Skin-Inspired Capacitive Flexible Tactile Sensor with an Asymmetric Structure for Detecting Directional Shear Forces

Flexible pressure sensors based on micro-/nanostructures can be integrated into robots to achieve sensitive tactile perception. However, conventional symmetric structures, such as pyramids or hemispheres, can sense only the magnitude of a force and not its direction. In this study, a capacitive flexible tactile sensor inspired by skin structures and based on an asymmetric microhair structure array to perceive directional shear force is designed. Asymmetric microhair structures are obtained by two-photon polymerization (TPP) and replication. Owing to the features of asymmetric microhair structures, different shear force directions result in different deformations. The designed device can determine the directions of both static and dynamic shear forces. Additionally, it exhibits large response scales ranging from 30 Pa to 300 kPa and maintains high stability even after 5000 cycles; the final relative capacitive change (ΔC/C0 ) is <2.5%. This flexible tactile sensor has the potential to improve the perception and manipulation ability of dexterous hands and enhance the intelligence of robots.

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers

The presence of strong ambient vibrations could have a negative impact on applications such as high precision inertial navigation and tilt measurement due to the vibration rectification error (VRE) of the accelerometer. In this paper, we investigate the origins of the VRE using a self-developed MEMS accelerometer equipped with an area-variation-based capacitive displacement transducer. Our findings indicate that the second-order nonlinearity coefficient is dependent on the frequency but the VRE remains constant when the displacement amplitude of the excitation is maintained at a constant level. This frequency dependence of nonlinearity is a result of several factors coupling with each other during signal conversion from acceleration to electrical output signal. These factors include the amplification of the proof mass's amplitude as the excitation frequency approaches resonance, the nonlinearity in capacitance-displacement conversion at larger displacements caused by the fringing effect, and the offset of the mechanical suspension's equilibrium point from the null position of the differential capacitance electrodes. Through displacement transducer and damping optimization, the second-order nonlinearity coefficient is greatly reduced from mg/g2 to μg/g2.

Highly Sensitive Capacitive Fiber Pressure Sensors Enabled by Electrode and Dielectric Layer Regulation

Capacitive pressure sensors play an important role in the field of flexible electronics. Despite significant advances in two-dimensional (2D) soft pressure sensors, one-dimensional (1D) fiber electronics are still struggling. Due to differences in structure, the theoretical research of 2D sensors has difficulty guiding the design of 1D sensors. The multiple response factors of 1D sensors and the capacitive response mechanism have not been explored. Fiber sensors urgently need a tailor-made theoretical research and development path. In this regard, we established a fiber pressure-sensing platform using a coaxial wet spinning process. Aiming at the two problems of the soft electrode modulus and dielectric layer thickness, the conclusions are drawn from three aspects: model analysis, experimental verification, and formula derivation. It makes up some theoretical blanks of capacitive fiber pressure sensors. Through the self-regulation of these two factors without a complex structural design, the sensitivity can be significantly improved. This provides a great reference for the design and development of fiber pressure sensors. Besides, taking advantage of the scalability and easy integration of 1D electronics, multipoint sensors prepared by fibers have verified their application potential in health monitoring, human-machine interface, and motion behavior analysis.

Capacitive and Diffusive Contributions in Supercapacitors and Batteries: A Critique of b-Value and the ν-ν1/2 Model

Electrochemical energy storage devices run on two fundamentally different processes: charge storage across the double layer and redox reactions. A satisfactory understanding of the underlying mechanism is only possible once the two contributions are deconvoluted. The b-value and the ν -ν1/2 model are two familiar steps undertaken to separate these contributions but as it is shown here both metrics are flawed, prone to misinterpretation, frequently invoked without attention to their limitations, and in need of re-examination. After exploring these flaws through the lens of a diverse set of cyclic voltammetry data we opine that use of the b-value be discouraged on account of subjectivity inherent to the metric, and the ν -ν1/2 model be replaced by the one proposed here. This new model ultimately reduces the root mean square error significantly and provides a robust tool for the evaluation of energy storage devices.

High-Power-Efficiency Readout Circuit Employing Average Capacitance-to-Voltage Converter for Micro-Electro-Mechanical System Capacitive Accelerometers

A capacitance-to-voltage converter (CVC) is proposed in this paper and applied to a readout circuit for a micro-electro-mechanical system (MEMS) accelerometer to improve the power efficiency. In a traditional readout circuit, the front-end CVC has to operate at a high sampling frequency to resist thermal noise deterioration due to the large parasitic capacitance introduced by the mechanical sensing element. Thus, the back-end analog-to-digital converter (ADC) also has to operate at a high sampling frequency to avoid noise aliasing when sampling the output signal of the CVC, which leads to high power consumption. The average CVC technique is proposed in this paper to reduce the sampling frequency requirement of the back-end ADC and thus reduce the power consumption. Both the traditional readout circuit and the proposed readout circuit are simulated with a commercial 0.18 μm BCD process. The simulation results show that noise aliasing occurs, and the noise power spectral density (PSD) of the traditional readout circuit increases by 12 dB when the sampling frequency of back-end ADC is reduced by 24 dB. However, in the proposed readout circuit, a noise aliasing effect does not occur. Moreover, the proposed readout circuit reduces the power consumption by 53% without thermal noise deterioration. In addition, the proposed CVC circuits are fabricated in an 0.18 μm BCD process, and the test results show that the presented readout circuit based on the average CVC technique can obtain better performance than the traditional CVC-based readout circuit.

Magnetically Triggered Interplay of Capacitive and Diffusion Contributions for Boosted Supercapacitor Performance

