Vapor-Phase Deposition and Modification of Metal-Organic Frameworks: State-of-the-Art and Future Directions

Extrinsically conducting MOFs: guest-promoted enhancement of electrical conductivity, thin film fabrication and applications

Conductive metal-organic frameworks are of current interest in chemical science because of their applications in chemiresistive sensing, electrochemical energy storage, electrocatalysis, etc. Different strategies have been employed to design conductive frameworks. In this review, we discuss the influence of different types of guest species incorporated within the pores or channels of metal-organic frameworks (MOFs) and porous coordination polymers (PCPs) to generate charge transfer pathways and modulate their electrical conductivity. We have classified dopants or guest species into three different categories: (i) metal-based dopants, (ii) molecule and molecular entities and (iii) organic conducting polymers. Different types of metal ions, metal nano-clusters and metal oxides have been used to enhance electrical conductivity in MOFs. Metal ions and metal nano-clusters depend on the hopping process for efficient charge transfer whereas metal-oxides show charge transport through the metal-oxygen pathway. Several types of molecules or molecular entities ranging from neutral TCNQ, I2, and fullerene to ionic methyl viologen, organometallic like nickelcarborane, etc. have been used. In these cases, the charge transfer process varies with the guest species. When organic conducting polymers are the guest, the charge transport occurs through the polymer chains, mostly based on extended π-conjugation. Here we provide a comprehensive and critical review of these strategies to add electrical conductivity to the, in most cases, otherwise insulating MOFs and PCPs. We point out the guest encapsulation process, the geometry and structure of the resulting host-guest complex, the host-guest interactions and the charge transport mechanism for each case. We also present the methods for thin film fabrication of conducting MOFs (both, liquid-phase and gas-phase based methods) and their most relevant applications like electrocatalysis, sensing, charge storage, photoconductivity, photocatalysis,… We end this review with the main obstacles and challenges to be faced and the appealing perspectives of these 21st century materials.

Reactive Extrusion Printing of Zeolitic Imidazolate Framework Films

An outstanding challenge for the field of metal-organic frameworks (MOFs) is structuring to form forms with greater useability. Reactive extrusion printing (REP) is a technique for the direct formation of films from their molecular components on-demand and on-location. Here we apply REP for the first time to zeolitic imidazolate frameworks (ZIFs) and study the interplay of solvent and molarity ratio on the phase distribution between ZIF-8 and ZIF-L in reactive printed films. Our results show that REP controllably directs phase formation between ZIF-L and ZIF-8 and that REP also gives control over crystal size and that high-quality ZIF-8 films, in particular, are produced in low-dispersity interconnected nanoparticulate form. Importantly, we show that REP is responsive to established surface-functionalization techniques to control important printing parameters of line width and thickness. This work expands the repertoire of REP to the important class of ZIFs.

Universal Strategy for Metal-Organic Framework Growth: From Cascading-Functional Films to MOF-on-MOFs

Transformation of metal-organic framework (MOF) particles into thin films is urgently needed for the persistent development of well-applicable devices, and recently emerging functional-integrated hybrid frameworks. Although some flexible polymers and exclusive modification approaches have been proposed, the additive-free and widely applicable strategy has not been reported, hampering the deep investigation of the structure-performance relationship. A universal strategy for the in situ growth of large-area and continuous MOF films with controllable microstructures is introduced, through the modification of multi-scale and multi-structure substrates with poly(4-vinylpyridine) as the anchor to capture metal ions via Coulomb attraction. Based on the clarified structure-adsorption-separation mechanisms, the customized devices fabricated by in situ growth can achieve highly selective adsorption and excellently synergetic separation of various industrially relevant isomers. In addition, this strategy is also feasible for the construction of MOF-on-MOFs with varied lattice parameters. This strategy is easy to implement and will be widely applicable to the surface growth of diverse MOFs on desired substrates, and provides a new concept for developing hybrid MOFs integrating with customized functionalities.

