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Zhang MN, Dong L, Wang LF, Huang QA. Exceptional points enhance sensing in silicon micromechanical resonators. Microsyst Nanoeng 2024; 10:12. [PMID: 38261878 PMCID: PMC10796675 DOI: 10.1038/s41378-023-00641-w] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/03/2023] [Revised: 11/09/2023] [Accepted: 11/27/2023] [Indexed: 01/25/2024]
Abstract
Exceptional points (EPs) have recently emerged as a new method for engineering the response of open physical systems, that is, systems that interact with the environment. The systems at the EPs exhibit a strong response to a small perturbation. Here, we show a method by which the sensitivity of silicon resonant sensors can be enhanced when operated at EPs. In our experiments, we use a pair of mechanically coupled silicon micromechanical resonators constituting a parity-time (PT)-symmetric dimer. Small perturbations introduced on the mechanically coupled spring cause the frequency to split from the EPs into the PT-symmetric regime without broadening the two spectrum linewidths, and this frequency splitting scales with the square root of the perturbation strength. The overall signal-to-noise ratio is still greatly enhanced, although the measured noise spectral density of the EP sensing scheme has a slight increase comparable to the traditional counterpart. Our results pave the way for resonant sensors with ultrahigh sensitivity.
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Affiliation(s)
- Man-Na Zhang
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, 210096 China
| | - Lei Dong
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, 210096 China
| | - Li-Feng Wang
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, 210096 China
| | - Qing-An Huang
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, 210096 China
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2
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Xiao Q, Wang Y, Fan J, Yi Z, Hong H, Xie X, Huang QA, Fu J, Ouyang J, Zhao X, Wang Z, Zhu Z. A computer vision and residual neural network (ResNet) combined method for automated and accurate yeast replicative aging analysis of high-throughput microfluidic single-cell images. Biosens Bioelectron 2024; 244:115807. [PMID: 37948914 DOI: 10.1016/j.bios.2023.115807] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/06/2023] [Revised: 10/17/2023] [Accepted: 10/30/2023] [Indexed: 11/12/2023]
Abstract
With the rapid development of microfluidic platforms in high-throughput single-cell culturing, laborious operation to manipulate massive budding yeast cells (Saccharomyces cerevisiae) in replicative aging studies has been greatly simplified and automated. As a result, large datasets of microscopy images bring challenges to fast and accurately determine yeast replicative lifespan (RLS), which is the most important parameter to study cell aging. Based on our microfluidic diploid yeast long-term culturing (DYLC) chip that features 1100 traps to immobilize single cells and record their proliferation and aging via time-lapse imaging, herein, a dedicated algorithm combined with computer vision and residual neural network (ResNet) was presented to efficiently process tremendous micrographs in a high-throughput and automated manner. The image-processing algorithm includes following pivotal steps: (i) segmenting multi-trap micrographs into time-lapse single-trap sub-images, (ii) labeling 8 yeast budding features and training the 18-layer ResNet, (iii) converting the ResNet predictions in analog values into digital signals, (iv) recognizing cell dynamic events, and (v) determining yeast RLS and budding time interval (BTI) ultimately. The ResNet algorithm achieved high F1 scores (over 92%) demonstrating the effectiveness and accuracy in the recognition of yeast budding events, such as bud appearance, daughter dissection and cell death. Therefore, the results conduct that similar deep learning algorithms could be tailored to analyze high-throughput microscopy images and extract multiple cell behaviors in microfluidic single-cell analysis.
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Affiliation(s)
- Qin Xiao
- Southeast University, School of Integrated Circuits, School of Electronic Science and Engineering, Key Laboratory of MEMS of Ministry of Education, Sipailou 2, Nanjing, 210096, China
| | - Yingying Wang
- Southeast University, School of Integrated Circuits, School of Electronic Science and Engineering, Key Laboratory of MEMS of Ministry of Education, Sipailou 2, Nanjing, 210096, China
| | - Juncheng Fan
- Southeast University, School of Integrated Circuits, School of Electronic Science and Engineering, Key Laboratory of MEMS of Ministry of Education, Sipailou 2, Nanjing, 210096, China
| | - Zhenxiang Yi
- Southeast University, School of Integrated Circuits, School of Electronic Science and Engineering, Key Laboratory of MEMS of Ministry of Education, Sipailou 2, Nanjing, 210096, China
| | - Hua Hong
- Southeast University, School of Integrated Circuits, School of Electronic Science and Engineering, Key Laboratory of MEMS of Ministry of Education, Sipailou 2, Nanjing, 210096, China
| | - Xiao Xie
- Southeast University, School of Integrated Circuits, School of Electronic Science and Engineering, Key Laboratory of MEMS of Ministry of Education, Sipailou 2, Nanjing, 210096, China
| | - Qing-An Huang
- Southeast University, School of Integrated Circuits, School of Electronic Science and Engineering, Key Laboratory of MEMS of Ministry of Education, Sipailou 2, Nanjing, 210096, China
| | - Jiaming Fu
- Nanjing Forestry University, College of Chemical Engineering, Longpan Road 159, Nanjing, 210037, China
| | - Jia Ouyang
- Nanjing Forestry University, College of Chemical Engineering, Longpan Road 159, Nanjing, 210037, China
| | - Xiangwei Zhao
- Southeast University, School of Biological Science and Medical Engineering, State Key Laboratory of Digital Medical Engineering, Sipailou 2, Nanjing, 210096, China
| | - Zixin Wang
- Sun Yat-Sen University, School of Electronics and Information Technology, Waihuan Dong Road 132, Guangzhou, 510006, China.
