In situ nanomechanical testing in focused ion beam and scanning electron microscopes

Optimal Design and Analysis for a New 1-DOF Compliant Stage Based on Additive Manufacturing Method for Testing Medical Specimens

In situ nanoindentation is extensively employed for online observing deformation and mechanical behaviors of bio-materials. However, the existing designs of the positioning stages have limited performances for testing soft or hard biomaterials. Consequently, this paper proposes a new structural design of a compliant one degree of freedom (01-DOF) stage with faster response. In addition to a new design, this article applies an analytical method to estimate the kinematic and dynamic behaviors of the stage. Firstly, the 01-DOF stage is designed with two modules, including a displacement amplifier with six levers and a symmetric parallelogram mechanism. Secondly, a kinetostatic diagram of the stage is built by pseudo-rigid-body method. Then, the dynamic equation of the proposed stage is formulated using the Lagrange method. In order to speed up the response of the indentation system, the structural optimization of the stage is conducted via the Firefly algorithm. The results showed that the theoretical first-order resonant frequency is found at about 226.8458 Hz. The theoretical consequences are nearby to the verified simulation. Besides, this achieved frequency of the presented stage is greater than that of previous stages. In an upcoming study, the prototype will be fabricated by additive manufacturing method or a computerized wire cutting method in order to verify the analytical results with experimental results.

Non-contact temperature control and stereo digital image correlation for high-temperature testing of miniature tubular specimens

Component failures very often occur due to high temperature and multiaxial stress states arising at critical component locations. To imitate such loading conditions, a multiaxial miniature testing system (MMTS) with axial, torsional, and internal pressurization capabilities for high-temperature testing of miniature tubular specimens has been developed. Among many challenges of developing the MMTS, uniform heating, temperature measurement and control, and surface strain measurement on a miniature tubular specimen at high temperatures have significant difficulties. This paper addresses two significant challenges: first, the development of a non-contact temperature control system using infrared thermography to uniformly heat a miniature specimen of 1 mm outer diameter (OD), and second, the development of a stereo digital image correlation (stereo-DIC) setup for strain measurement on the miniature specimen subjected to high temperature. The developed control system maintains the test temperature through a closed feedback loop and employs a fail-safe mechanism to protect the MMTS load frame components against unanticipated temperature rises. The thermocouple wire-size effect on the measured temperature was examined for three different wire sizes: 0.05, 0.25, and 0.5 mm for accurate emissivity determination required for infrared thermography. Emissivities of the specimen surface at different high temperatures were experimentally determined. Inherent error analysis of the developed high-temperature stereo-DIC setup showed acceptable strain measurement uncertainty. The effectiveness of the developed non-contact temperature control system and high-temperature stereo-DIC setup has been verified by performing tensile testing of a 1 mm OD specimen at 500 °C.

Extracting information from noisy data: Strain mapping during dynamic in-situ SEM experiments

Micromechanical testing techniques can reveal a variety of characteristics in materials that are otherwise impossible to address. However, unlike to macroscopic testing, these miniaturized experiments are more challenging to realize and analyze, as loading and boundary conditions can often not be controlled to the same extent as in standardized macroscopic tests. Hence, exploiting all possible information from such an experiment seems utmost desirable. In the present work, we utilize dynamic in-situ microtensile testing of a nanocrystalline equiatomic CoCrFeMnNi high entropy alloy in conjunction with initial feature tracking to obtain a continuous two-dimensional strain field. This enables an evaluation of true stress-strain data as well as of the Poisson's ratio and allows to study localization of plastic deformation for the specimen. We demonstrate that the presented image correlation method allows for an additional gain of information in these sophisticated experiments over commercial tools and can serve as a starting point to study deformation states exhibiting more complex strain fields.

Instrument for fine control of drop-on-demand electrohydrodynamic jet printing by current measurement

In this work, an instrument of drop-on-demand electrohydrodynamic jet (DoD E-Jet) printing device equipped with a current measurement and control system was designed and developed for finely controlling the printing process. The relationships between the current and printing parameters of voltage, frequency, and flow rate were deeply investigated, and the examination data and conclusion were obtained under the condition of the needle size remaining unchanged. Especially, the equation relationship between the flow rate and current was established, which can be used for the modification of the DoD E-Jet printing process. The map describing the stable printing range, droplet size, and current was also recognized, which can help us to select parameters for stable printing. Based on the current measurement and control system and the established relationship, the optimized current and printing parameters were chosen to print uniform graphene microstructures. This instrument provides an effective method for monitoring, adjusting, and controlling the DoD E-Jet printing process and further improving the quality of the printed structures for micro/nanoelectromechanical system (M/NEMS) devices.

