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Abdul Razak NE, Dee CF, Madhuku M, Ahmad I, Chang EY, Yu HW, Majlis BY, Berhanuddin DD. Role of Boron in Assisting the Super-Enhancement of Emissions from Carbon-Implanted Silicon. Materials (Basel) 2023; 16:2070. [PMID: 36903185 PMCID: PMC10004110 DOI: 10.3390/ma16052070] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/13/2022] [Revised: 01/25/2023] [Accepted: 02/08/2023] [Indexed: 06/18/2023]
Abstract
The super enhancement of silicon band edge luminescence when co-implanted with boron and carbon is reported. The role of boron in the band edge emissions in silicon was investigated by deliberately introducing defects into the lattice structures. We aimed to increase the light emission intensity from silicon by boron implantation, leading to the formation of dislocation loops between the lattice structures. The silicon samples were doped with a high concentration of carbon before boron implantation and then annealed at a high temperature to activate the dopants into substitutional lattice sites. Photoluminescence (PL) measurements were performed to observe the emissions at the near-infrared region. The temperatures were varied from 10 K to 100 K to study the effect of temperature on the peak luminescence intensity. Two main peaks could be seen at ~1112 and 1170 nm by observing the PL spectra. The intensities shown by both peaks in the samples incorporated with boron are significantly higher than those in pristine silicon samples, and the highest intensity in the former was 600 times greater than that in the latter. Transmission electron microscopy (TEM) was used to study the structure of post-implant and post-anneal silicon sample. The dislocation loops were observed in the sample. Through a technique compatible with mature silicon processing technology, the results of this study will greatly contribute to the development of all Si-based photonic systems and quantum technologies.
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Affiliation(s)
- Nurul Ellena Abdul Razak
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), Bangi 43600, Malaysia
| | - Chang Fu Dee
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), Bangi 43600, Malaysia
| | - Morgan Madhuku
- iThemba Laboratory for Accelerator Based Science (LABS), Johannesburg 2050, South Africa
| | - Ishaq Ahmad
- NPU-NCP Joint International Research Center on Advanced Nanomaterials and Defect Engineering, National Centre for Physics, Islamabad 44000, Pakistan
| | - Edward Yi Chang
- Department of Materials Science and Engineering, National Yang-Ming Chiao-Tung University, Hsinchu 30010, Taiwan
- Department of Electronic Engineering, International College of Semiconductor Technology, National Yang-Ming Chiao-Tung University, Hsinchu 30010, Taiwan
| | - Hung Wei Yu
- Department of Materials Science and Engineering, National Yang-Ming Chiao-Tung University, Hsinchu 30010, Taiwan
- Department of Electronic Engineering, International College of Semiconductor Technology, National Yang-Ming Chiao-Tung University, Hsinchu 30010, Taiwan
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), Bangi 43600, Malaysia
| | - Dilla Duryha Berhanuddin
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), Bangi 43600, Malaysia
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Jaafar MM, Mohd Razip Wee MF, Nguyen HTN, Hieu LT, Rai R, Sahoo AK, Dee CF, Chang EY, Yeop Majlis B, Tee CATH. Surface Acoustic Wave Propagation of GaN/Sapphire Integrated with a Gold Guiding Layer. Sensors (Basel) 2023; 23:2464. [PMID: 36904668 PMCID: PMC10007255 DOI: 10.3390/s23052464] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/03/2023] [Revised: 02/12/2023] [Accepted: 02/14/2023] [Indexed: 06/18/2023]
Abstract
Gallium nitride (GaN), widely known as a wide bandgap semiconductor material, has been mostly employed in high power devices, light emitting diodes (LED), and optoelectronic applications. However, it could be exploited differently due to its piezoelectric properties, such as its higher SAW velocity and strong electromechanical coupling. In this study, we investigated the affect of the presence of a guiding layer made from titanium/gold on the surface acoustic wave propagation of the GaN/sapphire substrate. By fixing the minimum thickness of the guiding layer at 200 nm, we could observe a slight frequency shift compared to the sample without a guiding layer, with the presence of different types of surface mode waves (Rayleigh and Sezawa). This thin guiding layer could be efficient in transforming the propagation modes, acting as a sensing layer for the binding of biomolecules to the gold layer, and influencing the output signal in terms of frequency or velocity. The proposed GaN/sapphire device integrated with a guiding layer could possibly be used as a biosensor and in wireless telecommunication applications.
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Affiliation(s)
- Muhammad Musoddiq Jaafar
- College of Physics and Electrical Information Engineering, Zhejiang Normal University, Jinhua 321017, China
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia
- International College of Semiconductor Technology, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan
| | | | - Hoang-Tan-Ngoc Nguyen
- International College of Semiconductor Technology, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan
| | - Le Trung Hieu
- Department of Materials Science and Engineering, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan
| | - Rahul Rai
- International College of Semiconductor Technology, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan
| | - Ashish Kumar Sahoo
- International College of Semiconductor Technology, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan
| | - Chang Fu Dee
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia
| | - Edward Yi Chang
- International College of Semiconductor Technology, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan
- Department of Materials Science and Engineering, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan
- Department of Electronics Engineering, National Chiao Tung University, University Road, Hsinchu 30010, Taiwan
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia
| | - Clarence Augustine TH Tee
- College of Physics and Electrical Information Engineering, Zhejiang Normal University, Jinhua 321017, China
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Yusof N, Bais B, Yunas J, Soin N, Majlis BY. Fabrication of Suspended PMMA-Graphene Membrane for High Sensitivity LC-MEMS Pressure Sensor. Membranes (Basel) 2021; 11:996. [PMID: 34940497 PMCID: PMC8708556 DOI: 10.3390/membranes11120996] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/28/2021] [Revised: 12/17/2021] [Accepted: 12/17/2021] [Indexed: 11/16/2022]
Abstract
The LC-MEMS pressure sensor is an attractive option for an implantable sensor. It senses pressure wirelessly through an LC resonator, eliminating the requirement for electrical wiring or a battery system. However, the sensitivity of LC-MEMS pressure sensors is still comparatively low, especially in biomedical applications, which require a highly-sensitive sensor to measure low-pressure variations. This study presents the microfabrication of an LC wireless MEMS pressure sensor that utilizes a PMMA-Graphene (PMMA/Gr) membrane supported on a silicon trench as the deformable structure. The (PMMA/Gr) membrane was employed to increase the sensor's sensitivity due to its very low elastic modulus making it easy to deform under extremely low pressure. The overall size of the fabricated sensor was limited to 8 mm × 8 mm. The experimental results showed that the capacitance value changed from 1.64 pF to 12.32 pF when the applied pressure varied from 0 to 5 psi. This capacitance variation caused the frequency response to change from 28.74 MHz to 78.76 MHz. The sensor sensitivity was recorded with a value of 193.45 kHz/mmHg and a quality factor of 21. This study concludes that the (PMMA/Gr) membrane-based LC-MEMS pressure sensor has been successfully designed and fabricated and shows good potential in biomedical sensor applications.
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Affiliation(s)
- Norliana Yusof
- Faculty of Innovative Design and Technology, Universiti Sultan Zainal Abidin, Kuala Terengganu 21300, Malaysia
| | - Badariah Bais
- Department of Electrical, Electronic and Systems Engineering, Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, Bangi 43600, Malaysia
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi 43600, Malaysia; (J.Y.); (B.Y.M.)
| | - Jumril Yunas
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi 43600, Malaysia; (J.Y.); (B.Y.M.)
| | - Norhayati Soin
- Department of Electrical Engineering, Faculty of Engineering, University of Malaya, Kuala Lumpur 50603, Malaysia;
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi 43600, Malaysia; (J.Y.); (B.Y.M.)
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Zawawi SA, Hamzah AA, Majlis BY, Mohd-Yasin F. The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing. Micromachines (Basel) 2021; 12:mi12091101. [PMID: 34577744 PMCID: PMC8465934 DOI: 10.3390/mi12091101] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/09/2021] [Revised: 09/07/2021] [Accepted: 09/09/2021] [Indexed: 11/21/2022]
Abstract
In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation locations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It was found that diaphragms with bigger area, indented at the edge, and low load demonstrated almost elastic behaviour. Furthermore, two samples burst and one of them displayed pop-in behaviour, which we determine is due to plastic deformation. Based on optimum dimension and load, we calculate maximum pressure for elastic diaphragms. This pressure is sufficient for cubic silicon carbide diaphragms to be used as acoustic sensors to detect poisonous gasses.
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Affiliation(s)
- Siti Aisyah Zawawi
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (S.A.Z.); (A.A.H.); (B.Y.M.)