The chemistry involved in supercapacitors in terms of their mechanistic contributions leading to improved specific capacity will aid in easy commercialization. The main contributory factors in a supercapacitor are either capacitive (non-diffusion controlled) or ion-diffusion behavior, which results in enhanced charge-discharge characteristics of a supercapacitor reflected in its power density, whereas ion-diffusion behavior will lead to the enhanced energy density of a supercapacitor. In this context, the present article attempts to understand the use of external magnetic fields, leading to the interplay between capacitive and ion-diffusion behavior in a high-performance supercapacitor. The model system chosen in the present study, nickel cobalt copper carbonate hydroxide (NiCoCuCH), can effectively address the interplay between capacitive and ion diffusion contributions by varying total magnetic effects involving magnetic dilution. The magneto-enhancement of the electrodes nickel cobalt copper carbonate hydroxide (NiCoCuCH) and aluminum-doped nickel cobalt copper carbonate hydroxide (Al-NiCoCuCH) was demonstrated under the magnetic field from 0 to 250 mT. Both NiCoCuCH and Al-NiCoCuCH show dominant non-diffusion-controlled (capacitive) and diffusion-controlled behavior as a function of the applied external magnetic field. Under the influence of the external magnetic field, ferromagnetic coupling between metal-oxygen-metal centers via oxygen 2p orbitals enhances, leading to a facile redox pathway. To further control the charge-discharge behavior of the electrode via the interplay between diffusive and capacitive, a non-magnetic ion, Al3+, was doped into the bare metal carbonate hydroxide crystal lattice. The Al3+ ion not only alters the crystal symmetry but also restricts the alignment of the magnetic domains in the electrode, leading to a sluggish redox pathway, effectively increasing the capacitive contribution, and leading to improved charge-discharge characteristics at the expense of energy density. We have constructed an asymmetric device with the best-performing (110 mT) NiCoCuCH electrode as a positive electrode and activated carbon as a negative electrode. The NiCoCuCH/AC ASC device at 110 mT has the largest specific capacity (1100 C g-1 at 2 A g-1) at 110 mT, leading to a high energy density (250 W h kg-1) and a power density (1.7 kW kg-1) of the electrode.

Highly Sensitive Fiber Pressure Sensors over a Wide Pressure Range Enabled by Resistive-Capacitive Hybrid Response

Soft capacitive pressure sensors with high performance are becoming increasingly in demand in the emerging flexible wearable field. While capacitive fiber pressure sensors have achieved high sensitivity, their sensitivity range is limited to low-pressure levels. As fiber sensors typically require preloading and fixation, this narrow range of high sensitivity poses a challenge for practical applications. To overcome this limitation, the study proposes resistive-capacitive hybrid response fiber pressure sensors (HFPSs) with three-layer core-sheath structures. The trigger and sensitivity enhancement mechanisms of the hybrid response are determined through model analysis and experimental verification. By adjustment of the sensitivity enhancement range of the hybrid response, the sensitivity attenuation of HFPSs is alleviated significantly. The obtained results demonstrate that HFPSs have excellent characteristics such as fast response, low hysteresis, wide response frequency, small signal drift, and good durability. The hybrid response enhances the practical sensitivity of HFPSs for various applications. With enhanced sensitivity, HFPSs can effectively monitor pulse signals at preloads ranging from 0 to 22.7 kPa. This wide range of preloads improves the fault tolerance of pulse monitoring and expands the potential application scenarios of fiber pressure sensors.

Rapid Prototyping Flexible Capacitive Pressure Sensors Based on Porous Electrodes

Flexible pressure sensors are widely applied in tactile perception, fingerprint recognition, medical monitoring, human-machine interfaces, and the Internet of Things. Among them, flexible capacitive pressure sensors have the advantages of low energy consumption, slight signal drift, and high response repeatability. However, current research on flexible capacitive pressure sensors focuses on optimizing the dielectric layer for improved sensitivity and pressure response range. Moreover, complicated and time-consuming fabrication methods are commonly applied to generate microstructure dielectric layers. Here, we propose a rapid and straightforward fabrication approach to prototyping flexible capacitive pressure sensors based on porous electrodes. Laser-induced graphene (LIG) is produced on both sides of the polyimide paper, resulting in paired compressible electrodes with 3D porous structures. When the elastic LIG electrodes are compressed, the effective electrode area, the relative distance between electrodes, and the dielectric property vary accordingly, thereby generating a sensitive pressure sensor in a relatively large working range (0-9.6 kPa). The sensitivity of the sensor is up to 7.71%/kPa^-1, and it can detect pressure as small as 10 Pa. The simple and robust structure allows the sensor to produce quick and repeatable responses. Our pressure sensor exhibits broad potential in practical applications in health monitoring, given its outstanding comprehensive performance combined with its simple and quick fabrication method.

Multi-Transduction-Mechanism Technology, an Emerging Approach to Enhance Sensor Performance

Conventional sensor systems employ single-transduction technology where they respond to an input stimulus and transduce the measured parameter into a readable output signal. As such, the technology can only provide limited corresponding data of the detected parameters due to relying on a single transformed output signal for information acquisition. This limitation commonly results in the need for utilizing sensor array technology to detect targeted parameters in complex environments. Multi-transduction-mechanism technology, on the other hand, may combine more than one transduction mechanism into a single structure. By employing this technology, sensors can be designed to simultaneously distinguish between different input signals from complex environments for greater degrees of freedom. This allows a multi-parameter response, which results in an increased range of detection and improved signal-to-noise ratio. In addition, utilizing a multi-transduction-mechanism approach can achieve miniaturization by reducing the number of required sensors in an array, providing further miniaturization and enhanced performance. This paper introduces the concept of multi-transduction-mechanism technology by exploring different candidate combinations of fundamental transduction mechanisms such as piezoresistive, piezoelectric, triboelectric, capacitive, and inductive mechanisms.

Recent Development of Mechanical Stimuli Detectable Sensors, Their Future, and Challenges: A Review

By virtue of their wide applications in transportation, healthcare, smart home, and security, development of sensors detecting mechanical stimuli, which are many force types (pressure, shear, bending, tensile, and flexure) is an attractive research direction for promoting the advancement of science and technology. Sensing capabilities of various force types based on structural design, which combine unique structure and materials, have emerged as a highly promising field due to their various industrial applications in wearable devices, artificial skin, and Internet of Things (IoT). In this review, we focus on various sensors detecting one or two mechanical stimuli and their structure, materials, and applications. In addition, for multiforce sensing, sensing mechanism are discussed regarding responses in external stimuli such as piezoresistive, piezoelectric, and capacitance phenomena. Lastly, the prospects and challenges of sensors for multiforce sensing are discussed and summarized, along with research that has emerged.

Paper-Based Humidity Sensors as Promising Flexible Devices, State of the Art, Part 2: Humidity-Sensor Performances

This review article covers all types of paper-based humidity sensor, such as capacitive, resistive, impedance, fiber-optic, mass-sensitive, microwave, and RFID (radio-frequency identification) humidity sensors. The parameters of these sensors and the materials involved in their research and development, such as carbon nanotubes, graphene, semiconductors, and polymers, are comprehensively detailed, with a special focus on the advantages/disadvantages from an application perspective. Numerous technological/design approaches to the optimization of the performances of the sensors are considered, along with some non-conventional approaches. The review ends with a detailed analysis of the current problems encountered in the development of paper-based humidity sensors, supported by some solutions.