Designing a MOF-functionalized Nanofibrous Aerogel via Vapor-Phase Synthesis

Designing 3D mechanically robust and high-surface-area substrates for uniform and high-density deposition of metal-organic frameworks (MOFs) provide a promising strategy to enhance surface accessibility and application of these highly functional materials. Nanofibrous aerogel (NFA) with its highly porous self-supported structure composed of interconnected nanofibrous network offers an ideal platform in this regard. Herein, a facile one-pot strategy is introduced, which utilizes direct deposition of MOF on the nanofibrous surface of the NFAs. NFAs are synthesized using electrospun polyacrylonitrile/polyvinylpyrrolidone (PAN/PVP) polymer nanofibers containing zinc acetate (Zn(Ac)2), which are subjected to freeze drying and thermal treatment. The latter converts Zn(Ac)2 to zinc oxide (ZnO), providing the sites for MOF growth while also adding mechanical integrity to the NFAs through cyclization of the PAN. Exposure of the NFA to the vapor-phase of organic ligand, 2-methylimidazole (2-MeIm) enables in situ growth of zeolitic imidazolate framework-8 (ZIF-8) MOF on the NFA. ZIF-8 loading on the NFAs is further improved by more than tenfold by synthesizing ZnO nanorods/protrusions on the nanofibers, which enables more sites for MOF growth. These findings underscore a significant advancement in designing MOF-based hybrid aerogels, offering a streamlined approach for their use in diverse applications, from catalysis to sensing and water purification.

Crosslinking-induced patterning of MOFs by direct photo- and electron-beam lithography

Metal-organic frameworks (MOFs) with diverse chemistry, structures, and properties have emerged as appealing materials for miniaturized solid-state devices. The incorporation of MOF films in these devices, such as the integrated microelectronics and nanophotonics, requires robust patterning methods. However, existing MOF patterning methods suffer from some combinations of limited material adaptability, compromised patterning resolution and scalability, and degraded properties. Here we report a universal, crosslinking-induced patterning approach for various MOFs, termed as CLIP-MOF. Via resist-free, direct photo- and electron-beam (e-beam) lithography, the ligand crosslinking chemistry leads to drastically reduced solubility of colloidal MOFs, permitting selective removal of unexposed MOF films with developer solvents. This enables scalable, micro-/nanoscale (≈70 nm resolution), and multimaterial patterning of MOFs on large-area, rigid or flexible substrates. Patterned MOF films preserve their crystallinity, porosity, and other properties tailored for targeted applications, such as diffractive gas sensors and electrochromic pixels. The combined features of CLIP-MOF create more possibilities in the system-level integration of MOFs in various electronic, photonic, and biomedical devices.

Recent advances on surface mounted metal-organic frameworks for energy storage and conversion applications: Trends, challenges, and opportunities

Establishing green and reliable energy resources is very important to counteract the carbon footprints and negative impact of non-renewable energy resources. Metal-organic frameworks (MOFs) are a class of porous material finding numerous applications due to their exceptional qualities, such as high surface area, low density, superior structural flexibility, and stability. Recently, increased attention has been paid to surface mounted MOFs (SURMOFs), which is nothing but thin film of MOF, as a new category in nanotechnology having unique properties compared to bulk MOFs. With the advancement of material growth and synthesis technologies, the fine tunability of film thickness, consistency, size, and geometry with a wide range of MOF complexes is possible. In this review, we recapitulate various synthesis approaches of SURMOFs including epitaxial synthesis approach, direct solvothermal method, Langmuir-Blodgett LBL deposition, Inkjet printing technique and others and then correlated the synthesis-structure-property relationship in terms of energy storage and conversion applications. Further the critical assessment and current problems of SURMOFs have been briefly discussed to explore the future opportunities in SURMOFs for energy storage and conversion applications.

