1
|
Li Y, Chen S, Yu Y, Li C, Xiao TH. Inverse design of mid-infrared diamond waveguide beam splitter. OPTICS LETTERS 2024; 49:3620-3623. [PMID: 38950224 DOI: 10.1364/ol.526023] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/10/2024] [Accepted: 06/03/2024] [Indexed: 07/03/2024]
Abstract
Diamond is a supreme material for mid-infrared (MIR) integrated photonics as it has a transparency window up to 20 µm that covers the entire fingerprint region. However, its relatively low refractive index poses a challenge in designing an MIR diamond functional device with both small footprint and high transmission efficiency. Here we propose and demonstrate the inverse design of an MIR diamond waveguide beam splitter operating at the wavelength of 15 µm with a small footprint of ∼15 µm × ∼15 µm and a total transmission efficiency above 95%. Our work paves a new avenue for the design of compact and high-efficiency MIR diamond photonic devices.
Collapse
|
2
|
Hernik A, Radford McGovern F, Naydenova I. Optical Response of PDMS Surface Diffraction Gratings under Exposure to Volatile Organic Compounds. ACS APPLIED OPTICAL MATERIALS 2024; 2:1188-1197. [PMID: 38962564 PMCID: PMC11220723 DOI: 10.1021/acsaom.4c00138] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/25/2024] [Revised: 05/16/2024] [Accepted: 05/17/2024] [Indexed: 07/05/2024]
Abstract
Monitoring volatile organic compounds (VOCs) in indoor air is significantly gaining importance due to their adverse effects on human health. Among the diverse detection methods is optical sensing, which employs materials sensitive to the presence of gases in the environment. In this work, we investigate polydimethylsiloxane (PDMS), one of the materials utilized for gas sensing, in a novel transducer: a surface relief diffraction grating. Upon adsorption of the volatile analyte, the PDMS grating swells, and its refractive index changes; both effects lead to increased diffraction efficiency in the first diffraction order. Hence, the possibility of VOC detection emerges from the measurement of the optical power transmitted or diffracted by the grating. Here, we investigated responses of PDMS gratings with varying surface profile properties upon exposure to VOCs with different polarities, i.e., ethanol, n-butanol, toluene, chloroform, and m-xylene, and compared their response in the context of the Hansen theory of solubility. We also studied the response of the grating with a 530 nm deep surface profile to different concentrations of m-xylene, showing a sensitivity and limit of detection of 0.017 μW/ppm and 186 ppm, respectively. Structures in the PDMS were obtained as copies of sinusoidal surface gratings fabricated holographically in acrylamide photopolymer and revealed good sensing repeatability, reversibility, and a fast response time. The proposed sensing technique can be directly adopted as a simple method for VOC detection or can be further improved by implementing a functional coating to significantly enhance the sensitivity and selectivity of the device.
Collapse
Affiliation(s)
- Aleksandra Hernik
- Centre for Industrial &
Engineering Optics, School of Physics, Clinical & Optometric Sciences, Technological University Dublin, D07 ADY7 Dublin, Ireland
| | - Faolan Radford McGovern
- Centre for Industrial &
Engineering Optics, School of Physics, Clinical & Optometric Sciences, Technological University Dublin, D07 ADY7 Dublin, Ireland
| | - Izabela Naydenova
- Centre for Industrial &
Engineering Optics, School of Physics, Clinical & Optometric Sciences, Technological University Dublin, D07 ADY7 Dublin, Ireland
| |
Collapse
|
3
|
Zhao Y, Zhang C, Ci G, Zhao X, Lv J, Liang J, Ming A, Wei F, Mao C. Development of High-Precision NO 2 Gas Sensor Based on Non-Dispersive Infrared Technology. SENSORS (BASEL, SWITZERLAND) 2024; 24:4146. [PMID: 39000924 PMCID: PMC11243905 DOI: 10.3390/s24134146] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/14/2024] [Revised: 06/21/2024] [Accepted: 06/21/2024] [Indexed: 07/16/2024]
Abstract
Increasing concerns about air quality due to fossil fuel combustion, especially nitrogen oxides (NOx) from marine and diesel engines, necessitate advanced monitoring systems due to the significant health and environmental impacts of nitrogen dioxide (NO2). In this study, a gas detection system based on the principle of the non-dispersive infrared (NDIR) technique is proposed. Firstly, the pyroelectric detector was developed by employing an ultra-thin LiTaO3 (LT) layer as the sensitive element, integrated with nanoscale carbon material prepared by wafer-level graphics technology as the infrared absorption layer. Then, the sensor was hermetically sealed using inert gas through energy storage welding technology, exhibiting a high detectivity (D*) value of 4.19 × 108 cm·√Hz/W. Subsequently, a NO2 gas sensor was engineered based on the NDIR principle employing a Micro Electro Mechanical System (MEMS) infrared (IR) emitter, featuring a light path chamber length of 1.5 m, along with integrated signal processing and software calibration algorithms. This gas sensor was capable of detecting NO2 concentrations within the range of 0-500 ppm. Initial tests indicated that the gas sensor exhibited a full-scale relative error of less than 0.46%, a limit of 2.8 ppm, a linearity of -1.09%, a repeatability of 0.47% at a concentration of 500 ppm, and a stability of 2% at a concentration of 500 ppm. The developed gas sensor demonstrated significant potential for application in areas such as industrial monitoring and analytical instrumentation.
Collapse
Affiliation(s)
- Yongmin Zhao
- State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China
- Department of Advanced Electronic Materials, GRIMAT Engineering Institute Co., Ltd., Beijing 101407, China
| | - Congchun Zhang
- State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China
- Department of Advanced Electronic Materials, GRIMAT Engineering Institute Co., Ltd., Beijing 101407, China
| | - Guangteng Ci
- State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China
- Department of Advanced Electronic Materials, GRIMAT Engineering Institute Co., Ltd., Beijing 101407, China
| | - Xiaoguang Zhao
- Department of Precision Instrument, Tsinghua University, Beijing 100084, China
| | - Jinguang Lv
- State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
| | - Jingqiu Liang
- State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
| | - Anjie Ming
- State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China
- Department of Advanced Electronic Materials, GRIMAT Engineering Institute Co., Ltd., Beijing 101407, China
| | - Feng Wei
- State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China
- GRINM (Guangdong) Institute for Advanced Materials and Technology, Foshan 528000, China
| | - Changhui Mao
- State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China
- GRINM (Guangdong) Institute for Advanced Materials and Technology, Foshan 528000, China
| |
Collapse
|
4
|
Zhou S, Zhao Y, Xun Y, Wei Z, Yang Y, Yan W, Ding J. Programmable and Modularized Gas Sensor Integrated by 3D Printing. Chem Rev 2024; 124:3608-3643. [PMID: 38498933 DOI: 10.1021/acs.chemrev.3c00853] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 03/20/2024]
Abstract
The rapid advancement of intelligent manufacturing technology has enabled electronic equipment to achieve synergistic design and programmable optimization through computer-aided engineering. Three-dimensional (3D) printing, with the unique characteristics of near-net-shape forming and mold-free fabrication, serves as an effective medium for the materialization of digital designs into usable devices. This methodology is particularly applicable to gas sensors, where performance can be collaboratively optimized by the tailored design of each internal module including composition, microstructure, and architecture. Meanwhile, diverse 3D printing technologies can realize modularized fabrication according to the application requirements. The integration of artificial intelligence software systems further facilitates the output of precise and dependable signals. Simultaneously, the self-learning capabilities of the system also promote programmable optimization for the hardware, fostering continuous improvement of gas sensors for dynamic environments. This review investigates the latest studies on 3D-printed gas sensor devices and relevant components, elucidating the technical features and advantages of different 3D printing processes. A general testing framework for the performance evaluation of customized gas sensors is proposed. Additionally, it highlights the superiority and challenges of programmable and modularized gas sensors, providing a comprehensive reference for material adjustments, structure design, and process modifications for advanced gas sensor devices.
Collapse
Affiliation(s)
- Shixiang Zhou
- Department of Materials Science and Engineering, National University of Singapore, 117575, Singapore
| | - Yijing Zhao
- Department of Mechanical Engineering, National University of Singapore, 117575, Singapore
| | - Yanran Xun
- Department of Materials Science and Engineering, National University of Singapore, 117575, Singapore
| | - Zhicheng Wei
- Department of Materials Science and Engineering, National University of Singapore, 117575, Singapore
| | - Yong Yang
- Temasek Laboratories, National University of Singapore, 5A Engineering Drive 1, 117411, Singapore
| | - Wentao Yan
- Department of Mechanical Engineering, National University of Singapore, 117575, Singapore
| | - Jun Ding
- Department of Materials Science and Engineering, National University of Singapore, 117575, Singapore
| |
Collapse
|
5
|
Feng L, Liu Y, Wang Y, Zhou H, Wu M, Li T. An ultra-small integrated CO 2 infrared gas sensor for wearable end-tidal CO 2 monitoring. iScience 2023; 26:108293. [PMID: 38026213 PMCID: PMC10660086 DOI: 10.1016/j.isci.2023.108293] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/27/2023] [Revised: 07/03/2023] [Accepted: 10/19/2023] [Indexed: 12/01/2023] Open
Abstract
Human physiological metabolic status can be obtained by monitoring exhaled CO2 concentration, but current CO2 sensors have disadvantages such as large size, high power consumption, and slow response time, which limit their application in wearable devices and portable instruments. In this article, we report a small size, good performance, and large range CO2 infrared gas sensor that integrates a high emissivity MEMS emitter chip, a high detectivity thermopile chip, and a high coupling efficiency optical chamber to achieve high efficiency optical-thermal-electrical conversion. Compared with typical commercial sensors, the size of the sensor can be reduced by approximately 80% to only 10 mm × 10 mm × 6.5 mm, with the advantages of low power consumption and fast response speed. Further, a monitoring system for end-tidal CO2 concentration installed on a mask was developed using this sensor, and good results were achieved.
Collapse
Affiliation(s)
- Liyang Feng
- State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
- University of Chinese Academy of Sciences (UCAS), Beijing 100049, China
| | - Yanxiang Liu
- State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Yi Wang
- State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Hong Zhou
- State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Ming Wu
- State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| | - Tie Li
- State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
| |
Collapse
|
6
|
Guan Q, Lim ZH, Sun H, Chew JXY, Zhou G. Review of Miniaturized Computational Spectrometers. SENSORS (BASEL, SWITZERLAND) 2023; 23:8768. [PMID: 37960467 PMCID: PMC10649566 DOI: 10.3390/s23218768] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/26/2023] [Revised: 10/21/2023] [Accepted: 10/23/2023] [Indexed: 11/15/2023]
Abstract
Spectrometers are key instruments in diverse fields, notably in medical and biosensing applications. Recent advancements in nanophotonics and computational techniques have contributed to new spectrometer designs characterized by miniaturization and enhanced performance. This paper presents a comprehensive review of miniaturized computational spectrometers (MCS). We examine major MCS designs based on waveguides, random structures, nanowires, photonic crystals, and more. Additionally, we delve into computational methodologies that facilitate their operation, including compressive sensing and deep learning. We also compare various structural models and highlight their unique features. This review also emphasizes the growing applications of MCS in biosensing and consumer electronics and provides a thoughtful perspective on their future potential. Lastly, we discuss potential avenues for future research and applications.
