Laser Direct Writing and Selective Metallization of Metallic Circuits for Integrated Wireless Devices

Direct Laser Writing: From Materials Synthesis and Conversion to Electronic Device Processing

Direct Laser Writing (DLW) has been increasingly selected as a microfabrication route for efficient, cost-effective, high-resolution material synthesis and conversion. Concurrently, lasers participate in the patterning and assembly of functional geometries in several fields of application, of which electronics stand out. In this review, recent advances and strategies based on DLW for electronics microfabrication are surveyed and outlined, based on laser material growth strategies. First, the main DLW parameters influencing material synthesis and transformation mechanisms are summarized, aimed at selective, tailored writing of conductive and semiconducting materials. Additive and transformative DLW processing mechanisms are discussed, to open space to explore several categories of materials directly synthesized or transformed for electronics microfabrication. These include metallic conductors, metal oxides, transition metal chalcogenides and carbides, laser-induced graphene, and their mixtures. By accessing a wide range of material types, DLW-based electronic applications are explored, including processing components, energy harvesting and storage, sensing, and bioelectronics. The expanded capability of lasers to participate in multiple fabrication steps at different implementation levels, from material engineering to device processing, indicates their future applicability to next-generation electronics, where more accessible, green microfabrication approaches integrate lasers as comprehensive tools.

Large-Scale Production and Integrated Application of Micro-Supercapacitors

Micro-supercapacitors, emerging as promising micro-energy storage devices, have attracted significant attention due to their unique features. This comprehensive review focuses on two key aspects: the scalable fabrication of MSCs and their diverse applications. The review begins by elucidating the energy storage mechanisms and guiding principles for designing high-performance devices. It subsequently explores recent advancements in scalable fabrication techniques for electrode materials and micro-nano fabrication technologies for micro-devices. The discussion encompasses critical application domains, including multifunctional MSCs, energy storage integration, integrated power generation, and integrated applications. Despite notable progress, there are still some challenges such as large-scale production of electrode material, well-controlled fabrication technology, and scalable integrated manufacture. The summary concludes by emphasizing the need for future research to enhance micro-supercapacitor performance, reduce production costs, achieve large-scale production, and explore synergies with other energy storage technologies. This collective effort aims to propel MSCs from laboratory innovation to market viability, providing robust energy storage solutions for MEMS and portable electronics.

Laser-induced graphene-based electrochemical biosensors for environmental applications: a perspective

Biosensors are miniaturized devices that provide the advantage of in situ and point-of-care monitoring of analytes of interest. Electrochemical biosensors use the mechanism of oxidation-reduction reactions and measurement of corresponding electron transfer as changes in current, voltage, or other parameters using different electrochemical techniques. The use of electrochemically active materials is critical for the effective functioning of electrochemical biosensors. Laser-induced graphene (LIG) has garnered increasing interest in biosensor development and improvement due to its high electrical conductivity, specific surface area, and simple and scalable fabrication process. The effort of this perspective is to understand the existing classes of analytes and the mechanisms of their detection using LIG-based biosensors. The manuscript has highlighted the potential use of LIG, its modifications, and its use with various receptors for sensing various environmental pollutants. Although the conventional graphene-based sensors effectively detect trace levels for many analytes in different applications, the chemical and energy-intensive fabrication and time-consuming processes make it imperative to explore a low-cost and scalable option such as LIG for biosensors production. The focus of these potential biosensors has been kept on detection analytes of environmental significance such as heavy metals ions, organic and inorganic compounds, fertilizers, pesticides, pathogens, and antibiotics. The use of LIG directly as an electrode, its modifications with nanomaterials and polymers, and its combination with bioreceptors such as aptamers and polymers has been summarized. The strengths, weaknesses, opportunities, and threats analysis has also been done to understand the viability of incorporating LIG-based electrochemical biosensors for environmental applications.

Modification of Polymeric Surfaces with Ultrashort Laser Pulses for the Selective Deposition of Homogeneous Metallic Conductive Layers

In recent years, the demand for highly integrated and lightweight components has been rising sharply, especially in plastics processing. One strategy for weight-saving solutions is the development of conductive tracks and layouts directly on the polymer housing parts in order to be able to dispense with the system integration of additional printed circuit boards (PCB). This can be conducted very advantageously and flexibly with laser-based processes for functionalizing polymer surfaces. In this work, a three-step laser-based process for subsequent selective metallization is presented. Conventional injection molded components without special additives serve as the initial substrate. The Laser-Based Selective Activation (LSA) uses picosecond laser pulses to activate the plastic surface to subsequently deposit palladium. The focus is on determining the amount of deposited palladium in correlation to the laser and scan parameters. For the first time, the dependence of the metallization result on the accumulated laser fluence (F_acc) is described. The treated polymer parts are characterized using optical and scanning electron microscopy as well as a contact-type profilometer.