ALD/MLD coating of patterned vertically aligned carbon nanotube micropillars with Fe-NH2TP hybrids

The creation of nanoscale organic-inorganic hybrid coatings with uniform architecture and high surface area, while maintaining their structural and morphological integrity, remains a significant challenge in the field. In this study, we present a novel solution, by utilizing Atomic/Molecular Layer Deposition (ALD/MLD) to coat patterned vertically aligned carbon nanotube micropillars with a conformal amorphous layer of Fe-NH₂TP, which is a trivalent iron complex complexed with 2-amino terephthalate. The effectiveness of the coating is verified through multiple analytical techniques, including high-resolution transmission electron microscopy, scanning transmission electron microscopy, grazing incidence X-ray diffraction, and Fourier transform infrared spectroscopy. The Fe-NH₂TP hybrid film exhibits hydrophobic properties, as confirmed by water contact angle measurements. Our findings contribute to advancing the understanding of how to grow high-quality one-dimensional materials using ALD/MLD and hold promise for future research in this area.

Principles of Design and Synthesis of Metal Derivatives from MOFs

Materials derived from metal-organic frameworks (MOFs) have demonstrated exceptional structural variety and complexity and can be synthesized using low-cost scalable methods. Although the inherent instability and low electrical conductivity of MOFs are largely responsible for their low uptake for catalysis and energy storage, a superior alternative is MOF-derived metal-based derivatives (MDs) as these can retain the complex nanostructures of MOFs while exhibiting stability and electrical conductivities of several orders of magnitude higher. The present work comprehensively reviews MDs in terms of synthesis and their nanostructural design, including oxides, sulfides, phosphides, nitrides, carbides, transition metals, and other minor species. The focal point of the approach is the identification and rationalization of the design parameters that lead to the generation of optimal compositions, structures, nanostructures, and resultant performance parameters. The aim of this approach is to provide an inclusive platform for the strategies to design and process these materials for specific applications. This work is complemented by detailed figures that both summarize the design and processing approaches that have been reported and indicate potential trajectories for development. The work is also supported by comprehensive and up-to-date tabular coverage of the reported studies.

Free-Standing Metal-Organic Framework Membranes Made by Solvent-Free Space-Confined Conversion for Efficient H2/CO2 Separation

Metal-organic frameworks (MOFs) are promising candidates for the advanced membrane materials based on their diverse structures, modifiable pore environment, precise pore sizes, etc. Nevertheless, the use of supports and large amounts of solvents in traditional solvothermal synthesis of MOF membranes is considered inefficient, costly, and environmentally problematic, coupled with challenges in their scalable manufacturing. In this work, we report a solvent-free space-confined conversion (SFSC) approach for the fabrication of a series of free-standing MOF (ZIF-8, Zn(EtIm)₂, and Zn₂(BIm)₄) membranes. This approach excludes the employment of solvents and supports that require tedious pretreatment and, thus, makes the process more environment-friendly and highly efficient. The free-standing membranes feature a robust and unique architecture, which comprise dense surface layers and highly porous interlayer with large amounts of irregular-shaped micron-scale pore cavities, inducing satisfactory H₂/CO₂ selectivities and exceptional H₂ permeances. The ZIF-8 membrane affords a considerable H₂ permeance of 2653.7 GPU with a competitive H₂/CO₂ selectivity of 17.1, and the Zn(EtIm)₂ membrane exhibits a high H₂/CO₂ selectivity of 22.1 with an excellent H₂ permeance (6268.7 GPU). The SFSC approach potentially provides a new pathway for preparing free-standing MOF membranes under solvent-free conditions, rendering it feasible for scale-up production of membrane materials for gas separation.

Chemical Vapor Deposition and High-Resolution Patterning of a Highly Conductive Two-Dimensional Coordination Polymer Film

Crystalline coordination polymers with high electrical conductivities and charge carrier mobilities might open new opportunities for electronic devices. However, current solvent-based synthesis methods hinder compatibility with microfabrication standards. Here, we describe a solvent-free chemical vapor deposition method to prepare high-quality films of the two-dimensional conjugated coordination polymer Cu-BHT (BHT = benzenehexanothiolate). This approach involves the conversion of a metal oxide precursor into Cu-BHT nanofilms with a controllable thickness (20-85 nm) and low roughness (<10 nm) through exposure to the vaporized organic linker. Moreover, the restricted metal ion mobility during the vapor-solid reaction enables high-resolution patterning via both bottom-up lithography, including the fabrication of micron-sized Hall bar and electrode patterns to accurately evaluate the conductivity and mobility values of the Cu-BHT films.

