1
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Butrymowicz-Kubiak A, Muzioł TM, Kaczmarek-Kędziera A, Jureddy CS, Maćkosz K, Utke I, Szymańska IB. New palladium(II) β-ketoesterates for focused electron beam induced deposition: synthesis, structures, and characterization. Dalton Trans 2024. [PMID: 39087858 DOI: 10.1039/d4dt01287a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 08/02/2024]
Abstract
We report the synthesis and characterization of new palladium(II) β-ketoesterate complexes [Pd(CH3COCHCO2R)2] with alkyl substituents R = tBu, iPr, Et. These compounds can have potential use in focused electron beam induced deposition (FEBID), which is a direct write method for the growth of structures at the nanoscale. However, it is still a major challenge to obtain deposits with a high metal content, and new precursor molecules are needed to overcome this. Single crystal X-ray diffraction, infrared spectroscopy, nuclear magnetic resonance spectroscopy, and density-functional theory calculations were used to confirm the compounds' composition and structure. Using thermal analysis and sublimation experiments, we investigate their thermal stability and volatility. These studies show that the palladium complexes sublimate over the range 348-353 K under 10-2 mbar pressure. The electron-induced decomposition of the complex molecules in the gas phase and their thin layers on silicon substrates were analysed using electron impact mass spectrometry (EI MS) and microscopy studies (SEM/EDX). They confirm that the precursor electron-induced fragmentation depends on the molecular structure. The obtained results reveal that [Pd(CH3COCHCO2tBu)2] with cis-positioned tert-butyl groups may be a promising FEBID precursor, and we carried out preliminary deposition experiments using this compound.
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Affiliation(s)
- A Butrymowicz-Kubiak
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland.
| | - T M Muzioł
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland.
| | - A Kaczmarek-Kędziera
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland.
| | - C S Jureddy
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH - 3602 Thun, Switzerland
| | - K Maćkosz
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH - 3602 Thun, Switzerland
| | - I Utke
- Empa - Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH - 3602 Thun, Switzerland
| | - I B Szymańska
- Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland.
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2
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Zeng J, Liang T, Zhang J, Liu D, Li S, Lu X, Han M, Yao Y, Xu JB, Sun R, Li L. Correlating Young's Modulus with High Thermal Conductivity in Organic Conjugated Small Molecules. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024; 20:e2309338. [PMID: 38102097 DOI: 10.1002/smll.202309338] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/16/2023] [Revised: 11/26/2023] [Indexed: 12/17/2023]
Abstract
Attaining elevated thermal conductivity in organic materials stands as a coveted objective, particularly within electronic packaging, thermal interface materials, and organic matrix heat exchangers. These applications have reignited interest in researching thermally conductive organic materials. The understanding of thermal transport mechanisms in these organic materials is currently constrained. This study concentrates on N, N'-dioctyl-3,4,9,10-perylenedicarboximide (PTCDI-C8), an organic conjugated crystal. A correlation between elevated thermal conductivity and augmented Young's modulus is substantiated through meticulous experimentation. Achievement via employing the physical vapor transport method, capitalizing on the robust C═C covalent linkages running through the organic matrix chain, bolstered by π-π stacking and noncovalent affiliations that intertwine the chains. The coexistence of these dynamic interactions, alongside the perpendicular alignment of PTCDI-C8 molecules, is confirmed through structural analysis. PTCDI-C8 thin film exhibits an out-of-plane thermal conductivity of 3.1 ± 0.1 W m-1 K-1, as determined by time-domain thermoreflectance. This outpaces conventional organic materials by an order of magnitude. Nanoindentation tests and molecular dynamics simulations elucidate how molecular orientation and intermolecular forces within PTCDI-C8 molecules drive the film's high Young's modulus, contributing to its elevated thermal conductivity. This study's progress offers theoretical guidance for designing high thermal conductivity organic materials, expanding their applications and performance potential.
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Affiliation(s)
- Jianhui Zeng
- Guangdong Key Laboratory for Processing and Forming of Advanced Metallic Materials, School of Mechanical & Automotive Engineering, South China University of Technology, 381 Wushan, Guangzhou, 510640, China
- National Key Laboratory of Materials for Integrated Circuits, Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, China
| | - Ting Liang
- Department of Electronics Engineering, The Chinese University of Hong Kong, Hong Kong, China
| | - Jingjing Zhang
- National Key Laboratory of Materials for Integrated Circuits, Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, China
- Nano Science and Technology Institute, University of Science and Technology of China, No. 166 Renai Road, Suzhou, 215000, China
| | - Daoqing Liu
- National Key Laboratory of Materials for Integrated Circuits, Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, China
| | - Shiang Li
- Department of Physics, The Chinese University of Hong Kong, Hong Kong, 999077, China
| | - Xinhui Lu
- Department of Physics, The Chinese University of Hong Kong, Hong Kong, 999077, China
| | - Meng Han
- National Key Laboratory of Materials for Integrated Circuits, Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, China
| | - Yimin Yao
- National Key Laboratory of Materials for Integrated Circuits, Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, China
| | - Jian-Bin Xu
- Department of Electronics Engineering, The Chinese University of Hong Kong, Hong Kong, China
| | - Rong Sun
- National Key Laboratory of Materials for Integrated Circuits, Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, China
| | - Liejun Li
- Guangdong Key Laboratory for Processing and Forming of Advanced Metallic Materials, School of Mechanical & Automotive Engineering, South China University of Technology, 381 Wushan, Guangzhou, 510640, China
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3
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Volkov OM, Pylypovskyi OV, Porrati F, Kronast F, Fernandez-Roldan JA, Kákay A, Kuprava A, Barth S, Rybakov FN, Eriksson O, Lamb-Camarena S, Makushko P, Mawass MA, Shakeel S, Dobrovolskiy OV, Huth M, Makarov D. Three-dimensional magnetic nanotextures with high-order vorticity in soft magnetic wireframes. Nat Commun 2024; 15:2193. [PMID: 38467623 PMCID: PMC10928081 DOI: 10.1038/s41467-024-46403-8] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/03/2023] [Accepted: 02/22/2024] [Indexed: 03/13/2024] Open
Abstract
Additive nanotechnology enable curvilinear and three-dimensional (3D) magnetic architectures with tunable topology and functionalities surpassing their planar counterparts. Here, we experimentally reveal that 3D soft magnetic wireframe structures resemble compact manifolds and accommodate magnetic textures of high order vorticity determined by the Euler characteristic, χ. We demonstrate that self-standing magnetic tetrapods (homeomorphic to a sphere; χ = + 2) support six surface topological solitons, namely four vortices and two antivortices, with a total vorticity of + 2 equal to its Euler characteristic. Alternatively, wireframe structures with one loop (homeomorphic to a torus; χ = 0) possess equal number of vortices and antivortices, which is relevant for spin-wave splitters and 3D magnonics. Subsequent introduction of n holes into the wireframe geometry (homeomorphic to an n-torus; χ < 0) enables the accommodation of a virtually unlimited number of antivortices, which suggests their usefulness for non-conventional (e.g., reservoir) computation. Furthermore, complex stray-field topologies around these objects are of interest for superconducting electronics, particle trapping and biomedical applications.