| | - Zhen Zhu
- Southeast University, School of Integrated Circuits, School of Electronic Science and Engineering, Key Laboratory of MEMS of Ministry of Education, Sipailou 2, Nanjing, 210096, China.
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3
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Chen DY, Dong L, Huang QA. PT-Symmetric LC Passive Wireless Sensing. Sensors (Basel) 2023; 23:s23115191. [PMID: 37299917 DOI: 10.3390/s23115191] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/06/2023] [Revised: 05/25/2023] [Accepted: 05/25/2023] [Indexed: 06/12/2023]
Abstract
Parity-time (PT) symmetry challenges the long-held theoretical basis that only Hermitian operators correspond to observable phenomena in quantum mechanics. Non-Hermitian Hamiltonians satisfying PT symmetry also have a real-valued energy spectrum. In the field of inductor-capacitor (LC) passive wireless sensors, PT symmetry is mainly used for improving performance in terms of multi-parameter sensing, ultrahigh sensitivity, and longer interrogation distance. For example, the proposal of both higher-order PT symmetry and divergent exceptional points can utilize a more drastic bifurcation process around exceptional points (EPs) to accomplish a significantly higher sensitivity and spectral resolution. However, there are still many controversies regarding the inevitable noise and actual precision of the EP sensors. In this review, we systematically present the research status of PT-symmetric LC sensors in three working areas: exact phase, exceptional point, and broken phase, demonstrating the advantages of non-Hermitian sensing concerning classical LC sensing principles.
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Affiliation(s)
- Dong-Yan Chen
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
| | - Lei Dong
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
| | - Qing-An Huang
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
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Tang N, Huang QA, Cai LH, Deng DM, Niu M. Reflectance Confocal Microscopy and Dermoscopy For the Diagnosis and Treatment of Cutaneous Larva Migrans. Clin Cosmet Investig Dermatol 2023; 16:1019-1023. [PMID: 37089910 PMCID: PMC10120813 DOI: 10.2147/ccid.s401982] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/21/2022] [Accepted: 04/04/2023] [Indexed: 04/25/2023]
Abstract
We describe a 39-year-old woman with a 1-month-old linear erythema diagnosed with cutaneous larva migrans by reflectance confocal microscopy (RCM). This case reveals that the great significance of diagnosing and treating cutaneous larva migrans (CLM) by RCM and dermoscopy, which might provide novel insights into dermatological clinical practice.
