Stretchable and Soft Electronics using Liquid Metals

Recent Advances in Liquid Metal Photonics: Technologies and Applications

Near-room-temperature liquid metals offer unique and crucial advantages over solid metals for a broad range of applications which require soft, stretchable and/or reconfigurable structures and devices. In particular, gallium-based liquid metals are the most suitable for a wide range of applications, not only owing to their low melting points, but also thanks to their low toxicity and negligible vapor pressure. In addition, gallium-based liquid metals exhibit attractive optical properties which make them highly suitable for a variety of photonics applications. This review summarizes the material properties of gallium-based liquid metals, highlights several effective techniques for fabricating liquid-metal-based structures and devices, and then focuses on the various photonics applications of these liquid metals in different spectral regions, following with a discussion on the challenges and opportunities for future research in this relatively nascent field.

Stretchable Electrodes Based on Over-Layered Liquid Metal Networks

Liquid metals are attractive materials for stretchable electronics owing to their high electrical conductivity and near-zero Young's modulus. However, the high surface tension of liquid metals makes it difficult to form films. A novel stretchable film is proposed based on an over-layered liquid-metal network. An intentionally oxidized interfacial layer helps to construct uninterrupted indium and gallium nanoclusters and produces additional electrical pathways between the two metal networks under mechanical deformation. The films exhibit gigantic negative piezoresistivity (G-NPR), which decreased the resistance up to 85% during the first 50% stretching. This G-NPR property is due to the rupture of the metal oxides, which allows the formation of liquid eutectic gallium-indium (EGaIn) and the connection of the over-layered networks to build new electrical paths. The electrodes exhibiting G-NPR are complementarily combined with conventional electrodes to amplify their performance or achieve some unique operations.

Diblock Copolymer Stabilized Liquid Metal Nanoparticles: Particle Settling Behavior and Application to 3D Printing

Eutectic gallium indium (EGaIn) is a liquid metal with promising applications due to its favorable thermal and electrical conductivity, low viscosity, and metallic nature. For applications, including imaging, catalysis, and nanomedicine, stable EGaIn particles with submicron diameters are required. However, the low viscosity and high density of EGaIn have typically precluded the formation of stable submicron particles due to rapid EGaIn droplet coalescence. In this work, we show that poly(acrylic acid)-block-poly(N,N'-dimethylacrylamide) copolymers are able to effectively stabilize EGaIn nanodroplets formed upon ultrasonication, where the poly(acrylic acid) block anchors the polymer to the EGaIn surface and the poly(N,N'-dimethylacrylamide) block provides colloidal stability to the particles in solution. Although the high density of EGaIn causes rapid particle settling, the behavior is predictable, which allows the average particle size to be controlled through centrifugation. We demonstrate that stable EGaIn particles with sizes on the order of 50-100 nm and narrow particle size distributions can be easily obtained using this method and further used in photopolymer resins to prepare 3D printed EGaIn-polymer hybrid materials. The predictable sizes and high stability of these EGaIn nanoparticles should allow further applications in soft-electronics, nanomedicine, catalysis, and other nanotechnology.

Liquid metal-based soft, hermetic, and wireless-communicable seals for stretchable systems

Soft materials tend to be highly permeable to gases, making it difficult to create stretchable hermetic seals. With the integration of spacers, we demonstrate the use of liquid metals, which show both metallic and fluidic properties, as stretchable hermetic seals. Such soft seals are used in both a stretchable battery and a stretchable heat transfer system that involve volatile fluids, including water and organic fluids. The capacity retention of the battery was ~72.5% after 500 cycles, and the sealed heat transfer system showed an increased thermal conductivity of approximately 309 watts per meter-kelvin while strained and heated. Furthermore, with the incorporation of a signal transmission window, we demonstrated wireless communication through such seals. This work provides a route to create stretchable yet hermetic packaging design solutions for soft devices.

