Attosecond metrology in a continuous-beam transmission electron microscope

Field-Induced Rocking-Curve Effects in Attosecond Electron Diffraction

Recent advances in electron microscopy trigger the question of whether attosecond electron diffraction can resolve atomic-scale electron dynamics in crystalline materials in space and time. Here, we explore the ultrafast dynamics of the relevant electron-lattice scattering process. We drive a single-crystalline silicon membrane with the optical cycles of near-infrared laser light and use phase-locked attosecond electron pulses to produce electron diffraction patterns as a function of delay. For all Bragg spots, we observe time-dependent intensity changes and position shifts that are correlated with a time shift of 0.5-1.2  fs. For single-cycle excitation pulses with strong peak intensity, the correlations become nonlinear. The origins of these effects are local and integrated beam deflections by the optical electric and magnetic fields at the crystal membrane. Those deflections modify the diffraction intensities in addition to the atomic structure factor dynamics by time-dependent rocking-curve effects. However, the measured time delays and symmetries allow one to disentangle both effects. Future attosecond electron diffraction and microscopy experiments need to be based on these results.

Femtosecond electron beam probe of ultrafast electronics

The need for ever-faster information processing requires exceptionally small devices that operate at frequencies approaching the terahertz and petahertz regimes. For the diagnostics of such devices, researchers need a spatiotemporal tool that surpasses the device under test in speed and spatial resolution. Consequently, such a tool cannot be provided by electronics itself. Here we show how ultrafast electron beam probe with terahertz-compressed electron pulses can directly sense local electro-magnetic fields in electronic devices with femtosecond, micrometre and millivolt resolution under normal operation conditions. We analyse the dynamical response of a coplanar waveguide circuit and reveal the impulse response, signal reflections, attenuation and waveguide dispersion directly in the time domain. The demonstrated measurement bandwidth reaches 10 THz and the sensitivity to electric potentials is tens of millivolts or -20 dBm. Femtosecond time resolution and the capability to directly integrate our technique into existing electron-beam inspection devices in semiconductor industry makes our femtosecond electron beam probe a promising tool for research and development of next-generation electronics at unprecedented speed and size.

Free-electron interaction with nonlinear optical states in microresonators

The short de Broglie wavelength and strong interaction empower free electrons to probe structures and excitations in materials and biomolecules. Recently, electron-photon interactions have enabled new optical manipulation schemes for electron beams. In this work, we demonstrate the interaction of electrons with nonlinear optical states inside a photonic chip-based microresonator. Optical parametric processes give rise to spatiotemporal pattern formation corresponding to coherent or incoherent optical frequency combs. We couple such "microcombs" to electron beams, demonstrate their fingerprints in the electron spectra, and achieve ultrafast temporal gating of the electron beam. Our work demonstrates the ability to access solitons inside an electron microscope and extends the use of microcombs to spatiotemporal control of electrons for imaging and spectroscopy.

Free-electron Ramsey-type interferometry for enhanced amplitude and phase imaging of nearfields

The complex range of interactions between electrons and electromagnetic fields gave rise to countless scientific and technological advances. A prime example is photon-induced nearfield electron microscopy (PINEM), enabling the detection of confined electric fields in illuminated nanostructures with unprecedented spatial resolution. However, PINEM is limited by its dependence on strong fields, making it unsuitable for sensitive samples, and its inability to resolve complex phasor information. Here, we leverage the nonlinear, overconstrained nature of PINEM to present an algorithmic microscopy approach, achieving far superior nearfield imaging capabilities. Our algorithm relies on free-electron Ramsey-type interferometry to produce orders-of-magnitude improvement in sensitivity and ambiguity-immune nearfield phase reconstruction, both of which are optimal when the electron exhibits a fully quantum behavior. Our results demonstrate the potential of combining algorithmic approaches with state-of-the-art modalities in electron microscopy and may lead to various applications from imaging sensitive biological samples to performing full-field tomography of confined light.