Laser-Induced Graphene Capacitive Killing of Bacteria

Laser-induced graphene (LIG) is a method of generating a foam-like conformal carbon layer of porous graphene on many types of carbon-based surfaces. This electrically conductive material has been shown to be useful in many applications including environmental technology and includes low fouling and antimicrobial surfaces and can address persistent environmental challenges spawned by bacterial and viral contaminates. Here, we show that a single film of LIG stores charge when an electrical current is applied and dissipates charge when the current is stopped, which results in electricidal surface antibacterial potency. The amount of accumulated and dissipated charge on a single strip of LIG was quantified with an electrometer by generating LIG on both sides of a nonconducting polyimide film, which showed up to 65 pC of charge when the distance between the surfaces was 94 μm corresponding to an areal capacitance of 1.63 pF/cm². We further corroborate the stored charge decay of a single LIG strip with bacteria death via direct electrical contact. Antimicrobial rates decreased with the same monotonic pattern as the loss of charge from the LIG film (i.e., AR ∼ 97% 0 s after voltage source disconnection vs AR ∼ 21% 90 s after disconnection) showing bacterial death as a function of delayed LIG exposure time after applied voltage disconnection. In terms of energy efficiency, this translates to an increased bacteria potency of ∼170% for the equivalent energy costs as that previously estimated. Finally, we present a mechanistic explanation for the capacitive behavior and the electricidal effects for a single plate of LIG.

Institution of Metal-Organic Frameworks as a Highly Sensitive and Selective Layer In-Field Integrated Soil-Moisture Capacitive Sensor

The ongoing global industrialization along with the notable world population growth is projected to challenge the global environment as well as pose greater pressure on water and food needs. Foreseeably, an improved irrigation management system is essential and the quest for refined chemical sensors for soil-moisture monitoring is of tremendous importance. Nevertheless, the persisting challenge is to design and construct stable materials with the requisite sensitivity, selectivity, and high performance. Here, we report the introduction of porous metal-organic frameworks (MOFs), as the receptor layer, in capacitive sensors to efficiently sense moisture in two types of soil. Namely, our study unveiled that Cr-soc-MOF-1 offers the best sensitivity (≈24,000 pF) among the other tested MOFs for any given range of soil-moisture content, outperforming several well-known oxide materials. The corresponding increase in the sensitivities for tested MOFs at 500 Hz are ≈450, ≈200, and ≈30% for Cr-soc-MOF-1, Al-ABTC-soc-MOF, and Zr-fum-fcu-MOF, respectively. Markedly, Cr-soc-MOF-1, with its well-known water capacity, manifests an excellent sensitivity of ≈450% in clayey soil, and the analogous response time was 500 s. The noted unique sensing properties of Cr-soc-MOF-1 unveils the great potential of MOFs for soil-moisture sensing application.

Wide-Range Flexible Capacitive Pressure Sensors Based on Dielectrics with Various Porosity

Wide-range flexible pressure sensors are in difficulty in research while in demand in application. In this paper, a wide-range capacitive flexible pressure sensor is developed with the foaming agent ammonium bicarbonate (NH₄HCO₃). By controlling the concentration of NH₄HCO₃ doped in the polydimethylsiloxane (PDMS) and repeating the curing process, pressure-sensitive dielectrics with various porosity are fabricated to expand the detection range of the capacitive pressure sensor. The shape and the size of each dielectric is defined by the 3D printed mold. To improve the dielectric property of the dielectric, a 1% weight ratio of multi-walled carbon nanotubes (MWCNTs) are doped into PDMS liquid. Besides that, a 5% weight ratio of MWCNTs is dispersed into deionized water and then coated on the electrodes to improve the contact state between copper electrodes and the dielectric. The laminated dielectric layer and two electrodes are assembled and tested. In order to verify the effectiveness of this design, some reference devices are prepared, such as sensors based on the dielectric with uniform porosity and a sensor with common copper electrodes. According to the testing results of these sensors, it can be seen that the sensor based on the dielectric with various porosity has higher sensitivity and a wider pressure detection range, which can detect the pressure range from 0 kPa to 1200 kPa and is extended to 300 kPa compared with the dielectric with uniform porosity. Finally, the sensor is applied to the fingerprint, finger joint, and knee bending test. The results show that the sensor has the potential to be applied to human motion detection.

An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode

In this paper, we presented a novel electrostatic Roll/Pitch MEMS gyroscope with in-plane drive mode and out-of-plane sense mode. The proposed structure is developed based on a tuning fork gyroscope with decoupled sense mass on each tine that control the sense out-of-plane frequency. A multi-height deep reactive ion etching (DRIE) fabrication process was utilized to achieve and enhance decoupling between the drive and sense modes. We presented our design methodology followed by an analytical and finite element (FEM) model. Our experimental results showed a good match between the analytical model and those obtained experimentally, from the drive and sense oscillation frequencies. Our characterization setup used a custom made application specific integrated circuit (ASIC) for characterization and was able to achieve ARW of 0.2 deg/rt-h, a bias instability 5.5 deg/h, and scale factor non-linearity (SFNL) 156 ppm FS.

Carbon Black/PDMS Based Flexible Capacitive Tactile Sensor for Multi-Directional Force Sensing

Flexible sensing tends to be widely exploited in the process of human-computer interactions of intelligent robots for its contact compliance and environmental adaptability. A novel flexible capacitive tactile sensor was proposed for multi-directional force sensing, which is based on carbon black/polydimethylsiloxane (PDMS) composite dielectric layer and upper and lower electrodes of carbon nanotubes/polydimethylsiloxane (CNTs/PDMS) composite layer. By changing the ratio of carbon black, the resolution of carbon black/PDMS composite layer increases at 4 wt%, and then decreases, which was explained according to the percolation theory of the conductive particles in the polymer matrix. Mathematical model of force and capacitance variance was established, which can be used to predict the value of the applied force. Then, the prototype with carbon black/PDMS composite dielectric layer was fabricated and characterized. SEM observation was conducted and a ratio was introduced in the composites material design. It was concluded that the resolution of carbon sensor can reach 0.1 N within 50 N in normal direction and 0.2 N in 0-10 N in tangential direction with good stability. Finally, the multi-directional force results were obtained. Compared with the individual directional force results, the output capacitance value of multi-directional force was lower, which indicated the amplitude decrease in capacity change in the normal and tangential direction. This might be caused by the deformation distribution in the normal and tangential direction under multi-directional force.

