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Skopinski L, Ernst P, Herder M, Kozubek R, Madauß L, Sleziona S, Maas A, Königstein N, Lebius H, Wucher A, Schleberger M. Time-of-flight mass spectrometry of particle emission during irradiation with slow, highly charged ions. Rev Sci Instrum 2021; 92:023909. [PMID: 33648083 DOI: 10.1063/5.0025812] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/18/2020] [Accepted: 01/29/2021] [Indexed: 06/12/2023]
Abstract
We describe a setup for the analysis of secondary ions and neutrals emitted from solid surfaces and two-dimensional materials during irradiation with highly charged ions. The ultrahigh vacuum setup consists of an electron beam ion source to produce bunches of ions with various charge states q (e.g., Xe1+-Xe46+) and thus potential energies, a deceleration/acceleration section to tune the kinetic energy of the ions in the range of 5 keV to 20 × q keV, a sample stage for laser-cleaning and positioning of freestanding as well as supported samples, a pulsed excimer laser for post-ionization of sputtered neutrals, and a reflectron type time-of-flight mass spectrometer, enabling us to analyze mass and velocity distributions of the emitted particles. With our setup, contributions from potential and kinetic energy deposition can be studied independently of each other. Charge dependent experiments conducted at a constant kinetic energy show a clear threshold for the emission of secondary ions from SrTiO3. Data taken with the same projectile charge state, but at a different kinetic energy, reveal a difference in the ratio of emitted particles from MoS2. In addition, first results are presented, demonstrating how velocity distributions can be measured with the new setup.
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Affiliation(s)
- L Skopinski
- Fakultät für Physik and CENIDE, Universität Duisburg-Essen, 47057 Duisburg, Germany
| | - P Ernst
- Fakultät für Physik and CENIDE, Universität Duisburg-Essen, 47057 Duisburg, Germany
| | - M Herder
- Fakultät für Physik and CENIDE, Universität Duisburg-Essen, 47057 Duisburg, Germany
| | - R Kozubek
- Fakultät für Physik and CENIDE, Universität Duisburg-Essen, 47057 Duisburg, Germany
| | - L Madauß
- Fakultät für Physik and CENIDE, Universität Duisburg-Essen, 47057 Duisburg, Germany
| | - S Sleziona
- Fakultät für Physik and CENIDE, Universität Duisburg-Essen, 47057 Duisburg, Germany
| | - A Maas
- Fakultät für Physik and CENIDE, Universität Duisburg-Essen, 47057 Duisburg, Germany
| | - N Königstein
- Fakultät für Physik and CENIDE, Universität Duisburg-Essen, 47057 Duisburg, Germany
| | - H Lebius
- Normandie Univ., ENSICAEN, UNICAEN, CEA, CNRS, CIMAP, 14000 Caen, France
| | - A Wucher
- Fakultät für Physik and CENIDE, Universität Duisburg-Essen, 47057 Duisburg, Germany
| | - M Schleberger
- Fakultät für Physik and CENIDE, Universität Duisburg-Essen, 47057 Duisburg, Germany
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Rosłoń IE, Dolleman RJ, Licona H, Lee M, Šiškins M, Lebius H, Madauß L, Schleberger M, Alijani F, van der Zant HSJ, Steeneken PG. High-frequency gas effusion through nanopores in suspended graphene. Nat Commun 2020; 11:6025. [PMID: 33247123 PMCID: PMC7695699 DOI: 10.1038/s41467-020-19893-5] [Citation(s) in RCA: 15] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/04/2020] [Accepted: 10/29/2020] [Indexed: 12/02/2022] Open
Abstract
Porous, atomically thin graphene membranes have interesting properties for filtration and sieving applications. Here, graphene membranes are used to pump gases through nanopores using optothermal forces, enabling the study of gas flow through nanopores at frequencies above 100 kHz. At these frequencies, the motion of graphene is closely linked to the dynamic gas flow through the nanopore and can thus be used to study gas permeation at the nanoscale. By monitoring the time delay between the actuation force and the membrane mechanical motion, the permeation time-constants of various gases through pores with diameters from 10–400 nm are shown to be significantly different. Thus, a method is presented for differentiating gases based on their molecular mass and for studying gas flow mechanisms. The presented microscopic effusion-based gas sensing methodology provides a nanomechanical alternative for large-scale mass-spectrometry and optical spectrometry based gas characterisation methods. Atomically thin porous graphene is promising for filtration and sieving applications. Here the authors, using a laser-actuated micro-drum device of bilayer graphene with controlled number of nanopores, and measuring the permeation rate of different gases, show that it can also be used for permeation-based sensing.