Accelerating Quantum Materials Development with Advances in Transmission Electron Microscopy

Quantum materials are driving a technology revolution in sensing, communication, and computing, while simultaneously testing many core theories of the past century. Materials such as topological insulators, complex oxides, superconductors, quantum dots, color center-hosting semiconductors, and other types of strongly correlated materials can exhibit exotic properties such as edge conductivity, multiferroicity, magnetoresistance, superconductivity, single photon emission, and optical-spin locking. These emergent properties arise and depend strongly on the material's detailed atomic-scale structure, including atomic defects, dopants, and lattice stacking. In this review, we describe how progress in the field of electron microscopy (EM), including in situ and in operando EM, can accelerate advances in quantum materials and quantum excitations. We begin by describing fundamental EM principles and operation modes. We then discuss various EM methods such as (i) EM spectroscopies, including electron energy loss spectroscopy (EELS), cathodoluminescence (CL), and electron energy gain spectroscopy (EEGS); (ii) four-dimensional scanning transmission electron microscopy (4D-STEM); (iii) dynamic and ultrafast EM (UEM); (iv) complementary ultrafast spectroscopies (UED, XFEL); and (v) atomic electron tomography (AET). We describe how these methods could inform structure-function relations in quantum materials down to the picometer scale and femtosecond time resolution, and how they enable precision positioning of atomic defects and high-resolution manipulation of quantum materials. For each method, we also describe existing limitations to solve open quantum mechanical questions, and how they might be addressed to accelerate progress. Among numerous notable results, our review highlights how EM is enabling identification of the 3D structure of quantum defects; measuring reversible and metastable dynamics of quantum excitations; mapping exciton states and single photon emission; measuring nanoscale thermal transport and coupled excitation dynamics; and measuring the internal electric field and charge density distribution of quantum heterointerfaces- all at the quantum materials' intrinsic atomic and near atomic-length scale. We conclude by describing open challenges for the future, including achieving stable sample holders for ultralow temperature (below 10K) atomic-scale spatial resolution, stable spectrometers that enable meV energy resolution, and high-resolution, dynamic mapping of magnetic and spin fields. With atomic manipulation and ultrafast characterization enabled by EM, quantum materials will be poised to integrate into many of the sustainable and energy-efficient technologies needed for the 21st century.

Sub-terahertz nearfields for electron-pulse compression

The advent of ultrafast science with pulsed electron beams raised the need to control the temporal features of the electron pulses. One promising suggestion is the nano-selective quantum optics with multi-electrons, which scales quadratically with the number of electrons within the coherence time of the quantum system. Terahertz (THz) radiation from optical nonlinear crystals is an attractive methodology to generate the rapidly varying electric fields necessary for electron compression, with the advantage of an inherent temporal locking to laser-triggered electrons, such as in ultrafast electron microscopes. Longer (picosecond-) pulses require a sub-THz field for their compression. However, the generation of such low frequencies requires pumping with energetic optical pulses and their focusability is fundamentally limited by their mm-wavelength. This work proposes electron-pulse compression with sub-THz fields directly in the vicinity of their dipolar origin, thereby avoiding mediation through radiation. We analyze the merits of nearfields for compression of slow electrons, particularly in challenging regimes for THz radiation, such as small numerical apertures, micro-joule-level optical pump pulses, and low frequencies. This scheme can be implemented within the tight constraints of electron microscopes and reach fields of a few kV/cm below 0.1 THz at high repetition rates. Our paradigm offers a realistic approach for controlling electron pulses spatially and temporally in many experiments, opening the path of flexible multi-electron manipulation for analytic and quantum sciences.

Lossless Monochromator in an Ultrafast Electron Microscope Using Near-Field THz Radiation

The ability to form monoenergetic electron beams is vital for high-resolution electron spectroscopy and imaging. Such capabilities are commonly achieved using an electron monochromator, which energy filters a dispersed electron beam, thus reducing the electron flux to yield down to meV energy resolution. This reduction in flux hinders the use of monochromators in many applications, such as ultrafast transmission electron microscopes (UTEMs). Here, we develop and demonstrate a mechanism for electron energy monochromation that does not reduce the flux-a lossless monochromator. The mechanism is based on the interaction of free-electron pulses with single-cycle THz near fields, created by nonlinear conversion of an optical laser pulse near the electron beam path inside a UTEM. Our experiment reduces the electron energy spread by a factor of up to 2.9 without compromising the beam flux. Moreover, as the electron-THz interaction takes place over an extended region of many tens of microns in free space, the realized technique is highly robust-granting uniform monochromation over a wide area, larger than the electron beam diameter. We further demonstrate the wide tunability of our method by monochromating the electron beam at multiple primary electron energies from 60 to 200 keV, studying the effect of various electron and THz parameters on its performance. Our findings have direct applications in the fast-growing field of ultrafast electron microscopy, allowing time- and energy-resolved studies of exciton physics, phononic vibrational resonances, charge transport effects, and optical excitations in the mid IR to the far IR.