A Cascaded MEMS Amplitude Demodulator for Large Dynamic Range Application in RF Receiver

An amplitude demodulator with a large dynamic range, based on microelectromechanical systems (MEMS), is proposed in this paper. It is implemented as a cascade of a capacitive and a thermoelectric sensor. Two types of the transducer can improve the measurement range and enhance the overload capacity. This MEMS-based demodulation is realized by utilizing the square law relationship and the low-pass characteristic during the electromechanical and thermoelectric conversion. The fabrication of this device is compatible with the GaAs monolithic microwave integrated circuit (MMIC) process. Experiments show that this MEMS demodulator can realize the direct demodulation of an amplitude modulation (AM) signal with a carrier frequency of 0.35–10 GHz, and cover the power range from 0 to 23 dBm. This MEMS demodulator has the advantages of high power handling capability and zero DC power consumption.

Monitoring Flexions and Torsions of the Trunk via Gyroscope-Calibrated Capacitive Elastomeric Wearable Sensors

Reliable, easy-to-use, and cost-effective wearable sensors are desirable for continuous measurements of flexions and torsions of the trunk, in order to assess risks and prevent injuries related to body movements in various contexts. Piezo-capacitive stretch sensors, made of dielectric elastomer membranes coated with compliant electrodes, have recently been described as a wearable, lightweight and low-cost technology to monitor body kinematics. An increase of their capacitance upon stretching can be used to sense angular movements. Here, we report on a wearable wireless system that, using two sensing stripes arranged on shoulder straps, can detect flexions and torsions of the trunk, following a simple and fast calibration with a conventional tri-axial gyroscope on board. The piezo-capacitive sensors avoid the errors that would be introduced by continuous sensing with a gyroscope, due to its typical drift. Relative to stereophotogrammetry (non-wearable standard system for motion capture), pure flexions and pure torsions could be detected by the piezo-capacitive sensors with a root mean square error of ~8° and ~12°, respectively, whilst for flexion and torsion components in compound movements, the error was ~13° and ~15°, respectively.

Wearable Detection of Trunk Flexions: Capacitive Elastomeric Sensors Compared to Inertial Sensors

Continuous monitoring of flexions of the trunk via wearable sensors could help various types of workers to reduce risks associated with incorrect postures and movements. Stretchable piezo-capacitive elastomeric sensors based on dielectric elastomers have recently been described as a wearable, lightweight and cost-effective technology to monitor human kinematics. Their stretching causes an increase of capacitance, which can be related to angular movements. Here, we describe a wearable wireless system to detect flexions of the trunk, based on such sensors. In particular, we present: (i) a comparison of different calibration strategies for the capacitive sensors, using either an accelerometer or a gyroscope as an inclinometer; (ii) a comparison of the capacitive sensors’ performance with those of the accelerometer and gyroscope; to that aim, the three types of sensors were evaluated relative to stereophotogrammetry. Compared to the gyroscope, the capacitive sensors showed a higher accuracy. Compared to the accelerometer, their performance was lower when used as quasi-static inclinometers but also higher in case of highly dynamic accelerations. This makes the capacitive sensors attractive as a complementary, rather than alternative, technology to inertial sensors.

Highly Sensitive Capacitive Flexible Pressure Sensor Based on a High-Permittivity MXene Nanocomposite and 3D Network Electrode for Wearable Electronics

With the fast development of consumer electronic and artificial intelligence equipment, flexible pressure sensors (FPSs) have become a momentous component in the application of wearable electronic, electronic skin, and human-machine interfacing. The capacitive FPS possesses the merits of low energy consumption, high resolution, and fast dynamic response, so it is ideal for mobile and wearable electronics. However, capacitive FPS is vulnerable to electromagnetic interference and parasitic capacitance due to its low sensitivity. Microstructure or porous dielectric materials have been applied to improve the sensitivity of the capacitive FPS, but the high sensitivity is just limited to a narrow region. In this work, we propose a different strategy that incorporates a high-permittivity MXene nanocomposite dielectric with a 3D network electrode (3DNE) to improve the sensing performance of the capacitive FPS. Thanks to the high permittivity of the dielectric layer and hierarchical deformation of the electrode, the fabricated capacitive FPS exhibits a high sensitivity of 10.2 kPa^-1 in the low pressure range (0-8.6 kPa) and still maintains a relatively high sensitivity of 3.65 kPa^-1 with a near-linear response in a wide pressure range (8.6-100 kPa). In addition, the capacitive FPS can withstand over 20,000 times pressure loads without significant signal damping. Furthermore, the working mechanism of the capacitive FPS is illustrated by the finite element analysis (FEA) method and theoretical calculation. The application potential of the sensor in wearable electronics was demonstrated by human pulse wave monitoring and pressure mapping tests with a 4 × 6 sensor microarray.

Review of Capacitive Touchscreen Technologies: Overview, Research Trends, and Machine Learning Approaches

Touchscreens have been studied and developed for a long time to provide user-friendly and intuitive interfaces on displays. This paper describes the touchscreen technologies in four categories of resistive, capacitive, acoustic wave, and optical methods. Then, it addresses the main studies of SNR improvement and stylus support on the capacitive touchscreens that have been widely adopted in most consumer electronics such as smartphones, tablet PCs, and notebook PCs. In addition, the machine learning approaches for capacitive touchscreens are explained in four applications of user identification/authentication, gesture detection, accuracy improvement, and input discrimination.

3D-Printed Capacitive Sensor Objects for Object Recognition Assays

Object recognition tasks are widely used assays for studying learning and memory in rodents. Object recognition typically involves familiarizing mice with a set of objects and then presenting a novel object or displacing an object to a novel location or context. Learning and memory are inferred by a relative increase in time investigating the novel/displaced object. These tasks are in widespread use, but there are many inconsistencies in the way they are conducted across labs. Two major contributors to this are the lack of consistency in the method of measuring object investigation and the lack of standardization of the objects that are used. Current video-based automated algorithms can often be unreliable whereas manual scoring of object investigation is time consuming, tedious, and more subjective. To resolve these issues, we sought to design and implement 3D-printed objects that can be standardized across labs and use capacitive sensing to measure object investigation. Using a 3D printer, conductive filament, and low-cost off-the-shelf components, we demonstrate that employing 3D-printed capacitive touch objects is a reliable and precise way to perform object recognition tasks. Ultimately, this approach will lead to increased standardization and consistency across labs, which will greatly improve basic and translational research into learning and memory mechanisms.

