Plasmonic piezoelectric nanomechanical resonator for spectrally selective infrared sensing

Fluid-Infiltrated Metalens-Driven Reconfigurable Intelligent Surfaces for Optical Wireless Communications

A reconfigurable intelligent surface (RIS), a leading-edge technology, represents a new paradigm for adaptive control of electromagnetic waves between a source and a user. While RIS technology has proven effective in manipulating radio frequency waves using passive elements such as diodes and MEMS, its application in the optical domain is challenging. The main difficulty lies in meeting key performance indicators, with the most critical being accurate and self-adjusting positioning. This work presents an alternative RIS design methodology driven by an all-silicon structure and fluid infiltration, to achieve real-time control of focal length toward a designated user, thereby enabling secure data transmission. To validate the concept, both numerical simulations and experimental investigations of the RIS design methodology are conducted to demonstrate the performance of fluid-infiltrated metalens-driven RIS for this application. When combined with different fluids, the resulting ultra-compact RIS exhibits exceptional varifocal abilities, ranging from 0.4 to 0.5 mm, thereby confirming the adaptive tuning capabilities of the design. This may significantly enhance the modulation of optical waves and promote the development of RIS-based applications in wireless communications and secure data-transmission integrated photonic devices.

Fluid-responsive tunable metasurfaces for high-fidelity optical wireless communication

Optical wireless communication (OWC), with its blazing data transfer speed and unparalleled security, is a futuristic technology for wireless connectivity. Despite the significant advancements in OWC, the realization of tunable devices for on-demand and versatile connectivity still needs to be explored. This presents a considerable limitation in utilizing adaptive technologies to improve signal directivity and optimize data transfer. This study proposes a unique platform that utilizes tunable, fluid-responsive multifunctional metasurfaces offering dynamic and unprecedented control over electromagnetic wave manipulation to enhance the performance of OWC networks. We have achieved real-time, on-demand beam steering with vary-focusing capability by integrating the fabricated metasurfaces with different isotropic fluids. Furthermore, the designed metasurfaces are capable of polarization-based switching of the diffracted light beams to enhance overall productivity. Our research has showcased the potential of fluid-responsive tunable metasurfaces in revolutionizing OWC networks by significantly improving transmission reliability and signal quality through real-time adjustments. The proposed methodology is verified by designing and fabricating an all-dielectric metasurface measuring 500 μm × 500 μm and experimentally investigating its fluid-responsive vary-focal capability. By incorporating fluid-responsive properties into spin-decoupled metasurfaces, we aim to develop advanced high-tech optical devices and systems to simplify beam-steering and improve performance, adaptability, and functionality, making the devices suitable for various practical applications.

Dual-band and spectrally selective infrared absorbers based on hybrid gold-graphene metasurfaces

In this paper, we propose a dual-band and spectrally selective infrared (IR) absorber based on a hybrid structure comprising a patterned graphene monolayer and cross-shaped gold resonators within a metasurface. Rooted in full-wave numerical simulations, our study shows that the fundamental absorption mode of the gold metasurface hybridizes with the graphene pattern, leading to a second absorptive mode whose properties depend on graphene's electrical properties and physical geometry. Specifically, the central operation band of the absorber is defined by the gold resonators whereas the relative absorption level and spectral separation between the two modes can be controlled by graphene's chemical potential and its pattern, respectively. We analyze this platform using coupled-mode theory to understand the coupling mechanism between these modes and to elucidate the emergence and tuning of the dual band response. The proposed dual-band device can operate at different bands across the IR spectrum and may open new possibilities for tailored sensing applications in spectroscopy, thermal imaging, and environmental monitoring.

Mode localization in plasmonic optomechanical resonators for ultrasensitive infrared sensing

Uncooled infrared thermal detectors are gaining increasing attention owing to their ability to operate at room-temperature and their low cost. This study proposes a plasmonic optomechanical resonator for ultrasensitive long-wave infrared wave sensing based on mode localization mechanism. The mode-localized effect confines the plasmonic energy in the resonators and induces a significant modal amplitude shift through infrared irradiation, thus achieving highly sensitive detection. The results show that the detection sensitivity can reach 1.304 /mW, which is three-order improvement compared to the frequency-shift sensing metrics. The research provides a new approach to further improve the detection sensitivity of uncooled infrared sensors.

Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices

The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by means of MEMS/NEMS sensors, such as sensing in passive modes of small changes in momentum, temperature, and strain. In this review, we discuss the materials preparation methods, electronic, optical, and mechanical properties of 2D materials used in NEMS and MEMS devices, fabrication routes besides device operation principles.

Wavelength Tunable Infrared Perfect Absorption in Plasmonic Nanocrystal Monolayers

The ability to efficiently absorb light in ultrathin (subwavelength) layers is essential for modern electro-optic devices, including detectors, sensors, and nonlinear modulators. Tailoring these ultrathin films' spectral, spatial, and polarimetric properties is highly desirable for many, if not all, of the above applications. Doing so, however, often requires costly lithographic techniques or exotic materials, limiting scalability. Here we propose, demonstrate, and analyze a mid-infrared absorber architecture leveraging monolayer films of nanoplasmonic colloidal tin-doped indium oxide nanocrystals (ITO NCs). We fabricate a series of ITO NC monolayer films using the liquid-air interface method; by synthetically varying the Sn dopant concentration in the NCs, we achieve spectrally selective perfect absorption tunable between wavelengths of two and five micrometers. We achieve monolayer thickness-controlled coupling strength tuning by varying NC size, allowing access to different coupling regimes. Furthermore, we synthesize a bilayer film that enables broadband absorption covering the entire midwave IR region (λ = 3-5 μm). We demonstrate a scalable platform, with perfect absorption in monolayer films only hundredths of a wavelength in thickness, enabling strong light-matter interaction, with potential applications for molecular detection and ultrafast nonlinear optical applications.

Photogating-assisted tunneling boosts the responsivity and speed of heterogeneous WSe2/Ta2NiSe5 photodetectors

Photogating effect is the dominant mechanism of most high-responsivity two-dimensional (2D) material photodetectors. However, the ultrahigh responsivities in those devices are intrinsically at the cost of very slow response speed. In this work, we report a WSe2/Ta2NiSe5 heterostructure detector whose photodetection gain and response speed can be enhanced simultaneously, overcoming the trade-off between responsivity and speed. We reveal that photogating-assisted tunneling synergistically allows photocarrier multiplication and carrier acceleration through tunneling under an electrical field. The photogating effect in our device features low-power consumption (in the order of nW) and shows a dependence on the polarization states of incident light, which can be further tuned by source-drain voltages, allowing for wavelength discrimination with just a two-electrode planar structure. Our findings offer more opportunities for the long-sought next-generation photodetectors with high responsivity, fast speed, polarization detection, and multi-color sensing, simultaneously.

