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Guillous S, Bourin C, Ban D'Etat B, Benyagoub A, Cassimi A, Feierstein C, Gardés E, Giglio E, Girard S, Grygiel C, Houel A, Lebius H, Méry A, Monnet I, Ramillon JM, Rangama J, Ropars F, Verzeroli E, Viteau M, Delobbe A. A new setup for localized implantation and live-characterization of keV energy multiply charged ions at the nanoscale. Rev Sci Instrum 2016; 87:113901. [PMID: 27910696 DOI: 10.1063/1.4966675] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
An innovative experimental setup, PELIICAEN, allowing the modification of materials and the study of the effects induced by multiply charged ion beams at the nanoscale is presented. This ultra-high vacuum (below 5 × 10-10 mbar) apparatus is equipped with a focused ion beam column using multiply charged ions and a scanning electron microscope developed by Orsay Physics, as well as a scanning probe microscope. The dual beam approach coupled to the scanning probe microscope achieves nanometer scale in situ topological analysis of the surface modifications induced by the ion beams. Preliminary results using the different on-line characterization techniques to study the formation of nano-hillocks on silicon and mica substrates are presented to illustrate the performances of the setup.
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Affiliation(s)
- S Guillous
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - C Bourin
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - B Ban D'Etat
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - A Benyagoub
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - A Cassimi
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - C Feierstein
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - E Gardés
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - E Giglio
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - S Girard
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - C Grygiel
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - A Houel
- Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France
| | - H Lebius
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - A Méry
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - I Monnet
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - J-M Ramillon
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - J Rangama
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - F Ropars
- CIMAP (CEA, CNRS, ENSICAEN, UNICAEN, Normandie University), Boulevard Henri Becquerel, BP 5133, Caen 14070 Cedex 5, France
| | - E Verzeroli
- Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France
| | - M Viteau
- Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France
| | - A Delobbe
- Orsay Physics (Tescan-Orsay Holding), 95 Avenue des Monts Auréliens, ZA Saint-Charles F-13710, Fuveau, France
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Viteau M, Reveillard M, Kime L, Rasser B, Sudraud P, Bruneau Y, Khalili G, Pillet P, Comparat D, Guerri I, Fioretti A, Ciampini D, Allegrini M, Fuso F. Ion microscopy based on laser-cooled cesium atoms. Ultramicroscopy 2016; 164:70-7. [PMID: 26876642 DOI: 10.1016/j.ultramic.2015.12.007] [Citation(s) in RCA: 31] [Impact Index Per Article: 3.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/25/2015] [Revised: 12/23/2015] [Accepted: 12/29/2015] [Indexed: 11/20/2022]
Abstract
We demonstrate a prototype of a Focused Ion Beam machine based on the ionization of a laser-cooled cesium beam and adapted for imaging and modifying different surfaces in the few-tens nanometer range. Efficient atomic ionization is obtained by laser promoting ground-state atoms into a target excited Rydberg state, then field-ionizing them in an electric field gradient. The method allows obtaining ion currents up to 130pA. Comparison with the standard direct photo-ionization of the atomic beam shows, in our conditions, a 40-times larger ion yield. Preliminary imaging results at ion energies in the 1-5keV range are obtained with a resolution around 40nm, in the present version of the prototype. Our ion beam is expected to be extremely monochromatic, with an energy spread of the order of the eV, offering great prospects for lithography, imaging and surface analysis.
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Affiliation(s)
- M Viteau
- Orsay Physics, TESCAN Orsay, 95 Avenue des Monts Auréliens - ZA Saint-Charles - 13710 Fuveau, France
| | - M Reveillard
- Orsay Physics, TESCAN Orsay, 95 Avenue des Monts Auréliens - ZA Saint-Charles - 13710 Fuveau, France
| | - L Kime
- Orsay Physics, TESCAN Orsay, 95 Avenue des Monts Auréliens - ZA Saint-Charles - 13710 Fuveau, France
| | - B Rasser
- Orsay Physics, TESCAN Orsay, 95 Avenue des Monts Auréliens - ZA Saint-Charles - 13710 Fuveau, France
| | - P Sudraud
- Orsay Physics, TESCAN Orsay, 95 Avenue des Monts Auréliens - ZA Saint-Charles - 13710 Fuveau, France
| | - Y Bruneau
- Laboratoire Aimé Cotton, CNRS, Université Paris-Sud, ENS Cachan, Bât. 505, 91405 Orsay, France
| | - G Khalili
- Laboratoire Aimé Cotton, CNRS, Université Paris-Sud, ENS Cachan, Bât. 505, 91405 Orsay, France
| | - P Pillet
- Laboratoire Aimé Cotton, CNRS, Université Paris-Sud, ENS Cachan, Bât. 505, 91405 Orsay, France
| | - D Comparat
- Laboratoire Aimé Cotton, CNRS, Université Paris-Sud, ENS Cachan, Bât. 505, 91405 Orsay, France
| | - I Guerri
- Dipartimento di Fisica, Università di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy
| | - A Fioretti
- Istituto Nazionale di Ottica, INO-CNR, U.O.S. "Adriano Gozzini", via Moruzzi 1, 56124 Pisa, Italy; Consorzio Nazionale Interuniversitario per le Scienze Fisiche della Materia, CNISM, Sezione di Pisa, 56127 Pisa, Italy.
| | - D Ciampini
- Dipartimento di Fisica, Università di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy; Istituto Nazionale di Ottica, INO-CNR, U.O.S. "Adriano Gozzini", via Moruzzi 1, 56124 Pisa, Italy; Consorzio Nazionale Interuniversitario per le Scienze Fisiche della Materia, CNISM, Sezione di Pisa, 56127 Pisa, Italy
| | - M Allegrini
- Dipartimento di Fisica, Università di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy; Istituto Nazionale di Ottica, INO-CNR, U.O.S. "Adriano Gozzini", via Moruzzi 1, 56124 Pisa, Italy; Consorzio Nazionale Interuniversitario per le Scienze Fisiche della Materia, CNISM, Sezione di Pisa, 56127 Pisa, Italy
| | - F Fuso
- Dipartimento di Fisica, Università di Pisa, Largo Pontecorvo 3, 56127 Pisa, Italy; Istituto Nazionale di Ottica, INO-CNR, U.O.S. "Adriano Gozzini", via Moruzzi 1, 56124 Pisa, Italy; Consorzio Nazionale Interuniversitario per le Scienze Fisiche della Materia, CNISM, Sezione di Pisa, 56127 Pisa, Italy
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