Designing Tunable Capacitive Pressure Sensors Based on Material Properties and Microstructure Geometry

Rationally designed pressure sensors for target applications have been in increasing demand. Capacitive pressure sensors with microstructured dielectrics demonstrate a high capability of meeting this demand due to their wide versatility and high tunability by manipulating dielectric layer material and microstructure geometry. However, to streamline the design and fabrication of desirable sensors, a better understanding of how material microstructure and properties of the dielectric layer affect performance is vital. The ability to predict trends in sensor design and performance simplifies the process of designing and fabricating sensors for various applications. A series of equations are presented that can be used to predict trends in initial capacitance, capacitance change, and sensitivity based on dielectric constant and compressive modulus of the dielectric material and base length, interstructural separation, and height of the dielectric layer microstructures. The efficacy of this model has been experimentally and computationally confirmed. The model was then used to illuminate, qualitatively and quantitatively, the relationships between these key material properties and microstructure geometries. Finally, this model demonstrates high tunability and simple implementation for predictive sensor performance for a wide range of designs to help meet the growing demand for highly specialized sensors.

Capacitive Based Micromachined Resonators for Low Level Mass Detection

Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array integration make mass loading a potential mechanism for electronic nose applications. This paper investigates the mass sensing characteristics of progressive capacitive based micromachined resonators as potential candidates for volatile organic compound detection where also there is a need for miniaturized array configuration. In this paper, a detailed investigative review of the major three geometric designs of capacitive based micromachined resonators, namely, the microcantilever, the microbridge and the clamped membrane sensors is performed. Although many reviews are present in literature regarding mass sensors, however there is a gap in the literature regarding the common capacitive based micromachined mass sensors. This research gives a review on the foundation for capacitive based micromachined mass sensors while highlighting the potential capabilities of each geometric design to be developed further. Moreover, this paper also introduces the advancements based on the geometric designs of the capacitive based micromachined mass sensors. An in-depth analysis is done for each geometric design, to identify the critical design parameters, which affect the sensors' performances. Furthermore, the theoretically achievable mass sensitivity for each capacitive based micromachined mass sensor is modeled and analyzed using finite element analysis with mass variation in the picogram range. Finally, a critical analysis is done on the sensor sensitivities and further discussed in detail wherein each design is compared to each other and its current advances. Additionally, an insight to the advantages and disadvantages associated with each simulated geometry and its different advances are given. The results of the investigative review and analysis indicate that the sensitivities of the capacitive based micromachined sensors are dependent not only on the material composition of the devices but also on the varying degrees of clamping between the sensor geometries. In essence, the paper provides future research the groundwork to choose proper candidate geometry for a capacitive based micromachined mass sensor, with its several advantages over other mass sensors, based on the needed application.

Flexible Capacitive Humidity Sensors Based on Ionic Conductive Wood-Derived Cellulose Nanopapers

With the growing requirements for the renewability and sustainability of electronic products, environmentally friendly cellulose-based materials have attracted immense research interests and gained increasing prominence for electronic devices. Humidity sensors play an essential role in industries, agriculture, climatology, medical services, and daily life. Here, for the first time, we fabricate capacitive humidity sensors based on ionic conductive wood-derived cellulose nanopapers (WCNs). The WCN-based humidity sensors exhibited ultrahigh sensitivity, fast response, small hysteresis, and more importantly, a wide working range of relative humidity (RH). The sensors showed >10⁴ times increase in the sensing signal over the 7-94% RH range at 20 Hz, while many reported humidity sensors with high sensitivity often have the working range limited to high RH levels. Our sensors can realize the distinction of nuances in humidity and exhibit outstanding noncontact skin humidity sensing properties. Flexible WCN-based humidity sensors were also fabricated, and they displayed excellent sensing properties with long-time stability, endowing them with multifunctional applications. The contrast humidity sensing experiment compared to the existing commercial humidity sensor further demonstrated the higher and faster response of our WCN-based sensors. Thus, this work provides effective guidance for the design of high-performance humidity sensors using nanopapers and opens a new dimension for a variety of future applications.

Laboratory Evaluation of Railroad Crosslevel Tilt Sensing Using Electrical Time Domain Reflectometry

Crosslevel is defined as the difference in elevation between the top surface of two railroad tracks. Severe changes in crosslevel, for example, due to earthquakes, ground settlement, or crushed ballasts, affect track geometry and can cause train derailment. Therefore, the objective of this study was to monitoring railroad crosslevel by using electrical time domain reflectometry (ETDR) to simultaneously interrogate multiple capacitive tilt sensor prototypes connected in a transmission line. ETDR works by propagating an electrical pulse signal from one end of the transmission line and then monitoring the characteristics of each reflected pulse, which is affected by the capacitance (or tilt) of the sensors. This study begins with a discussion of the capacitive tilt sensor’s design. These 3D-printed sensors were tested to characterize their tilt sensing performance. Then, multiple tilt sensors were connected in a transmission line and interrogated by ETDR. The ability to use ETDR to multiplex and interrogate sensors subjected to different angles of tilt was validated.

A Multimodal, Adjustable Sensitivity, Digital 3-Axis Skin Sensor Module

This paper presents major improvements to a multimodal, adjustable sensitivity skin sensor module. It employs a geomagnetic 3-axis Hall effect sensor to measure changes in the position of a magnetic field generated by an electromagnet. The electromagnet is mounted on a flexible material, and different current values can be supplied to it, enabling adjustments to the sensitivity of the sensor during operation. Capacitive sensing has been added in this iteration of the module, with two sensing modalities: "pre-touch" detection with proximity sensing and normal force capacitive sensing. The sensor has been designed to be interconnected with other sensor modules to be able to cover large surfaces of a robot with normal and shear force sensing and object proximity detection. Furthermore, this paper introduces important size reductions of the previous sensor design, calibration results, and further analysis of other sensor characteristics.

