Charge- and size-based separation of macromolecules using ultrathin silicon membranes

Technologies for continuous glucose monitoring: current problems and future promises

Devices for continuous glucose monitoring (CGM) are currently a major focus of research in the area of diabetes management. It is envisioned that such devices will have the ability to alert a diabetes patient (or the parent or medical care giver of a diabetes patient) of impending hypoglycemic/hyperglycemic events and thereby enable the patient to avoid extreme hypoglycemic/hyperglycemic excursions as well as minimize deviations outside the normal glucose range, thus preventing both life-threatening events and the debilitating complications associated with diabetes. It is anticipated that CGM devices will utilize constant feedback of analytical information from a glucose sensor to activate an insulin delivery pump, thereby ultimately realizing the concept of an artificial pancreas. Depending on whether the CGM device penetrates/breaks the skin and/or the sample is measured extracorporeally, these devices can be categorized as totally invasive, minimally invasive, and noninvasive. In addition, CGM devices are further classified according to the transduction mechanisms used for glucose sensing (i.e., electrochemical, optical, and piezoelectric). However, at present, most of these technologies are plagued by a variety of issues that affect their accuracy and long-term performance. This article presents a critical comparison of existing CGM technologies, highlighting critical issues of device accuracy, foreign body response, calibration, and miniaturization. An outlook on future developments with an emphasis on long-term reliability and performance is also presented.

Nanostructured silicon membranes for control of molecular transport

A membrane that allows selective transport of molecular species requires precise engineering on the nanoscale. Membrane permeability can be tuned by controlling the physical structure and surface chemistry of the pores. Here, a combination of electron beam and optical lithography, along with cryogenic deep reactive ion etching, has been used to fabricate silicon membranes that are physically robust, have uniform pore sizes, and are directly integrated into a microfluidic network. Additional reductions in pore size were achieved using plasma enhanced chemical vapor deposition and atomic layer deposition of silicon dioxide to coat membrane surfaces. Cross sectioning of the membranes using focused ion beam milling was used to determine the physical shape of the membrane pores before and after coating. Functional characterization of the membranes was performed by using quantitative fluorescence microscopy to document the transport of molecular species across the membrane.

Pore size control of ultrathin silicon membranes by rapid thermal carbonization

Rapid thermal carbonization in a dilute acetylene (C(2)H(2)) atmosphere has been used to chemically modify and precisely tune the pore size of ultrathin porous nanocrystalline silicon (pnc-Si). The magnitude of size reduction was controlled by varying the process temperature and time. Under certain conditions, the carbon coating displayed atomic ordering indicative of graphene layer formation conformal to the pore walls. Initial experiments show that carbonized membranes follow theoretical predictions for hydraulic permeability and retain the precise separation capabilities of untreated membranes.

Nanometric thin film membranes manufactured on square meter scale: ultra-thin films for CO2 capture

Miniaturization and manipulation of materials at nanometer scale are key challenges in nanoscience and nanotechnology. In membrane science and technology, the fabrication of ultra-thin polymer films (defect-free) on square meter scale with uniform thickness (<100 nm) is crucial. By using a tailor-made polymer and by controlling the nanofabrication conditions, we developed and manufactured defect-free ultra-thin film membranes with unmatched carbon dioxide permeances, i.e. > 5 m(3) (STP) m(-2) h(-1) bar(-1). The permeances are extremely high, because the membranes are made from a CO(2) philic polymer material and they are only a few tens of nanometers thin. Thus, these thin film membranes have potential application in the treatment of large gas streams under low pressure like, e.g., carbon dioxide separation from flue gas.

