although various micro/nanostructured materials are introduced for high-performance tactile sensors, simultaneously obtaining high sensitivity and a wide sensing range remains challenging. Here, a resistive tactile sensor is presented based on the hierarchical topography of carbon nanotubes (CNTs) prepared by a low-cost and straightforward manufacturing process. The 3D hierarchical structure of the CNTs over large areas is formed by transferring vertically aligned CNT bundles to a prestrained elastomer substrate and subsequently densifying them through capillary forming, providing a monotonic increase in the contact area as applied pressure. The deformable and hierarchical structure of CNTs allows the sensor to exhibit a wide sensing range (0-100 kPa), high sensitivity (141.72 kPa^-1 ), and low detection limit (10 Pa). Additionally, the capillary-formed CNT structure results in increased durability of the sensor over repeated pressures. Based on these advantages, meaningful applications of tactile sensors, such as object recognition gloves and multidirectional force perceptions, are successfully realized. Given the scalable fabrication method, 3D hierarchically structured CNTs provide an essential step toward next-generation wearable devices.

A bioinspired porous-designed hydrogel@polyurethane sponge piezoresistive sensor for human-machine interfacing

Conductive coating sponge piezoresistive pressure sensors are attracting much attention because of their simple production and convenient signal acquisition. However, manufacturing sponge-structure pressure-sensing materials with high compressibility and wide pressure detection ranges is difficult because of the instability of rigid and brittle conductive coatings at large strains. Herein, a tough conductive hydrogel@polyurethane (PU) sponge with a porous design is prepared via immersion of a polyurethane sponge in a low-cost and biocompatible polyvinyl alcohol (PVA)/glycerin (Gl)/sodium chloride (NaCl) solution. The sensor based on the hydrogel/elastomer sponge composite material exhibits a compressible range of 0-93%, a pressure detection range of 100 Pa-470.2 kPa, and 10 000-cycle stability (80% strain) because of the compressibility, flexibility, and toughness of the porous hydrogel coating. Benefiting from the resistance change mechanism of microporous compression, the sensor also exhibits a wide range of linear resistance changes, and the corresponding sensitivity and gauge factor (GF) are -0.083 kPa^-- (100 Pa-10.0 kPa) and -1.33 (1-60% strain), respectively. Based on its flexibility, compressibility, and wide-ranging linear resistance changes, the proposed sensor has huge potential application in human activity monitoring, electronic skin, and wearable electronic devices.

Tensible and flexible high-sensitive spandex fiber strain sensor enhanced by carbon nanotubes/Ag nanoparticles

Although the wearable strain sensors have received extensive research interest in recent years, it remains a huge challenge conforming the requirements in both of ultrahigh stretchability and high strain coefficient (gauge factor). Herein, a stretchable and flexible spandex fiber strain sensor coupled with carbon nanotubes (CNTs)/Ag nanoparticles (Ag NPs) that assembled through an efficient and large-scale layer-by layer self-assembly is presented. To ensure CNTs and Ag NPs can attach well to the spandex fiber without falling off, achieving high sensitivity under large tensile, sodium dodecyl benzene sulfonate, polyvinyl alcohol, and polystyrene sulfonic acid are introduced to improve the adhesion via the molecular entanglement and other interactions between them. Consequently, the strain sensor exhibits remarkable performance, such as an ultrahigh gauge factor of 58.5 in the low-strain range from 0% to 20%, a wide strain range (0%-200%), a fast response time of 42 ms and good working stability (>5000 stretching-releasing cycles). Subsequently, detailed mechanism of the sensor and its use in full range of human motion monitoring are further studied. It is worth noting that with the distinctive mechanism and structure, the special spandex fiber sensor is able to monitor minimum strain as low as 0.053%, showing tremendous prospect for the field of smart fabrics and wearable health care devices.