Laser Processing of Flexible In-Plane Micro-supercapacitors: Progresses in Advanced Manufacturing of Nanostructured Electrodes

Flexible in-plane architecture micro-supercapacitors (MSCs) are competitive candidates for on-chip miniature energy storage applications owing to their light weight, small size, high flexibility, as well as the advantages of short charging time, high power density, and long cycle life. However, tedious and time-consuming processes are required for the manufacturing of high-resolution interdigital electrodes using conventional approaches. In contrast, the laser processing technique enables high-efficiency high-precision patterning and advanced manufacturing of nanostructured electrodes. In this review, the recent advances in laser manufacturing and patterning of nanostructured electrodes for applications in flexible in-plane MSCs are comprehensively summarized. Various laser processing techniques for the synthesis, modification, and processing of interdigital electrode materials, including laser pyrolysis, reduction, oxidation, growth, activation, sintering, doping, and ablation, are discussed. In particular, some special features and merits of laser processing techniques are highlighted, including the impacts of laser types and parameters on manufacturing electrodes with desired morphologies/structures and their applications on the formation of high-quality nanoshaped graphene, the selective deposition of nanostructured materials, the controllable nanopore etching and heteroatom doping, and the efficient sintering of nanometal products. Finally, the current challenges and prospects associated with the laser processing of in-plane MSCs are also discussed. This review will provide a useful guidance for the advanced manufacturing of nanostructured electrodes in flexible in-plane energy storage devices and beyond.

Autocatalytic Laser Activator for Both UV and NIR Lasers: Preparation of Circuits on Polymer Substrates by Selective Metallization

In laser-induced selective metallization (LISM), conventional laser activators only work at a single laser wavelength. This study reported a new laser activator (MoO₃) very suitable for both 355 nm UV and 1064 nm near-infrared (NIR) lasers for the first time. When applying MoO₃ to polymers, the prepared Cu layer on laser-activated polymers showed a good conductivity (2.63 × 10⁶ Ω^-1·m^-1) and excellent adhesion. Scanning electron microscopy, optical microscopy, and resistance analysis revealed the excellent LISM performance of the polymer/MoO₃ composites, and the quality of the Cu layer prepared using the UV laser is much better than that using the NIR laser. The limit width of the copper wire prepared by the UV laser is as narrow as 30.1 μm. We also confirmed the mechanism of MoO₃ initiating electroless copper plating after laser activation to be the autocatalytic mechanism, which is very different from the conventional reduction mechanism. The effect of laser activation was only to expose the MoO₃ active species to the polymer surface. X-ray diffraction and tube experiments revealed that the activity of α·h-MoO₃ was higher than that of α-MoO₃. X-ray photoelectron spectroscopy indicated that a part of Mo⁶⁺ was reduced to Mo⁵⁺ during laser activations, leading to the increase of the oxygen vacancies in MoO₃ and possibly further enhancing the activity of MoO₃. Besides, the micro-rough structures caused by the laser on the polymer surface provided riveting points for successfully depositing the copper layer. The Ni-Cu, Ag-Cu, and Au-Ni-Cu layers were obtained via the continued deposit of other metals on the Cu layer. The resistances of these metal layers had much better stability than that of the neat Cu layer. Furthermore, the Au layer further enhanced the conductivity of the circuit. The proposed strategy is easy for large-scale industrial applications, which will greatly expand the application scenarios of the LISM field.

Progress and Perspectives in Designing Flexible Microsupercapacitors

Miniaturized flexible microsupercapacitors (MSCs) that can be integrated into self-powered sensing systems, detecting networks, and implantable devices have shown great potential to perfect the stand-alone functional units owing to the robust security, continuously improved energy density, inherence high power density, and long service life. This review summarizes the recent progress made in the development of flexible MSCs and their application in integrated wearable electronics. To meet requirements for the scalable fabrication, minimization design, and easy integration of the flexible MSC, the typical assembled technologies consist of ink printing, photolithography, screen printing, laser etching, etc., are provided. Then the guidelines regarding the electrochemical performance improvement of the flexible MSC by materials design, devices construction, and electrolyte optimization are considered. The integrated prototypes of flexible MSC-powered systems, such as self-driven photodetection systems, wearable sweat monitoring units are also discussed. Finally, the future challenges and perspectives of flexible MSC are envisioned.

