A high-throughput flow cytometry-on-a-CMOS platform for single-cell dielectric spectroscopy at microwave frequencies

Dielectric Detection of Single Nanoparticles Using a Microwave Resonator Integrated with a Nanopore

The characterization of individual nanoparticles in a liquid constitutes a critical challenge for the environmental, material, and biological sciences. To detect nanoparticles, electronic approaches are especially desirable owing to their compactness and lower costs. While electronic detection in the form of resistive-pulse sensing has enabled the acquisition of geometric properties of various analytes, impedimetric measurements to obtain dielectric signatures of nanoparticles have scarcely been reported. To explore this orthogonal sensing modality, we developed an impedimetric sensor based on a microwave resonator with a nanoscale sensing gap surrounding a nanopore built on a 220 nm silicon nitride membrane. The microwave resonator has a coplanar waveguide configuration with a resonance frequency of approximately 6.6 GHz. The approach of single nanoparticles near the sensing region and their translocation through the nanopores induced sudden changes in the impedance of the structure. The impedance changes, in turn, were picked up by the phase response of the microwave resonator. We worked with 100 and 50 nm polystyrene nanoparticles to observe single-particle events. Our current implementation was limited by the nonuniform electric field at the sensing region. This work provides a complementary sensing modality for nanoparticle characterization, where the dielectric response, rather than ionic current, determines the signal.

Permittivity-Based Microparticle Classification by the Integration of Impedance Cytometry and Microwave Resonators

Permittivity of microscopic particles can be used as a classification parameter for applications in materials and environmental sciences. However, directly measuring the permittivity of individual microparticles has proven to be challenging due to the convoluting effect of particle size on capacitive signals. To overcome this challenge, a sensing platform is built to independently obtain both the geometric and electric size of a particle, by combining impedance cytometry and microwave resonant sensing in a microfluidic chip. This way the microwave signal, which contains both permittivity and size effects, can be normalized by the size information provided by impedance cytometry to yield an intensive parameter that depends only on permittivity. The technique allows to differentiate between polystyrene and soda lime glass microparticles-below 22 µm in diameter-with more than 94% accuracy, despite their similar sizes and electrical characteristics. Furthermore, it is shown that the same technique can be used to differentiate between normal healthy cells and fixed cells of the same geometric size. The technique offers a potential route for targeted applications such as environmental monitoring of microplastic pollution or quality control in pharmaceutical industry.

Recent Approaches to Design and Analysis of Electrical Impedance Systems for Single Cells Using Machine Learning

Individual cells have many unique properties that can be quantified to develop a holistic understanding of a population. This can include understanding population characteristics, identifying subpopulations, or elucidating outlier characteristics that may be indicators of disease. Electrical impedance measurements are rapid and label-free for the monitoring of single cells and generate large datasets of many cells at single or multiple frequencies. To increase the accuracy and sensitivity of measurements and define the relationships between impedance and biological features, many electrical measurement systems have incorporated machine learning (ML) paradigms for control and analysis. Considering the difficulty capturing complex relationships using traditional modelling and statistical methods due to population heterogeneity, ML offers an exciting approach to the systemic collection and analysis of electrical properties in a data-driven way. In this work, we discuss incorporation of ML to improve the field of electrical single cell analysis by addressing the design challenges to manipulate single cells and sophisticated analysis of electrical properties that distinguish cellular changes. Looking forward, we emphasize the opportunity to build on integrated systems to address common challenges in data quality and generalizability to save time and resources at every step in electrical measurement of single cells.

The next generation of hybrid microfluidic/integrated circuit chips: recent and upcoming advances in high-speed, high-throughput, and multifunctional lab-on-IC systems

Since the field's inception, pioneers in microfluidics have made significant progress towards realizing complete lab-on-chip systems capable of sophisticated sample analysis and processing. One avenue towards this goal has been to join forces with the related field of microelectronics, using integrated circuits (ICs) to perform on-chip actuation and sensing. While early demonstrations focused on using microfluidic-IC hybrid chips to miniaturize benchtop instruments, steady advancements in the field have enabled a new generation of devices that expand past miniaturization into high-performance applications that would not be possible without IC hybrid integration. In this review, we identify recent examples of labs-on-chip that use high-resolution, high-speed, and multifunctional electronic and photonic chips to expand the capabilities of conventional sample analysis. We focus on three particularly active areas: a) high-throughput integrated flow cytometers; b) large-scale microelectrode arrays for stimulation and multimodal sensing of cells over a wide field of view; c) high-speed biosensors for studying molecules with high temporal resolution. We also discuss recent advancements in IC technology, including on-chip data processing techniques and lens-free optics based on integrated photonics, that are poised to further advance microfluidic-IC hybrid chips.

