Metal-Assisted Transfer Strategy for Construction of 2D and 3D Nanostructures on an Elastic Substrate

Illuminating Recent Progress in Nanotransfer Printing: Core Principles, Emerging Applications, and Future Perspectives

As the demand for diverse nanostructures in physical/chemical devices continues to rise, the development of nanotransfer printing (nTP) technology is receiving significant attention due to its exceptional throughput and ease of use. Over the past decade, researchers have attempted to enhance the diversity of materials and substrates used in transfer processes as well as to improve the resolution, reliability, and scalability of nTP. Recent research on nTP has made continuous progress, particularly using the control of the interfacial adhesion force between the donor mold, target material, and receiver substrate, and numerous practical nTP methods with niche applications have been demonstrated. This review article offers a comprehensive analysis of the chronological advancements in nTP technology and categorizes recent strategies targeted for high-yield and versatile printing based on controlling the relative adhesion force depending on interfacial layers. In detail, the advantages and challenges of various nTP approaches are discussed based on their working mechanisms, and several promising solutions to improve morphological/material diversity are presented. Furthermore, this review provides a summary of potential applications of nanostructured devices, along with perspectives on the outlook and remaining challenges, which are expected to facilitate the continued progress of nTP technology and to inspire future innovations.

Mechanically-Guided 3D Assembly for Architected Flexible Electronics

Architected flexible electronic devices with rationally designed 3D geometries have found essential applications in biology, medicine, therapeutics, sensing/imaging, energy, robotics, and daily healthcare. Mechanically-guided 3D assembly methods, exploiting mechanics principles of materials and structures to transform planar electronic devices fabricated using mature semiconductor techniques into 3D architected ones, are promising routes to such architected flexible electronic devices. Here, we comprehensively review mechanically-guided 3D assembly methods for architected flexible electronics. Mainstream methods of mechanically-guided 3D assembly are classified and discussed on the basis of their fundamental deformation modes (i.e., rolling, folding, curving, and buckling). Diverse 3D interconnects and device forms are then summarized, which correspond to the two key components of an architected flexible electronic device. Afterward, structure-induced functionalities are highlighted to provide guidelines for function-driven structural designs of flexible electronics, followed by a collective summary of their resulting applications. Finally, conclusions and outlooks are given, covering routes to achieve extreme deformations and dimensions, inverse design methods, and encapsulation strategies of architected 3D flexible electronics, as well as perspectives on future applications.

High-performance plasmonic polymer modulators through mode hybridization and electro-thermomechanical effects

In this work, an electro-optical polymer modulator with double-layered gold nanostrips, a polymer nanograting, and a metal substrate is proposed and designed. Interestingly, mode hybridization between the Fabry-Pérot (F-P) and anti-bonding modes is formed, and strongly depends on the nanograting size, which can be controllably modulated by an injection current. The simulation and calculation results show that the temperature sensitivity and large structural sensitivity for the polymer modulator could remain constant during the current-tuning process, and a near-zero reflectance and a low linewidth of 13.8 nm in the red region corresponding to a high quality (Q) factor of 51 is achieved. In addition, a large redshift of 60.7 nm and a super-high modulation depth of 424 are obtained at only 8 µA.

Nanoscale three-dimensional fabrication based on mechanically guided assembly

The growing demand for complex three-dimensional (3D) micro-/nanostructures has inspired the development of the corresponding manufacturing techniques. Among these techniques, 3D fabrication based on mechanically guided assembly offers the advantages of broad material compatibility, high designability, and structural reversibility under strain but is not applicable for nanoscale device printing because of the bottleneck at nanofabrication and design technique. Herein, a configuration-designable nanoscale 3D fabrication is suggested through a robust nanotransfer methodology and design of substrate's mechanical characteristics. Covalent bonding-based two-dimensional nanotransfer allowing for nanostructure printing on elastomer substrates is used to address fabrication problems, while the feasibility of configuration design through the modulation of substrate's mechanical characteristics is examined using analytical calculations and numerical simulations, allowing printing of various 3D nanostructures. The printed nanostructures exhibit strain-independent electrical properties and are therefore used to fabricate stretchable H₂ and NO₂ sensors with high performances stable under external strains of 30%.

