A low-noise differential microphone inspired by the ears of the parasitoid fly Ormia ochracea

Directional Resonant MEMS Acoustic Sensor and Associated Acoustic Vector Sensor

This paper reports on the design, modeling, analysis, and evaluation of a micro-electromechanical systems acoustic sensor and the novel design of an acoustic vector sensor array (AVS) which utilized this acoustic sensor. This research builds upon previous work conducted to develop a small, lightweight, portable system for the detection and location of quiet or distant acoustic sources of interest. This study also reports on the underwater operation of this sensor and AVS. Studies were conducted in the lab and in the field utilizing multiple acoustic sources (e.g., generated tones, gun shots, drones). The sensor operates at resonance, providing for high acoustic sensitivity and a high signal-to-noise ratio (SNR). The sensor demonstrated a maximum SNR of 88 dB with an associated sensitivity of -84.6 dB re 1 V/μPa (59 V/Pa). The sensor design can be adjusted to set a specified resonant frequency to align with a known acoustic signature of interest. The AVS demonstrated an unambiguous, 360-degree, in-plane, azimuthal coverage and was able to provide an acoustic direction of arrival to an average error of within 3.5° during field experiments. The results of this research demonstrate the potential usefulness of this sensor and AVS design for specific applications.

Review of the applications of principles of insect hearing to microscale acoustic engineering challenges

When looking for novel, simple, and energy-efficient solutions to engineering problems, nature has proved to be an incredibly valuable source of inspiration. The development of acoustic sensors has been a prolific field for bioinspired solutions. With a diverse array of evolutionary approaches to the problem of hearing at small scales (some widely different to the traditional concept of 'ear'), insects in particular have served as a starting point for several designs. From locusts to moths, through crickets and mosquitoes among many others, the mechanisms found in nature to deal with small-scale acoustic detection and the engineering solutions they have inspired are reviewed. The present article is comprised of three main sections corresponding to the principal problems faced by insects, namely frequency discrimination, which is addressed by tonotopy, whether performed by a specific organ or directly on the tympana; directionality, with solutions including diverse adaptations to tympanal structure; and detection of weak signals, through what is known as active hearing. The three aforementioned problems concern tiny animals as much as human-manufactured microphones and have therefore been widely investigated. Even though bioinspired systems may not always provide perfect performance, they are sure to give us solutions with clever use of resources and minimal post-processing, being serious contenders for the best alternative depending on the requisites of the problem.

Direction-of-arrival estimation for acoustic signals based on direction-dependent parameter tuning of a bioinspired binaural coupling system

Bioinspired methods for sound source localization offer opportunities for resource reduction as well as concurrent performance improvement in contrast to conventional techniques. Usually, sound source localization requires a large number of microphones arranged in irregular geometries, and thus has high resource requirements in terms of space and data processing. Motivated by biology and using digital signal processing methods, an approach that adapts the coupled hearing system of the flyOrmia ochraceawith a minimally distant two-microphone array is presented. Despite its physiology, the fly is able to overcome physical limitations in localizing low-frequency sound sources. By exploiting the filtering effect of the coupling system, the direction-of-arrival of the sound is determined with two microphones at an intermediate distance of 0.06 m. For conventional beamforming algorithms, these physical limitations would result in degraded localization performance. In this work, the bioinspired coupling system is analyzed and subsequently parameterized direction-sensitive for different directions of incidence of the sound. For the parameterization, an optimization method is presented which can be adopted for excitation with plane as well as spherical sound wave propagation. Finally, the method was assessed using simulated and measured data. For 90% of the simulated scenarios, the correct direction of incidence could be determined with an accuracy of less than 1∘despite the use of a minimal distant two-microphone array. The experiments with measured data also resulted in a correct determination of the direction of incidence, which qualifies the bioinspired method for practical use in digital hardware systems.