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Affiliation(s)
- Nan Tang
- Departments of Traditional Chinese Medicine, Guangzhou Red Cross Hospital of Jinan University, Guangzhou, Guangdong, People’s Republic of China
| | - Qing-An Huang
- Department of General Ward, The Fifth People’s Hospital of Hainan Province, Haikou, Hainan, People’s Republic of China
| | - Lan-Hua Cai
- Departments of Traditional Chinese Medicine, Guangzhou Red Cross Hospital of Jinan University, Guangzhou, Guangdong, People’s Republic of China
| | - Dong-Mei Deng
- Health Management Center, The Fifth People’s Hospital of Hainan Province, Haikou, Hainan, People’s Republic of China
- Dong-Mei Deng, Health Management Center, The Fifth People’s Hospital of Hainan Province, Haikou, People’s Republic of China, Email
| | - Mu Niu
- Department of Cosmetic Dermatology, The Fifth People’s Hospital of Hainan Province, Haikou, Hainan, People’s Republic of China
- Correspondence: Mu Niu, Department of Cosmetic Dermatology, The Fifth People’s Hospital of Hainan Province, Haikou, People’s Republic of China, Email
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Wang Y, Zhu Z, Liu K, Xiao Q, Geng Y, Xu F, Ouyang S, Zheng K, Fan Y, Jin N, Zhao X, Marchisio MA, Pan D, Huang QA. A high-throughput microfluidic diploid yeast long-term culturing (DYLC) chip capable of bud reorientation and concerted daughter dissection for replicative lifespan determination. J Nanobiotechnology 2022; 20:171. [PMID: 35361237 PMCID: PMC8973578 DOI: 10.1186/s12951-022-01379-9] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/06/2021] [Accepted: 03/16/2022] [Indexed: 11/30/2022] Open
Abstract
Background Budding yeast, Saccharomyces cerevisiae, has been extensively favored as a model organism in aging and age-related studies, thanks to versatile microfluidic chips for cell dynamics assay and replicative lifespan (RLS) determination at single-cell resolution. However, previous microfluidic structures aiming to immobilize haploid yeast may impose excessive spatial constraint and mechanical stress on cells, especially for larger diploid cells that sprout in a bipolar pattern. Results We developed a high-throughput microfluidic chip for diploid yeast long-term culturing (DYLC), optical inspection and cell-aging analysis. The DYLC chip features 1100 “leaky bowl”-shaped traps formatted in an array to dock single cells under laminar-perfused medium and effectively remove daughter cells by hydraulic shear forces. The delicate microstructures of cell traps enable hydrodynamic rotation of newborn buds, so as to ensure bud reorientation towards downstream and concerted daughter dissection thereafter. The traps provide sufficient space for cell-volume enlargement during aging, and thus properly alleviate structural compression and external stress on budding yeast. Trapping efficiency and long-term maintenance of single cells were optimized according to computational fluid dynamics simulations and experimental characterization in terms of critical parameters of the trap and array geometries. Owing to the self-filling of daughter cells dissected from traps upstream, an initial trapping efficiency of about 70% can rapidly reach a high value of over 92% after 4-hour cell culturing. During yeast proliferation and aging, cellular processes of growth, budding and daughter dissection were continuously tracked for over 60 h by time-lapse imaging. Yeast RLS and budding time interval (BTI) were directly calculated by the sequential two-digit codes indicating the budding status in images. With the employed diploid yeast strain, we obtained an RLS of 24.29 ± 3.65 generations, and verified the extension of BTI in the first couple of generations after birth and the last several generations approaching death, as well as cell de-synchronization along diploid yeast aging. Conclusions The DYLC chip offers a promising platform for reliable capture and culturing of diploid yeast cells and for life-long tracking of cell dynamics and replicative aging processes so that grasping comprehensive insights of aging mechanism in complex eukaryotic cells. Graphical Abstract ![]()
Supplementary Information The online version contains supplementary material available at 10.1186/s12951-022-01379-9.
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Affiliation(s)
- Yingying Wang
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Sipailou 2, Nanjing, 210096, China
| | - Zhen Zhu
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Sipailou 2, Nanjing, 210096, China.
| | - Ke Liu
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Sipailou 2, Nanjing, 210096, China
| | - Qin Xiao
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Sipailou 2, Nanjing, 210096, China
| | - Yangye Geng
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Sipailou 2, Nanjing, 210096, China
| | - Feng Xu
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Sipailou 2, Nanjing, 210096, China
| | - Shuiping Ouyang
- College of Chemical Engineering, Nanjing Forestry University, Longpan Road 159, Nanjing, 210037, China
| | - Ke Zheng
- College of Chemical Engineering, Nanjing Forestry University, Longpan Road 159, Nanjing, 210037, China
| | - Yimin Fan
- College of Chemical Engineering, Nanjing Forestry University, Longpan Road 159, Nanjing, 210037, China
| | - Nan Jin
- ZhongDa Hospital, Southeast University, Dingjiaqiao 87, Nanjing, 210009, China
| | - Xiangwei Zhao
- State Key Laboratory of Bioelectronics, Southeast University, Sipailou 2, Nanjing, 210096, China
| | - Mario A Marchisio
- School of Pharmaceutical Science and Technology, Tianjin University, Weijin Road 92, Tianjin, 300072, China
| | - Dejing Pan
- Cambridge-Suda Genomic Resource Center and Jiangsu Key Laboratory of Neuropsychiatric Diseases Research, Soochow University, Ren-ai Road 199, Suzhou, 215213, China