High-sensitivity non-cooled near-infrared detector based on lithium niobate surface acoustic wave resonators combined with MXene Ti3C2Tx quantum dot thin films

In this study, we propose the design of a surface acoustic wave (SAW) near-infrared sensor combined with an MXene quantum dot thin film to improve the infrared absorption efficiency at near-infrared wavelengths. A YZ-cut lithium niobate (LiNbO3) SAW resonator is fabricated as an infrared sensing unit with a resonant frequency shift reflecting the change in infrared radiation. It was observed that the responsivity of the near-infrared sensor (with a base frequency of 460 MHz) increased by approximately 88.89%. Thus, the proposed device exhibits high-performance infrared detection. Owing to the passive wireless capability of the device, it has wide applications.

Polarization- and angle-insensitive broadband long wavelength infrared absorber based on coplanar four-sized resonators

In many potential applications, there is a high demand for long wavelength infrared (LWIR) absorbers characterized by a compact configuration, broad operational bandwidth, high absorption efficiency, and polarization- and angle-insensitive characteristics. In this study, we design and demonstrate a high-performance broadband LWIR absorber based on coplanar four-sized resonators, consisting of arrays of titanium (Ti) disks with different diameters supported by a continuous zinc selenide (ZnSe) layer and by a Ti film acting as a back-reflector. Particle swarm optimization (PSO) is employed to optimize the complicated geometry parameters, and the final optimized device exhibits near-unity absorption (∼96.7%) across the entire operational bandwidth (8 µm∼14 µm) under unpolarized normal incidence, benefiting from the impedance-matching condition and the multiple surface plasmon resonances of this configuration. Furthermore, the proposed absorber is insensitive to the angle of incidence due to the localized surface plasmon resonances supported by these four-sized resonators, and is insensitive to the state of polarization thanks to the highly symmetric feature of the circular pattern. The measured absorption of the fabricated sample exhibits a relatively high coincidence with the simulation, with an average absorption of 88.9% ranging from 8 µm to 14 µm. The proposed absorber, which can be easily integrated into a standardized micro/nano manufacture process for cost-effective large-scale production, provides a feasible solution for improving optical performance in thermal emitter, infrared detection, and imaging applications. Furthermore, the generalized design principle employing the optimized method opens up new avenues for realizing target absorption, reflection, and transmission based on more complicated structure configurations.

Molecular-electromechanical system for unamplified detection of trace analytes in biofluids

Biological research and diagnostic applications normally require analysis of trace analytes in biofluids. Although considerable advancements have been made in developing precise molecular assays, the trade-off between sensitivity and ability to resist non-specific adsorption remains a challenge. Here, we describe the implementation of a testing platform based on a molecular-electromechanical system (MolEMS) immobilized on graphene field-effect transistors. A MolEMS is a self-assembled DNA nanostructure, containing a stiff tetrahedral base and a flexible single-stranded DNA cantilever. Electromechanical actuation of the cantilever modulates sensing events close to the transistor channel, improving signal-transduction efficiency, while the stiff base prevents non-specific adsorption of background molecules present in biofluids. A MolEMS realizes unamplified detection of proteins, ions, small molecules and nucleic acids within minutes and has a limit of detection of several copies in 100 μl of testing solution, offering an assay methodology with wide-ranging applications. In this protocol, we provide step-by-step procedures for MolEMS design and assemblage, sensor manufacture and operation of a MolEMS in several applications. We also describe adaptations to construct a portable detection platform. It takes ~18 h to construct the device and ~4 min to finish the testing from sample addition to result.

Research Process on Photodetectors based on Group-10 Transition Metal Dichalcogenides

Rapidly evolving group-10 transition metal dichalcogenides (TMDCs) offer remarkable electronic, optical, and mechanical properties, making them promising candidates for advanced optoelectronic applications. Compared to most TMDCs semiconductors, group-10-TMDCs possess unique structures, narrow bandgap, and influential physical properties that motivate the development of broadband photodetectors, specifically infrared photodetectors. This review presents the latest developments in the fabrication of broadband photodetectors based on conventional 2D TMDCs. It mainly focuses on the recent developments in group-10 TMDCs from the perspective of the lattice structure and synthesis techniques. Recent progress in group-10 TMDCs and their heterostructures with different dimensionality of materials-based broadband photodetectors is provided. Moreover, this review accounts for the latest applications of group-10 TMDCs in the fields of nanoelectronics and optoelectronics. Finally, conclusions and outlooks are summarized to provide perspectives for next-generation broadband photodetectors based on group-10 TMDCs.

Uncooled two-microbolometer stack for long wavelength infrared detection

We have investigated an uncooled infrared (IR) detector utilizing a dual level architecture. This was achieved by combining two-microbolometer stack in the vertical direction to achieve high IR absorption over two distinct spectral windows across the long wavelength infrared region (LWIR). In addition, we have studied amorphous silicon germanium oxide (Si_xGe_yO_1-x-y) as an IR sensitive material, and metasurface to control IR absorption/reflection in interaction with standard Fabry-Perot cavity. The bottom microbolometer uses a metasurface to selectively absorbs a portion of the spectrum and reflects radiation outside this window range. At the same time, the top microbolometer uses a conventional Fabry-Perot resonant cavity to absorb a different portion of the spectrum and transmit any unabsorbed radiation outside this window. This device can be used to measure the absolute temperature of an object by comparing the relative signals in the two spectral bands. The spectral responsivity and detectivity, and thermal response time were > 10⁵ V/W, > 10⁸ cm Hz^1/2/W, and 1.13 ms to filtered blackbody infrared radiation between (2-16) µm. The microbolometer voltage noise power spectral density was reduced by annealing the microbolometers in vacuum at 300 °C.