On the value of diverse organisms in auditory research: From fish to flies to humans

Historically, diverse organisms have contributed to our understanding of auditory function. In recent years, the laboratory mouse has become the prevailing non-human model in auditory research, particularly for biomedical studies. There are many questions in auditory research for which the mouse is the most appropriate (or the only) model system available. But mice cannot provide answers for all auditory problems of basic and applied importance, nor can any single model system provide a synthetic understanding of the diverse solutions that have evolved to facilitate effective detection and use of acoustic information. In this review, spurred by trends in funding and publishing and inspired by parallel observations in other domains of neuroscience, we highlight a few examples of the profound impact and lasting benefits of comparative and basic organismal research in the auditory system. We begin with the serendipitous discovery of hair cell regeneration in non-mammalian vertebrates, a finding that has fueled an ongoing search for pathways to hearing restoration in humans. We then turn to the problem of sound source localization - a fundamental task that most auditory systems have been compelled to solve despite large variation in the magnitudes and kinds of spatial acoustic cues available, begetting varied direction-detecting mechanisms. Finally, we consider the power of work in highly specialized organisms to reveal exceptional solutions to sensory problems - and the diverse returns of deep neuroethological inquiry - via the example of echolocating bats. Throughout, we consider how discoveries made possible by comparative and curiosity-driven organismal research have driven fundamental scientific, biomedical, and technological advances in the auditory field.

Reconsidering tympanal-acoustic interactions leads to an improved model of auditory acuity in a parasitoid fly

Although most binaural organisms locate sound sources using neurological structures to amplify the sounds they hear, some animals use mechanically coupled hearing organs instead. One of these animals, the parasitoid flyOrmia ochracea(O. ochracea), has astoundingly accurate sound localization abilities. It can locate objects in the azimuthal plane with a precision of 2°, equal to that of humans, despite an intertympanal distance of only 0.5 mm, which is less than1/100th of the wavelength of the sound emitted by the crickets that it parasitizes.O. ochraceaaccomplishes this feat via mechanically coupled tympana that interact with incoming acoustic pressure waves to amplify differences in the signals received at the two ears. In 1995, Mileset aldeveloped a model of hearing mechanics inO. ochraceathat represents the tympana as flat, front-facing prosternal membranes, though they lie on a convex surface at an angle from the flies' frontal and transverse planes. The model works well for incoming sound angles less than±30∘but suffers from reduced accuracy (up to 60% error) at higher angles compared to response data acquired fromO. ochraceaspecimens. Despite this limitation, it has been the basis for bio-inspired microphone designs for decades. Here, we present critical improvements to this classic hearing model based on information from three-dimensional reconstructions ofO. ochracea's tympanal organ. We identified the orientation of the tympana with respect to a frontal plane and the azimuthal angle segment between the tympana as morphological features essential to the flies' auditory acuity, and hypothesized a differentiated mechanical response to incoming sound on the ipsi- and contralateral sides that depend on these features. We incorporated spatially-varying model coefficients representing this asymmetric response, making a new quasi-two-dimensional (q2D) model. The q2D model has high accuracy (average errors of under 10%) for all incoming sound angles. This improved biomechanical model may inform the design of new microscale directional microphones and other small-scale acoustic sensor systems.

Dual Band MEMS Directional Acoustic Sensor for Near Resonance Operation

In this paper, we report on the design and characterization of a microelectromechanical systems (MEMS) directional sensor inspired by the tympana configuration of the parasitic fly Ormia ochracea. The sensor is meant to be operated at resonance and act as a natural filter for the undesirable frequency bands. By means of breaking the symmetry of a pair of coupled bridged membranes, two independent bending vibrational modes can be excited. The electronic output, obtained by the transduction of the vibration to differential capacitance and then voltage through charge amplifiers, can be manipulated to tailor the frequency response of the sensor. Four different frequency characteristics were demonstrated. The sensor exhibits, at resonance, mechanical sensitivity around 6 μm/Pa and electrical sensitivity around 13 V/Pa. The noise was thoroughly characterized, and it was found that the sensor die, rather than the fundamental vibration, induces the predominant part of the noise. The computed average signal-to-noise (SNR) ratio in the pass band is about 91 dB. This result, in combination with an accurate dipole-like directional response, indicates that this type of directional sensor can be designed to exhibit high SNR and selectable frequency responses demanded by different applications.