The Importance of Subcellular Structures to the Modeling of Biological Cells in the Context of Computational Bioelectromagnetics Simulations

Numerical investigation of the interaction of electromagnetic fields with eukaryotic cells requires specifically adapted computer models. Virtual microdosimetry, used to investigate exposure, requires volumetric cell models, which are numerically challenging. For this reason, a method is presented here to determine the current and volumetric loss densities occurring in single cells and their distinct compartments in a spatially accurate manner as a first step toward multicellular models within the microstructure of tissue layers. To achieve this, 3D models of the electromagnetic exposure of generic eukaryotic cells of different shape (i.e. spherical and ellipsoidal) and internal complexity (i.e. different organelles) are performed in a virtual, finite element method-based capacitor experiment in the frequency range from 10 Hz to 100 GHz. In this context, the spectral response of the current and loss distribution within the cell compartments is investigated and any effects that occur are attributed either to the dispersive material properties of these compartments or to the geometric characteristics of the cell model investigated in each case. In these investigations, the cell is represented as an anisotropic body with an internal distributed membrane system of low conductivity that mimics the endoplasmic reticulum in a simplified manner. This will be used to determine which details of the cell interior need to be modeled, how the electric field and the current density will be distributed in this region, and where the electromagnetic energy is absorbed in the microstructure regarding electromagnetic microdosimetry. Results show that for 5 G frequencies, membranes make a significant contribution to the absorption losses. © 2023 The Authors. Bioelectromagnetics published by Wiley Periodicals LLC on behalf of Bioelectromagnetics Society.

A Fully Integrated CMOS-controlled Scalable Microfluidics and Pneumatic-free Cell Actuation and Cytometry Sensing Device

Moore's law has enabled massive scaling of complex computing and sensing systems in modern-day chip-scale architectures allowing extremely high yield and system complexity at very low-cost. Exploiting such Moore's law, we explore silicon-based integrated circuits and chip-scale systems to interface with biological fluids to manipulate, sense, and detect cells in real-time for an end-to-end low cost, miniaturized, and high sensitivity point-of-care diagnostics platform. Elimi-nating the need for complex, expensive, large and bulky syringe pumps and optical-based cytometers, the proposed system allows pneumatic-free AC electro-osmosis bulk fluid driving capabilities controlled by the CMOS chip, and integrated dielectrophoretic cell actuation with 2μm focusing accuracy, impedance spectroscopy sensing, and separation capabilities. The paper presents, for the first-time, a CMOS-driven cellular sensing platform for microfluidics that can be translated to a wide range of biomedical applications.

Impedance Imaging of Cells and Tissues: Design and Applications

Due to their label-free and noninvasive nature, impedance measurements have attracted increasing interest in biological research. Advances in microfabrication and integrated-circuit technology have opened a route to using large-scale microelectrode arrays for real-time, high-spatiotemporal-resolution impedance measurements of biological samples. In this review, we discuss different methods and applications of measuring impedance for cell and tissue analysis with a focus on impedance imaging with microelectrode arrays in in vitro applications. We first introduce how electrode configurations and the frequency range of the impedance analysis determine the information that can be extracted. We then delve into relevant circuit topologies that can be used to implement impedance measurements and their characteristic features, such as resolution and data-acquisition time. Afterwards, we detail design considerations for the implementation of new impedance-imaging devices. We conclude by discussing future fields of application of impedance imaging in biomedical research, in particular applications where optical imaging is not possible, such as monitoring of ex vivo tissue slices or microelectrode-based brain implants.

Identifying the grade of bladder cancer cells using microfluidic chips based on impedance

Bladder cancer diagnosis is made by microfluidic chip based-on impedance analysis.