Corona-Enabled Electrostatic Printing for Ultra-fast Manufacturing of Binder-Free Multifunctional E-Skins

As essential components in intelligent systems, printed soft electronics (PSEs) are playing crucial roles in public health, national security, and economics. Innovations in printing technologies are required to promote the broad application of high-performance PSEs at a low cost. However, current printing techniques are still facing long-lasting challenges in addressing the conflict between printing speed and performance. To overcome this challenge, we developed a new corona-enabled electrostatic printing (CEP) technique for ultra-fast (milliseconds) roll-to-roll (R2R) manufacturing of binder-free multifunctional e-skins. The printing capability and controllability of CEP were investigated through parametric studies and microstructure observation. The electric field generation, material transfer, and particle amount and size selecting mechanisms were numerically and experimentally studied. CEP-printed graphene e-skins were demonstrated to possess an outstanding strain sensing performance. The binder-free feature of the CEP-assembled networks enables them to provide pressure sensitivity as low as 2.5 Pa and capability to detect acoustic signals of hundreds of hertz in frequency. Furthermore, the CEP technique was utilized to pattern different types of functional materials (e.g., graphene and thermochromic polymers) onto different substrates (e.g., tape and textile). Overall, this study demonstrated that CEP can be a novel contactless and ultra-fast manufacturing platform compatible with the R2R process for fabricating high-performance, scalable, and low-cost soft electronics.

A seamlessly integrated device of micro-supercapacitor and wireless charging with ultrahigh energy density and capacitance

Microdevice integrating energy storage with wireless charging could create opportunities for electronics design, such as moveable charging. Herein, we report seamlessly integrated wireless charging micro-supercapacitors by taking advantage of a designed highly consistent material system that both wireless coils and electrodes are of the graphite paper. The transferring power efficiency of the wireless charging is 52.8%. Benefitting from unique circuit structure, the intact device displays low resistance and excellent voltage tolerability with a capacitance of 454.1 mF cm⁻², superior to state-of-the-art conventional planar micro-supercapacitors. Besides, a record high energy density of 463.1 μWh cm⁻² exceeds the existing metal ion hybrid micro-supercapacitors and even commercial thin film battery (350 μWh cm⁻²). After charging for 6 min, the integrated device reaches up to a power output of 45.9 mW, which can drive an electrical toy car immediately. This work brings an insight for contactless micro-electronics and flexible micro-robotics.

Miniaturized energy storage devices integrated with wireless charging bring opportunities for next generation electronics. Here, authors report seamlessly integrated wireless charging micro-supercapacitors with high energy density capable of driving a model electrical car.

Densified Laser-Induced Graphene for Flexible Microsupercapacitors

Microsupercapacitors have attracted significant attention due to several of their advantageous characteristics such as lightweight, small volume, and planar structure that is favorable for high mechanical flexibility. Among the various micro supercapacitor forms, those with laser-induced graphene (LIG) electrodes are promising as flexible energy storage devices. While LIG microelectrodes can be fabricated simply by direct laser writing, the capacitance and energy density of these devices are limited because of the relatively low density of LIG, which leads to low surface areas. These limitations could be overcome by densifying the LIG. Here, we report the use of densified laser-induced graphene (d-LIG) to fabricate flexible micro supercapacitors. Interdigitated d-LIG electrodes were prepared by duplicate laser pyrolysis of a polyimide sheet by using a CO2 laser. A PVA-H2SO4 gel-type electrolyte was then applied to the d-LIG electrode surface to assemble a d-LIG micro supercapacitor. This d-LIG micro supercapacitor exhibited substantially increased capacitance and energy density versus conventional low-density LIG micro supercapacitors. While the d-LIG electrode exhibited a substantial change in resistance when subjected to bending at a radius of 3 mm, the change in the capacitance of the d-LIG micro supercapacitor was negligible at the same bending radius due to reinforcement by the infiltrated poly(vinyl alcohol) (PVA) electrolyte, demonstrating the potential application of d-LIG micro supercapacitors in wearable electronics.