Collapse
Affiliation(s)
| | | | | | | | - Guangya Zhou
- Department of Mechanical Engineering, National University of Singapore, Singapore 117575, Singapore; (Q.G.); (Z.H.L.); (H.S.); (J.X.Y.C.)
| |
Collapse
|
7
|
Núñez-Prieto R, Castells-Rufas D, Terés-Terés L. RisCO2: Implementation and Performance Evaluation of RISC-V Processors for Low-Power CO 2 Concentration Sensing. MICROMACHINES 2023; 14:1371. [PMID: 37512682 PMCID: PMC10385369 DOI: 10.3390/mi14071371] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/23/2023] [Revised: 06/23/2023] [Accepted: 06/30/2023] [Indexed: 07/30/2023]
Abstract
In the field of embedded systems, energy efficiency is a critical requirement, particularly for battery-powered devices. RISC-V processors have gained popularity due to their flexibility and open-source nature, making them an attractive choice for embedded applications. However, not all RISC-V processors are equally energy-efficient, and evaluating their performance in specific use cases is essential. This paper presents RisCO2, an RISC-V implementation optimized for energy efficiency. It evaluates its performance compared to other RISC-V processors in terms of resource utilization and energy consumption in a signal processing application for nondispersive infrared (NDIR) CO2 sensors.The processors were implemented in the PULPino SoC and synthesized using Vivado IDE. RisCO2 is based on the RV32E_Zfinx instruction set and was designed from scratch by the authors specifically for low-power signal demodulation in CO2 NDIR sensors. The other processors are Ri5cy, Micro-riscy, and Zero-riscy, developed by the PULP team, and CV32E40P (derived from Ri5cy) from the OpenHW Group, all of them widely used in the RISC-V community. Our experiments showed that RisCO2 had the lowest energy consumption among the five processors, with a 53.5% reduction in energy consumption compared to CV32E40P and a 94.8% reduction compared to Micro-riscy. Additionally, RisCO2 had the lowest FPGA resource utilization compared to the best-performing processors, CV32E40P and Ri5cy, with a 46.1% and a 59% reduction in LUTs, respectively. Our findings suggest that RisCO2 is a highly energy-efficient RISC-V processor for NDIR CO2 sensors that require signal demodulation to enhance the accuracy of the measurements. The results also highlight the importance of evaluating processors in specific use cases to identify the most energy-efficient option. This paper provides valuable insights for designers of energy-efficient embedded systems using RISC-V processors.
Collapse
Affiliation(s)
- Ricardo Núñez-Prieto
- Barcelona Supercomputing Center (BSC), 08034 Barcelona, Spain
- Microelectronics & Electronic Systems Department, Universitat Autònoma de Barcelona (UAB), 08193 Cerdanyola del Vallès, Spain
| | - David Castells-Rufas
- Barcelona Supercomputing Center (BSC), 08034 Barcelona, Spain
- Microelectronics & Electronic Systems Department, Universitat Autònoma de Barcelona (UAB), 08193 Cerdanyola del Vallès, Spain
| | - Lluís Terés-Terés
- Microelectronics & Electronic Systems Department, Universitat Autònoma de Barcelona (UAB), 08193 Cerdanyola del Vallès, Spain
- Institut de Microelectrònica de Barcelona, IMB-CNM (CSIC), 08193 Cerdanyola del Vallès, Spain
| |
Collapse
|
8
|
Ba Hashwan SS, Khir MHM, Nawi IM, Ahmad MR, Hanif M, Zahoor F, Al-Douri Y, Algamili AS, Bature UI, Alabsi SS, Sabbea MOB, Junaid M. A review of piezoelectric MEMS sensors and actuators for gas detection application. NANOSCALE RESEARCH LETTERS 2023; 18:25. [PMID: 36847870 DOI: 10.1186/s11671-023-03779-8] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/17/2022] [Accepted: 01/25/2023] [Indexed: 05/24/2023]
Abstract
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors' characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal-organic framework, and graphene.
Collapse
Affiliation(s)
- Saeed S Ba Hashwan
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia.
| | - Mohd Haris Md Khir
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Illani Mohd Nawi
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Mohamad Radzi Ahmad
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Mehwish Hanif
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Furqan Zahoor
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Y Al-Douri
- Nanotechnology and Catalysis Research Centre (NANOCAT), University of Malaya, Kuala Lumpur, Malaysia
- Department of Mechanical Engineering, Faculty of Engineering, Piri Reis University, Eflatun Sk. No: 8, 34940, Tuzla, Istanbul, Turkey
- Department of Applied Science and Astronomy, College of Sciences, University of Sharjah, Sharjah, United Arab Emirates
| | - Abdullah Saleh Algamili
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Usman Isyaku Bature
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Sami Sultan Alabsi
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
| | - Mohammed O Ba Sabbea
- Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, ON, N2L 3G1, Canada
| | - Muhammad Junaid
- Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, 32610, Seri Iskandar, Malaysia
- Department of Electronic Engineering, Balochistan University of Information Technology, Engineering and Management Sciences, Quetta, 87300, Pakistan
| |
Collapse
|
9
|
Wang G, Meng L, Gou Q, Hanoune B, Crumeyrolle S, Fagniez T, Coeur C, Akiki R, Chen W. Novel Broadband Cavity-Enhanced Absorption Spectrometer for Simultaneous Measurements of NO 2 and Particulate Matter. Anal Chem 2023; 95:3460-3467. [PMID: 36716285 DOI: 10.1021/acs.analchem.2c05237] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/01/2023]
Abstract
A novel instrument based on broadband cavity-enhanced absorption spectroscopy has been developed using a supercontinuum broadband light source, which showcases its ability in simultaneous measurements of the concentration of NO2 and the extinction of particulate matter. Side-by-side intercomparison was carried out with the reference NOx analyzer for NO2 and OPC-N2 particle counter for particulate matter, which shows a good linear correlation with r2 > 0.90. The measurement limits (1σ) of the developed instrument were experimentally determined to be 230 pptv in 40 s for NO2 and 1.24 Mm-1 for the extinction of particulate matter in 15 s. This work provides a promising method in simultaneously monitoring atmospheric gaseous compounds and particulate matter, which would further advance our understanding on gas-particle heterogeneous interactions in the context of climate change and air quality.
Collapse
Affiliation(s)
- Gaoxuan Wang
- Ningbo Research Institute, Zhejiang University, Qianhu South Road Rd.1, 315100Ningbo, China.,Laboratoire de Physicochimie de l'Atmosphère, Université du Littoral Côte d'Opale, 189A Avenue Maurice Schuman, 59140Dunkerque, France
| | - Lingshuo Meng
- Laboratoire de Physicochimie de l'Atmosphère, Université du Littoral Côte d'Opale, 189A Avenue Maurice Schuman, 59140Dunkerque, France
| | - Qian Gou
- School of Chemistry and Chemical Engineering, Chongqing University, Daxuecheng South Rd. 55, 401331Chongqing, China
| | - Benjamin Hanoune
- Physicochimie des Processus de Combustion et de l'Atmosphère, Université de Lille1, Bâtiment C11, 59655Villeneuve d'Ascq, France
| | - Suzanne Crumeyrolle
- Laboratoire d'Optique Atmosphérique, Université de Lille1, Bâtiment P5, 59655Villeneuve d'Ascq, France
| | - Thomas Fagniez
- Laboratoire de Physicochimie de l'Atmosphère, Université du Littoral Côte d'Opale, 189A Avenue Maurice Schuman, 59140Dunkerque, France
| | - Cécile Coeur
- Laboratoire de Physicochimie de l'Atmosphère, Université du Littoral Côte d'Opale, 189A Avenue Maurice Schuman, 59140Dunkerque, France
| | - Rony Akiki
- ENVEATM (ex Environment SA), 111 Boulevard Robespierre CS 80004, 78304Poissy Cedex 4, France
| | - Weidong Chen
- Laboratoire de Physicochimie de l'Atmosphère, Université du Littoral Côte d'Opale, 189A Avenue Maurice Schuman, 59140Dunkerque, France
| |
Collapse
|
10
|
Cepa JJ, Pavón RM, Caramés P, Alberti MG. A Review of Gas Measurement Practices and Sensors for Tunnels. SENSORS (BASEL, SWITZERLAND) 2023; 23:1090. [PMID: 36772130 PMCID: PMC9919948 DOI: 10.3390/s23031090] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/11/2022] [Revised: 12/23/2022] [Accepted: 01/15/2023] [Indexed: 06/18/2023]
Abstract
The concentration of pollutant gases emitted by traffic in a tunnel affects the indoor air quality and contributes to structural deterioration. Demand control ventilation systems incur high operating costs, so reliable measurement of the gas concentration is essential. Numerous commercial sensor types are available with proven experience, such as optical and first-generation electrochemical sensors, or novel materials in detection methods. However, all of them are subjected to measurement deviations due to environmental conditions. This paper presents the main types of sensors and their application in tunnels. Solutions will also be discussed in order to obtain reliable measurements and improve the efficiency of the extraction systems.
Collapse
|
11
|
Butt MA, Voronkov GS, Grakhova EP, Kutluyarov RV, Kazanskiy NL, Khonina SN. Environmental Monitoring: A Comprehensive Review on Optical Waveguide and Fiber-Based Sensors. BIOSENSORS 2022; 12:bios12111038. [PMID: 36421155 PMCID: PMC9688474 DOI: 10.3390/bios12111038] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/26/2022] [Revised: 11/15/2022] [Accepted: 11/15/2022] [Indexed: 05/31/2023]
Abstract
Globally, there is active development of photonic sensors incorporating multidisciplinary research. The ultimate objective is to develop small, low-cost, sensitive, selective, quick, durable, remote-controllable sensors that are resistant to electromagnetic interference. Different photonic sensor designs and advances in photonic frameworks have shown the possibility to realize these capabilities. In this review paper, the latest developments in the field of optical waveguide and fiber-based sensors which can serve for environmental monitoring are discussed. Several important topics such as toxic gas, water quality, indoor environment, and natural disaster monitoring are reviewed.