Recent Progress in Reconfigurable and Intelligent Metasurfaces: A Comprehensive Review of Tuning Mechanisms, Hardware Designs, and Applications

Intelligent metasurfaces have gained significant importance in recent years due to their ability to dynamically manipulate electromagnetic (EM) waves. Their multifunctional characteristics, realized by incorporating active elements into the metasurface designs, have huge potential in numerous novel devices and exciting applications. In this article, recent progress in the field of intelligent metasurfaces are reviewed, focusing particularly on tuning mechanisms, hardware designs, and applications. Reconfigurable and programmable metasurfaces, classified as space gradient, time modulated, and space-time modulated metasurfaces, are discussed. Then, reconfigurable intelligent surfaces (RISs) that can alter their wireless environments, and are considered as a promising technology for sixth-generation communication networks, are explored. Next, the recent progress made in simultaneously transmitting and reflecting reconfigurable intelligent surfaces (STAR-RISs) that can achieve full-space EM wave control are summarized. Finally, the perspective on the challenges and future directions of intelligent metasurfaces are presented.

Application of the Higher-Order Hamilton Approach to the Nonlinear Free Vibrations Analysis of Porous FG Nano-Beams in a Hygrothermal Environment Based on a Local/Nonlocal Stress Gradient Model of Elasticity

Nonlinear transverse free vibrations of porous functionally-graded (FG) Bernoulli–Euler nanobeams in hygrothermal environments through the local/nonlocal stress gradient theory of elasticity were studied. By using the Galerkin method, the governing equations were reduced to a nonlinear ordinary differential equation. The closed form analytical solution of the nonlinear natural flexural frequency was then established using the higher-order Hamiltonian approach to nonlinear oscillators. A numerical investigation was developed to analyze the influence of different parameters both on the thermo-elastic material properties and the structural response, such as material gradient index, porosity volume fraction, nonlocal parameter, gradient length parameter, mixture parameter, and the amplitude of the nonlinear oscillator on the nonlinear flexural vibrations of metal–ceramic FG porous Bernoulli–Euler nano-beams.

Resonant Magnetometer for Ultralow Magnetic Field Detection by Integrating Magnetoelastic Membrane on Film Bulk Acoustic Resonator

Here, we report on a composite nanomechanical resonant magnetometer with magnetoelastic thin film integrated on the surface of a film bulk acoustic resonator (FBAR). By exploiting the delta-E effect of magnetoelastic thin film and resonance characteristic in piezoelectric thin film, we theoretically and experimentally demonstrate the capability to realize ultrahigh resonance frequency and excellent magnetic field sensitivity in such composite configuration, thereby greatly improving the limit of detection of weak magnetic field. The proposed FBAR-based resonant magnetometer achieves maximum magnetic sensitivity of 137 kHz/Oe in a proof-of-concept device without structural optimization, corresponding to a noise equivalent power as low as 7 nT/Hz^1/2. Further study indicates that by optimizing the thicknesses of the magnetic sensitive layer and piezoelectric layer, an unprecedented sensitivity of 5 GHz/Oe with an exceptional limit of detection of weak magnetic field down to 190 [Formula: see text]/Hz^1/2 could be potentially achieved. Our work provides a forward new and exciting route toward ultralow magnetic field detection in civilian and military applications.

Actively MEMS-Based Tunable Metamaterials for Advanced and Emerging Applications

In recent years, tunable metamaterials have attracted intensive research interest due to their outstanding characteristics, which are dependent on the geometrical dimensions rather than the material composition of the nanostructure. Among tuning approaches, micro-electro-mechanical systems (MEMS) is a well-known technology that mechanically reconfigures the metamaterial unit cells. In this study, the development of MEMS-based metamaterial is reviewed and analyzed based on several types of actuators, including electrothermal, electrostatic, electromagnetic, and stretching actuation mechanisms. The moveable displacement and driving power are the key factors in evaluating the performance of actuators. Therefore, a comparison of actuating methods is offered as a basic guideline for selecting micro-actuators integrated with metamaterial. Additionally, by exploiting electro-mechanical inputs, MEMS-based metamaterials make possible the manipulation of incident electromagnetic waves, including amplitude, frequency, phase, and the polarization state, which enables many implementations of potential applications in optics. In particular, two typical applications of MEMS-based tunable metamaterials are reviewed, i.e., logic operation and sensing. These integrations of MEMS with metamaterial provide a novel route for the enhancement of conventional optical devices and exhibit great potentials in innovative applications, such as intelligent optical networks, invisibility cloaks, photonic signal processing, and so on.

Mechanochromic Detection for Soft Opto-Magnetic Actuators

New multi-stimuli responsive materials are required in smart systems applications to overcome current limitations in remote actuation and to achieve versatile operation in inaccessible environments. The incorporation of detection mechanisms to quantify in real time the response to external stimuli is crucial for the development of automated systems. Here, we present the first wireless opto-magnetic actuator with mechanochromic response. The device, based on a nanostructured-iron (Fe) layer transferred onto suspended elastomer structures with a periodically corrugated backside, can be actuated both optically (in a broadband spectral range) and magnetically. The combined opto-magnetic stimulus can accurately modulate the mechanical response (strength and direction) of the device. The structural coloration generated at the corrugated back surface enables to easily map and quantify, in 2D, the mechanical deflections by analyzing in real time the hue changes of images taken using a conventional RGB smartphone camera, with a precision of 0.05°. We demonstrate the independent and synergetic optical and magnetic actuation and detection with a detection limit of 1.8 mW·cm^-2 and 0.34 mT, respectively. The simple operation, versatility, and cost-effectiveness of the wireless multiactuated device with highly sensitive mechanochromic mapping paves the way to a new generation of wirelessly controlled smart systems.

Dual-color meta-image display with a silver nanopolarizer based metasurface

Plasmonic metallic nanostructures with anisotropic design have unusual polarization-selective characteristic which can be utilized to build nanopolarizers at the nanoscale. Herein, we propose a dual-color image display platform by reconfiguring two types of silver nanoblocks in a single-celled metasurface. Governed by Malus's law, the two types of silver nanoblocks both acting as nanopolarizers with different orientations can continuously modulate the intensity of incident linearly polarized red and green light pixel-by-pixel, respectively. As a result, an ultra-compact, high-resolution, and continuous-greyscale dual-color image can be recorded right at the surface of the meta-device. We demonstrate the dual-color Malus metasurface by successfully encoding and decoding a red-green continuously-grayscale image into a metasurface sample. The experimentally captured meta-image with high-fidelity and resolution as high as 63500 dots per inch (dpi) has verified our proposal. With the advantages such as continuous grayscale modulation, ultrathin, high stability and high density, the proposed dual-color encoded metasurfaces can be readily used in ultra-compact image displays, high-end anti-counterfeiting, high-density optical information storage and information encryption, etc.