Ultra-Sensitive Flexible Pressure Sensor Based on Microstructured Electrode

Flexible pressure sensors with a high sensitivity in the lower zone of a subtle-pressure regime has shown great potential in the fields of electronic skin, human–computer interaction, wearable devices, intelligent prosthesis, and medical health. Adding microstructures on the dielectric layer on a capacitive pressure sensor has become a common and effective approach to enhance the performance of flexible pressure sensors. Here, we propose a method to further dramatically increase the sensitivity by adding elastic pyramidal microstructures on one side of the electrode and using a thin layer of a dielectric in a capacitive sensor. The sensitivity of the proposed device has been improved from 3.1 to 70.6 kPa⁻¹ compared to capacitive sensors having pyramidal microstructures in the same dimension on the dielectric layer. Moreover, a detection limit of 1 Pa was achieved. The finite element analysis performed based on electromechanical sequential coupling simulation for hyperelastic materials indicates that the microstructures on electrode are critical to achieve high sensitivity. The influence of the duty ratio of the micro-pyramids on the sensitivity of the sensor is analyzed by both simulation and experiment. The durability and robustness of the device was also demonstrated by pressure testing for 2000 cycles.

Sensitivity Improvement of Highly Stretchable Capacitive Strain Sensors by Hierarchical Auxetic Structures

Highly stretchable sensors that can detect large strains are useful in deformable systems, such as soft robots and wearable devices. For stretchable strain sensors, two types of sensing methods exist, namely, resistive and capacitive. Capacitive sensing has several advantages over the resistive type, such as high linearity, repeatability, and low hysteresis. However, the sensitivity (gauge factor) of capacitive strain sensors is theoretically limited to 1, which is much lower than that of the resistive-type sensors. The objective of this study is to improve the sensitivity of highly stretchable capacitive strain sensors by integrating hierarchical auxetic structures into them. Auxetic structures have a negative Poisson's ratio that causes increase in change in capacitance with applied strains, and thereby improving sensitivity. In order to prove this concept, we fabricate and characterize two sensor samples with planar dimensions 60 mm × 16 mm. The samples have an acrylic elastomer (3M, VHB 4905) as the dielectric layer and a liquid metal (eutectic gallium-indium) for electrodes. On both sides of the sensor samples, hierarchical auxetic structures made of a silicone elastomer (Dow Corning, Sylgard 184) are attached. The samples are tested under strains up to 50% and the experimental results show that the sensitivity of the sensor with the auxetic structure exceeds the theoretical limit. In addition, it is observed that the sensitivity of this sensor is roughly two times higher than that of a sensor without the auxetic structure, while maintaining high linearity (R² = 0.995), repeatability (≥10⁴ cycles), and low hysteresis.

Zeolite-Templated Carbon as a Stable, High Power Magnesium-Ion Cathode Material

One strategy to overcome the slow kinetics associated with electrochemical magnesium ion storage is to employ a permanently porous, capacitive cathode material together with magnesium metal as the anode. This strategy has begun to be employed, for example, using framework solids like Prussian blue analogues or porous carbons derived from metal-organic frameworks, but the cycling stability of an ordered, bottom-up synthesized, three-dimensional carbon framework toward magnesiation and demagnesiation in a shuttle-type battery remains unexplored. Zeolite-templated carbons (ZTCs) are a class of ordered porous carbonaceous framework materials with numerous superlative properties relevant to electrochemical energy storage. Herein, we report that ZTCs can serve as high-power cathode materials for magnesium-ion hybrid capacitors (MHCs), exhibiting high specific capacities (e.g., 113 mA h g^-1 after 100 cycles) with an average discharge voltage of 1.44 V and exceptional capacity retention (e.g., 76% after 200 cycles). ZTC-based MHCs meet or exceed the gravimetric energy densities of state-of-the-art batteries functioning on the Mg²⁺ shuttle, while simultaneously displaying far superior rate capabilities (e.g., 834 W kg^-1 at 600 mA g^-1).

[A Capacitive Venous Transfusion Alertor Based on NB-IoT]

This capacitive venous transfusion alertor is based on rise time of RC circuit and input capture function of timer in the microcontroller. The measure element of alertor is integrated with circuit board, it has the advantages of simple structure and low cost. Combined with narrow band intent of things(NB-IoT) technology to upload data, it can reduce the workload of medical personnel and caregivers, avoid unnecessary trouble and danger.

In Situ Synthesis of MoC1- x Nanodot@Carbon Hybrids for Capacitive Lithium-Ion Storage

In this study, in situ synthesis of carbon-coated MoC_{1- x} nanodots anchored on nitrogen-doped carbon (MoC_{1- x}@C) for lithium storage is reported. The obtained MoC_{1- x}@C hybrids exhibit intriguing structural characteristics including ultrafine particle size (ca. 1.2 nm) of MoC_{1- x} nanodots, porous structure of nitrogen-doped carbon matrix, and good robustness. When evaluated as anodes for lithium-ion batteries, the optimized MoC_{1- x}@C sample demonstrates a superior specific capacity (1099.2 mA h g^-1 at 0.1 A g^-1) and good rate capability (369.1 mA h g^-1 at 5 A g^-1). The MoC_{1- x}@C anode also presents remarkable cycling stability with a much higher specific capacity (657.9 mA h g^-1) than that of commercial bulk MoC (91.4 mA h g^-1) after 500 cycles at 1 A g^-1. Kinetics analysis of the anodes reveals the charge storage mechanism, which demonstrates the existence of capacitive redox reactions occurring at the shallow surface of the MoC_{1- x} nanodots and closely relating to the particle size. The outstanding electrochemical performance results from the synergistic effect of the elastic carbonaceous encapsulation to accommodate the huge volume expansion and the ultrafine MoC_{1- x} nanodots to provide more reactive sites for capacitive lithium storage.

Zeolite-Templated Carbon as the Cathode for a High Energy Density Dual-Ion Battery

Dual-ion batteries (DIBs) are electrochemical energy storage devices that operate by the simultaneous participation of two different ion species at the anode and cathode and rely on the use of an electrolyte that can withstand the high operation potential of the cathode. Under such conditions at the cathode, issues associated with the irreversible capacity loss and the formation of solid-electrolyte interphase at the surface of highly porous electrode materials are far less significant than at lower potentials, permitting the exploration of high surface area, permanently porous framework materials as effective charge storage media. This concept is investigated herein by employing zeolite-templated carbon (ZTC) as a cathode in a dual-ion battery based on a potassium bis(fluorosulfonyl)imide (KFSI) electrolyte. Anion (FSI^-) insertion within the pore network during electrochemical cycling is confirmed by NMR spectroscopy, and the maximum charge capacity is found to be proportional to surface area and micropore volume by comparison to other microporous carbon materials. Full cells based on ZTC as the cathode exhibit both high specific energy (up to 176 Wh kg^-1, 79.8 Wh L^-1) and high specific power (up to 3945 W kg^-1, 1095 W L^-1), stable cycling performance over hundreds of cycles, and reversibility within the potential range of 2.65-4.7 V versus K/K⁺.

