1
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Menétrey M, Kupferschmid C, Gerstl S, Spolenak R. On the Resolution Limit of Electrohydrodynamic Redox 3D Printing. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024:e2402067. [PMID: 39092685 DOI: 10.1002/smll.202402067] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/15/2024] [Revised: 06/17/2024] [Indexed: 08/04/2024]
Abstract
Additive manufacturing (AM) will empower the next breakthroughs in nanotechnology by combining unmatched geometrical freedom with nanometric resolution. Despite recent advances, no micro-AM technique has been able to synthesize functional nanostructures with excellent metal quality and sub-100 nm resolution. Here, significant breakthroughs in electrohydrodynamic redox 3D printing (EHD-RP) are reported by directly fabricating high-purity Cu (>98 at.%) with adjustable voxel size from >6µm down to 50 nm. This unique tunability of the feature size is achieved by managing in-flight solvent evaporation of the ion-loaded droplet to either trigger or prevent the Coulomb explosion. In the first case, the landing of confined droplets on the substrate allows the fabrication of high-aspect-ratio 50 nm-wide nanopillars, while in the second, droplet disintegration leads to large-area spray deposition. It is discussed that the reported pillar width corresponds to the ultimate resolution achievable by EHD printing. The unrivaled feature size and growth rate (>100 voxel s-1) enable the direct manufacturing of 30 µm-tall atom probe tomography (APT) tips that unveil the pristine microstructure and chemistry of the deposit. This method opens up prospects for the development of novel materials for 3D nano-printing.
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Affiliation(s)
- Maxence Menétrey
- Laboratory for Nanometallurgy, Department of Materials, ETH Zürich, Vladimir-Prelog-Weg 1-5/10, Zürich, 8093, Switzerland
| | - Cédric Kupferschmid
- Laboratory for Nanometallurgy, Department of Materials, ETH Zürich, Vladimir-Prelog-Weg 1-5/10, Zürich, 8093, Switzerland
| | - Stephan Gerstl
- Scientific Center for Optical and Electron Microscopy (ScopeM), ETH Zürich, Otto-Stern-Weg 3, Zürich 8093, Switzerland
| | - Ralph Spolenak
- Laboratory for Nanometallurgy, Department of Materials, ETH Zürich, Vladimir-Prelog-Weg 1-5/10, Zürich, 8093, Switzerland
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2
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Volkov OM, Pylypovskyi OV, Porrati F, Kronast F, Fernandez-Roldan JA, Kákay A, Kuprava A, Barth S, Rybakov FN, Eriksson O, Lamb-Camarena S, Makushko P, Mawass MA, Shakeel S, Dobrovolskiy OV, Huth M, Makarov D. Three-dimensional magnetic nanotextures with high-order vorticity in soft magnetic wireframes. Nat Commun 2024; 15:2193. [PMID: 38467623 PMCID: PMC10928081 DOI: 10.1038/s41467-024-46403-8] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/03/2023] [Accepted: 02/22/2024] [Indexed: 03/13/2024] Open
Abstract
Additive nanotechnology enable curvilinear and three-dimensional (3D) magnetic architectures with tunable topology and functionalities surpassing their planar counterparts. Here, we experimentally reveal that 3D soft magnetic wireframe structures resemble compact manifolds and accommodate magnetic textures of high order vorticity determined by the Euler characteristic, χ. We demonstrate that self-standing magnetic tetrapods (homeomorphic to a sphere; χ = + 2) support six surface topological solitons, namely four vortices and two antivortices, with a total vorticity of + 2 equal to its Euler characteristic. Alternatively, wireframe structures with one loop (homeomorphic to a torus; χ = 0) possess equal number of vortices and antivortices, which is relevant for spin-wave splitters and 3D magnonics. Subsequent introduction of n holes into the wireframe geometry (homeomorphic to an n-torus; χ < 0) enables the accommodation of a virtually unlimited number of antivortices, which suggests their usefulness for non-conventional (e.g., reservoir) computation. Furthermore, complex stray-field topologies around these objects are of interest for superconducting electronics, particle trapping and biomedical applications.
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Affiliation(s)
- Oleksii M Volkov
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany.
| | - Oleksandr V Pylypovskyi
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany.
- Kyiv Academic University, 03142, Kyiv, Ukraine.
| | - Fabrizio Porrati
- Physikalisches Institut, Johann Wolfgang Goethe-Universität Frankfurt am Main, Max-von-Laue-Str. 1, 60438, Frankfurt am Main, Germany.