Construction of Bio-Piezoelectric Platforms: From Structures and Synthesis to Applications

Piezoelectric materials, with their unique ability for mechanical-electrical energy conversion, have been widely applied in important fields such as sensing, energy harvesting, wastewater treatment, and catalysis. In recent years, advances in material synthesis and engineering have provided new opportunities for the development of bio-piezoelectric materials with excellent biocompatibility and piezoelectric performance. Bio-piezoelectric materials have attracted interdisciplinary research interest due to recent insights on the impact of piezoelectricity on biological systems and their versatile biomedical applications. This review therefore introduces the development of bio-piezoelectric platforms from a broad perspective and highlights their design and engineering strategies. State-of-the-art biomedical applications in both biosensing and disease treatment will be systematically outlined. The relationships between the properties, structure, and biomedical performance of the bio-piezoelectric materials are examined to provide a deep understanding of the working mechanisms in a physiological environment. Finally, the development trends and challenges are discussed, with the aim to provide new insights for the design and construction of future bio-piezoelectric materials.

The Recent Progress of MEMS/NEMS Resonators

MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.

Progress in micro/nano sensors and nanoenergy for future AIoT-based smart home applications

Self-sustainable sensing systems composed of micro/nano sensors and nano-energy harvesters contribute significantly to developing the internet of things (IoT) systems. As one of the most promising IoT applications, smart home relies on implementing wireless sensor networks with miniaturized and multi-functional sensors, and distributed, reliable, and sustainable power sources, namely energy harvesters with a variety of conversion mechanisms. To extend the capabilities of IoT in the smart home, a technology fusion of IoT and artificial intelligence (AI), called the artificial intelligence of things (AIoT), enables the detection, analysis, and decision-making functions with the aids of machine learning assisted algorithms to form a smart home based intelligent system. In this review, we introduce the conventional rigid microelectromechanical system (MEMS) based micro/nano sensors and energy harvesters, followed by presenting the advances in the wearable counterparts for better human interactions. We then discuss the viable integration approaches for micro/nano sensors and energy harvesters to form self-sustainable IoT systems. Whereafter, we emphasize the recent development of AIoT based systems and the corresponding applications enabled by the machine learning algorithms. Smart home based healthcare technology enabled by the integrated multi-functional sensing platform and bioelectronic medicine is also presented as an important future direction, as well as wearable photonics sensing system as a complement to the wearable electronics sensing system.

Hygro-Thermal Vibrations of Porous FG Nano-Beams Based on Local/Nonlocal Stress Gradient Theory of Elasticity

In this manuscript the dynamic response of porous functionally-graded (FG) Bernoulli-Euler nano-beams subjected to hygro-thermal environments is investigated by the local/nonlocal stress gradient theory of elasticity. In particular, the influence of several parameters on both the thermo-elastic material properties and the structural response of the FG nano-beams, such as material gradient index, porosity volume fraction, nonlocal parameter, gradient length parameter, and mixture parameter is examined. It is shown how the proposed approach is able to capture the dynamic behavior of porous functionally graded Bernoulli-Euler nano-beams under hygro-thermal loads and leads to well-posed structural problems of nano-mechanics.

Colossal Terahertz Photoresponse at Room Temperature: A Signature of Type-II Dirac Fermiology

The discovery of Dirac semimetal has stimulated bourgeoning interests for exploring exotic quantum-transport phenomena, holding great promise for manipulating the performance of photoelectric devices that are related to nontrivial band topology. Nevertheless, it still remains elusive on both the device implementation and immediate results, with some enhanced or technically applicable electronic properties signified by the Dirac fermiology. By means of Pt doping, a type-II Dirac semimetal Ir_1-xPt_xTe₂ with protected crystal structure and tunable Fermi level has been achieved in this work. It has been envisioned that the metal-semimetal-metal device exhibits an order of magnitude performance improvement at terahertz frequency when the Fermi level is aligned with the Dirac node (i.e., x ∼ 0.3) and a room-temperature photoresponsivity of 0.52 A·W^-1 at 0.12 THz and 0.45 A·W^-1 at 0.3 THz, which benefited from the excitation of type-II Dirac fermions. Furthermore, van der Waals integration with Dirac semimetals exhibits superb performance with noise equivalent power less than 24 pW·Hz^-0.5, rivaling the state-of-the-art detectors. Our work provides a route to explore the nontrivial topology of Dirac semimetal for addressing targeted applications in imaging and biomedical sensing across a terahertz gap.

Plasmon mediated spectrally selective and sensitivity-enhanced uncooled near-infrared detector

Here, we present a high performance uncooled near-infrared (NIR) detector comprising of a giga hertz (GHz) solidly mounted resonator (SMR) and gold nanorods (GNRs) arrays. By coupling the localized surface plasmon resonances of GNRs, the resonator system exhibits optimized optical response to vis-NIR region. Both simulation and experiments demonstrate the hybrid GNRs-SMR exhibit significantly enhanced optical responsive sensitivity of NIR, the tunable aspect ratios (AR) of GNRs enable resonator respond sensitively to selected light. Specially, taking advantage of the acoustofluidic effect of SMR, the GNRs can be controllably and precisely modified on the microchip surface in an ultra-short time, which addresses one of the most fundamental challenges in the localized functionalization of micro/nano scale surface. The presented work opens new directions in development of novel miniaturized, tunable NIR detector.

A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air

This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO₃; LN) MEMS resonator array up to 500 °C in air. After a high-temperature burn-in treatment, device quality factor (Q) was enhanced to 508 and the resonance shifted to a lower frequency and remained stable up to 500 °C. During subsequent in situ high-temperature testing, the resonant frequencies of two coupled shear horizontal (SH0) modes in the array were 87.36 MHz and 87.21 MHz at 25 °C and 84.56 MHz and 84.39 MHz at 500 °C, correspondingly, representing a −3% shift in frequency over the temperature range. Upon cooling to room temperature, the resonant frequency returned to 87.36 MHz, demonstrating the recoverability of device performance. The first- and second-order temperature coefficient of frequency (TCF) were found to be −95.27 ppm/°C and 57.5 ppb/°C² for resonant mode A, and −95.43 ppm/°C and 55.8 ppb/°C² for resonant mode B, respectively. The temperature-dependent quality factor and electromechanical coupling coefficient (k_t²) were extracted and are reported. Device Q decreased to 334 and total k_t² increased to 12.40% after high-temperature exposure. This work supports the use of piezoelectric LN as a material platform for harsh environment radio-frequency (RF) resonant sensors (e.g., temperature and infrared) incorporated with high coupling acoustic readout.