High-efficiency, four-channel beam splitter based on a fishnet-shaped continuous metasurface

Beam splitters play important roles in several optical systems. Due to the growing demand for the miniaturization of optical systems, it is necessary to design beam splitters with nanoscale dimensions to miniaturize the essential components for integrated optical circuits. In this work, we propose and numerically demonstrate a broadband, high efficient, and four-channel beam splitter based on a fishnet-shaped metasurface. The proposed structure is constructed of cruciform AlSb nanoantennas on the PDMS substrate. The simple design can split a beam of light into four beams with equal intensity, it achieves a conversion efficiency above 83%, and an anomalous transmission intensity exceeding 0.8 for the wavelength range of 761-835 nm. In this wavelength range, the beam splitting angle changes from 46.45° to 53.68°. Moreover, the four-channel beam splitter is tunable when the metasurface is designed as a discrete structure. At the wavelength of 874 nm, the beam splitting angle can be adjusted from 56.34° to 46.39° as the period increases from 1050 nm to 1207 nm by stretching the substrate. The presented metasurface might enable promising applications in integrated optical devices, owing to its advantages of multi-channel, wide broadband, high efficiency, and large beam split angle.

Recent Advances in Tunable Metasurfaces: Materials, Design, and Applications

Metasurfaces, a two-dimensional (2D) form of metamaterials constituted by planar meta-atoms, exhibit exotic abilities to tailor electromagnetic (EM) waves freely. Over the past decade, tremendous efforts have been made to develop various active materials and incorporate them into functional devices for practical applications, pushing the research of tunable metasurfaces to the forefront of nanophotonics. Those active materials include phase change materials (PCMs), semiconductors, transparent conducting oxides (TCOs), ferroelectrics, liquid crystals (LCs), atomically thin material, etc., and enable intriguing performances such as fast switching speed, large modulation depth, ultracompactness, and significant contrast of optical properties under external stimuli. Integration of such materials offers substantial tunability to the conventional passive nanophotonic platforms. Tunable metasurfaces with multifunctionalities triggered by various external stimuli bring in rich degrees of freedom in terms of material choices and device designs to dynamically manipulate and control EM waves on demand. This field has recently flourished with the burgeoning development of physics and design methodologies, particularly those assisted by the emerging machine learning (ML) algorithms. This review outlines recent advances in tunable metasurfaces in terms of the active materials and tuning mechanisms, design methodologies, and practical applications. We conclude this review paper by providing future perspectives in this vibrant and fast-growing research field.

Wearable SERS Sensor Based on Omnidirectional Plasmonic Nanovoids Array with Ultra-High Sensitivity and Stability

Surface-enhanced Raman spectroscopy (SERS) is a promising technology for wearable sensors due to its fingerprint spectrum and high detection sensitivity. However, since SERS-activity is sensitive to both the distribution of "hotspots" and excitation angle, it is profoundly challenging to develop a wearable SERS sensor with high stability under various deformations during movements. Herein, inspired by omnidirectional light-harvesting of the compound eye of Xenos Peckii, a wearable SERS sensor is developed using omnidirectional plasmonic nanovoids array (OPNA), which is prepared by assembling a monolayer of metal nanoparticles into the artificial plasmonic compound-eye (APC). Specifically, APC is an interconnected frame containing omnidirectional "pockets" and acts as an "armour", not only rendering a broadband and omnidirectional enhancement of "hotspots" in the delicate nanoparticles array, but also maintaining an integrity of the "hotspots" against external mechanical deformations. Furthermore, an asymmetry super-hydrophilic pattern is fabricated on the surface of OPNA, endowing the hydrophobic OPNA with the ability to spontaneously extract and concentrate the analytes from sweat. Such an armored SERS sensor can enable the wearable and in situ analysis with high sensitivity and stability, exhibiting great potential in point-of-care analysis.

Contact Printing of Multilayered Thin Films with Shape Memory Polymers

This study describes a method for transfer printing microarrays of multilayered organic-inorganic thin films using shape memory printing stamps and microstructured donor substrates. By applying the films on the microstructured donor substrates during physical vapor deposition and modulating the interfacial adhesion using a shape memory elastomer during printing, this method achieves (1) high lateral and feature-edge resolution and (2) high transfer efficiency from the donor to the receiver substrate. For demonstration, polyurethane-acrylate stamps and silicon/silicon oxide donor substrates were used in the large-area transfer printing of organic-inorganic thin-film stacks with micrometer lateral dimensions and sub-200 nm thickness.