| | - Florian Kronast
- Helmholtz-Zentrum Berlin für Materialien und Energie, Albert-Einstein-Str. 15, 12489, Berlin, Germany
| | - Jose A Fernandez-Roldan
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany
| | - Attila Kákay
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany
| | - Alexander Kuprava
- Physikalisches Institut, Johann Wolfgang Goethe-Universität Frankfurt am Main, Max-von-Laue-Str. 1, 60438, Frankfurt am Main, Germany
| | - Sven Barth
- Physikalisches Institut, Johann Wolfgang Goethe-Universität Frankfurt am Main, Max-von-Laue-Str. 1, 60438, Frankfurt am Main, Germany
| | - Filipp N Rybakov
- Department of Physics and Astronomy, Uppsala University, Box-516, Uppsala, SE-751 20, Sweden
| | - Olle Eriksson
- Department of Physics and Astronomy, Uppsala University, Box-516, Uppsala, SE-751 20, Sweden
- Wallenberg Initiative Materials Science for Sustainability, Uppsala University, 75121, Uppsala, Sweden
| | - Sebastian Lamb-Camarena
- University of Vienna, Faculty of Physics, Nanomagnetism and Magnonics, Superconductivity and Spintronics Laboratory, Währinger Str. 17, 1090, Vienna, Austria
- University of Vienna, Vienna Doctoral School in Physics, Boltzmanngasse 5, A-1090, Vienna, Austria
| | - Pavlo Makushko
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany
| | - Mohamad-Assaad Mawass
- Helmholtz-Zentrum Berlin für Materialien und Energie, Albert-Einstein-Str. 15, 12489, Berlin, Germany
- Department of Interface Science, Fritz-Haber-Institut der Max-Planck-Gesellschaft, Faradayweg 4 - 6, 14195, Berlin, Germany
| | - Shahrukh Shakeel
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany
| | - Oleksandr V Dobrovolskiy
- University of Vienna, Faculty of Physics, Nanomagnetism and Magnonics, Superconductivity and Spintronics Laboratory, Währinger Str. 17, 1090, Vienna, Austria
| | - Michael Huth
- Physikalisches Institut, Johann Wolfgang Goethe-Universität Frankfurt am Main, Max-von-Laue-Str. 1, 60438, Frankfurt am Main, Germany
| | - Denys Makarov
- Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, 01328, Dresden, Germany.
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3
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Piasecki T, Kwoka K, Gacka E, Kunicki P, Gotszalk T. Electrical, thermal and noise properties of platinum-carbon free-standing nanowires designed as nanoscale resistive thermal devices. NANOTECHNOLOGY 2023; 35:115502. [PMID: 38064743 DOI: 10.1088/1361-6528/ad13c0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/11/2023] [Accepted: 12/08/2023] [Indexed: 12/28/2023]
Abstract
Platinum-carbon (PtC) composite nanowires were fabricated using focused electron beam induced deposition and postprocessed, and their performance as a nanoscale resistive thermal device (RTD) was evaluated. Nanowires were free-standing and deposited on a dedicated substrate to eliminate the influence of the substrate itself and of the halo effect on the results. The PtC free-standing nanowires were postprocessed to lower their electrical resistance using electron beam irradiation and thermal annealing using Joule heat both separately and combined. Postprocessed PtC free-standing nanowires were characterized to evaluate their noise figure (NF) and thermal coefficients at the temperature range from 30 K to 80 °C. The thermal sensitivity of RTD was lowered with the reduced resistance but simultaneously the NF improved, especially with electron-beam irradiation. The temperature measurement resolution achievable with the PtC free-standing nanowires was 0.1 K in 1 kHz bandwidth.
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Affiliation(s)
- Tomasz Piasecki
- Department of Nanometrology, Wroclaw University of Science and Technology, Wroclaw, Poland
| | - Krzysztof Kwoka
- Department of Nanometrology, Wroclaw University of Science and Technology, Wroclaw, Poland
| | - Ewelina Gacka
- Department of Nanometrology, Wroclaw University of Science and Technology, Wroclaw, Poland
| | - Piotr Kunicki
- Department of Nanometrology, Wroclaw University of Science and Technology, Wroclaw, Poland
| | - Teodor Gotszalk
- Department of Nanometrology, Wroclaw University of Science and Technology, Wroclaw, Poland
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4
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Menétrey M, van Nisselroy C, Xu M, Hengsteler J, Spolenak R, Zambelli T. Microstructure-driven electrical conductivity optimization in additively manufactured microscale copper interconnects. RSC Adv 2023; 13:13575-13585. [PMID: 37152573 PMCID: PMC10155493 DOI: 10.1039/d3ra00611e] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/29/2023] [Accepted: 04/04/2023] [Indexed: 05/09/2023] Open
Abstract
As the microelectronics field pushes to increase device density through downscaling component dimensions, various novel micro- and nano-scale additive manufacturing technologies have emerged to expand the small scale design space. These techniques offer unprecedented freedom in designing 3D circuitry but have not yet delivered device-grade materials. To highlight the complex role of processing on the quality and microstructure of AM metals, we report the electrical properties of micrometer-scale copper interconnects fabricated by Fluid Force Microscopy (FluidFM) and Electrohydrodynamic-Redox Printing (EHD-RP). Using a thin film-based 4-terminal testing chip developed for the scope of this study, the electrical resistance of as-printed metals is directly related to print strategies and the specific morphological and microstructural features. Notably, the chip requires direct synthesis of conductive structures on an insulating substrate, which is shown for the first time in the case of FluidFM. Finally, we demonstrate the unique ability of EHD-RP to tune the materials resistivity by one order of magnitude solely through printing voltage. Through its novel electrical characterization approach, this study offers unique insight into the electrical properties of micro- and submicrometer-sized copper interconnects and steps towards a deeper understanding of micro AM metal properties for advanced electronics applications.
