Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens

Design of a binary programmable transmitarray based on phase change material for beam steering applications in D-band

This paper introduces the design of a reconfigurable transmitarray operating within the D-band frequency range (110-170 GHz). The transmitarray unit cell is composed of three metal layers and two quartz dielectric substrates. It achieves a 1-bit phase shift resolution through the alternating states of two innovative switches integrated into the active transmitting patch of the unit cell. To address the challenge of miniaturization in the D-band, compact switches compatible with the proposed unit cell dimensions are introduced. These switches are constructed using phase change materials (PCM) that change between amorphous and crystalline states when exposed to heat. The paper includes a full-wave simulation of the unit cell, demonstrating an insertion loss below 1.5 dB across a wide frequency band of 27%. Additionally, a 10 [Formula: see text] 10 elements transmitarray is synthesized using a numerical tool and its theoretical results are compared to full-wave electromagnetic simulations for validation purposes. The results indicate that by incorporating the proposed switches into the unit cell, the transmitarray achieves promising reconfiguration capabilities within the D-band. Moreover, the paper presents the architecture of a command line designed to bias the PCM switches. Notably, this command line represents a novel approach, as it enables individual biasing of each PCM switch using direct current (DC). The influence of these command lines on the transmitarray's performance is thoroughly investigated. Although there is a compromise in the 1-dB gain bandwidth, the overall behavior of the transmitarray remains encouraging.

Varifocal MEMS mirrors for high-speed axial focus scanning: a review

Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operation above several hundred kHz, and can be designed to combine focusing with lateral steering in a single-chip device. This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors, providing the most comprehensive study in this field to date. We introduce a novel figure of merit for varifocal mirrors on the basis of which we evaluate and compare nearly all reported devices from the literature. At the forefront of this review is the analysis of the advantages and shortcomings of various actuation technologies, as well as a systematic study of methods reported to enhance the focusing performance in terms of speed, resolution, and shape fidelity. We believe this analysis will fuel the future technological development of next-generation varifocal mirrors reaching the axial resolution of 1000 resolvable planes.

Broadband Mechanically Tunable Metasurface Reflectivity Modulator in the Visible Spectrum

Reflectivity modulation is a critical feature for applications in telecommunications, 3D imaging and printing, advanced laser machining, or portable displays. Tunable metasurfaces have recently emerged as a promising implementation for miniaturized and high-performance tunable optical components. Commonly, metasurface response tuning is achieved by electro-optical effects. In this work, we demonstrate reflectivity modulation based on a nanostructured, mechanically tunable, metasurface, consisting of an amorphous silicon nanopillar array and a suspended amorphous silicon membrane with integrated electrostatic actuators. With a membrane displacement of only 150 nm, we demonstrate reflectivity modulation by Mie resonance enhanced absorption in the pillar array, leading to a reflectivity contrast ratio of 1:3 over the spectral range from 400-530 nm. With fast, low-power electrostatic actuation and a broadband response in the visible spectrum, this mechanically tunable metasurface reflectivity modulator could enable high frame rate dynamic reflective displays.

Recent Advances in Tunable Metasurfaces and Their Application in Optics

Metasurfaces can be opportunely and specifically designed to manipulate electromagnetic wavefronts. In recent years, a large variety of metasurface-based optical devices such as planar lenses, beam deflectors, polarization converters, and so on have been designed and fabricated. Of particular interest are tunable metasurfaces, which allow the modulation of the optical response of a metasurface; for instance, the variation in the focal length of a converging metalens. Response tunability can be achieved through external sources that modify the permittivity of the materials constituting the nanoatoms, the substrate, or both. The modulation sources can be classified into electromagnetic fields, thermal sources, mechanical stressors, and electrical bias. Beside this, we will consider optical modulation and multiple approach tuning strategies. A great variety of tunable materials have been used in metasurface engineering, such as transparent conductive oxides, ferroelectrics, phase change materials, liquid crystals, and semiconductors. The possibility of tuning the optical properties of these metamaterials is very important for several applications spanning from basic optics to applied optics for communications, depth sensing, holographic displays, and biochemical sensors. In this review, we summarize the recent progress on electro-optical magnetic, mechanical, and thermal tuning of metasurfaces actually fabricated and experimentally tested in recent years. At the end of the review, a short section on possible future perspectives and applications is included.