- UiTM Foundation Centre, Dengkil Campus, Universiti Teknologi Mara, Dengkil 43800, Selangor, Malaysia
| | - Azrul Azlan Hamzah
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (S.A.Z.); (A.A.H.); (B.Y.M.)
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (S.A.Z.); (A.A.H.); (B.Y.M.)
| | - Faisal Mohd-Yasin
- Queensland Micro- and Nanotechnology Centre, Griffith University, Nathan, QLD 4111, Australia
- Correspondence:
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Hidayah Azeman N, Asif Ahmad Khushaini M, Daik R, Ismail AG, Yeop Majlis B, Mat Salleh M, Aziz THTA, Bakar AAA, Md Zain AR, Teh C. Synthesis of a 1,4‐Bis[2‐(5‐thiophen‐2‐yl)‐1‐benzothiophene]‐2,5‐dioctyloxybenzene Pentamer for Creatinine Detection. ASIAN J ORG CHEM 2021. [DOI: 10.1002/ajoc.202100374] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/21/2022]
Affiliation(s)
- Nur Hidayah Azeman
- Department of Electrical, Electronic and Systems Engineering Faculty of Engineering and Built Environment Universiti Kebangsaan Malaysia 43600 UKM Bangi Selangor Malaysia
| | | | - Rusli Daik
- Department of Chemical Sciences Faculty of Science and Technology Universiti Kebangsaan Malaysia 43600 UKM Bangi Selangor Malaysia
| | - Ahmad Ghadafi Ismail
- Institute of Microengineering and Nanoelectronics Universiti Kebangsaan Malaysia 43600 UKM Bangi Selangor Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics Universiti Kebangsaan Malaysia 43600 UKM Bangi Selangor Malaysia
| | - Muhammad Mat Salleh
- Institute of Microengineering and Nanoelectronics Universiti Kebangsaan Malaysia 43600 UKM Bangi Selangor Malaysia
| | - Tg Hasnan Tg Abdul Aziz
- Institute of Microengineering and Nanoelectronics Universiti Kebangsaan Malaysia 43600 UKM Bangi Selangor Malaysia
| | - Ahmad Ashrif A Bakar
- Department of Electrical, Electronic and Systems Engineering Faculty of Engineering and Built Environment Universiti Kebangsaan Malaysia 43600 UKM Bangi Selangor Malaysia
| | - Ahmad Rifqi Md Zain
- Institute of Microengineering and Nanoelectronics Universiti Kebangsaan Malaysia 43600 UKM Bangi Selangor Malaysia
| | - Chin‐Hoong Teh
- ASASIpintar Program Pusat GENIUS@Pintar Negara Universiti Kebangsaan Malaysia 43600 UKM Bangi Selangor Malaysia
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Haron MH, Berhanuddin DD, Majlis BY, Md Zain AR. Double-peak one-dimensional photonic crystal cavity in parallel configuration for temperature self-compensation in sensing. Appl Opt 2021; 60:1667-1673. [PMID: 33690503 DOI: 10.1364/ao.418646] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/30/2020] [Accepted: 01/05/2021] [Indexed: 06/12/2023]
Abstract
We designed and demonstrated a double-peak one-dimensional photonic crystal (1D PhC) cavity device by integrating two 1D PhCs cavities in a parallel configuration. The device design is proposed so that it can be used for bio-sensing purposes and has a self-compensation ability to reduce the measurement error caused by the change of the surrounding temperature. By combining two light resonances, two resonance peaks are obtained. The peak's separation, which gives the initial value for a sensing system, can be controlled by varying the cavity length difference (Δc) between the first and second 1D PhCs in parallel. Then, by making one arm of the device as the reference arm and the other arm as the sensing arm, the temperature self-compensation device can be realized. The design and simulation of this device are done by using Lumerical software, which are Lumerical MODE, Lumerical finite-difference time-domain, and Lumerical Interconnect. Electron-beam-lithography and deep reactive-ion-etching processes were used for device fabrication. The experimental results show the controllable peaks' separation, which solves the double-peak requirement for a temperature self-compensated bio-sensor design.
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Latif R, Jaafar MF, Aziz MF, Majlis BY. Mechanical Strength Enhancement of Porous Nanocrystalline-Silicon (pnc-Si) Membrane via Titanium-oxide (Ti-O) Coating. SAINS MALAYS 2020. [DOI: 10.17576/jsm-2020-4912-20] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
Abstract
Porous nanocrystalline silicon (pnc-Si) membrane is mainly studied as a blood filtration membrane, mimicking the glomerulus filtration membrane of a human kidney. However, the pnc-Si material itself is not hemocompatible and enormous membrane area to thickness ratio makes the membrane to be easily fractured. Silicon surface modification via titanium-oxide (Ti-O) thin film layer deposition has been proven to be hemocompatible and the presence of Ti-O layer has been numerically studied to give higher membrane flexural strength. In this work, square pnc-Si membranes of 2 mm × 2 mm × 20 nm size have been fabricated with and without Ti-O layer. Point loading-unloading nanoindentation method has been performed and the membranes’ displacement behaviour subjected to point loads is studied. The pnc-Si membranes with Ti-O layer were found to attain higher fracture strength, membrane bending stiffness and average hardness with the increase of ~20, ~11 and ~24%, respectively, compared to bare pnc-Si membranes. The mechanical strength of a free-standing pnc-Si membrane is improved by depositing a Ti-O thin film layer on the membrane structure.
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Abdul Razak NE, Madhuku M, Ahmad I, Majlis BY, Chang FD, Berhanuddin DD. Structural and Photoluminescence Analysis on the Implantation of Carbon and Proton for the Creation of Damage-Assisted Emission in Silicon. SAINS MALAYS 2020. [DOI: 10.17576/jsm-2020-4912-06] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
Abstract
We study the induced defects in the depth profiling of the silicon structure after being implanted with carbon and followed by high energy proton irradiation. It has been reported before that the formation of the optically active point-defect, specifically the G-centre is due to the implantation and irradiation of carbon and proton, respectively. It is crucial to quantify the diffusional broadening of the implanted ion profile especially for proton irradiation process so that the radiation damage evolution can be maximized at the point-defect formation region. Profiling analysis was carried out using computational Stopping and Range of Ions in Matter (SRIM) and Surrey University Sputter Profile Resolution from Energy Deposition (SUSPRE) simulation. The energies of carbon ions adopted for this investigation are 10, 20, 30, and 50 keV, while proton irradiation energy was kept at 2 MeV. Photoluminescence measurements on silicon implanted with carbon at different energies were carried out to study the interrelation between the numbers of vacancies produced during the damage event and the peak emission intensities.
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Yunas J, Mulyanti B, Hamidah I, Mohd Said M, Pawinanto RE, Wan Ali WAF, Subandi A, Hamzah AA, Latif R, Yeop Majlis B. Polymer-Based MEMS Electromagnetic Actuator for Biomedical Application: A Review. Polymers (Basel) 2020; 12:E1184. [PMID: 32455993 PMCID: PMC7284590 DOI: 10.3390/polym12051184] [Citation(s) in RCA: 40] [Impact Index Per Article: 10.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/30/2020] [Revised: 04/27/2020] [Accepted: 04/28/2020] [Indexed: 12/22/2022] Open
Abstract
In this study, we present a comprehensive review of polymer-based microelectromechanical systems (MEMS) electromagnetic (EM) actuators and their implementation in the biomedical engineering field. The purpose of this review is to provide a comprehensive summary on the latest development of electromagnetically driven microactuators for biomedical application that is focused on the movable structure development made of polymers. The discussion does not only focus on the polymeric material part itself, but also covers the basic mechanism of the mechanical actuation, the state of the art of the membrane development and its application. In this review, a clear description about the scheme used to drive the micro-actuators, the concept of mechanical deformation of the movable magnetic membrane and its interaction with actuator system are described in detail. Some comparisons are made to scrutinize the advantages and disadvantages of electromagnetic MEMS actuator performance. The previous studies and explanations on the technology used to fabricate the polymer-based membrane component of the electromagnetically driven microactuators system are presented. The study on the materials and the synthesis method implemented during the fabrication process for the development of the actuators are also briefly described in this review. Furthermore, potential applications of polymer-based MEMS EM actuators in the biomedical field are also described. It is concluded that much progress has been made in the material development of the actuator. The technology trend has moved from the use of bulk magnetic material to using magnetic polymer composites. The future benefits of these compact flexible material employments will offer a wide range of potential implementation of polymer composites in wearable and portable biomedical device applications.
