A Peristaltic Pump Integrated on a 100% Glass Microchip Using Computer Controlled Piezoelectric Actuators

10 μm thick ultrathin glass sheet to realize a highly sensitive cantilever for precise cell stiffness measurement

The micro-cantilever-based sensor platform has become a promising technique in the sensing area for physical, chemical and biological detection due to its portability, small size, label-free characteristics and good compatibility with "lab-on-a-chip" devices. However, traditional micro-cantilever methods are limited by their complicated fabrication, manipulation and detection, and low sensitivity. In this research, we proposed a 10 μm thick ultrathin, highly sensitive, and flexible glass cantilever integrated with a strain gauge sensor and presented its application for the measurement of single-cell mechanical properties. Compared to conventional methods, the proposed ultrathin glass sheet (UTGS)-based cantilever is easier to fabricate, has better physical and chemical properties, and shows a high linear relationship between resistance change and applied small force or displacement. The sensitivity of the cantilever is 15 μN μm-1 and the minimum detectable displacement at the current development stage is 500 nm, which is sufficient for cell stiffness measurement. The cantilever also possesses excellent optical transparency that supports real-time observation during measurement. We first calibrated the cantilever by measuring the Young's modulus of PDMS with known specific stiffness, and then we demonstrated the measurement of Xenopus oocytes and fertilized eggs in different statuses. By further optimizing the UTGS-based cantilever, we can extend its applicability to various measurements of different cells.

Nanoreactors in action for a durable microactuator using spontaneous combustion of gases in nanobubbles

A number of recent studies report enhancement of chemical reactions on water microdroplets or inside nanobubbles in water. This finding promises exciting applications, although the mechanism of the reaction acceleration is still not clear. Specifically, the spontaneous combustion of hydrogen and oxygen in nanobubbles opens the way to fabricate truly microscopic engines. An example is an electrochemical membrane actuator with all three dimensions in the micrometer range. The actuator is driven by short voltage pulses of alternating polarity, which generate only nanobubbles. The device operation is, however, restricted by a fast degradation of the electrodes related to a high current density. Here it is demonstrated that the actuator with ruthenium electrodes does not show signs of degradation in the long-term operation. It is the only material able to withstand the extreme conditions of the alternating polarity electrolysis. This property is due to combination of a high mechanical hardness and metallic conductivity of ruthenium oxide. The actuator combines two features considered impossible: on-water catalysis and combustion in a microscopic volume. It provides an exceptional opportunity to drive autonomous microdevices especially for medical or biological applications.

A High-Performance Piezoelectric Micropump with Multi-Chamber in Series

Based on the multi-chamber series structure, a piezoelectric micropump with high output performance is proposed in this paper. The proposed micropump is composed of the circular unimorph piezoelectric vibrator, the cantilever check valve, and the pump body. First, the working process of the piezoelectric micropump was analyzed in detail. Then, the effect of the key dimension parameters on the output performance of the micropump was explored. The key dimension parameters mainly refer to the height of the pump chamber and valve opening (the deformation size of the valve). Finally, experimental prototypes with different parameters were fabricated for the evaluation of the output performance of the micropump. The experimental results show that when the pump chamber height is 0.1 mm and the valve opening is 0.4 mm, the piezoelectric micropump has a good comprehensive output performance. In particular, at 170 V and 120 Hz, the maximum flow rate of the dual-chamber series pump is 65.5 mL/min, and at 100 Hz, the maximum output pressure reaches 59.1 kPa. Moreover, at a certain voltage of 170 V, when the drive frequency is 450 Hz and 550 Hz, the output flow rate and pressure of the four-chamber series pump reach a maximum of 110 mL/min and exceed 140 kPa, respectively. In addition, the volumes of the proposed single-chamber, dual-chamber series, and four-chamber series micropumps are 22 mm × 22 mm × 5 mm, 32.6 mm × 22 mm × 5 mm, and 53.8 mm × 22 mm × 5 mm, respectively. The proposed piezoelectric micropump has the advantages of simple structure, low cost, miniaturization, and high output performance, thus gaining potential practicality for biomedical applications, cooling systems, fuel supply, chemical applications, etc.