Flexible Capacitive Pressure Sensor Enhanced by Tilted Micropillar Arrays

Sensitivity of the sensor is of great importance in practical applications of wearable electronics or smart robotics. In the present study, a capacitive sensor enhanced by a tilted micropillar array-structured dielectric layer is developed. Because the tilted micropillars undergo bending deformation rather than compression deformation, the distance between the electrodes is easier to change, even discarding the contribution of the air gap at the interface of the structured dielectric layer and the electrode, thus resulting in high pressure sensitivity (0.42 kPa^-1) and very small detection limit (1 Pa). In addition, eliminating the presence of uncertain air gap, the dielectric layer is strongly bonded with the electrode, which makes the structure robust and endows the sensor with high stability and reliable capacitance response. These characteristics allow the device to remain in normal use without the need for repair or replacement despite mechanical damage. Moreover, the proposed sensor can be tailored to any size and shape, which is further demonstrated in wearable application. This work provides a new strategy for sensors that are required to be sensitive and reliable in actual applications.

Impact of Conductive Yarns on an Embroidery Textile Moisture Sensor

In this work, two embroidered textile moisture sensors are characterized with three different conductive yarns. The sensors are based on a capacitive interdigitated structure embroidered on a cotton substrate with an embroidered conductor yarn. The performance comparison of three different type of conductive yarns has been addressed. In order to evaluate the sensor sensitivity, the impedance of the sensor has been measured by means of an LCR meter from 20 Hz to 20 kHz on a climatic chamber with a sweep of the relative humidity from 30% to 65% at 20 °C. The experimental results show a clear and controllable dependence of the sensor impedance with the relative humidity and the chosen conductor yarns. This dependence points out the optimum conductive yarn to be used to develop wearable applications for moisture measurement.

Advances in Capacitive Micromachined Ultrasonic Transducers

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.

Humidity Sensors with Shielding Electrode Under Interdigitated Electrode

Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to the shielding electrode, this humidity sensor combines the high sensitivity of parallel plate capacitive sensors and the fast response of interdigitated electrode capacitive sensors. We use COMSOL Multiphysics to design and optimize the SIDE structure. The experimental data show very good agreement with the simulation. The sensitivity of the SIDE sensor is 0.0063% ± 0.0002% RH. Its response/recovery time is 20 s/22 s. The maximum capacitance drift under different relative humidity is 1.28% RH.

Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via

A novel three-dimensional (3D) hermetic packaging technique suitable for capacitive microelectromechanical systems (MEMS) sensors is studied. The composite substrate with through silicon via (TSV) is used as the encapsulation cap fabricated by a glass-in-silicon (GIS) reflow process. In particular, the low-resistivity silicon pillars embedded in the glass cap are designed to serve as the electrical feedthrough and the fixed capacitance plate at the same time to simplify the fabrication process and improve the reliability. The fabrication process and the properties of the encapsulation cap were studied systematically. The resistance of the silicon vertical feedthrough was measured to be as low as 263.5 mΩ, indicating a good electrical interconnection property. Furthermore, the surface root-mean-square (RMS) roughnesses of glass and silicon were measured to be 1.12 nm and 0.814 nm, respectively, which were small enough for the final wafer bonding process. Anodic bonding between the encapsulation cap and the silicon wafer with sensing structures was conducted in a vacuum to complete the hermetic encapsulation. The proposed packaging scheme was successfully applied to a capacitive gyroscope. The quality factor of the packaged gyroscope achieved above 220,000, which was at least one order of magnitude larger than that of the unpackaged. The validity of the proposed packaging scheme could be verified. Furthermore, the packaging failure was less than 1%, which demonstrated the feasibility and reliability of the technique for high-performance MEMS vacuum packaging.

On Frequency-Based Interface Circuits for Capacitive MEMS Accelerometers

Interface circuits for capacitive MEMS accelerometers are conventionally based on charge-based approaches. A promising alternative to these is provided by frequency-based readout techniques that have some unique advantages as well as a few challenges associated with them. This paper addresses these techniques and presents a derivation of the fundamental resolution limits that are imposed on them by phase noise. Starting with an overview of basic operating principles, associated properties and challenges, the discussions then focus on the fundamental trade-offs between noise, power dissipation and signal bandwidth (BW) for the LC-oscillator-based frequency readout and for the conventional charge-based switched-capacitor (SC) readout. Closed-form analytical formulas are derived to facilitate a fair comparison between the two approaches. Benchmarking results indicate that, with the same bandwidth requirement, charge-based readout circuits are more suitable when optimizing for noise performance, while there is still some room for frequency-based techniques when optimizing for power consumption, especially when flicker phase noise can be mitigated.

Embedded, Fully Spray-Coated Pressure Sensor Using a Capacitive Transducing Mechanism

Embedding functional sensor layers directly into mechanical systems in heavy-duty surroundings facilitate the real-time monitoring of the system’s state. This work presents a fully-spray coated pressure sensor that is suitable for applications in the high pressure range. It is embedded into functionalized organic coatings that additionally act as a dielectric for the capacitive sensing mechanism. The sensitivity of the sensor, as well as its long-time stability, has been determined. Additionally, testing has been performed at elevated temperatures to determine the temperature dependent sensitivity that arises from the temperature dependence of the Young’s moduli.

Piezo-Potential Generation in Capacitive Flexible Sensors Based on GaN Horizontal Wires

We report an example of the realization of a flexible capacitive piezoelectric sensor based on the assembly of horizontal c&macr;-polar long Gallium nitride (GaN) wires grown by metal organic vapour phase epitaxy (MOVPE) with the Boostream^&reg; technique spreading wires on a moving liquid before their transfer on large areas. The measured signal (<0.6 V) obtained by a punctual compression/release of the device shows a large variability attributed to the dimensions of the wires and their in-plane orientations. The cause of this variability and the general operating mechanisms of this flexible capacitive device are explained by finite element modelling simulations. This method allows considering the full device composed of a metal/dielectric/wires/dielectric/metal stacking. We first clarify the mechanisms involved in the piezo-potential generation by mapping the charge and piezo-potential in a single wire and studying the time-dependent evolution of this phenomenon. GaN wires have equivalent dipoles that generate a tension between metallic electrodes only when they have a non-zero in-plane projection. This is obtained in practice by the conical shape occurring spontaneously during the MOVPE growth. The optimal aspect ratio in terms of length and conicity (for the usual MOVPE wire diameter) is determined for a bending mechanical loading. It is suggested to use 60⁻120 &micro;m long wires (i.e., growth time less than 1 h). To study further the role of these dipoles, we consider model systems with in-plane 1D and 2D regular arrays of horizontal wires. It is shown that a strong electrostatic coupling and screening occur between neighbouring horizontal wires depending on polarity and shape. This effect, highlighted here only from calculations, should be taken into account to improve device performance.