Flexible-to-Stretchable Mechanical and Electrical Interconnects

Stretchable electronic devices that maintain electrical function when subjected to stress or strain are useful for enabling new applications for electronics, such as wearable devices, human-machine interfaces, and components for soft robotics. Powering and communicating with these devices is a challenge. NFC (near-field communication) coils solve this challenge but only work efficiently when they are in close proximity to the device. Alternatively, electrical signals and power can arrive via physical connections between the stretchable device and an external source, such as a battery. The ability to create a robust physical and electrical connection between mechanically disparate components may enable new types of hybrid devices in which at least a portion is stretchable or deformable, such as hinges. This paper presents a simple method to make mechanical and electrical connections between elastomeric conductors and flexible (or rigid) conductors. The adhesion at the interface between these disparate materials arises from surface chemistry that forms strong covalent bonds. The utilization of liquid metals as the conductor provides stretchable interconnects between stretchable and non-stretchable electrical traces. The liquid metal can be printed or injected into vias to create interconnects. We characterized the mechanical and electrical properties of these hybrid devices to demonstrate the concept and identify geometric design criteria to maximize mechanical strength. The work here provides a simple and general strategy for creating mechanical and electrical connections that may find use in a variety of stretchable and soft electronic devices.

Liquid Metal Patterning and Unique Properties for Next-Generation Soft Electronics

Room-temperature liquid metal (LM)-based electronics is expected to bring advancements in future soft electronics owing to its conductivity, conformability, stretchability, and biocompatibility. However, various difficulties arise when patterning LM because of its rheological features such as fluidity and surface tension. Numerous attempts are made to overcome these difficulties, resulting in various LM-patterning methods. An appropriate choice of patterning method based on comprehensive understanding is necessary to fully utilize the unique properties. Therefore, the authors aim to provide thorough knowledge about patterning methods and unique properties for LM-based future soft electronics. First, essential considerations for LM-patterning are investigated. Then, LM-patterning methods-serial-patterning, parallel-patterning, intermetallic bond-assisted patterning, and molding/microfluidic injection-are categorized and investigated. Finally, perspectives on LM-based soft electronics with unique properties are provided. They include outstanding features of LM such as conformability, biocompatibility, permeability, restorability, and recyclability. Also, they include perspectives on future LM-based soft electronics in various areas such as radio frequency electronics, soft robots, and heterogeneous catalyst. LM-based soft devices are expected to permeate the daily lives if patterning methods and the aforementioned features are analyzed and utilized.

Self-Healing Electronics for Prognostic Monitoring of Methylated Circulating Tumor DNAs

Methylated circulating DNAs (ctDNAs) have recently been reported as a promising biomarker for early cancer diagnostics, but limited tools are currently available for continuous and dynamic profiling of ctDNAs and their methylation levels, especially when such assays need to be conducted in point-of-care (POC) scenarios. Here, a self-healing bioelectronic patch (iMethy) is developed that combines transdermal interstitial fluid (ISF) extraction and field effect transistor-based (FET-based) biosensing for dynamic monitoring of methylated ctDNAs as a prognostic approach for cancer risk management. The projection micro-stereolithography-based 3D patterning of an Eutectic Gallium-Indium (EGaIn) circuit with an unprecedented 10 µm resolution enables the construction of self-healing EGaIn microfluidic circuits that remain conductive under 100% strain and self-healing under severe destruction. In combination with continuous transdermal ISF sampling of methylated ctDNAs, iMethy can detect ctDNAs as low as 10^-16  m in cellular models and is capable of phenotypic analysis of tumor growth in rodent animals. As the first demonstration of a wearable device for real-time in vivo analysis of disease-indicative biomarkers, this proof-of-concept study well demonstrated the potential of the iMethy platform for cancer risk management based on dynamic transdermal surveillance of methylated ctDNAs via a painless and self-administrable procedure.

Bio-inspired ionic skins for smart medicine

Ionic skins are developed to mimic the mechanical properties and functions of natural skins. They have demonstrated substantial advantages to serve as the crucial interface to bridge the gap between humans and machines. The first-generation ionic skin is a stretchable capacitor comprising hydrogels as the ionic conductors and elastomers as the dielectrics, and realizes pressure and strain sensing through the measurement of the capacitance. Subsequent advances have been made to improve the mechanical properties of ionic skins and import diverse functions. For example, ultrahigh stretchability, strong interfacial adhesion, self-healing, moisturizing ability, and various sensing capabilities have been achieved separately or simultaneously. Most ionic skins are attached to natural skins to monitor bio-electrical signals continuously. Ionic skins have also been found with significant potential to serve as a smart drug-containing reservoir, which can release drugs spatially, temporally, and in a controllable way. Herein, this review focuses on the design and fabrication of ionic skins, and their applications related to smart medicine. Moreover, challenges and opportunities are also discussed. It is hoped that the development of bio-inspired ionic skins will provide a paradigm shift for self-diagnosis and healthcare.