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Affiliation(s)
- Oleksii M Volkov
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany.
| | - Oleksandr V Pylypovskyi
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany.
- Kyiv Academic University, 03142, Kyiv, Ukraine.
| | - Fabrizio Porrati
- Physikalisches Institut, Johann Wolfgang Goethe-Universität Frankfurt am Main, Max-von-Laue-Str. 1, 60438, Frankfurt am Main, Germany.
| | - Florian Kronast
- Helmholtz-Zentrum Berlin für Materialien und Energie, Albert-Einstein-Str. 15, 12489, Berlin, Germany
| | - Jose A Fernandez-Roldan
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany
| | - Attila Kákay
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany
| | - Alexander Kuprava
- Physikalisches Institut, Johann Wolfgang Goethe-Universität Frankfurt am Main, Max-von-Laue-Str. 1, 60438, Frankfurt am Main, Germany
| | - Sven Barth
- Physikalisches Institut, Johann Wolfgang Goethe-Universität Frankfurt am Main, Max-von-Laue-Str. 1, 60438, Frankfurt am Main, Germany
| | - Filipp N Rybakov
- Department of Physics and Astronomy, Uppsala University, Box-516, Uppsala, SE-751 20, Sweden
| | - Olle Eriksson
- Department of Physics and Astronomy, Uppsala University, Box-516, Uppsala, SE-751 20, Sweden
- Wallenberg Initiative Materials Science for Sustainability, Uppsala University, 75121, Uppsala, Sweden
| | - Sebastian Lamb-Camarena
- University of Vienna, Faculty of Physics, Nanomagnetism and Magnonics, Superconductivity and Spintronics Laboratory, Währinger Str. 17, 1090, Vienna, Austria
- University of Vienna, Vienna Doctoral School in Physics, Boltzmanngasse 5, A-1090, Vienna, Austria
| | - Pavlo Makushko
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany
| | - Mohamad-Assaad Mawass
- Helmholtz-Zentrum Berlin für Materialien und Energie, Albert-Einstein-Str. 15, 12489, Berlin, Germany
- Department of Interface Science, Fritz-Haber-Institut der Max-Planck-Gesellschaft, Faradayweg 4 - 6, 14195, Berlin, Germany
| | - Shahrukh Shakeel
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany
| | - Oleksandr V Dobrovolskiy
- University of Vienna, Faculty of Physics, Nanomagnetism and Magnonics, Superconductivity and Spintronics Laboratory, Währinger Str. 17, 1090, Vienna, Austria
| | - Michael Huth
- Physikalisches Institut, Johann Wolfgang Goethe-Universität Frankfurt am Main, Max-von-Laue-Str. 1, 60438, Frankfurt am Main, Germany
| | - Denys Makarov
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany.
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4
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Allen FI, De Teresa JM, Onoa B. Focused Helium Ion and Electron Beam-Induced Deposition of Organometallic Tips for Dynamic Atomic Force Microscopy of Biomolecules in Liquid. ACS APPLIED MATERIALS & INTERFACES 2024; 16:4439-4448. [PMID: 38244049 DOI: 10.1021/acsami.3c16407] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/22/2024]
Abstract
We demonstrate the fabrication of sharp nanopillars of high aspect ratio onto specialized atomic force microscopy (AFM) microcantilevers and their use for high-speed AFM of DNA and nucleoproteins in liquid. The fabrication technique uses localized charged-particle-induced deposition with either a focused beam of helium ions or electrons in a helium ion microscope (HIM) or scanning electron microscope (SEM). This approach enables customized growth onto delicate substrates with nanometer-scale placement precision and in situ imaging of the final tip structures using the HIM or SEM. Tip radii of <10 nm are obtained and the underlying microcantilever remains intact. Instead of the more commonly used organic precursors employed for bio-AFM applications, we use an organometallic precursor (tungsten hexacarbonyl) resulting in tungsten-containing tips. Transmission electron microscopy reveals a thin layer of carbon on the tips. The interaction of the new tips with biological specimens is therefore likely very similar to that of standard carbonaceous tips, with the added benefit of robustness. A further advantage of the organometallic tips is that compared to carbonaceous tips they better withstand UV-ozone cleaning treatments to remove residual organic contaminants between experiments, which are inevitable during the scanning of soft biomolecules in liquid. Our tips can also be grown onto the blunted tips of previously used cantilevers, thus providing a means to recycle specialized cantilevers and restore their performance to the original manufacturer specifications. Finally, a focused helium ion beam milling technique to reduce the tip radii and thus further improve lateral spatial resolution in the AFM scans is demonstrated.