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Affiliation(s)
- Maxence Menétrey
- Laboratory for Nanometallurgy, Department of Materials, ETH Zürich Vladimir-Prelog-Weg 1-5/10 8093 Zürich Switzerland
| | - Cathelijn van Nisselroy
- Laboratory of Biosensors and Bioelectronics, Department of Information Technology and Electrical Engineering, ETH Zürich Gloriastrasse 35 8092 Zürich Switzerland
| | - Mengjia Xu
- Laboratory of Biosensors and Bioelectronics, Department of Information Technology and Electrical Engineering, ETH Zürich Gloriastrasse 35 8092 Zürich Switzerland
| | - Julian Hengsteler
- Laboratory of Biosensors and Bioelectronics, Department of Information Technology and Electrical Engineering, ETH Zürich Gloriastrasse 35 8092 Zürich Switzerland
| | - Ralph Spolenak
- Laboratory for Nanometallurgy, Department of Materials, ETH Zürich Vladimir-Prelog-Weg 1-5/10 8093 Zürich Switzerland
| | - Tomaso Zambelli
- Laboratory of Biosensors and Bioelectronics, Department of Information Technology and Electrical Engineering, ETH Zürich Gloriastrasse 35 8092 Zürich Switzerland
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5
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Winkler R, Brugger-Hatzl M, Seewald LM, Kuhness D, Barth S, Mairhofer T, Kothleitner G, Plank H. Additive Manufacturing of Co 3Fe Nano-Probes for Magnetic Force Microscopy. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:1217. [PMID: 37049311 PMCID: PMC10097098 DOI: 10.3390/nano13071217] [Citation(s) in RCA: 5] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/03/2023] [Revised: 03/23/2023] [Accepted: 03/27/2023] [Indexed: 06/19/2023]
Abstract
Magnetic force microscopy (MFM) is a powerful extension of atomic force microscopy (AFM), which mostly uses nano-probes with functional coatings for studying magnetic surface features. Although well established, additional layers inherently increase apex radii, which reduce lateral resolution and also contain the risk of delamination, rendering such nano-probes doubtful or even useless. To overcome these limitations, we now introduce the additive direct-write fabrication of magnetic nano-cones via focused electron beam-induced deposition (FEBID) using an HCo3Fe(CO)12 precursor. The study first identifies a proper 3D design, confines the most relevant process parameters by means of primary electron energy and beam currents, and evaluates post-growth procedures as well. That way, highly crystalline nano-tips with minimal surface contamination and apex radii in the sub-15 nm regime are fabricated and benchmarked against commercial products. The results not only reveal a very high performance during MFM operation but in particular demonstrate virtually loss-free behavior after almost 8 h of continuous operation, thanks to the all-metal character. Even after more than 12 months of storage in ambient conditions, no performance loss is observed, which underlines the high overall performance of the here-introduced FEBID-based Co3Fe MFM nano-probes.
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Affiliation(s)
- Robert Winkler
- Christian Doppler Laboratory—DEFINE, Graz University of Technology, 8010 Graz, Austria
| | | | | | - David Kuhness
- Christian Doppler Laboratory—DEFINE, Graz University of Technology, 8010 Graz, Austria
| | - Sven Barth
- Institute of Physics, Goethe University, 60438 Frankfurt, Germany
- Institute for Inorganic and Analytical Chemistry, Goethe University Frankfurt, Max-von-Laue-Str. 7, 60438 Frankfurt, Germany
| | - Thomas Mairhofer
- Institute of Electron Microscopy, Graz University of Technology, 8010 Graz, Austria
| | - Gerald Kothleitner
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
- Institute of Electron Microscopy, Graz University of Technology, 8010 Graz, Austria
| | - Harald Plank
- Christian Doppler Laboratory—DEFINE, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
- Institute of Electron Microscopy, Graz University of Technology, 8010 Graz, Austria
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6
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Lasseter J, Rack PD, Randolph SJ. Selected Area Deposition of High Purity Gold for Functional 3D Architectures. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:757. [PMID: 36839126 PMCID: PMC9965196 DOI: 10.3390/nano13040757] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 01/03/2023] [Revised: 02/14/2023] [Accepted: 02/14/2023] [Indexed: 06/18/2023]
Abstract
Selected area deposition of high purity gold films onto nanoscale 3D architectures is highly desirable as gold is conductive, inert, plasmonically active, and can be functionalized with thiol chemistries, which are useful in many biological applications. Here, we show that high-purity gold coatings can be selectively grown with the Me2Au (acac) precursor onto nanoscale 3D architectures via a pulsed laser pyrolytic chemical vapor deposition process. The selected area of deposition is achieved due to the high thermal resistance of the nanoscale geometries. Focused electron beam induced deposits (FEBID) and carbon nanofibers are functionalized with gold coatings, and we demonstrate the effects that laser irradiance, pulse width, and precursor pressure have on the growth rate. Furthermore, we demonstrate selected area deposition with a feature-targeting resolutions of ~100 and 5 µm, using diode lasers coupled to a multimode (915 nm) and single mode (785 nm) fiber optic, respectively. The experimental results are rationalized via finite element thermal modeling.