Laser Pyrolysis of Imprinted Furan Pattern for the Precise Fabrication of Microsupercapacitor Electrodes

The design or dimension of micro-supercapacitor electrodes is an important factor that determines their performance. In this study, a microsupercapacitor was precisely fabricated on a silicon substrate by irradiating an imprinted furan micropattern with a CO₂ laser beam under ambient conditions. Since furan is a carbon-abundant polymer, electrically conductive and porous carbon structures were produced by laser-induced pyrolysis. While the pyrolysis of a furan film in a general electric furnace resulted in severe cracks and delamination, the laser pyrolysis method proposed herein yielded porous carbon films without cracks or delamination. Moreover, as the imprinting process already designated the furan area for laser pyrolysis, high-precision patterning was achieved in the subsequent laser pyrolysis step. This two-step process exploited the superior resolution of imprinting for the fabrication of a laser-pyrolyzed carbon micropattern. As a result, the technical limitations of conventional laser direct writing could be overcome. The laser-pyrolyzed carbon structure was employed for microsupercapacitor electrodes. The microsupercapacitor showed a specific capacitance of 0.92 mF/cm² at 1 mA/cm² with a PVA-H₂SO₄ gel electrolyte, and retained an up to 88% capacitance after 10,000 charging/discharging cycles.

Laser-Induced Selective Metallization on Polymer Substrates Using Organocopper for Portable Electronics

Our work proposed a facile strategy for selective fabrication of the precise metalized patterns onto polymer substrates through the laser direct structuring (LDS) technology using organocopper compounds. Copper oxalate (CuC₂O₄) and copper acetylacetonate [Cu(acac)₂] which can be used as laser sensitizers were first introduced into an acrylonitrile-butadiene-styrene (ABS) matrix for preparing LDS materials. After the activation with 1064 nm pulsed near-infrared laser, the Cu⁰ (metal copper) was generated from CuC₂O₄ and Cu(acac)₂ and then served as catalyst species for the electroless copper plating (ECP). A series of characterizations were conducted to investigate the morphology and analyze the surface chemistry of ABS/CuC₂O₄ and ABS/Cu(acac)₂ composites. Specially, the X-ray photoelectron spectroscopy analysis indicated that 58.3% Cu²⁺ in ABS/CuC₂O₄ was reduced to Cu⁰, while this value was 63.9% for ABS/Cu(acac)₂. After 30 min ECP, the conductivities of copper circuit on ABS/CuC₂O₄ and ABS/Cu(acac)₂ composites were 1.22 × 10⁷ and 1.58 × 10⁷ Ω^-1·m^-1, respectively. Moreover, the decorated patterns and near-field communication circuit were demonstrated by this LDS technology. We believe that this study paves the way for developing organocopper-based LDS materials, which have the potential for industrial applications.

Polymer-Based Device Fabrication and Applications Using Direct Laser Writing Technology

Polymer materials exhibit unique properties in the fabrication of optical waveguide devices, electromagnetic devices, and bio-devices. Direct laser writing (DLW) technology is widely used for micro-structure fabrication due to its high processing precision, low cost, and no need for mask exposure. This paper reviews the latest research progresses of polymer-based micro/nano-devices fabricated using the DLW technique as well as their applications. In order to realize various device structures and functions, different manufacture parameters of DLW systems are adopted, which are also investigated in this work. The flexible use of the DLW process in various polymer-based microstructures, including optical, electronic, magnetic, and biomedical devices are reviewed together with their applications. In addition, polymer materials which are developed with unique properties for the use of DLW technology are also discussed.

Laser-Induced Graphene-PVA Composites as Robust Electrically Conductive Water Treatment Membranes

Graphene nanomaterials can feature both superb electrical conductivity and unique physical properties such as extreme surface wettability, which are potentially applicable for many purposes including water treatment. Laser-induced graphene (LIG) is an electrically conductive three-dimensional porous carbon material prepared by direct laser writing on various polymers in ambient conditions with a CO₂ laser. Low-fouling LIG coatings in water technology have been reported; however, the mechanical strength and the separation properties of LIG-coated membranes are limited. Here, we show mechanically robust electrically conductive LIG-poly(vinyl alcohol) (PVA) composite membranes with tailored separation properties suitable for ultrafiltration processes. PVA has outstanding chemical and physical stability with good film-forming properties and is a biocompatible and nontoxic polymer. Compared to LIG-coated filters, the PVA-LIG composite membrane filters exhibited up to 63% increased bovine serum albumin rejection and up to ∼99.9% bacterial rejection, which corresponded well to the measured molecular weight cutoff ∼90 kDa. Compared to LIG fabricated on a polymer membrane control, the composite membranes showed similar excellent antifouling properties including low protein adsorption, and the antibiofilm effects were more pronounced at lower PVA concentrations. Notably for the antibacterial capabilities, the LIG-supporting layer maintained its electrical conductivity and a selected LIG-PVA composite used as electrodes showed complete elimination of mixed bacterial culture viability and indicated that the potent antimicrobial killing effects were maintained in the composite. This work demonstrates that the use of LIG for practical industrial filtration applications is possible.