Electroactive Polymer-Based Soft Actuator with Integrated Functions of Multi-Degree-of-Freedom Motion and Perception

Soft actuators have received extensive attention in the fields of soft robotics, biomedicine, and intelligence systems owing to their advantages of pliancy, silence, and essential safety. However, most existing soft actuators have only single actuation elements and lack sensing. Therefore, it is difficult for them to perform complex motions with multiple degrees of freedom (multi-DOFs) and high precision. This article reports a miniature columnar dielectric elastomer actuator (DEA) with multi-DOF actuation and sensing, which was fabricated with an electroactive polymer acrylic film (Very High Bond [VHB] acrylic film by 3M Company) and carbon black grease electrodes. The arrangement of the simulation electrodes on the VHB was optimized to realize multi-DOF actuation, and the sensing electrodes were configured on the outer part of the DEA to realize real-time sensing. The results showed that the soft actuator can achieve all-round actuation through the selective power of the stimulation electrodes with a controllable voltage. The maximum bending angle and axial strain of the actuator reached 50° and 13%, respectively. Moreover, the deformation modes, direction, and quantity could be precisely measured using the integrative sensing function. In addition, to demonstrate the advantages of the proposed actuator, a manipulator with multiple actuators was designed and controlled to realize different actions of screwing and grasping with sensing. This research is useful not only for the design of multifunctional soft actuators but also for the development of soft robots with flexible, complex, and precisely controllable motions.

Soft Robotics: A Systematic Review and Bibliometric Analysis

In recent years, soft robotics has developed considerably, especially since the year 2018 when it became a hot field among current research topics. The attention that this field receives from researchers and the public is marked by the substantial increase in both the quantity and the quality of scientific publications. In this review, in order to create a relevant and comprehensive picture of this field both quantitatively and qualitatively, the paper approaches two directions. The first direction is centered on a bibliometric analysis focused on the period 2008-2022 with the exact expression that best characterizes this field, which is "Soft Robotics", and the data were taken from a series of multidisciplinary databases and a specialized journal. The second direction focuses on the analysis of bibliographic references that were rigorously selected following a clear methodology based on a series of inclusion and exclusion criteria. After the selection of bibliographic sources, 111 papers were part of the final analysis, which have been analyzed in detail considering three different perspectives: one related to the design principle (biologically inspired soft robotics), one related to functionality (closed/open-loop control), and one from a biomedical applications perspective.

Dynamic Zero Current Method to Reduce Measurement Error in Low Value Resistive Sensor Array for Wearable Electronics

One advantage of a resistive sensor array (RSA) with shared rows (M) and shared columns (N) is the reduced number of wires from M × N + 1 to M + N which can greatly lessen the complexity and burden on wearable electronic systems. However, the drawback is the crosstalk current effect between adjacent elements, which will lead to high measurement error. Although several solutions have been reported, they mainly focus on RSAs with high resistance (≥100 Ω). There is a lack of research that addresses RSAs with resistor values below 100 Ω. Here, we introduce a new circuit design named the dynamic zero current method (DZCM) to further decrease the measurement error. From the low value RSA test with ideal resistors, the DZCM exhibits lower error than the zero potential method (ZPM). In the case of the error variation ratio of amplifier offset voltage, the DZCM has a 4%/mV (row) to 7%/mV (column) ratio, while the ZPM has an almost 25%/mV (row) to 45%/mV (column) ratio and it increases with array size.

Self-Patterning of Highly Stretchable and Electrically Conductive Liquid Metal Conductors by Direct-Write Super-Hydrophilic Laser-Induced Graphene and Electroless Copper Plating

Stretchable electrodes are desirable in flexible electronics for the transmission and acquisition of electrical signals, but their fabrication process remains challenging. Herein, we report an approach based on patterned liquid metals (LMs) as stretchable electrodes using a super-hydrophilic laser-induced graphene (SHL-LIG) process with electroless plating copper on a polyimide (PI) film. The LMs/SHL-LIG structures are then transferred from the PI film to an Ecoflex substrate as stretchable electrodes with an ultralow sheet resistance of 3.54 mΩ per square and excellent stretchability up to 480% in elongation. Furthermore, these electrodes show outstanding performances of only 8% electrical resistance changes under a tensile strain of 300%, and strong immunity to temperature and pressure changes. As demonstration examples, these electrodes are integrated with a stretchable strain sensing system and a smart magnetic soft robot toward practical applications.