Single-file diffusion of protein drugs through cylindrical nanochannels

A new drug delivery device using cylindrical block copolymer nanochannels was successfully developed for controlled protein drug delivery applications. Depending on the hydrodynamic diameter of the protein drugs, the pore size in cylindrical nanochannels could be controlled precisely down to 6 nm by Au deposition. Zero-order release of bovine serum albumin (BSA) and human growth hormone (hGH) by single-file diffusion, which has been observed for gas diffusion through zeolite pores, was realized up to 2 months without protein denaturation. Furthermore, a nearly constant in vivo release of hGH from the drug delivery nanodevice implanted to Sprague-Dawley (SD) rats was continued up to 3 weeks, demonstrating the feasibility for long-term controlled delivery of therapeutic protein drugs.

Active and biomimetic nanofilters for selective protein separation

Selective protein channels in cell and nuclear membranes act as gateways to control the passage of molecules across. The selectivity of these channels stems from attractive potentials of the binding sites in the transmembrane proteins. These channels can filter out small volume of solutions with high precision. Motivated from this phenomenon, we report biomimetic facilitated transport modality to selectively separate a target molecule from a mixture of molecules. The attractive potential is generated by specific antibodies immobilized inside 15 nm diameter polycarbonate nanochannels. Two proteins with similar physicochemical properties (Bovine Serum Albumin 66 kDa, and Human Hemoglobin 65 kDa) are chosen as model molecules. The protein molecules are mixed in ratios of 1:1, 1:20 and 1:40 (Hb:BSA), and separation of molecules is demonstrated. The selectivity of membrane can be switched from Hb to BSA by changing the immobilized antibody inside the membrane channels. This approach can be used to selectively enrich any target molecule from a complex sample to enhance signal-to-noise ratio for early disease diagnosis.

Tailoring morphology in free-standing anodic aluminium oxide: control of barrier layer opening down to the sub-10 nm diameter

Free-standing, highly ordered porous aluminium oxide templates were fabricated by three-step anodization in oxalic, sulfuric or phosphoric acid solutions, followed by dissolution of the aluminium substrate in HgCl(2). Opening of the pore bottoms on the barrier layer side of these templates was carried out by using chemical or ion beam etching. Chemical etching is capable of achieving full pore opening, but partial pore opening occurs inhomogeneously. On the contrary, ion beam etching enables homogeneous and reproducible partial pore opening, with the pore size controlled through the etching time. By this method, pore openings as small as 5 nm can reliably be obtained.

Bacterial nanofluidic structures for medicine and engineering

Bacteria are microscopic, single-celled organisms that utilize a variety of nanofluidic structures. One of the best known and widely used nanofluidic structures that are derived from bacteria is the alpha-hemolysin pore. This pore, which self-assembles in lipid bilayers, has been used for a wide variety of sensing applications, most notably, DNA sensing. Synthetic pores drilled in a wide variety of materials, such as silicon nitride and polymers have been developed that use inspiration from the alpha-hemolysin pore. Higher-aspect-ratio nanofluidic structures, akin to nanotubes, are also synthesized by bacteria. Examples of such structures include those that are associated with bacterial transport apparatus, such as pili, and are used by bacteria to facilitate the transfer of genetic material from one bacterium to another. Flagella, and its associated structures, such as the rod and hook, are also tubular nanostructures, through which the protein, flagellin, travels to assemble the flagellum. Genetic engineering allows for the creation of modified bacterial nanopores and nanotubes that can be used for a variety of medical and engineering purposes.

The implantable artificial kidney

The confluence of an increasing prevalence of end-stage renal disease (ESRD), clinical trial data suggestive of benefit from quotidian dialysis, and ongoing cost/benefit reanalysis of healthcare spending have stimulated interest in technological improvements in provision of ESRD care. For the last decade, our group has focused on enabling technologies that would permit a paradigm shift in dialysis care similar to that brought by implantable defibrillators to arrhythmia management. Two significant barriers to wearable or implantable dialysis persist: package size of the dialyzer and water requirements for preparation of dialysate. Decades of independent research into highly efficient membranes and cell-based bioreactors culminated in a team effort to develop an implantable version of the University of Michigan Renal Assist Device. In this review, the rationale for the design of the implantable artificial kidney is described.