An mm-sized biomimetic directional microphone array for sound source localization in three dimensions

Fly Ormia ochracea ears have been well-studied and mimicked to achieve subwavelength directional sensing, but their efficacy in sound source localization in three dimensions, utilizing sound from the X-, Y-, and Z-axes, has been less explored. This paper focuses on a mm-sized array of three Ormia ochracea ear-inspired piezoelectric MEMS directional microphones, where their in-plane directionality is considered a cue to demonstrate sound source localization in three dimensions. In the array, biomimetic MEMS directional microphones are positioned in a 120° angular rotation; as a result, six diaphragms out of three directional microphones keep a normal-axis relative to the sound source at six different angles in the azimuth plane starting from 0° to 360° in intervals of ±30°. In addition, the cosine-dependent horizontal component of the applied sound gives cues for Z-axis directional sensing. The whole array is first analytically simulated and then experimentally measured in an anechoic chamber. Both results are found to be compliant, and the angular resolution of sound source localization in three dimensions is found to be ±2° at the normal axis. The resolution at the azimuth plane is found to be ±1.28°, and the same array shows a ± 4.28° resolution when sound is varied from the elevation plane. Looking at the scope within this area combined with the presented results, this work provides a clear understanding of sound source localization in three dimensions.

Cues for Directional Hearing in the Fly Ormia ochracea

Insects are often small relative to the wavelengths of sounds they need to localize, which presents a fundamental biophysical problem. Understanding novel solutions to this limitation can provide insights for biomimetic technologies. Such an approach has been successful using the fly Ormia ochracea (Diptera: Tachinidae) as a model. O. ochracea is a parasitoid species whose larvae develop as internal parasites within crickets (Gryllidae). In nature, female flies find singing male crickets by phonotaxis, despite severe constraints on directional hearing due to their small size. A physical coupling between the two tympanal membranes allows the flies to obtain information about sound source direction with high accuracy because it generates interaural time-differences (ITD) and interaural level differences (ILD) in tympanal vibrations that are exaggerated relative to the small arrival-time difference at the two ears, that is the only cue available in the sound stimulus. In this study, I demonstrate that pure time-differences in the neural responses to sound stimuli are sufficient for auditory directionality in O. ochracea.

A bio-inspired optical directional microphone with cavity-coupled diaphragms

A bio-inspired acoustic sensor for sound source localization is presented, mimicking the internally coupled ears found in many terrestrial vertebrates and insects. It consists of two aluminum diaphragms coupled by a U-shaped cavity and detected by a low-coherence fiber optic interferometer system. A large-scale prototype with a center-to-center separation of 1″ is fabricated and experimentally demonstrated to amplify the interaural phase difference by a factor of 2 to 4 for a wide frequency range (0.5-2 kHz), which agrees well with simulation. This work presents a mechanism of using cavity-coupled diaphragms to develop acoustic sensors for sound source localization.

Mathematical Analysis and Micro-Spacing Implementation of Acoustic Sensor Based on Bio-Inspired Intermembrane Bridge Structure

A biomimetic study on the auditory localization mechanism of Ormia ochracea was performed to improve the localization ability of small acoustic systems. We also present a microscale implementation of an acoustic localization device inspired by the auditory organ of the parasitic O. ochracea. The device consists of a pair of circular membranes coupled together with an elastic beam. The coupling serves to amplify the difference in magnitude and phase between the two membranes' responses as the incident angle of the sound changes, allowing directional information to be deduced from the coupled device response. The research results show that the intermembrane bridge structure improves the sound source localization and directional weak acoustic signal acquisition of sound detectors. The recognition rate of the phase difference and amplitude ratio was greatly improved. The theoretical resolution of the incident angle of the sound source can reach 2° at a phase difference recognition rate of 5°. The sound source's optimal identification frequency range for the coupling device based on the intermembrane bridge bionic structure is 300 Hz to 1500 Hz.

Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone

Microelectromechanical system (MEMS) directional microphones have been identified as having use in multi-projected virtual reality applications such as virtual meetings for projecting cameras. In these applications, the acoustic sensitivity plays a vital role as it biases the directional sensing, signal-to-noise ratio (SNR) and self-noise. The acoustic sensitivity is the multiplied outcome of the mechanical sensitivity and the electrical sensitivity. As the dimensions are limited in MEMS technology, the improvement of the acoustic sensitivity by reflecting the mechanical as well as electrical domains is a challenge. This paper reports on a new formation of the D33 mode, the coupled D33 mode, based on piezoelectric sensing to improve the acoustic functionalities. The unique advancement of the proposed D33 mode is that it allows multiple spans of the regular D33 mode to perform together, despite this increasing the diaphragm’s dimensions. At a reduced diaphragm size, the orientation of the coupled D33 mode realizes the maximum conversion of the mechanical deflection into electrical sensitivity. The significance of the proposed D33 mode in comparison to the regular D33 mode is simulated using COMSOL Multiphysics. Then, for a proof–of–concept, the experimental validation is carried out using a piezoelectric MEMS directional microphone inspired by the ears of the fly Ormia ochracea. In both ways, the results are found to be substantially improved in comparison with the regular approach of the D33 mode, showing the novelty of this work.

Electronic phase shift measurement for the determination of acoustic wave DOA using single MEMS biomimetic sensor

MEMS acoustic sensors have been developed to mimic the highly-accurate sound-locating system of the Ormia ochracea fly, which detects sound wavelengths much larger than its hearing organ. A typical ormia-based MEMS directional sound sensor possesses two coupled wings that vibrate in response to sound according to a superposition of its two main resonant modes, rocking and bending. Vibrations are transduced into electronic signals by interdigitated comb finger capacitors at each wing’s end along with a capacitance measuring circuitry. A sensor designed to exhibit resonant modes closely placed in frequency, enhancing their coupling, was operated with a closed cavity behind the wings. Simultaneous and independent measurements of electronic signals generated at each of the single sensor wings were used to determine incident sound direction of arrival (DOA). DOA was found proportional to the phase shift between them and to the difference over the sum of their amplitudes as well. Single sensor phase shift DOA measurement presented a resolution better than 3° for sound pressure levels of 25 mPa or greater. These results indicate that a single sensor operating in closed-cavity configuration can provide hemispherical unambiguous direction of arrival of sound waves which wavelength is much larger than the sensor size.

A Flexible, Acoustic Localized Sensor with Mass Block-Beam Structure Based on Polydimethylsiloxane-Silver Nanowires

The flexible strain sensor is a fast-moving technology and has been used in many fields. The array design and application based on flexible strain sensors have been the current research hotspots. However, there are few reports on research of acoustic positioning using the flexible sensor array. Herein, we designed and realized the consistent fabrication of a thin-film, acoustic sensor array. The acoustic sensing research of the sensor was demonstrated as well. We used a convenient fabrication method to design a flexible acoustic sensor using silver nanowires coated on a thin polydimethylsiloxane (PDMS) film with mass block-beam structure. The acoustic sensor can record sound within a frequency domain of 20-2000 Hz and volume detection range of 83-108 dB. The sensor's resonance frequency is 380 Hz, horizontal distance sound detection limit is 5 cm, and vertical detection limit is 3.5 cm. We also achieved 360° azimuth detection in two-dimensional space with a detection accuracy of 15°. In three-dimensional space, the flexible acoustic sensor array was designed with two flexible acoustic sensors to detect the position of the sound source. This research first proposes the use of flexible acoustic sensors to test the sound source orientation.

Sound source localization by Ormia ochracea inspired low-noise piezoelectric MEMS directional microphone

