Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments

Progress in wearable acoustical sensors for diagnostic applications

With extensive and widespread uses of miniaturized and intelligent wearable devices, continuously monitoring subtle spatial and temporal changes in human physiological states becomes crucial for daily healthcare and professional medical diagnosis. Wearable acoustical sensors and related monitoring systems can be comfortably applied onto human body with a distinctive function of non-invasive detection. This paper reviews recent advances in wearable acoustical sensors for medical applications. Structural designs and characteristics of the structural components of wearable electronics, including piezoelectric and capacitive micromachined ultrasonic transducer (i.e., pMUT and cMUT), surface acoustic wave sensors (SAW) and triboelectric nanogenerators (TENGs) are discussed, along with their fabrication techniques and manufacturing processes. Diagnostic applications of these wearable sensors for detection of biomarkers or bioreceptors and diagnostic imaging have further been discussed. Finally, main challenges and future research directions in these fields are highlighted.

Graphene oxide decorated multi-frequency surface acoustic wave humidity sensor for hygienic applications

This work presents the single-chip integration of a multi-frequency surface acoustic wave resonator (SAWR) based humidity sensor. Graphene oxide (GO), a humidity-sensing material, is integrated onto a confined sensing area of SAWR via electrospray deposition (ESD). The ESD method allows ng-resolution deposition of GO, optimizing the amount of sensing material. The proposed sensor consists of SWARs at three different resonant frequencies (180, 200 and 250 MHz) with a shared common sensing region, thus allowing direct analysis of sensor performances at different operating frequencies. Our findings reveal that the resonant frequency of the sensor impacts both measurement sensitivity and stability. A higher operating frequency ensures better sensitivity but suffers from a larger damping effect from absorbed water molecules. The maximum measurement sensitivity of 17.4 ppm/RH% is achieved with low drift. In addition, the developed sensor exhibits improved stability and sensitivity by as much as 150% and 75% in frequency shift and Quality factor (Q), respectively, by carefully selecting the operating frequencies at a given RH% range. Finally, the sensors are used for various hygienic applications, such as non-contact proximity detection and face mask inspection.

Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications

Flexible surface acoustic wave (SAW) devices have recently attracted tremendous attention for their widespread application in sensing and microfluidics. However, for these applications, SAW devices often need to be bent into off-axis deformations between the acoustic wave propagation direction and bending direction. Currently, there are few studies on this topic, and the bending mechanisms during off-axis bending deformations have remained unexplored for multisensing applications. Herein, we fabricated aluminum nitride (AlN) flexible SAW devices by using high-quality AlN films deposited on flexible glass substrates and systematically investigated their complex deformation behaviors. A theoretical model was first developed using coupling wave equations and the boundary condition method to analyze the characteristics of the device with bending and off-axis deformation under elastic strains. The relationships between the frequency shifts of the SAW device and the bending strain and off-axis angle were obtained, and the results were identical to those from the theoretical calculations. Finally, we performed proof-of-concept demonstrations of its multisensing potential by monitoring human wrist movements at various off-axis angles and detecting UV light intensities on a curved surface, thus paving the way for the application of versatile flexible electronics.

FEM Analysis of Various Multilayer Structures for CMOS Compatible Wearable Acousto-Optic Devices

Lately, wearable applications featuring photonic on-chip sensors are on the rise. Among many ways of controlling and/or modulating, the acousto-optic technique is seen to be a popular technique. This paper undertakes the study of different multilayer structures that can be fabricated for realizing an acousto-optic device, the objective being to obtain a high acousto-optic figure of merit (AOFM). By varying the thicknesses of the layers of these materials, several properties are discussed. The study shows that the multilayer thin film structure-based devices can give a high value of electromechanical coupling coefficient (k2) and a high AOFM as compared to the bulk piezoelectric/optical materials. The study is conducted to find the optimal normalised thickness of the multilayer structures with a material possessing the best optical and piezoelectric properties for fabricating acousto-optic devices. Based on simulations and studies of SAW propagation characteristics such as the electromechanical coupling coefficient (k2) and phase velocity (v), the acousto-optic figure of merit is calculated. The maximum value of the acousto-optic figure of merit achieved is higher than the AOFM of all the individual materials used in these layer structures. The suggested SAW device has potential application in wearable and small footprint acousto-optic devices and gives better results than those made with bulk piezoelectric materials.

High Performance Acoustic Wave Nitrogen Dioxide Sensor with Ultraviolet Activated 3D Porous Architecture of Ag-Decorated Reduced Graphene Oxide and Polypyrrole Aerogel

Surface acoustic wave (SAW) devices have been widely explored for real-time monitoring of toxic and irritant chemical gases such as nitrogen oxide (NO₂), but they often have issues such as a complicated process of the sensing layer, low sensitivity, long response time, irreversibility, and/or requirement of high temperatures to enhance sensitivity. Herein, we report a sensing material design for room-temperature NO₂ detection based on a 3D porous architecture of Ag-decorated reduced graphene oxide-polypyrrole hybrid aerogels (rGO-PPy/Ag) and apply UV activation as an effective strategy to further enhance the NO₂ sensing performance. The rGO-PPy/Ag-based SAW sensor with the UV activation exhibits high sensitivity (127.68 Hz/ppm), fast response/recovery time (36.7 s/58.5 s), excellent reproducibility and selectivity, and fast recoverability. Its enhancement mechanisms for highly sensitive and selective detection of NO₂ are based on a 3D porous architecture, Ag-decorated rGO-PPy, p-p heterojunction in rGO-PPy/Ag, and UV photogenerated carriers generated in the sensing layer. The scientific findings of this work will provide the guidance for future exploration of next-generation acoustic-wave-based gas sensors.

Ultrathin Glass-Based Flexible, Transparent, and Ultrasensitive Surface Acoustic Wave Humidity Sensor with ZnO Nanowires and Graphene Quantum Dots

Flexible electronic devices are normally based on organic polymer substrate. In this work, an ultrathin glass-based flexible, transparent, and ultrasensitive ZnO/glass surface acoustic wave (SAW) humidity sensor is developed using a composite sensing layer of ZnO nanowires (NWs) and graphene quantum dots (GQDs). It shows much larger effective electromechanical coupling coefficients and signal amplitudes, compared to those of flexible polymer-based SAW devices reported in the literature. Attributed to large specific surface areas of ZnO NWs, large numbers of hydrophilic functional groups of GQDs, as well as the formation of p-n heterojunctions between GQDs and ZnO NWs, the developed ZnO/glass flexible SAW sensor shows an ultrahigh humidity sensitivity of 40.16 kHz/% RH, along with its excellent stability and repeatability. This flexible and transparent SAW sensor has demonstrated insignificant deterioration of humidity sensing performance, when it is bent on a curved surface with a bending angle of 30°, revealing its potential applications for sensing on curved and complex surfaces. The humidity sensing and human breathing detection have further been demonstrated for wearable electronic applications using ultrathin glass-based devices with completely inorganic materials.