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Affiliation(s)
- Jumril Yunas
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (W.A.F.W.A.); (A.S.); (A.A.H.); (R.L.); (B.Y.M.)
| | - Budi Mulyanti
- Faculty of Engineering and Vocational Education, Universitas Pendidikan Indonesia, Jl. Dr. Setiabudhi 207, Bandung 40154, Indonesia; (B.M.); (I.H.)
| | - Ida Hamidah
- Faculty of Engineering and Vocational Education, Universitas Pendidikan Indonesia, Jl. Dr. Setiabudhi 207, Bandung 40154, Indonesia; (B.M.); (I.H.)
| | - Muzalifah Mohd Said
- Faculty of Electronics and Computer Engineering (FKEKK), Universiti Teknikal Malaysia Melaka (UTeM), Hang Tuah Jaya, Durian Tunggal 76100, Melaka, Malaysia;
| | - Roer Eka Pawinanto
- Malaysia-Japan International Institute of Technology (MJIIT), Universiti Teknologi Malaysia (UTM), Kuala Lumpur 54100, Malaysia;
| | - Wan Amar Fikri Wan Ali
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (W.A.F.W.A.); (A.S.); (A.A.H.); (R.L.); (B.Y.M.)
| | - Ayub Subandi
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (W.A.F.W.A.); (A.S.); (A.A.H.); (R.L.); (B.Y.M.)
| | - Azrul Azlan Hamzah
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (W.A.F.W.A.); (A.S.); (A.A.H.); (R.L.); (B.Y.M.)
| | - Rhonira Latif
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (W.A.F.W.A.); (A.S.); (A.A.H.); (R.L.); (B.Y.M.)
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia; (W.A.F.W.A.); (A.S.); (A.A.H.); (R.L.); (B.Y.M.)
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Zawawi SA, Hamzah AA, Majlis BY, Mohd-Yasin F. A Review of MEMS Capacitive Microphones. Micromachines (Basel) 2020; 11:mi11050484. [PMID: 32397340 PMCID: PMC7281444 DOI: 10.3390/mi11050484] [Citation(s) in RCA: 21] [Impact Index Per Article: 5.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/28/2020] [Revised: 04/17/2020] [Accepted: 04/30/2020] [Indexed: 11/16/2022]
Abstract
This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.
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Affiliation(s)
- Siti Aisyah Zawawi
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia; (S.A.Z.); (A.A.H.); (B.Y.M.)
- UiTM Foundation Centre, Universiti Teknologi Mara, Dengkil Campus, Dengkil, Selangor 43800, Malaysia
| | - Azrul Azlan Hamzah
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia; (S.A.Z.); (A.A.H.); (B.Y.M.)
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia; (S.A.Z.); (A.A.H.); (B.Y.M.)
| | - Faisal Mohd-Yasin
- Queensland Micro- and Nanotechnology Centre, Griffith University, Brisbane QLD 4111, Australia
- Correspondence:
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Zainal Abidin HE, Ooi PC, Tiong TY, Marsi N, Ismardi A, Mohd Noor M, Nik Zaini Fathi NAF, Abd Aziz N, Sahari SK, Sugandi G, Yunas J, Dee CF, Yeop Majlis B, Hamzah AA. Stress and Deformation of Optimally Shaped Silicon Microneedles for Transdermal Drug Delivery. J Pharm Sci 2020; 109:2485-2492. [PMID: 32380181 DOI: 10.1016/j.xphs.2020.04.019] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/07/2020] [Revised: 04/27/2020] [Accepted: 04/27/2020] [Indexed: 10/24/2022]
Abstract
In this study, we demonstrated the fabrication of the concave conic shape microneedle with the aid of COMSOL Multiphysics simulation. The stress and buckling of the microneedle structure were simulated by applying various loads ranging from 50 to 800 g perpendiculars to the tip in order to predict the occurrence of microneedles structure deformation. The simulation study indicated that the surface buckling deformation does not occur to the microneedle structure with the increment of the load. The microneedles with dimensions of height and diameter tip ranging from 60 to 100 μm and 1 to 4 μm, respectively had been fabricated via an etching process in a mixture of hydrofluoric acid, nitric acid, and acetic acid. Three optimized microneedles but different in the structures were fabricated via the acidic etching process. The reproducibility of 3 different microneedle structures was 15, 20, and 60%, respectively. Stress and buckling analyses of the fabricated microneedles were further carried out on the rat skin. The obtained experimental results show promising applications for the deep dermis, stratum corneum to epidermis layer penetration.
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Affiliation(s)
| | - Poh Choon Ooi
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Malaysia.
| | - Teck Yaw Tiong
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Malaysia
| | - Noraini Marsi
- Faculty of Engineering Technology, Department of Mechanical Engineering Technology, Universiti Tun Hussein Onn Malaysia, Panchor, Johor, Malaysia
| | - Abrar Ismardi
- Department of Engineering Physics, School of Electrical Engineering, Telkom University, Jalan Telekomunikasi Terusan Buah Batu, Bandung, Indonesia
| | - Mimiwaty Mohd Noor
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Malaysia
| | | | - Norazreen Abd Aziz
- Faculty of Engineering, Department of Electrical, Electronics and Systems Engineering, Universiti Kebangsaan Malaysia, Bangi, Malaysia
| | - Siti Kudnie Sahari
- Faculty of Engineering, Department of Electrical and Electronic Engineering, Universiti Malaysia Sarawak, Kota Samarahan, Sarawak, Malaysia
| | - Gandi Sugandi
- Indonesian Institute of Sciences, Jakarta, Indonesia
| | - Jumril Yunas
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Malaysia
| | - Chang Fu Dee
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Malaysia
| | - Azrul Azlan Hamzah
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Malaysia.
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Buyong MR, Ismail AG, Yunus FW, Samad MIA, Jamaludin NMA, Rahim MKA, Hamzah AA, Majlis BY, Aziz NA. Tapered Dielectrophoresis Microelectrodes: Device, Operation, and Application. 2019 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) 2019. [DOI: 10.1109/rsm46715.2019.8943575] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/01/2023]
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13
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Al-Ahdal SA, Ahmad Kayani AB, Md Ali MA, Chan JY, Ali T, Adnan N, Buyong MR, Mhd Noor EE, Majlis BY, Sriram S. Dielectrophoresis of Amyloid-Beta Proteins as a Microfluidic Template for Alzheimer's Research. Int J Mol Sci 2019; 20:ijms20143595. [PMID: 31340481 PMCID: PMC6678832 DOI: 10.3390/ijms20143595] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/06/2019] [Revised: 04/25/2019] [Accepted: 04/26/2019] [Indexed: 01/13/2023] Open
Abstract
We employed dielectrophoresis to a yeast cell suspension containing amyloid-beta proteins (Aβ) in a microfluidic environment. The Aβ was separated from the cells and characterized using the gradual dissolution of Aβ as a function of the applied dielectrophoretic parameters. We established the gradual dissolution of Aβ under specific dielectrophoretic parameters. Further, Aβ in the fibril form at the tip of the electrode dissolved at high frequency. This was perhaps due to the conductivity of the suspending medium changing according to the frequency, which resulted in a higher temperature at the tips of the electrodes, and consequently in the breakdown of the hydrogen bonds. However, those shaped as spheroidal monomers experienced a delay in the Aβ fibril transformation process. Yeast cells exposed to relatively low temperatures at the base of the electrode did not experience a positive or negative change in viability. The DEP microfluidic platform incorporating the integrated microtip electrode array was able to selectively manipulate the yeast cells and dissolve the Aβ to a controlled extent. We demonstrate suitable dielectrophoretic parameters to induce such manipulation, which is highly relevant for Aβ-related colloidal microfluidic research and could be applied to Alzheimer’s research in the future.
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Affiliation(s)
- Salman Ali Al-Ahdal
- Faculty of Engineering and Technology, Multimedia University, Melaka 75450, Malaysia
| | - Aminuddin Bin Ahmad Kayani
- Faculty of Engineering and Technology, Multimedia University, Melaka 75450, Malaysia.