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Affiliation(s)
- John Lasseter
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA
| | - Philip D. Rack
- Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USA
| | - Steven J. Randolph
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
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7
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Fowlkes J, Winkler R, Rack PD, Plank H. 3D Nanoprinting Replication Enhancement Using a Simulation-Informed Analytical Model for Electron Beam Exposure Dose Compensation. ACS OMEGA 2023; 8:3148-3175. [PMID: 36713724 PMCID: PMC9878664 DOI: 10.1021/acsomega.2c06596] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/13/2022] [Accepted: 12/20/2022] [Indexed: 06/18/2023]
Abstract
3D nanoprinting, using focused electron beam-induced deposition, is prone to a common structural artifact arising from a temperature gradient that naturally evolves during deposition, extending from the electron beam impact region (BIR) to the substrate. Inelastic electron energy loss drives the Joule heating and surface temperature variations lead to precursor surface concentration variations due, in most part, to temperature-dependent precursor surface desorption. The result is unwanted curvature when prescribing linear segments in 3D objects, and thus, complex geometries contain distortions. Here, an electron dose compensation strategy is presented to offset deleterious heating effects; the Decelerating Beam Exposure Algorithm, or DBEA, which corrects for nanowire bending a priori, during computer-aided design, uses an analytical solution derived from information gleaned from 3D nanoprinting simulations. Electron dose modulation is an ideal solution for artifact correction because variations in electron dose have no influence on temperature. Thus, the generalized compensation strategy revealed here will help advance 3D nanoscale printing fidelity for focused electron beam-induced deposition.
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Affiliation(s)
- Jason
D. Fowlkes
- Center
for Nanophase Materials Sciences, Oak Ridge
National Laboratory, Oak Ridge, Tennessee37831, United States
| | - Robert Winkler
- Christian
Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes
(DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010Graz, Austria
| | - Philip D. Rack
- Department
of Materials Science and Engineering, University
of Tennessee, Knoxville, Tennessee37996, United States
| | - Harald Plank
- Christian
Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes
(DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010Graz, Austria
- Institute
of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010Graz, Austria
- Graz
Centre for Electron Microscopy, 8010Graz, Austria
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8
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Seewald LM, Sattelkow J, Brugger-Hatzl M, Kothleitner G, Frerichs H, Schwalb C, Hummel S, Plank H. 3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:4477. [PMID: 36558331 PMCID: PMC9787867 DOI: 10.3390/nano12244477] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/25/2022] [Revised: 12/07/2022] [Accepted: 12/15/2022] [Indexed: 06/17/2023]
Abstract
3D nanoprinting via focused electron beam induced deposition (FEBID) is applied for fabrication of all-metal nanoprobes for atomic force microscopy (AFM)-based electrical operation modes. The 3D tip concept is based on a hollow-cone (HC) design, with all-metal material properties and apex radii in the sub-10 nm regime to allow for high-resolution imaging during morphological imaging, conductive AFM (CAFM) and electrostatic force microscopy (EFM). The study starts with design aspects to motivate the proposed HC architecture, followed by detailed fabrication characterization to identify and optimize FEBID process parameters. To arrive at desired material properties, e-beam assisted purification in low-pressure water atmospheres was applied at room temperature, which enabled the removal of carbon impurities from as-deposited structures. The microstructure of final HCs was analyzed via scanning transmission electron microscopy-high-angle annular dark field (STEM-HAADF), whereas electrical and mechanical properties were investigated in situ using micromanipulators. Finally, AFM/EFM/CAFM measurements were performed in comparison to non-functional, high-resolution tips and commercially available electric probes. In essence, we demonstrate that the proposed all-metal HCs provide the resolution capabilities of the former, with the electric conductivity of the latter onboard, combining both assets in one design.