Dissipation Analysis Methods and Q-Enhancement Strategies in Piezoelectric MEMS Laterally Vibrating Resonators: A Review

Over the last two decades, piezoelectric resonant sensors based on micro-electromechanical systems (MEMS) technologies have been extensively studied as such sensors offer several unique benefits, such as small form factor, high sensitivity, low noise performance and fabrication compatibility with mainstream integrated circuit technologies. One key challenge for piezoelectric MEMS resonant sensors is enhancing their quality factors (Qs) to improve the resolution of these resonant sensors. Apart from sensing applications, large values of Qs are also demanded when using piezoelectric MEMS resonators to build high-frequency oscillators and radio frequency (RF) filters due to the fact that high-Q MEMS resonators favor lowering close-to-carrier phase noise in oscillators and sharpening roll-off characteristics in RF filters. Pursuant to boosting Q, it is essential to elucidate the dominant dissipation mechanisms that set the Q of the resonator. Based upon these insights on dissipation, Q-enhancement strategies can then be designed to target and suppress the identified dominant losses. This paper provides a comprehensive review of the substantial progress that has been made during the last two decades for dissipation analysis methods and Q-enhancement strategies of piezoelectric MEMS laterally vibrating resonators.

Infrared Thin Film Detectors Based on Thermoresponsive Microgels with Linear Shrinkage Behavior and Gold Nanorods

To overcome the drawbacks of existing infrared detectors, infrared thin film detectors based on microgels and gold nanorods (Au NRs) are investigated. The microgels with a linear shrinkage of the hydrodynamic diameter between 10 and 55 °C are copolymerized by monomers di(ethylene glycol) methyl ether methacrylate, oligo(ethylene glycol) methyl ether methacrylate, and acrylic acid with a molar ratio of 1:1:1. Homogenous thin films are obtained by spin coating from an aqueous solution on silicon substrates. Upon heating in a water vapor atmosphere, the film thickness of the hybrid films linearly decreases. Heat generation from a plasmon resonance enhanced absorption of the infrared radiation by the Au NRs triggers a linear shrinkage in the hybrid microgel-Au NR films as well. A linear correlation between the film thickness and the applied infrared power density is observed. The sensitivity is enhanced by a slight increase in the amount of Au NRs in the films. Infrared detectors are constructed from the hybrid microgel-Au NR films by adding two electrodes via deposition of two silver layers at the film ends. By monitoring the ohmic resistance, the intensity of the incident infrared light can be obtained. The detectors not only possess a good reversibility and fast response rate but also show a high stability after the resistance measurements. Compared with the traditional infrared detectors, the infrared thin film detectors based on microgels are sensitivity adjustable. Thus, they can be promising candidates for replacing expensive inorganic infrared detectors in areas of daily life applications.

Paraffin-embedding for large volume bio-tissue

Acquiring ultrahigh-resolution three-dimensional images of large-volume tissues non-human primate tissues was an enormous challenge. Given the preservation of structure and excellent sectioning property, formalin-fixed paraffin-embedding method had an enormous potential for three-dimensional reconstruction of fine structures, based on the very thin histological sections and optical images. However, maintaining the structure uniformly in large-volume tissues was difficult during the complex processes. In this study, we presented a detailed protocol for the whole mouse, rat, rabbit brains, and even for the macaque hemisphere. The entire protocol took about 2–30 days to complete for a large sample, including fixation, dehydration, clearing, wax immersion and embedding. In addition, it could be applied to other species and organs, while the embedding processes depended on the size and the type of organs. This method had wide applicability to serve as a baseline for further technique development.

Genetic optimization of plasmonic metamaterial absorber towards dual-band infrared imaging polarimetry

Mid-infrared imaging detectors are essential tools for many applications because they can visualize the objects in the dark via thermal radiation. However, these detectors have to pair with separate spectral and polarization filters to select the target spectral bands and polarization states, resulting in complicated and bulky imaging systems. One way to mitigate the need for separate spectral filters and polarizers is to use metamaterial absorbers, which are arrays of optical resonators with sub-wavelength dimensions and spacing, to tailor the responses of the detector pixels. Here we report an intelligent program based on the genetic algorithm that automates the design and optimization of a metal-insulator-metal based metamaterial absorber with multi-sized nanostrip antennas as the top layer. The program starts from a randomly generated pattern of the top antenna layer, and it iteratively approaches the optimized designs of two polarization selective MIM absorbers with wideband high absorption in the specified 3-5 (MWIR) band and 8-12 µm (LWIR) band. The measured absorption spectra of the two optimized designs agree well with the simulated results. The influences of the incident angle of light, the finite size of detector pixels, and the air gap between the neighboring pixels on the spectral absorption are numerically evaluated.

Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing

This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine particulates. As a proof-of-principle, the detection of diesel soot particles of 100 nanometres or less is demonstrated. A practical monitoring context also exists for diesel soot particles originating from combustion engines, as they are of serious health concern. The MEMS sensors employed in this work operate on the principle of vibration mode-localisation employing an amplitude ratio shift output metric for readout. Notably, gains are observed while comparing parametric sensitivities and the input referred stability for amplitude ratio and resonant frequency variations, demonstrating that the amplitude ratio output metric is particularly suitable for long-term measurements. The soot particle mass directly estimated using coupled MEMS resonators can be correlated to the mass, indirectly estimated using the condensation particle counter used as the reference instrument.

A Unidirectional Transducer Design for Scaling GHz AlN-Based RF Microsystems

In this work, we present a novel unidirectional transducer design for frequency scaling aluminum nitride (AlN)-based radio frequency (RF) microsystems. The proposed thickness-field-excited single-phase unidirectional transducers (TFE-SPUDT) adopt 5/16 wavelength electrodes and, thus, enable efficient piezoelectric transduction with better frequency scalability. The design space of the TFE-SPUDT is theoretically explored and validated using the acoustic delay line (ADL) testbeds. The ADL testbeds with a large feature size of [Formula: see text] show a center frequency of 1 GHz, a minimum insertion loss (IL) of 4.9 dB, and a fractional bandwidth (FBW) of 5.3%, significantly surpassing the IL and frequency scalability of the previously reported AlN transducers. The design approach can potentially contribute to various AlN-based RF microsystems for signal processing, physical sensing, optomechanical interaction, and quantum acoustic applications, and are readily extendable to other piezoelectric platforms.