Deciphering ionic current signatures of DNA transport through a nanopore

Within just a decade from the pioneering work demonstrating the utility of nanopores for molecular sensing, nanopores have emerged as versatile systems for single-molecule manipulation and analysis. In a typical setup, a gradient of the electrostatic potential captures charged solutes from the solution and forces them to move through a single nanopore, across an otherwise impermeable membrane. The ionic current blockades resulting from the presence of a solute in a nanopore can reveal the type of the solute, for example, the nucleotide makeup of a DNA strand. Despite great success, the microscopic mechanisms underlying the functionality of such stochastic sensors remain largely unknown, as it is not currently possible to characterize the microscopic conformations of single biomolecules directly in a nanopore and thereby unequivocally establish the causal relationship between the observables and the microscopic events. Such a relationship can be determined using molecular dynamics-a computational method that can accurately predict the time evolution of a molecular system starting from a given microscopic state. This article describes recent applications of this method to the process of DNA transport through biological and synthetic nanopores.

Emerging synergy between nanotechnology and implantable biosensors: a review

The development of implantable biosensors for continuous monitoring of metabolites is an area of sustained scientific and technological interests. On the other hand, nanotechnology, a discipline which deals with the properties of materials at the nanoscale, is developing as a potent tool to enhance the performance of these biosensors. This article reviews the current state of implantable biosensors, highlighting the synergy between nanotechnology and sensor performance. Emphasis is placed on the electrochemical method of detection in light of its widespread usage and substantial nanotechnology based improvements in various aspects of electrochemical biosensor performance. Finally, issues regarding toxicity and biocompatibility of nanomaterials, along with future prospects for the application of nanotechnology in implantable biosensors, are discussed.

Selective trapping and concentration of nanoparticles and viruses in dual-height nanofluidic channels

Nanofluidic systems offer advantages for chemical analysis, including small sample volumes, size-selective particle trapping, sample concentration and the ability to separate and detect single molecules. Such systems can be fabricated using planar nanochannels, which rely on standard photolithographic techniques. Nanochannel fluid flow can be driven by capillary action, which benefits from simple injection and reasonably high flow rates. We demonstrate an analysis chip fabricated with planar nanochannels that consist of two adjoining segments of different heights. When nano-analytes elute through the channel, they become physically trapped when the channel dimensions shrink below the size of the particles. We demonstrate the capability of these devices to trap and concentrate by using the following: 120-nm polymer beads, 30-nm polymer beads, Herpes simplex virus 1 capsids, and hepatitis B virus capsids. Each species was fluorescently labeled and its resulting fluorescent signal was detected using a cooled CCD camera. We show how the signal-to-noise ratio of trapped analyte intensity varies linearly with analyte concentration. The goal of this work is to eventually perform size-based fractionation of a variety of nanoparticles, including biomolecules such as proteins.

Functionalization of Artificial Freestanding Composite Nanomembranes

Artificial nanomembranes may be defined as synthetic freestanding structures with a thickness below 100 nm and a very large aspect ratio, of at least a few orders of magnitude. Being quasi-2D, they exhibit a host of unusual properties useful for various applications in energy harvesting, sensing, optics, plasmonics, biomedicine, etc. We review the main approaches to nanomembrane functionalization through nanocompositing, which ensures performance far superior to that of simple nanomembranes. These approaches include lamination (stacking of nanometer-thin strata of different materials), introduction of nanoparticle fillers into the nanomembrane scaffold, nanomembrane surface sculpting and modification through patterning (including formation of nanohole arrays and introduction of ion channels similar in function to those in biological nanomembranes). We also present some of our original results related to functionalization of metal matrix composite nanomembranes.