Collapse
Affiliation(s)
| | - Grigory S Voronkov
- Ufa University of Science and Technology, Z. Validi St. 32, 450076 Ufa, Russia
| | | | - Ruslan V Kutluyarov
- Ufa University of Science and Technology, Z. Validi St. 32, 450076 Ufa, Russia
| | - Nikolay L Kazanskiy
- Samara National Research University, 443086 Samara, Russia
- IPSI RAS-Branch of the FSRC "Crystallography and Photonics" RAS, 443001 Samara, Russia
| | - Svetlana N Khonina
- Samara National Research University, 443086 Samara, Russia
- IPSI RAS-Branch of the FSRC "Crystallography and Photonics" RAS, 443001 Samara, Russia
| |
Collapse
|
12
|
Kim Y, Goo SG, Lim JS. Multi-Gas Analyzer Based on Tunable Filter Non-Dispersive Infrared Sensor: Application to the Monitoring of Eco-Friendly Gas Insulated Switchgears. SENSORS (BASEL, SWITZERLAND) 2022; 22:8662. [PMID: 36433258 PMCID: PMC9694990 DOI: 10.3390/s22228662] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/10/2022] [Revised: 11/04/2022] [Accepted: 11/05/2022] [Indexed: 06/16/2023]
Abstract
This study presents a multi-gas analyzer based on tunable filter non-dispersive IR (TF-NDIR) sensors that operate with a wide dynamic range of wavelength and concentration. A pyroelectric sensor coupled with a microsized Fabry-Perot interferometer, namely a tunable filter, enables sensing within a narrowly selected wavelength band. Three detectors capable of tuning the bandpass wavelength with a range of 3.8-5.0 μm, 5.5-8.0 μm, and 8.0-10.5 μm are combined to encompass the entire mid-IR region. single-pass cell with an optical path length (OPL) of 5 cm and a multi-pass cell with an OPL of 10.5 m is selected to encompass a concentration range from ppmv to percent. The TF-NDIR sensors and gas cells can be reconfigured by manipulating the beam path. A homemade lock-in amplifier is used to enhance the signal-to-noise ratio 88 times greater than that of the bare signal. The performance of the gas analyzer is evaluated by measuring the SF6 and Novec-4710/CO2 mixture, which are the dielectric gas medium for a gas-insulated switch (GIS). The mixing ratio of the Novec-4710/CO2 mixture is measured within a range of 3-7% using premixes. The measurement precision is 0.72% for 0.5 s. Trace level measurements of Novec-4710, CO2, SF6, which are measurands for detecting gas leakage from the GIS, CO, and SO2 which are measurands for detecting product generated by the arc or thermal decomposition in the switching electrode, are conducted based on dynamic partial pressure adjustment using 1000 ppmv mother premixes in N2. The limit of detection is 54.7 ppmv for Novec-4710, 112.8 ppmv for CO, 118.1 ppmv for CO2, 69.5 ppmv for SO2, and 33.5 ppmv for SF6.
Collapse
Affiliation(s)
- Yera Kim
- GHGs Metrology Team, Korea Research Institute of Standards and Science, Daejeon 34113, Korea
- Science of Measurement, University of Science & Technology, Daejeon 34113, Korea
| | | | - Jeong Sik Lim
- GHGs Metrology Team, Korea Research Institute of Standards and Science, Daejeon 34113, Korea
- Science of Measurement, University of Science & Technology, Daejeon 34113, Korea
| |
Collapse
|
13
|
Yu X, Chu H, Zha F, Pan H, Zhao S, Pan Z, Li D. Watt-level diode-pumped Tm:YVO 4 laser at 2.3 µm. OPTICS LETTERS 2022; 47:5501-5504. [PMID: 37219254 DOI: 10.1364/ol.474891] [Citation(s) in RCA: 11] [Impact Index Per Article: 5.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/06/2022] [Accepted: 09/26/2022] [Indexed: 05/24/2023]
Abstract
In this Letter, a watt-level laser diode (LD)-pumped ∼2.3-µm (on the 3H4→3H5 quasi-four-level transition) laser is reported based on a 1.5 at.% a-cut Tm:YVO4 crystal. The maximum continuous wave (CW) output power obtained is 1.89 W and 1.11 W with the maximum slope efficiency of 13.6% and 7.3% (versus the absorbed pump power) for the 1% and 0.5% transmittance of the output coupler, respectively. To the best of our knowledge, the CW output power of 1.89 W we obtained is the highest CW output power amongst the LD-pumped ∼2.3-µm Tm3+-doped lasers.
Collapse
|
14
|
Filipovic L, Selberherr S. Application of Two-Dimensional Materials towards CMOS-Integrated Gas Sensors. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:nano12203651. [PMID: 36296844 PMCID: PMC9611560 DOI: 10.3390/nano12203651] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/05/2022] [Revised: 09/29/2022] [Accepted: 10/07/2022] [Indexed: 06/01/2023]
Abstract
During the last few decades, the microelectronics industry has actively been investigating the potential for the functional integration of semiconductor-based devices beyond digital logic and memory, which includes RF and analog circuits, biochips, and sensors, on the same chip. In the case of gas sensor integration, it is necessary that future devices can be manufactured using a fabrication technology which is also compatible with the processes applied to digital logic transistors. This will likely involve adopting the mature complementary metal oxide semiconductor (CMOS) fabrication technique or a technique which is compatible with CMOS due to the inherent low costs, scalability, and potential for mass production that this technology provides. While chemiresistive semiconductor metal oxide (SMO) gas sensors have been the principal semiconductor-based gas sensor technology investigated in the past, resulting in their eventual commercialization, they need high-temperature operation to provide sufficient energies for the surface chemical reactions essential for the molecular detection of gases in the ambient. Therefore, the integration of a microheater in a MEMS structure is a requirement, which can be quite complex. This is, therefore, undesirable and room temperature, or at least near-room temperature, solutions are readily being investigated and sought after. Room-temperature SMO operation has been achieved using UV illumination, but this further complicates CMOS integration. Recent studies suggest that two-dimensional (2D) materials may offer a solution to this problem since they have a high likelihood for integration with sophisticated CMOS fabrication while also providing a high sensitivity towards a plethora of gases of interest, even at room temperature. This review discusses many types of promising 2D materials which show high potential for integration as channel materials for digital logic field effect transistors (FETs) as well as chemiresistive and FET-based sensing films, due to the presence of a sufficiently wide band gap. This excludes graphene from this review, while recent achievements in gas sensing with graphene oxide, reduced graphene oxide, transition metal dichalcogenides (TMDs), phosphorene, and MXenes are examined.
Collapse
|
15
|
Wang Z, Zhu L, Wang J, Zhuang R, Mu P, Wang J, Yan W. Advances in functional guest materials for resistive gas sensors. RSC Adv 2022; 12:24614-24632. [PMID: 36128383 PMCID: PMC9426293 DOI: 10.1039/d2ra04063h] [Citation(s) in RCA: 7] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/01/2022] [Accepted: 07/29/2022] [Indexed: 12/02/2022] Open
Abstract
Resistive gas sensors are considered promising candidates for gas detection, benefiting from their small size, ease of fabrication and operation convenience. The development history, performance index, device type and common host materials (metal oxide semiconductors, conductive polymers, carbon-based materials and transition metal dichalcogenides) of resistive gas sensors are firstly reviewed. This review systematically summarizes the functions, functional mechanisms, features and applications of seven kinds of guest materials (noble metals, metal heteroatoms, metal oxides, metal-organic frameworks, transition metal dichalcogenides, polymers, and multiple guest materials) used for the modification and optimization of the host materials. The introduction of guest materials enables synergistic effects and complementary advantages, introduces catalytic sites, constructs heterojunctions, promotes charge transfer, improves carrier transport, or introduces protective/sieving/enrichment layers, thereby effectively improving the sensitivity, selectivity and stability of the gas sensors. The perspectives and challenges regarding the host-guest hybrid materials-based gas sensors are also discussed.
Collapse
Affiliation(s)
- Ze Wang
- Department of Environmental Science and Engineering, Xi'an Key Laboratory of Solid Waste Recycling and Resource Recovery, State Key Laboratory of Multiphase Flow in Power Engineering, School of Energy and Power Engineering, Xi'an Jiaotong University 28 Xianning West Road Xi'an 710049 China
| | - Lei Zhu
- Department of Environmental Science and Engineering, Xi'an Key Laboratory of Solid Waste Recycling and Resource Recovery, State Key Laboratory of Multiphase Flow in Power Engineering, School of Energy and Power Engineering, Xi'an Jiaotong University 28 Xianning West Road Xi'an 710049 China
- School of Physics and Electrical Engineering, Weinan Normal University Chaoyang Street Weinan 714099 China
| | - Jingzhao Wang
- Department of Environmental Science and Engineering, Xi'an Key Laboratory of Solid Waste Recycling and Resource Recovery, State Key Laboratory of Multiphase Flow in Power Engineering, School of Energy and Power Engineering, Xi'an Jiaotong University 28 Xianning West Road Xi'an 710049 China
| | - Rui Zhuang
- Chambroad Chemical Industry Institute Co.,Ltd Boxing Economic Development Zone 256500 Shandong Province China
| | - Pengfei Mu
- Chambroad Chemical Industry Institute Co.,Ltd Boxing Economic Development Zone 256500 Shandong Province China
| | - Jianan Wang
- Department of Environmental Science and Engineering, Xi'an Key Laboratory of Solid Waste Recycling and Resource Recovery, State Key Laboratory of Multiphase Flow in Power Engineering, School of Energy and Power Engineering, Xi'an Jiaotong University 28 Xianning West Road Xi'an 710049 China
| | - Wei Yan
- Department of Environmental Science and Engineering, Xi'an Key Laboratory of Solid Waste Recycling and Resource Recovery, State Key Laboratory of Multiphase Flow in Power Engineering, School of Energy and Power Engineering, Xi'an Jiaotong University 28 Xianning West Road Xi'an 710049 China
| |
Collapse
|
16
|
Roberts JA, Ho PH, Yu SJ, Fan JA. Electrically Driven Hyperbolic Nanophotonic Resonators as High Speed, Spectrally Selective Thermal Radiators. NANO LETTERS 2022; 22:5832-5840. [PMID: 35849552 DOI: 10.1021/acs.nanolett.2c01579] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
We introduce and experimentally demonstrate electrically driven, spectrally selective thermal emitters based on globally aligned carbon nanotube metamaterials. The self-assembled metamaterial supports a high degree of nanotube ordering, enabling nanoscale ribbons patterned in the metamaterial to function both as Joule-heated incandescent filaments and as infrared hyperbolic resonators imparting spectral selectivity to the thermal radiation. Devices batch-fabricated on a single chip emit polarized thermal radiation with peak wavelengths dictated by their hyperbolic resonances, and their nanoscale heated dimensions yield modulation rates as high as 1 MHz. As a proof of concept, we show that two sets of thermal emitters on the same chip, operating with different peak wavelengths and modulation rates, can be used to sense carbon dioxide with one detector. We anticipate that the combination of batch fabrication, modulation bandwidth, and spectral tuning with chip-based nanotube thermal emitters will enable new modalities in multiplexed infrared sources.
Collapse
Affiliation(s)
- John Andris Roberts
- Department of Applied Physics, Stanford University, Stanford, California 94305, United States
| | - Po-Hsun Ho
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| | - Shang-Jie Yu
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| | - Jonathan A Fan
- Department of Electrical Engineering, Stanford University, Stanford, California 94305, United States
| |
Collapse
|
17
|
Materials for Chemical Sensing: A Comprehensive Review on the Recent Advances and Outlook Using Ionic Liquids, Metal–Organic Frameworks (MOFs), and MOF-Based Composites. CHEMOSENSORS 2022. [DOI: 10.3390/chemosensors10080290] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/05/2023]
Abstract
The ability to measure and monitor the concentration of specific chemical and/or gaseous species (i.e., “analytes”) is the main requirement in many fields, including industrial processes, medical applications, and workplace safety management. As a consequence, several kinds of sensors have been developed in the modern era according to some practical guidelines that regard the characteristics of the active (sensing) materials on which the sensor devices are based. These characteristics include the cost-effectiveness of the materials’ manufacturing, the sensitivity to analytes, the material stability, and the possibility of exploiting them for low-cost and portable devices. Consequently, many gas sensors employ well-defined transduction methods, the most popular being the oxidation (or reduction) of the analyte in an electrochemical reactor, optical techniques, and chemiresistive responses to gas adsorption. In recent years, many of the efforts devoted to improving these methods have been directed towards the use of certain classes of specific materials. In particular, ionic liquids have been employed as electrolytes of exceptional properties for the preparation of amperometric gas sensors, while metal–organic frameworks (MOFs) are used as highly porous and reactive materials which can be employed, in pure form or as a component of MOF-based functional composites, as active materials of chemiresistive or optical sensors. Here, we report on the most recent developments relative to the use of these classes of materials in chemical sensing. We discuss the main features of these materials and the reasons why they are considered interesting in the field of chemical sensors. Subsequently, we review some of the technological and scientific results published in the span of the last six years that we consider among the most interesting and useful ones for expanding the awareness on future trends in chemical sensing. Finally, we discuss the prospects for the use of these materials and the factors involved in their possible use for new generations of sensor devices.