Entropy Generation Analysis of Peristaltic Flow of Nanomaterial in a Rotating Medium through Generalized Complaint Walls of Micro-Channel with Radiation and Heat Flux Effects

This study discusses entropy generation analysis for a peristaltic flow in a rotating medium with generalized complaint walls. The goal of the current analysis is to understand the fluid flow phenomena particular to micro devices. Nano materials with a size less than 100 nm have applications in micro heat exchangers to cool electronic circuits, blood analyzers, biological cell separations, etc. For this study, we considered the effects of radiation, viscous dissipation and heat flux on the flow of nanomaterial inside a cylindrical micro-channel. To investigate the slip effects on the flow, the second order slip condition for axial velocity, the first order slip condition for secondary velocity and the thermal slip conditions were used. The flow was governed by partial differential equations (PDE's), which were turned into a system of coupled ordinary differential equations (ODE's) that were highly non-linear and numerically solved using the NDSolve command in Mathematica. The impacts of different involved parameters on the flow field were investigated with the aid of graphical illustrations. Entropy generation and the Bejan number were given special attention, and it was found that they decreased as the Hartman number, rotation, and radiation parameters increased.

Fast Electrochemical Actuator with Ti Electrodes in the Current Stabilization Regime

The actuators needed for autonomous microfluidic devices have to be compact, low-power-consuming, and compatible with microtechnology. The electrochemical actuators could be good candidates, but they suffer from a long response time due to slow gas termination. An actuator in which the gas is terminated orders of magnitude faster has been demonstrated recently. It uses water electrolysis performed by short voltage pulses of alternating polarity (AP). However, oxidation of Ti electrodes leads to a rapid decrease in the performance. In this paper, we demonstrate a special driving regime of the actuator, which is able to support a constant stroke for at least 105 cycles. The result is achieved using a new driving regime when a series of AP pulses are interspersed with a series of single-polarity (SP) pulses. The new regime is realized by a special pulse generator that automatically adjusts the amplitude of the SP pulses to keep the current flowing through the electrodes at a fixed level. The SP pulses increase the power consumption by 15–60% compared to the normal AP operation and make the membrane oscillate in a slightly lifted position.

A review of peristaltic micropumps

This report presents a review of progress on peristaltic micropumps since their emergence, which have been widely used in many research fields from biology to aeronautics. This paper summarizes different techniques that have been used to mimic this elegant physiological transport mechanism that is commonly found in nature. The analysis provides definitions of peristaltic micropumps and their different features, distinguishing them from other mechanical micropumps. Important parameters in peristalsis are presented, such as the operating frequency, stroke volume, and various actuation sequences, along with introducing design rules and analysis for optimizing actuation sequences. Actuation methods such as piezoelectric, motor, pneumatic, electrostatic, and thermal are discussed with their advantages and disadvantages for application in peristaltic micropumps. This review evaluates research efforts over the past 30 years with comparison of key features and outputs, and suggestions for future development. The analysis provides a starting point for researchers designing peristaltic micropumps for a broad range of applications.

Advances in Valveless Piezoelectric Pumps

Piezoelectric pump design is regarded as a hot research topic in the microfluidic field, and has been applied in liquid cooling, precision machinery and other relevant domains. The valveless piezoelectric pump becomes an important branch of the piezoelectric pump, because it successfully avoids the problem of “pump-lagging of valve” during the valve piezoelectric pump processing. This paper summarizes the development of valveless piezoelectric pumps, and introduces some different configurations of valveless piezoelectric pumps. The structure and material of all kinds of valveless piezoelectric pumps are elaborated in detail, and also the output performance of the pump is evaluated and analyzed with the variations in flow rate and output pressure as reference. By comparing the flow of different types of valveless piezoelectric pumps, the application of valveless piezoelectric pumps is also illustrated. The development tendency of the valveless piezoelectric pump is prospected from the perspective of structure design and machining methods, which is expected to provide novel ideas and guidance for future research.