Stabilization of ion concentration polarization using a heterogeneous nanoporous junction

We demonstrate a recycled ion-flux through heterogeneous nanoporous junctions, which induce stable ion concentration polarization with an electric field. The nanoporous junctions are based on integration of ionic hydrogels whose surfaces are negatively or positively charged for cationic or anionic selectivity, respectively. Such heterogeneous junctions can be matched up in a way to achieve continuous ion-flux operation for stable concentration gradient or ionic conductance. Furthermore, the combined junctions can be used to accumulate ions on a specific region of the device.

Fabrication of nanopore arrays and ultrathin silicon nitride membranes by block-copolymer-assisted lithography

Here we show a method for patterning a thin metal film using self-assembled block-copolymer micelles monolayers as a template. The obtained metallic mask is transferred by reactive ion etching in silicon oxide, silicon and silicon nitride substrates, thus fabricating arrays of hexagonally packed nanopores with tunable diameters, interspacing and aspect ratios. This technology is compatible with integration into a standard microtechnology sequence for wafer-scale fabrication of ultrathin silicon nitride nanoporous membranes with 80 nm mean pore diameter.

Versatile ultrathin nanoporous silicon nitride membranes

Single- and multiple-nanopore membranes are both highly interesting for biosensing and separation processes, as well as their ability to mimic biological membranes. The density of pores, their shape, and their surface chemistry are the key factors that determine membrane transport and separation capabilities. Here, we report silicon nitride (SiN) membranes with fully controlled porosity, pore geometry, and pore surface chemistry. An ultrathin freestanding SiN platform is described with conical or double-conical nanopores of diameters as small as several nanometers, prepared by the track-etching technique. This technique allows the membrane porosity to be tuned from one to billions of pores per square centimeter. We demonstrate the separation capabilities of these membranes by discrimination of dye and protein molecules based on their charge and size. This separation process is based on an electrostatic mechanism and operates in physiological electrolyte conditions. As we have also shown, the separation capabilities can be tuned by chemically modifying the pore walls. Compared with typical membranes with cylindrical pores, the conical and double-conical pores reported here allow for higher fluxes, a critical advantage in separation applications. In addition, the conical pore shape results in a shorter effective length, which gives advantages for single biomolecule detection applications such as nanopore-based DNA analysis.

Nanochannel design by molecular imprinting on a free-standing ultrathin titania membrane

A free-standing ultrathin film of a poly(vinyl alcohol) (PVA)/titania (TiO2) composite was prepared by spin coating. The thickness of the film was adjusted to 30-50 nm by changing the spin-coating speed and the concentrations of PVA and the TiO2 precursor. A template molecule, (4-phenylazo)benzoic acid (4PABA), was introduced into the film as a mixture in the TiO2 precursor and was removed after film formation by dipping the film in aq NH3 (1%). Aqueous solutions of tetraphenylporphyrin tetrasulfonic acid (TPPS), 4PABA, and sodium benzoate (SB) were filtered through this film, and the concentrations of these compounds in the filtered solution were monitored by UV-vis absorption measurements. The filtered TPPS solution was colorless, and its absorbance at 413 nm was 8% that of the original solution. In contrast, almost 100% of SB and 28.4% of 4PABA were passed through the film. The ultrathin TiO2/PVA film obtained without imprinting with 4PABA had no cavities, and aqueous solutions did not pass through this film. Therefore, it was concluded that the nonimprinted film was defect free and that imprinting of the template molecule in the film resulted in the formation of a size-selective channel across a 40 nm thickness.

Analytical description of Ogston-regime biomolecule separation using nanofilters and nanopores

We present a theoretical model describing Ogston (pore size comparable to or larger than the characteristic molecular dimension) sieving of rigid isotropic and anisotropic biomolecules in nanofluidic molecular filter arrays comprising of alternating deep and shallow regions. Starting from a quasi-one-dimensional drift-diffusion description, which captures the interplay between the driving electric force, entropic barrier and molecular diffusion, we derive explicit analytical results for the effective mobility and trapping time. Our results elucidate the effects of field strength, device geometry and entropic barrier height, providing a robust tool for the design and optimization of nanofilter/nanopore systems. Specifically, we show that Ogston sieving becomes negligible when the length of shallow region becomes sufficiently small, mainly due to efficient diffusional transport through the short shallow region. Our theoretical results are in line with experimental observations and provide important design insight for nanofluidic systems.