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Affiliation(s)
- Frances I Allen
- Department of Materials Science and Engineering, University of California, Berkeley, California 97420, United States
- California Institute for Quantitative Biosciences, University of California, Berkeley, California 97420, United States
- National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California 97420, United States
| | - José María De Teresa
- Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza, Zaragoza 50009, Spain
| | - Bibiana Onoa
- California Institute for Quantitative Biosciences, University of California, Berkeley, California 97420, United States
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5
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Huang Y, Yin K, Li B, Zheng A, Wu B, Sun L, Nie M. Microelectromechanical system for in situ quantitative testing of tension-compression asymmetry in nanostructures. NANOSCALE HORIZONS 2024; 9:254-263. [PMID: 38014510 DOI: 10.1039/d3nh00407d] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/29/2023]
Abstract
Tension-compression asymmetry is a topic of current interest in nanostructures, especially in strain engineering. Herein, we report a novel on-chip microelectromechanical system (MEMS) that can realize in situ quantitative mechanical testing of nanostructures under tension-compression functions. The mechanical properties of three kinds of nanostructures fabricated by focused ion beam (FIB) techniques were systematically investigated with the presented on-chip testing system. The results declare that both Pt nanopillars and C nanowires exhibit plastic deformation behavior under tension testing, with average Young's moduli of 70.06 GPa and 58.32 GPa, respectively. However, the mechanical deformation mechanisms of the two nanostructures changed in compression tests. The Pt nanopillar exhibited in-plane buckling behavior, while the C nanowire displayed 3D twisting behavior with a maximum strain of 25.47%, which is far greater than the tensile strain. Moreover, asymmetric behavior was also observed in the C nanospring during five loading-unloading tension-compression deformation tests. This work provides a novel insight into the asymmetric mechanical properties of nanostructures, with potential applications in nanotechnology research.
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Affiliation(s)
- Yuheng Huang
- SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Kuibo Yin
- SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Binghui Li
- SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Anqi Zheng
- SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Bozhi Wu
- SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Litao Sun
- SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Meng Nie
- SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China.
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6
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Kumar A, Husale S, Saravanan MP, Gajar B, Yousuf M, Saini A, Yadav MG, Aloysius RP. Current-voltage characteristics of focused ion beam fabricated superconducting tungsten meanders. NANOTECHNOLOGY 2023; 35:015705. [PMID: 37793353 DOI: 10.1088/1361-6528/acffcf] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/18/2023] [Accepted: 10/04/2023] [Indexed: 10/06/2023]
Abstract
We report on the superconducting properties and intermediate resistive steps (IRS) observed in the current-voltage characteristics (IVC) of tungsten meander (MW) structures fabricated using focused ion beam (FIB) technique. Three number of MWs were studied with individual wire widths of 240 nm, 640 nm and 850 nm with superconducting transition temperatures (TC) of 4.5 K, 4.55 K and 4.60 K respectively. The measured normal state resistance values at 8 K for these wires are of ∼182 kΩ, ∼49 kΩ and ∼32 kΩ, respectively as a function of increasing wire widths; are higher than the quantum of resistance (h/4e2=6.45kΩ,his a Planck constant andeis electronic charge) indicating extreme disorder nature of the fabricated samples. The variation of resistance with respect to temperature (forT
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Affiliation(s)
- Abhishek Kumar
- Quantum Nanophotonics Metrology Division, CSIR-National Physical Laboratory, Dr K. S. Krishnan Marg, New Delhi 110012, India
- Academy of Scientific and Innovative Research (AcSIR), Ghaziabad 201002, India
| | - Sudhir Husale
- Quantum Nanophotonics Metrology Division, CSIR-National Physical Laboratory, Dr K. S. Krishnan Marg, New Delhi 110012, India
- Academy of Scientific and Innovative Research (AcSIR), Ghaziabad 201002, India
| | - M P Saravanan
- Low Temperature Laboratory, UGC-DAE Consortium for Scientific Research, University Campus, Khandwa Road, Indore 452001, India
| | - Bikash Gajar
- Quantum Nanophotonics Metrology Division, CSIR-National Physical Laboratory, Dr K. S. Krishnan Marg, New Delhi 110012, India
- Academy of Scientific and Innovative Research (AcSIR), Ghaziabad 201002, India
| | - Majid Yousuf
- Quantum Nanophotonics Metrology Division, CSIR-National Physical Laboratory, Dr K. S. Krishnan Marg, New Delhi 110012, India
- Academy of Scientific and Innovative Research (AcSIR), Ghaziabad 201002, India
| | - Abhilasha Saini
- Quantum Nanophotonics Metrology Division, CSIR-National Physical Laboratory, Dr K. S. Krishnan Marg, New Delhi 110012, India
- Academy of Scientific and Innovative Research (AcSIR), Ghaziabad 201002, India
| | - Mahesh Gaurav Yadav
- Quantum Nanophotonics Metrology Division, CSIR-National Physical Laboratory, Dr K. S. Krishnan Marg, New Delhi 110012, India
- Academy of Scientific and Innovative Research (AcSIR), Ghaziabad 201002, India
| | - R P Aloysius
- Quantum Nanophotonics Metrology Division, CSIR-National Physical Laboratory, Dr K. S. Krishnan Marg, New Delhi 110012, India
- Academy of Scientific and Innovative Research (AcSIR), Ghaziabad 201002, India
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7
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Farr NTH, Pasniewski M, de Marco A. Assessing the Quality of Oxygen Plasma Focused Ion Beam (O-PFIB) Etching on Polypropylene Surfaces Using Secondary Electron Hyperspectral Imaging. Polymers (Basel) 2023; 15:3247. [PMID: 37571142 PMCID: PMC10422415 DOI: 10.3390/polym15153247] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/22/2023] [Revised: 07/23/2023] [Accepted: 07/25/2023] [Indexed: 08/13/2023] Open
Abstract
The development of Focused Ion Beam-Scanning Electron Microscopy (FIB-SEM) systems has provided significant advances in the processing and characterization of polymers. A fundamental understanding of ion-sample interactions is still missing despite FIB-SEM being routinely applied in microstructural analyses of polymers. This study applies Secondary Electron Hyperspectral Imaging to reveal oxygen and xenon plasma FIB interactions on the surface of a polymer (in this instance, polypropylene). Secondary Electron Hyperspectral Imaging (SEHI) is a technique housed within the SEM chamber that exhibits multiscale surface sensitivity with a high spatial resolution and the ability to identify carbon bonding present using low beam energies without requiring an Ultra High Vacuum (UHV). SEHI is made possible through the use of through-the-lens detectors (TLDs) to provide a low-pass SE collection of low primary electron beam energies and currents. SE images acquired over the same region of interest from different energy ranges are plotted to produce an SE spectrum. The data provided in this study provide evidence of SEHI's ability to be a valuable tool in the characterization of polymer surfaces post-PFIB etching, allowing for insights into both tailoring polymer processing FIB parameters and SEHI's ability to be used to monitor serial FIB polymer surfaces in situ.