Collapse
|
18
|
Virtual Spectral Selectivity in a Modulated Thermal Infrared Emitter with Lock-In Detection. SENSORS 2022; 22:s22145451. [PMID: 35891137 PMCID: PMC9325177 DOI: 10.3390/s22145451] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/24/2022] [Revised: 07/15/2022] [Accepted: 07/19/2022] [Indexed: 01/25/2023]
Abstract
The need for affordable low-power devices has led MEMS-based thermal emitters to become an interesting option for optical gas sensors. Since these emitters have a low thermal mass, they can be easily modulated and combined with a lock-in amplifier for detection. In this paper, we show that the signal measured by a lock-in amplifier from a thermal emitter that varies its temperature periodically can have different spectral profiles, depending on the reference signal used. These virtual emitters appear because the Fourier series expansion of the emitted radiance, as a function of time, has different coefficients for each wavelength, and this spectral signature, which is different for each harmonic, can be retrieved using a reference signal that corresponds to its frequency. In this study, the effect is first proved theoretically and then is measured experimentally. For this purpose, we performed measurements with an IR camera provided with six different spectral filters of a modulated emitter, in combination with lock-in amplification via software. Finally, we show a potential application of this effect using multiple virtual emitters to gain spectral selectivity and distinguish between two gases, CO2 and CH4.
Collapse
|
19
|
Resistive-Based Gas Sensors Using Quantum Dots: A Review. SENSORS 2022; 22:s22124369. [PMID: 35746151 PMCID: PMC9231087 DOI: 10.3390/s22124369] [Citation(s) in RCA: 9] [Impact Index Per Article: 4.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/26/2022] [Revised: 05/14/2022] [Accepted: 06/06/2022] [Indexed: 12/17/2022]
Abstract
Quantum dots (QDs) are used progressively in sensing areas because of their special electrical properties due to their extremely small size. This paper discusses the gas sensing features of QD-based resistive sensors. Different types of pristine, doped, composite, and noble metal decorated QDs are discussed. In particular, the review focus primarily on the sensing mechanisms suggested for these gas sensors. QDs show a high sensing performance at generally low temperatures owing to their extremely small sizes, making them promising materials for the realization of reliable and high-output gas-sensing devices.
Collapse
|
20
|
Zr-Doped h-BN Monolayer: A High-Sensitivity Atmospheric Pollutant-Monitoring Sensor. SENSORS 2022; 22:s22114103. [PMID: 35684723 PMCID: PMC9185361 DOI: 10.3390/s22114103] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/26/2022] [Revised: 05/20/2022] [Accepted: 05/26/2022] [Indexed: 12/28/2022]
Abstract
In the post-epidemic era, industrial production has gradually recovered, and the attendant air pollution problem has attracted much attention. In this study, the Zr-doped h-BN monolayer (Zr-BN) is proposed as a new gas sensor for air pollution. Based on density functional theory (DFT), we calculated and compared the adsorption energies (Eads), geometric parameters, the shortest distance between gas and substrate (dsub/gas), density of states (DOS), electron localization function (ELF), charge density difference (CDD), band structure, band gap energy change rate (ΔEg), and sensitivity (S) of Zr-BN adsorption systems (SO2F2, SOF2, SO2, NO, and CO2 adsorption systems). The results show that Zr-BN had strong adsorption and high sensitivity to the above-mentioned polluted gases, and the sensitivity was in the order of SOF2 > SO2F2 > CO2 > SO2 > NO. Therefore, this study provides a theoretical basis for the preparation of Zr-BN gas sensors and provides new ideas and methods for the development of other gas sensors.
Collapse
|
21
|
Generation of 8–20 μm Mid-Infrared Ultrashort Femtosecond Laser Pulses via Difference Frequency Generation. PHOTONICS 2022. [DOI: 10.3390/photonics9060372] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
Abstract
Mid-infrared (MIR) ultrashort laser pulses have a wide range of applications in the fields of environmental monitoring, laser medicine, food quality control, strong-field physics, attosecond science, and some other aspects. Recent years have seen great developments in MIR laser technologies. Traditional solid-state and fiber lasers focus on the research of the short-wavelength MIR region. However, due to the limitation of the gain medium, they still cannot cover the long-wavelength region from 8 to 20 µm. This paper summarizes the developments of 8–20 μm MIR ultrafast laser generation via difference frequency generation (DFG) and reviews related theoretical models. Finally, the feasibility of MIR power scaling by nonlinear-amplification DFG and methods for measuring the power of DFG-based MIR are analyzed from the author’s perspective.
Collapse
|
22
|
Zhou S, Guo Y, Zhang C, Pan Q, Zhou Q, Shuai Y. Design and optimization of mid-infrared hot electron detector based on Al/GaAs fishnet nanostructure for CO 2 sensing. APPLIED OPTICS 2022; 61:4270-4277. [PMID: 36256263 DOI: 10.1364/ao.456247] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/15/2022] [Accepted: 04/26/2022] [Indexed: 06/16/2023]
Abstract
Hot electron detectors (HEDs) based on plasmon resonance can circumvent a semiconductor's bandgap limitation and have high sensitivity, suitable for infrared gas detectors. Unfortunately, there are few literature reports on research in the mid-infrared (MIR) region. Herein, we design and optimize a HED based on Al/GaAs fishnet nanostructure for MIR CO2 sensing, and its optical-electrical properties are numerically studied. Surface plasmons not only achieve strong absorptance at CO2 emission wavelength but also greatly improve the photoelectric responsivity over a plane structure detector (∼42times). By changing the thickness of the GaAs layer, the detection wavelength can also be actively adjusted, achieving a larger range of multi-gas detection. The effect of external voltage is also considered. This work highlights a potential engineering application value and offers a path toward more compact and efficient MIR gas detectors.
Collapse
|
23
|
Becheker R, Bailly M, Idlahcen S, Godin T, Gerard B, Delahaye H, Granger G, Fèvrier S, Grisard A, Lallier E, Hideur A. Optical parametric generation in OP-GaAs waveguides pumped by a femtosecond fluoride fiber laser. OPTICS LETTERS 2022; 47:886-889. [PMID: 35167550 DOI: 10.1364/ol.443896] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/21/2021] [Accepted: 12/22/2021] [Indexed: 06/14/2023]
Abstract
We report on mid-infrared optical parametric generation in the 4-5 μm and 9-12 μm bands by pumping custom-designed orientation-patterned gallium arsenide (OP-GaAs) rib waveguides with an ultrafast femtosecond fiber laser system. This pump source is seeded by a mode-locked fluoride fiber laser with 59 MHz repetition rate and can be tuned between 2.8 and 3.2 μm using a soliton self-frequency shifting stage. The single TE and TM modes OP-GaAs crystals feature quasi-phase-matched grating periods of 85 and 90 μm and different transverse sizes thus allowing a wide spectral tunability.
Collapse
|
24
|
Miniaturized thermal acoustic gas sensor based on a CMOS microhotplate and MEMS microphone. Sci Rep 2022; 12:1690. [PMID: 35105901 PMCID: PMC8807770 DOI: 10.1038/s41598-022-05613-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/16/2021] [Accepted: 01/10/2022] [Indexed: 12/04/2022] Open
Abstract
We present a miniaturised thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. An active sensing element, consisting of a MEMS microphone, is used to detect the target gas while a reference element is used for acoustic noise compensation. Compared to current photoacoustic gas sensors, our sensor requires neither the use of gas-encapsulated microphones, nor that of optical filters. In addition, it has all the benefits of CMOS technology, including production scalability, low cost and miniaturization. Here we demonstrate its application for CO\documentclass[12pt]{minimal}
\usepackage{amsmath}
\usepackage{wasysym}
\usepackage{amsfonts}
\usepackage{amssymb}
\usepackage{amsbsy}
\usepackage{mathrsfs}
\usepackage{upgreek}
\setlength{\oddsidemargin}{-69pt}
\begin{document}$$_2$$\end{document}2 gas detection. The sensor could be used for gas leak detection, for example, in an industrial plant.
Collapse
|
25
|
Barik P, Pradhan M. Selectivity in trace gas sensing: recent developments, challenges, and future perspectives. Analyst 2022; 147:1024-1054. [DOI: 10.1039/d1an02070f] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/30/2022]
Abstract
Selectivity is one of the most crucial figures of merit in trace gas sensing, and thus a comprehensive assessment is necessary to have a clear picture of sensitivity, selectivity, and their interrelations in terms of quantitative and qualitative views.
Collapse
Affiliation(s)
- Puspendu Barik
- Technical Research Centre, S. N. Bose National Centre for Basic Sciences, JD Block, Sector-III, Salt Lake City, Kolkata – 700106, India
| | - Manik Pradhan
- Technical Research Centre, S. N. Bose National Centre for Basic Sciences, JD Block, Sector-III, Salt Lake City, Kolkata – 700106, India
- Department of Chemical, Biological and Macromolecular Sciences, S. N. Bose National Centre for Basic Sciences, JD Block, Sector-III, Salt Lake City, Kolkata – 700106, India
| |
Collapse
|
26
|
Dervieux E, Théron M, Uhring W. Carbon Dioxide Sensing-Biomedical Applications to Human Subjects. SENSORS (BASEL, SWITZERLAND) 2021; 22:188. [PMID: 35009731 PMCID: PMC8749784 DOI: 10.3390/s22010188] [Citation(s) in RCA: 10] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/08/2021] [Revised: 12/13/2021] [Accepted: 12/20/2021] [Indexed: 02/06/2023]
Abstract
Carbon dioxide (CO2) monitoring in human subjects is of crucial importance in medical practice. Transcutaneous monitors based on the Stow-Severinghaus electrode make a good alternative to the painful and risky arterial "blood gases" sampling. Yet, such monitors are not only expensive, but also bulky and continuously drifting, requiring frequent recalibrations by trained medical staff. Aiming at finding alternatives, the full panel of CO2 measurement techniques is thoroughly reviewed. The physicochemical working principle of each sensing technique is given, as well as some typical merit criteria, advantages, and drawbacks. An overview of the main CO2 monitoring methods and sites routinely used in clinical practice is also provided, revealing their constraints and specificities. The reviewed CO2 sensing techniques are then evaluated in view of the latter clinical constraints and transcutaneous sensing coupled to a dye-based fluorescence CO2 sensing seems to offer the best potential for the development of a future non-invasive clinical CO2 monitor.