Large area high density sub-20 nm SiO(2) nanostructures fabricated by block copolymer template for nanoimprint lithography

We developed simple fabrication methods to effectively transfer the block copolymer nanopatterns to a substrate material. High aspect ratio, sub-20 nm nanopillar and nanohole structures are successfully fabricated in a SiO(2) layer in large area format, and the versatile utilities of these nanostructures as nanoimprint molds are studied. Nanoimprint lithography using these molds makes it possible to easily replicate densely packed block copolymer nanotemplate patterns on arbitrary substrates in a short processing time by using a large variety of polymer materials, including functional materials such as conjugated polymers. In addition, the PDMS soft stamps with both nanohole and nanopillar pattern polarities, which are useful tools for soft lithography and transparent template applications, are also successfully fabricated using the pillar- and hole-type SiO(2) molds. These soft stamps provide an effective way to fabricate controllable as well as reproducible plasmonic metal nanostructures with tunable surface plasmon resonances.

Optical transmission and laser structuring of silicon membranes

The optical linear and nonlinear properties of ~ 340-nm thick Si membranes were investigated. The investigation included both experiments in which the reflection and transmission from the membranes were measured, and finite differences time domain simulations. The linear optical transmission of the Si membranes can be controlled by changing the thickness of a thermally grown oxide on the membrane. Illumination of the membranes with high levels of irradiation leads to optical modifications that are consistent with the formation of amorphous silicon and dielectric breakdown. When irradiated under conditions where dielectric breakdown occurs, the membranes can be ablated in a well-controlled manner. Laser micro-structuring of the membranes by ablation was carried out to make micrometer-sized holes by focused fs-pulses. Ns-pulses were also used to fabricate arrays of holes by proximity-ablation of a closely-packed pattern of colloidal particles.

Rapid quantification of disease-marker proteins using continuous-flow immunoseparation in a nanosieve fluidic device

Nanometer-scale fluidic devices offer an alternative to gels for separating biomolecules with better control and accuracy. Here we demonstrate the quantitative analysis of disease-marker proteins by continuously separating the antibody-protein immunocomplexes from the unbound antibodies, utilizing the anisotropically patterned nanosieve array (ANA) structures. The ANA structures, composed of periodically patterned deep channels and shallow regions, allow the small antibodies to pass through the shallow regions easier than the large immunocomplex, when the flow-field is applied in an oblique direction. We examined two proteins used as disease markers, human C-reactive protein (CRP) and human chorionic gonadotropin (hCG), by using fluorescent-labeled polyclonal antibodies. We showed that the size of the immunocomplex and the field strength are the critical factors for the separation, and we successfully demonstrated the quantification of the proteins in the range of 0.05 to 10 microg/mL. Additionally, this device allows a convenient measurement of homogeneous binding kinetics, without the need for repeated binding experiments and immobilizing the molecules. The presented nanofluidic device will be a useful tool for the rapid quantification and the preparative immunoseparation of the target proteins.

Fabrication, self-assembly, and properties of ultrathin AlN/GaN porous crystalline nanomembranes: tubes, spirals, and curved sheets

Ultrathin AlN/GaN crystalline porous freestanding nanomembranes are fabricated on Si(111) by selective silicon etching, and self-assembled into various geometries such as tubes, spirals, and curved sheets. Nanopores with sizes from several to tens of nanometers are produced in nanomembranes of 20-35 nm nominal thickness, caused by the island growth of AlN on Si(111). No crystal-orientation dependence is observed while releasing the AlN/GaN nanomembranes from the Si substrate indicating that the driving stress mainly originates from the zipping effect among islands during growth. Competition between different relaxation mechanisms is experimentally revealed for different nanomembrane geometries and well-described by numerical calculations. The cathodoluminescence emission from GaN nanomembranes reveals a weak peak close to the GaN bandgap, which is dramatically enhanced by electron irradiation.