The single-tone sound source localization (SSL) by majority of fly Ormia ochracea’s ears–inspired directional microphones leaves a limited choice when an application like hearing aid (HA) demands broadband SSL. Here, a piezoelectric MEMS directional microphone using a modified mechanical model of fly’s ear has been presented with primary focus to achieve SSL in most sensitive audio bands to mitigate the constraints of traditional SSL works. In the modified model, two optimized rectangular diaphragms have been pivoted by four optimized torsional beams; while the backside of the whole structure has been etched. As a result, the SSL relative to angular rotation of the incoming sound depicts the cosine dependency as an ideal pressure–gradient sensor. At the same time, the mechanical coupling leads the magnitude difference between two diaphragms which has been accounted as SSL in frequency domain. The idea behind this work has been analytical simulated first, and with the convincing mechanical results, the designed bio–inspired directional microphone (BDM) has been fabricated using commercially available MEMSCAP based on PiezoMUMPS processes. In an anechoic chamber, the fabricated device has been excited in free-field sound, and the SSL at 1 kHz frequency, rocking frequency, bending frequency, and in-between rocking and bending frequencies has been found in full compliance with the given angle of incidence of sound. With the measured inter-aural sensitivity difference (mISD) and directionality, the developed BDM has been demonstrated as a practical SSL device, and the results have been found in a perfect match with the given angle of incidence of sound. Furthermore, to facilitate the SSL in noisy environment, the noise has been optimized in all scopes, like the geometry of the diaphragm, supportive torsional beam, and sensing. As a result, the A-weighted noise of this work has been found less than 23 dBA across the audio bands, and the equivalent-input noise (EIN) has been found to be 25.52 dB SPL at 1 kHz frequency which are the lowest ever reported by a similar device. With the developed SSL in broadband–in addition to the lowest noise–the developed device can be extended in some audio applications like an HA device.

A Biomimetic Miniaturized Microphone Array for Sound Direction Finding Applications Based on a Phase-Enhanced Electrical Coupling Network

In this research, we proposed a miniaturized two-element sensor array inspired by Ormia Ochracea for sound direction finding applications. In contrast to the convectional approach of using mechanical coupling structures for enlarging the intensity differences, we exploited an electrical coupling network circuit composed of lumped elements to enhance the phase differences and extract the optimized output power for good signal-to-noise ratio. The separation distance between two sensors could be reduced from 0.5 wavelength to 0.1 wavelength 3.43 mm at the operation frequency of 10 kHz) for determining the angle of arrivals. The main advantages of the proposed device include low power losses, flexible designs, and wide operation bandwidths. A prototype was designed, fabricated, and experiments examined within a sound anechoic chamber. It was demonstrated that the proposed device had a phase enhancement of 110° at the incident angle of 90° and the normalized power level of −2.16 dB at both output ports. The received power levels of our device were 3 dB higher than those of the transformer-type direction-finding system. In addition, our proposed device could operate in the frequency range from 8 kHz to 12 kHz with a tunable capacitor. The research results are expected to be beneficial for the compact sonar or radar systems.

Insect-inspired acoustic micro-sensors

Micro-Electro Mechanical System (MEMS) microphones inspired by the remarkable phonotactic capability of Ormia ochracea offer the promise of microscale directional microphones with a greatly reduced need for post-processing of signals. Gravid O. ochracea females can locate their host cricket's 5 kHz mating calls to an accuracy of less than 2° despite having a distance of approximately 500 μm between the ears. MEMS devices base on the principles of operation of O. ochracea's hearing system have been well studied, however commercial implementation has proven challenging due to the system's reliance on carefully tailored ratios of stiffness and damping, which are difficult to realize in standard MEMS fabrication processes, necessitating a trade-off between wide-band operation and sensitivity. A survey of the variety of strategies that have been followed to address these inherent challenges is presented.

Animals and ICE: meaning, origin, and diversity

ICE stands for internally coupled ears. More than half of the terrestrial vertebrates, such as frogs, lizards, and birds, as well as many insects, are equipped with ICE that utilize an air-filled cavity connecting the two eardrums. Its effect is pronounced and twofold. On the basis of a solid experimental and mathematical foundation, it is known that there is a low-frequency regime where the internal time difference (iTD) as perceived by the animal may well be 2-5 times higher than the external ITD, the interaural time difference, and that there is a frequency plateau over which the fraction iTD/ITD is constant. There is also a high-frequency regime where the internal level (amplitude) difference iLD as perceived by the animal is much higher than the interaural level difference ILD measured externally between the two ears. The fundamental tympanic frequency segregates the two regimes. The present special issue devoted to "internally coupled ears" provides an overview of many aspects of ICE, be they acoustic, anatomical, auditory, mathematical, or neurobiological. A focus is on the hotly debated topic of what aspects of ICE animals actually exploit neuronally to localize a sound source.