Recent Advances in Continuous MOF Membranes for Gas Separation and Pervaporation

Metal-organic frameworks (MOFs), a sub-group of porous crystalline materials, have been receiving increasing attention for gas separation and pervaporation because of their high thermal and chemical stability, narrow window sizes, as well as tuneable structural, physical, and chemical properties. In this review, we comprehensively discuss developments in the formation of continuous MOF membranes for gas separation and pervaporation. Additionally, the application performance of continuous MOF membranes in gas separation and pervaporation are analysed. Lastly, some perspectives for the future application of continuous MOF membranes for gas separation and pervaporation are given.

Solution Atomic Layer Deposition of Smooth, Continuous, Crystalline Metal-Organic Framework Thin Films

For the first time, a procedure has been established for the growth of surface-anchored metal-organic framework (SURMOF) copper(II) benzene-1,4-dicarboxylate (Cu-BDC) thin films of thickness control with single molecule accuracy. For this, we exploit the novel method solution atomic layer deposition (sALD). The sALD growth rate has been determined at 4.5 Å per cycle. The compact and dense SURMOF films grown at room temperature by sALD possess a vastly superior film thickness uniformity than those deposited by conventional solution-based techniques, such as dipping and spraying while featuring clear crystallinity from 100 nm thickness. The highly controlled layer-by-layer growth mechanism of sALD proves crucial to prevent unwanted side reactions such as Ostwald ripening or detrimental island growth, ensuring continuous Cu-BDC film coverage. This successful demonstration of sALD-grown compact continuous Cu-BDC SURMOF films is a paradigm change and provides a key advancement enabling a multitude of applications that require continuous and ultrathin coatings while maintaining tight film thickness specifications, which were previously unattainable with conventional solution-based growth methods.

Influence of Precursor Density and Conversion Time on the Orientation of Vapor-Deposited ZIF-8

ZIF-8 was synthesized by subjecting ZnO thin films deposited via plasma-enhanced atomic layer deposition to a 2-methylimidazole vapor. The impact of the conversion time as well as the density and thickness of the ZnO precursor on the resulting ZIF-8 layers were investigated. Grazing Incidence X-ray diffraction reveals a preferred (100) or (111) orientation of the ZIF-8 crystals, depending on thickness and density of the precursor, and with a more prominent orientation at longer conversion times. The onset of crystallization occurs after 20 min of conversion for the less dense precursor, compared to 40 min for the denser one. The ZIF-8 thickness and roughness increase with conversion time. The final thickness of the ZIF-8 layer depends on the thickness and density of the precursor layer, and can be up to 15-fold higher than the precursor thickness.