Stretchable conductors for stretchable field-effect transistors and functional circuits

Stretchable electronics have received intense attention due to their broad application prospects in many areas, and can withstand large deformations and form close contact with curved surfaces. Stretchable conductors are vital components of stretchable electronic devices used in wearables, soft robots, and human-machine interactions. Recent advances in stretchable conductors have motivated basic scientific and technological research efforts. Here, we outline and analyse the development of stretchable conductors in transistors and circuits, and examine advances in materials, device engineering, and preparation technologies. We divide the existing approaches to constructing stretchable transistors with stretchable conductors into the following two types: geometric engineering and intrinsic stretchability engineering. Finally, we consider the challenges and outlook in this field for delivering stretchable electronics.

Reliability of printed stretchable electronics based on nano/micro materials for practical applications

Recent decades have witnessed the booming development of stretchable electronics based on nano/micro composite inks. Printing is a scalable, low-cost, and high-efficiency fabrication tool to realize stretchable electronics through additive processes. However, compared with conventional flexible electronics, stretchable electronics need to experience more severe mechanical deformation which may cause destructive damage. Most of the reported works in this field mainly focus on how to achieve a high stretchability of nano/micro composite conductors or single working modules/devices, with limited attention given to the reliability for practical applications. In this minireview, we summarized the failure modes when printing stretchable electronics using nano/micro composite ink, including dysfunction of the stretchable interconnects, the stress-concentrated rigid-soft interfaces for hybrid electronics, the vulnerable vias upon stretching, thermal accumulation, and environmental instability of stretchable materials. Strategies for tackling these challenges to realize reliable performances are proposed and discussed. Our review provides an overview on the importance of reliable, printable, and stretchable electronics, which are the key enablers in propelling stretchable electronics from fancy demos to practical applications.

Smart Eutectic Gallium-Indium: From Properties to Applications

Eutectic gallium-indium (EGaIn), a liquid metal with a melting point close to or below room temperature, has attracted extensive attention in recent years due to its excellent properties such as fluidity, high conductivity, thermal conductivity, stretchability, self-healing capability, biocompatibility, and recyclability. These features of EGaIn can be adjusted by changing the experimental condition, and various composite materials with extended properties can be further obtained by mixing EGaIn with other materials. In this review, not only the are unique properties of EGaIn introduced, but also the working principles for the EGaIn-based devices are illustrated and the developments of EGaIn-related techniques are summarized. The applications of EGaIn in various fields, such as flexible electronics (sensors, antennas, electronic circuits), molecular electronics (molecular memory, opto-electronic switches, or reconfigurable junctions), energy catalysis (heat management, motors, generators, batteries), biomedical science (drug delivery, tumor therapy, bioimaging and neural interfaces) are reviewed. Finally, a critical discussion of the main challenges for the development of EGaIn-based techniques are discussed, and the potential applications in new fields are prospected.

Recent progress in fiber-based soft electronics enabled by liquid metal

Soft electronics can seamlessly integrate with the human skin which will greatly improve the quality of life in the fields of healthcare monitoring, disease treatment, virtual reality, and human-machine interfaces. Currently, the stretchability of most soft electronics is achieved by incorporating stretchable conductors with elastic substrates. Among stretchable conductors, liquid metals stand out for their metal-grade conductivity, liquid-grade deformability, and relatively low cost. However, the elastic substrates usually composed of silicone rubber, polyurethane, and hydrogels have poor air permeability, and long-term exposure can cause skin redness and irritation. The substrates composed of fibers usually have excellent air permeability due to their high porosity, making them ideal substrates for soft electronics in long-term applications. Fibers can be woven directly into various shapes, or formed into various shapes on the mold by spinning techniques such as electrospinning. Here, we provide an overview of fiber-based soft electronics enabled by liquid metals. An introduction to the spinning technology is provided. Typical applications and patterning strategies of liquid metal are presented. We review the latest progress in the design and fabrication of representative liquid metal fibers and their application in soft electronics such as conductors, sensors, and energy harvesting. Finally, we discuss the challenges of fiber-based soft electronics and provide an outlook on future prospects.

