Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications-Towards the CMOS-MEMS Monolithic Approach

Index Air Quality Monitoring for Light and Active Mobility

Light and active mobility, as well as multimodal mobility, could significantly contribute to decarbonization. Air quality is a key parameter to monitor the environment in terms of health and leisure benefits. In a possible scenario, wearables and recharge stations could supply information about a distributed monitoring system of air quality. The availability of low-power, smart, low-cost, compact embedded systems, such as Arduino Nicla Sense ME, based on BME688 by Bosch, Reutlingen, Germany, and powered by suitable software tools, can provide the hardware to be easily integrated into wearables as well as in solar-powered EVSE (Electric Vehicle Supply Equipment) for scooters and e-bikes. In this way, each e-vehicle, bike, or EVSE can contribute to a distributed monitoring network providing real-time information about micro-climate and pollution. This work experimentally investigates the capability of the BME688 environmental sensor to provide useful and detailed information about air quality. Initial experimental results from measurements in non-controlled and controlled environments show that BME688 is suited to detect the human-perceived air quality. CO2 readout can also be significant for other gas (e.g., CO), while IAQ (Index for Air Quality, from 0 to 500) is heavily affected by relative humidity, and its significance below 250 is quite low for an outdoor uncontrolled environment.

Adjusting surface coverage of Pt nanocatalyst decoration for selectivity control in CMOS-integrated SnO2 thin film gas sensors

Smart gas-sensor devices are of crucial importance for emerging consumer electronics and Internet-of-Things (IoT) applications, in particular for indoor and outdoor air quality monitoring (e.g., CO2 levels) or for detecting pollutants harmful for human health. Chemoresistive nanosensors based on metal-oxide semiconductors are among the most promising technologies due to their high sensitivity and suitability for scalable low-cost fabrication of miniaturised devices. However, poor selectivity between different target analytes restrains this technology from broader applicability. This is commonly addressed by chemical functionalisation of the sensor surface via catalytic nanoparticles. Yet, while the latter led to significant advances in gas selectivity, nanocatalyst decoration with precise size and coverage control remains challenging. Here, we present CMOS-integrated gas sensors based on tin oxide (SnO2) films deposited by spray pyrolysis technology, which were functionalised with platinum (Pt) nanocatalysts. We deposited size-selected Pt nanoparticles (narrow size distribution around 3 nm) by magnetron-sputtering inert-gas condensation, a technique which enables straightforward surface coverage control. The resulting impact on SnO2 sensor properties for CO and volatile organic compound (VOC) detection via functionalisation was investigated. We identified an upper threshold for nanoparticle deposition time above which increased surface coverage did not result in further CO or VOC sensitivity enhancement. Most importantly, we demonstrate a method to adjust the selectivity between these target gases by simply adjusting the Pt nanoparticle deposition time. Using a simple computational model for nanocatalyst coverage resulting from random gas-phase deposition, we support our findings and discuss the effects of nanoparticle coalescence as well as inter-particle distances on sensor functionalisation.

A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications

Dust or condensed water present in harsh outdoor or high-humidity human breath samples are one of the key sources that cause false detection in Micro Electro-Mechanical System (MEMS) gas sensors. This paper proposes a novel packaging mechanism for MEMS gas sensors that utilizes a self-anchoring mechanism to embed a hydrophobic polytetrafluoroethylene (PTFE) filter into the upper cover of the gas sensor packaging. This approach is distinct from the current method of external pasting. The proposed packaging mechanism is successfully demonstrated in this study. The test results indicate that the innovative packaging with the PTFE filter reduced the average response value of the sensor to the humidity range of 75~95% RH by 60.6% compared to the packaging without the PTFE filter. Additionally, the packaging passed the High-Accelerated Temperature and Humidity Stress (HAST) reliability test. With a similar sensing mechanism, the proposed packaging embedded with a PTFE filter can be further employed for the application of exhalation-related, such as coronavirus disease 2019 (COVID-19), breath screening.

The coupling of graphene, graphitic carbon nitride and cellulose to fabricate zinc oxide-based sensors and their enhanced activity towards air pollutant nitrogen dioxide

It is desirable but challenging to sense toxic nitrogen dioxide (NO₂) for it has become one of the most prominent air pollutants. Zinc oxide-based gas sensors are known to detect NO₂ gas efficiently, however, the sensing mechanism and involved intermediates structures remain underexplored. In the work, a series of sensitive materials, including zinc oxide (ZnO) and its composites ZnO/X [X = Cel (cellulose), CN (g-C₃N₄) and Gr (graphene)] have been comprehensively examined by density functional theory. It is found that ZnO favors adsorbing NO₂ over ambient O₂, and produces nitrate intermediates; and H₂O is chemically held by zinc oxide, in line with the non-negligible impact of humidity on the sensitivity. Of the formed composites, ZnO/Gr exhibits the best NO₂ gas-sensing performance, which is proved by the calculated thermodynamics and geometrical/electronic structures of reactants, intermediates and products. The interfacial interaction has been elaborated on for composites (ZnO/X) as well as their complexes (ZnO- and ZnO/X-adsorbates). The current study well explains experimental findings and opens up a way to design and unearth novel NO₂ sensing materials.