Collapse
Affiliation(s)
- Emmanuel Dervieux
- BiOSENCY, 1137a Avenue des Champs Blancs, 35510 Cesson-Sévigné, France
| | - Michaël Théron
- ORPHY, Université de Bretagne Occidentale, 6 Avenue Victor le Gorgeu, 29238 Brest, France;
| | - Wilfried Uhring
- ICube, University of Strasbourg and CNRS, 23 rue du Loess, CEDEX, 67037 Strasbourg, France;
| |
Collapse
|
27
|
Barreto D, Kokoric V, da Silveira Petruci JF, Mizaikoff B. From Light Pipes to Substrate-Integrated Hollow Waveguides for Gas Sensing: A Review. ACS MEASUREMENT SCIENCE AU 2021; 1:97-109. [PMID: 36785552 PMCID: PMC9836072 DOI: 10.1021/acsmeasuresciau.1c00029] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/03/2023]
Abstract
Absorption-based spectroscopy in the mid-infrared (MIR) spectral range (i.e., 2.5-25 μm) is an excellent choice for directly sensing trace gas analytes providing discriminatory molecular information due to inherently specific fundamental vibrational, rovibrational, and rotational transitions. Complimentarily, the miniaturization of optical components has aided the utility of optical sensing techniques in a wide variety of application scenarios that demand compact, portable, easy-to-use, and robust analytical platforms yet providing suitable accuracy, sensitivity, and selectivity. While MIR sensing technologies have clearly benefitted from the development of advanced on-chip light sources such as quantum cascade and interband cascade lasers and equally small MIR detectors, less attention has been paid to the development of modular/tailored waveguide technologies reproducibly and reliably interfacing photons with sample molecules in a compact format. In this context, the first generation of a new type of hollow waveguides gas cells-the so-called substrate-integrated hollow waveguides (iHWG)-with unprecedented compact dimensions published by the research team of Mizaikoff and collaborators has led to a paradigm change in optical transducer technology for gas sensors. Features of iHWGs included an adaptable (i.e., designable) well-defined optical path length via the integration of meandered hollow waveguide structures at virtually any desired dimension and geometry into an otherwise planar substrate, a high degree of robustness, compactness, and cost-effectiveness in fabrication. Moreover, only a few hundred microliters of gas samples are required for analysis, resulting in short sample transient times facilitating a real-time monitoring of gaseous species in virtually any concentration range. In this review, we give an overview of recent advancements and achievements since their introduction eight years ago, focusing on the development of iHWG-based mid-infrared sensor technologies. Highlighted applications ranging from clinical diagnostics to environmental and industrial monitoring scenarios will be contrasted by future trends, challenges, and opportunities for the development of next-generation portable optical gas-sensing platforms that take advantage of a modular and tailorable device design.
Collapse
Affiliation(s)
- Diandra
Nunes Barreto
- Institute
of Chemistry, Federal University of Uberlândia, Uberlândia 38400-902, MG, Brazil
| | - Vjekoslav Kokoric
- Institute
for Microanalysis Systems, Hahn-Schickard, Ulm 89077, Germany
| | | | - Boris Mizaikoff
- Institute
for Microanalysis Systems, Hahn-Schickard, Ulm 89077, Germany
- Institute
of Analytical and Bioanalytical Chemistry, Ulm University, Ulm 89081, Germany
- e-mail:
| |
Collapse
|
28
|
Review of Underwater Sensing Technologies and Applications. SENSORS 2021; 21:s21237849. [PMID: 34883851 PMCID: PMC8659509 DOI: 10.3390/s21237849] [Citation(s) in RCA: 13] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/22/2021] [Revised: 11/08/2021] [Accepted: 11/15/2021] [Indexed: 12/17/2022]
Abstract
As the ocean development process speeds up, the technical means of ocean exploration are being upgraded. Due to the characteristics of seawater and the complex underwater environment, conventional measurement and sensing methods used for land are difficult to apply in the underwater environment directly. Especially for the seabed topography, it is impossible to carry out long-distance and accurate detection via electromagnetic waves. Therefore, various types of acoustic and even optical sensing devices for underwater applications have come into use. Equipped by submersibles, those underwater sensors can sense underwater wide-range and accurately. Moreover, the development of sensor technology will be modified and optimized according to the needs of ocean exploitation. This paper has made a summary of the ocean sensing technologies applied in some critical underwater scenarios, including geological surveys, navigation and communication, marine environmental parameters, and underwater inspections. In order to contain as many submersible-based sensors as possible, we have to make a trade-off on breadth and depth. In the end, the authors predict the development trend of underwater sensor technology based on the future ocean exploration requirements.
Collapse
|
29
|
A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing. Sci Rep 2021; 11:22915. [PMID: 34824328 PMCID: PMC8616948 DOI: 10.1038/s41598-021-02121-5] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/01/2021] [Accepted: 11/03/2021] [Indexed: 12/02/2022] Open
Abstract
The gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturized, energy efficient light sources is of critical importance for the monolithic integration of MIR sensors. Here, we present an on-chip broadband thermal MIR source fabricated by combining a complementary metal oxide semiconductor (CMOS) micro-hotplate with a dielectric-encapsulated carbon nanotube (CNT) blackbody layer. The micro-hotplate was used during fabrication as a micro-reactor to facilitate high temperature (>700 \documentclass[12pt]{minimal}
\usepackage{amsmath}
\usepackage{wasysym}
\usepackage{amsfonts}
\usepackage{amssymb}
\usepackage{amsbsy}
\usepackage{mathrsfs}
\usepackage{upgreek}
\setlength{\oddsidemargin}{-69pt}
\begin{document}$$^{\circ }$$\end{document}∘C) growth of the CNT layer and also for post-growth thermal annealing. We demonstrate, for the first time, stable extended operation in air of devices with a dielectric-encapsulated CNT layer at heater temperatures above 600 \documentclass[12pt]{minimal}
\usepackage{amsmath}
\usepackage{wasysym}
\usepackage{amsfonts}
\usepackage{amssymb}
\usepackage{amsbsy}
\usepackage{mathrsfs}
\usepackage{upgreek}
\setlength{\oddsidemargin}{-69pt}
\begin{document}$$^{\circ }$$\end{document}∘C. The demonstrated devices exhibit almost unitary emissivity across the entire MIR spectrum, offering an ideal solution for low-cost, highly-integrated MIR spectroscopy for the Internet of Things.
Collapse
|
30
|
Alberti S, Datta A, Jágerská J. Integrated Nanophotonic Waveguide-Based Devices for IR and Raman Gas Spectroscopy. SENSORS (BASEL, SWITZERLAND) 2021; 21:7224. [PMID: 34770531 PMCID: PMC8587819 DOI: 10.3390/s21217224] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/17/2021] [Revised: 10/25/2021] [Accepted: 10/26/2021] [Indexed: 11/17/2022]
Abstract
On-chip devices for absorption spectroscopy and Raman spectroscopy have been developing rapidly in the last few years, triggered by the growing availability of compact and affordable tunable lasers, detectors, and on-chip spectrometers. Material processing that is compatible with mass production has been proven to be capable of long low-loss waveguides of sophisticated designs, which are indispensable for high-light-analyte interactions. Sensitivity and selectivity have been further improved by the development of sorbent cladding. In this review, we discuss the latest advances and challenges in the field of waveguide-enhanced Raman spectroscopy (WERS) and waveguide infrared absorption spectroscopy (WIRAS). The development of integrated light sources and detectors toward miniaturization will be presented, together with the recent advances on waveguides and cladding to improve sensitivity. The latest reports on gas-sensing applications and main configurations for WERS and WIRAS will be described, and the most relevant figures of merit and limitations of different sensor realizations summarized.
Collapse
Affiliation(s)
- Sebastián Alberti
- Department of Physics and Technology, UiT the Arctic University of Norway, 9019 Tromsø, Norway; (A.D.); (J.J.)
| | | | | |
Collapse
|
31
|
Alimagham FC, Hutter D, Marco-García N, Gould E, Highland VH, Huefner A, Giorgi-Coll S, Killen MJ, Zakrzewska AP, Elliott SR, Carpenter KLH, Hutchinson PJ, Hutter T. Cerebral Microdialysate Metabolite Monitoring using Mid-infrared Spectroscopy. Anal Chem 2021; 93:11929-11936. [PMID: 34432431 PMCID: PMC8427560 DOI: 10.1021/acs.analchem.1c01149] [Citation(s) in RCA: 10] [Impact Index Per Article: 3.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/16/2021] [Accepted: 08/05/2021] [Indexed: 11/28/2022]
Abstract
The brains of patients suffering from traumatic brain-injury (TBI) undergo dynamic chemical changes in the days following the initial trauma. Accurate and timely monitoring of these changes is of paramount importance for improved patient outcome. Conventional brain-chemistry monitoring is performed off-line by collecting and manually transferring microdialysis samples to an enzymatic colorimetric bedside analyzer every hour, which detects and quantifies the molecules of interest. However, off-line, hourly monitoring means that any subhourly neurochemical changes, which may be detrimental to patients, go unseen and thus untreated. Mid-infrared (mid-IR) spectroscopy allows rapid, reagent-free, molecular fingerprinting of liquid samples, and can be easily integrated with microfluidics. We used mid-IR transmission spectroscopy to analyze glucose, lactate, and pyruvate, three relevant brain metabolites, in the extracellular brain fluid of two TBI patients, sampled via microdialysis. Detection limits of 0.5, 0.2, and 0.1 mM were achieved for pure glucose, lactate, and pyruvate, respectively, in perfusion fluid using an external cavity-quantum cascade laser (EC-QCL) system with an integrated transmission flow-cell. Microdialysates were collected hourly, then pooled (3-4 h), and measured consecutively using the standard ISCUSflex analyzer and the EC-QCL system. There was a strong correlation between the compound concentrations obtained using the conventional bedside analyzer and the acquired mid-IR absorbance spectra, where a partial-least-squares regression model was implemented to compute concentrations. This study demonstrates the potential utility of mid-IR spectroscopy for continuous, automated, reagent-free, and online monitoring of the dynamic chemical changes in TBI patients, allowing a more timely response to adverse brain metabolism and consequently improving patient outcomes.