Synthesis and modelling of the mechanical properties of Ag, Au and Cu nanowires

The recent interest to nanotechnology aims not only at device miniaturisation, but also at understanding the effects of quantised structure in materials of reduced dimensions, which exhibit different properties from their bulk counterparts. In particular, quantised metal nanowires made of silver, gold or copper have attracted much attention owing to their unique intrinsic and extrinsic length-dependent mechanical properties. Here we review the current state of art and developments in these nanowires from synthesis to mechanical properties, which make them leading contenders for next-generation nanoelectromechanical systems. We also present theories of interatomic interaction in metallic nanowires, as well as challenges in their synthesis and simulation.

Recent Advances on In Situ SEM Mechanical and Electrical Characterization of Low-Dimensional Nanomaterials

In the past decades, in situ scanning electron microscopy (SEM) has become a powerful technique for the experimental study of low-dimensional (1D/2D) nanomaterials, since it can provide unprecedented details for individual nanostructures upon mechanical and electrical stimulus and thus uncover the fundamental deformation and failure mechanisms for their device applications. In this overview, we summarized recent developments on in situ SEM-based mechanical and electrical characterization techniques including tensile, compression, bending, and electrical property probing on individual nanostructures, as well as the state-of-the-art electromechanical coupling analysis. In addition, the advantages and disadvantages of in situ SEM tests were also discussed with some possible solutions to address the challenges. Furthermore, critical challenges were also discussed for the development and design of robust in situ SEM characterization platform with higher resolution and wider range of samples. These experimental efforts have offered in-depth understanding on the mechanical and electrical properties of low-dimensional nanomaterial components and given guidelines for their further structural and functional applications.

Site-specific characterization of beetle horn shell with micromechanical bending test in focused ion beam system

Biological materials are the result of years of evolution and possess a number of efficient features and structures. Researchers have investigated the possibility of designing biomedical structures that take advantage of these structural features. Insect shells, such as beetle shells, are among the most promising types of biological material for biomimetic development. However, due to their intricate geometries and small sizes, it is challenging to measure the mechanical properties of these microscale structures. In this study, we developed an in-situ testing platform for site-specific experiments in a focused ion beam (FIB) system. Multi-axis nano-manipulators and a micro-force sensor were utilized in the testing platform to allow better results in the sample preparation and data acquisition. The entire test protocol, consisting of locating sample, ion beam milling and micro-mechanical bending tests, can be carried out without sample transfer or reattachment. We used our newly devised test platform to evaluate the micromechanical properties and structural features of each separated layer of the beetle horn shell. The Young's modulus of both the exocuticle and endocuticle layers was measured. We carried out a bending test to characterize the layers mechanically. The exocuticle layer bent in a brick-like manner, while the endocuticle layer exhibited a crack blunting effect.

STATEMENT OF SIGNIFICANCE

This paper proposed an in-situ manipulation/test method in focused ion beam for characterizing micromechanical properties of beetle horn shell. The challenge in precise and accurate fabrication for the samples with complex geometry was overcome by using nano-manipulators having multi-degree of freedom and a micro-gripper. With the aid of this specially designed test platform, bending tests were carried out on cantilever-shaped samples prepared by focused ion beam milling. Structural differences between exocuticle and endocuticle layers of beetle horn shell were explored and the results provided insight into the structural advantages of each biocomposite structure.

A versatile atomic force microscope integrated with a scanning electron microscope

A versatile atomic force microscope (AFM), which can be installed in a scanning electron microscope (SEM), is introduced. The flexible design of the instrument enables correlated analysis for different experimental configurations, such as AFM imaging directly after nanoindentation in vacuum. In order to demonstrate the capabilities of the specially designed AFM installed inside a SEM, slip steps emanating around nanoindents in single crystalline brass were examined. This example showcases how the combination of AFM and SEM imaging can be utilized for quantitative dislocation analysis through the measurement of the slip step heights without the hindrance of oxide formation. Finally, an in situ nanoindentation technique is introduced, illustrating the use of AFM imaging during indentation experiments to examine plastic deformation occurring under the indenter tip. The mechanical indentation data are correlated to the SEM and AFM images to estimate the number of dislocations emitted to the surface.