Ultrathin 2 nm gold as impedance-matched absorber for infrared light

Thermal detectors are a cornerstone of infrared and terahertz technology due to their broad spectral range. These detectors call for efficient absorbers with a broad spectral response and minimal thermal mass. A common approach is based on impedance-matching the sheet resistance of a thin metallic film to half the free-space impedance. Thereby, one can achieve a wavelength-independent absorptivity of up to 50%. However, existing absorber films typically require a thickness of the order of tens of nanometers, which can significantly deteriorate the response of a thermal transducer. Here, we present the application of ultrathin gold (2 nm) on top of a surfactant layer of oxidized copper as an effective infrared absorber. An almost wavelength-independent and long-time stable absorptivity of 47(3)%, ranging from 2 μm to 20 μm, can be obtained. The presented absorber allows for a significant improvement of infrared/terahertz technologies in general and thermal detectors in particular.

Surface acoustic wave-based ultraviolet photodetectors: a review

Over the past decade, ultraviolet (UV) detection has been a subject of major interest for both research scientists and engineers because of its important applications in both the civil and military fields. The rapid development of interdisciplinary research has enabled the realization of UV detectors based on a variety of principles. Among these devices, UV detectors based on surface acoustic wave (SAW) technology offer unique advantages of remote wireless operation capability and zero power consumption. This article provides a comprehensive review of the working principles, important parameters, and the acoustic wave and materials types used in SAW-based UV detectors. The research and development status of these detectors are discussed and the most commonly used methods to optimize device performance are also summarized. Novel types of acoustic UV detectors based on thin film bulk acoustic resonators (FBARs) and Lamb wave resonators (LMRs) are briefly introduced. Finally, future development challenges are proposed and suggestions for future directions are provided to aid the development of this important research field.

PtTe2 -Based Type-II Dirac Semimetal and Its van der Waals Heterostructure for Sensitive Room Temperature Terahertz Photodetection

Recent years have witnessed rapid progresses made in the photoelectric performance of two-dimensional materials represented by graphene, black phosphorus, and transition metal dichalcogenides. Despite significant efforts, a photodetection technique capable for longer wavelength, higher working temperature as well as fast responsivity, is still facing huge challenges due to a lack of best among bandgap, dark current, and absorption ability. Exploring topological materials with nontrivial band transport leads to peculiar properties of quantized phenomena such as chiral anomaly, and magnetic-optical effect, which enables a novel feasibility for an advanced optoelectronic device working at longer wavelength. In this work, the direct generation of photocurrent at low energy terahertz (THz) band at room temperature is implemented in a planar metal-PtTe₂ -metal structure. The results show that the THz photodetector based on PtTe₂ with bow-tie-type planar contacts possesses a high photoresponsivity (1.6 A W^-1 without bias voltage) with a response time less than 20 µs, while the PtTe₂ -graphene heterostructure-based detector can reach responsivity above 1.4 kV W^-1 and a response time shorter than 9 µs. Remarkably, it is already exploitable for large area imaging applications. These results suggest that topological semimetals such as PtTe₂ can be ideal materials for implementation in a high-performing photodetection system at THz band.

A Study on the Effects of Bottom Electrode Designs on Aluminum Nitride Contour-Mode Resonators

This study presents the effects of bottom electrode designs on the operation of laterally vibrating aluminum nitride (AlN) contour-mode resonators (CMRs). A total of 160 CMRs were analyzed with varying bottom electrode areas at two resonant frequencies (f₀) of about 230 MHz and 1.1 GHz. Specifically, we analyzed the impact of bottom electrode coverage rates on the resonator quality factor (Q) and electromechanical coupling (k²), which are important parameters for Radio Frequency (RF) and sensing applications. From our experiments, Q exhibited different trends to electrode coverage rates depending on the device resonant frequencies, while k² increased with the coverage rate regardless of f₀. Along with experimental measurements, our finite element analysis (FEA) revealed that the bottom electrode coverage rate determines the active (or vibrating) region of the resonator and, thus, directly impacts Q. Additionally, to alleviate thermoelastic damping (TED) and focus on mechanical damping effects, we analyzed the device performance at 10 K. Our findings indicated that a careful design of bottom electrodes could further improve both Q and k² of AlN CMRs, which ultimately determines the power budget and noise level of the resonator in integrated oscillators and sensor systems.

Analysis and Simulation of Forcing the Limits of Thermal Sensing for Microbolometers in CMOS-MEMS Technology

Room-temperature highly sensitive microbolometers are becoming very attractive in infrared (IR) sensing with the increase in demand for the internet of things (IOT), night vision, and medical imaging. Different techniques, such as building extremely small-scale devices (nanotubes, etc.) or using 2D materials, showed promising results in terms of high sensitivity with the cost of challenges in fabrication and low-noise readout circuit. Here, we propose a new and simple technique on the application of joule heating on a clamped–clamped beam without adding any complexity. It provides much better uniformity in temperature distribution in comparison to conventional joule heating, and this results in higher thermal stresses on fixed ends. This consequently brings around 60.5× improvement in the overall temperature sensitivity according to both theory and COMSOL (multiphysics solver). The sensitivity increased with the increase in the stiffness constant, and it was calculated as 134 N/m for a device with a 60.5× improvement. A considerable amount of decrease in the operation temperature (36× below 383 K and 47× below 428 K) was achieved via a new technique. That’s why the proposed solution can be used either to build highly reliable long-term devices or to increase the thermal sensitivity.

Shape memory polymer resonators as highly sensitive uncooled infrared detectors

Uncooled infrared detectors have enabled the rapid growth of thermal imaging applications. These detectors are predominantly bolometers, reading out a pixel’s temperature change due to infrared radiation as a resistance change. Another uncooled sensing method is to transduce the infrared radiation into the frequency shift of a mechanical resonator. We present here highly sensitive resonant infrared sensors, based on thermo-responsive shape memory polymers. By exploiting the phase-change polymer as transduction mechanism, our approach provides 2 orders of magnitude improvement of the temperature coefficient of frequency. Noise equivalent temperature difference of 22 mK in vacuum and 112 mK in air are obtained using f/2 optics. The noise equivalent temperature difference is further improved to 6 mK in vacuum by using high-Q silicon nitride membranes as substrates for the shape memory polymers. This high performance in air eliminates the need for vacuum packaging, paving a path towards flexible non-hermetically sealed infrared sensors.

Though resonant infrared (IR) detectors are an attractive thermal imaging technology owing to its high performance potential, realizing devices with high sensitivity remains a challenge. Here, the authors report high-sensitivity resonant IR sensors based on thermo-responsive shape memory polymers.