Vapor-Phase Processing of Metal-Organic Frameworks

ConspectusPorous metal-organic frameworks (MOFs), formed from organic linkers and metal nodes, have attracted intense research attention. Because of their high specific surface areas, uniform and adjustable pore sizes, and versatile physicochemical properties, MOFs have shown disruptive potential in adsorption, catalysis, separation, etc. For many of these applications, MOFs are synthesized solvothermally as bulk powders and subsequently shaped as pellets or extrudates. Other applications, such as membrane separations and (opto)electronics, require the implementation of MOFs as (patterned) thin films. Most thin-film formation methods are adapted from liquid-phase synthesis protocols. Precursor transport and nucleation are difficult to control in these cases, often leading to particle formation in solution. Moreover, the use of solvents gives rise to environmental and safety challenges, incompatibility issues with some substrates, and corrosion issues in the case of dissolved metal salts. In contrast, vapor-phase processing methods have the merits of environmental friendliness, control over thickness and conformality, scalability in production, and high compatibility with other workflows.In this Account, we outline some of our efforts and related studies in the development and application of vapor-phase processing of crystalline MOF materials (MOF-VPP). We first highlight the advances and mechanisms in the vapor-phase deposition of MOFs (MOF-VPD), mainly focusing on the reactions between a linker vapor and a metal-containing precursor layer. The characteristics of the obtained MOFs (thickness, porosity, crystallographic phase, orientation, etc.) and the correlation of these properties with the deposition parameters (precursors, temperatures, humidity, post-treatments, etc.) are discussed. Some in situ characterization methods that contributed to a fundamental understanding of the involved mechanisms are included in the discussion. Second, four vapor-phase postsynthetic functionalization (PSF) methods are summarized: linker exchange, guest loading, linker grafting, and metalation. These approaches eliminate potential solubility issues and enable fast diffusion of reactants and guests as well as a high loading or degree of exchange. Vapor-phase PSF provides a platform to modify the MOF porosity or even introduce new functionalities (e.g., luminescence photoswitching and catalytic activity). Third, since vapor-phase processing methods enable the integration of MOF film deposition into a (micro)fabrication workflow, they facilitate a range of applications with improved performance (low-k dielectrics, sensors, membrane separations, etc.). Finally, we provide a discussion on the limitations, challenges, and further opportunities for MOF-VPP. Through the discussion and analysis of the vapor-phase processing strategies as well as the underlying mechanisms in this Account, we hope to contribute to the development of the controllable synthesis, functionalization, and application of MOFs and related materials.

Chemical Vapor Deposition of Ionic Liquids for the Fabrication of Ionogel Films and Patterns

Film deposition and high-resolution patterning of ionic liquids (ILs) remain a challenge, despite a broad range of applications that would benefit from this type of processing. Here, we demonstrate for the first time the chemical vapor deposition (CVD) of ILs. The IL-CVD method is based on the formation of a non-volatile IL through the reaction of two vaporized precursors. Ionogel micropatterns can be easily obtained via the combination of IL-CVD and standard photolithography, and the resulting microdrop arrays can be used as microreactors. The IL-CVD approach will facilitate leveraging the properties of ILs in a range of applications and microfabricated devices.

Stretchable and Multi-Metal-Organic Framework Fabrics Via High-Yield Rapid Sorption-Vapor Synthesis and Their Application in Chemical Warfare Agent Hydrolysis

Protocols to create metal-organic framework (MOF)/polymer composites for separation, chemical capture, and catalytic applications currently rely on relatively slow solution-based processing to form single MOF composites. Here, we report a rapid, high-yield sorption-vapor method for direct simultaneous growth of single and multiple MOF materials onto untreated flexible and stretchable polymer fibers and films. The synthesis utilizes favorable reactant absorption into polymers coupled with rapid vapor-driven MOF crystallization to form high surface area (>250 m²/g_composite) composites, including UiO-66-NH₂, HKUST-1, and MOF-525 on spandex, nylon, and other fabrics. The resulting composites are robust and maintain their functionality even after stretching. Stretchable MOF fabrics enable rapid solid-state hydrolysis of the highly toxic chemical warfare agent soman and paraoxon-methyl simulant. We show that this approach can readily be scaled by solution spray-coating of MOF precursors and to large area substrates.

A Showcase of Green Chemistry: Sustainable Synthetic Approach of Zirconium-Based MOF Materials

Zirconium-based metal-organic framework materials (Zr-MOFs) have more practical usage over most conventional benchmark porous materials and even many other MOFs due to the excellent structural stability, rich coordination forms, and various active sites. However, their mass-production and application are restricted by the high-cost raw materials, complex synthesis procedures, harsh reaction conditions, and unexpected environmental impact. Based on the principles of "Green Chemistry", considerable efforts have been done for breaking through the limitations, and significant progress has been made in the sustainable synthesis of Zr-MOFs over the past decade. In this review, the advancements of green raw materials and green synthesis methods in the synthesis of Zr-MOFs are reviewed, along with the corresponding drawbacks. The challenges and prospects are discussed and outlooked, expecting to provide guidance for the acceleration of the industrialization and commercialization of Zr-MOFs.