Asymmetric angular dependence for multicolor display based on plasmonic inclined-nanopillar array

Asymmetric multicolor displays have unique and fascinating applications in the field of artificial color engineering. However, the realization of such multicolor displays still faces challenges, due to limitations associated with nanofabrication techniques. In this work, asymmetric photonic structures were realized through inclined 2D aluminum nanopillar arrays, which demonstrate asymmetric angle-dependence as multicolor displays. It was numerically and experimentally demonstrated that the distinctive symmetry breaking leads to the plasmonic coupling effect with angle-dependence and reflection differences with the opposite observing angle. Based on this concept, several color printings were designed as prototypes, which prove the utility of the controlled asymmetric color display with varied observing angles. Our results demonstrate a simple and efficient platform for asymmetric plasmonic nanostructures, which paves the way for further study and designation in artificial color engineering.

Electromechanically reconfigurable optical nano-kirigami

Kirigami, with facile and automated fashion of three-dimensional (3D) transformations, offers an unconventional approach for realizing cutting-edge optical nano-electromechanical systems. Here, we demonstrate an on-chip and electromechanically reconfigurable nano-kirigami with optical functionalities. The nano-electromechanical system is built on an Au/SiO₂/Si substrate and operated via attractive electrostatic forces between the top gold nanostructure and bottom silicon substrate. Large-range nano-kirigami like 3D deformations are clearly observed and reversibly engineered, with scalable pitch size down to 0.975 μm. Broadband nonresonant and narrowband resonant optical reconfigurations are achieved at visible and near-infrared wavelengths, respectively, with a high modulation contrast up to 494%. On-chip modulation of optical helicity is further demonstrated in submicron nano-kirigami at near-infrared wavelengths. Such small-size and high-contrast reconfigurable optical nano-kirigami provides advanced methodologies and platforms for versatile on-chip manipulation of light at nanoscale.

Fabrication of Au Nanoparticle Arrays on Flexible Substrate for Tunable Localized Surface Plasmon Resonance

In this work, Au nanoparticle (AuNP) arrays on shape memory polyurethane (SMPU) substrates serve as flexible materials for tunable localized surface plasmon resonance (LSPR). AuNP arrays prepared by diblock copolymer self-assembly are transferred from rigid silicon wafers onto flexible SMPU substrates with ultrasonic treatment rather than peeling off directly. The resultant AuNP array SMPU films have excellent mechanical properties and stable thermodynamic properties. The LSPR arising from AuNP arrays is increased by negative bending on SMPU substrates, whereas the LSPR is decreased by positive bending. Besides, upon uniaxial tension, the vertical LSPR is increased first then decreased, whereas the parallel LSPR is similar, resulting in the overall LSPR of AuNP arrays being increased first and then decreased with the mechanical uniaxial tension of SMPU. Moreover, the resultant AuNP array SMPU films exhibit excellent flexibility, stability, and homogeneity in practical surface-enhanced Raman scattering (SERS) application. This approach of incorporating AuNP arrays on SMPU substrates for tuning plasmonic properties have great potential applications in SERS, fluorescence enhancement, and newly optoelectronic materials.

A MoS2@Ti3C2Tx MXene hybrid-based electrochemical aptasensor (MEA) for sensitive and rapid detection of Thyroxine

In the present study, a MoS₂@Ti₃C₂T_x MXene hybrid-based electrochemical aptasensor (MEA) was introduced for sensitive and rapid quantification of Thyroxine (T4). T4 is a crucial hormone and plays a key role in various body functions. Therefore, there is high demand for an accurate, sensitive, and rapid method for the detection of T4. To construct the aptasensor, a nano-hybrid (NH) consisting of Ti₃C₂T_x MXene and MoS₂ nanosheets (NS) was synthesized, and applied to a carbon electrode surface, followed by the electroplating of gold nanostructures (GN). The smart combination of Ti₃C₂T_x MXene and MoS₂NS enhanced the physiochemical properties of the electrode surface, as well as provided a building block to form 3D GN. The 3D architecture of the GN offered a unique substrate to capture numerous T4 aptamer molecules, which consequently amplified the signal by nearly 6-fold. The MEA quantified thyroxine with a limit of detection (LOD) of 0.39 pg/mL over a dynamic range ((7.8 × 10^-1) to (7.8 × 10⁶)) pg/mL within 10 min. Moreover, the MEA successfully detected T4 in human serum samples. Lastly, the results obtained from the aptasensor were compared with those from the ELISA standard method. The comparative analysis showed good agreement between the two methods.