CMOS-Based Electrokinetic Microfluidics With Multi-Modal Cellular and Bio-Molecular Sensing for End-to-End Point-of-Care System

The importance of point-of-care (POC) bio-molecular diagnostics capable of rapid analysis has become abundantly evident after the outbreak of the Covid-19 pandemic. While sensing interfaces for both protein and nucleic-acid based assays have been demonstrated with chip-scale systems, sample preparation in compact form factor has often been a major bottleneck in enabling end-to-end POC diagnostics. Miniaturization of an end-to-end system requires addressing the front-end sample processing, without which, the goal for low-cost POC diagnostics remain elusive. In this paper, we address bulk fluid processing with AC-osmotic based electrokinetic fluid flows that can be fully controlled, processed and automated by CMOS ICs, fabricated in TSMC 65 nm LP process. Here, we combine bulk fluid flow control with bio-molecular sensing, cell manipulation, cytometry, and separation-all of which are controlled with silicon chips for an all-in-one bio-sensing device. We show CMOS controlled pneumatic-free bulk fluid flow with fluid velocities reaching up to 160 μm/s within a microfluidic channel of 100 × 50 μm ² of cross-sectional area. We incorporate electrode arrays to allow precise control and focused cell flows ( ±2 μm precision) for robust cytometry, and for subsequent separation. We also incorporate a 16-element impedance spectroscopy receiver array for cell and label-free protein sensing. The massive scalability of CMOS-driven microfluidics, manipulation, and sensing can lead to a new design space and a new class of miniaturized sensing technologies.

Advance of microfluidic constriction channel system of measuring single-cell cortical tension/specific capacitance of membrane and conductivity of cytoplasm

This paper reported a microfluidic platform which realized the characterization of inherent single-cell biomechanical and bioelectrical parameters simultaneously. Individual cells traveled through a constriction channel with deformation images and impedance variations captured and processed into cortical tension T_c , specific membrane capacitance C_sm , and cytoplasmic conductivity σ_cy based on an equivalent biophysical model. These properties of thousands of individual cells of K562, Jurkat, HL-60, HL-60 treated with paraformaldehyde (PA)/cytochalasin D (CD)/concanavalin A (ConA), granulocytes of Donor 1, Donor 2, and Donor 3 were quantified for the first time. Leveraging T_c , C_sm , and σ_cy , (1) high accuracies of classifying wild-type and processed HL-60 cells (e.g., 93.5% of PA treated vs. CD treated HL-60 cells) were realized, revealing the effectiveness of using these three biophysical parameters in cell-type classification; (2) low accuracies of classifying normal granulocytes from three donors (e.g., 56.4% of Donor 1 vs. 2), indicating comparable parameters for normal granulocytes. In conclusion, this platform can characterize single-cell T_c , C_sm , and σ_cy concurrently and quantify multiple parameters in single-cell analysis.

On the Wireless Microwave Sensing of Bacterial Membrane Potential in Microfluidic-Actuated Platforms

The investigation of the electromagnetic properties of biological particles in microfluidic platforms may enable microwave wireless monitoring and interaction with the functional activity of microorganisms. Of high relevance are the action and membrane potentials as they are some of the most important parameters of living cells. In particular, the complex mechanisms of a cell’s action potential are comparable to the dynamics of bacterial membranes, and consequently focusing on the latter provides a simplified framework for advancing the current techniques and knowledge of general bacterial dynamics. In this work, we provide a theoretical analysis and experimental results on the microwave detection of microorganisms within a microfluidic-based platform for sensing the membrane potential of bacteria. The results further advance the state of microwave bacteria sensing and microfluidic control and their implications for measuring and interacting with cells and their membrane potentials, which is of great importance for developing new biotechnologically engineered systems and solutions.

Single-cell microfluidic impedance cytometry: from raw signals to cell phenotypes using data analytics

The biophysical analysis of single-cells by microfluidic impedance cytometry is emerging as a label-free and high-throughput means to stratify the heterogeneity of cellular systems based on their electrophysiology. Emerging applications range from fundamental life-science and drug assessment research to point-of-care diagnostics and precision medicine. Recently, novel chip designs and data analytic strategies are laying the foundation for multiparametric cell characterization and subpopulation distinction, which are essential to understand biological function, follow disease progression and monitor cell behaviour in microsystems. In this tutorial review, we present a comparative survey of the approaches to elucidate cellular and subcellular features from impedance cytometry data, covering the related subjects of device design, data analytics (i.e., signal processing, dielectric modelling, population clustering), and phenotyping applications. We give special emphasis to the exciting recent developments of the technique (timeframe 2017-2020) and provide our perspective on future challenges and directions. Its synergistic application with microfluidic separation, sensor science and machine learning can form an essential toolkit for label-free quantification and isolation of subpopulations to stratify heterogeneous biosystems.