| | - Qing-An Huang
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Sipailou 2, Nanjing, 210096, China
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Geng Y, Zhu Z, Zhang Z, Xu F, Marchisio MA, Wang Z, Pan D, Zhao X, Huang QA. Design and 3D modeling investigation of a microfluidic electrode array for electrical impedance measurement of single yeast cells. Electrophoresis 2021; 42:1996-2009. [PMID: 33938013 DOI: 10.1002/elps.202100028] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/26/2021] [Revised: 04/09/2021] [Accepted: 04/20/2021] [Indexed: 01/22/2023]
Abstract
High-resolution microscopic imaging may cause intensive image processing and potential impact of light irradiation on yeast replicative lifespan (RLS). Electrical impedance spectroscopy (EIS) could be alternatively used to perform high-throughput and label-free yeast RLS assays. Prior to fabricating EIS-integrated microfluidic devices for yeast RLS determination, systematic modeling and theoretical investigation are crucial for device design and optimization. Here, we report three-dimensional (3D) finite-element modeling and simulations of EIS measurement in a microfluidic single yeast in-situ impedance array (SYIIA), which is designed by patterning an electrode matrix underneath a cell-trapping array. SYIIA was instantiated and modeled as a 5 × 5 sensing array comprising 25 units for cell immobilization, culturing, and time-lapse EIS recording. Simulations of yeast growing and budding in a sensing unit demonstrated that EIS signals enable the characterization of cell growth and daughter-cell dissections. In the 5 × 5 sensing array, simulation results indicated that when monitoring a target cell, daughter dissections in its surrounding traps may induce variations of the recorded EIS signals, which could cause mistakes in identifying target daughter-cell dissections. To eliminate the mis-identifications, electrode array pitch was optimized. Therefore, the results could conduct the design and optimization of microfluidic electrode-array-integrated devices for high-throughput and accurate yeast RLS assays.
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Affiliation(s)
- Yangye Geng
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, P. R. China
| | - Zhen Zhu
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, P. R. China
| | - Zhao Zhang
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, P. R. China
| | - Feng Xu
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, P. R. China
| | - Mario A Marchisio
- School of Pharmaceutical Science and Technology, Tianjin University, Tianjin, P. R. China
| | - Zixin Wang
- School of Electronics and Information Technology, Sun Yat-Sen University, Guangzhou, P. R. China
| | - Dejing Pan
- CAM-SU Genomic Resource Center, Soochow University, Suzhou, P. R. China
| | - Xiangwei Zhao
- State Key Laboratory of Bioelectronics, Southeast University, Nanjing, P. R. China
| | - Qing-An Huang
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, P. R. China
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Zhou BB, Wang LF, Dong L, Huang QA. Observation of the perturbed eigenvalues of PT-symmetric LC resonator systems. J Phys Commun 2021; 5:045010. [DOI: 10.1088/2399-6528/abf6a4] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 09/01/2023]
Abstract
Abstract
We address both theoretically and experimentally the influence of asymmetric perturbation on the eigenvalues of parity-time (PT) symmetric resonator systems under the symmetric gain-loss arrangement, based on an inductively coupled inductor-capacitor-resistor (LCR) pair. The perturbed eigenvalues have been theoretically presented, numerically simulated, and experimentally measured. It shows that the asymmetric perturbation breaks PT-symmetry, leading to complex eigenvalues, which is different from the broken PT-symmetric phase with complex-conjugate eigenvalues. We have analyzed the perturbed frequency responses in all phases. At the exceptional points (EP), the resulting eigenvalues splitting is proportional to the square root of perturbation, showing the advantage of being highly sensitive to asymmetric perturbation. Meanwhile, the smaller the perturbation, the higher the sensitivity. The perturbation effect of PT-symmetric systems may be utilized to detect small signal changes in LC passive wireless sensors.
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Geng ZC, Zhou ZF, Dai H, Huang QA. A 2D Waveguide Method for Lithography Simulation of Thick SU-8 Photoresist. Micromachines (Basel) 2020; 11:mi11110972. [PMID: 33138304 PMCID: PMC7693592 DOI: 10.3390/mi11110972] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/30/2020] [Revised: 10/25/2020] [Accepted: 10/27/2020] [Indexed: 11/24/2022]
Abstract
Due to the increasing complexity of microelectromechanical system (MEMS) devices, the accuracy and precision of two-dimensional microstructures of SU-8 negative thick photoresist have drawn more attention with the rapid development of UV lithography technology. This paper presents a high-precision lithography simulation model for thick SU-8 photoresist based on waveguide method to calculate light intensity in the photoresist and predict the profiles of developed SU-8 structures in two dimension. This method is based on rigorous electromagnetic field theory. The parameters that have significant influence on profile quality were studied. Using this model, the light intensity distribution was calculated, and the final resist morphology corresponding to the simulation results was examined. A series of simulations and experiments were conducted to verify the validity of the model. The simulation results were found to be in good agreement with the experimental results, and the simulation system demonstrated high accuracy and efficiency, with complex cases being efficiently handled.