An ultrahigh sensitivity micro-cliff graphene wearable pressure sensor made by instant flash light exposure

Wearable and highly sensitive pressure sensors are of great importance for robotics, health monitoring and biomedical applications. For simultaneously achieving high sensitivity within a broad working range, fast response time (within a few milliseconds), minimal hysteresis and excellent cycling stability are critical for high performance pressure sensors. However, it remains a major challenge. Herein, we report a conceptual micro-cliff design of a graphene sensor with a record high sensitivity of up to 72 568 kPa^-1 in a broad working range of 0-255 kPa, which is one order of magnitude higher than the state-of-the-art reported sensitivity. In addition, the detection limit can be as low as 0.35 Pa and the fast response time is less than 5 ms. The sensor also has a minimal hysteresis and an outstanding cycling stability of 5000 cycles, all of which meet the requirements of an ideal pressure sensor. More interestingly, the micro-cliff graphene sensor is made by the fast and scalable flash reduction of graphene oxide using a single flashlight pulse within 150 ms and has been integrated into a wearable smart insole and an E-glove prototype for demonstration of health monitoring applications. This micro-cliff graphene pressure sensor achieves record-high sensitivity, which brings new possibilities in sensor research and promises broad applications.

Nanomaterials and their applications on bio-inspired wearable electronics

Wearable electronics featuring conformal attachment, sensitive perception and intellectual signal processing have made significant progress in recent years. However, when compared with living organisms, artificial sensory devices showed undeniable bulky shape, poor adaptability, and large energy consumption. To make up for the deficiencies, biological examples provide inspirations of novel designs and practical applications. In the field of biomimetics, nanomaterials from nanoparticles to layered two-dimensional materials are actively involved due to their outstanding physicochemical properties and nanoscale configurability. This review focuses on nanomaterials related to wearable electronics through bioinspired approaches on three different levels, interfacial packaging, sensory structure, and signal processing, which comprehensively guided recent progress of wearable devices in leveraging both nanomaterial superiorities and biorealistic functionalities. In addition, opinions on potential development trend are proposed aiming at implementing bioinspired electronics in multifunctional portable sensors, health monitoring, and intelligent prosthetics.

Three-Dimensional (3D) Laser-Induced Graphene: Structure, Properties, and Application to Chemical Sensing

Notwithstanding its relatively recent discovery, graphene has gone through many evolution steps and inspired a multitude of applications in many fields, from electronics to life science. The recent advancements in graphene production and patterning, and the inclusion of two-dimensional (2D) graphenic materials in three-dimensional (3D) superstructures, further extended the number of potential applications. In this Review, we focus on laser-induced graphene (LIG), an intriguing 3D porous graphenic material produced by direct laser scribing of carbonaceous precursors, and on its applications in chemical sensors and biosensors. LIG can be shaped in different 3D forms with a high surface-to-volume ratio, which is a valuable characteristic for sensors that typically rely on phenomena occurring at surfaces and interfaces. Herein, an overview of LIG, including synthesis from various precursors, structure, and characteristic properties, is first provided. The discussion focuses especially on transport and surface properties, and on how these can be controlled by tuning the laser processing. Progresses and trends in LIG-based chemical sensors are then reviewed, discussing the various transduction mechanisms and different LIG functionalization procedures for chemical sensing. A comparative evaluation of sensors performance is then provided. Finally, sensors for glucose detection are reviewed in more detail, since they represent the vast majority of LIG-based chemical sensors.

Fabrication and Characterization of Physical and Mechanical Properties of Carbon Nanotubes-Graphene-Based Sandwich Composite Pressure Sensor

In this work, piezoresistive properties of graphene-multiwalled carbon nanotubes (MWCNTs) composites are investigated, characterized, and compared. Sandwich-type composite piezoresistive pressure-sensitive sensors (Ag/Graphene-MWCNT/Ag) with the same diameters, but different fabrication pressures and thicknesses were fabricated using the mortar and pestle/hydraulic press technique. To produce low-electrical-resistance contacts, both sides of the composite sensors were painted with silver (Ag) paste. All the sensors showed reductions in the direct current (DC) resistance 'R' with an increment in external uniaxial applied pressure. However, it was observed that higher fabrication pressure led to a lower resistance value of the composite, while the thicker samples give lower electrical conductivity and higher resistance than the thinner samples. The experimental data for all composite pressure sensors were in excellent agreement with the simulated results.

