1
|
Fan X, He C, Ding J, Gao Q, Ma H, Lemme MC, Zhang W. Graphene MEMS and NEMS. MICROSYSTEMS & NANOENGINEERING 2024; 10:154. [PMID: 39468030 PMCID: PMC11519522 DOI: 10.1038/s41378-024-00791-5] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/09/2024] [Revised: 07/22/2024] [Accepted: 08/14/2024] [Indexed: 10/30/2024]
Abstract
Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength, and piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, and new functionalities. In this review, we discuss the merits of graphene as a functional material for MEMS and NEMS, the related properties of graphene, the transduction mechanisms of graphene MEMS and NEMS, typical transfer methods for integrating graphene with MEMS substrates, methods for fabricating suspended graphene, and graphene patterning and electrical contact. Consequently, we provide an overview of devices based on suspended and nonsuspended graphene structures. Finally, we discuss the potential and challenges of applications of graphene in MEMS and NEMS. Owing to its unique features, graphene is a promising material for emerging MEMS, NEMS, and sensor applications.
Collapse
Affiliation(s)
- Xuge Fan
- Advanced Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, 100081, Beijing, China.
- Center for Interdisciplinary Science of Optical Quantum and NEMS Integration, School of Physics, Beijing Institute of Technology, 100081, Beijing, China.
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, 100081, Beijing, China.
| | - Chang He
- Advanced Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, 100081, Beijing, China
| | - Jie Ding
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, 100081, Beijing, China.
| | - Qiang Gao
- Advanced Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, 100081, Beijing, China
| | - Hongliang Ma
- Advanced Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, 100081, Beijing, China
- School of Integrated Circuits and Electronics, Beijing Institute of Technology, 100081, Beijing, China
| | - Max C Lemme
- Chair of Electronic Devices, Faculty of Electrical Engineering and Information Technology, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074, Aachen, Germany
- AMO GmbH, Otto-Blumenthal-Str. 25, 52074, Aachen, Germany
| | - Wendong Zhang
- State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, 030051, China.
- National Key Laboratory for Electronic Measurement Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051, China.
| |
Collapse
|
2
|
Guo L, Hu S, Gu X, Zhang R, Wang K, Yan W, Sun X. Emerging Spintronic Materials and Functionalities. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2301854. [PMID: 37309258 DOI: 10.1002/adma.202301854] [Citation(s) in RCA: 7] [Impact Index Per Article: 7.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/27/2023] [Revised: 06/01/2023] [Indexed: 06/14/2023]
Abstract
The explosive growth of the information era has put forward urgent requirements for ultrahigh-speed and extremely efficient computations. In direct contrary to charge-based computations, spintronics aims to use spins as information carriers for data storage, transmission, and decoding, to help fully realize electronic device miniaturization and high integration for next-generation computing technologies. Currently, many novel spintronic materials have been developed with unique properties and multifunctionalities, including organic semiconductors (OSCs), organic-inorganic hybrid perovskites (OIHPs), and 2D materials (2DMs). These materials are useful to fulfill the demand for developing diverse and advanced spintronic devices. Herein, these promising materials are systematically reviewed for advanced spintronic applications. Due to the distinct chemical and physical structures of OSCs, OIHPs, and 2DMs, their spintronic properties (spin transport and spin manipulation) are discussed separately. In addition, some multifunctionalities due to photoelectric and chiral-induced spin selectivity (CISS) are overviewed, including the spin-filter effect, spin-photovoltaics, spin-light emitting devices, and spin-transistor functions. Subsequently, challenges and future perspectives of using these multifunctional materials for the development of advanced spintronics are presented.