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Affiliation(s)
| | - Zai-Fa Zhou
- Correspondence: ; Tel.: +86-025-8379-2632 (ext. 8817)
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Abstract
Currently, the use of electrical readout methods for the investigation of microtissue spheroids in combination with lab automation tools is hindered by the cable connections that are required to interrogate the on-chip-integrated electrodes. To overcome this limitation, we developed a wireless sensor scheme, which can detect the size variation of microtissues during long-term culturing and drug exposure assays. The sensor system includes an interrogation board, which is composed of an inductor-capacitor (LC) readout circuit, and the tissue culture platform with integrated split-ring sensors. The magnetic coupling between the LC circuit and the sensors enables the interrogation of the on-chip sensors without any wire connection to the culture platform. By optimizing the sensor dimensions and the LC resonance frequencies, we were able to avoid cross talk between neighboring sensors. We integrated 12 tissue compartments on a standard microscopy slide with a sensor-to-sensor pitch of 9 mm, which is in accordance with standard 96-well plate dimensions. As a proof-of-concept experiment for the developed system, we monitored continuously and during more than four days the growth inhibition of colon cancer microtissue spheroids that had been exposed to different concentrations of doxorubicin, a chemotherapeutic compound. The stability of the measurements during long-term culturing and the compatibility of the sensor scheme with standard lab equipment offer great potential for automated electrical microtissue spheroid characterization.
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Affiliation(s)
- Lei Dong
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
- Department of Biosystems Science and Engineering, ETH Zürich, Basel 4058, Switzerland
| | - Paolo S. Ravaynia
- Department of Biosystems Science and Engineering, ETH Zürich, Basel 4058, Switzerland
| | - Qing-An Huang
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
| | - Andreas Hierlemann
- Department of Biosystems Science and Engineering, ETH Zürich, Basel 4058, Switzerland
| | - Mario M. Modena
- Department of Biosystems Science and Engineering, ETH Zürich, Basel 4058, Switzerland
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Sim K, Rao Z, Zou Z, Ershad F, Lei J, Thukral A, Chen J, Huang QA, Xiao J, Yu C. Metal oxide semiconductor nanomembrane-based soft unnoticeable multifunctional electronics for wearable human-machine interfaces. Sci Adv 2019; 5:eaav9653. [PMID: 31414044 PMCID: PMC6677552 DOI: 10.1126/sciadv.aav9653] [Citation(s) in RCA: 51] [Impact Index Per Article: 10.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/15/2018] [Accepted: 06/25/2019] [Indexed: 05/17/2023]
Abstract
Wearable human-machine interfaces (HMIs) are an important class of devices that enable human and machine interaction and teaming. Recent advances in electronics, materials, and mechanical designs have offered avenues toward wearable HMI devices. However, existing wearable HMI devices are uncomfortable to use and restrict the human body's motion, show slow response times, or are challenging to realize with multiple functions. Here, we report sol-gel-on-polymer-processed indium zinc oxide semiconductor nanomembrane-based ultrathin stretchable electronics with advantages of multifunctionality, simple manufacturing, imperceptible wearing, and robust interfacing. Multifunctional wearable HMI devices range from resistive random-access memory for data storage to field-effect transistors for interfacing and switching circuits, to various sensors for health and body motion sensing, and to microheaters for temperature delivery. The HMI devices can be not only seamlessly worn by humans but also implemented as prosthetic skin for robotics, which offer intelligent feedback, resulting in a closed-loop HMI system.
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Affiliation(s)
- Kyoseung Sim
- Materials Science and Engineering Program, University of Houston, Houston, TX 77204, USA
| | - Zhoulyu Rao
- Materials Science and Engineering Program, University of Houston, Houston, TX 77204, USA
| | - Zhanan Zou
- Department of Mechanical Engineering, University of Colorado, Boulder, CO 80309, USA
| | - Faheem Ershad
- Department of Biomedical Engineering, University of Houston, Houston, TX 77204, USA
| | - Jianming Lei
- Department of Mechanical Engineering, University of Houston, Houston, TX 77204, USA
| | - Anish Thukral
- Department of Mechanical Engineering, University of Houston, Houston, TX 77204, USA
| | - Jie Chen
- Department of Mechanical Engineering, University of Houston, Houston, TX 77204, USA
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, Jiangsu 210096, China
| | - Qing-An Huang
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, Jiangsu 210096, China
| | - Jianliang Xiao
- Department of Mechanical Engineering, University of Colorado, Boulder, CO 80309, USA
| | - Cunjiang Yu
- Materials Science and Engineering Program, University of Houston, Houston, TX 77204, USA
- Department of Biomedical Engineering, University of Houston, Houston, TX 77204, USA
- Department of Mechanical Engineering, University of Houston, Houston, TX 77204, USA
- Department of Electrical and Computer Engineering and Texas Center for Superconductivity, University of Houston, Houston, TX 77204, USA
- Corresponding author.