Imaging the field inside nanophotonic accelerators

Controlling optical fields on the subwavelength scale is at the core of nanophotonics. Laser-driven nanophotonic particle accelerators promise a compact alternative to conventional radiofrequency-based accelerators. Efficient electron acceleration in nanophotonic devices critically depends on achieving nanometer control of the internal optical nearfield. However, these nearfields have so far been inaccessible due to the complexity of the devices and their geometrical constraints, hampering the design of future nanophotonic accelerators. Here we image the field distribution inside a nanophotonic accelerator, for which we developed a technique for frequency-tunable deep-subwavelength resolution of nearfields based on photon-induced nearfield electron-microscopy. Our experiments, complemented by 3D simulations, unveil surprising deviations in two leading nanophotonic accelerator designs, showing complex field distributions related to intricate 3D features in the device and its fabrication tolerances. We envision an extension of our method for full 3D field tomography, which is key for the future design of highly efficient nanophotonic devices.

Spatiotemporal Electron Beam Focusing through Parallel Interactions with Shaped Optical Fields

The ability to modulate free electrons with light has emerged as a powerful tool to produce attosecond electron wave packets. However, research has so far aimed at the manipulation of the longitudinal wave function component, while the transverse degrees of freedom have primarily been utilized for spatial rather than temporal shaping. Here, we show that the coherent superposition of parallel light-electron interactions in transversally separate zones allows for a simultaneous spatial and temporal compression of a convergent electron wave function, enabling the formation of sub-Ångström focal spots of attosecond duration. Specifically, spots spanning just ∼3% of the light optical cycle are shown to be formed, accompanied by an increase by only a factor of 2 in spatial extension relative to an unperturbed beam. The proposed approach will facilitate the exploration of previously inaccessible ultrafast atomic-scale phenomena, in particular enabling attosecond scanning transmission electron microscopy.

Generating optical cat states via quantum interference of multi-path free-electron-photons interactions

The novel quantum effects induced by the free-electron-photons interaction have attracted increasing interest due to their potential applications in ultrafast quantum information processing. Here, we propose a scheme to generate optical cat states based on the quantum interference of multi-path free-electron-photons interactions that take place simultaneously with strong coupling strength. By performing a projection measurement on the electron, the state of light changes significantly from a coherent state into a non-Gaussian state with either Wigner negativity or squeezing property, both possess metrological power to achieve quantum advantage. More importantly, we show that the Wigner negativity oscillates with the coupling strength, and the optical cat states are successfully generated with high fidelity at all the oscillation peaks. This oscillation reveals the quantum interference effect of the multiple quantum pathways in the interaction of the electron with photons, by that various nonclassical states of light are promising to be fast prepared and manipulated. These findings inspire further exploration of emergent quantum phenomena and advanced quantum technologies with free electrons.

Attosecond electron microscopy of sub-cycle optical dynamics

The primary step of almost any interaction between light and materials is the electrodynamic response of the electrons to the optical cycles of the impinging light wave on sub-wavelength and sub-cycle dimensions¹. Understanding and controlling the electromagnetic responses of a material^2-11 is therefore essential for modern optics and nanophotonics^12-19. Although the small de Broglie wavelength of electron beams should allow access to attosecond and ångström dimensions²⁰, the time resolution of ultrafast electron microscopy²¹ and diffraction²² has so far been limited to the femtosecond domain^16-18, which is insufficient for recording fundamental material responses on the scale of the cycles of light^1,2,10. Here we advance transmission electron microscopy to attosecond time resolution of optical responses within one cycle of excitation light²³. We apply a continuous-wave laser²⁴ to modulate the electron wave function into a rapid sequence of electron pulses, and use an energy filter to resolve electromagnetic near-fields in and around a material as a movie in space and time. Experiments on nanostructured needle tips, dielectric resonators and metamaterial antennas reveal a directional launch of chiral surface waves, a delay between dipole and quadrupole dynamics, a subluminal buried waveguide field and a symmetry-broken multi-antenna response. These results signify the value of combining electron microscopy and attosecond laser science to understand light-matter interactions in terms of their fundamental dimensions in space and time.