Kirigami/origami: unfolding the new regime of advanced 3D microfabrication/nanofabrication with "folding"

Advanced kirigami/origami provides an automated technique for modulating the mechanical, electrical, magnetic and optical properties of existing materials, with remarkable flexibility, diversity, functionality, generality, and reconfigurability. In this paper, we review the latest progress in kirigami/origami on the microscale/nanoscale as a new platform for advanced 3D microfabrication/nanofabrication. Various stimuli of kirigami/origami, including capillary forces, residual stress, mechanical stress, responsive forces, and focussed-ion-beam irradiation-induced stress, are introduced in the microscale/nanoscale region. These stimuli enable direct 2D-to-3D transformations through folding, bending, and twisting of microstructures/nanostructures, with which the occupied spatial volume can vary by several orders of magnitude compared to the 2D precursors. As an instant and direct method, ion-beam irradiation-based tree-type and close-loop nano-kirigami is highlighted in particular. The progress in microscale/nanoscale kirigami/origami for reshaping the emerging 2D materials, as well as the potential for biological, optical and reconfigurable applications, is briefly discussed. With the unprecedented physical characteristics and applicable functionalities generated by kirigami/origami, a wide range of applications in the fields of optics, physics, biology, chemistry and engineering can be envisioned.

Micro/Nanoscale 3D Assembly by Rolling, Folding, Curving, and Buckling Approaches

The miniaturization of electronics has been an important topic of study for several decades. The established roadmaps following Moore's Law have encountered bottlenecks in recent years, as planar processing techniques are already close to their physical limits. To bypass some of the intrinsic challenges of planar technologies, more and more efforts have been devoted to the development of 3D electronics, through either direct 3D fabrication or indirect 3D assembly. Recent research efforts into direct 3D fabrication have focused on the development of 3D transistor technologies and 3D heterogeneous integration schemes, but these technologies are typically constrained by the accessible range of sophisticated 3D geometries and the complexity of the fabrication processes. As an alternative route, 3D assembly methods make full use of mature planar technologies to form predefined 2D precursor structures in the desired materials and sizes, which are then transformed into targeted 3D mesostructures by mechanical deformation. The latest progress in the area of micro/nanoscale 3D assembly, covering the various classes of methods through rolling, folding, curving, and buckling assembly, is discussed, focusing on the design concepts, principles, and applications of different methods, followed by an outlook on the remaining challenges and open opportunities.

Flexible plasmonic modulators induced by the thermomechanical effect

Reconfigurable plasmon-based flexible devices, composed of artificial plasmonic nanostructures on stretchable substrates, show great promise for dynamic functionalities such as tunability, switching and modulation of electromagnetic waves. Here, we theoretically proposed and experimentally demonstrated a simple and efficient flexible plasmonic modulator based on an array of gold nanostructures on a poly(dimethylsiloxane) (PDMS) substrate. Arising from the current-induced local Joule heat, the local expansion of the PDMS substrate widens the gap distances between the neighboring gold wires, which results in a spectral shift of the plasmon resonance. The experimental results show that the plasmon resonance has a blue-shift of 39 nm under a total power consumption of only 10.5 mW, which results in a high modulation depth of up to 30.5% for the modulator. Such a low power consumption can be ascribed to the small active area and excellent thermal isolation of the PDMS. The optical and thermomechanical responses were confirmed and understood by the electromagnetic and thermomechanical co-simulations based on the finite-difference time-domain and finite-element methods. This novel mechanism to manipulate light provides new opportunities for active optical components and integrated circuits.

Layer-by-Layer Assembly of Three-Dimensional Optical Functional Nanostructures

Nanotransfer printing (nTP) technology can generate highly functional three-dimensional (3D) nanostructures in a low-cost and high-throughput fashion. Nevertheless, the fabrication yield and quality of the transferred nanostructures are often limited by the merging of the surface patterns of replica stamps during transfer printing. Here, an nTP technology was developed to fabricate large-area and crack-free 3D multilayer nanostructures. Instead of directly depositing materials on the patterned flexible stamp in conventional nTPs, we transferred the nanostructures straightforwardly onto an attached polydimethylsiloxane slab by removing a sacrificial water-soluble poly(acrylic acid) film, which can avoid the cracking of metal film and the failures of printing nanostructures onto target substrates. Based on this approach, subwavelength-thick polarization rotators working at infrared wavelengths were fabricated. Excellent performance of linear polarization rotation over a broadband was realized. This nTP approach could complement existing fabrication techniques and benefit the development of various functional nanostructures with complex multilayer hierarchies.