Transceiver Design for CMUT-Based Super-Resolution Ultrasound Imaging

Design of an Integrated Micro-Viscometer for Monitoring Engine Oil

This paper proposes a novel integrated micro-viscometer for engine-oil monitoring. The final solution consists of a capacitive micromachined ultrasonic transducer (CMUT) and an application-specific integrated circuit (ASIC). The CMUT is used to generate and capture acoustic waves while immersed in engine oil. The low power transceiver ASIC is interfaced with the CMUT structure for actuation and reception. An integrated charge pump boosts the supply voltage from 3.3 to 22 V to generate the DC polarization voltage of the CMUT. The receiver has a power consumption of 72 µW with an input-referred noise current of 3.2pAHz and a bandwidth of 7 MHz. The CMUT array occupies an area of 3.5 × 1 mm, whereas the ASIC has a chip area of 1 × 1 mm. The system was tested using engine oils of different types and ages at different temperatures. Measurement results show a significant frequency shift due to the dynamic viscosity change that occurs as oil ages. A shift of −1.9 kHz/cP was measured, which corresponds to a shift of 33 Hz/mile. This work paves the way for high accuracy-integrated solutions for oil condition monitoring and is expected to play a significant role in a more economic and environmentally friendly usage of oil.

Integrated Circuits for Medical Ultrasound Applications: Imaging and Beyond

Medical ultrasound has become a crucial part of modern society and continues to play a vital role in the diagnosis and treatment of illnesses. Over the past decades, the development of medical ultrasound has seen extraordinary progress as a result of the tremendous research advances in microelectronics, transducer technology and signal processing algorithms. However, medical ultrasound still faces many challenges including power-efficient driving of transducers, low-noise recording of ultrasound echoes, effective beamforming in a non-linear, high-attenuation medium (human tissues) and reduced overall form factor. This paper provides a comprehensive review of the design of integrated circuits for medical ultrasound applications. The most important and ubiquitous modules in a medical ultrasound system are addressed, i) transducer driving circuit, ii) low-noise amplifier, iii) beamforming circuit and iv) analog-digital converter. Within each ultrasound module, some representative research highlights are described followed by a comparison of the state-of-the-art. This paper concludes with a discussion and recommendations for future research directions.

Supply-Inverted Bipolar Pulser and Tx/Rx Switch for CMUTs Above the Process Limit for High Pressure Pulse Generation

A combined supply-inverted bipolar pulser and a Tx/Rx switch is proposed to drive capacitive micromachined ultrasonic transducers (CMUTs). The supply-inverted bipolar pulser adopts a bootstrap circuit combined with stacked transistors, which guarantees high voltage (HV) operation above the process limit without lowering device reliability. This circuit generates an output signal with a peak-to-peak voltage that is almost twice the supply level. It generates a bipolar pulse with only positive supply voltages. The Tx/Rx switch adopts a diode-bridge structure with the protection scheme dedicated to this proposed pulser. A proof- of-concept ASIC prototype has been implemented in 0.18-μm HV CMOS/DMOS technology with 60 V devices. Measurement results show that the proposed pulser can safely generate a bipolar pulse of -34.6 to 45 V, from a single 45 V supply voltage. The Tx/Rx switch blocks the HV bipolar pulse, resulting in less than 1.6 V at the input of the receiver. Acoustic measurements are performed connecting the pulser to CMUTs with 2 pF capacitance and 8 MHz center frequency. The variation of acoustic output pressures for different pulse shapes were simulated with the large signal CMUT model and compared with the experimental results for transmit pressure optimization. A potential implementation of the methods using MEMS fabrication methods is also described.

Simultaneous transmission and reception on all elements of an array: binary code excitation

Pulse-echo arrays are used in radar, sonar, seismic, medical and non-destructive evaluation. There is a trend to produce arrays with an ever-increasing number of elements. This trend presents two major challenges: (i) often the size of the elements is reduced resulting in a lower signal-to-noise ratio (SNR) and (ii) the time required to record all of the signals that correspond to every transmit-receive path increases. Coded sequences with good autocorrelation properties can increase the SNR while orthogonal sets can be used to simultaneously acquire all of the signals that correspond to every transmit-receive path. However, a central problem of conventional coded sequences is that they cannot achieve good autocorrelation and orthogonality properties simultaneously due to their length being limited by the location of the closest reflectors. In this paper, a solution to this problem is presented by using coded sequences that have receive intervals. The proposed approach can be more than one order of magnitude faster than conventional methods. In addition, binary excitation and quantization can be employed, which reduces the data throughput by roughly an order of magnitude and allows for higher sampling rates. While this concept is generally applicable to any field, a 16-element system was built to experimentally demonstrate this principle for the first time using a conventional medical ultrasound probe.