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Affiliation(s)
- Nicholas T. H. Farr
- Department of Materials Science and Engineering, University of Sheffield, Sir Robert Hadfield Building, Mappin Street, Sheffield S1 3JD, UK
- Insigneo Institute for In Silico Medicine, The Pam Liversidge Building, Mappin Street, Sheffield S10 2TN, UK
| | - Maciej Pasniewski
- ExxonMobil Chemical Europe Inc., European Technology Center, 1831 Machelen, Belgium
- Electron Microscopy for Materials Science (EMAT), University of Antwerp, 2000 Antwerp, Belgium
| | - Alex de Marco
- Biomedicine Discovery Institute, Department of Biochemistry and Molecular Biology, Monash University, Melbourne, VIC 3199, Australia
- Simons Electron Microscopy Center, New York Structural Biology Center, New York, NY 10027, USA
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8
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Zhao L, Cui Y, Li J, Xie Y, Li W, Zhang J. The 3D Controllable Fabrication of Nanomaterials with FIB-SEM Synchronization Technology. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:1839. [PMID: 37368269 DOI: 10.3390/nano13121839] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/15/2023] [Revised: 06/06/2023] [Accepted: 06/08/2023] [Indexed: 06/28/2023]
Abstract
Nanomaterials with unique structures and functions have been widely used in the fields of microelectronics, biology, medicine, and aerospace, etc. With advantages of high resolution and multi functions (e.g., milling, deposition, and implantation), focused ion beam (FIB) technology has been widely developed due to urgent demands for the 3D fabrication of nanomaterials in recent years. In this paper, FIB technology is illustrated in detail, including ion optical systems, operating modes, and combining equipment with other systems. Together with the in situ and real-time monitoring of scanning electron microscopy (SEM) imaging, a FIB-SEM synchronization system achieved 3D controllable fabrication from conductive to semiconductive and insulative nanomaterials. The controllable FIB-SEM processing of conductive nanomaterials with a high precision is studied, especially for the FIB-induced deposition (FIBID) 3D nano-patterning and nano-origami. As for semiconductive nanomaterials, the realization of high resolution and controllability is focused on nano-origami and 3D milling with a high aspect ratio. The parameters of FIB-SEM and its working modes are analyzed and optimized to achieve the high aspect ratio fabrication and 3D reconstruction of insulative nanomaterials. Furthermore, the current challenges and future outlooks are prospected for the 3D controllable processing of flexible insulative materials with high resolution.
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Affiliation(s)
- Lirong Zhao
- School of Physics, Beihang University, Beijing 100191, China
| | - Yimin Cui
- School of Physics, Beihang University, Beijing 100191, China
| | - Junyi Li
- School of Physics, Beihang University, Beijing 100191, China
| | - Yuxi Xie
- School of Physics, Beihang University, Beijing 100191, China
| | - Wenping Li
- School of Physics, Beihang University, Beijing 100191, China
| | - Junying Zhang
- School of Physics, Beihang University, Beijing 100191, China
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9
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Kähler H, Arthaber H, Winkler R, West RG, Ignat I, Plank H, Schmid S. Transduction of Single Nanomechanical Pillar Resonators by Scattering of Surface Acoustic Waves. NANO LETTERS 2023; 23:4344-4350. [PMID: 37167540 DOI: 10.1021/acs.nanolett.3c00605] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/13/2023]
Abstract
One of the challenges of nanoelectromechanical systems (NEMS) is the effective transduction of the tiny resonators. Vertical structures, such as nanomechanical pillar resonators, which are exploited in optomechanics, acoustic metamaterials, and nanomechanical sensing, are particularly challenging to transduce. Existing electromechanical transduction methods are ill-suited as they put constraints on the pillars' material and do not enable a transduction of freestanding pillars. Here, we present an electromechanical transduction method for single nanomechanical pillar resonators based on surface acoustic waves (SAWs). We demonstrate the transduction of freestanding nanomechanical platinum-carbon pillars in the first-order bending and compression mode. Since the principle of the transduction method is based on resonant scattering of a SAW by a nanomechanical resonator, our transduction method is independent of the pillar's material and not limited to pillar-shaped geometries. It represents a general method to transduce vertical mechanical resonators with nanoscale lateral dimensions.
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Affiliation(s)
- Hendrik Kähler
- Institute of Sensor and Actuator Systems, TU Wien, Gusshausstrasse 27-29, 1040 Vienna, Austria
| | - Holger Arthaber
- Institute of Electrodynamics, Microwave and Circuit Engineering, TU Wien, Gusshausstrasse 25, 1040 Vienna, Austria
| | - Robert Winkler
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nanoprobes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
| | - Robert G West
- Institute of Sensor and Actuator Systems, TU Wien, Gusshausstrasse 27-29, 1040 Vienna, Austria
| | - Ioan Ignat
- Institute of Sensor and Actuator Systems, TU Wien, Gusshausstrasse 27-29, 1040 Vienna, Austria
| | - Harald Plank
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nanoprobes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | - Silvan Schmid
- Institute of Sensor and Actuator Systems, TU Wien, Gusshausstrasse 27-29, 1040 Vienna, Austria
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10
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Porrati F, Barth S, Gazzadi GC, Frabboni S, Volkov OM, Makarov D, Huth M. Site-Selective Chemical Vapor Deposition on Direct-Write 3D Nanoarchitectures. ACS NANO 2023; 17:4704-4715. [PMID: 36826847 DOI: 10.1021/acsnano.2c10968] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Recent advancements in additive manufacturing have enabled the preparation of free-shaped 3D objects with feature sizes down to and below the micrometer scale. Among the fabrication methods, focused electron beam- and focused ion beam-induced deposition (FEBID and FIBID, respectively) associate a high flexibility and unmatched accuracy in 3D writing with a wide material portfolio, thereby allowing for the growth of metallic to insulating materials. The combination of the free-shaped 3D nanowriting with established chemical vapor deposition (CVD) techniques provides attractive opportunities to synthesize complex 3D core-shell heterostructures. Hence, this hybrid approach enables the fabrication of morphologically tunable layer-based nanostructures with the great potential of unlocking further functionalities. Here, the fundamentals of such a hybrid approach are demonstrated by preparing core-shell heterostructures using 3D FEBID scaffolds for site-selective CVD. In particular, 3D microbridges are printed by FEBID with the (CH3)3CH3C5H4Pt precursor and coated by thermal CVD using the Nb(NMe2)3(N-t-Bu) and HFeCo3(CO)12 precursors. Two model systems on the basis of CVD layers consisting of a superconducting NbC-based layer and a ferromagnetic Co3Fe layer are prepared and characterized with regard to their composition, microstructure, and magneto-transport properties.