Bio-Inspired Miniature Direction Finding Acoustic Sensor

A narrowband MEMS direction finding sensor has been developed based on the mechanically coupled ears of the Ormia Ochracea fly. The sensor consists of two wings coupled at the middle and attached to a substrate using two legs. The sensor operates at its bending resonance frequency and has cosine directional characteristics similar to that of a pressure gradient microphone. Thus, the directional response of the sensor is symmetric about the normal axis making the determination of the direction ambiguous. To overcome this shortcoming two sensors were assembled with a canted angle similar to that employed in radar bearing locators. The outputs of two sensors were processed together allowing direction finding with no requirement of knowing the incident sound pressure level. At the bending resonant frequency of the sensors (1.69 kHz) an output voltage of about 25 V/Pa was measured. The angle uncertainty of the bearing of sound ranged from less than 0.3° close to the normal axis (0°) to 3.4° at the limits of coverage (±60°) based on the 30° canted angle used. These findings indicate the great potential to use dual MEMS direction finding sensor assemblies to locate sound sources with high accuracy.

Micropower Mixed-signal VLSI Independent Component Analysis for Gradient Flow Acoustic Source Separation

A parallel micro-power mixed-signal VLSI implementation of independent component analysis (ICA) with reconfigurable outer-product learning rules is presented. With the gradient sensing of the acoustic field over a miniature microphone array as a pre-processing method, the proposed ICA implementation can separate and localize up to 3 sources in mild reverberant environment. The ICA processor is implemented in 0.5 µm CMOS technology and occupies 3 mm × 3 mm area. At 16 kHz sampling rate, ASIC consumes 195 µW power from a 3 V supply. The outer-product implementation of natural gradient and Herault-Jutten ICA update rules demonstrates comparable performance to benchmark FastICA algorithm in ideal conditions and more robust performance in noisy and reverberant environment. Experiments demonstrate perceptually clear separation and precise localization over wide range of separation angles of two speech sources presented through speakers positioned at 1.5 m from the array on a conference room table. The presented ASIC leads to a extreme small form factor and low power consumption microsystem for source separation and localization required in applications like intelligent hearing aids and wireless distributed acoustic sensor arrays.

Hearing in Insects

Insect hearing has independently evolved multiple times in the context of intraspecific communication and predator detection by transforming proprioceptive organs into ears. Research over the past decade, ranging from the biophysics of sound reception to molecular aspects of auditory transduction to the neuronal mechanisms of auditory signal processing, has greatly advanced our understanding of how insects hear. Apart from evolutionary innovations that seem unique to insect hearing, parallels between insect and vertebrate auditory systems have been uncovered, and the auditory sensory cells of insects and vertebrates turned out to be evolutionarily related. This review summarizes our current understanding of insect hearing. It also discusses recent advances in insect auditory research, which have put forward insect auditory systems for studying biological aspects that extend beyond hearing, such as cilium function, neuronal signal computation, and sensory system evolution.

A biomimetic coupled circuit based microphone array for sound source localization

An equivalent analog circuit is designed to mimic the coupled ears of the fly Ormia ochracea for sound source localization. This coupled circuit receives two signals with tiny phase difference from a space closed two-microphone array, and produces two signals with obvious intensity difference. The response sensitivity can be adjusted through the coupled circuit parameters. The directional characteristics of the coupled circuit have been demonstrated in the experiment. The miniature microphone array can localize the sound source with low computational burden by using the intensity difference. This system has significant advantages in various applications where the array size is limited.