Elimination of Unwanted Modes in Wavelength-Selective Uncooled Infrared Sensors with Plasmonic Metamaterial Absorbers using a Subtraction Operation

Wavelength- or polarization-selective uncooled infrared (IR) sensors have various applications, such as in fire detection, gas analysis, hazardous material recognition, biological analysis, and polarimetric imaging. The unwanted modes originating due to the absorption by the materials used in these sensors, other than plasmonic metamaterial absorbers (PMAs), cause serious issues by degenerating the wavelength or polarization selectivity. In this study, we demonstrate a method for eliminating these unwanted modes in wavelength- or polarization-selective uncooled IR sensors with various PMAs, using a subtraction operation and a reference pixel. The aforementioned sensors and the reference pixels were fabricated using a complementary metal oxide semiconductor and micromachining techniques. We fabricated the reference pixel with the same structure as the PMA sensors, except a flat mirror was formed on the absorber surface instead of PMAs. The spectral responsivity measurements demonstrated that single-mode detection can be achieved through the subtraction operation with the reference pixel. The method demonstrated in this study can be applied to any type of uncooled IR sensors to create high-performance wavelength- or polarization-selective absorbers capable of multispectral or polarimetric detection.

All-silicon reconfigurable metasurfaces for multifunction and tunable performance at optical frequencies based on glide symmetry

Dielectric metasurfaces have opened promising possibilities to enable a versatile platform in the miniaturization of optical elements at visible and infrared frequencies. Due to high efficiency and compatibility with CMOS fabrication technology, silicon-based metasurfaces have a remarkable potential for a wide variety of optical devices. Adding tunability mechanisms to metasurfaces could be beneficial for their application in areas such as communications, imaging and sensing. In this paper, we propose an all-silicon reconfigurable metasurface based on the concept of glide symmetry. The reconfigurability is achieved by a phase modulation of the transmitted wave activated by a lateral displacement of the layers. The misalignment between the layers creates a new inner periodicity which leads to the formation of a metamolecule with a new sort of near-field interaction. The proposed approach is highly versatile for developing multifunctional and tunable metadevices at optical frequencies. As a proof of concept, in this paper, we design a bifunctional metadevice, as well as a tunable lens and a controllable beam deflector operating at 1.55 μm.

Auxetic Thermoresponsive Nanoplasmonic Optical Switch

Development and use of metamaterials have been gaining prominence in large part due to the possibility of creating platforms with "disruptive" and unique optical properties. However, to date, the majority of such systems produced using micro or nanotechnology are static and can only perform certain target functions. Next-generation multifunctional smart optical metamaterials are expected to have tunable elements with the possibility of controlling the optical properties in real time via variation in parameters such as pressure, mechanical stress, and voltage or through nonlinear optical effects. Here, we address this challenge by developing a thermally controlled optical switch, based on the self-assembly of poly( N-isopropylacrylamide)-functionalized gold nanoparticles on a planar macroscale gold substrate. We show that such meta-surfaces can be tuned to exhibit substantial changes in the optical properties in terms of both wavelength and intensity, through the temperature-controlled variation of the interparticle distance within the nanoparticle monolayer as well as its separation from the substrate. This change is based on temperature-induced auxetic expansion and contraction of the functional ligands. Such a system has potential for numerous applications, ranging from thermal sensors to regulated light harnessing.

Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS⁻MEMS Technology

Microbolometers and photon detectors are two main technologies to address the needs in Infrared Sensing applications. While the microbolometers in both complementary metal-oxide semiconductor (CMOS) and Micro-Electro-Mechanical Systems (MEMS) technology offer many advantages over photon detectors, they still suffer from nonlinearity and relatively low temperature sensitivity. This paper not only offers a reliable solution to solve the nonlinearity problem but also demonstrate a noticeable potential to build ultra-sensitive CMOS–MEMS temperature sensor for infrared (IR) sensing applications. The possibility of a 31× improvement in the total absolute frequency shift with respect to ambient temperature change is verified via both COMSOL (multiphysics solver) and theory. Nonlinearity problem is resolved by an operating temperature sensor around the beam bending point. The effect of both pull-in force and dimensional change is analyzed in depth, and a drastic increase in performance is achieved when the applied pull-in force between adjacent beams is kept as small as possible. The optimum structure is derived with a length of 57 µm and a thickness of 1 µm while avoiding critical temperature and, consequently, device failure. Moreover, a good match between theory and COMSOL is demonstrated, and this can be used as a guidance to build state-of-the-art designs.

Implementing infrared metamaterial perfect absorbers using dispersive dielectric spacers

A typical metamaterial perfect absorber (MPA) is comprised of a metamaterial layer, a dielectric spacer, and a ground plane. The conventional spacer material is usually a lossy dielectric with little-dispersion for the purpose of easing the design and optimization procedure of the MPA. In this paper, we present the design, fabrication, and characterization of metamaterial perfect absorbers with a highly dispersive spacer, which is compatible with functional microelectromechanical systems. The measured dispersive permittivity of a silicon nitride thin film is used in modeling the absorption response of MPAs with rigorous coupled wave analysis. Different designs of MPA structures are fabricated and characterized. Spectroscopy data shows two perfect absorption peaks in wavelengths ranging from 8 μm to 20 μm, which supports the theoretical calculation and numerical simulation. The dispersion of silicon nitride enables the shared resonant modes of the two peak wavelengths and decreases the wavelength shift led by variations in structural parameters. We demonstrate that the use of dispersive dielectric materials in MPAs potentiates various functional devices.

Integrating microsystems with metamaterials towards metadevices

Electromagnetic metamaterials, which are a major type of artificially engineered materials, have boosted the development of optical and photonic devices due to their unprecedented and controllable effective properties, including electric permittivity and magnetic permeability. Metamaterials consist of arrays of subwavelength unit cells, which are also known as meta-atoms. Importantly, the effective properties of metamaterials are mainly determined by the geometry of the constituting subwavelength unit cells rather than their chemical composition, enabling versatile designs of their electromagnetic properties. Recent research has mainly focused on reconfigurable, tunable, and nonlinear metamaterials towards the development of metamaterial devices, namely, metadevices, via integrating actuation mechanisms and quantum materials with meta-atoms. Microelectromechanical systems (MEMS), or microsystems, provide powerful platforms for the manipulation of the effective properties of metamaterials and the integration of abundant functions with metamaterials. In this review, we will introduce the fundamentals of metamaterials, approaches to integrate MEMS with metamaterials, functional metadevices from the synergy, and outlooks for metamaterial-enabled photonic devices.