Room-temperature ammonia gas sensing via Au nanoparticle-decorated TiO2 nanosheets

A high-performance gas sensor operating at room temperature is always favourable since it simplifies the device fabrication and lowers the operating power by eliminating a heater. Herein, we fabricated the ammonia (NH₃) gas sensor by using Au nanoparticle-decorated TiO₂ nanosheets, which were synthesized via two distinct processes: (1) preparation of monolayer TiO₂ nanosheets through flux growth and a subsequent chemical exfoliation and (2) decoration of Au nanoparticles on the TiO₂ nanosheets via hydrothermal method. Based on the morphological, compositional, crystallographic, and surface characteristics of this low-dimensional nano-heterostructured material, its temperature- and concentration-dependent NH₃ gas-sensing properties were investigated. A high response of ~ 2.8 was obtained at room temperature under 20 ppm NH₃ gas concentration by decorating Au nanoparticles onto the surface of TiO₂ nanosheets, which generated oxygen defects and induced spillover effect as well.

Long-Term Operational Stability of Ta/Pt Thin-Film Microheaters: Impact of the Ta Adhesion Layer

Microheaters with long-term stability are crucial for the development of a variety of microelectronic devices operated at high temperatures. Structured Ta/Pt bilayers, in which the Ta sublayer ensures high adhesion of the Pt resistive layer, are widely used to create microheaters. Herein, a comprehensive study of the microstructure of Ta/Pt films using high-resolution transmission electron microscopy with local elemental analysis reveals the twofold nature of Ta after annealing. The main fraction of Ta persists in the form of tantalum oxide between the Pt resistive layer and the alumina substrate. Such a sublayer hampers Pt recrystallization and grain growth in bilayered Ta/Pt films in comparison with pure Pt films. Tantalum is also observed inside the Pt grains as individual Ta nanoparticles, but their volume fraction is only about 2%. Microheaters based on the 10 nm Ta/90 nm Pt bilayers after pre-annealing exhibit long-term stability with low resistance drift at 500 °C (less than 3%/month).

Design and Fabrication of a Novel Poly-Si Microhotplate with Heat Compensation Structure

I Microhotplates are critical devices in various MEMS sensors that could provide appropriate operating temperatures. In this paper, a novel design of poly-Si membrane microhotplates with a heat compensation structure was reported. The main objective of this work was to design and fabricate the poly-Si microhotplate, and the thermal and electrical performance of the microhotplates were also investigated. The poly-Si resistive heater was deposited by LPCVD, and phosphorous doping was applied by in situ doping process to reduce the resistance of poly-Si. In order to obtain a uniform temperature distribution, a series of S-shaped compensation structures were fabricated at the edge of the resistive heater. LPCVD SiNx layers deposited on both sides of poly-Si were used as both the mechanical supporting layer and the electrical isolation layer. The Pt electrode was fabricated on the top of the microhotplate for temperature detection. The area of the heating membrane was 1 mm × 1 mm. Various parameters of the different size devices were simulated and measured, including temperature distribution, power consumption, thermal expansion and response time. The simulation and electrical-thermal measurement results were reported. For microhotplates with a heat compensation structure, the membrane temperature reached 811.7 °C when the applied voltage was 5.5 V at a heating power of 148.3 mW. A 3.8 V DC voltage was applied to measure the temperature distribution; the maximum temperature was 397.6 °C, and the area where the temperature reached 90% covered about 73.8% when the applied voltage was 3.8 V at a heating power of 70.8 mW. The heating response time was 17 ms while the microhotplate was heated to 400 °C from room temperature, and the cooling response time was 32 ms while the device was recovered to room temperature. This microhotplate has many advantages, such as uniform temperature distribution, low power consumption and fast response, which are suitable for MEMS gas sensors, humidity sensors, gas flow sensors, etc.

Challenges and Opportunities of Chemiresistors Based on Microelectromechanical Systems for Chemical Olfaction

Microelectromechanical-system (MEMS)-based semiconductor gas sensors are considered one of the fastest-growing, interdisciplinary high technologies during the post-Moore era. Modern advancements within this arena include wearable electronics, Internet of Things, and artificial brain-inspired intelligence, among other modalities, thus bringing opportunities to drive MEMS-based gas sensors with higher performance, lower costs, and wider applicability. However, the high demand for miniature and micropower sensors with unified processes on a single chip imposes great challenges. This review focuses on recent developments and pitfalls in MEMS-based micro- and nanoscale gas sensors and details future trends. We also cover the background of the topic, seminal efforts, current applications and challenges, and opportunities for next-generation systems.

Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors

In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the gas-sensitive material is deposited or coated on a metallic signal electrode and must be selective and responsive at a specific temperature. The microelectromechanical devices hosting this material must keep it at the correct operating temperature using a micro-hotplate robust to high temperatures. In this study, three hotplate designs were investigated: electrodes arranged on both sides of an AlN substrate, a micro-hotplate buried in an alumina ceramic substrate, and a beam structure formed using laser punching. The last two designs use magnetron-sputtered ultra-thin AlN films to separate the upper Au interdigital electrodes and lower Pt heating resistor in a sandwich-like structure. The temperature distribution is simulated by the Joule heat model, and the third design has better energy consumption performance. This design was fabricated, and the effect of the rough surface of the alumina ceramic on the preparation was addressed. The experimental results show that the micro-hotplate can operate at nearly 700 °C. The micro-hotplate heats to nearly 240 °C in 2.4 s using a power of ~340 mW. This design makes ceramic-based micro-hotplates a more practical alternative to silicon-based micro-hotplates in gas sensors.