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Affiliation(s)
- Fabrizio Porrati
- Physikalisches Institut, Goethe-Universität, Max-von-Laue-Str. 1, D-60438 Frankfurt am Main, Germany
| | - Sven Barth
- Physikalisches Institut, Goethe-Universität, Max-von-Laue-Str. 1, D-60438 Frankfurt am Main, Germany
| | - Gian Carlo Gazzadi
- S3 Center, Nanoscience Institute-CNR, Via Campi 213/a, I-41125 Modena, Italy
| | - Stefano Frabboni
- S3 Center, Nanoscience Institute-CNR, Via Campi 213/a, I-41125 Modena, Italy
- FIM Department, University of Modena and Reggio Emilia, Via G. Campi 213/a, I-41125 Modena, Italy
| | - Oleksii M Volkov
- Helmholtz-Zentrum DresdenRossendorf e.V., Institute of Ion Beam Physics and Materials Research, 01328 Dresden, Germany
| | - Denys Makarov
- Helmholtz-Zentrum DresdenRossendorf e.V., Institute of Ion Beam Physics and Materials Research, 01328 Dresden, Germany
| | - Michael Huth
- Physikalisches Institut, Goethe-Universität, Max-von-Laue-Str. 1, D-60438 Frankfurt am Main, Germany
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11
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Lasseter J, Rack PD, Randolph SJ. Selected Area Deposition of High Purity Gold for Functional 3D Architectures. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:757. [PMID: 36839126 PMCID: PMC9965196 DOI: 10.3390/nano13040757] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/03/2023] [Revised: 02/14/2023] [Accepted: 02/14/2023] [Indexed: 06/18/2023]
Abstract
Selected area deposition of high purity gold films onto nanoscale 3D architectures is highly desirable as gold is conductive, inert, plasmonically active, and can be functionalized with thiol chemistries, which are useful in many biological applications. Here, we show that high-purity gold coatings can be selectively grown with the Me2Au (acac) precursor onto nanoscale 3D architectures via a pulsed laser pyrolytic chemical vapor deposition process. The selected area of deposition is achieved due to the high thermal resistance of the nanoscale geometries. Focused electron beam induced deposits (FEBID) and carbon nanofibers are functionalized with gold coatings, and we demonstrate the effects that laser irradiance, pulse width, and precursor pressure have on the growth rate. Furthermore, we demonstrate selected area deposition with a feature-targeting resolutions of ~100 and 5 µm, using diode lasers coupled to a multimode (915 nm) and single mode (785 nm) fiber optic, respectively. The experimental results are rationalized via finite element thermal modeling.
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Affiliation(s)
- John Lasseter
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA
| | - Philip D. Rack
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA
| | - Steven J. Randolph
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
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12
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Seewald LM, Sattelkow J, Brugger-Hatzl M, Kothleitner G, Frerichs H, Schwalb C, Hummel S, Plank H. 3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:4477. [PMID: 36558331 PMCID: PMC9787867 DOI: 10.3390/nano12244477] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/25/2022] [Revised: 12/07/2022] [Accepted: 12/15/2022] [Indexed: 06/17/2023]
Abstract
3D nanoprinting via focused electron beam induced deposition (FEBID) is applied for fabrication of all-metal nanoprobes for atomic force microscopy (AFM)-based electrical operation modes. The 3D tip concept is based on a hollow-cone (HC) design, with all-metal material properties and apex radii in the sub-10 nm regime to allow for high-resolution imaging during morphological imaging, conductive AFM (CAFM) and electrostatic force microscopy (EFM). The study starts with design aspects to motivate the proposed HC architecture, followed by detailed fabrication characterization to identify and optimize FEBID process parameters. To arrive at desired material properties, e-beam assisted purification in low-pressure water atmospheres was applied at room temperature, which enabled the removal of carbon impurities from as-deposited structures. The microstructure of final HCs was analyzed via scanning transmission electron microscopy-high-angle annular dark field (STEM-HAADF), whereas electrical and mechanical properties were investigated in situ using micromanipulators. Finally, AFM/EFM/CAFM measurements were performed in comparison to non-functional, high-resolution tips and commercially available electric probes. In essence, we demonstrate that the proposed all-metal HCs provide the resolution capabilities of the former, with the electric conductivity of the latter onboard, combining both assets in one design.
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Affiliation(s)
- Lukas Matthias Seewald
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria
| | - Jürgen Sattelkow
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria
| | - Michele Brugger-Hatzl
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria
| | - Gerald Kothleitner
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | | | - Christian Schwalb
- GETec Microscopy Inc., 1020 Wien, Austria
- Quantum Design Microscopy, 64293 Darmstadt, Germany
| | | | - Harald Plank
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
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13
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Chen C, Huang B, Liu Y, Liu F, Lee IS. Functional engineering strategies of 3D printed implants for hard tissue replacement. Regen Biomater 2022; 10:rbac094. [PMID: 36683758 PMCID: PMC9845531 DOI: 10.1093/rb/rbac094] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/03/2022] [Revised: 10/20/2022] [Accepted: 10/27/2022] [Indexed: 11/27/2022] Open
Abstract
Three-dimensional printing technology with the rapid development of printing materials are widely recognized as a promising way to fabricate bioartificial bone tissues. In consideration of the disadvantages of bone substitutes, including poor mechanical properties, lack of vascularization and insufficient osteointegration, functional modification strategies can provide multiple functions and desired characteristics of printing materials, enhance their physicochemical and biological properties in bone tissue engineering. Thus, this review focuses on the advances of functional engineering strategies for 3D printed biomaterials in hard tissue replacement. It is structured as introducing 3D printing technologies, properties of printing materials (metals, ceramics and polymers) and typical functional engineering strategies utilized in the application of bone, cartilage and joint regeneration.