Tunable photon-induced spatial modulation of free electrons

Spatial modulation of electron beams is an essential tool for various applications such as nanolithography and imaging, yet its conventional implementations are severely limited and inherently non-tunable. Conversely, proposals of light-driven electron spatial modulation promise tunable electron wavefront shaping, for example, using the mechanism of photon-induced near-field electron microscopy. Here we present tunable photon-induced spatial modulation of electrons through their interaction with externally controlled surface plasmon polaritons (SPPs). Using recently developed methods of shaping SPP patterns, we demonstrate a dynamic control of the electron beam with a variety of electron distributions and verify their coherence through electron diffraction. Finally, the nonlinearity stemming from energy post-selection provides us with another avenue for controlling the electron shape, generating electron features far below the SPP wavelength. Our work paves the way to on-demand electron wavefront shaping at ultrafast timescales, with prospects for aberration correction, nanofabrication and material characterization.

Attosecond electron-beam technology: a review of recent progress

Electron microscopy and diffraction with ultrashort pulsed electron beams are capable of imaging transient phenomena with the combined ultrafast temporal and atomic-scale spatial resolutions. The emerging field of optical electron beam control allowed the manipulation of relativistic and sub-relativistic electron beams at the level of optical cycles. Specifically, it enabled the generation of electron beams in the form of attosecond pulse trains and individual attosecond pulses. In this review, we describe the basics of the attosecond electron beam control and overview the recent experimental progress. High-energy electron pulses of attosecond sub-optical cycle duration open up novel opportunities for space-time-resolved imaging of ultrafast chemical and physical processes, coherent photon generation, free electron quantum optics, electron-atom scattering with shaped wave packets and laser-driven particle acceleration. Graphical Abstract.

Ultrafast Transverse Modulation of Free Electrons by Interaction with Shaped Optical Fields

Spatiotemporal electron-beam shaping is a bold frontier of electron microscopy. Over the past decade, shaping methods evolved from static phase plates to low-speed electrostatic and magnetostatic displays. Recently, a swift change of paradigm utilizing light to control free electrons has emerged. Here, we experimentally demonstrate arbitrary transverse modulation of electron beams without complicated electron-optics elements or material nanostructures, but rather using shaped light beams. On-demand spatial modulation of electron wavepackets is obtained via inelastic interaction with transversely shaped ultrafast light fields controlled by an external spatial light modulator. We illustrate this method for the cases of Hermite-Gaussian and Laguerre-Gaussian modulation and discuss their use in enhancing microscope sensitivity. Our approach dramatically widens the range of patterns that can be imprinted on the electron profile and greatly facilitates tailored electron-beam shaping.

Integrated photonics enables continuous-beam electron phase modulation

Integrated photonics facilitates extensive control over fundamental light-matter interactions in manifold quantum systems including atoms1, trapped ions2,3, quantum dots4 and defect centres5. Ultrafast electron microscopy has recently made free-electron beams the subject of laser-based quantum manipulation and characterization6-11, enabling the observation of free-electron quantum walks12-14, attosecond electron pulses10,15-17 and holographic electromagnetic imaging18. Chip-based photonics19,20 promises unique applications in nanoscale quantum control and sensing but remains to be realized in electron microscopy. Here we merge integrated photonics with electron microscopy, demonstrating coherent phase modulation of a continuous electron beam using a silicon nitride microresonator. The high-finesse (Q0 ≈ 106) cavity enhancement and a waveguide designed for phase matching lead to efficient electron-light scattering at extremely low, continuous-wave optical powers. Specifically, we fully deplete the initial electron state at a cavity-coupled power of only 5.35 microwatts and generate >500 electron energy sidebands for several milliwatts. Moreover, we probe unidirectional intracavity fields with microelectronvolt resolution in electron-energy-gain spectroscopy21. The fibre-coupled photonic structures feature single-optical-mode electron-light interaction with full control over the input and output light. This approach establishes a versatile and highly efficient framework for enhanced electron beam control in the context of laser phase plates22, beam modulators and continuous-wave attosecond pulse trains23, resonantly enhanced spectroscopy24-26 and dielectric laser acceleration19,20,27. Our work introduces a universal platform for exploring free-electron quantum optics28-31, with potential future developments in strong coupling, local quantum probing and electron-photon entanglement.