Going beyond the Debye Length: Overcoming Charge Screening Limitations in Next-Generation Bioelectronic Sensors

Electronic biosensors are a natural fit for field-deployable diagnostic devices because they can be miniaturized, mass produced, and integrated with circuitry. Unfortunately, progress in the development of such platforms has been hindered by the fact that mobile ions present in biological samples screen charges from the target molecule, greatly reducing sensor sensitivity. Under physiological conditions, the thickness of the resulting electric double layer is less than 1 nm, and it has generally been assumed that electronic detection beyond this distance is virtually impossible. However, a few recently described sensor design strategies seem to defy this conventional wisdom, exploiting the physics of electrical double layers in ways that traditional models do not capture. In the first strategy, charge screening is decreased by constraining the space in which double layers can form. The second strategy uses external stimuli to prevent double layers from reaching equilibrium, thereby effectively reducing charge screening. In this Perspective, we describe these relatively new concepts and offer theoretical insights into mechanisms that may enable electronic biosensing beyond the Debye length. If these concepts can be further developed and translated into practical electronic biosensors, we foresee exciting opportunities for the next generation of diagnostic technologies.

Positional dependence of particles and cells in microfluidic electrical impedance flow cytometry: origin, challenges and opportunities

Microfluidic electrical impedance flow cytometry is now a well-known and established method for single-cell analysis. Given the richness of the information provided by impedance measurements, this non-invasive and label-free approach can be used in a wide field of applications ranging from simple cell counting to disease diagnostics. One of its major limitations is the variation of the impedance signal with the position of the cell in the sensing area. Indeed, identical particles traveling along different trajectories do not result in the same data. The positional dependence can be considered as a challenge for the accuracy of microfluidic impedance cytometers. On the other hand, it has recently been regarded by several groups as an opportunity to estimate the position of particles in the microchannel and thus take a further step in the logic of integrating sensors in so-called "Lab-on-a-chip" devices. This review provides a comprehensive overview of the physical grounds of the positional dependence of impedance measurements. Then, both the developed strategies to reduce position influence in impedance-based assays and the recent reported technologies exploiting that dependence for the integration of position detection in microfluidic devices are reviewed.

A Scalable and Low Stress Post-CMOS Processing Technique for Implantable Microsensors

Implantable active electronic microchips are being developed as multinode in-body sensors and actuators. There is a need to develop high throughput microfabrication techniques applicable to complementary metal–oxide–semiconductor (CMOS)-based silicon electronics in order to process bare dies from a foundry to physiologically compatible implant ensembles. Post-processing of a miniature CMOS chip by usual methods is challenging as the typically sub-mm size small dies are hard to handle and not readily compatible with the standard microfabrication, e.g., photolithography. Here, we present a soft material-based, low chemical and mechanical stress, scalable microchip post-CMOS processing method that enables photolithography and electron-beam deposition on hundreds of micrometers scale dies. The technique builds on the use of a polydimethylsiloxane (PDMS) carrier substrate, in which the CMOS chips were embedded and precisely aligned, thereby enabling batch post-processing without complication from additional micromachining or chip treatments. We have demonstrated our technique with 650 μm × 650 μm and 280 μm × 280 μm chips, designed for electrophysiological neural recording and microstimulation implants by monolithic integration of patterned gold and PEDOT:PSS electrodes on the chips and assessed their electrical properties. The functionality of the post-processed chips was verified in saline, and ex vivo experiments using wireless power and data link, to demonstrate the recording and stimulation performance of the microscale electrode interfaces.

Plasmon-Enhanced Four-Wave Mixing Imaging for Microdroplet-Based Single-Cell Analysis

A high-throughput single-cell analytical technique based on the microdroplet array integrated with the plasmon-enhanced-four-wave mixing (PE-FWM) imaging was developed, which is applicable for the highly sensitive and automatic assessment of the surface receptors of cells. The metal nanoprobes were prepared by simply decorating metal nanoparticles with capturing molecules (antibody or molecules with surface identification function). Owing to the multifrequency selection of lasers via resonating their plasmonic bands, these metal nanoprobes are highly recognizable under the FWM imaging and display high photostability above fluorescent dyes. This PE-FWM imaging technique shows superior to dark-field imaging due to almost no interference from off-resonant species and exhibits the antifade feature that is suitable for long-period cell monitoring. The automated processing of images is available for the analysis of cell heterogeneity according to the cell surface receptors. Emerging applications such as single-cell analysis, bioimaging, metabolite, and drug tracing offer many biological and medical possibilities with broad application prospects.