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Affiliation(s)
- Cen Chen
- College of Life Sciences and Medicine, Zhejiang Sci-Tech University, Hangzhou 310018, PR China
| | - Bo Huang
- College of Life Sciences and Medicine, Zhejiang Sci-Tech University, Hangzhou 310018, PR China
| | - Yi Liu
- Department of Orthodontics, School of Stomatology, China Medical University, Shenyang 110002, PR China
| | - Fan Liu
- Department of Orthodontics, School of Stomatology, China Medical University, Shenyang 110002, PR China
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14
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Haub M, Guenther T, Bogner M, Zimmermann A. Use of PtC Nanotips for Low-Voltage Quantum Tunneling Applications. MICROMACHINES 2022; 13:mi13071019. [PMID: 35888836 PMCID: PMC9317598 DOI: 10.3390/mi13071019] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/19/2022] [Revised: 06/21/2022] [Accepted: 06/24/2022] [Indexed: 11/16/2022]
Abstract
The use of focused ion and focused electron beam (FIB/FEB) technology permits the fabrication of micro- and nanometer scale geometries. Therefore, FIB/FEB technology is a favorable technique for preparing TEM lamellae, nanocontacts, or nanowires and repairing electronic circuits. This work investigates FIB/FEB technology as a tool for nanotip fabrication and quantum mechanical tunneling applications at a low tunneling voltage. Using a gas injection system (GIS), the Ga-FIB and FEB technology allows both additive and subtractive fabrication of arbitrary structures. Using energy dispersive X-ray spectroscopy (EDX), resistance measurement (RM), and scanning tunneling microscope (STM)/spectroscopy (STS) methods, the tunneling suitability of the utilized metal–organic material–platinum carbon (PtC) is investigated. Thus, to create electrode tips with radii down to 15 nm, a stable and reproducible process has to be developed. The metal–organic microstructure analysis shows suitable FIB parameters for the tunneling effect at high aperture currents (260 pA, 30 kV). These are required to ensure the suitability of the electrodes for the tunneling effect by an increased platinum content (EDX), a low resistivity (RM), and a small band gap (STM). The STM application allows the imaging of highly oriented pyrolytic graphite (HOPG) layers and demonstrates the tunneling suitability of PtC electrodes based on high FIB aperture currents and a low tunneling voltage.
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Affiliation(s)
- Michael Haub
- Institute for Micro Integration (IFM), University of Stuttgart, Allmandring 9b, 70569 Stuttgart, Germany; (T.G.); (M.B.); (A.Z.)
- Correspondence:
| | - Thomas Guenther
- Institute for Micro Integration (IFM), University of Stuttgart, Allmandring 9b, 70569 Stuttgart, Germany; (T.G.); (M.B.); (A.Z.)
| | - Martin Bogner
- Institute for Micro Integration (IFM), University of Stuttgart, Allmandring 9b, 70569 Stuttgart, Germany; (T.G.); (M.B.); (A.Z.)
| | - André Zimmermann
- Institute for Micro Integration (IFM), University of Stuttgart, Allmandring 9b, 70569 Stuttgart, Germany; (T.G.); (M.B.); (A.Z.)
- Hahn-Schickard, Allmandring 9b, 70569 Stuttgart, Germany
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15
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Utke I, Swiderek P, Höflich K, Madajska K, Jurczyk J, Martinović P, Szymańska I. Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies. Coord Chem Rev 2022. [DOI: 10.1016/j.ccr.2021.213851] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/11/2022]
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16
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Orús P, Sigloch F, Sangiao S, De Teresa JM. Superconducting Materials and Devices Grown by Focused Ion and Electron Beam Induced Deposition. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:1367. [PMID: 35458074 PMCID: PMC9029853 DOI: 10.3390/nano12081367] [Citation(s) in RCA: 7] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/16/2022] [Revised: 04/11/2022] [Accepted: 04/13/2022] [Indexed: 01/27/2023]
Abstract
Since its discovery in 1911, superconductivity has represented an equally inciting and fascinating field of study in several areas of physics and materials science, ranging from its most fundamental theoretical understanding, to its practical application in different areas of engineering. The fabrication of superconducting materials can be downsized to the nanoscale by means of Focused Ion/Electron Beam Induced Deposition: nanopatterning techniques that make use of a focused beam of ions or electrons to decompose a gaseous precursor in a single step. Overcoming the need to use a resist, these approaches allow for targeted, highly-flexible nanopatterning of nanostructures with lateral resolution in the range of 10 nm to 30 nm. In this review, the fundamentals of these nanofabrication techniques are presented, followed by a literature revision on the published work that makes use of them to grow superconducting materials, the most remarkable of which are based on tungsten, niobium, molybdenum, carbon, and lead. Several examples of the application of these materials to functional devices are presented, related to the superconducting proximity effect, vortex dynamics, electric-field effect, and to the nanofabrication of Josephson junctions and nanoSQUIDs. Owing to the patterning flexibility they offer, both of these techniques represent a powerful and convenient approach towards both fundamental and applied research in superconductivity.