A transmission-line model of back-cavity dynamics for in-plane pressure-differential microphones

Pressure-differential microphones inspired by the hearing mechanism of a special parasitoid fly have been described previously. The designs employ a beam structure that rotates about two pivots over an enclosed back volume. The back volume is only partially enclosed due to open slits around the perimeter of the beam. The open slits enable incoming sound waves to affect the pressure profile in the microphone's back volume. The goal of this work is to study the net moment applied to pressure-differential microphones by an incoming sound wave, which in-turn requires modeling the acoustic pressure distribution within the back volume. A lumped-element distributed transmission-line model of the back volume is introduced for this purpose. It is discovered that the net applied moment follows a low-pass filter behavior such that, at frequencies below a corner frequency depending on geometrical parameters of the design, the applied moment is unaffected by the open slits. This is in contrast to the high-pass filter behavior introduced by barometric pressure vents in conventional omnidirectional microphones. The model accurately predicts observed curvature in the frequency response of a prototype pressure-differential microphone 2 mm × 1 mm × 0.5 mm in size and employing piezoelectric readout.

A rotational capacitive micromachined ultrasonic transducer (RCMUT) with an internally-sealed pivot

Most capacitive micromachined ultrasonic transducers (CMUTs) are comprised of individual gap-closing parallel plates. We present an unconventional CMUT in which a vacuum-sealed cavity beneath a diaphragm layer comprises a mechanical structure that pivots and has a first rocking or rotational mode of vibration. The general ability to couple individual CMUT pistons under vacuum with mechanical structures to alter vibration mode frequencies and mode shapes is thus demonstrated. The particular prototype presented spans a distance of 250 μm and has a first rocking mode of vibration at 480 kHz. As a transmitter, the first mode radiates ultrasound in-plane along the surface. Frequency response characterization of a prototype is performed using laser Doppler vibrometry, and a pair of devices is used to perform ultrasonic pitch-catch measurements spanning a distance of 5 mm.

Understanding and mimicking the dual optimality of the fly ear

The fly Ormia ochracea has the remarkable ability, given an eardrum separation of only 520 μm, to pinpoint the 5 kHz chirp of its cricket host. Previous research showed that the two eardrums are mechanically coupled, which amplifies the directional cues. We have now performed a mechanics and optimization analysis which reveals that the right coupling strength is key: it results in simultaneously optimized directional sensitivity and directional cue linearity at 5 kHz. We next demonstrated that this dual optimality is replicable in a synthetic device and can be tailored for a desired frequency. Finally, we demonstrated a miniature sensor endowed with this dual-optimality at 8 kHz with unparalleled sound localization. This work provides a quantitative and mechanistic explanation for the fly's sound-localization ability from a new perspective, and it provides a framework for the development of fly-ear inspired sensors to overcoming a previously-insurmountable size constraint in engineered sound-localization systems.

Electret microphones with stiff diaphragms

Electret microphones with stiff plates instead of flexible diaphragms are described. The stiff plate and a backplate, separated by a soft cellular polymer spacer ring, yield a capacitance that is varied by the incoming sound wave; thus a voltage change in the plates is induced. Various such plate microphones were built and characterized. Sensitivities of more than 10 mV/Pa and equivalent noise levels of 23 dB(A) are obtained. An analytical model for the sensitivity of plate microphones was developed. Advantages of the plate microphones are high mechanical robustness, low harmonic distortion, and no risk of membrane collapse.

Micromachined piezoelectric microphones with in-plane directivity

Micromachined piezoelectric microphones with in-plane directivity are introduced. A beam rotates about center torsional pivots and is attached to piezoelectrically active end-springs. Rotation of the beam in response to sound pressure gradients produces spring deflections, which, in turn, produce an open-circuit voltage at the piezoelectric films. Prototypes are presented that contain a 20-μm-thick silicon beam and end-springs with 900-nm-thick chemical solution deposited lead zirconate titanate atop the surface of the end-springs. Acoustic directivity measurements are presented that confirm device functionality.

Fly-ear inspired micro-sensor for sound source localization in two dimensions

Inspired by the hearing organ of the fly Ormia ochracea, a miniature sound localization sensor is developed, which can be used to pinpoint a sound source in two dimensions described by the azimuth and elevation angles. The sensor device employs an equilateral triangle configuration consisting of three mechanically coupled circular membranes whose oscillations are detected by a fiber-optic system. The experimental results indicate that significant amplification of the directional cues and directional sensitivity can be achieved with the fly-ear inspired sensor design. This work can provide a basis for the development of miniature sound localization sensors in two dimensions.