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Giulio F, Mazzacua A, Calciati L, Narducci D. Fabrication of Metal Contacts on Silicon Nanopillars: The Role of Surface Termination and Defectivity. MATERIALS (BASEL, SWITZERLAND) 2024; 17:1549. [PMID: 38612064 PMCID: PMC11012852 DOI: 10.3390/ma17071549] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/14/2024] [Revised: 03/22/2024] [Accepted: 03/25/2024] [Indexed: 04/14/2024]
Abstract
The application of nanotechnology in developing novel thermoelectric materials has yielded remarkable advancements in material efficiency. In many instances, dimensional constraints have resulted in a beneficial decoupling of thermal conductivity and power factor, leading to large increases in the achievable thermoelectric figure of merit (ZT). For instance, the ZT of silicon increases by nearly two orders of magnitude when transitioning from bulk single crystals to nanowires. Metal-assisted chemical etching offers a viable, low-cost route for preparing silicon nanopillars for use in thermoelectric devices. The aim of this paper is to review strategies for obtaining high-density forests of Si nanopillars and achieving high-quality contacts on them. We will discuss how electroplating can be used for this aim. As an alternative, nanopillars can be embedded into appropriate electrical and thermal insulators, with contacts made by metal evaporation on uncapped nanopillar tips. In both cases, it will be shown how achieving control over surface termination and defectivity is of paramount importance, demonstrating how a judicious control of defectivity enhances contact quality.
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Affiliation(s)
- Federico Giulio
- Department of Materials Science, University of Milano Bicocca, Via R. Cozzi 55, I-20125 Milan, Italy; (F.G.); (A.M.)
| | - Antonio Mazzacua
- Department of Materials Science, University of Milano Bicocca, Via R. Cozzi 55, I-20125 Milan, Italy; (F.G.); (A.M.)
| | - Luca Calciati
- Department of Physics ‘Giuseppe Occhialini’, University of Milano Bicocca, Piazza Della Scienza 3, I-20126 Milan, Italy;
| | - Dario Narducci
- Department of Materials Science, University of Milano Bicocca, Via R. Cozzi 55, I-20125 Milan, Italy; (F.G.); (A.M.)
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2
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Bian C, Zhang B, Zhang Z, Chen H, Zhang D, Wang S, Ye J, He L, Jie J, Zhang X. Wafer-Scale Fabrication of Silicon Nanocones via Controlling Catalyst Evolution in All-Wet Metal-Assisted Chemical Etching. ACS OMEGA 2022; 7:2234-2243. [PMID: 35071912 PMCID: PMC8772306 DOI: 10.1021/acsomega.1c05790] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/16/2021] [Accepted: 12/23/2021] [Indexed: 06/14/2023]
Abstract
All-wet metal-assisted chemical etching (MACE) is a simple and low-cost method to fabricate one-dimensional Si nanostructures. However, it remains a challenge to fabricate Si nanocones (SiNCs) with this method. Here, we achieved wafer-scale fabrication of SiNC arrays through an all-wet MACE process. The key to fabricate SiNCs is to control the catalyst evolution from deposition to etching stages. Different from conventional MACE processes, large-size Ag particles by solution deposition are obtained through increasing AgNO3 concentration or extending the reaction time in the seed solution. Then, the large-size Ag particles are simultaneously etched during the Si etching process in an etching solution with a high H2O2 concentration due to the accelerated cathode process and inhibited anode process in Ag/Si microscopic galvanic cells. The successive decrease of Ag particle sizes causes the proportionate increase of diameters of the etched Si nanostructures, forming SiNC arrays. The SiNC arrays exhibit a stronger light-trapping ability and better photoelectrochemical performance compared with Si nanowire arrays. SiNCs were fabricated by using n-type 1-10 Ω cm Si(100) wafers in this work. Though the specific experimental conditions for preparing SiNCs may differ when using different Si wafers, the summarized diagram will still provide valuable guidance for morphology control of Si nanostructures in MACE processes.