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11
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Li X, Cai W, Teh KS, Qi M, Zang X, Ding X, Cui Y, Xie Y, Wu Y, Ma H, Zhou Z, Huang QA, Ye J, Lin L. High-Voltage Flexible Microsupercapacitors Based on Laser-Induced Graphene. ACS Appl Mater Interfaces 2018; 10:26357-26364. [PMID: 30004667 DOI: 10.1021/acsami.8b10301] [Citation(s) in RCA: 14] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Abstract
High-voltage energy-storage devices are quite commonly needed for robots and dielectric elastomers. This paper presents a flexible high-voltage microsupercapacitor (MSC) with a planar in-series architecture for the first time based on laser-induced graphene. The high-voltage devices are capable of supplying output voltages ranging from a few to thousands of volts. The measured capacitances for the 1, 3, and 6 V MSCs were 60.5, 20.7, and 10.0 μF, respectively, under an applied current of 1.0 μA. After the 5000-cycle charge-discharge test, the 6 V MSC retained about 97.8% of the initial capacitance. It also was recorded that the all-solid-state 209 V MSC could achieve a high capacitance of 0.43 μF at a low applied current of 0.2 μA and a capacitance of 0.18 μF even at a high applied current of 5.0 μA. We further demonstrate the robust function of our flexible high-voltage MSCs by using them to power a piezoresistive microsensor (6 V) and a walking robot (>2000 V). Considering the simple, direct, and cost-effective fabrication method of our laser-fabricated flexible high-voltage MSCs, this work paves the way and lays the foundation for high-voltage energy-storage devices.
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Affiliation(s)
- Xiaoqian Li
- Department of Mechanical Engineering , University of California , Berkeley , California 94709 , United States
- Key Laboratory of MEMS of the Ministry of Education , Southeast University , Nanjing 210096 , China
| | - Weihua Cai
- Department of Mechanical Engineering , University of California , Berkeley , California 94709 , United States
- School of Chemistry and Chemical Engineering , South China University of Technology , Guangzhou 510641 , China
| | - Kwok Siong Teh
- School of Engineering , San Francisco State University , San Francisco , California 94132 , United States
| | - Mingjing Qi
- Department of Mechanical Engineering , University of California , Berkeley , California 94709 , United States
| | - Xining Zang
- Department of Mechanical Engineering , University of California , Berkeley , California 94709 , United States
| | - Xinrui Ding
- Department of Mechanical Engineering , University of California , Berkeley , California 94709 , United States
| | - Yong Cui
- Department of Mechanical Engineering , University of California , Berkeley , California 94709 , United States
| | - Yingxi Xie
- Department of Mechanical Engineering , University of California , Berkeley , California 94709 , United States
| | - Yichuan Wu
- Department of Mechanical Engineering , University of California , Berkeley , California 94709 , United States
| | - Hongyu Ma
- Department of Mechanical Engineering , University of California , Berkeley , California 94709 , United States
| | - Zaifa Zhou
- Key Laboratory of MEMS of the Ministry of Education , Southeast University , Nanjing 210096 , China
| | - Qing-An Huang
- Key Laboratory of MEMS of the Ministry of Education , Southeast University , Nanjing 210096 , China
| | - Jianshan Ye
- School of Chemistry and Chemical Engineering , South China University of Technology , Guangzhou 510641 , China
| | - Liwei Lin
- Department of Mechanical Engineering , University of California , Berkeley , California 94709 , United States
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Guo XG, Zhou ZF, Sun C, Li WH, Huang QA. A Simple Extraction Method of Young's Modulus for Multilayer Films in MEMS Applications. Micromachines (Basel) 2017; 8:mi8070201. [PMID: 30400391 PMCID: PMC6190058 DOI: 10.3390/mi8070201] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/08/2017] [Revised: 06/12/2017] [Accepted: 06/20/2017] [Indexed: 11/16/2022]
Abstract
Based on the first resonance frequency measurement of multilayer beams, a simple extraction method has been developed to extract the Young's modulus of individual layers. To verify this method, the double-layer cantilever, as a typical example, is analyzed to simplify the situation and finite element modeling (FEM) is used in consideration of the buckling and unbuckling situation of cantilevers. The first resonance frequencies, which are obtained by ANSYS (15.0, ANSYS Inc., Pittsburgh, PA, USA) with a group of thirteen setting values of Young's modulus in the polysilicon layer are brought into the theoretical formulas to obtain a new group of Young's modulus in the polysilicon layer. The reliability and feasibility of the theoretical method are confirmed, according to the slight differences between the setting values and the results of the theoretical model. In the experiment, a series of polysilicon-metal double-layer cantilevers were fabricated. Digital holographic microscopy (DHM) (Lyncée Tech, Lausanne, Switzerland) is used to distinguish the buckled from the unbuckled. A scanning laser Doppler vibrometer (LDV) (Polytech GmbH, Berlin, Germany) system is used to measure the first resonance frequencies of them. After applying the measurement results into the theoretical modulus, the average values of Young's modulus in the polysilicon and gold layers are 151.78 GPa and 75.72 GPa, respectively. The extracted parameters are all within the rational ranges, compared with the available results.