Graphene and Liquid Metal Integrated Multifunctional Wearable Platform for Monitoring Motion and Human-Machine Interfacing

Motion sensors are an essential component of many electronic systems. However, the development of inertial motion sensors based on fatigue-free soft proof mass has not been explored extensively in the field of soft electronics. Nontoxic gallium-based liquid metals are an emerging class of material that exhibit attractive electromechanical properties, making them excellent proof mass materials for inertial sensors. Here, we propose and demonstrate a fully soft laser-induced graphene (LIG) and liquid metal-based inertial sensor integrated with temperature, humidity, and breathing sensors. The inertial sensor design confines a graphene-coated liquid metal droplet inside a fluidic channel, rolling over LIG resistive electrode. The proposed sensor architecture and material realize a highly mobile proof mass and a vibrational space for its oscillation. The inertial sensor exhibits a high sensitivity of 6.52% m^-1 s² and excellent repeatability (over 12 500 cycles). The platform is fabricated using a scalable, rapid laser writing technique and integrated with a programmable system on a chip (PSoC) to function as a stand-alone system for real-time wireless monitoring of movement patterns and the control of a robotic arm. The developed printed inertial platform is an excellent candidate for the next-generation of wearables motion tracking platforms and soft human-machine interfaces.

Stretchable One-Dimensional Conductors for Wearable Applications

Continuous, one-dimensional (1D) stretchable conductors have attracted significant attention for the development of wearables and soft-matter electronics. Through the use of advanced spinning, printing, and textile technologies, 1D stretchable conductors in the forms of fibers, wires, and yarns can be designed and engineered to meet the demanding requirements for different wearable applications. Several crucial parameters, such as microarchitecture, conductivity, stretchability, and scalability, play essential roles in designing and developing wearable devices and intelligent textiles. Methodologies and fabrication processes have successfully realized 1D conductors that are highly conductive, strong, lightweight, stretchable, and conformable and can be readily integrated with common fabrics and soft matter. This review summarizes the latest advances in continuous, 1D stretchable conductors and emphasizes recent developments in materials, methodologies, fabrication processes, and strategies geared toward applications in electrical interconnects, mechanical sensors, actuators, and heaters. This review classifies 1D conductors into three categories on the basis of their electrical responses: (1) rigid 1D conductors, (2) piezoresistive 1D conductors, and (3) resistance-stable 1D conductors. This review also evaluates the present challenges in these areas and presents perspectives for improving the performance of stretchable 1D conductors for wearable textile and flexible electronic applications.

Solvent-Assisted Filling of Liquid Metal and Its Selective Dewetting for the Multilayered 3D Interconnect in Stretchable Electronics

As stretchable electronics are rapidly developing and becoming complex, the requirement for stretchable, multilayered, and large-area printed circuit boards (PCBs) is emerging. This demands a stretchable electrode and its vertical interconnect access (via) for 3-dimensional (3D) connectivity between layers. Here, we demonstrate solvent-assisted liquid metal (LM) filling into the submicrometer channel (∼400 nm), including via-hole filling and selective dewetting of LM. We provide the theoretical background of solvent-assisted LM filling and selective dewetting and reveal the osmotic pressure arising from anomalous mass transport phenomena, case II diffusion, which drives negative pressure, the spontaneous pulling of LM into the open channel. Also, we suggest design criteria for the geometry and dimension of LM interconnects to obtain structural stability without dewetting, based on the theoretical and computational background. We demonstrate a simple stretchable near-field communication (NFC) device including transferred micrometer-size light-emitting diodes (LEDs) with only 230 μm to the stretchable liquid metal PCB, without any soldering process. The device operates stably under repetitive stretching and releasing (∼50% uniaxial strain) due to the stable connection through the LM via between the upper and lower layers. Finally, we propose a concept for modular-type stretchable electronics, based on the cohesive liquid nature of LM. As a building block, the functional module can be easily removed from a mainframe, and replaced by another functional module, to suit user demand.