Flexible capacitive sensor based on 2D-titanium dioxide nanosheets/bacterial cellulose composite film

In this paper, titanium dioxide nanosheets (Ti_0.91O₂ NSs) were incorporated into bacterial cellulose (BC) film for dielectric property tuning while maintaining the flexibility of the resulting composite paper. By taking advantage of the improved dielectric constant, the nanosheets/BC composites were employed as capacitive sensors. The fabricated devices showed the highest sensing performance of ∼2.44 × 10^-3 kPa^-1 from 0 to 30 N when incorporating as little as 3 vol% of Ti_0.91O₂ NSs (or ∼2 wt% Ti). Stable operation and high robustness of the sensor were demonstrated, where simple human motions could be efficiently monitored. This study provided a route for preparing flexible and low-cost BC composite paper for capacitive sensor. The strategy for enhancing the dielectric properties as well as sensing performances of the BC demonstrated herein will be essential for the future development of biocompatible, low-cost, and eco-friendly wearable electronics.

Flexible and Sensitivity-Adjustable Pressure Sensors Based on Carbonized Bacterial Nanocellulose/Wood-Derived Cellulose Nanofibril Composite Aerogels

For sustainability and environmental friendliness, the renewable biomaterials including cellulose have been widely used in flexible electronics, such as pressure sensors. Herein, the carbonized bacterial nanocellulose with excellent conductivity and wood-derived cellulose nanofibrils are combined to prepare the aerogel through directional ice-templating and freeze-drying. The obtained composite aerogel, which has a porous structure and aligned channels, is further employed as an active layer to prepare the resistive-type pressure sensor on a paper substrate. This pressure sensor exhibits remarkable flexibility, fast response, reliability, and especially adjustable sensitivity in a wide pressure range (0-100 kPa). In addition, the sensor's working mechanism and potential applications, such as motion detection, footstep recognition, and communication with smartphones via Bluetooth, are also well demonstrated. Moreover, this work provides novel insights into the development of green pressure sensors and the utilization of sustainable natural biomaterials in high-tech fields.

First Decade of Interfacial Iontronic Sensing: From Droplet Sensors to Artificial Skins

Over the past decade, a brand-new pressure- and tactile-sensing modality, known as iontronic sensing has emerged, utilizing the supercapacitive nature of the electrical double layer (EDL) that occurs at the electrolytic-electronic interface, leading to ultrahigh device sensitivity, high noise immunity, high resolution, high spatial definition, optical transparency, and responses to both static and dynamic stimuli, in addition to thin and flexible device architectures. Together, it offers unique combination of enabling features to tackle the grand challenges in pressure- and tactile-sensing applications, in particular, with recent interest and rapid progress in the development of robotic intelligence, electronic skin, wearable health as well as the internet-of-things, from both academic and industrial communities. A historical perspective of the iontronic sensing discovery, an overview of the fundamental working mechanism along with its device architectures, a survey of the unique material aspects and structural designs dedicated, and finally, a discussion of the newly enabled applications, technical challenges, and future outlooks are provided for this promising sensing modality with implementations. The state-of-the-art developments of the iontronic sensing technology in its first decade are summarized, potentially providing a technical roadmap for the next wave of innovations and breakthroughs in this field.

Graphene, an epoch-making material in RFID technology: a detailed overview

Many researchers claim that graphene, a specially studied carbon allotrope, has a single layer of atoms organized in a two-dimensional honeycomb lattice.

Mechanical Pressure Characterization of CNT-Graphene Composite Material

Carbon nanotubes (CNTs) and graphene are extensively studied materials in the field of sensing technology and other electronic devices due to their better functional and structural properties. Additionally, more attention is given to utilize these materials as a filler to reinforce the properties of other materials. However, the role of weight percentage of CNTs in the piezoresistive properties of these materials has not been reported yet. In this work, CNT-graphene composite-based piezoresistive pressure samples in the form of pellets with different weight percentages of CNTs were fabricated and characterized. All the samples exhibit a decrease in the direct current (DC) resistance with the increase in external uniaxial applied pressure from 0 to 74.8 kNm⁻². However, under the same external uniaxial applied pressure, the DC resistance exhibit more decrease as the weight percentage of the CNTs increase in the composites.