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Affiliation(s)
- Lukas Matthias Seewald
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria
| | - Jürgen Sattelkow
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria
| | - Michele Brugger-Hatzl
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria
| | - Gerald Kothleitner
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | | | - Christian Schwalb
- GETec Microscopy Inc., 1020 Wien, Austria
- Quantum Design Microscopy, 64293 Darmstadt, Germany
| | | | - Harald Plank
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
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9
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Menétrey M, Koch L, Sologubenko A, Gerstl S, Spolenak R, Reiser A. Targeted Additive Micromodulation of Grain Size in Nanocrystalline Copper Nanostructures by Electrohydrodynamic Redox 3D Printing. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2022; 18:e2205302. [PMID: 36328737 DOI: 10.1002/smll.202205302] [Citation(s) in RCA: 5] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/28/2022] [Revised: 10/14/2022] [Indexed: 06/16/2023]
Abstract
The control of materials' microstructure is both a necessity and an opportunity for micro/nanometer-scale additive manufacturing technologies. On the one hand, optimization of purity and defect density of printed metals is a prerequisite for their application in microfabrication. On the other hand, the additive approach to materials deposition with highest spatial resolution offers unique opportunities for the fabrication of materials with complex, 3D graded composition or microstructure. As a first step toward both-optimization of properties and site-specific tuning of microstructure-an overview of the wide range of microstructure accessed in pure copper (up to >99.9 at.%) by electrohydrodynamic redox 3D printing is presented, and on-the-fly modulation of grain size in copper with smallest segments ≈400 nm in length is shown. Control of microstructure and materials properties by in situ adjustment of the printing voltage is demonstrated by variation of grain size by one order of magnitude and corresponding compression strength by a factor of two. Based on transmission electron microscopy and atom probe tomography, it is suggested that the small grain size is a direct consequence of intermittent solvent drying at the growth interface at low printing voltages, while larger grains are enabled by the permanent presence of solvent at higher potentials.
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Affiliation(s)
- Maxence Menétrey
- Laboratory for Nanometallurgy, Department of Materials, ETH Zürich, Vladimir-Prelog-Weg 1-5/10, Zürich, 8093, Switzerland
| | - Lukas Koch
- Laboratory for Nanometallurgy, Department of Materials, ETH Zürich, Vladimir-Prelog-Weg 1-5/10, Zürich, 8093, Switzerland
| | - Alla Sologubenko
- Scientific Center for Optical and Electron Microscopy (ScopeM), ETH Zürich, Otto-Stern-Weg 3, Zürich, 8093, Switzerland
| | - Stephan Gerstl
- Scientific Center for Optical and Electron Microscopy (ScopeM), ETH Zürich, Otto-Stern-Weg 3, Zürich, 8093, Switzerland
| | - Ralph Spolenak
- Laboratory for Nanometallurgy, Department of Materials, ETH Zürich, Vladimir-Prelog-Weg 1-5/10, Zürich, 8093, Switzerland
| | - Alain Reiser
- Laboratory for Nanometallurgy, Department of Materials, ETH Zürich, Vladimir-Prelog-Weg 1-5/10, Zürich, 8093, Switzerland
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
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10
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Weitzer A, Winkler R, Kuhness D, Kothleitner G, Plank H. Controlled Morphological Bending of 3D-FEBID Structures via Electron Beam Curing. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:4246. [PMID: 36500873 PMCID: PMC9737864 DOI: 10.3390/nano12234246] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/05/2022] [Revised: 11/21/2022] [Accepted: 11/26/2022] [Indexed: 06/17/2023]
Abstract
Focused electron beam induced deposition (FEBID) is one of the few additive, direct-write manufacturing techniques capable of depositing complex 3D nanostructures. In this work, we explore post-growth electron beam curing (EBC) of such platinum-based FEBID deposits, where free-standing, sheet-like elements were deformed in a targeted manner by local irradiation without precursor gas present. This process diminishes the volumes of exposed regions and alters nano-grain sizes, which was comprehensively characterized by SEM, TEM and AFM and complemented by Monte Carlo simulations. For obtaining controlled and reproducible conditions for smooth, stable morphological bending, a wide range of parameters were varied, which will here be presented as a first step towards using local EBC as a tool to realize even more complex nano-architectures, beyond current 3D-FEBID capabilities, such as overhanging structures. We thereby open up a new prospect for future applications in research and development that could even be further developed towards functional imprinting.
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Affiliation(s)
- Anna Weitzer
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - Robert Winkler
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - David Kuhness
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - Gerald Kothleitner
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | - Harald Plank
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
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11
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Reiser A, Schuster R, Spolenak R. Nanoscale electrochemical 3D deposition of cobalt with nanosecond voltage pulses in an STM. NANOSCALE 2022; 14:5579-5588. [PMID: 35343988 DOI: 10.1039/d1nr08409g] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
To explore a minimal feature size of <100 nm with electrochemical additive manufacturing, we use a strategy originally applied to microscale electrochemical machining for the nanoscale deposition of Co on Au. The concept's essence is the localization of electrochemical reactions below a probe during polarization with ns-long voltage pulses. As shown, a confinement that exceeds that predicted by a simple model based on the time constant for one-dimensional double layer charging enables a feature size of <100 nm for 2D patterning. We further indirectly verify the potential for out-of-plane deposition by tracking growth curves of high-aspect-ratio deposits. Importantly, we report a lack of anodic stability of Au tips used for patterning. As an inert probe is the prerequisite for controlled structuring, we experimentally verify an increased resistance of Pt probes against degradation. Consequently, the developed setup and processes show a path towards reproducible direct 2D and 3D patterning of metals at the nanoscale.