Tuneable hydrophoretic separation using elastic deformation of poly(dimethylsiloxane)

This paper demonstrates a method for tuning elastomeric microchannels for hydrophoretic separation made in poly(dimethylsiloxane) (PDMS). Uniform compressive strain is imposed on the elastomeric microchannel between two acrylic substrates by fastening the bolts. The elastomeric microchannel can change its cross-section during compression, simultaneously tuning the criterion for hydrophoretic ordering. The change of the channel cross-section under compression is studied using a confocal microscope and finite element method (FEM). By pressing the channel for hydrophoretic separation, we achieved tuning of the separation criterion from 7 to 2.5 microm in particle diameter.

Ultrafast permeation of water through protein-based membranes

Pressure-driven filtration by porous membranes is widely used in the production of drinking water from ground and surface water. Permeation theory predicts that filtration rate is proportional to the pressure difference across the filtration membrane and inversely proportional to the thickness of the membrane. However, these membranes need to be able to withstand high water fluxes and pressures, which means that the active separation layers in commercial filtration systems typically have a thickness of a few tens to several hundreds of nanometres. Filtration performance might be improved by the use of ultrathin porous silicon membranes or carbon nanotubes immobilized in silicon nitride or polymer films, but these structures are difficult to fabricate. Here, we report a new type of filtration membrane made of crosslinked proteins that are mechanically robust and contain channels with diameters of less than 2.2 nm. We find that a 60-nm-thick membrane can concentrate aqueous dyes from fluxes up to 9,000 l h(-1) m(-2) bar(-1), which is approximately 1,000 times higher than the fluxes that can be withstood by commercial filtration membranes with similar rejection properties. Based on these results and molecular dynamics simulations, we propose that protein-surrounded channels with effective lengths of less than 5.8 nm can separate dye molecules while allowing the ultrafast permeation of water at applied pressures of less than 1 bar.

Ionic field effect transistors with sub-10 nm multiple nanopores

We report a new method to fabricate electrode-embedded multiple nanopore structures with sub-10 nm diameter, which is designed for electrofluidic applications such as ionic field effect transistors. Our method involves patterning pore structures on membranes using e-beam lithography and shrinking the pore diameter by a self-limiting atomic layer deposition process. We demonstrate that 70-80 nm diameter pores can be shrunk down to sub-10 nm diameter and that the ionic transport of KCl electrolyte can be efficiently manipulated by the embedded electrode within the membrane.

Anti-infiltration for fabrication of a suspended nanoparticle layer on porous close-packed colloidal arrays

We develop a new method to fabricate suspended sheets of nanocrystals (NCs) on porous surfaces. The method relies on the resistance of an aqueous suspension droplet to infiltrate a porous network; hence, the method is named anti-infiltration. The process works by combining fluid dynamics of a liquid droplet during impact/absorption onto a porous surface with the convective self-assembly of NCs. The immobilization of the liquid droplet edge due to the self-assembly of NCs at the meniscus is harnessed to halt the lateral spreading of the droplet and, consequently, the capillary penetration of the liquid immediately after droplet impact. Further capillary penetration of the liquid is drastically reduced because of the competition between capillary forces and convective losses as well as the rapid occlusion of the pores as soon as a continuous NC film has formed upon evaporation of the suspension. This method holds promise for a wide variety of optoelectronic, sensing, and separation membrane applications. As an example, we demonstrate that these suspended NC layers are suitable candidates as planar defects embedded within a colloidal photonic crystal.