Collapse
Affiliation(s)
- Lidan Guo
- Key Laboratory of Nanosystem and Hierarchical Fabrication, National Center for Nanoscience and Technology, Beijing, 100190, P. R. China
| | - Shunhua Hu
- Key Laboratory of Nanosystem and Hierarchical Fabrication, National Center for Nanoscience and Technology, Beijing, 100190, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Xianrong Gu
- Key Laboratory of Nanosystem and Hierarchical Fabrication, National Center for Nanoscience and Technology, Beijing, 100190, P. R. China
| | - Rui Zhang
- Key Laboratory of Nanosystem and Hierarchical Fabrication, National Center for Nanoscience and Technology, Beijing, 100190, P. R. China
| | - Kai Wang
- Key Laboratory of Luminescence and Optical Information, Ministry of Education, School of Physical Science and Engineering, Institute of Optoelectronics Technology, Beijing Jiaotong University, Beijing, 100044, P. R. China
| | - Wenjing Yan
- School of Physics and Astronomy, University of Nottingham, University Park, Nottingham, NG9 2RD, UK
| | - Xiangnan Sun
- Key Laboratory of Nanosystem and Hierarchical Fabrication, National Center for Nanoscience and Technology, Beijing, 100190, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
- School of Material Science and Engineering, Zhengzhou University, Zhengzhou, 450001, P. R. China
| |
Collapse
|
3
|
Zhang ZD, Lu MH, Chen YF. Observation of Free-Boundary-Induced Chiral Anomaly Bulk States in Elastic Twisted Kagome Metamaterials. PHYSICAL REVIEW LETTERS 2024; 132:086302. [PMID: 38457715 DOI: 10.1103/physrevlett.132.086302] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/06/2023] [Accepted: 12/22/2023] [Indexed: 03/10/2024]
Abstract
Chiral anomaly bulk states (CABSs) can be realized by choosing appropriate boundary conditions in a finite-size waveguide composed of two-dimensional Dirac semimetals, which have unidirectional and robust transport similar to that of valley edge states. CABSs use almost all available guiding space, which greatly improves the utilization of metamaterials. Here, free-boundary-induced CABSs in elastic twisted kagome metamaterials with C_{3v} symmetry are experimentally confirmed. The robust valley-locked transport and complete valley state conversion are experimentally observed. Importantly, the sign of the group velocity near the K and K^{'} points can be reversed by suspending masses at the boundary to manipulate the onsite potential. Moreover, CABSs are demonstrated in nanoelectromechanical phononic crystals by constructing an impedance-mismatched hard boundary. These results open new possibilities for designing more compact, space-efficient, and robust elastic wave macro- and microfunctional devices.
Collapse
Affiliation(s)
- Zi-Dong Zhang
- National Laboratory of Solid State Microstructures & Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China
| | - Ming-Hui Lu
- National Laboratory of Solid State Microstructures & Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China
- Jiangsu Key Laboratory of Artificial Functional Materials, Nanjing University, Nanjing 210093, China
| | - Yan-Feng Chen
- National Laboratory of Solid State Microstructures & Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China
- Jiangsu Key Laboratory of Artificial Functional Materials, Nanjing University, Nanjing 210093, China
| |
Collapse
|
4
|
Carter B, Hernandez UF, Miller DJ, Blaikie A, Horowitz VR, Alemán BJ. Coupled Nanomechanical Graphene Resonators: A Promising Platform for Scalable NEMS Networks. MICROMACHINES 2023; 14:2103. [PMID: 38004960 PMCID: PMC10672897 DOI: 10.3390/mi14112103] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/19/2023] [Revised: 11/07/2023] [Accepted: 11/13/2023] [Indexed: 11/26/2023]
Abstract
Arrays of coupled nanoelectromechanical resonators are a promising foundation for implementing large-scale network applications, such as mechanical-based information processing and computing, but their practical realization remains an outstanding challenge. In this work, we demonstrate a scalable platform of suspended graphene resonators, such that neighboring resonators are persistently coupled mechanically. We provide evidence of strong coupling between neighboring resonators using two different tuning methods. Additionally, we provide evidence of inter-resonator coupling of higher-order modes, demonstrating the rich dynamics that can be accessed with this platform. Our results establish this platform as a viable option for realizing large-scale programmable networks, enabling applications such as phononic circuits, tunable waveguides, and reconfigurable metamaterials.