Thermomechanical Behavior of Molded Metallic Glass Nanowires

Metallic glasses are disordered materials that offer the unique ability to perform thermoplastic forming operations at low thermal budget while preserving excellent mechanical properties such as high strength, large elastic strain limits, and wear resistance owing to the metallic nature of bonding and lack of internal defects. Interest in molding micro- and nanoscale metallic glass objects is driven by the promise of robust and high performance micro- and nanoelectromechanical systems and miniature energy conversion devices. Yet accurate and efficient processing of these materials hinges on a robust understanding of their thermomechanical behavior. Here, we combine large-scale thermoplastic tensile deformation of collections of Pt-based amorphous nanowires with quantitative thermomechanical studies of individual nanowires in creep-like conditions to demonstrate that superplastic-like flow persists to small length scales. Systematic studies as a function of temperature, strain-rate, and applied stress reveal the transition from Newtonian to non-Newtonian flow to be ubiquitous across the investigated length scales. However, we provide evidence that nanoscale specimens sustain greater free volume generation at elevated temperatures resulting in a flow transition at higher strain-rates than their bulk counterparts. Our results provide guidance for the design of thermoplastic processing methods and methods for verifying the flow response at the nanoscale.

Indentation Tests Reveal Geometry-Regulated Stiffening of Nanotube Junctions

Here we report a unique method to locally determine the mechanical response of individual covalent junctions between carbon nanotubes (CNTs), in various configurations such as "X", "Y", and "Λ"-like. The setup is based on in situ indentation using a picoindenter integrated within a scanning electron microscope. This allows for precise mapping between junction geometry and mechanical behavior and uncovers geometry-regulated junction stiffening. Molecular dynamics simulations reveal that the dominant contribution to the nanoindentation response is due to the CNT walls stretching at the junction. Targeted synthesis of desired junction geometries can therefore provide a "structural alphabet" for construction of macroscopic CNT networks with tunable mechanical response.

Tailoring and understanding the mechanical properties of nanoparticle-shelled bubbles

One common approach to generate lightweight materials with high specific strength and stiffness is the incorporation of stiff hollow microparticles (also known as bubbles or microballoons) into a polymeric matrix. The mechanical properties of these composites, also known as syntactic foams, greatly depend on those of the hollow microparticles. It is critical to precisely control the properties of these bubbles to fabricate lightweight materials that are suitable for specific applications. In this paper, we present a method to tailor the mechanical properties and response of highly monodisperse nanoparticle-shelled bubbles using thermal treatment. We characterize the mechanical properties of individual as-assembled bubbles as well as those of thermally treated ones using nanoindentation and quantitative in situ compression tests. As-assembled bubbles display inelastic response, whereas thermally treated bubbles behave elastically. We also show that the stiffness and strength of bubbles are enhanced significantly, as much as 12 and 14 times that of the as-assembled bubbles, respectively, via thermal treatment. We complement the experimental results with finite element analysis (FEA) to understand the effect of shell thickness nonuniformity as well as the inelasticity on the mechanical response and fracture behavior of these bubbles. We demonstrate that the failure mechanism of bubbles incorporated into a polymer composite depends on the structure of the bubbles.

Temperature controlled tensile testing of individual nanowires

We present a novel experimental method for quantitatively characterizing the temperature-dependent mechanical behavior of individual nanostructures during uniaxial straining. By combining a microelectromechanical tensile testing device with a low thermal mass and digital image correlation providing nm-level displacement resolution, we show successful incorporation of a testing platform in a vacuum cryostat system with an integrated heater and temperature control. Characterization of the local sample temperature and time-dependent response at both low and high temperature demonstrates a testing range of ∼90-475 K and steady-state drift rates less than 0.04 K/min. In situ operation of the tensile testing device employing resistively heated thermal actuators while imaging with an optical microscope enables high-resolution displacement measurements, from which stress-strain behavior of the nanoscale specimens is deduced. We demonstrate the efficacy of our approach in measuring the temperature dependence of tensile strength in nominally defect-free ⟨110⟩ Pd nanowhiskers. We uncover a pronounced sensitivity of the plastic response to testing temperature over a range of ∼300 K, with an ultimate strength in excess of 6 GPa at low temperature. The results are discussed in the context of thermally activated deformation mechanisms and defect nucleation in defect-free metallic nanostructures.