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Affiliation(s)
- Xin-Ge Guo
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Zai-Fa Zhou
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Chao Sun
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Wei-Hua Li
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Qing-An Huang
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
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Chen B, Zhu YQ, Yi Z, Qin M, Huang QA. Temperature Effects on the Wind Direction Measurement of 2D Solid Thermal Wind Sensors. Sensors (Basel) 2015; 15:29871-81. [PMID: 26633398 PMCID: PMC4721692 DOI: 10.3390/s151229771] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 10/08/2015] [Revised: 11/20/2015] [Accepted: 11/24/2015] [Indexed: 11/16/2022]
Abstract
For a two-dimensional solid silicon thermal wind sensor with symmetrical structure, the wind speed and direction information can be derived from the output voltages in two orthogonal directions, i.e., the north-south and east-west. However, the output voltages in these two directions will vary linearly with the ambient temperature. Therefore, in this paper, a temperature model to study the temperature effect on the wind direction measurement has been developed. A theoretical analysis has been presented first, and then Finite Element Method (FEM) simulations have been performed. It is found that due to symmetrical structure of the thermal wind sensor, the temperature effects on the output signals in the north-south and east-west directions are highly similar. As a result, the wind direction measurement of the thermal wind sensor is approximately independent of the ambient temperature. The experimental results fit the theoretical analysis and simulation results very well.
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Affiliation(s)
- Bei Chen
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Yan-Qing Zhu
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Zhenxiang Yi
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Ming Qin
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
| | - Qing-An Huang
- Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.
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Shang J, Chen B, Lin W, Wong CP, Zhang D, Xu C, Liu J, Huang QA. Preparation of wafer-level glass cavities by a low-cost chemical foaming process (CFP). Lab Chip 2011; 11:1532-1540. [PMID: 21387022 DOI: 10.1039/c0lc00708k] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/30/2023]
Abstract
A novel foaming process-chemical foaming process (CFP)-using foaming agents to fabricate wafer-level micro glass cavities including channels and bubbles was investigated. The process consists of the following steps sequentially: (1) shallow cavities were fabricated by a wet etching on a silicon wafer; (2) powders of a proper foaming agent were placed in a silicon cavity, named 'mother cavity', on the etched silicon surface; (3) the silicon cavities were sealed with a glass wafer by anodic bonding; (4) the bonded wafers were heated to above the softening point of the glass, and baked for several minutes, when the gas released by the decomposition of the foaming agent in the 'mother cavity' went into the other sealed interconnected silicon cavities to foam the softened glass into cylindrical channels named 'daughter channels', or spherical bubbles named 'son bubbles'. Results showed that wafer-level micro glass cavities with smooth wall surfaces were achieved successfully without contamination by the CFP. A model for the CFP was proposed to predict the final shape of the glass cavity. Experimental results corresponded with model predictions. The CFP provides a low-cost avenue to preparation of micro glass cavities of high quality for applications such as micro-reactors, micro total analysis systems (μTAS), analytical and bio-analytical applications, and MEMS packaging.
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Affiliation(s)
- Jintang Shang
- Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, China.