Application of the IoT in the Food Supply Chain─From the Perspective of Carbon Mitigation

With the rising demands on supply chain transparency and food security, the rapid outspread of the Internet of Things (IoT) to improve logistical efficiency, and the rising penetration of sensor technology into daily life, the extensive integration of the IoT in the food sector is well anticipated. A perspective on potential life cycle trade-offs in regard to the type of integration is necessary. We conduct life cycle assessment (LCA) integrated with shelf life-food loss (SL-FL) models, showing an overall 5-fold leverage on carbon reduction, which is diet dependent and a function of income. Meat presents the highest leverage, 35 ± 11-times, owing to its high carbon footprint. Two-thirds (65%) of global sensors (1 billion) engaged in monitoring fruits and vegetables can mitigate less than 7% of the total reduced carbon emissions. Despite the expected carbon emission reductions, widespread adoption of the IoT faces multiple challenges such as high costs, difficulties in social acceptance, and regional variability in technological development. Furthermore, changes in the distribution of transportation resources and dealer service models, requirements regarding the accuracy of sensor data analysis, efficient and persistent operation of devices, development of agricultural infrastructure, and farmer education and training have all increased uncertainty. Nonetheless, the research trend in smart sensors toward smaller chips and the potential integration of machine learning or blockchain as further steps make it possible to leverage these advantages to facilitate market penetration. These insights facilitate the future optimization of the application of IoT sensors for sustainability.

Classification of Three Volatiles Using a Single-Type eNose with Detailed Class-Map Visualization

The use of electronic noses (eNoses) as analysis tools are growing in popularity; however, the lack of a comprehensive, visual representation of how the different classes are organized and distributed largely complicates the interpretation of the classification results, thus reducing their practicality. The new contributions of this paper are the assessment of the multivariate classification performance of a custom, low-cost eNose composed of 16 single-type (identical) MOX gas sensors for the classification of three volatiles, along with a proposal to improve the visual interpretation of the classification results by means of generating a detailed 2D class-map representation based on the inverse of the orthogonal linear transformation obtained from a PCA and LDA analysis. The results showed that this single-type eNose implementation was able to perform multivariate classification, while the class-map visualization summarized the learned features and how these features may affect the performance of the classification, simplifying the interpretation and understanding of the eNose results.

Designing oxide chemiresistors for detecting volatile aromatic compounds: recent progresses and future perspectives

Oxide chemiresistors have mostly been used to detect reactive gases such as ethanol, acetone, formaldehyde, nitric dioxide, and carbon monoxide. However, the selective and sensitive detection of volatile aromatic compounds such as benzene, toluene, and xylene, which are extremely toxic and harmful, using oxide chemiresistors remains challenging because of the molecular stability of benzene rings containing chemicals. Moreover, the performance of the sensing materials is insufficient to detect trace concentration levels of volatile aromatic compounds, which lead to harmful effects on human beings. Here, the strategies for designing highly selective and sensitive volatile aromatic compound gas sensors using oxide chemiresistors were suggested and reviewed. Key approaches include the use of thermal activation, design of sensing materials with high catalytic activity, the utilization of catalytic microreactors and bilayer structures with catalytic overlayer, and the pretreatment of analyte gases or post analysis of sensing signals. In addition, future perspectives from the viewpoint of designing sensing materials and sensor structures for high-performance and robust volatile aromatic compounds gas sensors are provided. Finally, we discuss possible applications of the sensors and sensor arrays.

Metal Oxide Chemiresistors: A Structural and Functional Comparison between Nanowires and Nanoparticles

Metal oxide nanowires have become popular materials in gas sensing, and more generally in the field of electronic and optoelectronic devices. This is thanks to their unique structural and morphological features, namely their single-crystalline structure, their nano-sized diameter and their highly anisotropic shape, i.e., a large length-to-diameter aspect ratio. About twenty years have passed since the first publication proposing their suitability for gas sensors, and a rapidly increasing number of papers addressing the understanding and the exploitation of these materials in chemosensing have been published. Considering the remarkable progress achieved so far, the present paper aims at reviewing these results, emphasizing the comparison with state-of-the-art nanoparticle-based materials. The goal is to highlight, wherever possible, how results may be related to the particular features of one or the other morphology, what is effectively unique to nanowires and what can be obtained by both. Transduction, receptor and utility-factor functions, doping, and the addition of inorganic and organic coatings will be discussed on the basis of the structural and morphological features that have stimulated this field of research since its early stage.

Correction Model for Metal Oxide Sensor Drift Caused by Ambient Temperature and Humidity

For decades, Metal oxide (MOX) gas sensors have been commercially available and used in various applications such as the Smart City, gas monitoring, and safety due to advantages such as high sensitivity, a high detection range, fast reaction time, and cost-effectiveness. However, several factors affect the sensing ability of MOX gas sensors. This article presents the results of a study on the cross-sensitivity of MOX gas sensors toward ambient temperature and humidity. A gas sensor array consisting of temperature and humidity sensors and four different MOX gas sensors (MiCS-5524, GM-402B, GM-502B, and MiCS-6814) was developed. The sensors were subjected to various relative gas concentrations, temperatures (from 16 °C to 30 °C), and humidity levels (from 75% to 45%), representing a typical indoor environment. The results proved that the gas sensor responses were significantly affected by the temperature and humidity. The increased temperature and humidity levels led to a decreased response for all sensors, except for MiCS-6814, which showed the opposite response. Hence, this work proposed regression models for each sensor, which can correct the gas sensor response drift caused by the ambient temperature and humidity variations. The models were validated, and the standard deviations of the corrected sensor response were found to be 1.66 kΩ, 13.17 kΩ, 29.67 kΩ, and 0.12 kΩ, respectively. These values are much smaller compared to the raw sensor response (i.e., 18.22, 24.33 kΩ, 95.18 kΩ, and 2.99 kΩ), indicating that the model provided a more stable output and minimised the drift. Overall, the results also proved that the models can be used for MOX gas sensors employed in the training process, as well as for other sets of gas sensors.