CNT-coated magnetic self-assembled elastomer micropillar arrays for sensing broad-range pressures

Cost-effective and broad-range flexible pressure sensors are highly desirable for use in wearable electronic devices for a wide range of sensitive measurements, from pulse to dynamic human motion. Herein, we present a high-performance flexible pressure sensor based on carbon nanotube-coated elastomer micropillar arrays (EMPAs). The EMPAs are prepared using a facile magnetic-field-induced self-assembly technique, which provides a simple and low-cost strategy to fabricate microstructured elastomers for constructing high-performance pressure sensors. Since high-ratio microstructured elastomers are employed as the sensing materials, our pressure sensors show a superior pressure-sensing performance, with a high sensitivity of 0.497 kPa^-1 in the low-pressure regime of <100 Pa, a broad sensing range from a few pascals up to 80 kPa, and a fast response time of <0.2 s. Finally, we demonstrate that the sensor can be used to not only detect human arthrosis movements, but also to monitor subtle human physiological activities.

A spiking and adapting tactile sensor for neuromorphic applications

The ongoing research on and development of increasingly intelligent artificial systems propels the need for bio inspired pressure sensitive spiking circuits. Here we present an adapting and spiking tactile sensor, based on a neuronal model and a piezoelectric field-effect transistor (PiezoFET). The piezoelectric sensor device consists of a metal-oxide semiconductor field-effect transistor comprising a piezoelectric aluminium-scandium-nitride (AlxSc1-xN) layer inside of the gate stack. The so augmented device is sensitive to mechanical stress. In combination with an analogue circuit, this sensor unit is capable of encoding the mechanical quantity into a series of spikes with an ongoing adaptation of the output frequency. This allows for a broad application in the context of robotic and neuromorphic systems, since it enables said systems to receive information from the surrounding environment and provide encoded spike trains for neuromorphic hardware. We present numerical and experimental results on this spiking and adapting tactile sensor.

Recent Progress in Pressure Sensors for Wearable Electronics: From Design to Applications

In recent years, innovative research has been widely conducted on flexible devices for wearable electronics applications. Many examples of wearable electronics, such as smartwatches and glasses, are already available to consumers. However, strictly speaking, the sensors used in these devices are not flexible. Many studies are underway to address a wider range of wearable electronics and the development of related fields is progressing very rapidly. In particular, there is intense interest in the research field of flexible pressure sensors because they can collect and use information regarding a wide variety of sources. Through the combination of novel materials and fabrication methods, human-machine interfaces, biomedical sensors, and motion detection techniques, it is now possible to produce sensors with a superior level of performance to meet the demands of wearable electronics. In addition, more compact and human-friendly sensors have been invented in recent years, as biodegradable and self-powered sensor systems have been studied. In this review, a comprehensive description of flexible pressure sensors will be covered, and design strategies that meet the needs for applications in wearable electronics will be presented. Moreover, we will cover several fabrication methods to implement these technologies and the corresponding real-world applications.

3D Graphene Materials: From Understanding to Design and Synthesis Control

Carbon materials, with their diverse allotropes, have played significant roles in our daily life and the development of material science. Following 0D C₆₀ and 1D carbon nanotube, 2D graphene materials, with their distinctively fascinating properties, have been receiving tremendous attention since 2004. To fulfill the efficient utilization of 2D graphene sheets in applications such as energy storage and conversion, electrochemical catalysis, and environmental remediation, 3D structures constructed by graphene sheets have been attempted over the past decade, giving birth to a new generation of graphene materials called 3D graphene materials. This review starts with the definition, classifications, brief history, and basic synthesis chemistries of 3D graphene materials. Then a critical discussion on the design considerations of 3D graphene materials for diverse applications is provided. Subsequently, after emphasizing the importance of normalized property characterization for the 3D structures, approaches for 3D graphene material synthesis from three major types of carbon sources (GO, hydrocarbons and inorganic carbon compounds) based on GO chemistry, hydrocarbon chemistry, and new alkali-metal chemistry, respectively, are comprehensively reviewed with a focus on their synthesis mechanisms, controllable aspects, and scalability. At last, current challenges and future perspectives for the development of 3D graphene materials are addressed.