Emergence of Metallic Conductivity in Ordered One-Dimensional Coordination Polymer Thin Films upon Reductive Doping

The prospect of introducing tunable electric conductivity in metal-organic coordination polymers is of high interest for nanoelectronic applications. As the electronic properties of these materials are strongly dependent on their microstructure, the assembly of coordination polymers into thin films with well-controlled growth direction and thickness is crucial for practical devices. Here, we report the deposition of one-dimensional (1D) coordination polymer thin films of N,N'-dimethyl dithiooxamidato-copper by atomic/molecular layer deposition. High out-of-plane ordering is observed in the resulting thin films suggesting the formation of a well-ordered secondary structure by the parallel alignment of the 1D polymer chains. We show that the electrical conductivity of the thin films is highly dependent on their oxidation state. The as-deposited films are nearly insulating with an electrical conductivity below 10^-10 S cm^-1 with semiconductor-like temperature dependency. Partial reduction with H₂ at elevated temperature leads to an increase in the electrical conductivity by 8 orders of magnitude. In the high-conductance state, metallic behavior is observed over the temperature range of 2-300 K. Density functional theory calculations indicate that the metallic behavior originates from the formation of a half-filled energy band intersecting the Fermi level with the conduction pathway formed by the Cu-S-Cu interaction between neighboring polymer chains.

Advanced technologies for the fabrication of MOF thin films

Metal-organic framework (MOF) thin films represent a milestone in the development of future technological breakthroughs. The processability of MOFs as films on surfaces together with their major features (i.e. tunable porosity, large internal surface area, and high crystallinity) is broadening their range of applications to areas such as gas sensing, microelectronics, photovoltaics, and membrane-based separation technologies. Despite the recent attention that MOF thin films have received, many challenges still need to be addressed for their manufacturing and integrability, especially when an industrial scale-up perspective is envisioned. In this brief review, we introduce several appealing approaches that have been developed in the last few years. First, a summary of liquid phase strategies that comprise microfluidic methods and supersaturation-driven crystallization processes is described. Then, gas phase approaches based on atomic layer deposition (ALD) are also presented.

Structural and electronic switching of a single crystal 2D metal-organic framework prepared by chemical vapor deposition

The incorporation of metal-organic frameworks into advanced devices remains a desirable goal, but progress is hindered by difficulties in preparing large crystalline metal-organic framework films with suitable electronic performance. We demonstrate the direct growth of large-area, high quality, and phase pure single metal-organic framework crystals through chemical vapor deposition of a dimolybdenum paddlewheel precursor, Mo2(INA)4. These exceptionally uniform, high quality crystals cover areas up to 8600 µm2 and can be grown down to thicknesses of 30 nm. Moreover, scanning tunneling microscopy indicates that the Mo2(INA)4 clusters assemble into a two-dimensional, single-layer framework. Devices are readily fabricated from single vapor-phase grown crystals and exhibit reversible 8-fold changes in conductivity upon illumination at modest powers. Moreover, we identify vapor-induced single crystal transitions that are reversible and responsible for 30-fold changes in conductivity of the metal-organic framework as monitored by in situ device measurements. Gas-phase methods, including chemical vapor deposition, show broader promise for the preparation of high-quality molecular frameworks, and may enable their integration into devices, including detectors and actuators.

In Situ Spectroscopy of Calcium Fluoride Anchored Metal-Organic Framework Thin Films during Gas Sorption

Surface‐mounted metal–organic frameworks (SURMOFs) show promising behavior for a manifold of applications. As MOF thin films are often unsuitable for conventional characterization techniques, understanding their advantageous properties over their bulk counterparts presents a great analytical challenge. In this work, we demonstrate that MOFs can be grown on calcium fluoride (CaF₂) windows after proper functionalization. As CaF₂ is optically (in the IR and UV/Vis range of the spectrum) transparent, this makes it possible to study SURMOFs using conventional spectroscopic tools typically used during catalysis or gas sorption. Hence, we have measured HKUST‐1 during the adsorption of CO and NO. We show that no copper oxide impurities are observed and also confirm that SURMOFs grown by a layer‐by‐layer (LbL) approach possess Cu⁺ species in paddlewheel confirmation, but 1.9 times less than in bulk HKUST‐1. The developed methodology paves the way for studying the interaction of any adsorbed gases with thin films, not limited to MOFs, low temperatures, or these specific probe molecules, pushing the boundaries of our current understanding of functional porous materials.