Assessing over Time Performance of an eNose Composed of 16 Single-Type MOX Gas Sensors Applied to Classify Two Volatiles

This paper assesses the over time performance of a custom electronic nose (eNose) composed of an array of commercial low-cost and single-type miniature metal-oxide (MOX) semiconductor gas sensors. The eNose uses 16 BME680 versatile sensor devices, each including an embedded non-selective MOX gas sensor that was originally proposed to measure the total volatile organic compounds (TVOC) in the air. This custom eNose has been used previously to detect ethanol and acetone, obtaining initial promising classification results that worsened over time because of sensor drift. The current paper assesses the over time performance of different classification methods applied to process the information gathered from the eNose. The best classification results have been obtained when applying a linear discriminant analysis (LDA) to the normalized conductance of the sensing layer of the 16 MOX gas sensors available in the eNose. The LDA procedure by itself has reduced the influence of drift in the classification performance of this single-type eNose during an evaluation period of three months.

The SnO2/MXene Composite Ethanol Sensor Based on MEMS Platform

In recent years, two-dimensional layered material MXene has attracted extensive attention in the fields of sensors due to its large specific surface area and rich active sites. So, we employed multilayer Ti3C2TX and SnO2 microspheres to prepare SnO2/MXene composites for enhancing gas-sensing properties of pristine SnO2. The composite was brushed on a microelectromechanical system (MEMS) platform to make resistance-type gas sensors with low power consumption. The gas-sensing results show that the SnO2/MXene sensor with the best composite ratio (SnO2: MXene mass ratio is 5:1, named SM-5) greatly improves gas sensitivity of SnO2 sensor, among which the sensitivity to ethanol gas is the highest. At the same time, the composite also speeds up the response recovery speed of the sensor. When the SM-5 sensor worked at its optimal temperature 230 °C, its response value to 10 ppm ethanol reaches 5.0, which is twice that of the pristine SnO2 sensor. Its response and recovery time are only 14 s and 26 s, respectively. The sensing mechanism of the composite is discussed according to the classical the space charge or depletion layer model. It is concluded that the Schottky barrier of composites and the metal properties of Ti3C2Tx are responsible for improvement of the gas-sensing properties of the composite.

Visible Light Driven Ultrasensitive and Selective NO2 Detection in Tin Oxide Nanoparticles with Sulfur Doping Assisted by l-Cysteine

In the pandemic era, the development of high-performance indoor air quality monitoring sensors has become more critical than ever. NO₂ is one of the most toxic gases in daily life, which induces severe respiratory diseases. Thus, the real-time monitoring of low concentrations of NO₂ is highly required. Herein, a visible light-driven ultrasensitive and selective chemoresistive NO₂ sensor is presented based on sulfur-doped SnO₂ nanoparticles. Sulfur-doped SnO₂ nanoparticles are synthesized by incorporating l-cysteine as a sulfur doping agent, which also increases the surface area. The cationic and anionic doping of sulfur induces the formation of intermediate states in the band gap, highly contributing to the substantial enhancement of gas sensing performance under visible light illumination. Extraordinary gas sensing performances such as the gas response of 418 to 5 ppm of NO₂ and a detection limit of 0.9 ppt are achieved under blue light illumination. Even under red light illumination, sulfur-doped SnO₂ nanoparticles exhibit stable gas sensing. The endurance to humidity and long-term stability of the sensor are outstanding, which amplify the capability as an indoor air quality monitoring sensor. Overall, this study suggests an innovative strategy for developing the next generation of electronic noses.

Aging Behavior and Heat Treatment for Room-Temperature CO-Sensitive Pd-SnO2 Composite Nanoceramics

A high long-term stability is crucial for room-temperature gas-sensitive metal oxide semiconductors (MOSs) to find practical applications. A series of Pd-SnO₂ mixtures with 2, 5, and 10 wt% Pd separately were prepared from SnO₂ and Pd powders. Through pressing and sintering, Pd-SnO₂ composite nanoceramics have been successfully prepared from the mixtures, which show responses of 50, 100, and 60 to 0.04% CO-20% O₂-N₂ at room temperature for samples of 2, 5, and 10 wt% Pd, respectively. The room-temperature CO-sensing characteristics were degraded obviously after dozens of days’ aging for all samples. For samples of 5 wt% Pd, the response to CO was decreased by a factor of 4 after 20 days of aging. Fortunately, some rather mild heat treatments will quite effectively reactivate those aged samples. Heat treatment at 150 °C for 15 min in air tripled the response to CO for a 20 days-aged sample of 5 wt% Pd. It is proposed that the deposition of impurity gases in air on Pd in Pd-SnO₂ composite nanoceramics has resulted in the observed aging, while their desorption from Pd through mild heat treatments leads to the reactivation. More studies on aging and reactivation of room-temperature gas sensitive MOSs should be conducted to achieve high long-term stability for room-temperature MOS gas sensors.