Collapse
Affiliation(s)
- Brittany Carter
- Department of Physics, University of Oregon, Eugene, OR 97403, USA (A.B.)
| | - Uriel F. Hernandez
- Department of Physics, University of Oregon, Eugene, OR 97403, USA (A.B.)
| | - David J. Miller
- Department of Physics, University of Oregon, Eugene, OR 97403, USA (A.B.)
| | - Andrew Blaikie
- Department of Physics, University of Oregon, Eugene, OR 97403, USA (A.B.)
| | | | - Benjamín J. Alemán
- Department of Physics, University of Oregon, Eugene, OR 97403, USA (A.B.)
- Materials Science Institute, University of Oregon, Eugene, OR 97403, USA
- Center for Optical, Molecular, and Quantum Science, University of Oregon, Eugene, OR 97403, USA
- Phil and Penny Knight Campus for Accelerating Scientific Impact, University of Oregon, Eugene, OR 97403, USA
| |
Collapse
|
5
|
Kirchhof JN, Bolotin KI. Mechanically-tunable bandgap closing in 2D graphene phononic crystals. NPJ 2D MATERIALS AND APPLICATIONS 2023; 7:10. [PMID: 39398233 PMCID: PMC11466820 DOI: 10.1038/s41699-023-00374-4] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/23/2022] [Accepted: 02/10/2023] [Indexed: 10/15/2024]
Abstract
We present a tunable phononic crystal which can be switched from a mechanically insulating to a mechanically conductive (transmissive) state. Specifically, in our simulations for a phononic lattice under biaxial tension (σ xx = σ yy = 0.01 N m-1), we find a bandgap for out-of-plane phonons in the range of 48.8-56.4 MHz, which we can close by increasing the degree of tension uniaxiality (σ xx/σ yy) to 1.7. To manipulate the tension distribution, we design a realistic device of finite size, where σ xx/σ yy is tuned by applying a gate voltage to a phononic crystal made from suspended graphene. We show that the bandgap closing can be probed via acoustic transmission measurements and that the phononic bandgap persists even after the inclusion of surface contaminants and random tension variations present in realistic devices. The proposed system acts as a transistor for MHz-phonons with an on/off ratio of 105 (100 dB suppression) and is thus a valuable extension for phonon logic applications. In addition, the transition from conductive to isolating can be seen as a mechanical analogue to a metal-insulator transition and allows tunable coupling between mechanical entities (e.g. mechanical qubits).
Collapse
Affiliation(s)
- Jan N Kirchhof
- Department of Physics, Freie Universität Berlin, Arnimallee 14, 14195 Berlin, Germany
| | - Kirill I Bolotin
- Department of Physics, Freie Universität Berlin, Arnimallee 14, 14195 Berlin, Germany
| |
Collapse
|
6
|
Xu B, Zhang P, Zhu J, Liu Z, Eichler A, Zheng XQ, Lee J, Dash A, More S, Wu S, Wang Y, Jia H, Naik A, Bachtold A, Yang R, Feng PXL, Wang Z. Nanomechanical Resonators: Toward Atomic Scale. ACS NANO 2022; 16:15545-15585. [PMID: 36054880 PMCID: PMC9620412 DOI: 10.1021/acsnano.2c01673] [Citation(s) in RCA: 20] [Impact Index Per Article: 10.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/11/2022] [Accepted: 08/12/2022] [Indexed: 06/15/2023]
Abstract
The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including one-dimensional (1D) nanowires/nanotubes and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained effort have been devoted to creating mechanical devices toward the ultimate limit of miniaturization─genuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-to-atomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.