Tough, permeable and biocompatible microfluidic devices formed through the buckling delamination of soft hydrogel films

Microchannels in soft materials play an important role in developing movable, deformable, and biocompatible fluidic systems for applications in various fields. Intensively investigated approaches to create microscale channel architectures use mechanical instability in soft materials, which can provide intricate yet ordered architectures with low cost and high throughput. Here, for microchannel fabrication, we demonstrate the use of swelling-driven buckle delamination of hydrogels, which is a mechanical instability pattern found in compressed film/substrate layer composites. By spatially controlling interfacial bonding between a thin polyacrylamide (PAAm) gel film and glass substrate, swelling-driven compressive stress induces buckle delamination at programmed positions, resulting in the formation of continuous hollow paths as microchannels. Connecting flow tubes with a 3D-printed connecter provides a deformable microfluidic device, enabling pressure-driven flows without leakage from the connecter and rupture of the channels. Furthermore, by stacking less-swellable bulk gels on the device, we obtained a tough, permeable, and biocompatible microfluidic device. Finally, we performed a cell culture on the device and chemical stimulation to cells through the diffusion of molecules from the microchannels. The results of this work shed light on designing pressure sensitive/resistant microfluidic systems based on diverse hydrogels with intricate 3D morphologies and will be useful for applications in the fields of bioanalysis, biomimetics, tissue engineering, and cell biology.

A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing

Microfluidic devices providing an accurate delivery of fluids at required rates are of considerable interest, especially for the biomedical field. The progress is limited by the lack of micropumps, which are compact, have high performance, and are compatible with standard microfabrication. This paper describes a micropump based on a new driving principle. The pump contains three membrane actuators operating peristaltically. The actuators are driven by nanobubbles of hydrogen and oxygen, which are generated in the chamber by a series of short voltage pulses of alternating polarity applied to the electrodes. This process guaranties the response time of the actuators to be much shorter than that of any other electrochemical device. The main part of the pump has a size of about 3 mm, which is an order of magnitude smaller in comparison with conventional micropumps. The pump is fabricated in glass and silicon wafers using standard cleanroom processes. The channels are formed in SU-8 photoresist and the membrane is made of SiNx. The channels are sealed by two processes of bonding between SU-8 and SiNx. Functionality of the channels and membranes is demonstrated. A defect of electrodes related to the lift-off fabrication procedure did not allow a demonstration of the pumping process although a flow rate of 1.5 µL/min and dosage accuracy of 0.25 nL are expected. The working characteristics of the pump make it attractive for the use in portable drug delivery systems, but the fabrication technology must be improved.

Pneumatically Actuated Thin Glass Microlens for On-Chip Multi-Magnification Observations

This paper presents a self-contained micro-optical system that is magnification-controlled by adjusting the positions of the microlens in the device via pneumatic air pressure. Unlike conventional dynamic microlenses made from a liquid or polydimethylsiloxane (PDMS) that change their shapes via external actuation, this system combines a fixed-curvature glass microlens, an inflatable PDMS layer, and the external pneumatic air pressure supply as an actuator. This device showed several advantages, including stable inflation, firm structure, and light weight; it achieved a larger displacement using the glass microlens structure than has been reported before. This fixed-curvature microlens was made from 120 µm-thick flat thin glass slides, and the system magnification was manipulated by the deflection of a 100 µm-thick PDMS layer to alter the distance from the microlens to the microfluidic channel. The system magnification power was proportional to the air pressure applied to the device, and with a 2.5 mbar air pressure supply, a 2.2X magnification was achieved. This optical system is ideal for combining with high resolving power microscopy for various short working distance observation tasks, and it is especially beneficial for various chip-based analyses.