Classification of Two Volatiles Using an eNose Composed by an Array of 16 Single-Type Miniature Micro-Machined Metal-Oxide Gas Sensors

The artificial replication of an olfactory system is currently an open problem. The development of a portable and low-cost artificial olfactory system, also called electronic nose or eNose, is usually based on the use of an array of different gas sensors types, sensitive to different target gases. Low-cost Metal-Oxide semiconductor (MOX) gas sensors are widely used in such arrays. MOX sensors are based on a thin layer of silicon oxide with embedded heaters that can operate at different temperature set points, which usually have the disadvantages of different volatile sensitivity in each individual sensor unit and also different crossed sensitivity to different volatiles (unspecificity). This paper presents and eNose composed by an array of 16 low-cost BME680 digital miniature sensors embedding a miniature MOX gas sensor proposed to unspecifically evaluate air quality. In this paper, the inherent variability and unspecificity that must be expected from the 16 embedded MOX gas sensors, combined with signal processing, are exploited to classify two target volatiles: ethanol and acetone. The proposed eNose reads the resistance of the sensing layer of the 16 embedded MOX gas sensors, applies PCA for dimensional reduction and k-NN for classification. The validation results have shown an instantaneous classification success higher than 94% two days after the calibration and higher than 70% two weeks after, so the majority classification of a sequence of measures has been always successful in laboratory conditions. These first validation results and the low-power consumption of the eNose (0.9 W) enables its future improvement and its use in portable and battery-operated applications.

Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors

The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping.

Nanofibers of Polyaniline and Cu(II)-l-Aspartic Acid for a Room-Temperature Carbon Monoxide Gas Sensor

In the present study, the carbon monoxide (CO) sensing property of Cu(II)-l-aspartic acid nanofibers/polyaniline (PANI) nanofibers composite was investigated at room temperature. The nanofiber composite was formed through the ultrasound mixing of emeraldine salt PANI nanofibers and Cu(II)-l-aspartic acid nanofibers, which were synthesized by using a polymerization process and simple self-assembly method, respectively. The nanofibers composite demonstrated a branched structure in which the Cu(II)-l-aspartic acid nanofiber framework is similar to the trunk of a tree and the polyaniline nanofibers is like its branches. It seems that this special structure and one-dimension/one-dimension interface are suitable for gas adsorption and sensing. The performance of the prepared sensor toward CO gas was investigated at room temperature in a wide concentration range (200-8000 ppm). The experimental results indicate that the incorporation of amino acid-based copper metal-biomolecule framework nanofibers to PANI nanofibers enhances the response value (12.41% to 4000 ppm), yielding good selectivity and acceptable response and recovery characteristics (220 s/240 s) at room temperature. The detection limit of Cu(II)-l-aspartic acid nanofibers/PANI nanofibers sensor for carbon monoxide is obtained at 120 ppm.

Development of a dedicated instrumentation for electrical and thermal characterization of chemiresistive gas sensors

This work presents the design and validation of a measuring instrumentation for an easy, complete, and tunable characterization of chemiresistive gas sensors based on metal-oxide semiconductors. The equipment, described in depth both as hardware and as software, was designed to monitor the electrical behavior of gas sensors in controlled thermodynamic conditions. The main goal of this setup is to synchronize the electrical characterization with different measuring conditions, i.e., operating temperature, relative humidity, and gas target concentration. This operation allows us to automate various measurement protocols, otherwise impossible to obtain manually. In particular, this instrumentation permits to correlate the response of a chemiresistive gas sensor to the applied voltage, to its working temperature, and to the gas concentration, automating the acquisition of the current-voltage characteristic and the current-temperature characteristic (Arrhenius plot) of sensing films. The experimental setup was validated by reporting the electrical characterization of a standard metal-oxide-based gas sensing material, such as SnO₂, working under different thermodynamic conditions.

Fabrication of a Robust In2O3 Nanolines FET Device as a Biosensor Platform

Field-effect transistors (FETs) are attractive biosensor platforms for rapid and accurate detection of various analytes through surface immobilization of specific bio-receptors. Since it is difficult to maintain the electrical stability of semiconductors of sensing channel under physiological conditions for long periods, passivation by a stable metal oxide dielectric layer, such as Al₂O₃ or HfO₂, is currently used as a common method to prevent damage. However, protecting the sensing channel by passivation has the disadvantage that the distance between the target and the conductive channel increases, and the sensing signal will be degraded by Debye shielding. Even though many efforts use semiconductor materials directly as channels for biosensors, the electrical stability of semiconductors in the physiological environments has rarely been studied. In this work, an In₂O₃ nanolines FET device with high robustness in artificial physiological solution of phosphate buffered saline (PBS) was fabricated and used as a platform for biosensors without employing passivation on the sensing channel. The FET device demonstrated reproducibility with an average threshold voltage (V_TH) of 5.235 V and a standard deviation (SD) of 0.382 V. We tested the robustness of the In₂O₃ nanolines FET device in PBS solution and found that the device had a long-term electrical stability in PBS with more than 9 days’ exposure. Finally, we demonstrated its applicability as a biosensor platform by testing the biosensing performance towards miR-21 targets after immobilizing the phosphonic acid terminated DNA probes. Since the surface immobilization of multiple bioreceptors is feasible, we demonstrate that the robust In₂O₃ FET device can be an excellent biosensor platform for biosensors.