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Affiliation(s)
- Alain Reiser
- Laboratory for Nanometallurgy, Department of Materials, Federal Institute of Technology (ETH) Zürich, 8093 Zürich, Switzerland.
| | - Rolf Schuster
- Institute of Physical Chemistry, Karlsruhe Institute of Technology, 76131 Karlsruhe, Germany
| | - Ralph Spolenak
- Laboratory for Nanometallurgy, Department of Materials, Federal Institute of Technology (ETH) Zürich, 8093 Zürich, Switzerland.
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12
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Hinum-Wagner J, Kuhness D, Kothleitner G, Winkler R, Plank H. FEBID 3D-Nanoprinting at Low Substrate Temperatures: Pushing the Speed While Keeping the Quality. NANOMATERIALS 2021; 11:nano11061527. [PMID: 34207654 PMCID: PMC8229455 DOI: 10.3390/nano11061527] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/12/2021] [Revised: 06/01/2021] [Accepted: 06/03/2021] [Indexed: 11/16/2022]
Abstract
High-fidelity 3D printing of nanoscale objects is an increasing relevant but challenging task. Among the few fabrication techniques, focused electron beam induced deposition (FEBID) has demonstrated its high potential due to its direct-write character, nanoscale capabilities in 3D space and a very high design flexibility. A limitation, however, is the low fabrication speed, which often restricts 3D-FEBID for the fabrication of single objects. In this study, we approach that challenge by reducing the substrate temperatures with a homemade Peltier stage and investigate the effects on Pt based 3D deposits in a temperature range of 5–30 °C. The findings reveal a volume growth rate boost up to a factor of 5.6, while the shape fidelity in 3D space is maintained. From a materials point of view, the internal nanogranular composition is practically unaffected down to 10 °C, followed by a slight grain size increase for even lower temperatures. The study is complemented by a comprehensive discussion about the growth mechanism for a more general picture. The combined findings demonstrate that FEBID on low substrate temperatures is not only much faster, but practically free of drawbacks during high fidelity 3D nanofabrication.
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Affiliation(s)
- Jakob Hinum-Wagner
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; (J.H.-W.); (D.K.)
| | - David Kuhness
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; (J.H.-W.); (D.K.)
| | - Gerald Kothleitner
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria;
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
| | - Robert Winkler
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; (J.H.-W.); (D.K.)
- Correspondence: (R.W.); (H.P.)
| | - Harald Plank
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria; (J.H.-W.); (D.K.)
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria;
- Graz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria
- Correspondence: (R.W.); (H.P.)
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13
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Kuhness D, Gruber A, Winkler R, Sattelkow J, Fitzek H, Letofsky-Papst I, Kothleitner G, Plank H. High-Fidelity 3D Nanoprinting of Plasmonic Gold Nanoantennas. ACS APPLIED MATERIALS & INTERFACES 2021; 13:1178-1191. [PMID: 33372522 DOI: 10.1021/acsami.0c17030] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
The direct-write fabrication of freestanding nanoantennas for plasmonic applications is a challenging task, as demands for overall morphologies, nanoscale features, and material qualities are very high. Within the small pool of capable technologies, three-dimensional (3D) nanoprinting via focused electron beam-induced deposition (FEBID) is a promising candidate due to its design flexibility. As FEBID materials notoriously suffer from high carbon contents, the chemical postgrowth transfer into pure metals is indispensably needed, which can severely harm or even destroy FEBID-based 3D nanoarchitectures. Following this challenge, we first dissect FEBID growth characteristics and then combine individual advantages by an advanced patterning approach. This allows the direct-write fabrication of high-fidelity shapes with nanoscale features in the sub-10 nm range, which allow a shape-stable chemical transfer into plasmonically active Au nanoantennas. The here-introduced strategy is a generic approach toward more complex 3D architectures for future applications in the field of 3D plasmonics.
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Affiliation(s)
- David Kuhness
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | | | - Robert Winkler
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - Jürgen Sattelkow
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - Harald Fitzek
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
| | - Ilse Letofsky-Papst
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - Gerald Kothleitner
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - Harald Plank
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
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14
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Reiser A, Koch L, Dunn KA, Matsuura T, Iwata F, Fogel O, Kotler Z, Zhou N, Charipar K, Piqué A, Rohner P, Poulikakos D, Lee S, Seol SK, Utke I, van Nisselroy C, Zambelli T, Wheeler JM, Spolenak R. Metals by Micro-Scale Additive Manufacturing: Comparison of Microstructure and Mechanical Properties. ADVANCED FUNCTIONAL MATERIALS 2020; 30:1910491. [PMID: 32684902 PMCID: PMC7357576 DOI: 10.1002/adfm.201910491] [Citation(s) in RCA: 20] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/17/2019] [Revised: 03/17/2020] [Accepted: 04/06/2020] [Indexed: 05/24/2023]
Abstract
Many emerging applications in microscale engineering rely on the fabrication of 3D architectures in inorganic materials. Small-scale additive manufacturing (AM) aspires to provide flexible and facile access to these geometries. Yet, the synthesis of device-grade inorganic materials is still a key challenge toward the implementation of AM in microfabrication. Here, a comprehensive overview of the microstructural and mechanical properties of metals fabricated by most state-of-the-art AM methods that offer a spatial resolution ≤10 μm is presented. Standardized sets of samples are studied by cross-sectional electron microscopy, nanoindentation, and microcompression. It is shown that current microscale AM techniques synthesize metals with a wide range of microstructures and elastic and plastic properties, including materials of dense and crystalline microstructure with excellent mechanical properties that compare well to those of thin-film nanocrystalline materials. The large variation in materials' performance can be related to the individual microstructure, which in turn is coupled to the various physico-chemical principles exploited by the different printing methods. The study provides practical guidelines for users of small-scale additive methods and establishes a baseline for the future optimization of the properties of printed metallic objects-a significant step toward the potential establishment of AM techniques in microfabrication.