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Zhang JH, Huang QA, Yu H, Lei SY. Orientation Effects in Ballistic High-Strained P-type Si Nanowire FETs. Sensors (Basel) 2009; 9:2746-59. [PMID: 22574043 PMCID: PMC3348805 DOI: 10.3390/s90402746] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/22/2009] [Revised: 04/15/2009] [Accepted: 04/16/2009] [Indexed: 11/16/2022]
Abstract
In order to design and optimize high-sensitivity silicon nanowire-field-effect transistor (SiNW FET) pressure sensors, this paper investigates the effects of channel orientations and the uniaxial stress on the ballistic hole transport properties of a strongly quantized SiNW FET placed near the high stress regions of the pressure sensors. A discrete stress-dependent six-band k.p method is used for subband structure calculation, coupled to a two-dimensional Poisson solver for electrostatics. A semi-classical ballistic FET model is then used to evaluate the ballistic current-voltage characteristics of SiNW FETs with and without strain. Our results presented here indicate that [110] is the optimum orientation for the p-type SiNW FETs and sensors. For the ultra-scaled 2.2 nm square SiNW, due to the limit of strong quantum confinement, the effect of the uniaxial stress on the magnitude of ballistic drive current is too small to be considered, except for the [100] orientation. However, for larger 5 nm square SiNW transistors with various transport orientations, the uniaxial tensile stress obviously alters the ballistic performance, while the uniaxial compressive stress slightly changes the ballistic hole current. Furthermore, the competition of injection velocity and carrier density related to the effective hole masses is found to play a critical role in determining the performance of the nanotransistors.
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Affiliation(s)
- Jia-Hong Zhang
- Key Laboratory of MEMS of Ministry of Education, Southeast University, 2 Sipailou, Nanjing, Jiangsu, People’s Republic of China; E-mails: ;
- College of Electronic & Information Engineering, Nanjing University of Information Science & Technology, 219 Ning-Lu Road, Nanjing, Jiangsu, People’s Republic of China; E-mail:
| | - Qing-An Huang
- Key Laboratory of MEMS of Ministry of Education, Southeast University, 2 Sipailou, Nanjing, Jiangsu, People’s Republic of China; E-mails: ;
- Author to whom correspondence should be addressed; E-mail: ; Tel.: +025-83792632-8821; Fax: +025-83792939
| | - Hong Yu
- Key Laboratory of MEMS of Ministry of Education, Southeast University, 2 Sipailou, Nanjing, Jiangsu, People’s Republic of China; E-mails: ;
| | - Shuang-Ying Lei
- Key Laboratory of MEMS of Ministry of Education, Southeast University, 2 Sipailou, Nanjing, Jiangsu, People’s Republic of China; E-mails: ;
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Lu JH, Zhao YY, Qiao L, Fang YO, Huang QA. [Studies on chemical constituents from Buddleja lindleyana Fert]. Zhongguo Zhong Yao Za Zhi 2001; 26:41-3. [PMID: 12525118] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Subscribe] [Scholar Register] [Indexed: 02/28/2023]
Abstract
OBJECTIVE To study the chemical constituents of Buddleja lindleyana. METHOD Separation by chromatographic methods and identification by spectral analysis. RESULT Seven compounds vanillic acid, daidzein octacosanoic acid, beta-sitosterol-3-O-beta-D-glucopyranoside, stigmasterol-3-O-beta-D-glucopyranoside, alpha-spinasterol-3-O-beta-D-glucopyranoside, betulin acid were isolated. CONCLUSION All the compounds were obtained from this plant for the first time.
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Affiliation(s)
- J H Lu
- Division of Natural Medicinal Chemistry, Beijing Medical University, Beijing 100083, China
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Shi FT, Shi ZJ, Shi HH, Lin XM, Huang QA. Assessment of intradermal test in longitudinal surveillance of bancroftian filariasis. Chin Med J (Engl) 1990; 103:29-33. [PMID: 2112439] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/30/2022] Open
Abstract
Longitudinal surveillance was carried out consecutively during 1982-1987 in two pilot villages where bancroftian filariasis was prevalent in different severity before 1982. Intradermal test (IT) with filaria polypeptide (FPT) antigen prepared from Dirofilaria immitis was made. It was shown that the level of immediate hypersensitivity reaction to the antigen in population as shown by IT appeared to be directly proportional to both the prevalence of the disease and the infection rate of mosquitoes harbouring larval filariae before mass and selective treatment with diethylcarbamazine. Time for negative conversion of IT after chemotherapy was significantly longer in previous microfilaraemic patients than that in amicrofilaraemic cases. The selected three criteria of IT used in filariasis surveillance, namely, the positive rate, frequency of strong reaction and positive conversion rate, were diminished gradually after chemotherapy year by year, so that the three criteria were demonstrated to be useful for longitudinal surveillance of lymphatic filariasis.
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Affiliation(s)
- F T Shi
- Institute of Parasitic Diseases, Chinese Academy of Preventive Medicine, Shanghai
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Huang QA. [Clinical and pathologic study of lymphoid lesion in orbits]. Zhonghua Bing Li Xue Za Zhi 1988; 17:257-9. [PMID: 3254752] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [MESH Headings] [Subscribe] [Scholar Register] [Indexed: 01/04/2023]
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