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Affiliation(s)
- I E Rosłoń
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands. .,Department of Precision and Microsystem Engineering, Faculty 3mE, Delft University of Technology, Mekelweg 2, Delft, 2628 CD, The Netherlands.
| | - R J Dolleman
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands.,Second Institute of Physics, RWTH Aachen University, Aachen, 52074, Germany
| | - H Licona
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - M Lee
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - M Šiškins
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - H Lebius
- CIMAP/GANIL, CEA-CNRS-ENSICAEN-UCN, blvd Henri Becquerel, Caen, F-14070, France
| | - L Madauß
- Faculty of Physics and CENIDE, Universität Duisburg-Essen, Duisburg, 47057, Germany
| | - M Schleberger
- Faculty of Physics and CENIDE, Universität Duisburg-Essen, Duisburg, 47057, Germany
| | - F Alijani
- Department of Precision and Microsystem Engineering, Faculty 3mE, Delft University of Technology, Mekelweg 2, Delft, 2628 CD, The Netherlands
| | - H S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - P G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands. .,Department of Precision and Microsystem Engineering, Faculty 3mE, Delft University of Technology, Mekelweg 2, Delft, 2628 CD, The Netherlands.
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Guillous S, Bourin C, Ban D'Etat B, Benyagoub A, Cassimi A, Feierstein C, Gardés E, Giglio E, Girard S, Grygiel C, Houel A, Lebius H, Méry A, Monnet I, Ramillon JM, Rangama J, Ropars F, Verzeroli E, Viteau M, Delobbe A. A new setup for localized implantation and live-characterization of keV energy multiply charged ions at the nanoscale. Rev Sci Instrum 2016; 87:113901. [PMID: 27910696 DOI: 10.1063/1.4966675] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
An innovative experimental setup, PELIICAEN, allowing the modification of materials and the study of the effects induced by multiply charged ion beams at the nanoscale is presented. This ultra-high vacuum (below 5 × 10-10 mbar) apparatus is equipped with a focused ion beam column using multiply charged ions and a scanning electron microscope developed by Orsay Physics, as well as a scanning probe microscope. The dual beam approach coupled to the scanning probe microscope achieves nanometer scale in situ topological analysis of the surface modifications induced by the ion beams. Preliminary results using the different on-line characterization techniques to study the formation of nano-hillocks on silicon and mica substrates are presented to illustrate the performances of the setup.
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Affiliation(s)
- S Guillous
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - C Bourin
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - B Ban D'Etat
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - A Benyagoub
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - A Cassimi
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - C Feierstein
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - E Gardés
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - E Giglio
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - S Girard
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - C Grygiel
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - A Houel
- Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France
| | - H Lebius
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - A Méry
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - I Monnet
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - J-M Ramillon
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - J Rangama
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - F Ropars
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - E Verzeroli
- Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France
| | - M Viteau
- Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France
| | - A Delobbe
- Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France
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4
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Meinerzhagen F, Breuer L, Bukowska H, Bender M, Severin D, Herder M, Lebius H, Schleberger M, Wucher A. A new setup for the investigation of swift heavy ion induced particle emission and surface modifications. Rev Sci Instrum 2016; 87:013903. [PMID: 26827329 DOI: 10.1063/1.4939899] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
The irradiation with fast ions with kinetic energies of >10 MeV leads to the deposition of a high amount of energy along their trajectory (up to several ten keV/nm). The energy is mainly transferred to the electronic subsystem and induces different secondary processes of excitations, which result in significant material modifications. A new setup to study these ion induced effects on surfaces will be described in this paper. The setup combines a variable irradiation chamber with different techniques of surface characterizations like scanning probe microscopy, time-of-flight secondary ion, and neutral mass spectrometry, as well as low energy electron diffraction under ultra high vacuum conditions, and is mounted at a beamline of the universal linear accelerator (UNILAC) of the GSI facility in Darmstadt, Germany. Here, samples can be irradiated with high-energy ions with a total kinetic energy up to several GeVs under different angles of incidence. Our setup enables the preparation and in situ analysis of different types of sample systems ranging from metals to insulators. Time-of-flight secondary ion mass spectrometry enables us to study the chemical composition of the surface, while scanning probe microscopy allows a detailed view into the local electrical and morphological conditions of the sample surface down to atomic scales. With the new setup, particle emission during irradiation as well as persistent modifications of the surface after irradiation can thus be studied. We present first data obtained with the new setup, including a novel measuring protocol for time-of-flight mass spectrometry with the GSI UNILAC accelerator.