Sensitive Capacitive-type Hydrogen Sensor Based on Ni Thin Film in Different Hydrogen Concentrations

BACKGROUND

Hydrogen sensors are micro/nano-structure that are used to locate hydrogen leaks. They are considered to have fast response/recovery time and long lifetime as compared to conventional gas sensors. In this paper, fabrication of sensitive capacitive-type hydrogen gas sensor based on Ni thin film has been investigated. The C-V curves of the sensor in different hydrogen concentrations have been reported.

METHOD

Dry oxidation was done in thermal chemical vapor deposition furnace (TCVD). For oxidation time of 5 min, the oxide thickness was 15 nm and for oxidation time 10 min, it was 20 nm. The Ni thin film as a catalytic metal was deposited on the oxide film using electron gun deposition. Two MOS sensors were compared with different oxide film thickness and different hydrogen concentrations.

RESULTS

The highest response of the two MOS sensors with 15 nm and 20 nm oxide film thickness in 4% hydrogen concentration was 87.5% and 65.4% respectively. The fast response times for MOS sensors with 15 nm and 20 nm oxide film thickness in 4% hydrogen concentration was 8 s and 21 s, respectively.

CONCLUSION

By increasing the hydrogen concentration from 1% to 4%, the response time for MOS sensor (20nm oxide thickness), was decreased from 28s to 21s. The recovery time was inversely increased from 237s to 360s. The experimental results showed that the MOS sensor based on Ni thin film had a quick response and a high sensitivity.

Enhancing Sodium-Ion Storage Behaviors in TiNb2O7 by Mechanical Ball Milling

Sodium-ion batteries (SIBs) have shown extensive prospects as alternative rechargeable batteries in large-scale energy storage systems, because of the abundance and low cost of sodium. The development of high-performance cathode and anode materials is a big challenge for SIBs. As is well known, TiNb₂O₇ (TNO) exhibits a high capacity of ∼250 mAh g^-1 with excellent capacity retention as a Li-insertion anode for lithium-ion batteries, but it has rarely been discussed as an anode for SIBs. Here, we demonstrate ball-milled TiNb₂O₇ (BM-TNO) as an SIB anode, which provides an average voltage of ∼0.6 V and a reversible capacity of ∼180 mAh g^-1 at a current density of 15 mA g^-1, and presents excellent cyclability with 95% capacity retention after 500 cycles at 500 mA g^-1. A possible Na storage mechanism in BM-TNO is also proposed.

Characterization of Textile-Insulated Capacitive Biosensors

Capacitive biosensors are an emerging technology revolutionizing wearable sensing systems and personal healthcare devices. They are capable of continuously measuring bioelectrical signals from the human body while utilizing textiles as an insulator. Different textile types have their own unique properties that alter skin-electrode capacitance and the performance of capacitive biosensors. This paper aims to identify the best textile insulator to be used with capacitive biosensors by analysing the characteristics of 6 types of common textile materials (cotton, linen, rayon, nylon, polyester, and PVC-textile) while evaluating their impact on the performance of a capacitive biosensor. A textile-insulated capacitive (TEX-C) biosensor was developed and validated on 3 subjects. Experimental results revealed that higher skin-electrode capacitance of a TEX-C biosensor yields a lower noise floor and better signal quality. Natural fabric such as cotton and linen were the two best insulating materials to integrate with a capacitive biosensor. They yielded the lowest noise floor of 2 mV and achieved consistent electromyography (EMG) signals measurements throughout the performance test.

Bend, stretch, and touch: Locating a finger on an actively deformed transparent sensor array

The development of bendable, stretchable, and transparent touch sensors is an emerging technological goal in a variety of fields, including electronic skin, wearables, and flexible handheld devices. Although transparent tactile sensors based on metal mesh, carbon nanotubes, and silver nanowires demonstrate operation in bent configurations, we present a technology that extends the operation modes to the sensing of finger proximity including light touch during active bending and even stretching. This is accomplished using stretchable and ionically conductive hydrogel electrodes, which project electric field above the sensor to couple with and sense a finger. The polyacrylamide electrodes are embedded in silicone. These two widely available, low-cost, transparent materials are combined in a three-step manufacturing technique that is amenable to large-area fabrication. The approach is demonstrated using a proof-of-concept 4 × 4 cross-grid sensor array with a 5-mm pitch. The approach of a finger hovering a few centimeters above the array is readily detectable. Light touch produces a localized decrease in capacitance of 15%. The movement of a finger can be followed across the array, and the location of multiple fingers can be detected. Touch is detectable during bending and stretch, an important feature of any wearable device. The capacitive sensor design can be made more or less sensitive to bending by shifting it relative to the neutral axis. Ultimately, the approach is adaptable to the detection of proximity, touch, pressure, and even the conformation of the sensor surface.

Design and Development of Non-Contact Bio-Potential Electrodes for Pervasive Health Monitoring Applications

For the advent of pervasive bio-potential monitoring, it will be necessary to utilize a combination of cheap, quick to apply, low-noise electrodes and compact electronics with wireless technologies. Once available, all electrical activity resulting from the processes of the human body could be actively and constantly monitored without the need for cumbersome application and maintenance. This could significantly improve the early diagnosis of a range of different conditions in high-risk individuals, opening the possibility for new treatments and interventions as conditions develop. This paper presents the design and implementation of compact, non-contact capacitive bio-potential electrodes utilising a low impedance current-to-voltage configuration and a bootstrapped voltage follower, demonstrating results applicable to research applications for capacitive electrocardiography and capacitive electromyography. The presented electrodes use few components, have a small surface area and are capable of acquiring a range of bio-potential signals.

Novel designs for application specific MEMS pressure sensors

In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0–350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications in harsh environment, distributed systems and medical environment, respectively. For many aspects, commercially available sensors, which in vast majority are piezoresistive, are not suited for the applications proposed.