Biomolecular transport through hemofiltration membranes

A theoretical model for filtration of large solutes through a pore in the presence of transmembrane pressures, applied/induced electric fields, and dissimilar interactions at the pore entrance and exit is developed to characterize and predict the experimental performance of a hemofiltration membrane with nanometer scale pores designed for a proposed implantable Renal Assist Device (RAD). The model reveals that the sieving characteristics of the membrane can be improved by applying an external electric field, and ensuring a smaller ratio of the pore-feed and pore-permeate equilibrium partitioning coefficients when diffusion is present. The model is then customized to study the sieving characteristics for both charged and uncharged solutes in the slit-shaped nanopores of the hemofiltration device for the RAD. The effect of streaming potential or induced fields are found to be negligible under representative operating conditions. Experimental data on the sieving coefficient of bovine serum albumin, carbonic anhydrase and thyroglobulin are reported and compared with the theoretical predictions. Both steric and electrostatic partitioning are considered and the comparison suggests that in general electrostatic effects are present in the filtration of proteins though some data, particularly those recorded in a strongly hypertonic solution (10x PBS), show better agreement with the steric partitioning theory.

Composite block polymer-microfabricated silicon nanoporous membrane

Block polymers offer an attractive route to densely packed, monodisperse nanoscale pores. However, their fragility as thin films complicates their use as membranes. By integrating a block polymer film with a thin (100 microm) silicon substrate, we have developed a composite membrane providing both nanoscale size exclusion and fast transport of small molecules. Here we describe the fabrication of this membrane, evaluate its mechanical integrity, and demonstrate its transport properties for model solutes of large and small molecular weight. The ability to block large molecules without hindering smaller ones, coupled with the potential for surface modification of the polymer and the microelectromechanical system style of support, makes this composite membrane an attractive candidate for interfacing implantable sensing and drug-delivery devices with biological hosts.

Real-time monitoring of enzyme activity in a mesoporous silicon double layer

The activity of certain proteolytic enzymes is often an indicator of disease states such as cancer, stroke and neurodegeneracy, so there is a need for rapid assays that can characterize the kinetics and substrate specificity of enzymatic reactions. Nanostructured membranes can efficiently separate biomolecules, but coupling a sensitive detection method to such a membrane remains difficult. Here, we demonstrate a single mesoporous nanoreactor that can isolate and quantify in real time the reaction products of proteases. The reactor consists of two layers of porous films electrochemically prepared from crystalline silicon. The upper layer, with large pore sizes ( approximately 100 nm in diameter), traps the protease and acts as the reactor. The lower layer, with smaller pore sizes ( approximately 6 nm), excludes the proteases and other large proteins and captures the reaction products. Infiltration of the digested fragments into the lower layer produces a measurable change in optical reflectivity, and this allows label-free quantification of enzyme kinetics in real time within a volume of approximately 5 nl.

Bi-directional Kirkendall effect in coaxial microtube nanolaminate assemblies fabricated by atomic layer deposition

The solid-state reaction within a coaxial Al2O3/ZnO/Al2O3 multilayered microtubular structure can be used to prepare discrete microtube-in-microtube ZnAl2O4 spinel assemblies through a Kirkendall void production mechanism at 700 degrees C. In contrast with previous studies of the nanoscale Kirkendall effect, the reaction observed here proceeds through a bi-directional vacancy diffusion mechanism wherein ZnO species diffuse into inner- and outer-Al2O3 concentric layers, thereby resulting in vacancy supersaturation and void production between two isolated spinel microtubes. Low-temperature atomic layer deposition (ALD) of Al2O3 and ZnO enables the fabrication of complex coaxial multilayered microtubes with precise control of the starting film thicknesses and relative composition. When a molar excess of ZnO is present between two Al2O3 layers, electron microscopy images reveal incomplete ZnO consumption after annealing at 700 degrees C. At higher initial Al2O3 concentrations, however, complete reaction with ZnO is observed, and the size of the Kirkendall gap between isolated spinel microtubes appears to be directly influenced by the thickness of the intermediate ZnO layer.