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Affiliation(s)
- F Meinerzhagen
- Fakultät für Physik, Universität Duisburg-Essen and Cenide, 47057 Duisburg, Germany
| | - L Breuer
- Fakultät für Physik, Universität Duisburg-Essen and Cenide, 47057 Duisburg, Germany
| | - H Bukowska
- Fakultät für Physik, Universität Duisburg-Essen and Cenide, 47057 Duisburg, Germany
| | - M Bender
- GSI Helmholtzzentrum für Schwerionenforschung GmbH, 64291 Darmstadt, Germany
| | - D Severin
- GSI Helmholtzzentrum für Schwerionenforschung GmbH, 64291 Darmstadt, Germany
| | - M Herder
- Fakultät für Physik, Universität Duisburg-Essen and Cenide, 47057 Duisburg, Germany
| | - H Lebius
- CIMAP (CEA-CNRS-ENSICAEN-UCN), 14070 Caen Cedex 5, France
| | - M Schleberger
- Fakultät für Physik, Universität Duisburg-Essen and Cenide, 47057 Duisburg, Germany
| | - A Wucher
- Fakultät für Physik, Universität Duisburg-Essen and Cenide, 47057 Duisburg, Germany
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5
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Ochedowski O, Lehtinen O, Kaiser U, Turchanin A, Ban-d'Etat B, Lebius H, Karlušić M, Jakšić M. Nanostructuring graphene by dense electronic excitation. Nanotechnology 2015; 26:465302. [PMID: 26510213 DOI: 10.1088/0957-4484/26/46/465302] [Citation(s) in RCA: 15] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
The ability to manufacture tailored graphene nanostructures is a key factor to fully exploit its enormous technological potential. We have investigated nanostructures created in graphene by swift heavy ion induced folding. For our experiments, single layers of graphene exfoliated on various substrates and freestanding graphene have been irradiated and analyzed by atomic force and high resolution transmission electron microscopy as well as Raman spectroscopy. We show that the dense electronic excitation in the wake of the traversing ion yields characteristic nanostructures each of which may be fabricated by choosing the proper irradiation conditions. These nanostructures include unique morphologies such as closed bilayer edges with a given chirality or nanopores within supported as well as freestanding graphene. The length and orientation of the nanopore, and thus of the associated closed bilayer edge, may be simply controlled by the direction of the incoming ion beam. In freestanding graphene, swift heavy ion irradiation induces extremely small openings, offering the possibility to perforate graphene membranes in a controlled way.
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Affiliation(s)
- O Ochedowski
- Fakultät für Physik and CENIDE, Universität Duisburg-Essen, D-47048 Duisburg, Germany
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6
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Salou P, Lebius H, Benyagoub A, Langlinay T, Lelièvre D, Ban-d'Etat B. An innovative experimental setup for the measurement of sputtering yield induced by keV energy ions. Rev Sci Instrum 2013; 84:095115. [PMID: 24089874 DOI: 10.1063/1.4821973] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/02/2023]
Abstract
An innovative experimental equipment allowing to study the sputtering induced by ion beam irradiation is presented. The sputtered particles are collected on a catcher which is analyzed in situ by Auger electron spectroscopy without breaking the ultra high vacuum (less than 10(-9) mbar), avoiding thus any problem linked to possible contamination. This method allows to measure the angular distribution of sputtering yield. It is now possible to study the sputtering of many elements such as carbon based materials. Preliminary results are presented in the case of highly oriented pyrolytic graphite and tungsten irradiated by an Ar(+) beam at 2.8 keV and 7 keV, respectively.