- Functional Materials and Microsystems Research Group and the Micro Nano Research Facility, RMIT University, Melbourne, Victoria 3001, Australia.
| | - Mohd Anuar Md Ali
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia
| | - Jun Yuan Chan
- Faculty of Engineering and Technology, Multimedia University, Melaka 75450, Malaysia
| | - Talal Ali
- Faculty of Medicine, International University of Africa, Khartoum 12223, Sudan
| | - Norah Adnan
- Faculty of Medicine, International University of Africa, Khartoum 12223, Sudan
| | - Muhamad Ramdzan Buyong
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia
| | - Ervina Efzan Mhd Noor
- Faculty of Engineering and Technology, Multimedia University, Melaka 75450, Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia
| | - Sharath Sriram
- Functional Materials and Microsystems Research Group and the Micro Nano Research Facility, RMIT University, Melbourne, Victoria 3001, Australia
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14
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Mustafa K'A, Majlis BY, Yunas J, Hamzah AA. Fabrication of Micromachined Uniform Microtrench Arrays for Silicon based Filtration Membrane. SAINS MALAYS 2019. [DOI: 10.17576/jsm-2019-4806-03] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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15
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Menon PS, Said FA, Gan SM, Mohamed MA, Md Zain AR, Shaari S, Majlis BY. High Sensitivity Au-based Kretschmann Surface Plasmon Resonance Sensor for Urea Detection. SAINS MALAYS 2019. [DOI: 10.17576/jsm-2019-4806-04] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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16
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A Karim SS, Dee CF, Majlis BY, Mohamed MA. Recent Progress on Fabrication of Zinc Oxide Nanorod-based Field Effect Transistor Biosensors. SAINS MALAYS 2019. [DOI: 10.17576/jsm-2019-4806-19] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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17
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Abd Samad MI, Kayani AA, Zoolfakar AS, Hamzah AA, Majlis BY, Buyong MR. Lab-on-a-chip Dielectrophoretic Manipulation of Beta-2 Microglobulin for Toxin Removal in An Artificial Kidney. MNS 2019; 11:40-46. [DOI: 10.2174/1876402911666181218145459] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/03/2018] [Revised: 12/06/2018] [Accepted: 12/12/2018] [Indexed: 09/02/2023]
Abstract
Background:
This paper presents a fundamental study of protein manipulation under the
influence of dielectrophoretic (DEP) force for a lab-on-a-chip platform.
Objective:
Protein manipulation is dependent on the polarisation factor of protein when exposed to an
electric field. Therefore the objective of this work is a microfluidic device and measurement system
are used to characterise the human beta-2 microglobulin (β2M) protein via lateral attractive forces and
vertical repulsive forces by means of DEP responses.
Method:
The manipulation of the β2M protein was conducted using a microfluidic platform with a tapered
DEP microelectrode and the protein concentration was quantified based on a biochemical interaction
using an Enzyme-Linked Immunosolvent Assay (ELISA). The protein distribution has been analysed
based on the β2M concentration for each microfluidic outlet.
Results:
At 300 kHz, the protein experienced a negative DEP (nDEP) with of 83.3% protein distribution
on the middle microchannel. In contrast, the protein experienced a positive DEP (pDEP) at 1.2
MHz with of 78.7% of protein on the left and right sides of the microchannel.
Conclusion:
This is concept proved that the tapered DEP microelectrode is capable of manipulating
a β2M via particle polarisation, hence making it suitable to be utilised for purifying proteins in biomedical
application.
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Affiliation(s)
- Muhammad Izzuddin Abd Samad
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, 43600, Malaysia
| | - Aminuddin Ahmad Kayani
- Center for Advanced Materials and Green Technology, Multimedia University, 75450 Melaka, Malaysia
| | - Ahmad Sabirin Zoolfakar
- NANOElecTronic Centre, NET, Universiti Teknologi Mara, UiTM, Shah Alam 45450, Selangor, Malaysia
| | - Azrul Azlan Hamzah
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, 43600, Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, 43600, Malaysia
| | - Muhamad Ramdzan Buyong
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, 43600, Malaysia
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18
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Abd Samad MI, Buyong MR, Kim SS, Yeop Majlis B. Dielectrophoresis velocities response on tapered electrode profile: simulation and experimental. MI 2019; 36:45-53. [DOI: 10.1108/mi-06-2018-0037] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/02/2023]
Abstract
Purpose
The purpose of this paper is to use a particle velocity measurement technique on a tapered microelectrode device via changes of an applied voltage, which is an enhancement of the electric field density in influencing the dipole moment particles. Polystyrene microbeads (PM) have used to determine the responses of the dielectrophoresis (DEP) voltage based on the particle velocity technique.
Design/methodology/approach
Analytical modelling was used to simulate the particles’ polarization and their velocity based on the Clausius–Mossotti Factor (CMF) equation. The electric field intensity and DEP forces were simulated through the COMSOL numerical study of the variation of applied voltages such as 5 V p-p, 7 V p-p and 10 V p-p. Experimentally, the particle velocity on a tapered DEP response was quantified via the particle travelling distance over a time interval through a high-speed camera adapted to a high-precision non-contact depth measuring microscope.
Findings
The result of the particle velocity was found to increase, and the applied voltage has enhanced the particle trajectory on the tapered microelectrode, which confirmed its dependency on the electric field intensity at the top and bottom edges of the electrode. A higher magnitude of particle levitation was recorded with the highest particle velocity of 11.19 ± 4.43 µm/s at 1 MHz on 10 V p-p, compared to the lowest particle velocity with 0.62 ± 0.11 µm/s at 10 kHz on 7 V p-p.
Practical implications
This research can be applied for high throughout sensitivity and selectivity of particle manipulation in isolating and concentrating biological fluid for biomedical implications.
Originality/value
The comprehensive manipulation method based on the changes of the electrical potential of the tapered electrode was able to quantify the magnitude of the particle trajectory in accordance with the strong electric field density.
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Mohd Razip Wee MF, Jaafar MM, Faiz MS, Dee CF, Yeop Majlis B. A Theoretical Study of Surface Mode Propagation with a Guiding Layer of GaN/Sapphire Hetero-Structure in Liquid Medium. Biosensors (Basel) 2018; 8:bios8040124. [PMID: 30563159 PMCID: PMC6315700 DOI: 10.3390/bios8040124] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/29/2018] [Revised: 11/29/2018] [Accepted: 12/01/2018] [Indexed: 11/18/2022]
Abstract
Gallium Nitride (GaN) is considered as the second most popular semiconductor material in industry after silicon. This is due to its wide applications encompassing Light Emitting Diode (LED) and power electronics. In addition, its piezoelectric properties are fascinating to be explored as electromechanical material for the development of diverse microelectromechanical systems (MEMS) application. In this article, we conducted a theoretical study concerning surface mode propagation, especially Rayleigh and Sezawa mode in the layered GaN/sapphire structure with the presence of various guiding layers. It is demonstrated that the increase in thickness of guiding layer will decrease the phase velocities of surface mode depending on the material properties of the layer. In addition, the Q-factor value indicating the resonance properties of surface mode appeared to be affected with the presence of fluid domain, particularly in the Rayleigh mode. Meanwhile, the peak for Sezawa mode shows the highest Q factor and is not altered by the presence of fluid. Based on these theoretical results using the finite element method, it could contribute to the development of a GaN-based device to generate surface acoustic wave, especially in Sezawa mode which could be useful in acoustophoresis, lab on-chip and microfluidics applications.
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Affiliation(s)
- M F Mohd Razip Wee
- Institute of Microengineering and Nanoelectronics, Research Complex, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia.
| | - Muhammad Musoddiq Jaafar
- Institute of Microengineering and Nanoelectronics, Research Complex, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia.
| | - Mohd Syafiq Faiz
- Institute of Microengineering and Nanoelectronics, Research Complex, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia.
| | - Chang Fu Dee
- Institute of Microengineering and Nanoelectronics, Research Complex, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia.
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, Research Complex, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia.
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20
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Gan SM, Mohamad NRB, Jamil NAB, Majlis BY, Menon PS. Pengoptimuman Sensor Resonans Plasmon Permukaan berdasarkan Kretschmann dengan Kaedah Taguchi. SAINS MALAYS 2018. [DOI: 10.17576/jsm-2018-4710-33] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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21
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Tiong TY, Ooi L, Dee CF, Hamzah AA, Majlis BY. Curvature contribution on anodic aluminium oxide pore formation: a detailed analytical study. Nanotechnology 2018; 29:435601. [PMID: 30084385 DOI: 10.1088/1361-6528/aad884] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Anodic aluminium oxide (AAO) is a self-organised nanopore that has been widely studied due to the ease of its synthesization and pore properties manipulation. However, pore growth behaviour under different geometrical surfaces is rarely studied, particularly on the effect of combined curved surfaces towards pore growth properties, which is crucial in designing unique porous platform for specific applications. This paper reports study on the decisive effect of curvature surfaces on development of pore structure and properties at a constant potential. In this work, AAO grown on treated convex and concave surfaces were analysed in terms of pore quantity, pore diameter, interpore distance, pore length and other parameters of pore bottom geometry in conjugation with observation of pore cessation, bifurcation, bending and tapering. The unique formation of tapered pore was observed and described. Major factors deciding pore properties under curved surfaces were identified and discussed. We introduced a new parameter for surface quantification known as central inscribed angle, which was identified to be the central factor which decides pore growth behaviour under a curvature. Here, we observed a different trend in growth rate of pores under different curvatures, which oppose the commonly accepted convex > planar > concave pattern. Levelling height was later identified to be the decisive factor in determining growth rate of pores under a curvature at different geometrical location. These findings open up possibility to precisely control and tailor the growing path and pore structures of AAO simply via anodising an Al sheet under combined curvature surfaces, which could be beneficial for future novel applications.