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Affiliation(s)
- Chenyu Bian
- Institute
of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory
for Carbon-Based Functional Materials & Devices, Soochow University, Suzhou 215123, Jiangsu, People’s
Republic of China
| | - Bingchang Zhang
- School
of Optoelectronic Science and Engineering, Key Laboratory of Advanced
Optical Manufacturing Technologies of Jiangsu Province, Key Laboratory of Modern Optical Technologies of Education
Ministry of China, Suzhou 215123, Jiangsu, People’s
Republic of China
| | - Zhenghe Zhang
- School
of Optoelectronic Science and Engineering, Key Laboratory of Advanced
Optical Manufacturing Technologies of Jiangsu Province, Key Laboratory of Modern Optical Technologies of Education
Ministry of China, Suzhou 215123, Jiangsu, People’s
Republic of China
| | - Hui Chen
- School
of Optoelectronic Science and Engineering, Key Laboratory of Advanced
Optical Manufacturing Technologies of Jiangsu Province, Key Laboratory of Modern Optical Technologies of Education
Ministry of China, Suzhou 215123, Jiangsu, People’s
Republic of China
| | - Dake Zhang
- Institute
of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory
for Carbon-Based Functional Materials & Devices, Soochow University, Suzhou 215123, Jiangsu, People’s
Republic of China
| | - Shaojun Wang
- School
of Optoelectronic Science and Engineering, Key Laboratory of Advanced
Optical Manufacturing Technologies of Jiangsu Province, Key Laboratory of Modern Optical Technologies of Education
Ministry of China, Suzhou 215123, Jiangsu, People’s
Republic of China
| | - Jing Ye
- Testing
& Analysis Center, Soochow University, Suzhou 215123, Jiangsu, People’s Republic of China
| | - Le He
- Institute
of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory
for Carbon-Based Functional Materials & Devices, Soochow University, Suzhou 215123, Jiangsu, People’s
Republic of China
| | - Jiansheng Jie
- Institute
of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory
for Carbon-Based Functional Materials & Devices, Soochow University, Suzhou 215123, Jiangsu, People’s
Republic of China
- Macao
Institute of Materials Science and Engineering, Macau University of
Science and Technology, Taipa 999078, Macau SAR, People’s
Republic of China
| | - Xiaohong Zhang
- Institute
of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory
for Carbon-Based Functional Materials & Devices, Soochow University, Suzhou 215123, Jiangsu, People’s
Republic of China
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3
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Tsao CW, Zheng YS, Sun YS, Cheng YC. Surface-enhanced Raman scattering (SERS) spectroscopy on localized silver nanoparticle-decorated porous silicon substrate. Analyst 2021; 146:7645-7652. [PMID: 34806730 DOI: 10.1039/d1an01708j] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/14/2022]
Abstract
Surface-enhanced Raman scattering (SERS) spectroscopy is a rapid and non-destructive optical detection method that has been applied in various applications. Recently, three-dimensional (3D) substrate-based silicon nanostructures have been widely used as SERS substrates due to their high detection sensitivity, repeatability, and reusability. This paper uses a simple and low-cost electroless etching deposition process to generate silver nanoparticle-decorated porous silicon (Ag-PS) substrates. We propose a contact deposition process to generate localized Ag-PS (LocAg-PS) for SERS analysis. Due to the hydrophilic LocAg-PS pad on the hydrophobic PS background, the sample droplets self-aligned to the predefined LocAg-PS pads and condensed into a higher local concentration for high sensitivity SERS detection without extensive search for the hot spot. The effects of critical fabrication parameters and SERS analysis on the LocAg-PS surface were evaluated.