A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

This research explores a new ATE (Automatic Testing Equipment) method for Micro Electro Mechanical Systems (MEMS) devices. In this method, microscale aerodynamic drag force is generated on a movable part of a MEMS sensor from a micronozzle hole located a specific distance above the chip that will result in a measurable change in output. This approach has the potential to be generalized for the characterization of every MEMS device in mass production lines to test the functionality of devices rapidly and characterize important mechanical properties. The most important testing properties include the simultaneous application of controllable and non-invasive manipulative force, a single handler for multi-sensor, and non-contact characterization, which are relatively difficult to find with other contemporary approaches. Here we propose a custom-made sensing platform consisting of a microcantilever array interconnected to a data acquisition device to read the capacitive effects of each cantilever’s deflection caused by air drag force. This platform allows us to empirically prove the functionality and applicability of the proposed characterization method using airflow force stimuli. The results, stimulatingly, exhibited that air force from a hole of 5 µm radii located 25 µm above a 200 × 200 µm2 surface could be focused on a circular spot with radii of approximately 5 µm with surface sweep accuracy of <8 µm. This micro-size airflow jet can be specifically designed to apply airflow force on the MEMS movable component surface. Furthermore, it was shown that the generated air force range could be controlled from 20 nN to 60 nN, approximately, with a linear dependency on airflow ranging from 5 m/s to 20 m/s, which is from a 5 µm radius microhole air jet placed 400 µm above the chip. In this case-study chip, for a microcantilever with a length of 400 µm, the capacitance curve increased linearly from 28.2 pF to 30.5 pF with airflow variation from 5 m/s to 21 m/s from a hole. The resultant curve is representative of a standard curve for testing of the further similar die. Based on these results, this paper paves the way towards the development of a new non-contact, non-invasive, easy-to-operate, reliable, and relatively cheap air-based method for characterizing and testing MEMS sensors.

Research on Asymmetric Hysteresis Modeling and Compensation of Piezoelectric Actuators with PMPI Model

Because of fast frequency response, high stiffness, and displacement resolution, the piezoelectric actuators (PEAs) are widely used in micro/nano driving field. However, the hysteresis nonlinearity behavior of the PEAs affects seriously the further improvement of manufacturing accuracy. In this paper, we focus on the modeling of asymmetric hysteresis behavior and compensation of PEAs. First, a polynomial-modified Prandtl–Ishlinskii (PMPI) model is proposed for the asymmetric hysteresis behavior. Compared with classical Prandtl–Ishlinskii (PI) model, the PMPI model can be used to describe both symmetric and asymmetric hysteresis. Then, the congruency property of PMPI model is analyzed and verified. Next, based on the PMPI model, the inverse model (I-M) compensator is designed for hysteresis compensation. The stability of the I-M compensator is analyzed. Finally, the simulation and experiment are carried out to verify the accuracy of the PMPI model and the I-M compensator. The results implied that the PMPI model can effectively describe the asymmetric hysteresis, and the I-M compensator can well suppress the hysteresis characteristics of PEAs.

Facile Functionalization of Poly(Dimethylsiloxane) Elastomer by Varying Content of Hydridosilyl Groups in a Crosslinker

Crosslinked poly(dimethylsiloxane) (PDMS) has been widely used as a dielectric elastomer for electrically driven actuators because it exhibits high elasticity, low initial modulus, and excellent moldability in spite of low dielectric constant. However, further improvement in the characteristics of the PDMS elastomer is not easy due to its chemical non-reactivity. Here, we report a simple method for functionalizing the elastomer by varying content of hydridosilyl groups in PDMS acted as a crosslinker. We synthesized poly(dimethylsiloxane-co-methylvinylsiloxane) (VPDMS) and poly(dimethylsiloxane-co-methylsiloxane) (HPDMS). Tri(ethylene glycol) divinyl ether (TEGDE) as a polar molecule was added to the mixture of VPDMS and HPDMS. TEGDE was reacted to the hydridosilyl group in HPDMS during crosslinking between VPDMS and HPDMS in the presence of platinum as a catalyst. Permittivity of the crosslinked film increased from ca. 25 to 36 pF/m at 10 kHz without a decline in other physical properties such as transparency and elasticity (T > 85%, E ~150 kPa, ɛ ~270%). It depends on the hydridosilyl group content of HPDMS. The chemical introduction of a new molecule into the hydridosilyl group in HPDMS during crosslinking would provide a facile, effective method of modifying the PDMS elastomers.