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Affiliation(s)
- P Salou
- CIMAP (CEA-CNRS-ENSICAEN-UCBN), Boulevard Henri Becquerel, BP 5133, 14070 Caen Cedex 5, France
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7
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Grygiel C, Lebius H, Bouffard S, Quentin A, Ramillon JM, Madi T, Guillous S, Been T, Guinement P, Lelièvre D, Monnet I. Online in situ x-ray diffraction setup for structural modification studies during swift heavy ion irradiation. Rev Sci Instrum 2012; 83:013902. [PMID: 22299965 DOI: 10.1063/1.3680106] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
The high energy density of electronic excitations due to the impact of swift heavy ions can induce structural modifications in materials. We present an x-ray diffractometer called ALIX ("Analyse en Ligne sur IRRSUD par diffraction de rayons X"), which has been set up at the low-energy beamline (IRRadiation SUD - IRRSUD) of the Grand Accélérateur National d'Ions Lourds facility, to allow the study of structural modification kinetics as a function of the ion fluence. The x-ray setup has been modified and optimized to enable irradiation by swift heavy ions simultaneously to x-ray pattern recording. We present the capability of ALIX to perform simultaneous irradiation-diffraction by using energy discrimination between x-rays from diffraction and from ion-target interaction. To illustrate its potential, results of sequential or simultaneous irradiation-diffraction are presented in this article to show radiation effects on the structural properties of ceramics. Phase transition kinetics have been studied during xenon ion irradiation of polycrystalline MgO and SrTiO(3). We have observed that MgO oxide is radiation-resistant to high electronic excitations, contrary to the high sensitivity of SrTiO(3), which exhibits transition from the crystalline to the amorphous state during irradiation. By interpreting the amorphization kinetics of SrTiO(3), defect overlapping models are discussed as well as latent track characteristics. Together with a transmission electron microscopy study, we conclude that a single impact model describes the phase transition mechanism.
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Affiliation(s)
- C Grygiel
- CIMAP, CEA-CNRS-ENSICAEN-UCBN, BP 5133, 14070 Caen Cedex 5, France.
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8
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Duft D, Lebius H, Huber BA, Guet C, Leisner T. Shape oscillations and stability of charged microdroplets. Phys Rev Lett 2002; 89:084503. [PMID: 12190473 DOI: 10.1103/physrevlett.89.084503] [Citation(s) in RCA: 39] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/22/2002] [Indexed: 05/23/2023]
Abstract
Classical Rayleigh theory predicts an instability of a surface charged liquid sphere, when the Coulomb energy E(C) exceeds twice the surface energy E(S). Previously, electrified liquid droplets have been found to disintegrate at a fissility X=E(C)/2E(S) well below one, however. We determine the stability of charged droplets in an electrodynamic levitator by observing the amplitude and phase of their quadrupolar shape oscillations as a function of the fissility. With this novel approach, which does not rely on an independent determination of the charge and surface tension of the droplets, we are able to confirm for the first time the Rayleigh limit of stability at X=1 for micrometer sized droplets of ethylene glycol.
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Affiliation(s)
- D Duft
- Centre Interdisciplinaire de Recherche Ions Lasers - CEA-CNRS-ISMRA, CIRIL, rue Claude Bloch, BP 5133, F-14070 Caen Cedex 5, France
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Chandezon F, Tomita S, Cormier D, Grübling P, Guet C, Lebius H, Pesnelle A, Huber BA. Rayleigh instabilities in multiply charged sodium clusters. Phys Rev Lett 2001; 87:153402. [PMID: 11580697 DOI: 10.1103/physrevlett.87.153402] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/28/2001] [Indexed: 05/23/2023]
Abstract
The stability of multiply charged sodium clusters Na(q+)(n) (q< or =10) produced in collisions between neutral clusters and multiply charged ions A(z+) ( z = 1 to 28) is experimentally investigated. Multiply charged clusters are formed within a large range of temperatures and fissilities. They are identified by means of a high-resolution reflectron-type time-of-flight mass spectrometer (m/deltam approximately 14 000). The maximum fissility of stable clusters is obtained for z = 28 and is X approximately 0.85+/-0.07, slightly below the Rayleigh limit (X = 1). It is mainly limited by the initial cluster temperature (T approximately 100 K).
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Affiliation(s)
- F Chandezon
- Département de Recherche Fondamentale sur la Matière Condensée, CEA-Grenoble, 17, rue des Martyrs, F-38054 Grenoble Cedex 9, France.
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Lebius H, Minniti R, Lim JY, Elston SB. Charge-state dependence of image-charge acceleration of convoy electrons in fast, grazing collisions of carbon ions with a silicon (100) surface. Phys Rev A 1996; 54:4171-4177. [PMID: 9913967 DOI: 10.1103/physreva.54.4171] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/22/2023]
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11
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Bliman S, Suraud MG, Hitz D, Huber BA, Lebius H, Cornille M, Rubensson JE, Nordgren J, Knystautas EJ. Collision spectroscopy of Ar8+ + He at low velocities (v<1 a.u.). Phys Rev A 1992; 46:1321-1332. [PMID: 9908252 DOI: 10.1103/physreva.46.1321] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/22/2023]
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