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Affiliation(s)
- Teck-Yaw Tiong
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor, Malaysia
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22
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Tajul Othamany NRA, Aziz NA, Abd Samad MI, Buyong MR, Majlis BY. Separation of Micro Engineered Particle Using Dielectrophoresis Technique. 2018 IEEE International Conference on Semiconductor Electronics (ICSE) 2018. [DOI: 10.1109/smelec.2018.8481241] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/01/2023]
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23
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Abd Samad MI, Buyong MR, Yunus FW, Siow KS, Hamzah AA, Majlis BY. Voltage Characterization on Dielectrophoretic Force Response to Hematologic Cell Manipulation. 2018 IEEE International Conference on Semiconductor Electronics (ICSE) 2018. [DOI: 10.1109/smelec.2018.8481286] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/02/2023]
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24
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Menon PS, Said FA, Mei GS, Berhanuddin DD, Umar AA, Shaari S, Majlis BY. Urea and creatinine detection on nano-laminated gold thin film using Kretschmann-based surface plasmon resonance biosensor. PLoS One 2018; 13:e0201228. [PMID: 30052647 PMCID: PMC6063434 DOI: 10.1371/journal.pone.0201228] [Citation(s) in RCA: 18] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/28/2018] [Accepted: 07/11/2018] [Indexed: 11/21/2022] Open
Abstract
This work investigates the surface plasmon resonance (SPR) response of 50-nm thick nano-laminated gold film using Kretschmann-based biosensing for detection of urea and creatinine in solution of various concentrations (non-enzymatic samples). Comparison was made with the presence of urease and creatininase enzymes in the urea and creatinine solutions (enzymatic samples), respectively. Angular interrogation technique was applied using optical wavelengths of 670 nm and 785 nm. The biosensor detects the presence of urea and creatinine at concentrations ranging from 50–800 mM for urea samples and 10–200 mM for creatinine samples. The purpose of studying the enzymatic sample was mainly to enhance the sensitivity of the sensor towards urea and creatinine in the samples. Upon exposure to 670 nm optical wavelength, the sensitivity of 1.4°/M was detected in non-enzymatic urea samples and 4°/M in non-enzymatic creatinine samples. On the other hand, sensor sensitivity as high as 16.2°/M in urea-urease samples and 10°/M in creatinine-creatininase samples was detected. The enhanced sensitivity possibly attributed to the increase in refractive index of analyte sensing layer due to urea-urease and creatinine-creatininase coupling activity. This work has successfully proved the design and demonstrated a proof-of-concept experiment using a low-cost and easy fabrication of Kretschmann based nano-laminated gold film SPR biosensor for detection of urea and creatinine using urease and creatininase enzymes.
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Affiliation(s)
- P. Susthitha Menon
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, UKM Bangi, Selangor, Malaysia
- * E-mail:
| | - Fairus Atida Said
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, UKM Bangi, Selangor, Malaysia
| | - Gan Siew Mei
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, UKM Bangi, Selangor, Malaysia
| | - Dilla Duryha Berhanuddin
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, UKM Bangi, Selangor, Malaysia
| | - Akrajas Ali Umar
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, UKM Bangi, Selangor, Malaysia
| | - Sahbudin Shaari
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, UKM Bangi, Selangor, Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, UKM Bangi, Selangor, Malaysia
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25
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Jamil NA, P. SM, Gan SM, Majlis BY. Peningkatan Kepekaan Biosensor Urea Berasaskan Resonans Plasmon Permukaan dan Tatasusunan Kretschmann dengan Struktur Hibrid Grafin-MoS2. SAINS MALAYS 2018. [DOI: 10.17576/jsm-2018-4705-20] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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26
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Sihar N, Tiong TY, Dee CF, Ooi PC, Hamzah AA, Mohamed MA, Majlis BY. Ultraviolet Light-Assisted Copper Oxide Nanowires Hydrogen Gas Sensor. Nanoscale Res Lett 2018; 13:150. [PMID: 29766297 PMCID: PMC5953915 DOI: 10.1186/s11671-018-2566-6] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/06/2017] [Accepted: 05/01/2018] [Indexed: 05/31/2023]
Abstract
We fabricated copper oxide nanowires (CuO NWs) ultraviolet (UV) light-assisted hydrogen gas sensor. The fabricated sensor shows promising sensor response behavior towards 100 ppm of H2 at room temperature and elevated temperature at 100 °C when exposed to UV light (3.0 mW/cm2). One hundred-cycle device stability test has been performed, and it is found that for sample elevated at 100 °C, the UV-activated sample achieved stability in the first cycle as compared to the sample without UV irradiation which needed about 10 cycles to achieve stability at the initial stage, whereas the sample tested at room temperature was able to stabilize with the aid of UV irradiation. This indicates that with the aid of UV light, after some "warming up" time, it is possible for the conventional CuO NW sensor which normally work at elevated temperature to function at room temperature because UV source is speculated to play a dominant role to increase the interaction of the surface of CuO NWs and hydrogen gas molecules absorbed after the light exposure.
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Affiliation(s)
- Nabihah Sihar
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor Malaysia
| | - Teck Yaw Tiong
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor Malaysia
| | - Chang Fu Dee
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor Malaysia
| | - Poh Choon Ooi
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor Malaysia
| | - Azrul Azlan Hamzah
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor Malaysia
| | - Mohd Ambri Mohamed
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor Malaysia
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27
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Tan KH, Lim FS, Toh AZY, Zheng XX, Dee CF, Majlis BY, Chai SP, Chang WS. Tunable Spectrum Selectivity for Multiphoton Absorption with Enhanced Visible Light Trapping in ZnO Nanorods. Small 2018; 14:e1704053. [PMID: 29665226 DOI: 10.1002/smll.201704053] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/19/2017] [Revised: 02/06/2018] [Indexed: 06/08/2023]
Abstract
Observation of visible light trapping in zinc oxide (ZnO) nanorods (NRs) correlated to the optical and photoelectrochemical properties is reported. In this study, ZnO NR diameter and c-axis length respond primarily at two different regions, UV and visible light, respectively. ZnO NR diameter exhibits UV absorption where large ZnO NR diameter area increases light absorption ability leading to high efficient electron-hole pair separation. On the other hand, ZnO NR c-axis length has a dominant effect in visible light resulting from a multiphoton absorption mechanism due to light reflection and trapping behavior in the free space between adjacent ZnO NRs. Furthermore, oxygen vacancies and defects in ZnO NRs are associated with the broad visible emission band of different energy levels also highlighting the possibility of the multiphoton absorption mechanism. It is demonstrated that the minimum average of ZnO NR c-axis length must satisfy the linear regression model of Z p,min = 6.31d to initiate the multiphoton absorption mechanism under visible light. This work indicates the broadening of absorption spectrum from UV to visible light region by incorporating a controllable diameter and c-axis length on vertically aligned ZnO NRs, which is important in optimizing the design and functionality of electronic devices based on light absorption mechanism.