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Affiliation(s)
- Pablo Orús
- Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza, 50009 Zaragoza, Spain
| | - Fabian Sigloch
- Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza, 50009 Zaragoza, Spain
| | - Soraya Sangiao
- Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza, 50009 Zaragoza, Spain
- Departamento de Física de la Materia Condensada, Facultad de Ciencias, Universidad de Zaragoza, 50009 Zaragoza, Spain
- Laboratorio de Microscopías Avanzadas (LMA), University of Zaragoza, 50018 Zaragoza, Spain
| | - José María De Teresa
- Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza, 50009 Zaragoza, Spain
- Departamento de Física de la Materia Condensada, Facultad de Ciencias, Universidad de Zaragoza, 50009 Zaragoza, Spain
- Laboratorio de Microscopías Avanzadas (LMA), University of Zaragoza, 50018 Zaragoza, Spain
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17
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Shen C, Zhu Z, Zhu D, van Nisselroy C, Zambelli T, Momotenko D. Electrochemical 3D printing of Ni-Mn and Ni-Co alloy with FluidFM. NANOTECHNOLOGY 2022; 33:265301. [PMID: 35240592 DOI: 10.1088/1361-6528/ac5a80] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/22/2021] [Accepted: 03/03/2022] [Indexed: 06/14/2023]
Abstract
Additive manufacturing can realize almost any designed geometry, enabling the fabrication of innovative products for advanced applications. Local electrochemical plating is a powerful approach for additive manufacturing of metal microstructures; however, previously reported data have been mostly obtained with copper, and only a few cases have been reported with other elements. In this study, we assessed the ability of fluidic force microscopy to produce Ni-Mn and Ni-Co alloy structures. Once the optimal deposition potential window was determined, pillars with relatively smooth surfaces were obtained. The printing process was characterized by printing rates in the range of 50-60 nm s-1. Cross-sections exposed by focused ion beam showed highly dense microstructures, while the corresponding face scan with energy-dispersive x-ray spectroscopy spectra revealed a uniform distribution of alloy components.
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Affiliation(s)
- Chunjian Shen
- College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, People's Republic of China
- Laboratory of Biosensors and Bioelectronics, ETH Zürich, Gloriastrasse 35, 8092, Zurich, Switzerland
| | - Zengwei Zhu
- College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, People's Republic of China
| | - Di Zhu
- College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, People's Republic of China
| | - Cathelijn van Nisselroy
- Laboratory of Biosensors and Bioelectronics, ETH Zürich, Gloriastrasse 35, 8092, Zurich, Switzerland
| | - Tomaso Zambelli
- Laboratory of Biosensors and Bioelectronics, ETH Zürich, Gloriastrasse 35, 8092, Zurich, Switzerland
| | - Dmitry Momotenko
- Department of Chemistry, Carl von Ossietzky University of Oldenburg, Oldenburg, D-26129, Germany
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18
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Fang C, Xing Y. Investigation of the Shadow Effect in Focused Ion Beam Induced Deposition. NANOMATERIALS 2022; 12:nano12060905. [PMID: 35335717 PMCID: PMC8955986 DOI: 10.3390/nano12060905] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/09/2022] [Revised: 02/28/2022] [Accepted: 03/08/2022] [Indexed: 11/29/2022]
Abstract
Due to the precursor gas flow in the focused ion beam induced deposition process, a shadow effect appears behind the shading structures. This article carries out experiments with phenanthrene as the precursor gas and establishes a numerical model to define the shadow area and estimate the intensity of the shadow effect, considering the morphology of shading structure, the beam shift, and the nozzle parameters. Within the shadow area, the precursor molecule adsorption contribution is estimated by calculating the fraction of precursor gas flow in a specific direction. Finally, the number of precursor molecules within the beam impact area influenced by the shadow effect is obtained, emphasizing the important role of gas surface diffusion. The adsorption contribution within the shadow area differs a lot while deposited structures are similar in height. The error between the simulation and the experimental results is about 5%, verifying the accuracy of the proposed model.
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19
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Hinum-Wagner J, Kuhness D, Kothleitner G, Winkler R, Plank H. FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality. NANOMATERIALS 2021; 11:nano11061527. [PMID: 34207654 PMCID: PMC8229455 DOI: 10.3390/nano11061527] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/12/2021] [Revised: 06/01/2021] [Accepted: 06/03/2021] [Indexed: 11/16/2022]
Abstract
High-fidelity 3D printing of nanoscale objects is an increasing relevant but challenging task. Among the few fabrication techniques, focused electron beam induced deposition (FEBID) has demonstrated its high potential due to its direct-write character, nanoscale capabilities in 3D space and a very high design flexibility. A limitation, however, is the low fabrication speed, which often restricts 3D-FEBID for the fabrication of single objects. In this study, we approach that challenge by reducing the substrate temperatures with a homemade Peltier stage and investigate the effects on Pt based 3D deposits in a temperature range of 5–30 °C. The findings reveal a volume growth rate boost up to a factor of 5.6, while the shape fidelity in 3D space is maintained. From a materials point of view, the internal nanogranular composition is practically unaffected down to 10 °C, followed by a slight grain size increase for even lower temperatures. The study is complemented by a comprehensive discussion about the growth mechanism for a more general picture. The combined findings demonstrate that FEBID on low substrate temperatures is not only much faster, but practically free of drawbacks during high fidelity 3D nanofabrication.
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Affiliation(s)
- Jakob Hinum-Wagner
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; (J.H.-W.); (D.K.)
| | - David Kuhness
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; (J.H.-W.); (D.K.)
| | - Gerald Kothleitner
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria;
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | - Robert Winkler
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; (J.H.-W.); (D.K.)
- Correspondence: (R.W.); (H.P.)
| | - Harald Plank
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; (J.H.-W.); (D.K.)
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria;
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
- Correspondence: (R.W.); (H.P.)
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20
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Monitoring Carbon in Electron and Ion Beam Deposition within FIB-SEM. MATERIALS 2021; 14:ma14113034. [PMID: 34199625 PMCID: PMC8199708 DOI: 10.3390/ma14113034] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/05/2021] [Revised: 05/25/2021] [Accepted: 05/28/2021] [Indexed: 11/30/2022]
Abstract
It is well known that carbon present in scanning electron microscopes (SEM), Focused ion beam (FIB) systems and FIB-SEMs, causes imaging artefacts and influences the quality of TEM lamellae or structures fabricated in FIB-SEMs. The severity of such effects depends not only on the quantity of carbon present but also on its bonding state. Despite this, the presence of carbon and its bonding state is not regularly monitored in FIB-SEMs. Here we demonstrated that Secondary Electron Hyperspectral Imaging (SEHI) can be implemented in different FIB-SEMs (ThermoFisher Helios G4-CXe PFIB and Helios Nanolab G3 UC) and used to observe carbon built up/removal and bonding changes resulting from electron/ion beam exposure. As well as the ability to monitor, this study also showed the capability of Plasma FIB Xe exposure to remove carbon contamination from the surface of a Ti6246 alloy without the requirement of chemical surface treatments.