Advanced Photoresponsive Materials Using the Metal-Organic Framework Approach

When fabricating macroscopic devices exploiting the properties of organic chromophores, the corresponding molecules need to be condensed into a solid material. Since optical absorption properties are often strongly affected by interchromophore interactions, solids with a well-defined structure carry substantial advantages over amorphous materials. Here, the metal-organic framework (MOF)-based approach is presented. By appropriate functionalization, most organic chromophores can be converted to function as linkers, which can coordinate to metal or metal-oxo centers so as to yield stable, crystalline frameworks. Photoexcitations in such chromophore-based MOFs are surveyed, with a special emphasis on light-switchable MOFs from photochromic molecules. The conventional powder form of MOFs obtained using solvothermal approaches carries certain disadvantages for optical applications, such as limited efficiency resulting from absorption and light scattering caused by the (micrometer-sized) powder particles. How these problems can be avoided by using MOF thin films is demonstrated.

Electrical conductivity and magnetic bistability in metal–organic frameworks and coordination polymers: charge transport and spin crossover at the nanoscale

This review aims to reassess the progress, issues and opportunities in the path towards integrating conductive and magnetically bistable coordination polymers and metal–organic frameworks as active components in electronic devices.

Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics

The performance of modern chips is strongly related to the multi-layer interconnect structure that interfaces the semiconductor layer with the outside world. The resulting demand to continuously reduce the k-value of the dielectric in these interconnects creates multiple integration challenges and encourages the search for novel materials. Here we report a strategy for the integration of metal-organic frameworks (MOFs) as gap-filling low-k dielectrics in advanced on-chip interconnects. The method relies on the selective conversion of purpose-grown or native metal-oxide films on the metal interconnect lines into MOFs by exposure to organic linker vapor. The proposed strategy is validated for thin films of the zeolitic imidazolate frameworks ZIF-8 and ZIF-67, formed in 2-methylimidazole vapor from ALD ZnO and native CoOx, respectively. Both materials show a Young's modulus and dielectric constant comparable to state-of-the-art porous organosilica dielectrics. Moreover, the fast nucleation and volume expansion accompanying the oxide-to-MOF conversion enable uniform growth and gap-filling of narrow trenches, as demonstrated for 45 nm half-pitch fork-fork capacitors.

Vapour-phase deposition of oriented copper dicarboxylate metal–organic framework thin films

Vapour-phase deposition of copper dicarboxylate metal–organic framework thin films with an out-of-plane orientation and accessible porosity.

The self-assembly and metal adatom coordination of a linear bis-tetrazole ligand on Ag(111)

We employ a linear linker molecule consisting of a benzene functionalised with two tetrazole moieties at para positions. Its self-assembly and coordination with the native silver adatoms and codeposited Fe adatoms on a Ag(111) surface under ultra high vacuum conditions are investigated by means of scanning tunnelling microscopy and X-ray photoelectron spectroscopy. We discover a rich spectrum of room-temperature stable Ag and Fe2+ coordination nodes depending on the formation temperature.

Solvothermal Synthesis of MIL-96 and UiO-66-NH2 on Atomic Layer Deposited Metal Oxide Coatings on Fiber Mats