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Affiliation(s)
- Chia-Wen Tsao
- Department of Mechanical Engineering, National Central University, Taoyuan 32001, Taiwan.
| | - You-Shan Zheng
- Department of Mechanical Engineering, National Central University, Taoyuan 32001, Taiwan.
| | - Ya-Sen Sun
- Department of Chemical and Materials Engineering, National Central University, Taoyuan 32001, Taiwan
| | - Yu-Che Cheng
- Proteomics Laboratory, Department of Medical Research, Cathay General Hospital, Taipei 10630, Taiwan.,School of Medicine, Fu-Jen Catholic University, New Taipei City 242062, Taiwan.,Department of Biomedical Sciences and Engineering, National Central University, Taoyuan 32001, Taiwan
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4
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Yan J, Ge K, Li H, Yang X, Chen J, Wan L, Guo J, Li F, Xu Y, Song D, Flavel BS, Chen J. Solution processable in situ passivated silicon nanowires. NANOSCALE 2021; 13:11439-11445. [PMID: 34160536 DOI: 10.1039/d1nr02131a] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
The 1D confinement of silicon in the form of a nanowire revives its newness with the emergence of new optical and electronic properties. However, the development of a production process for silicon nanowires (SiNWs) having a high quality crystalline core and exhibiting good stability in solution with effective outer-shell defect passivation is still a challenge. In this work, SiNWs are prepared from a silicon wafer using solution processing steps, and importantly outer-shell-defect passivation is achieved by in situ grafting of organic molecules based on thin films. Defect passivation and the high quality of the SiNWs are confirmed with thin films on glass and flexible plastic substrates. A dramatic enhancement in both the fluorescence lifetime and infrared photoluminescence is observed. The in situ organic passivation of SiNWs has potential application in all low-dimensional silicon devices including infrared detectors, solar cells and lithium-ion battery anodes.
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Affiliation(s)
- Jun Yan
- Hebei Key Lab of Optic-Electronic Information and Materials, College of Physics Science and Technology, Hebei University, Baoding 071002, China.
| | - Kunpeng Ge
- Hebei Key Lab of Optic-Electronic Information and Materials, College of Physics Science and Technology, Hebei University, Baoding 071002, China.
| | - Han Li
- Institute of Nanotechnology, Karlsruhe Institute of Technology, Karlsruhe 76021, Germany
| | - Xueliang Yang
- State Key Laboratory of Photovoltaic Materials & Technology, Yingli Green Energy Holding Co., Ltd., Baoding 071051, China
| | - Jingwei Chen
- Hebei Key Lab of Optic-Electronic Information and Materials, College of Physics Science and Technology, Hebei University, Baoding 071002, China.
| | - Lu Wan
- Hebei Key Lab of Optic-Electronic Information and Materials, College of Physics Science and Technology, Hebei University, Baoding 071002, China.
| | - Jianxin Guo
- Hebei Key Lab of Optic-Electronic Information and Materials, College of Physics Science and Technology, Hebei University, Baoding 071002, China.
| | - Feng Li
- State Key Laboratory of Photovoltaic Materials & Technology, Yingli Green Energy Holding Co., Ltd., Baoding 071051, China
| | - Ying Xu
- Hebei Key Lab of Optic-Electronic Information and Materials, College of Physics Science and Technology, Hebei University, Baoding 071002, China.
| | - Dengyuan Song
- State Key Laboratory of Photovoltaic Materials & Technology, Yingli Green Energy Holding Co., Ltd., Baoding 071051, China
| | - Benjamin S Flavel
- Institute of Nanotechnology, Karlsruhe Institute of Technology, Karlsruhe 76021, Germany
| | - Jianhui Chen
- Hebei Key Lab of Optic-Electronic Information and Materials, College of Physics Science and Technology, Hebei University, Baoding 071002, China. and Institute of Nanotechnology, Karlsruhe Institute of Technology, Karlsruhe 76021, Germany
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Abstract
Semiconductor nanowires have attracted extensive interest as one of the best-defined classes of nanoscale building blocks for the bottom-up assembly of functional electronic and optoelectronic devices over the past two decades. The article provides a comprehensive review of the continuing efforts in exploring semiconductor nanowires for the assembly of functional nanoscale electronics and macroelectronics. Specifically, we start with a brief overview of the synthetic control of various semiconductor nanowires and nanowire heterostructures with precisely controlled physical dimension, chemical composition, heterostructure interface, and electronic properties to define the material foundation for nanowire electronics. We then summarize a series of assembly strategies developed for creating well-ordered nanowire arrays with controlled spatial position, orientation, and density, which are essential for constructing increasingly complex electronic devices and circuits from synthetic semiconductor nanowires. Next, we review the fundamental electronic properties and various single nanowire transistor concepts. Combining the designable electronic properties and controllable assembly approaches, we then discuss a series of nanoscale devices and integrated circuits assembled from nanowire building blocks, as well as a unique design of solution-processable nanowire thin-film transistors for high-performance large-area flexible electronics. Last, we conclude with a brief perspective on the standing challenges and future opportunities.