Full-Differential Folded-Cascode Front-End Receiver Amplifier Integrated Circuit for Capacitive Micromachined Ultrasonic Transducers

This paper describes the design of a front-end receiver amplifier for capacitive micromachined ultrasonic transducer (CMUT). The proposed operational amplifier (op amp) consists of a full differential folded-cascode amplifier stage followed by a class AB output stage. A feedback resistor is applied between the input and the output of the op amp to make a transimpedance amplifier. We analyzed the equivalent circuit model of the CMUT element operating in the receiving mode and obtained the static output impedance and center frequency characteristics of the CMUT. The op amp gain, bandwidth, noise, and power consumption trade-offs are discussed in detail. The amplifier was fabricated using GlobalFoundries 0.18-μm complementary metal-oxide-semiconductor (CMOS) technology. The open loop gain of the amplifier is approximately 65 dB, and its gain bandwidth product is approximately 29.5 MHz. The measured input reference noise current was 56 nA/√Hz@3 MHz. The amplifier chip area is 325 μm × 150 μm and the op amp is powered by ±3.3 V, the static power consumption is 11 mW. We verified the correct operation of our amplifier with CMUT and echo-pulse shown that the CMUT center frequency is 3 MHz with 92% fractional bandwidth.

Supply-Doubled Pulse-Shaping High Voltage Pulser for CMUT Arrays

A supply-doubled pulse-shaping high voltage (HV) pulser is presented for medical ultrasound imaging applications, particularly those that use capacitive micromachined ultrasonic transducers (CMUT). The pulser employs a bootstrap circuit combined with dynamically-biased stacked transistors, which allow HV operation above process limit without lowering device reliability. The new pulser overcomes supply voltage limitation of conventional unipolar pulsers by generating output signals that are almost twice the supply level. It also can generate three-level pulses to further optimize the transmit pressure signals. A proof-of-concept prototype has been implemented in 0.18-μm HV CMOS/DMOS technology with 60 V devices. Measurement results show that the HV pulser can safely generate controllable three-level pulses with up to 85 V_pp from 45 V supply. Acoustic measurements are conducted connecting the pulser to a CMUT with 2 pF capacitance and 8.3 MHz center frequency. The pulse shape has been adjusted for the CMUT under test to generate maximum pressure output and the results are in good agreement with a large signal CMUT model.

Integrated HIFU Drive System on a Chip for CMUT-Based Catheter Ablation System

Conventional High Intensity Focused Ultrasound (HIFU) is a therapeutic modality which is extracorporeally administered. In applications where a relatively small HIFU lesion is required, an intravascular HIFU probe can be deployed to the ablation site. In this paper, we demonstrate the design and implementation a fully integrated HIFU drive system on a chip to be placed on a 6 Fr catheter probe. An 8-element capacitive micromachined ultrasound transducer (CMUT) ring array of 2 mm diameter has been used as the ultrasound source. The driver chip is fabricated in 0.35 μm AMS high-voltage CMOS technology and comprises eight continuous-wave (CW) high-voltage CMUT drivers (10.9 ns and 9.4 ns rise and fall times at 20 V _pp output into a 15 pF), an eight-channel digital beamformer (8-12 MHz output frequency with 11.25 ^° phase accuracy) and a phase locked loop with an integrated VCO as a tunable clock source (128-192 MHz). The chip occupies 1.85 × 1.8 mm ² area including input and output (I/O) pads. When the transducer array is immersed in sunflower oil and driven by the IC with eight 20 V_pp CW pulses at 10 MHz, real-time thermal images of the HIFU beam indicate that the focal temperature rises by 16.8  ^°C in 11 seconds. Each HV driver consumes around 67 mW of power when driving the CMUT array at 10 MHz, which adds up to 560 mW for the whole chip. FEM based analysis reveals that the outer surface temperature of the catheter is expected to remain below the 42  ^°C tissue damage limit during therapy.

Biasing of Capacitive Micromachined Ultrasonic Transducers

Capacitive micromachined ultrasonic transducers (CMUTs) represent an effective alternative to piezoelectric transducers for medical ultrasound imaging applications. They are microelectromechanical devices fabricated using silicon micromachining techniques, developed in the last two decades in many laboratories. The interest for this novel transducer technology relies on its full compatibility with standard integrated circuit technology that makes it possible to integrate on the same chip the transducers and the electronics, thus enabling the realization of extremely low-cost and high-performance devices, including both 1-D or 2-D arrays. Being capacitive transducers, CMUTs require a high bias voltage to be properly operated in pulse-echo imaging applications. The typical bias supply residual ripple of high-quality high-voltage (HV) generators is in the millivolt range, which is comparable with the amplitude of the received echo signals, and it is particularly difficult to minimize. The aim of this paper is to analyze the classical CMUT biasing circuits, highlighting the features of each one, and to propose two novel HV generator architectures optimized for CMUT biasing applications. The first circuit proposed is an ultralow-residual ripple (<5 [Formula: see text]) HV generator that uses an extremely stable sinusoidal power oscillator topology. The second circuit employs a commercially available integrated step-up converter characterized by a particularly efficient switching topology. The circuit is used to bias the CMUT by charging a buffer capacitor synchronously with the pulsing sequence, thus reducing the impact of the switching noise on the received echo signals. The small area of the circuit (about 1.5 cm²) makes it possible to generate the bias voltage inside the probe, very close to the CMUT, making the proposed solution attractive for portable applications. Measurements and experiments are shown to demonstrate the effectiveness of the new approaches presented.