Collapse
Affiliation(s)
- Farah C. Alimagham
- Department
of Chemistry, University of Cambridge, Cambridge CB2 1EW, United Kingdom
- Division
of Neurosurgery, Department of Clinical Neurosciences, University of Cambridge, Cambridge CB2 0QQ, United Kingdom
| | - Dan Hutter
- Department
of Electrical and Computer Engineering, The University of Texas at Austin, Austin, Texas 78712, United States
| | - Núria Marco-García
- Division
of Neurosurgery, Department of Clinical Neurosciences, University of Cambridge, Cambridge CB2 0QQ, United Kingdom
| | - Emma Gould
- Division
of Neurosurgery, Department of Clinical Neurosciences, University of Cambridge, Cambridge CB2 0QQ, United Kingdom
| | - Victoria H. Highland
- Department
of Chemistry, University of Cambridge, Cambridge CB2 1EW, United Kingdom
| | - Anna Huefner
- Department
of Chemistry, University of Cambridge, Cambridge CB2 1EW, United Kingdom
| | - Susan Giorgi-Coll
- Division
of Neurosurgery, Department of Clinical Neurosciences, University of Cambridge, Cambridge CB2 0QQ, United Kingdom
| | - Monica J. Killen
- Division
of Neurosurgery, Department of Clinical Neurosciences, University of Cambridge, Cambridge CB2 0QQ, United Kingdom
| | - Agnieszka P. Zakrzewska
- Division
of Neurosurgery, Department of Clinical Neurosciences, University of Cambridge, Cambridge CB2 0QQ, United Kingdom
| | - Stephen R. Elliott
- Department
of Chemistry, University of Cambridge, Cambridge CB2 1EW, United Kingdom
| | - Keri L. H. Carpenter
- Division
of Neurosurgery, Department of Clinical Neurosciences, University of Cambridge, Cambridge CB2 0QQ, United Kingdom
| | - Peter J. Hutchinson
- Division
of Neurosurgery, Department of Clinical Neurosciences, University of Cambridge, Cambridge CB2 0QQ, United Kingdom
| | - Tanya Hutter
- Materials
Science and Engineering Program and Texas Materials Institute, University of Texas at Austin, Austin, Texas 78712, United States
- Walker
Department of Mechanical Engineering, The
University of Texas at Austin, Austin, Texas 78712, United States
| |
Collapse
|
32
|
Vitoria I, Zamarreño CR, Ozcariz A, Imas JJ, Matias IR. Beyond near-infrared lossy mode resonances with fluoride glass optical fiber. OPTICS LETTERS 2021; 46:2892-2895. [PMID: 34129567 DOI: 10.1364/ol.428533] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/20/2021] [Accepted: 05/12/2021] [Indexed: 06/12/2023]
Abstract
The objective of this Letter consists of the exploration of the lossy mode resonance (LMR) phenomenon beyond the near-infrared region and specifically in the short wave infrared region (SWIR) and medium wave infrared region (MWIR). The experimental and theoretical results show for the first time, to the best of our knowledge, not only LMRs in these regions, but also the utilization of fluoride glass optical fiber associated with this phenomenon. The fabricated devices consist of a nanometric thin-film of titanium dioxide used as LMR generating material, which probed extraordinary sensitivities to external refractive index (RI) variations. RI sensitivity was studied in the SWIR and MWIR under different conditions, such as the LMR wavelength range or the order of resonance, showing a tremendous potential for the detection of minute concentrations of gaseous or biological compounds in different media.
Collapse
|
33
|
Designing Mid-Infrared Gold-Based Plasmonic Slot Waveguides for CO 2-Sensing Applications. SENSORS 2021; 21:s21082669. [PMID: 33920116 PMCID: PMC8070310 DOI: 10.3390/s21082669] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/24/2021] [Revised: 04/01/2021] [Accepted: 04/08/2021] [Indexed: 11/18/2022]
Abstract
Plasmonic slot waveguides have attracted much attention due to the possibility of high light confinement, although they suffer from relatively high propagation loss originating from the presence of a metal. Although the tightly confined light in a small gap leads to a high confinement factor, which is crucial for sensing applications, the use of plasmonic guiding at the same time results in a low propagation length. Therefore, the consideration of a trade-off between the confinement factor and the propagation length is essential to optimize the waveguide geometries. Using silicon nitride as a platform as one of the most common material systems, we have investigated free-standing and asymmetric gold-based plasmonic slot waveguides designed for sensing applications. A new figure of merit (FOM) is introduced to optimize the waveguide geometries for a wavelength of 4.26 µm corresponding to the absorption peak of CO2, aiming at the enhancement of the confinement factor and propagation length simultaneously. For the free-standing structure, the achieved FOM is 274.6 corresponding to approximately 42% and 868 µm for confinement factor and propagation length, respectively. The FOM for the asymmetric structure shows a value of 70.1 which corresponds to 36% and 264 µm for confinement factor and propagation length, respectively.
Collapse
|
34
|
Consani C, Dubois F, Auböck G. Figures of merit for mid-IR evanescent-wave absorption sensors and their simulation by FEM methods. OPTICS EXPRESS 2021; 29:9723-9736. [PMID: 33820126 DOI: 10.1364/oe.415825] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/24/2020] [Accepted: 02/15/2021] [Indexed: 06/12/2023]
Abstract
Proper optimization of a photonic structure for sensing applications is of extreme importance for integrated sensor design. Here we discuss on the definition of suitable parameters to determine the impact of photonic structure designs for evanescent-wave absorption sensors on the achievable resolution and sensitivity. In particular, we analyze the most widespread quantities used to classify photonic structures in the context of sensing, namely the evanescent-field ratio (or evanescent power factor) and the confinement factor Γ. We show that, somewhat counterintuitively, the confinement factor is the only parameter that can reliably describe the absorption of the evanescent-field in the surrounding medium, and, by quantifying the discrepancy between the two parameters for a set of realistic photonic structures, we demonstrate that using the evanescent-field ratio can lead to a wrong classification of the performance of different structures for absorption sensing. We finally discuss the most convenient simulation strategies to retrieve the confinement factor by FEM simulations.
Collapse
|
35
|
An incandescent metasurface for quasimonochromatic polarized mid-wave infrared emission modulated beyond 10 MHz. Nat Commun 2021; 12:1492. [PMID: 33674609 PMCID: PMC7935924 DOI: 10.1038/s41467-021-21752-w] [Citation(s) in RCA: 12] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/12/2020] [Accepted: 01/13/2021] [Indexed: 11/21/2022] Open
Abstract
Incandescent sources such as hot membranes and globars are widely used for mid-infrared spectroscopic applications. The emission properties of these sources can be tailored by means of resonant metasurfaces: control of the spectrum, polarization, and directivity have been reported. For detection or communication applications, fast temperature modulation is desirable but is still a challenge due to thermal inertia. Reducing thermal inertia can be achieved using nanoscale structures at the expense of a low absorption and emission cross-section. Here, we introduce a metasurface that combines nanoscale heaters to ensure fast thermal response and nanophotonic resonances to provide large monochromatic and polarized emissivity. The metasurface is based on platinum and silicon nitride and can sustain high temperatures. We report a peak emissivity of 0.8 and an operation up to 20 MHz, six orders of magnitude faster than commercially available hot membranes. Incandescent sources are needed for mid-infrared spectroscopy. Here, the authors present a metasurface of nanoheaters that enables fast thermal modulation beyond 10 MHz and emissivity with well controlled emission spectrum and polarization.
Collapse
|
36
|
Li N, Tao L, Yi H, Kim CS, Kim M, Canedy CL, Merritt CD, Bewley WW, Vurgaftman I, Meyer JR, Zondlo MA. Methane detection using an interband-cascade LED coupled to a hollow-core fiber. OPTICS EXPRESS 2021; 29:7221-7231. [PMID: 33726228 DOI: 10.1364/oe.415724] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/01/2020] [Accepted: 01/21/2021] [Indexed: 06/12/2023]
Abstract
Midwave infrared interband-cascade light-emitting devices (ICLEDs) have the potential to improve the selectivity, stability, and sensitivity of low-cost gas sensors. We demonstrate a broadband direct absorption CH4 sensor with an ICLED coupled to a plastic hollow-core fiber (1 m length, 1500 µm inner diameter). The sensor achieves a 1σ noise equivalent absorption of approximately 0.2 ppmv CH4 at 1 Hz, while operating at a low drive power of 0.5 mW. A low-cost sub-ppmv CH4 sensor would make monitoring emissions more affordable and more accessible for many relevant industries, such as the petroleum, agriculture, and waste industries.
Collapse
|
37
|
Montesinos-Ballester M, Lafforgue C, Frigerio J, Ballabio A, Vakarin V, Liu Q, Ramirez JM, Roux XL, Bouville D, Barzaghi A, Alonso-Ramos C, Vivien L, Isella G, Marris-Morini D. On-Chip Mid-Infrared Supercontinuum Generation from 3 to 13 μm Wavelength. ACS PHOTONICS 2020; 7:3423-3429. [PMID: 33365361 PMCID: PMC7747866 DOI: 10.1021/acsphotonics.0c01232] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/04/2020] [Indexed: 05/14/2023]
Abstract
Midinfrared spectroscopy is a universal way to identify chemical and biological substances. Indeed, when interacting with a light beam, most molecules are responsible for absorption at specific wavelengths in the mid-IR spectrum, allowing to detect and quantify small traces of substances. On-chip broadband light sources in the mid-infrared are thus of significant interest for compact sensing devices. In that regard, supercontinuum generation offers a mean to efficiently perform coherent light conversion over an ultrawide spectral range, in a single and compact device. This work reports the experimental demonstration of on-chip two-octave supercontinuum generation in the mid-infrared wavelength, ranging from 3 to 13 μm (that is larger than 2500 cm-1) and covering almost the full transparency window of germanium. Such an ultrawide spectrum is achieved thanks to the unique features of Ge-rich graded SiGe waveguides, which allow second-order dispersion tailoring and low propagation losses over a wide wavelength range. The influence of the pump wavelength and power on the supercontinuum spectra has been studied. A good agreement between the numerical simulations and the experimental results is reported. Furthermore, a very high coherence is predicted in the entire spectrum. These results pave the way for wideband, coherent, and compact mid-infrared light sources by using a single device and compatible with large-scale fabrication processes.
Collapse
Affiliation(s)
- Miguel Montesinos-Ballester
- Centre
de Nanosciences et de Nanotechnologies, Université Paris-Saclay, CNRS, 91120 Palaiseau, France
- E-mail:
| | - Christian Lafforgue
- Centre
de Nanosciences et de Nanotechnologies, Université Paris-Saclay, CNRS, 91120 Palaiseau, France
| | - Jacopo Frigerio
- L-NESS,
Dipartimento di Fisica, Politecnico di Milano,
Polo di Como, Via Anzani 42, 22100 Como, Italy
| | - Andrea Ballabio
- L-NESS,
Dipartimento di Fisica, Politecnico di Milano,
Polo di Como, Via Anzani 42, 22100 Como, Italy
| | - Vladyslav Vakarin
- Centre
de Nanosciences et de Nanotechnologies, Université Paris-Saclay, CNRS, 91120 Palaiseau, France
| | - Qiankun Liu
- Centre
de Nanosciences et de Nanotechnologies, Université Paris-Saclay, CNRS, 91120 Palaiseau, France
| | - Joan Manel Ramirez
- Centre
de Nanosciences et de Nanotechnologies, Université Paris-Saclay, CNRS, 91120 Palaiseau, France
| | - Xavier Le Roux
- Centre
de Nanosciences et de Nanotechnologies, Université Paris-Saclay, CNRS, 91120 Palaiseau, France
| | - David Bouville
- Centre
de Nanosciences et de Nanotechnologies, Université Paris-Saclay, CNRS, 91120 Palaiseau, France
| | - Andrea Barzaghi
- L-NESS,
Dipartimento di Fisica, Politecnico di Milano,
Polo di Como, Via Anzani 42, 22100 Como, Italy
| | - Carlos Alonso-Ramos
- Centre
de Nanosciences et de Nanotechnologies, Université Paris-Saclay, CNRS, 91120 Palaiseau, France
| | - Laurent Vivien
- Centre
de Nanosciences et de Nanotechnologies, Université Paris-Saclay, CNRS, 91120 Palaiseau, France
| | - Giovanni Isella
- L-NESS,
Dipartimento di Fisica, Politecnico di Milano,
Polo di Como, Via Anzani 42, 22100 Como, Italy
| | - Delphine Marris-Morini
- Centre
de Nanosciences et de Nanotechnologies, Université Paris-Saclay, CNRS, 91120 Palaiseau, France
| |
Collapse
|
38
|
Burgués J, Marco S. Environmental chemical sensing using small drones: A review. THE SCIENCE OF THE TOTAL ENVIRONMENT 2020; 748:141172. [PMID: 32805561 DOI: 10.1016/j.scitotenv.2020.141172] [Citation(s) in RCA: 41] [Impact Index Per Article: 10.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/14/2020] [Revised: 07/08/2020] [Accepted: 07/20/2020] [Indexed: 06/11/2023]
Abstract
Recent advances in miniaturization of chemical instrumentation and in low-cost small drones are catalyzing exponential growth in the use of such platforms for environmental chemical sensing applications. The versatility of chemically sensitive drones is reflected by their rapid adoption in scientific, industrial, and regulatory domains, such as in atmospheric research studies, industrial emission monitoring, and in enforcement of environmental regulations. As a result of this interdisciplinarity, progress to date has been reported across a broad spread of scientific and non-scientific databases, including scientific journals, press releases, company websites, and field reports. The aim of this paper is to assemble all of these pieces of information into a comprehensive, structured and updated review of the field of chemical sensing using small drones. We exhaustively review current and emerging applications of this technology, as well as sensing platforms and algorithms developed by research groups and companies for tasks such as gas concentration mapping, source localization, and flux estimation. We conclude with a discussion of the most pressing technological and regulatory limitations in current practice, and how these could be addressed by future research.