Collapse
Affiliation(s)
- Bo Xu
- Institute
of Fundamental and Frontier Sciences, University
of Electronic Science and Technology of China, Chengdu610054, China
| | - Pengcheng Zhang
- University
of Michigan−Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai200240, China
| | - Jiankai Zhu
- Institute
of Fundamental and Frontier Sciences, University
of Electronic Science and Technology of China, Chengdu610054, China
| | - Zuheng Liu
- University
of Michigan−Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai200240, China
| | | | - Xu-Qian Zheng
- Department
of Electrical and Computer Engineering, Herbert Wertheim College of
Engineering, University of Florida, Gainesville, Florida32611, United States
- College
of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing210023, China
| | - Jaesung Lee
- Department
of Electrical and Computer Engineering, Herbert Wertheim College of
Engineering, University of Florida, Gainesville, Florida32611, United States
- Department
of Electrical and Computer Engineering, University of Texas at El Paso, El Paso, Texas79968, United States
| | - Aneesh Dash
- Centre
for
Nano Science and Engineering, Indian Institute
of Science, Bangalore560012, Karnataka, India
| | - Swapnil More
- Centre
for
Nano Science and Engineering, Indian Institute
of Science, Bangalore560012, Karnataka, India
| | - Song Wu
- Institute
of Fundamental and Frontier Sciences, University
of Electronic Science and Technology of China, Chengdu610054, China
| | - Yanan Wang
- Department
of Electrical and Computer Engineering, Herbert Wertheim College of
Engineering, University of Florida, Gainesville, Florida32611, United States
- Department
of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska68588, United States
| | - Hao Jia
- Shanghai
Institute of Microsystem and Information Technology, Chinese Academy
of Sciences, Shanghai200050, China
| | - Akshay Naik
- Centre
for
Nano Science and Engineering, Indian Institute
of Science, Bangalore560012, Karnataka, India
| | - Adrian Bachtold
- ICFO-Institut
de Ciencies Fotoniques, The Barcelona Institute
of Science and Technology, Castelldefels, Barcelona08860, Spain
| | - Rui Yang
- University
of Michigan−Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai200240, China
- School of
Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai200240, China
| | - Philip X.-L. Feng
- Department
of Electrical and Computer Engineering, Herbert Wertheim College of
Engineering, University of Florida, Gainesville, Florida32611, United States
| | - Zenghui Wang
- Institute
of Fundamental and Frontier Sciences, University
of Electronic Science and Technology of China, Chengdu610054, China
- State
Key Laboratory of Electronic Thin Films and Integrated Devices, University
of Electronic Science and Technology of China, Chengdu610054, China
| |
Collapse
|
7
|
Yan W, Akimov AV, Barra-Burillo M, Bayer M, Bradford J, Gusev VE, Hueso LE, Kent A, Kukhtaruk S, Nadzeyka A, Patanè A, Rushforth AW, Scherbakov AV, Yaremkevich DD, Linnik TL. Coherent Phononics of van der Waals Layers on Nanogratings. NANO LETTERS 2022; 22:6509-6515. [PMID: 35960261 PMCID: PMC9413225 DOI: 10.1021/acs.nanolett.2c01542] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 04/17/2022] [Revised: 08/05/2022] [Indexed: 06/15/2023]
Abstract
Strain engineering can be used to control the physical properties of two-dimensional van der Waals (2D-vdW) crystals. Coherent phonons, which carry dynamical strain, could push strain engineering to control classical and quantum phenomena in the unexplored picosecond temporal and nanometer spatial regimes. This intriguing approach requires the use of coherent GHz and sub-THz 2D phonons. Here, we report on nanostructures that combine nanometer thick vdW layers and nanogratings. Using an ultrafast pump-probe technique, we generate and detect in-plane coherent phonons with frequency up to 40 GHz and hybrid flexural phonons with frequency up to 10 GHz. The latter arises from the periodic modulation of the elastic coupling of the vdW layer at the grooves and ridges of the nanograting. This creates a new type of a tailorable 2D periodic phononic nanoobject, a flexural phononic crystal, offering exciting prospects for the ultrafast manipulation of states in 2D materials in emerging quantum technologies.