Miniaturized Piezo Force Sensor for a Medical Catheter and Implantable Device

Real-time monitoring of intrabody pressures can benefit from the use of miniaturized force sensors during surgical interventions or for the recovery period thereafter. Herein, we present a force sensor made of poly(vinylidene fluoride)-co-trifluoroethylene (P(VDF-TrFE)) with a simple fabrication process that has been integrated into the tip of a medical catheter for intraluminal pressure monitoring, as well as into an implantable device with a power consumption of 180 μW obtained by the near-field communication (NFC) interface to monitor the arterial pulse at the subcutaneous level (≤1 cm). The pressure range supported by the sensor is below 40 kPa, with a signal responsivity of 0.63 μV/Pa and a mean lifetime expectancy of 400 000 loading cycles inside physiological conditions (12 kPa). The proposed sensor has been tested experimentally with synthetic anatomical models for the lungs (bronchoscopy) and subcutaneous tissue, as well as directly above the human carotid and radial arteries. Information about these pressure levels can provide insights about tissue homeostasis inside the body as fluid dynamics are altered in some health conditions affecting the hemodynamic and endocrine body systems, whereas for surgical interventions, precise control and estimation of the pressure exerted by a catheter over the internal walls are necessary to avoid endothelium injuries that lead to bleeding, liquid extravasation, or flow alteration associated with atheroma formation.

Flexible Ecoflex®/Graphene Nanoplatelet Foams for Highly Sensitive Low-Pressure Sensors

The high demand for multifunctional devices for smart clothing applications, human motion detection, soft robotics, and artificial electronic skins has encouraged researchers to develop new high-performance flexible sensors. In this work, we fabricated and tested new 3D squeezable Ecoflex^® open cell foams loaded with different concentrations of graphene nanoplatelets (GNPs) in order to obtain lightweight, soft, and cost-effective piezoresistive sensors with high sensitivity in a low-pressure regime. We analyzed the morphology of the produced materials and characterized both the mechanical and piezoresistive response of samples through quasi-static cyclic compression tests. Results indicated that sensors infiltrated with 1 mg of ethanol/GNP solution with a GNP concentration of 3 mg/mL were more sensitive and stable compared to those infiltrated with the same amount of ethanol/GNP solution but with a lower GNP concentration. The electromechanical response of the sensors showed a negative piezoresistive behavior up to ~10 kPa and an opposite trend for the 10-40 kPa range. The sensors were particularly sensitive at very low deformations, thus obtaining a maximum sensitivity of 0.28 kPa^-1 for pressures lower than 10 kPa.

Transduction Mechanisms, Micro-Structuring Techniques, and Applications of Electronic Skin Pressure Sensors: A Review of Recent Advances

Electronic skin (e-skin), which is an electronic surrogate of human skin, aims to recreate the multifunctionality of skin by using sensing units to detect multiple stimuli, while keeping key features of skin such as low thickness, stretchability, flexibility, and conformability. One of the most important stimuli to be detected is pressure due to its relevance in a plethora of applications, from health monitoring to functional prosthesis, robotics, and human-machine-interfaces (HMI). The performance of these e-skin pressure sensors is tailored, typically through micro-structuring techniques (such as photolithography, unconventional molds, incorporation of naturally micro-structured materials, laser engraving, amongst others) to achieve high sensitivities (commonly above 1 kPa⁻¹), which is mostly relevant for health monitoring applications, or to extend the linearity of the behavior over a larger pressure range (from few Pa to 100 kPa), an important feature for functional prosthesis. Hence, this review intends to give a generalized view over the most relevant highlights in the development and micro-structuring of e-skin pressure sensors, while contributing to update the field with the most recent research. A special emphasis is devoted to the most employed pressure transduction mechanisms, namely capacitance, piezoelectricity, piezoresistivity, and triboelectricity, as well as to materials and novel techniques more recently explored to innovate the field and bring it a step closer to general adoption by society.