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Affiliation(s)
- Chuancheng Jia
- Department of Chemistry and Biochemistry , University of California, Los Angeles , Los Angeles , California 90095 , United States
| | - Zhaoyang Lin
- Department of Chemistry and Biochemistry , University of California, Los Angeles , Los Angeles , California 90095 , United States
| | - Yu Huang
- Department of Materials Science and Engineering , University of California, Los Angeles , Los Angeles , California 90095 , United States.,California NanoSystems Institute , University of California, Los Angeles , Los Angeles , California 90095 , United States
| | - Xiangfeng Duan
- Department of Chemistry and Biochemistry , University of California, Los Angeles , Los Angeles , California 90095 , United States.,California NanoSystems Institute , University of California, Los Angeles , Los Angeles , California 90095 , United States
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Tailoring the robust superhydrophobic silicon textures with stable photodetection properties. Sci Rep 2019; 9:1579. [PMID: 30733530 PMCID: PMC6367431 DOI: 10.1038/s41598-018-37853-4] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/09/2018] [Accepted: 12/14/2018] [Indexed: 11/23/2022] Open
Abstract
Surface hydrophobicity of silicon with sound durability under mechanical abrasion is highly desirable for practical needs. However, the reported micro-pyramid/nanowires structures suffer from the saturation characteristics of contact angle at around 132 degree, which impede the promotions toward reaching the state of superhydrophobicity. The present study focuses on the realization of two-scale silicon hierarchical structures prepared with the facile, rapid and large-area capable chemical etching methods without the need of lithographic patterning. The designed structures, with the well combination of microscale inverted pyramids and nanowire arrays, dramatically lead to the increased wetting angle of 157.2 degree and contact-angle hysteresis of 9.4 degree. In addition, the robustness test reveals that these hierarchical textures possess the narrow contact-angle change of 4 degree responding to the varied pH values, and maintain a narrow deviation of 2 degree in wetting angle after experiencing the abrasion test. Moreover, the highly stable photodetection characteristics of such two-scale structures were identified, showing the reliable photocurrents with less than 3% of deviation under wide range of environmental humidity. By adopting a simple chemical treatment, the wetting control is demonstrated for reliable transition of superhydrophobicity and superhydrophilicity.
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Tang CH, Hsiao PH, Chen CY. Efficient Photocatalysts Made by Uniform Decoration of Cu 2O Nanoparticles on Si Nanowire Arrays with Low Visible Reflectivity. NANOSCALE RESEARCH LETTERS 2018; 13:312. [PMID: 30288628 PMCID: PMC6172162 DOI: 10.1186/s11671-018-2735-7] [Citation(s) in RCA: 9] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/22/2018] [Accepted: 09/26/2018] [Indexed: 06/08/2023]
Abstract
Highly uniformed decorations of Cu2O nanoparticles on the sidewalls of silicon nanowires (SiNWs) with high aspect ratio were prepared through a two-step electroless deposition at room temperature. Morphology evolutions and photocatalytic performance of SiNWs decorated with aggregated and dispersed Cu2O nanoparticles were unveiled, and the correlated photodegradation kinetics was identified. In comparison with the conventional direct loadings where the aggregated Cu2O/SiNW structures were created, the uniform incorporation of Cu2O with SiNWs exhibited more than three and nine times of improved photodegradation efficiency than the aggregated-Cu2O/SiNWs and sole SiNWs, respectively.