Collapse
Affiliation(s)
- Javier Burgués
- Institute for Bioengineering of Catalonia (IBEC), The Barcelona Institute of Science and Technology, Baldiri Reixac 10-12, 08028 Barcelona, Spain; Department of Electronics and Biomedical Engineering, Universitat de Barcelona, Marti i Franqués 1, 08028 Barcelona, Spain.
| | - Santiago Marco
- Institute for Bioengineering of Catalonia (IBEC), The Barcelona Institute of Science and Technology, Baldiri Reixac 10-12, 08028 Barcelona, Spain; Department of Electronics and Biomedical Engineering, Universitat de Barcelona, Marti i Franqués 1, 08028 Barcelona, Spain
| |
Collapse
|
39
|
Białek E, Włodarski M, Norek M. Fabrication of Porous Anodic Alumina (PAA) by High-Temperature Pulse-Anodization: Tuning the Optical Characteristics of PAA-Based DBR in the NIR-MIR Region. MATERIALS (BASEL, SWITZERLAND) 2020; 13:E5622. [PMID: 33317144 PMCID: PMC7764316 DOI: 10.3390/ma13245622] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/12/2020] [Revised: 12/03/2020] [Accepted: 12/06/2020] [Indexed: 11/29/2022]
Abstract
In this work, the influence of various electrochemical parameters on the production of porous anodic alumina (PAA)-based DBRs (distributed Bragg reflector) during high-temperature-pulse-anodization was studied. It was observed that lowering the temperature from 30 to 27 °C brings about radical changes in the optical performance of the DBRs. The multilayered PAA fabricated at 27 °C did not show optical characteristics typical for DBR. The DBR performance was further tuned at 30 °C. The current recovery (iamax) after application of subsequent UH pulses started to stabilize upon decreasing high (UH) and low (UL) voltage pulses, which was reflected in a smaller difference between initial and final thickness of alternating dH and dL segments (formed under UH and UL, respectively) and a better DBR performance. Shortening UH pulse duration resulted in a progressive shift of photonic stopbands (PSBs) towards the blue part of the spectrum while keeping intensive and symmetric PSBs in the NIR-MIR range. Despite the obvious improvement of the DBR performance by modulation of electrochemical parameters, the problem with regarding full control over the homogeneous formation of dH+dL pairs remains. Solving this problem will certainly lead to the production of affordable and efficient PAA-based photonic crystals with tunable photonic properties in the NIR-MIR region.
Collapse
Affiliation(s)
- Ewelina Białek
- Faculty of Advanced Technologies and Chemistry, Institute of Materials Science and Engineering, Military University of Technology, Str. gen Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland;
| | - Maksymilian Włodarski
- Institute of Optoelectronics, Military University of Technology, Str. gen. Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland;
| | - Małgorzata Norek
- Faculty of Advanced Technologies and Chemistry, Institute of Materials Science and Engineering, Military University of Technology, Str. gen Sylwestra Kaliskiego 2, 00-908 Warsaw, Poland;
| |
Collapse
|
40
|
Cui H, Wang F, Huang Q, Yan J, Cen K. Sensitive detection of NO using a compact portable CW DFB-QCL-based WMS sensor. APPLIED OPTICS 2020; 59:9491-9498. [PMID: 33104669 DOI: 10.1364/ao.402484] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/10/2020] [Accepted: 10/01/2020] [Indexed: 06/11/2023]
Abstract
This paper introduces a compact and portable sensor based on mid-infrared absorption spectroscopy for NO detection employing a room-temperature continuous wave (CW) distributed feedback quantum cascade laser (DFB-QCL) emitting at 1900.08cm-1. A software-based digital signal generator and lock-in amplifier, in combination with the wavelength modulation spectroscopy (WMS) technique, were used for the concentration measurement of NO. In addition, a Gabor filter denoising method was developed to improve the performance of the measurement system. As a result, a minimum detection limit of 42 ppbv can be achieved at 3 s integration time, and a measurement precision of 450 ppbv can be reached with a time resolution of 0.1 s. The performance of the compact portable sensor was verified by a series of experiments, denoting great potential of field application for sensitive NO sensing.
Collapse
|
41
|
Non-dispersive infrared multi-gas sensing via nanoantenna integrated narrowband detectors. Nat Commun 2020; 11:5245. [PMID: 33067455 PMCID: PMC7567865 DOI: 10.1038/s41467-020-19085-1] [Citation(s) in RCA: 43] [Impact Index Per Article: 10.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/28/2019] [Accepted: 09/24/2020] [Indexed: 12/22/2022] Open
Abstract
Non-dispersive infrared (NDIR) spectroscopy analyzes the concentration of target gases based on their characteristic infrared absorption. In conventional NDIR gas sensors, an infrared detector has to pair with a bandpass filter to select the target gas. However, multiplexed NDIR gas sensing requires multiple pairs of bandpass filters and detectors, which makes the sensor bulky and expensive. Here, we propose a multiplexed NDIR gas sensing platform consisting of a narrowband infrared detector array as read-out. By integrating plasmonic metamaterial absorbers with pyroelectric detectors at the pixel level, the detectors exhibit spectrally tunable and narrowband photoresponses, circumventing the need for separate bandpass filter arrays. We demonstrate the sensing of H2S, CH4, CO2, CO, NO, CH2O, NO2, SO2. The detection limits of common gases such as CH4, CO2, and CO are 63 ppm, 2 ppm, and 11 ppm, respectively. We also demonstrate the deduction of the concentrations of two target gases in a mixture.
Collapse
|
42
|
Variable Angle Spectroscopic Ellipsometry Characterization of Reduced Graphene Oxide Stabilized with Poly(Sodium 4-Styrenesulfonate). COATINGS 2020. [DOI: 10.3390/coatings10080743] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/17/2022]
Abstract
Lately, the optical properties of Graphene Oxide (GO) and Reduced Graphene Oxide (RGO) films have been studied in the ultraviolet and visible spectral range. However, the accurate optical properties in the extended near-infrared and mid-infrared range have not been published yet. In this work, we report a Variable Angle Spectroscopic Ellipsometry (VASE) characterization of GO thin films dip-coated on SiO2/Si substrates and thermally reduced GO films in the 0.38–4.1 eV photon energy range. Moreover, the optical properties of RGO stabilized with poly(sodium 4-styrenesulfonate) (PSS) films dip-coated on SiO2/Si substrates are studied in the same range for the first time. The Lorentz optical models fit well with the experimental data. In addition, the morphological properties of the samples were investigated by Scanning Electron Microscopy (SEM) analysis.
Collapse
|
43
|
Muhiyudin M, Hutson D, Gibson D, Waddell E, Song S, Ahmadzadeh S. Miniaturised Infrared Spectrophotometer for Low Power Consumption Multi-Gas Sensing. SENSORS 2020; 20:s20143843. [PMID: 32660151 PMCID: PMC7411597 DOI: 10.3390/s20143843] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/07/2020] [Revised: 06/25/2020] [Accepted: 07/06/2020] [Indexed: 11/29/2022]
Abstract
Concept, design and practical implementation of a miniaturized spectrophotometer, utilized as a mid-infrared-based multi gas sensor is described. The sensor covers an infrared absorption wavelength range of 2.9 to 4.8 um, providing detection capabilities for carbon dioxide, carbon monoxide, nitrous oxide, sulphur dioxide, ammonia and methane. A lead selenide photo-detector array and customized MEMS-based micro-hotplate are used as the detector and broadband infrared source, respectively. The spectrophotometer optics are based on an injection moulded Schwarzschild configuration incorporating optical pass band filters for the spectral discrimination. This work explores the effects of using both fixed-line pass band and linear variable optical filters. We report the effectiveness of this low-power-consumption miniaturized spectrophotometer as a stand-alone single and multi-gas sensor, usage of a distinct reference channel during gas measurements, development of ideal optical filters and spectral control of the source and detector. Results also demonstrate the use of short-time pulsed inputs as an effective and efficient way of operating the sensor in a low-power-consumption mode. We describe performance of the spectrometer as a multi-gas sensor, optimizing individual component performances, power consumption, temperature sensitivity and gas properties using modelling and customized experimental procedures.
Collapse
|
44
|
Antiresonant Hollow-Core Fiber-Based Dual Gas Sensor for Detection of Methane and Carbon Dioxide in the Near- and Mid-Infrared Regions. SENSORS 2020; 20:s20143813. [PMID: 32650459 PMCID: PMC7412241 DOI: 10.3390/s20143813] [Citation(s) in RCA: 33] [Impact Index Per Article: 8.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/16/2020] [Revised: 07/04/2020] [Accepted: 07/06/2020] [Indexed: 11/20/2022]
Abstract
In this work, we present for the first time a laser-based dual gas sensor utilizing a silica-based Antiresonant Hollow-Core Fiber (ARHCF) operating in the Near- and Mid-Infrared spectral region. A 1-m-long fiber with an 84-µm diameter air-core was implemented as a low-volume absorption cell in a sensor configuration utilizing the simple and well-known Wavelength Modulation Spectroscopy (WMS) method. The fiber was filled with a mixture of methane (CH4) and carbon dioxide (CO2), and a simultaneous detection of both gases was demonstrated targeting their transitions at 3.334 µm and 1.574 µm, respectively. Due to excellent guidance properties of the fiber and low background noise, the proposed sensor reached a detection limit down to 24 parts-per-billion by volume for CH4 and 144 parts-per-million by volume for CO2. The obtained results confirm the suitability of ARHCF for efficient use in gas sensing applications for over a broad spectral range. Thanks to the demonstrated low loss, such fibers with lengths of over one meter can be used for increasing the laser-gas molecules interaction path, substituting bulk optics-based multipass cells, while delivering required flexibility, compactness, reliability and enhancement in the sensor’s sensitivity.