Effect of organometallic clamp properties on the apparent diversity of tensile response of nanowires

The influence of the experimental boundary conditions used for tensile testing of individual nanowires on the measured apparent mechanical response is reported. Using a microelectromechanical platform designed for in situ tensile testing, in combination with digital image correlation of sequences of scanning electron microscope images, the mechanical behavior of single crystalline Si, Pd, and Ge2Sb2Te5 nanowires was measured during load-unload cycles. In situ testing enables direct determination of the nanowire strain. Comparison of the direct strain with common metrics for apparent strain that include any compliance or slipping of the clamping materials (electron-beam induced Pt-containing deposits) highlights several different artifacts that may be manifested. Calculation of the contact stiffness is thus enabled, providing guidelines for both proper strain measurement and selection of clamping materials and geometries that facilitate elucidation of intrinsic material response. Our results suggest that the limited ability to tailor the stiffness of electron-beam induced deposits results from the predominance of the organic matrix in controlling its mechanical properties owing to relatively low Pt content and sparse morphology.

Characterizing microscale biological samples under tensile loading: stress-strain behavior of cell wall fragment of onion outer epidermis

PREMISE OF THE STUDY

The results of published studies investigating the tissue-scale mechanical properties of plant cell walls are confounded by the unknown contributions of the middle lamella and the shape and size of each cell. However, due to their microscale size, cell walls have not yet been characterized at the wall fragment level under tensile loading. It is imperative to understand the stress-strain behavior of cell wall fragments to relate the wall's mechanical properties to its architecture. •

METHODS

This study reports a novel method used to characterize wall fragments under tensile loading. Cell wall fragments from onion outer epidermal peels were cut to the desired size (15 × 5 µm) using the focused ion beam milling technique, and these fragments were manipulated onto a microelectromechanical system (MEMS) tensile testing device. The stress-strain behavior of the wall fragments both in the major and minor growth directions were characterized in vacuo. •

KEY RESULTS

The measured mean modulus, fracture strength, and fracture strain in the major growth direction were 3.7 ± 0.8 GPa, 95.5 ± 24.1 MPa, and 3.0 ± 0.5%, respectively. The corresponding properties along the minor growth direction were 4.9 ± 1.2 GPa, 159 ± 48.4 MPa, and 3.8 ± 0.5%, respectively. •

CONCLUSIONS

The fracture strength and fracture strain were significantly different along the major and minor growth directions, the wall fragment level modulus of elasticity anisotropy for a dehydrated cell wall was 1.23, suggesting a limited anisotropy of the cell wall itself compared with tissue-scale results.

Monolithic integration of nanoscale tensile specimens and MEMS structures

Nanoscale materials often have stochastic material properties due to a random distribution of material defects and an insufficient number of defects to ensure a consistent average mechanical response. Current methods to measure the mechanical properties employ MEMS-based actuators. The nanoscale specimens are typically mounted manually onto the load platform, so the boundary conditions have random variations, complicating the experimental measurement of the intrinsic stochasticity of the material properties. Here we show methods for monolithic integration of a nanoscale specimen co-fabricated with the loading platform. The nanoscale specimen is gold with dimensions of ∼40 nm thickness, 350 ± 50 nm width, and 7 μm length and the loading platform is an interdigitated electrode electrostatic actuator. The experiment is performed in a scanning electron microscope and digital image correlation is employed to measure displacements to determine stress and strain. The ultimate tensile strength of the nanocrystalline nanoscale specimen approaches 1 GPa, consistent with measurements made by other nanometer scale sample characterization methods on other material samples at the nanometer scale, as well as gold samples at the nanometer scale. The batch-compatible microfabrication method can be used to create nominally identical nanoscale specimens and boundary conditions for a broad range of materials.