Plasmo-thermomechanical radiation detector with on-chip optical readout

Plasmonic structures have long proved their capabilities to concentrate and manipulate light in micro- and nano-scales that facilitate strong light-matter interactions. Besides electromagnetic properties, ultra-small plasmonic structures may lead to novel applications based on their mechanical properties. Here we report efficient coupling between optical absorption and mechanical deformation in nanoscales through plasmonically enhanced fishbone nanowires. Using tailorable absorbers, free-space radiation energy is converted into heat to thermally actuate the suspended nanowires whose deformation is sensed by the evanescent fields from a waveguide. The demonstration at 660 nm wavelength with above 30% absorption shows the potential of the device to detect nW/√Hz power in an uncooled environment.

Bioinspired Infrared Sensing Materials and Systems

Bioinspired engineering offers a promising alternative approach in accelerating the development of many man-made systems. Next-generation infrared (IR) sensing systems can also benefit from such nature-inspired approach. The inherent compact and uncooled operation of biological IR sensing systems provides ample inspiration for the engineering of portable and high-performance artificial IR sensing systems. This review overviews the current understanding of the biological IR sensing systems, most of which are thermal-based IR sensors that rely on either bolometer-like or photomechanic sensing mechanism. The existing efforts inspired by the biological IR sensing systems and possible future bioinspired approaches in the development of new IR sensing systems are also discussed in the review. Besides these biological IR sensing systems, other biological systems that do not have IR sensing capabilities but can help advance the development of engineered IR sensing systems are also discussed, and the related engineering efforts are overviewed as well. Further efforts in understanding the biological IR sensing systems, the learning from the integration of multifunction in biological systems, and the reduction of barriers to maximize the multidiscipline collaborations are needed to move this research field forward.

Metal-Insulator-Metal-Based Plasmonic Metamaterial Absorbers at Visible and Infrared Wavelengths: A Review

Electromagnetic wave absorbers have been investigated for many years with the aim of achieving high absorbance and tunability of both the absorption wavelength and the operation mode by geometrical control, small and thin absorber volume, and simple fabrication. There is particular interest in metal-insulator-metal-based plasmonic metamaterial absorbers (MIM-PMAs) due to their complete fulfillment of these demands. MIM-PMAs consist of top periodic micropatches, a middle dielectric layer, and a bottom reflector layer to generate strong localized surface plasmon resonance at absorption wavelengths. In particular, in the visible and infrared (IR) wavelength regions, a wide range of applications is expected, such as solar cells, refractive index sensors, optical camouflage, cloaking, optical switches, color pixels, thermal IR sensors, IR microscopy and gas sensing. The promising properties of MIM-PMAs are attributed to the simple plasmonic resonance localized at the top micropatch resonators formed by the MIMs. Here, various types of MIM-PMAs are reviewed in terms of their historical background, basic physics, operation mode design, and future challenges to clarify their underlying basic design principles and introduce various applications. The principles presented in this review paper can be applied to other wavelength regions such as the ultraviolet, terahertz, and microwave regions.

Metabolic Fingerprinting on a Plasmonic Gold Chip for Mass Spectrometry Based in Vitro Diagnostics

Current metabolic analysis is far from ideal to engage clinics and needs rationally designed materials and device. Here we developed a novel plasmonic chip for clinical metabolic fingerprinting. We first constructed a series of chips with gold nanoshells on the surface through controlled particle synthesis, dip-coating, and gold sputtering for mass production. We integrated the optimized chip with microarrays for laboratory automation and micro-/nanoscaled experiments, which afforded direct high-performance metabolic fingerprinting by laser desorption/ionization mass spectrometry using 500 nL of various biofluids and exosomes. Further we for the first time demonstrated on-chip in vitro metabolic diagnosis of early stage lung cancer patients using serum and exosomes. This work initiates a new bionanotechnology based platform for advanced metabolic analysis toward large-scale diagnostic use.

Spatially Probed Plasmonic Photothermic Nanoheater Enhanced Hybrid Polymeric-Metallic PVDF-Ag Nanogenerator

Surface plasmon-based photonics offers exciting opportunities to enable fine control of the site, span, and extent of mechanical harvesting. However, the interaction between plasmonic photothermic and piezoresponse still remains underexplored. Here, spatially localized and controllable piezoresponse of a hybrid self-polarized polymeric-metallic system that correlates to plasmonic light-to-heat modulation of the local strain is demonstrated. The piezoresponse is associated to the localized plasmons that serve as efficient nanoheaters leading to self-regulated strain via thermal expansion of the electroactive polymer. Moreover, the finite-difference time-domain simulation and linear thermal model also deduce the local strain to the surface plasmon heat absorption. The distinct plasmonic photothermic-piezoelectric phenomenon mediates not only localized external stimulus light response but also enhances dynamic piezoelectric energy harvesting. The present work highlights a promising surface plasmon coordinated piezoelectric response which underpins energy localization and transfer for diversified design of unique photothermic-piezotronic technology.

Electric Field Stiffening Effect in c-Oriented Aluminum Nitride Piezoelectric Thin Films

Aluminum nitride offers unique material advantages for the realization of ultrahigh-frequency acoustic devices attributed to its high ratio of stiffness to density, compatibility with harsh environments, and superior thermal properties. Although, to date, aluminum nitride thin films have been widely investigated regarding their electrical and mechanical characteristics under alternating small signal excitation, their ultrathin nature under large bias may also provide novel and useful properties. Here, we present a comprehensive investigation of electric field stiffening effect in c-oriented aluminum nitride piezoelectric thin films. By analyzing resonance characteristics in a 2.5 GHz aluminum nitride-based film bulk acoustic resonator, we demonstrate an up to 10% linear variation in the equivalent stiffness of aluminum nitride piezoelectric thin films when an electric field was applied from -150 to 150 MV/m along the c-axis. Moreover, for the first time, an atomic interaction mechanism is proposed to reveal the nature of electric field stiffening effect, suggesting that the nonlinear variation of the interatomic force induced by electric field modulation is the intrinsic reason for this phenomenon in aluminum nitride piezoelectric thin films. Our work provides vital experimental data and effective theoretical foundation for electric field stiffening effect in aluminum nitride piezoelectric thin films, indicating the huge potential in tunable ultrahigh-frequency microwave devices.