Graphene oxide/graphene hybrid film with ultrahigh ammonia sensing performance

In this paper, a novel ammonia detection hybrid film is proposed based on a graphene oxide (GO)/graphene stack, which shows excellent sensing characteristics at room temperature. It is attributed to the cooperation of GO layer serving as molecular capture layer while graphene serving as conductive layer. GO layer is obtained on chemical vapor deposited graphene film by a simple drop-casting method. The prepared GO/graphene hybrid film is directly transferred to the target substrate without any additional transfer vehicle to reduce possible contamination. The success of the transfer depends on the mechanical strength of GO layer. The thickness of GO layer can scale down to 55 nm while sustaining the transfer process. The best ammonia gas sensing performance is obtained at about 275 nm GO layer thickness and the ammonia detection limit is calculated to be 1.5 ppb. In conclusion, the ammonia gas sensing performance of GO/graphene hybrid film can be significantly improved through GO layer thickness optimization.

Gas Sensors Based on Copper Oxide Nanomaterials: A Review

Metal oxide semiconductors have found widespread applications in chemical sensors based on electrical transduction principles, in particular for the detection of a large variety of gaseous analytes, including environmental pollutants and hazardous gases. This review recapitulates the progress in copper oxide nanomaterial-based devices, while discussing decisive factors influencing gas sensing properties and performance. Literature reports on the highly sensitive detection of several target molecules, including volatile organic compounds, hydrogen sulfide, carbon monoxide, carbon dioxide, hydrogen and nitrogen oxide from parts-per-million down to parts-per-billion concentrations are compared. Physico-chemical mechanisms for sensing and transduction are summarized and prospects for future developments are outlined.

Sensitive and Low-Power Metal Oxide Gas Sensors with a Low-Cost Microelectromechanical Heater

In this study, a simple and cost-effective metal oxide semiconductor (MOS) gas sensor, which can be fabricated utilizing only two photolithography steps, was designed and developed through the planar microelectromechanical systems (MEMS) technique. Ball-milled porous tin dioxide nanoparticle clusters were precisely drop-coated onto the integrated microheater region and subsequently characterized using a helium ion microscope (HIM). The spatial suspension of the silicon nitride platform over the silicon substrate provides superior thermal isolation and thus dramatically reduces the power consumption of the microheater. The well-designed microheater exhibits excellent thermal uniformity, which was verified both computationally and experimentally. The as-fabricated sensors were tested for ethanol gas sensing at various operating temperatures with different concentrations. At the optimal work temperature of ∼400 °C, our gas sensors demonstrated a respectable sensitivity to 1 ppm ethanol, which is the lower detection limit to most commercial products. Moreover, stable performance over repetitive testing was observed. The innovative sensor developed here is a promising candidate for portable gas sensing devices and various other commercial applications.

Sensors for indoor air quality monitoring and assessment through Internet of Things: a systematic review

The growing populations around the world are closely associated with rising levels of air pollution. The impact is not restricted to outdoor areas. Moreover, the health of building occupants is also deteriorating due to poor indoor air quality. As per the World Health Organization, indoor air pollution is a leading cause of 1.6 million premature deaths annually. Therefore, numerous companies have started the development of low-cost sensors to monitor indoor air pollution with the Internet of Things-based applications. However, due to the close association of air pollution levels to the mortality and morbidity rates, communities face several limitations while selecting sensors to address this public health challenge. The main contribution of this systematic review is to present a qualitative and quantitative evaluation of low-cost sensors while providing deep insights into the selection criteria for adequate monitoring. The authors in this paper discussed studies published after the year 2015, and it includes an analysis of papers published in the English language only. Moreover, this study highlights crucial research questions, states answers, and provides recommendations for future research studies. The outcomes of this paper will be useful for students, researchers, and industry members concerning the upcoming research and manufacturing activities. The results show that 28 studies (70%) include indoor thermal comfort assessment, 26 (65%) and 12 (30%) studies include CO₂ and CO sensors, respectively. In total, 32 (45.7%) out of 71 sensors (whose prices are available) discussed in this study are available in a price below the US $20 over online marketplaces. Furthermore, the authors conclude that 77.5% of the analyzed literature does not include calibration details, and the accuracy specification is missing for 39.4% sensors.

Recent advances in energy-saving chemiresistive gas sensors: A review

With the tremendous advances in technology, gas-sensing devices are being popularly used in many distinct areas, including indoor environments, industries, aviation, and detectors for various toxic domestic gases and vapors. Even though the most popular type of gas sensor, namely, resistive-based gas sensors, have many advantages over other types of gas sensors, their high working temperatures lead to high energy consumption, thereby limiting their practical applications, especially in mobile and portable devices. As possible ways to deal with the high-power consumption of resistance-based sensors, different strategies such as self-heating, MEMS technology, and room-temperature operation using especial morphologies, have been introduced in recent years. In this review, we discuss different types of energy-saving chemisresitive gas sensors including self-heated gas sensors, MEMS based gas sensors, room temperature operated flexible/wearable sensor and their application in the fields of environmental monitoring. At the end, the review will be concluded by providing a summary, challenges, recent trends, and future perspectives.

Semiconductor Gas Sensors: Materials, Technology, Design, and Application

This paper presents an overview of semiconductor materials used in gas sensors, their technology, design, and application. Semiconductor materials include metal oxides, conducting polymers, carbon nanotubes, and 2D materials. Metal oxides are most often the first choice due to their ease of fabrication, low cost, high sensitivity, and stability. Some of their disadvantages are low selectivity and high operating temperature. Conducting polymers have the advantage of a low operating temperature and can detect many organic vapors. They are flexible but affected by humidity. Carbon nanotubes are chemically and mechanically stable and are sensitive towards NO and NH3, but need dopants or modifications to sense other gases. Graphene, transition metal chalcogenides, boron nitride, transition metal carbides/nitrides, metal organic frameworks, and metal oxide nanosheets as 2D materials represent gas-sensing materials of the future, especially in medical devices, such as breath sensing. This overview covers the most used semiconducting materials in gas sensing, their synthesis methods and morphology, especially oxide nanostructures, heterostructures, and 2D materials, as well as sensor technology and design, application in advance electronic circuits and systems, and research challenges from the perspective of emerging technologies.