Measurement of Temporal Coherence of Free Electrons by Time-Domain Electron Interferometry

The temporal properties of an electron beam are decisive for modern ultrafast electron microscopy and for the quantum optics of the free electron in laser fields. Here, we report a time-domain interferometer that measures and distinguishes the pure and ensemble coherences of a free-electron beam in a transmission electron microscope via symmetry-breaking shifts of photon-order sideband peaks. This result is a free-electron analog to the reconstruction of attosecond busts and photoemission delays in optical attosecond spectroscopy. We find a substantial pure electron coherence that is connected to the thermodynamics of the emitter material and a lower ensemble coherence that is governed by space-charge effects. Pure temporal coherences above 5 fs are measured at >10^{9} electrons per second in a high-brightness beam.

Imprinting the quantum statistics of photons on free electrons

[Figure: see text].

Jitter-free terahertz pulses from LiNbO3

Intense terahertz pulses are indispensable for modern science and technology, but time-critical applications require ultimate stability of the field cycles with respect to a reference clock. Here we report the nonlinear optical generation of terahertz single-cycle fields by femtosecond laser pulses under passive compensation of timing jitter. The converter is based on optical rectification in a LiNbO₃ slab with two silicon prisms for extracting and combining the emitted Cherenkov radiation from both sides into a single beam. In this way, we achieve suppression of timing jitter to <200 as/µm of beam displacement, a factor of >70 better than in conventional non-collinear geometries.

Spiers Memorial Lecture: Introduction to ultrafast spectroscopy and imaging of photochemical reactions

A brief overview is presented on ultrafast spectroscopy and imaging of photochemical reactions by highlighting several experimental studies reported in the last five years. A particular focus is placed on new experiments performed using high-order harmonic generation, X-ray free electron lasers, and relativistic electron beams. Exploration of fundamental chemical reaction dynamics using these advanced experimental methodologies is in an early stage, and exciting new research opportunities await in this rapidly expanding and advancing research field. At the same time, there is no experimental methodology that provides all aspects of the electronic and structural dynamics in a single experiment, and investigations using different methodologies with various perspectives need to be considered in a comprehensive manner.

Modulation of Cathodoluminescence Emission by Interference with External Light

Spontaneous processes triggered in a sample by free electrons, such as cathodoluminescence, are commonly regarded and detected as stochastic events. Here, we supplement this picture by showing through first-principles theory that light and free-electron pulses can interfere when interacting with a nanostructure, giving rise to a modulation in the spectral distribution of the cathodoluminescence light emission that is strongly dependent on the electron wave function. Specifically, for a temporally focused electron, cathodoluminescence can be canceled upon illumination with a spectrally modulated dimmed laser that is phase-locked relative to the electron density profile. We illustrate this idea with realistic simulations under attainable conditions in currently available ultrafast electron microscopes. We further argue that the interference between excitations produced by light and free electrons enables the manipulation of the ultrafast materials response by combining the spectral and temporal selectivity of the light with the atomic resolution of electron beams.

Optical Excitations with Electron Beams: Challenges and Opportunities

Free electron beams such as those employed in electron microscopes have evolved into powerful tools to investigate photonic nanostructures with an unrivaled combination of spatial and spectral precision through the analysis of electron energy losses and cathodoluminescence light emission. In combination with ultrafast optics, the emerging field of ultrafast electron microscopy utilizes synchronized femtosecond electron and light pulses that are aimed at the sampled structures, holding the promise to bring simultaneous sub-Å-sub-fs-sub-meV space-time-energy resolution to the study of material and optical-field dynamics. In addition, these advances enable the manipulation of the wave function of individual free electrons in unprecedented ways, opening sound prospects to probe and control quantum excitations at the nanoscale. Here, we provide an overview of photonics research based on free electrons, supplemented by original theoretical insights and discussion of several stimulating challenges and opportunities. In particular, we show that the excitation probability by a single electron is independent of its wave function, apart from a classical average over the transverse beam density profile, whereas the probability for two or more modulated electrons depends on their relative spatial arrangement, thus reflecting the quantum nature of their interactions. We derive first-principles analytical expressions that embody these results and have general validity for arbitrarily shaped electrons and any type of electron-sample interaction. We conclude with some perspectives on various exciting directions that include disruptive approaches to noninvasive spectroscopy and microscopy, the possibility of sampling the nonlinear optical response at the nanoscale, the manipulation of the density matrices associated with free electrons and optical sample modes, and appealing applications in optical modulation of electron beams, all of which could potentially revolutionize the use of free electrons in photonics.