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Affiliation(s)
- Chien-Hsin Tang
- Department of Materials Science and Engineering, National Cheng Kung University, Tainan, 70101, Taiwan
| | - Po-Hsuan Hsiao
- Department of Materials Science and Engineering, National Cheng Kung University, Tainan, 70101, Taiwan
| | - Chia-Yun Chen
- Department of Materials Science and Engineering, National Cheng Kung University, Tainan, 70101, Taiwan.
- Hierarchical Green-Energy Materials (Hi-GEM) Research Center, National Cheng Kung University, Tainan, 70101, Taiwan.
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8
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Tang CH, Chen KY, Chen CY. Solution-processed ZnO/Si based heterostructures with enhanced photocatalytic performance. NEW J CHEM 2018. [DOI: 10.1039/c8nj03015d] [Citation(s) in RCA: 24] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Well-incorporated ZnO/SiNW arrays with reliable photocatalytic activity were prepared by an all-solution processed method.
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Affiliation(s)
- Chien-Hsin Tang
- Department of Materials Science and Engineering
- National Cheng Kung University
- Tainan 70101
- Taiwan
| | - Kai-Yu Chen
- Department of Materials Science and Engineering
- National Cheng Kung University
- Tainan 70101
- Taiwan
| | - Chia-Yun Chen
- Department of Materials Science and Engineering
- National Cheng Kung University
- Tainan 70101
- Taiwan
- Hierarchical Green-Energy Materials (Hi-GEM) Research Center
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Hybrid black silicon solar cells textured with the interplay of copper-induced galvanic displacement. Sci Rep 2017; 7:17177. [PMID: 29215058 PMCID: PMC5719426 DOI: 10.1038/s41598-017-17516-6] [Citation(s) in RCA: 29] [Impact Index Per Article: 4.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/03/2017] [Accepted: 11/27/2017] [Indexed: 11/25/2022] Open
Abstract
Metal-assisted chemical etching (MaCE) has been widely employed for the fabrication of regular silicon (Si) nanowire arrays. These features were originated from the directional etching of Si preferentially along <100> orientations through the catalytic assistance of metals, which could be gold, silver, platinum or palladium. In this study, the dramatic modulation of etching profiles toward pyramidal architectures was undertaken by utilizing copper as catalysts through a facile one-step etching process, which paved the exceptional way on the texturization of Si for advanced photovoltaic applications. Detailed examinations of morphological evolutions, etching kinetics and formation mechanism were performed, validating the distinct etching model on Si contributed from cycling reactions of copper deposition and dissolution under a quasi-stable balance. In addition, impacts of surface texturization on the photovoltaic performance of organic/inorganic hybrid solar cells were revealed through the spatial characterizations of voltage fluctuations upon light mapping analysis. It was found that the pyramidal textures made by copper-induced cycling reactions exhibited the sound antireflection characteristics, and further achieved the leading conversion efficiency of 10.7%, approximately 1.8 times and beyond 1.2 times greater than that of untexturized and nanowire-based solar cells, respectively.
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Tang CH, Li WJ, Hung CH, Hsiao PH, Chen CY. Highly Porous Silicon Nanowires Made with Solvent-Mediated Wet Chemical Etching and Their Thermoelectric Applications. ChemistrySelect 2017. [DOI: 10.1002/slct.201701981] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
Affiliation(s)
- Chien-Hsin Tang
- Department of Materials Science and Engineering; National Cheng Kung University; No.1 University Road Tainan 701, Taiwan
| | - Wen-Jin Li
- Material and Chemical Research Laboratories; Industrial Technology Research Institute; 195, Sec. 4, Chung Hsing Rd., Chutung Hsinchu 310 Taiwan
| | - Chia-Hsiang Hung
- Department of Materials Science and Engineering; National Cheng Kung University; No.1 University Road Tainan 701, Taiwan
| | - Po-Hsuan Hsiao
- Department of Materials Science and Engineering; National Cheng Kung University; No.1 University Road Tainan 701, Taiwan
| | - Chia-Yun Chen
- Department of Materials Science and Engineering; National Cheng Kung University; No.1 University Road Tainan 701, Taiwan
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