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Affiliation(s)
- Alain Reiser
- Laboratory for NanometallurgyDepartment of MaterialsETH ZürichVladimir‐Prelog‐Weg 1‐5/10Zürich8093Switzerland
| | - Lukas Koch
- Laboratory for NanometallurgyDepartment of MaterialsETH ZürichVladimir‐Prelog‐Weg 1‐5/10Zürich8093Switzerland
| | - Kathleen A. Dunn
- College of Nanoscale Science & EngineeringSUNY Polytechnic Institute257 Fuller RoadAlbanyNY12203USA
| | - Toshiki Matsuura
- Graduate School of Integrated Science and TechnologyShizuoka UniversityJohoku, Naka‐kuHamamatsu432‐8561Japan
| | - Futoshi Iwata
- Graduate School of Integrated Science and TechnologyShizuoka UniversityJohoku, Naka‐kuHamamatsu432‐8561Japan
| | - Ofer Fogel
- Additive Manufacturing LaboratoryOrbotech Ltd.P.O. Box 215Yavne81101Israel
| | - Zvi Kotler
- Additive Manufacturing LaboratoryOrbotech Ltd.P.O. Box 215Yavne81101Israel
| | - Nanjia Zhou
- Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang ProvinceSchool of EngineeringWestlake University18 Shilongshan RoadHangzhouZhejiang Province310024China
- Institute of Advanced TechnologyWestlake Institute for Advanced Study18 Shilongshan RoadHangzhouZhejiang Province310024China
| | - Kristin Charipar
- Materials Science and Technology DivisionNaval Research Laboratory4555 Overlook Ave. SWWashingtonDC20375USA
| | - Alberto Piqué
- Materials Science and Technology DivisionNaval Research Laboratory4555 Overlook Ave. SWWashingtonDC20375USA
| | - Patrik Rohner
- Laboratory of Thermodynamics in Emerging TechnologiesDepartment of Mechanical and Process EngineeringETH ZürichSonneggstr. 3Zürich8092Switzerland
| | - Dimos Poulikakos
- Laboratory of Thermodynamics in Emerging TechnologiesDepartment of Mechanical and Process EngineeringETH ZürichSonneggstr. 3Zürich8092Switzerland
| | - Sanghyeon Lee
- Department of Mechanical EngineeringThe University of Hong KongPokfulam RoadHong KongChina
| | - Seung Kwon Seol
- Nano Hybrid Technology Research CenterKorea Electrotechnology Research Institute (KERI)Changwon‐SiGyeongsangnam‐do51543Republic of Korea
- Electrical Functionality Materials EngineeringUniversity of Science and Technology (UST)Changwon‐SiGyeongsangnam‐do51543Republic of Korea
| | - Ivo Utke
- Laboratory of Mechanics for Materials and NanostructuresEmpaFeuerwerkerstrasse 39Thun3602Switzerland
| | - Cathelijn van Nisselroy
- Laboratory of Biosensors and BioelectronicsDepartment of Information Technology and Electrical EngineeringETH ZürichGloriastrasse 35Zürich8092Switzerland
| | - Tomaso Zambelli
- Laboratory of Biosensors and BioelectronicsDepartment of Information Technology and Electrical EngineeringETH ZürichGloriastrasse 35Zürich8092Switzerland
| | - Jeffrey M. Wheeler
- Laboratory for NanometallurgyDepartment of MaterialsETH ZürichVladimir‐Prelog‐Weg 1‐5/10Zürich8093Switzerland
| | - Ralph Spolenak
- Laboratory for NanometallurgyDepartment of MaterialsETH ZürichVladimir‐Prelog‐Weg 1‐5/10Zürich8093Switzerland
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15
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Atomic Force Microscopy Imaging in Turbid Liquids: A Promising Tool in Nanomedicine. SENSORS 2020; 20:s20133715. [PMID: 32630829 PMCID: PMC7374447 DOI: 10.3390/s20133715] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/10/2020] [Revised: 06/25/2020] [Accepted: 06/29/2020] [Indexed: 01/18/2023]
Abstract
Tracking of biological and physiological processes on the nanoscale is a central part of the growing field of nanomedicine. Although atomic force microscopy (AFM) is one of the most appropriate techniques in this area, investigations in non-transparent fluids such as human blood are not possible with conventional AFMs due to limitations caused by the optical readout. Here, we show a promising approach based on self-sensing cantilevers (SSC) as a replacement for optical readout in biological AFM imaging. Piezo-resistors, in the form of a Wheatstone bridge, are embedded into the cantilever, whereas two of them are placed at the bending edge. This enables the deflection of the cantilever to be precisely recorded by measuring the changes in resistance. Furthermore, the conventional acoustic or magnetic vibration excitation in intermittent contact mode can be replaced by a thermal excitation using a heating loop. We show further developments of existing approaches enabling stable measurements in turbid liquids. Different readout and excitation methods are compared under various environmental conditions, ranging from dry state to human blood. To demonstrate the applicability of our laser-free bio-AFM for nanomedical research, we have selected the hemostatic process of blood coagulation as well as ultra-flat red blood cells in different turbid fluids. Furthermore, the effects on noise and scanning speed of different media are compared. The technical realization is shown (1) on a conventional optical beam deflection (OBD)-based AFM, where we replaced the optical part by a new SSC nose cone, and (2) on an all-electric AFM, which we adapted for measurements in turbid liquids.