Photonic time crystals: a materials perspective [Invited]

Recent advances in ultrafast, large-modulation photonic materials have opened the door to many new areas of research. One specific example is the exciting prospect of photonic time crystals. In this perspective, we outline the most recent material advances that are promising candidates for photonic time crystals. We discuss their merit in terms of modulation speed and depth. We also investigate the challenges yet to be faced and provide our estimation on possible roads to success.

Active optical metasurfaces: comprehensive review on physics, mechanisms, and prospective applications

Optical metasurfaces with subwavelength thickness hold considerable promise for future advances in fundamental optics and novel optical applications due to their unprecedented ability to control the phase, amplitude, and polarization of transmitted, reflected, and diffracted light. Introducing active functionalities to optical metasurfaces is an essential step to the development of next-generation flat optical components and devices. During the last few years, many attempts have been made to develop tunable optical metasurfaces with dynamic control of optical properties (e.g., amplitude, phase, polarization, spatial/spectral/temporal responses) and early-stage device functions (e.g., beam steering, tunable focusing, tunable color filters/absorber, dynamic hologram, etc) based on a variety of novel active materials and tunable mechanisms. These recently-developed active metasurfaces show significant promise for practical applications, but significant challenges still remain. In this review, a comprehensive overview of recently-reported tunable metasurfaces is provided which focuses on the ten major tunable metasurface mechanisms. For each type of mechanism, the performance metrics on the reported tunable metasurface are outlined, and the capabilities/limitations of each mechanism and its potential for various photonic applications are compared and summarized. This review concludes with discussion of several prospective applications, emerging technologies, and research directions based on the use of tunable optical metasurfaces. We anticipate significant new advances when the tunable mechanisms are further developed in the coming years.

MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages

Tunable focusing is a desired property in a wide range of optical imaging and sensing technologies but has tended to require bulky components that cannot be integrated on-chip and have slow actuation speeds. Recently, integration of metasurfaces into electrostatic micro-electromechanical system (MEMS) architectures has shown potential to overcome these challenges but has offered limited out-of-plane displacement range while requiring large voltages. We demonstrate for the first time, to the best of our knowledge, a movable metasurface lens actuated by integrated thin-film PZT MEMS, which has the advantage of offering large displacements at low voltages. An out-of-plane displacement of a metasurface in the range of 7.2 μm is demonstrated under a voltage application of 23 V. This is roughly twice the displacement at a quarter of the voltage of state of the art electrostatic out-of-plane actuation of metasurfaces. Using this tunability, we demonstrate a varifocal lens doublet with a focal shift of the order of 250 μm at the wavelength 1.55 μm. The thin-film PZT MEMS-metasurface is a promising platform for miniaturized varifocal components.

Electrically-Driven Zoom Metalens Based on Dynamically Controlling the Phase of Barium Titanate (BTO) Column Antennas

The zoom metalens has been a research hotspot for metasurfaces in recent years. There are currently a variety of zoom methods, including dual metalenses, micro-electromechanical system metalenses, polydimethylsiloxane metalenses and Alvarez metalenses. However, for most metalenses, zooming is achieved by manipulating the relative displacement of two or more metasurfaces. Therefore, these methods seem inadequate when faced with more precise zooming requirements, and the precise control of the phase distribution cannot be achieved. In this paper, we innovatively propose an electrically-driven zoom metalens (EZM) of one-dimensional based on dynamically controlling barium titanate (BaTiO₃, BTO) antennas. Using the electro-optic effect of BTO crystals, we can apply a voltage to change the refractive index of BTO nanopillars (n = 2.4-3.6), thereby accurately controlling the phase distribution of column antennas. The proposed EZM can achieve 5× zoom (f = 10-50 μm), with advantages, such as high-speed optical amplitude modulation, ultra-compactness, flexibility and replicability. It can be applied in fields that require ultra-compact beam focusing, zoom imaging, and microscopic measuring.

Editorial for the Special Issue on IMCO 2019

This special issue is a collection of 12 technical papers and two reviews that are expanded into full-length articles from the conference abstracts of the 9th International Multidisciplinary Conference on Optofluidics (IMCO 2019) held in Hong Kong in 14-17 June 2019 [...].