Broadband Electrical Sensing of a Live Biological Cell with In Situ Single-Connection Calibration

Single-connection in situ calibration using biocompatible solutions is demonstrated in single-cell sensing from 0.5 to 9 GHz. The sensing is based on quickly trapping and releasing a live cell by dielectrophoresis on a coplanar transmission line with a little protrusion in one of its ground electrodes. The same transmission line is used as the calibration standard when covered by various solutions of known permittivities. The results show that the calibration technique may be precise enough to differentiate cells of different nucleus sizes, despite the measured difference being less than 0.01 dB in the deembedded scattering parameters. With better accuracy and throughput, the calibration technique may allow broadband electrical sensing of live cells in a high-throughput cytometer.

The up-to-date strategies for the isolation and manipulation of single cells

Due to the large cellular heterogeneity, the strategies for the isolation and manipulation of single cells have been pronounced indispensable in the fields of disease diagnostics, drug delivery, and cancer biology at the single-cell resolution. Herein, an overview of the up-to-date techniques for precise manipulation/separation and analysis of single-cell is accomplished, these include the various approaches for the isolation and detection of individual cells in flow cytometry, microfluidic systems, micromodule systems, and others. In addition, the advanced application of these protocols is discussed. In particular, a few designs are highlighted for visualization, non-invasion, and intelligentization in single cell analysis, i.e., imaging flow cytometry, label-free microfluidic platform, single-cell capillary probe, and other related techniques. At the present, the main barriers in the various schemes for single cell manipulation which limited their practical applications are their cumbersome construction and single-functionality. The future opportunities and outstanding challenges in the isolation/manipulation of single cells are depicted.

The review of Lab-on-PCB for biomedical application

Prevention of infectious diseases, diagnosis of diseases, and determination of treatment options all rely on biosensors to detect and analyze biomarkers, which are usually divided into four parts: cell analysis, biochemical analysis, immunoassay, and molecular diagnosis. However, traditional biosensing devices are expensive, bulky, and require a lot of time to detect, which also limited its application in resource-limited areas. In recent years, Lab-on-PCB, which combines biosensing technology and PCB technology, has been widely used in biomedical applications due to its high integration, personalized design, and easy mass production. Among these Lab-on-PCB sensing devices, the PCB circuit plays an important role. It can be directly used as a resistance sensor to count cells, and also used as a control device to automatically control the detection device. Flexible PCBs can be used to make wearable medical biosensors. In addition, due to the high degree of integration of the PCB circuit, Lab-on-PCB can perform multiple inspections on the same platform, which reduces the inspection time equivalently. Therefore, in this review paper, we discuss the application of Lab-on-PCB in four analysis methods of cell analysis, biochemical analysis, immunoassay, and molecular diagnosis, and give some suggestions for improvement and future development trends at the end.

A Microfluidic Device Integrating Impedance Flow Cytometry and Electric Impedance Spectroscopy for High-Efficiency Single-Cell Electrical Property Measurement

Single-cell impedance measurement is a label-free, noninvasive method for characterizing the electrical properties of single cells. At present, though widely used for impedance measurement, electric impedance flow cytometry (IFC) and electric impedance spectroscopy (EIS) are used alone for most microfluidic chips. In this paper, we present a microfluidic device combining the IFC and EIS techniques for single-cell electrical property measurement. The device uses hydrodynamic constriction to passively trap single cells and uses coplanar electrodes to obtain the impedance spectrum of the trapped cell via EIS and discrete impedance data points of the passing cells via IFC. Through experiment, we verified the individual functionality of IFC and EIS respectively, by revealing through IFC the impedance magnitude difference and quantifying through EIS the area-specific membrane capacitance and cytoplasm conductivity of the three types of cancer cells. We also demonstrated the complementarity of IFC and EIS, which holds for a wide range of the flow rate. We envision that the strategy of combining IFC and EIS provides a new thought in the efforts to enhancing the efficiency of electrical property measurement for single cells.