Recent Advances in Graphene-Based Humidity Sensors

Humidity sensors are a common, but important type of sensors in our daily life and industrial processing. Graphene and graphene-based materials have shown great potential for detecting humidity due to their ultrahigh specific surface areas, extremely high electron mobility at room temperature, and low electrical noise due to the quality of its crystal lattice and its very high electrical conductivity. However, there are still no specific reviews on the progresses of graphene-based humidity sensors. This review focuses on the recent advances in graphene-based humidity sensors, starting from an introduction on the preparation and properties of graphene materials and the sensing mechanisms of seven types of commonly studied graphene-based humidity sensors, and mainly summarizes the recent advances in the preparation and performance of humidity sensors based on pristine graphene, graphene oxide, reduced graphene oxide, graphene quantum dots, and a wide variety of graphene based composite materials, including chemical modification, polymer, metal, metal oxide, and other 2D materials. The remaining challenges along with future trends in high-performance graphene-based humidity sensors are also discussed.

Laser Direct Writing of a High-Performance All-Graphene Humidity Sensor Working in a Novel Sensing Mode for Portable Electronics

This paper reports a fast and highly sensitive all-graphene humidity sensor working in a novel alternating current (ac) detection mode for the first time, which is capable of sensing humidity on a smartphone for portable electronics. The humidity sensor is based on an interdigitated reduced graphene oxide/graphene oxide/rGO (rGO/GO/rGO) structure patterned by a facile laser direct writing method. It works in an ac sensing mode with a rectangular input voltage wave and measures the output voltage wave instead of conventional resistance, impedance, or capacitance, exhibiting a dramatically enhanced sensitivity by about 45 times compared to the low and unstable response in dc mode. The humidity sensor shows an obvious response to the relative humidity (RH) ranging from RH 6.3% to RH 100%. The response and recovery toward humidity change are almost instantaneous, and the corresponding costed times including humidity rise and decay times are less than 1.9 and 3.9 s, respectively, which are among the best results in the literature. The sensor also exhibits outstanding cycling stability, flexibility, and long-term stability (>1 year), as well as good reproducibility of device preparation. Besides, it can be easily connected to an iPhone and the humidity sensing can be conducted with an oscilloscope application on iOS. What's more, an electronic circuit simulation method was employed to fit the output waves, which can not only explain the sensing mechanism, but also determine the resistance and capacitance of the rGO/GO/rGO structure, agreeing well with the results obtained from the electrochemical measurements. It can be reasonably expected that the approach combining humidity sensing and electronic circuit simulation can be applied in real-time monitoring on a smartphone based on the Internet of things and big data technologies.

Biodegradable Transparent Substrate Based on Edible Starch-Chitosan Embedded with Nature-Inspired Three-Dimensionally Interconnected Conductive Nanocomposites for Wearable Green Electronics

Electronic waste (E-waste) contain large environmental contaminants such as toxic heavy metals and hazardous chemicals. These contaminants would migrate into drinking water or food chains and pose a serious threat to environment and human health. Biodegradable green electronics has great potential to address the issue of E-waste. Here, we report on a novel biodegradable and flexible transparent electrode, integrating three-dimensionally (3D) interconnected conductive nanocomposites into edible starch-chitosan-based substrates. Starch and chitosan are extracted from abundant and inexpensive potato and crab shells, respectively. Nacre-inspired interface designs are introduced to construct a 3D interconnected single wall carbon nanotube (SCNT)-pristine graphene (PG)-conductive polymer network architecture. The inorganic one-dimensional SCNT and two-dimensional PG sheets are tightly cross-linked together at the junction interface by long organic conductive poly(3,4-ethylenedioxythiophene) (PEDOT) chains. The formation of a 3D continuous SCNT-PG-PEDOT conductive network leads to not only a low sheet resistance but also a superior flexibility. The flexible transparent electrode possesses an excellent optoelectronic performance: typically, a sheet resistance of 46 Ω/sq with a transmittance of 83.5% at a typical wavelength of 550 nm. The sheet resistance of the electrode slightly increased less than 3% even after hundreds of bending cycles. The lightweight flexible and biocompatible transparent electrode could conform to skin topography or any other arbitrary surface naturally. The edible starch-chitosan substrate-based transparent electrodes could be biodegraded in lysozyme solution rapidly at room temperature without producing any toxic residues. SCNT-PG-PEDOT can be recycled via a membrane process for further fabrication of conductive and reinforcement composites. This high-performance biodegradable transparent electrode is a promising material for next-generation wearable green optoelectronics, transient electronics, and edible electronics.