Collapse
Affiliation(s)
- Wenjing Yan
- School
of Physics and Astronomy, University of
Nottingham, Nottingham NG7 2RD, United Kingdom
| | - Andrey V. Akimov
- School
of Physics and Astronomy, University of
Nottingham, Nottingham NG7 2RD, United Kingdom
| | - María Barra-Burillo
- CIC
nanoGUNE BRTA, Tolosa Hiribidea, 76, 20018 Donostia-San Sebastián, Basque Country, Spain
| | - Manfred Bayer
- Experimentelle
Physik 2, Technische Universität
Dortmund, Otto-Hahn-Strasse 4a, 44227 Dortmund, Germany
| | - Jonathan Bradford
- School
of Physics and Astronomy, University of
Nottingham, Nottingham NG7 2RD, United Kingdom
| | - Vitalyi E. Gusev
- Laboratoire
d’Acoustique de l’Uiversité du Mans (LAUM), UMR
6613, Institut d’Acoustique - Graduate School (IA-GS), CNRS, Le Mans Université, 72085 Le Mans, France
| | - Luis E. Hueso
- CIC
nanoGUNE BRTA, Tolosa Hiribidea, 76, 20018 Donostia-San Sebastián, Basque Country, Spain
- IKERBASQUE, Basque Foundation
for Science, 48013 Bilbao, Basque Country Spain
| | - Anthony Kent
- School
of Physics and Astronomy, University of
Nottingham, Nottingham NG7 2RD, United Kingdom
| | - Serhii Kukhtaruk
- Department
of Theoretical Physics, V.E. Lashkaryov
Institute of Semiconductor Physics, Pr. Nauky 41, 03028 Kyiv, Ukraine
| | - Achim Nadzeyka
- Raith
GmbH, Konrad-Adenauer-Allee
8, 44263 Dortmund, Germany
| | - Amalia Patanè
- School
of Physics and Astronomy, University of
Nottingham, Nottingham NG7 2RD, United Kingdom
| | - Andrew W. Rushforth
- School
of Physics and Astronomy, University of
Nottingham, Nottingham NG7 2RD, United Kingdom
| | - Alexey V. Scherbakov
- Experimentelle
Physik 2, Technische Universität
Dortmund, Otto-Hahn-Strasse 4a, 44227 Dortmund, Germany
| | - Dmytro D. Yaremkevich
- Experimentelle
Physik 2, Technische Universität
Dortmund, Otto-Hahn-Strasse 4a, 44227 Dortmund, Germany
| | - Tetiana L. Linnik
- Department
of Theoretical Physics, V.E. Lashkaryov
Institute of Semiconductor Physics, Pr. Nauky 41, 03028 Kyiv, Ukraine
| |
Collapse
|
8
|
A Review on Graphene-Based Nano-Electromechanical Resonators: Fabrication, Performance, and Applications. MICROMACHINES 2022; 13:mi13020215. [PMID: 35208343 PMCID: PMC8880531 DOI: 10.3390/mi13020215] [Citation(s) in RCA: 7] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/30/2021] [Revised: 01/24/2022] [Accepted: 01/24/2022] [Indexed: 11/16/2022]
Abstract
The emergence of graphene and other two-dimensional materials overcomes the limitation in the characteristic size of silicon-based micro-resonators and paved the way in the realization of nano-mechanical resonators. In this paper, we review the progress to date of the research on the fabrication methods, resonant performance, and device applications of graphene-based nano-mechanical resonators, from theoretical simulation to experimental results, and summarize both the excitation and detection schemes of graphene resonators. In recent years, the applications of graphene resonators such as mass sensors, pressure sensors, and accelerometers gradually moved from theory to experiment, which are specially introduced in this review. To date, the resonance performance of graphene-based nano-mechanical resonators is widely studied by theoretical approaches, while the corresponding experiments are still in the preliminary stage. However, with the continuous progress of the device fabrication and detection technique, and with the improvement of the theoretical model, suspended graphene membranes will widen the potential for ultralow-loss and high-sensitivity mechanical resonators in the near future.
Collapse
|