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Affiliation(s)
- Kok Hong Tan
- Advanced Engineering Platform, Mechanical Engineering Discipline, School of Engineering, Monash University Malaysia, Bandar Sunway, Selangor, 47500, Malaysia
| | - Fang Sheng Lim
- Advanced Engineering Platform, Mechanical Engineering Discipline, School of Engineering, Monash University Malaysia, Bandar Sunway, Selangor, 47500, Malaysia
| | - Alfred Zhen Yang Toh
- Advanced Engineering Platform, Mechanical Engineering Discipline, School of Engineering, Monash University Malaysia, Bandar Sunway, Selangor, 47500, Malaysia
| | - Xia-Xi Zheng
- Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, 30010, Taiwan
| | - Chang Fu Dee
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor, 43600, Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor, 43600, Malaysia
| | - Siang-Piao Chai
- Advanced Engineering Platform, Chemical Engineering Discipline, School of Engineering, Monash University Malaysia, Bandar Sunway, Selangor, 47500, Malaysia
| | - Wei Sea Chang
- Advanced Engineering Platform, Mechanical Engineering Discipline, School of Engineering, Monash University Malaysia, Bandar Sunway, Selangor, 47500, Malaysia
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28
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Zulkefli MA, Mohamed MA, Kim SS, Majlis BY. Peranti Suis Sistem Nanoelektromekanikal (NEMS) Berunsurkan Grafin dan Tiub Nano Karbon (CNT). SAINS MALAYS 2018. [DOI: 10.17576/jsm-2018-4703-24] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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29
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Chan JY, Ahmad Kayani AB, Md Ali MA, Kok CK, Yeop Majlis B, Hoe SLL, Marzuki M, Khoo ASB, Ostrikov K(K, Ataur Rahman M, Sriram S. Dielectrophoresis-based microfluidic platforms for cancer diagnostics. Biomicrofluidics 2018; 12:011503. [PMID: 29531634 PMCID: PMC5825230 DOI: 10.1063/1.5010158] [Citation(s) in RCA: 37] [Impact Index Per Article: 6.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/23/2017] [Accepted: 12/27/2017] [Indexed: 05/15/2023]
Abstract
The recent advancement of dielectrophoresis (DEP)-enabled microfluidic platforms is opening new opportunities for potential use in cancer disease diagnostics. DEP is advantageous because of its specificity, low cost, small sample volume requirement, and tuneable property for microfluidic platforms. These intrinsic advantages have made it especially suitable for developing microfluidic cancer diagnostic platforms. This review focuses on a comprehensive analysis of the recent developments of DEP enabled microfluidic platforms sorted according to the target cancer cell. Each study is critically analyzed, and the features of each platform, the performance, added functionality for clinical use, and the types of samples, used are discussed. We address the novelty of the techniques, strategies, and design configuration used in improving on existing technologies or previous studies. A summary of comparing the developmental extent of each study is made, and we conclude with a treatment of future trends and a brief summary.
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Affiliation(s)
- Jun Yuan Chan
- Center for Advanced Materials and Green Technology, Multimedia University, 75450 Melaka, Malaysia
| | | | - Mohd Anuar Md Ali
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, 43600 Selangor, Malaysia
| | - Chee Kuang Kok
- Center for Advanced Materials and Green Technology, Multimedia University, 75450 Melaka, Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, 43600 Selangor, Malaysia
| | - Susan Ling Ling Hoe
- Molecular Pathology Unit, Cancer Research Centre, Institute for Medical Research, 50588 Kuala Lumpur, Malaysia
| | - Marini Marzuki
- Molecular Pathology Unit, Cancer Research Centre, Institute for Medical Research, 50588 Kuala Lumpur, Malaysia
| | | | | | - Md. Ataur Rahman
- Functional Materials and Microsystems Research Group, Micro Nano Research Facility, RMIT University, Melbourne, Victoria 3001, Australia
| | - Sharath Sriram
- Functional Materials and Microsystems Research Group, Micro Nano Research Facility, RMIT University, Melbourne, Victoria 3001, Australia
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Yahya NN, Aziz NA, Buyong MR, Majlis BY. Size-based particles separation utilizing dielectrophoresis technique. 2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) 2017. [DOI: 10.1109/rsm.2017.8069123] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/01/2023]
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Zainal Abidin HE, Hamzah AA, Majlis BY. Pencirian Pertumbuhan Lapisan Nano Grafin di atas Elektrod antara Digit Superkapasitor MEMS. SAINS MALAYS 2017. [DOI: 10.17576/jsm-2017-4607-07] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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Mohamed MA, Zulkefli FD, Majlis BY. Pencirian Transistor Karbon Tiub Nano Berdinding Tunggal yang Dihasilkan melalui Kaedah Pertumbuhan Langsung. SAINS MALAYS 2017. [DOI: 10.17576/jsm-2017-4607-17] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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Zulkefli MA, Mohamed MA, Siow KS, Yeop Majlis B, Kulothungan J, Muruganathan M, Mizuta H. Three-Dimensional Finite Element Method Simulation of Perforated Graphene Nano-Electro-Mechanical (NEM) Switches. Micromachines (Basel) 2017; 8:E236. [PMID: 30400428 PMCID: PMC6190186 DOI: 10.3390/mi8080236] [Citation(s) in RCA: 14] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/21/2017] [Revised: 07/24/2017] [Accepted: 07/25/2017] [Indexed: 11/30/2022]
Abstract
The miniaturization trend leads to the development of a graphene based nanoelectromechanical (NEM) switch to fulfill the high demand in low power device applications. In this article, we highlight the finite element (FEM) simulation of the graphene-based NEM switches of fixed-fixed ends design with beam structures which are perforated and intact. Pull-in and pull-out characteristics are analyzed by using the FEM approach provided by IntelliSuite software, version 8.8.5.1. The FEM results are consistent with the published experimental data. This analysis shows the possibility of achieving a low pull-in voltage that is below 2 V for a ratio below 15:0.03:0.7 value for the graphene beam length, thickness, and air gap thickness, respectively. The introduction of perforation in the graphene beam-based NEM switch further achieved the pull-in voltage as low as 1.5 V for a 250 nm hole length, 100 nm distance between each hole, and 12-number of hole column. Then, a von Mises stress analysis is conducted to investigate the mechanical stability of the intact and perforated graphene-based NEM switch. This analysis shows that a longer and thinner graphene beam reduced the von Mises stress. The introduction of perforation concept further reduced the von Mises stress at the graphene beam end and the beam center by approximately ~20⁻35% and ~10⁻20%, respectively. These theoretical results, performed by FEM simulation, are expected to expedite improvements in the working parameter and dimension for low voltage and better mechanical stability operation of graphene-based NEM switch device fabrication.
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Affiliation(s)
- Mohd Amir Zulkefli
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 UKM-Bangi, Selangor, Malaysia.
| | - Mohd Ambri Mohamed
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 UKM-Bangi, Selangor, Malaysia.
| | - Kim S Siow
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 UKM-Bangi, Selangor, Malaysia.
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 UKM-Bangi, Selangor, Malaysia.
| | - Jothiramalingam Kulothungan
- School of Materials Science, Japan Advanced Institute of Science and Technology, Nomi, Ishikawa 923-1292, Japan.
| | - Manoharan Muruganathan
- School of Materials Science, Japan Advanced Institute of Science and Technology, Nomi, Ishikawa 923-1292, Japan.
| | - Hiroshi Mizuta
- School of Materials Science, Japan Advanced Institute of Science and Technology, Nomi, Ishikawa 923-1292, Japan.
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Chen TF, Siow KS, Ng PY, Majlis BY. Enhancing the biocompatibility of the polyurethane methacrylate and off-stoichiometry thiol-ene polymers by argon and nitrogen plasma treatment. Mater Sci Eng C Mater Biol Appl 2017. [PMID: 28629060 DOI: 10.1016/j.msec.2017.05.091] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/08/2023]
Abstract
Our studies focused on improving the biocompatibility properties of two microfluidic prototyping substrates i.e. polyurethane methacrylate (PUMA) and off-stoichiometry thiol-ene (OSTE-80) polymer by Ar and N2 plasma treatment. The contact angle (CA) measurement showed that both plasma treatments inserted oxygen and nitrogen moieties increased the surface energy and hydrophilicity of PUMA and OSTE-80 polymer which corresponded to an increase of nitrogen to carbon ratios (N/C), as measured by XPS, to provide a conducive environment for cell attachments and proliferation. Under the SEM observation, the surface topography of PUMA and OSTE-80 polymer showed minimal changes after the plasma treatments. Furthermore, ageing studies showed that plasma-treated PUMA and OSTE-80 polymer had stable hydrophilicity and nitrogen composition during storage in ambient air for 15days. After in vitro cell culture of human umbilical vein endothelial cells (HUVECs) on these surfaces for 24h and 72h, both trypan blue and alamar blue assays indicated that PUMA and OSTE-80 polymer treated with N2 plasma had the highest viability and proliferation. The polar nitrogen moieties, specifically amide groups, encouraged the HUVECs adhesion on the plasma-treated PUMA and OSTE-80 surfaces. Interestingly, PUMA polymer treated with Ar and N2 plasma showed different HUVECs morphology which was spindle and cobblestone-shaped respectively after 72h of incubation. On the contrary, a monolayer of well-spread HUVECs formed on the Ar and N2 plasma-treated OSTE-80 polymers. These variable morphologies observed can be ascribed to the adherence HUVECs on the different elastic moduli of these surfaces whereby further investigation might be needed. Overall, Ar and N2 plasma treatment had successfully altered the surface properties of PUMA and OSTE-80 polymer by increasing its surface energy, hydrophilicity and chemical functionalities to create a biocompatible surface for HUVECs adhesion and proliferation.