A Novel PZT Pump with Built-in Compliant Structures

Different to the traditionally defined valved piezoelectric (PZT) pump and valveless PZT pump, two groups of PZT pumps with built-in compliant structures-with distances between the free ends of 0.2 mm (Group A) and 0 mm (Group B)-were designed, fabricated, and experimentally tested. This type of pump mainly contains a chamber 12 mm in diameter and 1.1 mm in height, a PZT vibrator, and two pairs of compliant structures arranged on the flowing channel. The flow-resistance differences between these two groups of PZT pumps were theoretically and experimentally verified. The relationships between the amplitude, applied voltage and frequency of the PZT vibrators were obtained experimentally, with results illustrating that the amplitude linearly and positively correlates with the voltage, while nonlinearly and negatively correlating to the frequency. The flow rate performance of these two groups was experimentally tested from 110⁻160 Vpp and 10⁻130 Hz. Results showed that the flow rate positively correlates to the voltage, and the optimum flow rate frequency centers around 90 Hz for Group A and 80 Hz for Group B, respectively. The flow rate performances of Group B were further measured from 60⁻100 Hz and 170⁻210 Vpp, and obtained optimal flow rates of 3.6 mL/min at 210 Vpp and 80 Hz when ignoring the siphon-caused backward flow rate. As the compliant structures are not prominently limited by the channel's size, and the pump can be minimized by Micro-electromechanical Systems (MEMS) processing methods, it is a suitable candidate for microfluidic applications like closed-loop cooling systems and drug delivery systems.

A nanoliter resolution implantable micropump for murine inner ear drug delivery

Advances in protective and restorative biotherapies have created new opportunities to use site-directed, programmable drug delivery systems to treat auditory and vestibular disorders. Successful therapy development that leverages the transgenic, knock-in, and knock-out variants of mouse models of human disease requires advanced microsystems specifically designed to function with nanoliter precision and with system volumes suitable for implantation. Here we present results for a novel biocompatible, implantable, scalable, and wirelessly controlled peristaltic micropump. The micropump configuration included commercially available catheter microtubing (250 μm OD, 125 μm ID) that provided a biocompatible leak-free flow path while avoiding complicated microfluidic interconnects. Peristaltic pumping was achieved by sequentially compressing the microtubing via expansion and contraction of a thermal phase-change material located in three chambers integrated adjacent to the microtubing. Direct-write micro-scale printing technology was used to build the mechanical components of the micropump around the microtubing directly on the back of a printed circuit board assembly (PCBA). The custom PCBA was fabricated using standard commercial processes providing microprocessor control of actuation and Bluetooth wireless communication through an Android application. The results of in vitro characterization indicated that nanoliter resolution control over the desired flow rates of 10-100 nL/min was obtained by changing the actuation frequency. Applying 10× greater than physiological backpressures and ± 3 °C ambient temperature variation did not significantly affect flow rates. Three different micropumps were tested on six mice for in vivo implantation of the catheter microtubing into the round window membrane niche for infusion of a known ototoxic compound (sodium salicylate) at 50 nL/min for 20 min. Real-time shifts in distortion product otoacoustic emission thresholds and amplitudes were measured during the infusion. There were systematic increases in distortion product threshold shifts during the 20-min perfusions; the mean shift was 15 dB for the most basal region. A biocompatibility study was performed to evaluate material suitability for chronic subcutaneous implantation and clinical translational development. The results indicated that the micropump components successfully passed key biocompatibility tests. A micropump prototype was implanted for one month without development of inflammation or infection. Although tested here on the small murine cochlea, this low-cost design and fabrication methodology is scalable for use in larger animals and for clinical applications in children and adults by appropriate scaling of the microtubing diameter and actuator volume.

Embryonic body culturing in an all-glass microfluidic device with laser-processed 4 μm thick ultra-thin glass sheet filter

In this paper, we report the development and demonstration of a method to fabricate an all-glass microfluidic cell culturing device without circulation flow. On-chip microfluidic cell culturing is an indispensable technique for cellular replacement therapies and experimental cell biology. Polydimethylsiloxane (PDMS) have become a popular material for fabricating microfluidic cell culture devices because it is a transparent, biocompatible, deformable, easy-to-mold, and gas-permeable. However, PDMS is also a chemically and physically unstable material. For example, PDMS undergoes aging easily even in room temperature conditions. Therefore, it is difficult to control long term experimental culturing conditions. On the other hand, glass is expected to be stable not only in physically but also chemically even in the presence of organic solvents. However, cell culturing still requires substance exchanges such as gases and nutrients, and so on, which cannot be done in a closed space of a glass device without circulation flow that may influence cell behavior. Thus, we introduce a filter structure with micropores onto a glass device to improve permeability to the cell culture space. Normally, it is extremely difficult to fabricate a filter structure on a normal glass plate by using a conventional fabrication method. Here, we demonstrated a method for fabricating an all-glass microfluidic cell culturing device having filters structure. The function of this all-glass culturing device was confirmed by culturing HeLa, fibroblast and ES cells. Compared with the closed glass devices without a filter structure, the numbers of cells in our device increased and embryonic bodies (EBs) were formed. This method offers a new tool in microfluidic cell culture technology for biological analysis and it expands the field of microfluidic cell culture.