Collapse
|
45
|
Mahbub P, Noori A, Parry JS, Davis J, Lucieer A, Macka M. Continuous and real-time indoor and outdoor methane sensing with portable optical sensor using rapidly pulsed IR LEDs. Talanta 2020; 218:121144. [PMID: 32797901 DOI: 10.1016/j.talanta.2020.121144] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/25/2020] [Revised: 05/04/2020] [Accepted: 05/07/2020] [Indexed: 02/07/2023]
Abstract
We designed a simple, portable, low-cost and low-weight nondispersive infrared (NDIR) spectroscopy-based system for continuous remote sensing of atmospheric methane (CH4) with rapidly pulsed near-infrared light emitting diodes (NIR LED) at 1.65 μm. The use of a microcontroller with a field programmable gate array (μC-FPGA) enables on-the-fly and wireless streaming and processing of large data streams (~2 Gbit/s). The investigated NIR LED detection system offers favourable limits of detection (LOD) of 300 ppm (±5%) CH4,. All the generated raw data were processed automatically on-the-fly in the μC-FPGA and transferred wirelessly via a network connection. The sensing device was deployed for the portable sensing of atmospheric CH4 at a local landfill, resulting in quantified concentrations within the sampling area (ca 400 m2) in the range of 0.5%-3.35% CH4. This NIR LED-based sensor system offers a simple low-cost solution for continuous real-time, quantitative, and direct measurement of CH4 concentrations in indoor and outdoor environments, yet with the flexibility provided by the custom programmable software. It possesses future potential for remote monitoring of gases directly from mobile platforms such as smartphones and unmanned aerial vehicles (UAV).
Collapse
Affiliation(s)
- Parvez Mahbub
- Australian Centre for Research on Separation Science (ACROSS) and School of Physical Sciences University of Tasmania, Private Bag 75, Hobart, 7001, Australia; Institute for Sustainable Industries and Liveable Cities, Victoria University, Footscray Park Campus, Melbourne, Victoria, 3011, Australia
| | - Ansara Noori
- Australian Centre for Research on Separation Science (ACROSS) and School of Physical Sciences University of Tasmania, Private Bag 75, Hobart, 7001, Australia
| | - John S Parry
- Central Science Laboratory, University of Tasmania, Private Bag 74, Hobart, 7001, Australia
| | - John Davis
- Central Science Laboratory, University of Tasmania, Private Bag 74, Hobart, 7001, Australia
| | - Arko Lucieer
- School of Land and Food, University of Tasmania, Private Bag 76, Hobart, 7001, Australia
| | - Mirek Macka
- Australian Centre for Research on Separation Science (ACROSS) and School of Physical Sciences University of Tasmania, Private Bag 75, Hobart, 7001, Australia; Department of Chemistry and Biochemistry, Mendel University in Brno, Zemedelska 1, 613 00, Brno, Czech Republic; Central European Institute of Technology, Brno University of Technology, Purkynova 123, 612 00, Brno, Czech Republic.
| |
Collapse
|
46
|
Dai Y, Ali SZ, Hopper R, Falco C, Pandey P, Oxley C, Popa D, Udrea F. Crosstalk Analysis of a CMOS Single Membrane Thermopile Detector Array. SENSORS 2020; 20:s20092573. [PMID: 32366021 PMCID: PMC7248952 DOI: 10.3390/s20092573] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/31/2020] [Revised: 04/24/2020] [Accepted: 04/28/2020] [Indexed: 01/04/2023]
Abstract
We present a new experimental technique to characterise the crosstalk of a thermopile-based thermal imager, based on bi-directional electrical heating of thermopile elements. The new technique provides a significantly simpler and more reliable method to determine the crosstalk, compared to a more complex experimental setup with a laser source. The technique is used to characterise a novel single-chip array, fabricated on a single dielectric membrane. We propose a theoretical model to simulate the crosstalk, which shows good agreement with the experimental results. Our results allow a better understanding of the thermal effects in these devices, which are at the center of a rising market of industrial and consumer applications.
Collapse
Affiliation(s)
- Ying Dai
- Department of Engineering, University of Cambridge, Cambridge CB3 0FA, UK; (R.H.); (D.P.); (F.U.)
- Correspondence: ; Tel.: +44-(0)-1223-748311
| | | | - Richard Hopper
- Department of Engineering, University of Cambridge, Cambridge CB3 0FA, UK; (R.H.); (D.P.); (F.U.)
| | - Claudio Falco
- Flusso Limited, Cambridge CB4 0DL, UK; (S.Z.A.); (C.F.)
| | - Prakash Pandey
- Faculty of Computing, Engineering and Media, De Montfort University, Leicester LE1 9BH, UK; (P.P.); (C.O.)
| | - Chris Oxley
- Faculty of Computing, Engineering and Media, De Montfort University, Leicester LE1 9BH, UK; (P.P.); (C.O.)
| | - Daniel Popa
- Department of Engineering, University of Cambridge, Cambridge CB3 0FA, UK; (R.H.); (D.P.); (F.U.)
| | - Florin Udrea
- Department of Engineering, University of Cambridge, Cambridge CB3 0FA, UK; (R.H.); (D.P.); (F.U.)
| |
Collapse
|
47
|
Beć KB, Grabska J, Huck CW. Biomolecular and bioanalytical applications of infrared spectroscopy - A review. Anal Chim Acta 2020; 1133:150-177. [PMID: 32993867 DOI: 10.1016/j.aca.2020.04.015] [Citation(s) in RCA: 70] [Impact Index Per Article: 17.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/31/2019] [Revised: 04/05/2020] [Accepted: 04/06/2020] [Indexed: 12/11/2022]
Abstract
Infrared (IR; or mid-infrared, MIR; 4000-400 cm-1; 2500-25,000 nm) spectroscopy has become one of the most powerful and versatile tools at the disposal of modern bioscience. Because of its high molecular specificity, applicability to wide variety of samples, rapid measurement and non-invasivity, IR spectroscopy forms a potent approach to elucidate qualitative and quantitative information from various kinds of biological material. For these reasons, it became an established bioanalytical technique with diverse applications. This work aims to be a comprehensive and critical review of the recent accomplishments in the field of biomolecular and bioanalytical IR spectroscopy. That progress is presented on a wider background, with fundamental characteristics, the basic principles of the technique outlined, and its scientific capability directly compared with other methods being used in similar fields (e.g. near-infrared, Raman, fluorescence). The article aims to present a complete examination of the topic, as it touches the background phenomena, instrumentation, spectra processing and data analytical methods, spectra interpretation and related information. To suit this goal, the article includes a tutorial information essential to obtain a thorough perspective of bio-related applications of the reviewed methodologies. The importance of the fundamental factors to the final performance and applicability of IR spectroscopy in various areas of bioscience is explained. This information is interpreted in critical way, with aim to gain deep understanding why IR spectroscopy finds extraordinarily intensive use in this remarkably diverse and dynamic field of research and utility. The major focus is placed on the diversity of the applications in which IR biospectroscopy has been established so far and those onto which it is expanding nowadays. This includes qualitative and quantitative analytical spectroscopy, spectral imaging, medical diagnosis, monitoring of biophysical processes, and studies of physicochemical properties and dynamics of biomolecules. The application potential of IR spectroscopy in light of the current accomplishments and the future prospects is critically evaluated and its significance in the progress of bioscience is comprehensively presented.
Collapse
Affiliation(s)
- Krzysztof B Beć
- Institute of Analytical Chemistry and Radiochemistry, Center for Chemistry and Biomedicine, University of Innsbruck, Innrain 80/82, A-6020, Innsbruck, Austria.
| | - Justyna Grabska
- Institute of Analytical Chemistry and Radiochemistry, Center for Chemistry and Biomedicine, University of Innsbruck, Innrain 80/82, A-6020, Innsbruck, Austria
| | - Christian W Huck
- Institute of Analytical Chemistry and Radiochemistry, Center for Chemistry and Biomedicine, University of Innsbruck, Innrain 80/82, A-6020, Innsbruck, Austria.
| |
Collapse
|
48
|
Roland I, Ravaro M, Suffit S, Filloux P, Lemaître A, Favero I, Leo G. Second-Harmonic Generation in Suspended AlGaAs Waveguides: A Comparative Study. MICROMACHINES 2020; 11:E229. [PMID: 32102241 PMCID: PMC7074691 DOI: 10.3390/mi11020229] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/30/2019] [Revised: 02/15/2020] [Accepted: 02/18/2020] [Indexed: 11/23/2022]
Abstract
Due to adjustable modal birefringence, suspended AlGaAs optical waveguides with submicron transverse sections can support phase-matched frequency mixing in the whole material transparency range, even close to the material bandgap, by tuning the width-to-height ratio. Furthermore, their single-pass conversion efficiency is potentially huge, thanks to the extreme confinement of the interacting modes in the highly nonlinear and high-refractive-index core, with scattering losses lower than in selectively oxidized or quasi-phase-matched AlGaAs waveguides. Here we compare the performances of two types of suspended waveguides made of this material, designed for second-harmonic generation (SHG) in the telecom range: (a) a nanowire suspended in air by lateral tethers and (b) an ultrathin nanorib, made of a strip lying on a suspended membrane of the same material. Both devices have been fabricated from a 123 nm thick AlGaAs epitaxial layer and tested in terms of SHG efficiency, injection and propagation losses. Our results point out that the nanorib waveguide, which benefits from a far better mechanical robustness, performs comparably to the fully suspended nanowire and is well-suited for liquid sensing applications.
Collapse
Affiliation(s)
- Iännis Roland
- MPQ, Université de Paris & CNRS, 10 rue A. Domon et L. Duquet, 75013 Paris, France; (I.R.); (M.R.); (S.S.); (P.F.); (I.F.)
| | - Marco Ravaro
- MPQ, Université de Paris & CNRS, 10 rue A. Domon et L. Duquet, 75013 Paris, France; (I.R.); (M.R.); (S.S.); (P.F.); (I.F.)
| | - Stéphan Suffit
- MPQ, Université de Paris & CNRS, 10 rue A. Domon et L. Duquet, 75013 Paris, France; (I.R.); (M.R.); (S.S.); (P.F.); (I.F.)
| | - Pascal Filloux
- MPQ, Université de Paris & CNRS, 10 rue A. Domon et L. Duquet, 75013 Paris, France; (I.R.); (M.R.); (S.S.); (P.F.); (I.F.)
| | - Aristide Lemaître
- C2N, CNRS, Université Paris-Saclay, 10 boulevard T. Gobert, 91120 Palaiseau, France;
| | - Ivan Favero
- MPQ, Université de Paris & CNRS, 10 rue A. Domon et L. Duquet, 75013 Paris, France; (I.R.); (M.R.); (S.S.); (P.F.); (I.F.)
| | - Giuseppe Leo
- MPQ, Université de Paris & CNRS, 10 rue A. Domon et L. Duquet, 75013 Paris, France; (I.R.); (M.R.); (S.S.); (P.F.); (I.F.)
| |
Collapse
|
49
|
Popa D, Ali SZ, Hopper R, Dai Y, Udrea F. Smart CMOS mid-infrared sensor array. OPTICS LETTERS 2019; 44:4111-4114. [PMID: 31465341 DOI: 10.1364/ol.44.004111] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/04/2019] [Accepted: 07/15/2019] [Indexed: 05/26/2023]
Abstract
We present a novel single-chip thermopile sensor array for mid-infrared room temperature imaging. The array is fabricated on a single complementary metal-oxide-semiconductor (CMOS) dielectric membrane, composed of single-crystal silicon (Si) p+ and n+ elements, and standard CMOS tungsten metal layers for thermopile cold junction heatsinking, significantly reducing the chip size and simplifying its processing. We demonstrate a 16×16 pixel device with 34 V/W responsivity and enhanced optical absorption in the 8-14 μm waveband, with a suitable performance for gesture recognition and people-counting applications. Our simple, low-cost sensor is an attractive on-chip array for a variety of applications in the mid-infrared spectral region.
Collapse
|