Metal-organic frameworks (MOFs), which contain reactive metal clusters and organic ligands allowing for large porosities and surface areas, have proven effective in gas adsorption, separations, and catalysis. MOFs are most commonly synthesized as bulk powder, requiring additional processes to adhere them to functional devices and fabrics that risk decreasing the powder porosity and adsorption capacity. Here, we demonstrate a method of first coating fabrics with metal oxide films using atomic layer deposition (ALD). This process creates conformal films of controllable thickness on each fiber, while providing a more reactive surface for MOF nucleation. By submerging the ALD coated fabric in solution during solvothermal MOF synthesis, the MOFs create a conformal, well-adhered coating on the fibers, resulting in a MOF-functionalized fabric, without additional adhesion materials that may block MOF pores and functional sites. Here we demonstrate two solvothermal synthesis methods. First, we form a MIL-96(Al) layer on polypropylene fibers using synthetic conditions that convert the metal oxide to MOF. Using initial inorganic films of varying thicknesses, diffusion of the organic linker into the inorganic allows us to control the extent of MOF loading on the fabric. Second, we perform a solvothermal synthesis of UiO-66-NH2 in which the MOF nucleates on the conformal metal oxide coating on polyamide-6 (PA-6) fibers, thereby producing a uniform and conformal thin film of MOF on the fabric. The resulting materials can be directly incorporated into filter devices or protective clothing and eliminate the maladroit qualities of loose powder.

Synthesis of MOFs: a personal view on rationalisation, application and exploration

This perspective highlights some studies and insights in the synthesis of metal-organic frameworks (MOFs) in a brief and comprehensive manner. The understanding of the synthesis procedures investigated by in and ex situ methods is of special interest since knowledge on the nucleation and crystallisation mechanism will ideally lead to an improved control over product formation. The prospective developments associated with the manufacturing of such materials (or devices consisting thereof) are discussed as well. A major challenge is the adjustment of the synthesis conditions to yield quantities suitable for real life applications. Last but not least, vast opportunities are yet to be explored involving the synthesis of both known and novel compounds. Thus the crucial points involving the synthesis of MOFs summarized in this perspective are rationalisation, application and exploration. For each subtopic we have also attempted to anticipate future challenges and developments.

Fabrication of zinc-dicarboxylate- and zinc-pyrazolate-carboxylate-framework thin films through vapour–solid deposition

Fabrication of 3-dimensional MOF thin films has been investigated through the conversion of ZnO thin film via a pure vapour–solid deposition reaction at ambient pressure.

Green synthesis of a new layered aluminium citraconate: crystal structures, intercalation behaviour towards H2O and in situ PXRD studies of its crystallisation

A new aluminium citraconate CAU-15-Cit shows reversible de-/rehydration and its synthesis was followed by in situ PXRD using synchrotron radiation.

Open-label phase I clinical trial of Ad5-EBOV in Africans in China

BACKGROUND

To determine the safety and immunogenicity of a novel recombinant adenovirus type 5 vector based Ebola virus disease vaccine (Ad5-EBOV) in Africans in China.

METHODS

A phase 1, dose-escalation, open-label trial was conducted. 61 healthy Africans were sequentially enrolled, with 31 participants receiving one shot intramuscular injection and 30 participants receiving a double-shot regimen. Primary and secondary end points related to safety and immunogenicity were assessed within 28 d after vaccination. This study was registered with ClinicalTrials.gov (NCT02401373).

RESULTS

Ad5-EBOV is well tolerated and no adverse reaction of grade 3 or above was observed. 53 (86.89%) participants reported at least one adverse reaction within 28 d of vaccination. The most common reaction was fever and the mild pain at injection site, and there were no significant difference between these 2 groups. Ebola glycoprotein-specific antibodies appeared in all 61 participants and antibodies titers peaked after 28 d of vaccination. The geometric mean titres (GMTs) were similar between these 2 groups (1919.01 vs 1684.70 P = 0.5562). The glycoprotein-specific T-cell responses rapidly peaked after 14 d of vaccination and then decreased, however, the percentage of subjects with responses were much higher in the high-dose group (60.00% vs 9.68%, P = 0.0014). Pre-existing Ad5 neutralizing antibodies could significantly dampen the specific humoral immune response and cellular response to the vaccine.

CONCLUSION

The application of Ad5-EBOV demonstrated safe in Africans in China and a specific GP antibody and T-cell response could occur 14 d after the first immunization. This acceptable safety profile provides a reliable basis to proceed with trials in Africa.