Modeling Transport Through Synthetic Nanopores

Nanopores in thin synthetic membranes have emerged as convenient tools for high-throughput single-molecule manipulation and analysis. Because of their small sizes and their ability to selectively transport solutes through otherwise impermeable membranes, nanopores have numerous potential applications in nanobiotechnology. For most applications, properties of the nanopore systems have to be characterize at the atomic level, which is currently beyond the limit of experimental methods. Molecular dynamics (MD) simulations can provide the desired information, however several technical challenges have to be met before this method can be applied to synthetic nanopore systems. Here, we highlight our recent work on modeling synthetic nanopores of the most common types. First, we describe a novel graphical tool for setting up all-atom systems incorporating inorganic materials and biomolecules. Next, we illustrate the application of the MD method for silica, silicon nitride, and polyethylene terephthalate nanopores. Following that, we describe a method for modeling synthetic surfaces using a bias potential. Future directions for tool development and nanopore modeling are briefly discussed at the end of this article.

Massively-parallel ultra-high-aspect-ratio nanochannels as mesoporous membranes

Many fabrication technologies have been used to build nano/mesoporous materials/filters with a good size control, but the integration of these systems into a microsystem format has been a challenge. Microfabricated nanofilters suffer from small open volume and low-throughput. In this paper, we developed a novel fabrication strategy for generating massively-parallel, regular vertical nanochannel membranes with a uniform, well-controlled gap size of approximately 50 nm and a depth up to approximately 40 microm, by using only standard semiconductor fabrication techniques. The vertical nanofilter membranes were fabricated into an anisotropic nanofilter array, which demonstrates the ability to integrate nanofilters and micron-sized channels/pores seamlessly. We demonstrated efficient continuous-flow separation of large DNAs and small molecules in a two-dimensional vertical nanochannel array device. These ultra-high-aspect-ratio nanochannels have the advantage of large open volume, enabling high-throughput applications.

Suspended nanostructured alumina membranes

Suspended thin membranes have drawn increased attention due to their exceptional thermal properties. The membranes presented here are made of alumina (Al(2)O(3)), which offers several advantages over the traditional silicon nitride membranes. Alumina films are atomic layer deposited (ALD), which enables conformal deposition profiles at low deposition temperatures. Fabrication of nanocorrugated alumina membranes is demonstrated for the first time by coating nanostructured surfaces, such as silicon nanograss and polystyrene nanobeads, with a thin layer of alumina (20-200 nm), subsequently released by sacrificial plasma etching. The low deposition temperature (80 degrees C) of alumina makes it possible to coat sensitive materials, which opens up new possibilities in the field of polymer micro- and nanofabrication. Smooth alumina membranes were implemented both in continuous and in patterned forms. The smooth membranes, both continuous and perforated, were used as thermally insulating platforms for metallic devices, such as microheaters. The mechanical strength of alumina enables large suspended microstructures to be made of metals that would not have the mechanical strength in themselves.

Characterization of porous silicon integrated in liquid chromatography chips

Properties of porous silicon which are relevant for use of the material as a stationary phase in liquid chromatography chips, like porosity, pore size and specific surface area, were determined with high-resolution SEM and N(2) adsorption-desorption isotherms. For the anodization conditions investigated, porosity is between 20 and 60%, pore sizes between 2 and 5 nm and specific surface area between 130 and 410 m(2)/cm(3). It was established that under identical anodization conditions, porous layer formation is 10-15% slower on micromachined pillars than on flat substrates, and depends on geometrical parameters like pillar diameter and height and interpillar spacing. In microchannels containing pillars with a porous silicon shell, chromatographic experiments on a coumarin dye mixture were performed, which in comparison with non-porous pillars showed a significant increase of the retention factors, resulting from the large internal surface of the porous pillars. The increased relative retention of one of the coumarin dyes, C480, could be correlated quantitatively with the measured internal surface of the porous layer. Due to the small pore size, these porous shell columns are particularly suitable for analytical or preparative separation of low-molecular weight molecules, with applications in metabolomics, food quality control, or medical diagnostics.