Thermal-Sinterable EGaIn Nanoparticle Inks for Highly Deformable Bioelectrode Arrays

Liquid metal (especially eutectic gallium indium, EGaIn) nanoparticle inks overcome the poor wettability of high surface tension EGaIn to elastomer substrates and show great potential in soft electronics. Normally, a sintering strategy is required to break the oxide shells of the EGaIn nanoparticles (EGaIn NPs) to achieve conductive paths. Herein, for the first time, thermal-sinterable EGaIn NP inks are prepared by introducing thermal expansion microspheres (TEMs) into EGaIn NP solution. Through the mechanical pressure induced by the expansion of the heated TEMs, the printed EGaIn NPs can be sintered into electrically conductive paths to achieve highly stretchable bioelectrode arrays, which exhibit giant electromechanical performance (up to 680% strain), good cyclic stability (over 2 × 10⁴  cycles), and stable conductivity after high-speed rotation (6000 rpm). Simultaneously, the recording sites are hermetically sealed by ionic elastomer layers, ensuring the complete leakage-free property of EGaIn and reducing the electrochemical impedance of the electrodes (891.16 Ω at 1 kHz). The bioelectrode is successfully applied to monitor dynamic electromyographic signals. The sintering strategy overcomes the disadvantages of the traditional sintering strategies, such as leakage of EGaIn, reformation of large EGaIn droplets, and low throughput, which promotes the application of EGaIn in soft electronics.

A crack compensation strategy for highly stretchable conductors based on liquid metal inclusions

Crack control strategies have been proven very useful for enhancing the stretchability of metal film-based stretchable conductors. However, existing strategies often suffer from the drawbacks of complicated preparation and predefined effective directions. Here, we propose a crack compensation strategy for preparing conductors featured with high stretchability by using liquid metal microparticles (LMMPs)-embedded polydimethylsiloxane (PDMS) as the substrate with a thin film of gold (Au) sputtered on the surface. LMMPs can be elongated to connect the cracked Au film upon stretching, which can form a conductive "island-tunnel" (IT) architecture to compensate for the cracks and maintain the conductivity. The high performance of the stretchable conductor is demonstrated by using it as electrodes to record surface electromyography of human brachioradialis and monitor electrocorticography signals of a rat in normal and epileptic states. The developed strategy shows the potential to provide a new perspective for the fabrication of flexible electronics.

Soft electrochemical bubble actuator with liquid metal electrode using an embodied hydrogel pneumatic source

Soft pneumatic actuators-such as those used for soft robotics-achieve actuation by inflation of pneumatic chambers. Here, we report the use of the electrochemical reduction of water to generate gaseous products that inflate pneumatic chambers. Whereas conventional pneumatic actuators typically utilize bulky mechanical pumps, the approach here utilizes only electricity. In contrast to dielectric actuators, which require ∼kV to actuate, the electrochemical approach uses a potential of a few volts. The applied potential converts liquid water-a safe, abundant, and cheap fuel-into hydrogen gas. Since the chambers are constructed of hydrogel, the body of the actuator provides an abundant supply of water that ultimately converts to gas. The use of liquid metal for the electrode makes the entire device soft and ensures intimate contact between the chamber walls and the electrode during inflation. The device can inflate in tens of seconds, which is slower than other pneumatic approaches, but much faster than actuating hydrogels via principles of swelling. The actuation volume can be predicted and controlled based on the input parameters such as time and voltage. The actuation shape and position can also be controlled by the position of the electrodes and the geometry of the device. Such actuators have the potential to make tether-less (pump-free), electrically-controlled soft devices that can even operate underwater.

A Bibliometric Analysis of Wearable Device Research Trends 2001-2022-A Study on the Reversal of Number of Publications and Research Trends in China and the USA

In recent years, Wearable Devices have been used in a wide variety of applications and fields, but because they span so many different disciplines, it is difficult to ascertain the intellectual structure of this entire research domain. No review encompasses the whole research domain related to Wearable Devices. In this study, we collected articles on wearable devices from 2001 to 2022 and quantitatively organized them by bibliometric analysis to clarify the intellectual structure of this research domain as a whole. The cluster analysis, co-occurrence analysis, and network centrality analysis were conducted on articles collected from the Web of Science. As a result, we identified one cluster that represents applied research and two clusters that represent basic research in this research domain. Furthermore, focusing on the top two countries contributing to this research domain, China and the USA., it was confirmed that China is extremely inclined toward basic research and the USA. toward applied research, indicating that applied and basic research are in balance. The basic intellectual structure of this cross-sectional research domain was identified. The results summarize the current state of research related to Wearable Devices and provide insight into trends.