Tunable Tensile Ductility in Metallic Glasses

Widespread adoption of metallic glasses (MGs) in applications motivated by high strength and elasticity combined with plastic-like processing has been stymied by their lack of tensile ductility. One emerging strategy to couple the attractive properties of MGs with resistance to failure by shear localization is to employ sub-micron sample or feature length scales, although conflicting results shroud an atomistic understanding of the responsible mechanisms in uncertainty. Here, we report in situ deformation experiments of directly moulded Pt_57.5Cu_14.7Ni_5.3P_22.5 MG nanowires, which show tunable tensile ductility. Initially brittle as-moulded nanowires can be coerced to a distinct glassy state upon irradiation with Ga⁺ ions, leading to tensile ductility and quasi-homogeneous plastic flow. This behaviour is reversible and the glass returns to a brittle state upon subsequent annealing. Our results suggest a novel mechanism for homogenous plastic flow in nano-scaled MGs and strategies for circumventing the poor damage tolerance that has long plagued MGs.

Strength, Hardening, and Failure Observed by In Situ TEM Tensile Testing

We present in situ transmission electron microscope tensile tests on focused ion beam fabricated single and multiple slip oriented Cu tensile samples with thicknesses in the range of 100-200 nm. Both crystal orientations fail by localized shear. While failure occurs after a few percent plastic strain and limited hardening in the single slip case, the multiple slip samples exhibit extended homogenous deformation and necking due to the activation of multiple dislocation sources in conjunction with significant hardening. The hardening behavior at 1% plastic strain is even more pronounced compared to compression samples of the same orientation due to the absence of sample taper and the interface to the compression platen. Moreover, we show for the first time that the strain rate sensitivity of such FIB prepared samples is an order of magnitude higher than that of bulk Cu.

A novel apparatus for in situ compression of submicron structures and particles in a high resolution SEM

We report on the development and characterization of a novel in situ manipulation device to perform stressing experiments on the submicron scale inside a high resolution field emission scanning electron microscope. The instrument comprises two main assembly groups: an upper part for positioning and moving a mounted probe and a force sensor as well as a specimen support as lower part. The upper part consists of a closed loop tripod piezoelectric scanner mounted on a self-locking coarse positioning stage. Two interlocked steel springs and a linear variable differential transformer measuring the springs' deflections compose the lower part of the instrument. This arrangement acts as force-sensor and sample support. In comparison to already well-established concepts a wide measuring range is covered by adjusting the spring constant between 30 N/m and 50000 N/m. Moreover, the new device offers striking advantages with respect to force calibration and sample deformation measurements. Force calibration is performed using the eigenfrequency of the force detection system directly inside the SEM. Deformation data are obtained with high accuracy by simultaneously recording displacements above and below the specimen. The detrimental apparatus compliance is determined, and the influence on measured data subsequently minimized: an easy to validate two-springs-in-series model is used for data correction. A force resolution in normal direction of 100 nN accompanied by a sample deformation resolution of 5 nm can be achieved with the instrument using an appropriate load cell stiffness. The capabilities and versatility of this instrument are exemplified by compression experiments performed on submicron amorphous silica particles.

Novel temperature dependent tensile test of freestanding copper thin film structures

The temperature dependent mechanical properties of the metallization of electronic power devices are studied in tensile tests on micron-sized freestanding copper beams at temperatures up to 400 °C. The experiments are performed in situ in a scanning electron microscope. This allows studying the micromechanical processes during the deformation and failure of the sample at different temperatures.

Nanowire failure: long = brittle and short = ductile

Experimental studies of the tensile behavior of metallic nanowires show a wide range of failure modes, ranging from ductile necking to brittle/localized shear failure-often in the same diameter wires. We performed large-scale molecular dynamics simulations of copper nanowires with a range of nanowire lengths and provide unequivocal evidence for a transition in nanowire failure mode with change in nanowire length. Short nanowires fail via a ductile mode with serrated stress-strain curves, while long wires exhibit extreme shear localization and abrupt failure. We developed a simple model for predicting the critical nanowire length for this failure mode transition and showed that it is in excellent agreement with both the simulation results and the extant experimental data. The present results provide a new paradigm for the design of nanoscale mechanical systems that demarcates graceful and catastrophic failure.