A High-Efficiency Driver Circuit for a Gas-Sensor Microheater Based on a Switch-Mode DC-to-DC Converter

Low power consumption is one of the critical factors for successful Internet of Things (IoT) applications. In such applications, gas sensors have become a main source of power consumption because energy conversion efficiency of the microheater is relative over a wide range of operating temperatures. To improve the energy-conversion efficiency of gas-sensor microheaters, this paper proposes integrated switch-mode DC-to-DC power converter technology which we compare with traditional driving methods such as pulse-width modulation and the linear mode. The results indicate that energy conversion efficiency with this proposed method remains over 90% from 150 °C to 400 °C when using a 3.0, 4.2 and 5.0 V power supply. Energy-conversion efficiency increases by 1–74% compared with results obtained using the traditional driving methods, and the sensing film still detects alcohol and toluene at 200 °C and 280 °C, respectively, with high energy conversion efficiency. These results show that the proposed method is useful and should be further developed to drive gas-sensor microheaters, and then integrated into the circuits of the complementary metal-oxide-semiconductor micro electro mechanical systems (CMOS-MEMS).

Indoor Air Quality Monitoring Systems Based on Internet of Things: A Systematic Review

Indoor air quality has been a matter of concern for the international scientific community. Public health experts, environmental governances, and industry experts are working to improve the overall health, comfort, and well-being of building occupants. Repeated exposure to pollutants in indoor environments is reported as one of the potential causes of several chronic health problems such as lung cancer, cardiovascular disease, and respiratory infections. Moreover, smart cities projects are promoting the use of real-time monitoring systems to detect unfavorable scenarios for enhanced living environments. The main objective of this work is to present a systematic review of the current state of the art on indoor air quality monitoring systems based on the Internet of Things. The document highlights design aspects for monitoring systems, including sensor types, microcontrollers, architecture, and connectivity along with implementation issues of the studies published in the previous five years (2015-2020). The main contribution of this paper is to present the synthesis of existing research, knowledge gaps, associated challenges, and future recommendations. The results show that 70%, 65%, and 27.5% of studies focused on monitoring thermal comfort parameters, CO₂, and PM levels, respectively. Additionally, there are 37.5% and 35% of systems based on Arduino and Raspberry Pi controllers. Only 22.5% of studies followed the calibration approach before system implementation, and 72.5% of systems claim energy efficiency.

Indoor Air Quality Monitoring Systems Based on Internet of Things: A Systematic Review

Indoor air quality has been a matter of concern for the international scientific community. Public health experts, environmental governances, and industry experts are working to improve the overall health, comfort, and well-being of building occupants. Repeated exposure to pollutants in indoor environments is reported as one of the potential causes of several chronic health problems such as lung cancer, cardiovascular disease, and respiratory infections. Moreover, smart cities projects are promoting the use of real-time monitoring systems to detect unfavorable scenarios for enhanced living environments. The main objective of this work is to present a systematic review of the current state of the art on indoor air quality monitoring systems based on the Internet of Things. The document highlights design aspects for monitoring systems, including sensor types, microcontrollers, architecture, and connectivity along with implementation issues of the studies published in the previous five years (2015-2020). The main contribution of this paper is to present the synthesis of existing research, knowledge gaps, associated challenges, and future recommendations. The results show that 70%, 65%, and 27.5% of studies focused on monitoring thermal comfort parameters, CO2, and PM levels, respectively. Additionally, there are 37.5% and 35% of systems based on Arduino and Raspberry Pi controllers. Only 22.5% of studies followed the calibration approach before system implementation, and 72.5% of systems claim energy efficiency.

The Fabrication of Micro Beam from Photopolymer by Digital Light Processing 3D Printing Technology

3D printing has lately received considerable critical attention for the fast fabrication of 3D structures to be utilized in various industrial applications. This study aimed to fabricate a micro beam with digital light processing (DLP) based 3D printing technology. Compound technology and essential coefficients of the 3D printing operation were applied. To observe the success of the DLP method, it was compared with another fabrication method, called projection micro-stereolithography (PμSL). Evaluation experiments showed that the 3D printer could print materials with smaller than 86.7 µm dimension properties. The micro beam that moves in one direction (y-axis) was designed using the determined criteria. Though the same design was used for the DLP and PμSL methods, the supporting structures were not manufactured with PμSL. The micro beam was fabricated by removing the supports from the original design in PμSL. Though 3 μm diameter supports could be produced with the DLP, it was not possible to fabricate them with PμSL. Besides, DLP was found to be better than PμSL for the fabrication of complex, non-symmetric support structures. The presented results in this study demonstrate the efficiency of 3D printing technology and the simplicity of manufacturing a micro beam using the DLP method with speed and high sensitivity.

Year 2020: A Snapshot of the Last Progress in Flexible Printed Gas Sensors

A review of recent advances in flexible printed gas sensors is presented. During the last years, flexible electronics has started to offer new opportunities in terms of sensors features and their possible application fields. The advent of this technology has made sensors low-cost, thin, with a large sensing area, lightweight, wearable, flexible, and transparent. Such new characteristics have led to the development of new gas sensor devices. The paper makes some statistical remarks about the research and market of the sensors and makes a shot of the printing technologies, the flexible organic substrates, the functional materials, and the target gases related to the specific application areas. The conclusion is a short notice on perspectives in the field.

Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS-MEMS Technique

This study describes the fabrication of an ammonia gas sensor (AGS) using a complementary metal oxide semiconductor (CMOS)–microelectromechanical system (MEMS) technique. The structure of the AGS features interdigitated electrodes (IDEs) and a sensing material on a silicon substrate. The IDEs are the stacked aluminum layers that are made using the CMOS process. The sensing material; polypyrrole/reduced graphene oxide (PPy/RGO), is synthesized using the oxidation–reduction method; and the material is characterized using an electron spectroscope for chemical analysis (ESCA), a scanning electron microscope (SEM), and high-resolution X-ray diffraction (XRD). After the CMOS process; the AGS needs post-processing to etch an oxide layer and to deposit the sensing material. The resistance of the AGS changes when it is exposed to ammonia. A non-inverting amplifier circuit converts the resistance of the AGS into a voltage signal. The AGS operates at room temperature. Experiments show that the AGS response is 4.5% at a concentration of 1 ppm NH₃; and it exhibits good repeatability. The lowest concentration that the AGS can detect is 0.1 ppm NH₃

Development of a Compact, IoT-Enabled Electronic Nose for Breath Analysis

In this paper, we report on an in-house developed electronic nose (E-nose) for use with breath analysis. The unit consists of an array of 10 micro-electro-mechanical systems (MEMS) metal oxide (MOX) gas sensors produced by seven manufacturers. Breath sampling of end-tidal breath is achieved using a heated sample tube, capable of monitoring sampling-related parameters, such as carbon dioxide (CO2), humidity, and temperature. A simple mobile app was developed to receive real-time data from the device, using Wi-Fi communication. The system has been tested using chemical standards and exhaled breath samples from healthy volunteers, before and after taking a peppermint capsule. Results from chemical testing indicate that we can separate chemical standards (acetone, isopropanol and 1-propanol) and different concentrations of isobutylene. The analysis of exhaled breath samples demonstrate that we can distinguish between pre- and post-consumption of peppermint capsules; area under the curve (AUC): 0.81, sensitivity: 0.83 (0.59–0.96), specificity: 0.72 (0.47–0.90), p-value: <0.001. The functionality of the developed device has been demonstrated with the testing of chemical standards and a simplified breath study using peppermint capsules. It is our intention to deploy this system in a UK hospital in an upcoming breath research study.

A Micromachined Metal Oxide Composite Dual Gas Sensor System for Principal Component Analysis-Based Multi-Monitoring of Noxious Gas Mixtures

Microelectronic gas-sensor devices were developed for the detection of carbon monoxide (CO), nitrogen dioxides (NO₂), ammonia (NH₃) and formaldehyde (HCHO), and their gas-sensing characteristics in six different binary gas systems were examined using pattern-recognition methods. Four nanosized gas-sensing materials for these target gases, i.e., Pd-SnO₂ for CO, In₂O₃ for NO_X, Ru-WO₃ for NH₃, and SnO₂-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were fabricated using a microsensor platform. Principal component analysis of the experimental data from the microelectromechanical systems gas-sensor arrays under exposure to single gases and their mixtures indicated that identification of each individual gas in the mixture was successful. Additionally, the gas-sensing behavior toward the mixed gas indicated that the traditional adsorption and desorption mechanism of the n-type metal oxide semiconductor (MOS) governs the sensing mechanism of the mixed gas systems.

On the Use of MOFs and ALD Layers as Nanomembranes for the Enhancement of Gas Sensors Selectivity

Improving the selectivity of gas sensors is crucial for their further development. One effective route to enhance this key property of sensors is the use of selective nanomembrane materials. This work aims to present how metal-organic frameworks (MOFs) and thin films prepared by atomic layer deposition (ALD) can be applied as nanomembranes to separate different gases, and hence improve the selectivity of gas sensing devices. First, the fundamentals of the mechanisms and configuration of gas sensors will be given. A selected list of studies will then be presented to illustrate how MOFs and ALD materials can be implemented as nanomembranes and how they can be implemented to improve the operational performance of gas sensing devices. This review comprehensively shows the benefits of these novel selective nanomaterials and opens prospects for the sensing community.

Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices

Micro and nanoelectromechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within integrated circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors [...].

Real-Time Thermal Modulation of High Bandwidth MOX Gas Sensors for Mobile Robot Applications

A new signal processing technique has been developed for resistive metal oxide (MOX) gas sensors to enable high-bandwidth measurements and enhanced selectivity at PPM levels (<5 PPM VOCs). An embedded micro-heater is thermally pulsed from a temperature of 225 to 350 °C, which enables the chemical reaction kinetics of the sensing film to be extracted using a fast Fourier transform. Signal processing is performed in real-time using a low-cost microcontroller integrated into a sensor module. Three sensors, coated with SnO₂, WO₃ and NiO respectively, were operated and processed at the same time. This approach enables the removal of long-term baseline drift and is more resilient to changes in ambient temperature. It also greatly reduced the measurement time from ~10 s to 2 s or less. Bench-top experimental results are presented for 0 to 200 ppm of acetone, and 0 ppm to 500 ppm of ethanol. Our results demonstrate our sensor system can be used on a mobile robot for real-time gas sensing.