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Affiliation(s)
- Tiam Foo Chen
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Malaysia
| | - Kim Shyong Siow
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Malaysia.
| | - Pei Yuen Ng
- Faculty of Pharmacy, Universiti Kebangsaan Malaysia, Kuala Lumpur 50300, Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Malaysia
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Abstract
During pre-mRNA splicing events, introns are removed from the pre-mRNA, and the remaining exons are connected together to form a single continuous molecule. Alternative splicing is a common mechanism for the regulation of gene expression in eukaryotes. More than 90% of human genes are known to undergo alternative splicing. The most common type of alternative splicing is exon skipping, which is also known as cassette exon. Other known alternative splicing events include alternative 5' splice sites, alternative 3' splice sites, intron retention, and mutually exclusive exons. Alternative splicing events are controlled by regulatory proteins responsible for both positive and negative regulation. In this review, we focus on neuronal splicing regulators and discuss several notable regulators in depth. In addition, we have also included an example of splicing regulation mediated by the RBFox protein family. Lastly, as previous studies have shown that a number of splicing factors are associated with neuronal diseases such as Alzheime's disease (AD) and Autism spectrum disorder (ASD), here we consider their importance in neuronal diseases wherein the underlying mechanisms have yet to be elucidated.
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Affiliation(s)
- Nor Hakimah Ab Hakim
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia
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Buyong MR, Larki F, Aziz NA, Yunas J, Hamzah AA, Majlis BY. Dielectrophoretic force response for Lactobacillus Casei. 2016 IEEE International Conference on Semiconductor Electronics (ICSE) 2016. [DOI: 10.1109/smelec.2016.7573585] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/01/2023]
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Buyong MR, Larki F, Takamura Y, Aziz NA, Yunas J, Hamzah AA, Majlis BY. Implementing the concept of dielectrophoresis in glomerular filtration of human kidneys. 2016 IEEE International Conference on Semiconductor Electronics (ICSE) 2016. [DOI: 10.1109/smelec.2016.7573584] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/02/2023]
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Mukhtar NJ, Aziz NA, Bais B, Majlis BY. Circuit modeling of Surface Acoustic Wave (SAW) resonator with circular geometry. 2016 IEEE International Conference on Semiconductor Electronics (ICSE) 2016. [DOI: 10.1109/smelec.2016.7573590] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/01/2023]
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Chen TF, Siow KS, Ng PY, Nai MH, Lim CT, Yeop Majlis B. Ageing properties of polyurethane methacrylate and off-stoichiometry thiol-ene polymers after nitrogen and argon plasma treatment. J Appl Polym Sci 2016. [DOI: 10.1002/app.44107] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/27/2023]
Affiliation(s)
- Tiam Foo Chen
- Institute of Microengineering and Nanoelectronics; Universiti Kebangsaan Malaysia; Bangi Selangor 43600 Malaysia
| | - Kim Shyong Siow
- Institute of Microengineering and Nanoelectronics; Universiti Kebangsaan Malaysia; Bangi Selangor 43600 Malaysia
| | - Pei Yuen Ng
- Faculty of Pharmacy; Universiti Kebangsaan Malaysia; Kuala Lumpur 50300 Malaysia
| | - Mui Hoon Nai
- Mechanobiology Institute, National University of Singapore; 5A Engineering Drive 1 Singapore 117411 Singapore
| | - Chwee Teck Lim
- Mechanobiology Institute, National University of Singapore; 5A Engineering Drive 1 Singapore 117411 Singapore
- Department of Biomedical Engineering; National University of Singapore; 9 Engineering Drive 1 Singapore 117575 Singapore
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics; Universiti Kebangsaan Malaysia; Bangi Selangor 43600 Malaysia
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41
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Sulaiman NH, Ghazali MJ, Majlis BY, Yunas J, Razali M. Superparamagnetic calcium ferrite nanoparticles synthesized using a simple sol-gel method for targeted drug delivery. Biomed Mater Eng 2016; 26 Suppl 1:S103-10. [PMID: 26405858 DOI: 10.3233/bme-151295] [Citation(s) in RCA: 31] [Impact Index Per Article: 3.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]
Abstract
The calcium ferrite nano-particles (CaFe2O4 NPs) were synthesized using a sol-gel method for targeted drug delivery application. The proposed nano-particles were initially prepared by mixing calcium and iron nitrates that were added with citric acid in order to prevent agglomeration and subsequently calcined at a temperature of 550°C to obtain small particle size. The prepared nanoparticles were characterized by using an XRD (X-ray diffraction), which revealed the configuration of orthorhombic structures of the CaFe2O4 nano-particles. A crystallite size of ~13.59 nm was obtained using a Scherer's formula. Magnetic analysis using a VSM (Vibrating Sample Magnetometer analysis), revealed that the synthesized particles exhibited super-paramagnetic behavior having magnetization saturation of approximately 88.3emu/g. Detailed observation via the scanning electron microscopy (SEM) showed the calcium ferrite nano-particles were spherical in shape.
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Affiliation(s)
- N H Sulaiman
- Department of Mechanical and Materials Engineering, Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, 43600 Bangi, Malaysia
| | - M J Ghazali
- Department of Mechanical and Materials Engineering, Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, 43600 Bangi, Malaysia.,Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 Bangi, Malaysia
| | - B Y Majlis
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 Bangi, Malaysia
| | - J Yunas
- Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 Bangi, Malaysia
| | - M Razali
- Department of Mechanical and Materials Engineering, Faculty of Engineering and Built Environment, Universiti Kebangsaan Malaysia, 43600 Bangi, Malaysia.,Department of Management office, Faculty of Dentistry, Universiti Kebangsaan Malaysia, 43600 Bangi, Malaysia
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Alvankarian J, Majlis BY. Tunable Microfluidic Devices for Hydrodynamic Fractionation of Cells and Beads: A Review. Sensors (Basel) 2015; 15:29685-701. [PMID: 26610519 PMCID: PMC4701354 DOI: 10.3390/s151129685] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/03/2015] [Revised: 10/26/2015] [Accepted: 11/05/2015] [Indexed: 01/05/2023]
Abstract
The adjustable microfluidic devices that have been developed for hydrodynamic-based fractionation of beads and cells are important for fast performance tunability through interaction of mechanical properties of particles in fluid flow and mechanically flexible microstructures. In this review, the research works reported on fabrication and testing of the tunable elastomeric microfluidic devices for applications such as separation, filtration, isolation, and trapping of single or bulk of microbeads or cells are discussed. Such microfluidic systems for rapid performance alteration are classified in two groups of bulk deformation of microdevices using external mechanical forces, and local deformation of microstructures using flexible membrane by pneumatic pressure. The main advantage of membrane-based tunable systems has been addressed to be the high capability of integration with other microdevice components. The stretchable devices based on bulk deformation of microstructures have in common advantage of simplicity in design and fabrication process.
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Affiliation(s)
- Jafar Alvankarian
- Institute of Microengineering and Nanoelectronics, National University of Malaysia (UKM), 43600 Bangi, Selangor, Malaysia.
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, National University of Malaysia (UKM), 43600 Bangi, Selangor, Malaysia.
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Abstract
This paper discusses the process technology to fabricate multilayer-Polydimethylsiloxane (PDMS) based microfluidic device for bio-particles concentration detection in Lab-on-chip system. The micro chamber and the fluidic channel were fabricated using standard photolithography and soft lithography process. Conventional method by pouring PDMS on a silicon wafer and peeling after curing in soft lithography produces unspecific layer thickness. In this work, a multilayer-PDMS method is proposed to produce a layer with specific and fixed thickness micron size after bonding that act as an optimum light path length for optimum light detection. This multilayer with precise thickness is required since the microfluidic is integrated with optical transducer. Another significant advantage of this method is to provide excellent bonding between multilayer-PDMS layer and biocompatible microfluidic channel. The detail fabrication process were illustrated through scanning electron microscopy (SEM) and discussed in this work. The optical signal responses obtained from the multilayer-PDMS microfluidic channel with integrated optical transducer were compared with those obtained with the microfluidic channel from a conventional method. As a result, both optical signal responses did not show significant differences in terms of dispersion of light propagation for both media.