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16
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Utke I, Michler J, Winkler R, Plank H. Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review. MICROMACHINES 2020; 11:E397. [PMID: 32290292 PMCID: PMC7231341 DOI: 10.3390/mi11040397] [Citation(s) in RCA: 22] [Impact Index Per Article: 5.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/04/2020] [Revised: 03/23/2020] [Accepted: 03/25/2020] [Indexed: 11/17/2022]
Abstract
This article reviews the state-of-the -art of mechanical material properties and measurement methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas-assisted focused electron and focused ion beam-induced deposition using volatile organic and organometallic precursors. Gas-assisted focused electron and ion beam-induced deposition-based additive manufacturing technologies enable the direct-write fabrication of complex 3D nanostructures with feature dimensions below 50 nm, pore-free and nanometer-smooth high-fidelity surfaces, and an increasing flexibility in choice of materials via novel precursors. We discuss the principles, possibilities, and literature proven examples related to the mechanical properties of such 3D nanoobjects. Most materials fabricated via these approaches reveal a metal matrix composition with metallic nanograins embedded in a carbonaceous matrix. By that, specific material functionalities, such as magnetic, electrical, or optical can be largely independently tuned with respect to mechanical properties governed mostly by the matrix. The carbonaceous matrix can be precisely tuned via electron and/or ion beam irradiation with respect to the carbon network, carbon hybridization, and volatile element content and thus take mechanical properties ranging from polymeric-like over amorphous-like toward diamond-like behavior. Such metal matrix nanostructures open up entirely new applications, which exploit their full potential in combination with the unique 3D additive manufacturing capabilities at the nanoscale.
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Affiliation(s)
- Ivo Utke
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, CH-3602 Thun, Switzerland
| | - Johann Michler
- Laboratory for Mechanics of Materials and Nanostructures, Empa-Swiss Federal Laboratories for Materials Science and Technology, CH-3602 Thun, Switzerland
| | - Robert Winkler
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
| | - Harald Plank
- Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
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17
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Plank H, Winkler R, Schwalb CH, Hütner J, Fowlkes JD, Rack PD, Utke I, Huth M. Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review. MICROMACHINES 2019; 11:E48. [PMID: 31906005 PMCID: PMC7019982 DOI: 10.3390/mi11010048] [Citation(s) in RCA: 47] [Impact Index Per Article: 9.4] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/29/2019] [Revised: 12/20/2019] [Accepted: 12/20/2019] [Indexed: 11/17/2022]
Abstract
Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication / modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.
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Affiliation(s)
- Harald Plank
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria;
- Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria
- Graz Centre for Electron Microscopy, 8010 Graz, Austria
| | - Robert Winkler
- Christian Doppler Laboratory for Direct–Write Fabrication of 3D Nano–Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria;
| | | | - Johanna Hütner
- GETec Microscopy GmbH, 1220 Vienna, Austria; (C.H.S.); (J.H.)
| | - Jason D. Fowlkes
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (J.D.F.); (P.D.R.)
- Materials Science and Engineering, The University of Tennessee, Knoxville, Knoxville, TN 37996, USA
| | - Philip D. Rack
- Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA; (J.D.F.); (P.D.R.)
- Materials Science and Engineering, The University of Tennessee, Knoxville, Knoxville, TN 37996, USA
| | - Ivo Utke
- Mechanics of Materials and Nanostructures Laboratory, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland;
| | - Michael Huth
- Physics Institute, Goethe University Frankfurt, 60323 Frankfurt am Main, Germany;
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