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21
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Manoccio M, Esposito M, Passaseo A, Cuscunà M, Tasco V. Focused Ion Beam Processing for 3D Chiral Photonics Nanostructures. MICROMACHINES 2020; 12:6. [PMID: 33374782 PMCID: PMC7823276 DOI: 10.3390/mi12010006] [Citation(s) in RCA: 18] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/29/2020] [Revised: 12/08/2020] [Accepted: 12/08/2020] [Indexed: 12/12/2022]
Abstract
The focused ion beam (FIB) is a powerful piece of technology which has enabled scientific and technological advances in the realization and study of micro- and nano-systems in many research areas, such as nanotechnology, material science, and the microelectronic industry. Recently, its applications have been extended to the photonics field, owing to the possibility of developing systems with complex shapes, including 3D chiral shapes. Indeed, micro-/nano-structured elements with precise geometrical features at the nanoscale can be realized by FIB processing, with sizes that can be tailored in order to tune optical responses over a broad spectral region. In this review, we give an overview of recent efforts in this field which have involved FIB processing as a nanofabrication tool for photonics applications. In particular, we focus on FIB-induced deposition and FIB milling, employed to build 3D nanostructures and metasurfaces exhibiting intrinsic chirality. We describe the fabrication strategies present in the literature and the chiro-optical behavior of the developed structures. The achieved results pave the way for the creation of novel and advanced nanophotonic devices for many fields of application, ranging from polarization control to integration in photonic circuits to subwavelength imaging.
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Affiliation(s)
- Mariachiara Manoccio
- Department of Mathematics and Physics Ennio De Giorgi, University of Salento, Via Arnesano, 73100 Lecce, Italy
- CNR NANOTEC Institute of Nanotechnology, Via Monteroni, 73100 Lecce, Italy; (A.P.); (M.C.); (V.T.)
| | - Marco Esposito
- CNR NANOTEC Institute of Nanotechnology, Via Monteroni, 73100 Lecce, Italy; (A.P.); (M.C.); (V.T.)
| | - Adriana Passaseo
- CNR NANOTEC Institute of Nanotechnology, Via Monteroni, 73100 Lecce, Italy; (A.P.); (M.C.); (V.T.)
| | - Massimo Cuscunà
- CNR NANOTEC Institute of Nanotechnology, Via Monteroni, 73100 Lecce, Italy; (A.P.); (M.C.); (V.T.)
| | - Vittorianna Tasco
- CNR NANOTEC Institute of Nanotechnology, Via Monteroni, 73100 Lecce, Italy; (A.P.); (M.C.); (V.T.)
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22
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Ganjian M, Angeloni L, Mirzaali MJ, Modaresifar K, Hagen CW, Ghatkesar MK, Hagedoorn PL, Fratila-Apachitei LE, Zadpoor AA. Quantitative mechanics of 3D printed nanopillars interacting with bacterial cells. NANOSCALE 2020; 12:21988-22001. [PMID: 32914826 DOI: 10.1039/d0nr05984f] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/10/2023]
Abstract
One of the methods to create sub-10 nm resolution metal-composed 3D nanopillars is electron beam-induced deposition (EBID). Surface nanotopographies (e.g., nanopillars) could play an important role in the design and fabrication of implantable medical devices by preventing the infections that are caused by the bacterial colonization of the implant surface. The mechanical properties of such nanoscale structures can influence their bactericidal efficiency. In addition, these properties are key factors in determining the fate of stem cells. In this study, we quantified the relevant mechanical properties of EBID nanopillars interacting with Staphylococcus aureus (S. aureus) using atomic force microscopy (AFM). We first determined the elastic modulus (17.7 GPa) and the fracture stress (3.0 ± 0.3 GPa) of the nanopillars using the quantitative imaging (QI) mode and contact mode (CM) of AFM. The displacement of the nanopillars interacting with the bacteria cells was measured by scanning electron microscopy (50.3 ± 9.0 nm). Finite element method based simulations were then applied to obtain the force-displacement curve of the nanopillars (considering the specified dimensions and the measured value of the elastic modulus) based on which an interaction force of 88.7 ± 36.1 nN was determined. The maximum von Mises stress of the nanopillars subjected to these forces was also determined (3.2 ± 0.3 GPa). These values were close to the maximum (i.e., fracture) stress of the pillars as measured by AFM, indicating that the nanopillars were close to their breaking point while interacting with S. aureus. These findings reveal unique quantitative data regarding the mechanical properties of nanopillars interacting with bacterial cells and highlight the possibilities of enhancing the bactericidal activity of the investigated EBID nanopillars by adjusting both their geometry and mechanical properties.
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Affiliation(s)
- Mahya Ganjian
- Department of Biomechanical Engineering, Faculty of Mechanical, Maritime, and Materials Engineering, Delft University of Technology, Mekelweg 2, 2628CD, Delft, The Netherlands.
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Plank H, Winkler R, Schwalb CH, Hütner J, Fowlkes JD, Rack PD, Utke I, Huth M. Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review. MICROMACHINES 2019; 11:E48. [PMID: 31906005 PMCID: PMC7019982 DOI: 10.3390/mi11010048] [Citation(s) in RCA: 47] [Impact Index Per Article: 9.4] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/29/2019] [Revised: 12/20/2019] [Accepted: 12/20/2019] [Indexed: 11/17/2022]
Abstract
Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication / modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.
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Affiliation(s)
- Harald Plank
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria;
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
| | - Robert Winkler
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria;
| | | | - Johanna Hütner
- GETec Microscopy GmbH, 1220 Vienna, Austria; (C.H.S.); (J.H.)
| | - Jason D. Fowlkes
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (J.D.F.); (P.D.R.)
- Materials Science and Engineering, The University of Tennessee, Knoxville, Knoxville, TN 37996, USA
| | - Philip D. Rack
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (J.D.F.); (P.D.R.)
- Materials Science and Engineering, The University of Tennessee, Knoxville, Knoxville, TN 37996, USA
| | - Ivo Utke
- Mechanics of Materials and Nanostructures Laboratory, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland;
| | - Michael Huth
- Physics Institute, Goethe University Frankfurt, 60323 Frankfurt am Main, Germany;
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