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Affiliation(s)
- Marianah Masrie
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Selangor, Malaysia Faculty of Electrical Engineering, Universiti Teknologi Mara Shah Alam, Selangor, Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Selangor, Malaysia
| | - Jumril Yunas
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Selangor, Malaysia
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Buyong MR, Larki F, Faiz MS, Hamzah AA, Yunas J, Majlis BY. A tapered aluminium microelectrode array for improvement of dielectrophoresis-based particle manipulation. Sensors (Basel) 2015; 15:10973-90. [PMID: 25970255 PMCID: PMC4481918 DOI: 10.3390/s150510973] [Citation(s) in RCA: 32] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/16/2014] [Revised: 03/18/2015] [Accepted: 03/20/2015] [Indexed: 12/15/2022]
Abstract
In this work, the dielectrophoretic force (FDEP) response of Aluminium Microelectrode Arrays with tapered profile is investigated through experimental measurements and numerical simulations. A standard CMOS processing technique with a step for the formation of a tapered profile resist is implemented in the fabrication of Tapered Aluminium Microelectrode Arrays (TAMA). The FDEP is investigated through analysis of the Clausius-Mossotti factor (CMF) and cross-over frequency (fxo). The performance of TAMA with various side wall angles is compared to that of microelectrodes with a straight cut sidewall profile over a wide range of frequencies through FEM numerical simulations. Additionally, electric field measurement (EFM) is performed through scanning probe microscopy (SPM) in order to obtain the region of force focus in both platforms. Results showed that the tapered profile microelectrodes with angles between 60° and 70° produce the highest electric field gradient on the particles. Also, the region of the strongest electric field in TAMA is located at the bottom and top edge of microelectrode while the strongest electric field in microelectrodes with straight cut profile is found at the top corner of the microelectrode. The latter property of microelectrodes improves the probability of capturing/repelling the particles at the microelectrode’s side wall.
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Affiliation(s)
- Muhamad Ramdzan Buyong
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia.
| | - Farhad Larki
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia.
| | - Mohd Syafiq Faiz
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia.
| | - Azrul Azlan Hamzah
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia.
| | - Jumrail Yunas
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia.
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia.
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Rahim RA, Nordin AN, Malik NA, Bais B, Majlis BY. Fabrication of monolithic Wheatstone bridge circuit for piezoresistive microcantilever sensor. 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) 2015. [DOI: 10.1109/dtip.2015.7160998] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/02/2023]
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Aziz NA, Bais B, Buyong MR, Majlis BY, Nordin AN. Optimization of focusing SAW propagation in piezoelectric medium for microfluidic applications. 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) 2015. [DOI: 10.1109/dtip.2015.7161011] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/02/2023]
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Alvankarian J, Majlis BY. Exploiting the oxygen inhibitory effect on UV curing in microfabrication: a modified lithography technique. PLoS One 2015; 10:e0119658. [PMID: 25747514 PMCID: PMC4351881 DOI: 10.1371/journal.pone.0119658] [Citation(s) in RCA: 19] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/01/2014] [Accepted: 01/20/2015] [Indexed: 11/25/2022] Open
Abstract
Rapid prototyping (RP) of microfluidic channels in liquid photopolymers using standard lithography (SL) involves multiple deposition steps and curing by ultraviolet (UV) light for the construction of a microstructure layer. In this work, the conflicting effect of oxygen diffusion and UV curing of liquid polyurethane methacrylate (PUMA) is investigated in microfabrication and utilized to reduce the deposition steps and to obtain a monolithic product. The conventional fabrication process is altered to control for the best use of the oxygen presence in polymerization. A novel and modified lithography technique is introduced in which a single step of PUMA coating and two steps of UV exposure are used to create a microchannel. The first exposure is maskless and incorporates oxygen diffusion into PUMA for inhibition of the polymerization of a thin layer from the top surface while the UV rays penetrate the photopolymer. The second exposure is for transferring the patterns of the microfluidic channels from the contact photomask onto the uncured material. The UV curing of PUMA as the main substrate in the presence of oxygen is characterized analytically and experimentally. A few typical elastomeric microstructures are manufactured. It is demonstrated that the obtained heights of the fabricated structures in PUMA are associated with the oxygen concentration and the UV dose. The proposed technique is promising for the RP of molds and microfluidic channels in terms of shorter processing time, fewer fabrication steps and creation of microstructure layers with higher integrity.
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Affiliation(s)
- Jafar Alvankarian
- Institute of Microengineering and Nanoelectronics, National University of Malaysia, Bangi, Selangor, Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics, National University of Malaysia, Bangi, Selangor, Malaysia
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Abstract
This paper studies parameters which affect the pore size diameter of a silicon membrane. Electrochemical etching is performed in characterise the parameter involved in this process. The parameter has been studied is volume ratio of hydrofluoric acid (HF) and ethanol as an electrolyte aqueous for electrochemical etch. This electrolyte aqueous solution has been mixed between HF and ethanol with volume ratio 3:7, 5:5, 7:3 and 9:1. As a result, the higher volume of HF in this electrolyte gives the smallest pore size diameter compared to the lower volume of HF. These samples have been dipped into HF and ethanol electrolyte aqueous with supplied 25 mA/cm2 current density for 20, 30, 40, and 50 minutes. The samples will inspect under Scanning Electron Microscope (SEM) to execute the pore formations on silicon membrane surface.
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Affiliation(s)
- Norhafizah Burham
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia 43600 Bangi, Selangor, Malaysia Faculty of Electrical Engineering, Universiti Teknologi Mara (UiTM), 40450, Shah Alam, Selangor, Malaysia
| | - Azrul Azlan Hamzah
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia 43600 Bangi, Selangor, Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia 43600 Bangi, Selangor, Malaysia
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Dee CF, Chong SK, Rahman SA, Omar FS, Huang NM, Majlis BY, Salleh MM. Hierarchical Si/ZnO trunk-branch nanostructure for photocurrent enhancement. Nanoscale Res Lett 2014; 9:469. [PMID: 25246872 PMCID: PMC4160322 DOI: 10.1186/1556-276x-9-469] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/21/2014] [Accepted: 08/26/2014] [Indexed: 06/03/2023]
Abstract
Hierarchical Si/ZnO trunk-branch nanostructures (NSs) have been synthesized by hot wire assisted chemical vapor deposition method for trunk Si nanowires (NWs) on indium tin oxide (ITO) substrate and followed by the vapor transport condensation (VTC) method for zinc oxide (ZnO) nanorods (NRs) which was laterally grown from each Si nanowires (NWs). A spin coating method has been used for zinc oxide (ZnO) seeding. This method is better compared with other group where they used sputtering method for the same process. The sputtering method only results in the growth of ZnO NRs on top of the Si trunk. Our method shows improvement by having the growth evenly distributed on the lateral sides and caps of the Si trunks, resulting in pine-leave-like NSs. Field emission scanning electron microscope image shows the hierarchical nanostructures resembling the shape of the leaves of pine trees. Single crystalline structure for the ZnO branch grown laterally from the crystalline Si trunk has been identified by using a lattice-resolved transmission electron microscope. A preliminary photoelectrochemical (PEC) cell testing has been setup to characterize the photocurrent of sole array of ZnO NR growth by both hydrothermal-grown (HTG) method and VTC method on ITO substrates. VTC-grown ZnO NRs showed greater photocurrent effect due to its better structural properties. The measured photocurrent was also compared with the array of hierarchical Si/ZnO trunk-branch NSs. The cell with the array of Si/ZnO trunk-branch NSs revealed four-fold magnitude enhancement in photocurrent density compared with the sole array of ZnO NRs obtain from VTC processes.
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Affiliation(s)
- Chang Fu Dee
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), Bangi 43600, Selangor, Malaysia
| | - Su Kong Chong
- Low Dimensional Materials Research Centre, Department of Physics, University of Malaya, 50603 Kuala Lumpur, Malaysia
| | - Saadah Abdul Rahman
- Low Dimensional Materials Research Centre, Department of Physics, University of Malaya, 50603 Kuala Lumpur, Malaysia
| | - Fatin Saiha Omar
- Low Dimensional Materials Research Centre, Department of Physics, University of Malaya, 50603 Kuala Lumpur, Malaysia
| | - Nay Ming Huang
- Low Dimensional Materials Research Centre, Department of Physics, University of Malaya, 50603 Kuala Lumpur, Malaysia
| | - Burhanuddin Yeop Majlis
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), Bangi 43600, Selangor, Malaysia
| | - Muhamad Mat Salleh
- Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), Bangi 43600, Selangor, Malaysia
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Aziz NA, Bais B, Buyong MR, Majlis BY, Nordin AN. FEM analysis of wavelength effects in piezoelectric substrate. 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014) 2014. [DOI: 10.1109/smelec.2014.6920846] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/01/2023]
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