A facile and scalable patterning approach for ultrastretchable liquid metal features

Liquid metals represent an attractive class of compliant conductors featuring metallic conductivity and inherent deformability. The widespread implementation of liquid metal conductors in stretchable electronics is currently hindered by the lack of a facile patterning approach. In this study, we introduce a facile and scalable patterning approach to create liquid metal features on an elastomer substrate. A screen-printed Ag nanoflake pattern is employed as a template for the subsequent selective coating of a liquid metal layer. The as-prepared liquid metal conductors show a bulk-level conductivity of ∼2.7 × 10⁴ S cm^-1, an ultrahigh stretchability of up to 700% tensile strain, and excellent electromechanical durability. The practical suitability is demonstrated by the successful fabrication of an ultradeformable ribbon cable and a smart sensing glove. The efficient and economical access to ultrastretchable liquid metal features may open up a broad range of emerging applications in soft electronic devices and systems.

Fabrication and Functionality Integration Technologies for Small-Scale Soft Robots

Small-scale soft robots are attracting increasing interest for visible and potential applications owing to their safety and tolerance resulting from their intrinsic soft bodies or compliant structures. However, it is not sufficient that the soft bodies merely provide support or system protection. More importantly, to meet the increasing demands of controllable operation and real-time feedback in unstructured/complicated scenarios, these robots are required to perform simplex and multimodal functionalities for sensing, communicating, and interacting with external environments during large or dynamic deformation with the risk of mismatch or delamination. Challenges are encountered during fabrication and integration, including the selection and fabrication of composite/materials and structures, integration of active/passive functional modules with robust interfaces, particularly with highly deformable soft/stretchable bodies. Here, methods and strategies of fabricating structural soft bodies and integrating them with functional modules for developing small-scale soft robots are investigated. Utilizing templating, 3D printing, transfer printing, and swelling, small-scale soft robots can be endowed with several perceptual capabilities corresponding to diverse stimulus, such as light, heat, magnetism, and force. The integration of sensing and functionalities effectively enhances the agility, adaptability, and universality of soft robots when applied in various fields, including smart manufacturing, medical surgery, biomimetics, and other interdisciplinary sciences.

The stiffness-dependent tumor cell internalization of liquid metal nanoparticles

The properties of nanoparticle (NP) carriers, such as size, shape and surface state, have been proven to dramatically affect their uptake by tumor cells, thereby influencing and determining the effect of nanomedicine on tumor theranostics. However, the effect of the stiffness of NPs on their cellular internalization remains unclear, especially for circumstances involving active or passive NP targeting. In this work, we constructed eutectic gallium indium liquid metal NPs with the same particle size, shape and surface charge properties but distinct stiffness via tailoring the surface oxidation and silica coating. It has been found that the softer NPs would be endocytosed much slower than their stiffer counterparts in the presence of specific ligand-receptor interaction. Interestingly, once the interaction is eliminated, softer NPs are internalized faster than the stiffer ones. Based on experimental observations and theoretical verification, we demonstrate that this phenomenon is mainly caused by varying degrees of deformation of soft NPs induced by ligand-receptor interactions. Such a finding of the stiffness effect of NPs implies great potential for fundamental biomedical applications, such as the rational design of nanomedicines.

Triple crosslinking conductive hydrogels with digitally printable and outstanding mechanical stability for high-resolution conformable bioelectronics