Electrical Impedance Characterization of Erythrocyte Response to Cyclic Hypoxia in Sickle Cell Disease

Cell sickling is the process in which intracellular polymerization of deoxygenated sickle hemoglobin (HbS) leads to distorted, rigid cells, resulting in abnormal blood rheology and painful vaso-occlusion. Current methods for detection of this process mainly rely on optical microscopy of cellular morphology and measurements of cell deformability and blood rheology. As electrical impedance of cells is a sensitive indicator of changes in cellular structure and biophysical characteristics, it can be a promising marker for characterization of abnormal blood rheology and a means more convenient than optics to be integrated into point-of-care devices. In this work, a microfluidics-based electrical impedance sensor has been developed for characterizing the dynamic cell sickling-unsickling processes in sickle blood. The sensor is capable of measuring the continuous variation in the sickle cell suspension due to cyclic hypoxia-induced intracellular HbS polymerization and depolymerization. Simultaneous microscopic imaging of cell morphological change shows the reliability and repeatability of the electrical impedance-based measurements of cell sickling and unsickling processes. Strong correlation is found between the electrical impedance measurement and patients' hematological parameters such as levels of HbS and fetal hemoglobin. The combination of electrical impedance measurement and on-chip hypoxia control provides a promising method for rapid assessment of the dynamic processes of cell sickling and unsickling in patients with sickle cell disease.

Gradient in the electric field for particle position detection in microfluidic channels

In this work, a new method to track particles in microfluidic channels is presented. Particle position tracking in microfluidic systems is crucial to characterize sorting systems or to improve the analysis of cells in impedance flow cytometry studies. By developing an electric field gradient in a two parallel electrode array the position of the particles can be tracked in one axis by impedance analysis. This method can track the particle's position at lower frequencies and measure the conductivity of the system at higher frequencies. A 3-D simulation was performed showing particle position detection and conductivity analysis. To experimentally validate the technique, a microfluidic chip that develops a gradient in the electric field was fabricated and used to detect the position of polystyrene particles in one axis and measure their conductivity at low and high frequencies, respectively.

Label-free detection of conformational changes in switchable DNA nanostructures with microwave microfluidics

Detection of conformational changes in biomolecular assemblies provides critical information into biological and self-assembly processes. State-of-the-art in situ biomolecular conformation detection techniques rely on fluorescent labels or protein-specific binding agents to signal conformational changes. Here, we present an on-chip, label-free technique to detect conformational changes in a DNA nanomechanical tweezer structure with microwave microfluidics. We measure the electromagnetic properties of suspended DNA tweezer solutions from 50 kHz to 110 GHz and directly detect two distinct conformations of the structures. We develop a physical model to describe the electrical properties of the tweezers, and correlate model parameters to conformational changes. The strongest indicator for conformational changes in DNA tweezers are the ionic conductivity, while shifts in the magnitude of the cooperative water relaxation indicate the addition of fuel strands used to open the tweezer. Microwave microfluidic detection of conformational changes is a generalizable, non-destructive technique, making it attractive for high-throughput measurements.

Methods to study conformational changes in biomolecules are limited in resolution and require labelling or other modifications of target analytes. Here the authors present a label-free, microwave microfluidic approach to detect conformational changes of DNA nanostructures based on ionic conductivity.

LTCC Packaged Ring Oscillator Based Sensor for Evaluation of Cell Proliferation

A complementary metal-oxide-semiconductor (CMOS) chip biosensor was developed for cell viability monitoring based on an array of capacitance sensors utilizing a ring oscillator. The chip was packaged in a low temperature co-fired ceramic (LTCC) module with a flip chip bonding technique. A microcontroller operates the chip, while the whole measurement system was controlled by PC. The developed biosensor was applied for measurement of the proliferation stage of adherent cells where the sensor response depends on the ratio between healthy, viable and multiplying cells, which adhere onto the chip surface, and necrotic or apoptotic cells, which detach from the chip surface. This change in cellular adhesion caused a change in the effective permittivity in the vicinity of the sensor element, which was sensed as a change in oscillation frequency of the ring oscillator. The sensor was tested with human lung epithelial cells (BEAS-2B) during cell addition, proliferation and migration, and finally detachment induced by trypsin protease treatment. The difference in sensor response with and without cells was measured as a frequency shift in the scale of 1.1 MHz from the base frequency of 57.2 MHz. Moreover, the number of cells in the sensor vicinity was directly proportional to the frequency shift.