A method of packaging molecule/cell-patterns in an open space into a glass microfluidic channel by combining pressure-based low/room temperature bonding and fluorosilane patterning

A fabrication method of a “post-molecule/cell patterned” glass microchip was developed by pressure-based bonding and patterning with a fluorosilane coupling reagent.

An all-glass 12 μm ultra-thin and flexible micro-fluidic chip fabricated by femtosecond laser processing

This study investigated and established a method, using femtosecond laser processing, to fabricate a 100%-glass-based 12 μm ultra-thin and flexible micro-fluidic chip. First we investigated the suitable pulse energy of the laser to fabricate ultra-thin glass sheets and then we fabricated a prototype glass micro-fluidic chip. Two 1 mm-in-diameter orifices for facilitating alignment in the bonding step and one channel with a width of 20 μm and a length of 25 mm were fabricated in a 4 μm thickness ultra-thin glass sheet using the femtosecond laser; this forms layer 2 in the completed device. Next, the glass sheet with the channel was sandwiched between another glass sheet having an inlet hole and an outlet hole (layer 1) and a base glass sheet (layer 3); the three sheets were bonded to each other, resulting in a flexible, 100%-glass micro-fluidic chip with a thickness of approximately 12 μm and a weight of 3.6 mg. The basic function of the glass micro-fluidic chip was confirmed by flowing 1 and 2 μm in-diameter bead particles through the channel. The fabrication method clearly scales down the thickness limitation of flexible glass devices and offers a possible element technology for fabricating ultra-thin glass devices that can be applied to convection-enhanced delivery, implantable medical devices, wearable devices, and high-resolution imaging of small biological objects such as bacteria and proteins in the channel.

Large-Scale Integration of All-Glass Valves on a Microfluidic Device

In this study, we developed a method for fabricating a microfluidic device with integrated large-scale all-glass valves and constructed an actuator system to control each of the valves on the device. Such a microfluidic device has advantages that allow its use in various fields, including physical, chemical, and biochemical analyses and syntheses. However, it is inefficient and difficult to integrate the large-scale all-glass valves in a microfluidic device using conventional glass fabrication methods, especially for the through-hole fabrication step. Therefore, we have developed a fabrication method for the large-scale integration of all-glass valves in a microfluidic device that contains 110 individually controllable diaphragm valve units on a 30 mm × 70 mm glass slide. This prototype device was fabricated by first sandwiching a 0.4-mm-thick glass slide that contained 110 1.5-mm-diameter shallow chambers, each with two 50-μm-diameter through-holes, between an ultra-thin glass sheet (4 μm thick) and another 0.7-mm-thick glass slide that contained etched channels. After the fusion bonding of these three layers, the large-scale microfluidic device was obtained with integrated all-glass valves consisting of 110 individual diaphragm valve units. We demonstrated its use as a pump capable of generating a flow rate of approximately 0.06–5.33 μL/min. The maximum frequency of flow switching was approximately 12 Hz.

A One-Square-Millimeter Compact Hollow Structure for Microfluidic Pumping on an All-Glass Chip

A micro surface tension pump is a new type of low-cost, built-in, all-glass, microfluidic pump on a glass microchip fabricated by one-step glass etching. However, geometric minimization and optimization for practical use are challenging. Here, we report a one-square-millimeter, built-in, all-glass pump controlled by two-way digital gas pressure. The pump consists simply of two joint chambers and a piston between two gas control channels. It does not require pre-perfusion for initialization, and can immediately begin to run when a liquid enters its inlet channel. It is also more reliable than conventional micro pumps for practical use due to its ability to restart after the formation of a blocking bubble, which can serve as a valuable troubleshooting procedure. Its volumetric pump output was 0.5⁻0.7 nL·s-1 under a pump head pressure of 300 Pa.