Soft, conductive, and stretchable hydrogels offer a broad variety of applications, including skin-interfacing electrodes, biomonitoring patches, and electrostimulation. Despite rapid developments over the last decades, a combination of good electrical and mechanical properties, low-cost fabrication, and biocompatibility is yet to be demonstrated. Also, the current methods for deposition and patterning of these hydrogels are manual, and there is a need toward autonomous and digital fabrication techniques. In this work, we demonstrate a novel Gallium (Ga) embedded sodium-alginate-polyacrylamide-LAPONITE® (Ga-SA-PAAM-La) hydrogel, that is ultra-stretchable (Maximum strain tolerance of∼985%), tough (toughness ∼30 kJ m^-3), bio-adhesive (adhesion energy ∼216 J m^-2), conductive, and digitally printable. Ga nanoparticles are used as radical initiators. By adjusting the sonication parameters, we control the solution viscosity and curing time, thus allowing us to prepare pre-polymers with the desired properties for casting, or digital printing. These hydrogels benefit from a triple-network structure due to the role of Ga droplets as crosslinkers besides BIS (N,N'-methylene-bis-acrylamide) and LAPONITE®, thus resulting in tough composite hydrogels. The inclusion of LAPONITE® into the hydrogel network improved its electrical conductivity, adhesion, digital printability, and its mechanical properties, (>6× compared to the same hydrogel without LAPONITE®). As electrodes in the electrocardiogram, the signal-to-noise ratio was surprisingly higher than the medical-grade Ag/AgCl electrodes, which are applied for monitoring muscles, heart, respiration, and body joint angle through EMG, ECG, and bioimpedance measurements. The results obtained prove that such digitally printed conductive and tough hydrogels can be used as potential electrodes and sensors in practical applications in the next generation of printed wearable computing devices.

Beyond Human Touch Perception: An Adaptive Robotic Skin Based on Gallium Microgranules for Pressure Sensory Augmentation

Robotic skin with human-skin-like sensing ability holds immense potential in various fields such as robotics, prosthetics, healthcare, and industries. To catch up with human skin, numerous studies are underway on pressure sensors integrated on robotic skin to improve the sensitivity and detection range. However, due to the trade-off between them, existing pressure sensors have achieved only a single aspect, either high sensitivity or wide bandwidth. Here, an adaptive robotic skin is proposed that has both high sensitivity and broad bandwidth with an augmented pressure sensing ability beyond the human skin. A key for the adaptive robotic skin is a tunable pressure sensor built with uniform gallium microgranules embedded in an elastomer, which provides large tuning of the sensitivity and the bandwidth, excellent sensor-to-sensor uniformity, and high reliability. Through the mode conversion based on the solid-liquid phase transition of gallium microgranules, the sensor provides 97% higher sensitivity (16.97 kPa^-1 ) in the soft mode and 262.5% wider bandwidth (≈1.45 MPa) in the rigid mode compared to the human skin. Successful demonstration of the adaptive robotic skin verifies its capabilities in sensing a wide spectrum of pressures ranging from subtle blood pulsation to body weight, suggesting broad use for various applications.

Transportable, Endurable, and Recoverable Liquid Metal Powders with Mechanical Sintering Conductivity for Flexible Electronics and Electromagnetic Interference Shielding

Liquid metals (LMs, e.g., EGaIn) promise a vast potential in accelerating the development of flexible electronics, smart robots, and wearable and biomedical devices. Although a variety of emerging processing methods are reported, they suffer several risks (e.g., leakage, weak adhesion, and low colloidal and chemical stability) because of their excellent fluidity, high surface tension, and rapid oxidation. Herein, liquid metal powders (LMPs) are fabricated based on a versatile method by vigorously stirring EGaIn with nonmetallic or organic particles through interfacial interactions. During the mixing process, EGaIn microdroplets are wrapped with a nonmetallic or an organic shell by electrostatic adsorption, and a more sticky oxide layer is constantly generated and then broken owing to the shearing friction. These transportable powders exhibit superior stability under extreme conditions (e.g., water and high temperature), being capable of recovering electrical conductivity and strong adhesion on different substrates upon mechanical sintering. A flexible, robust, and conductive coating can be constructed via swabbing with an integrated Joule heating effect and excellent electromagnetic interference shielding performances, and it is applicable in flexible wearable electronics, microcircuits, and wireless power transmission systems.

Tough Bonding of Liquid Metal-Elastomer Composites for Multifunctional Adhesives

Liquid metal (LM) composites, which consist of LM droplets dispersed in highly deformable elastomers, have recently gained interest as a multifunctional material for soft robotics and electronics. The incorporation of LM into elastic solids allows for unique combinations of material properties such as high stretchability with thermal and electrical conductivity comparable to metals. However, it is currently a challenge to incorporate LM composites into integrated systems consisting of diverse materials and components due to a lack of adhesion control. Here, a chemical anchoring methodology to increase adhesion of LM composites to diverse substrates is presented. The fracture energy increases up to 100× relative to untreated surfaces, with values reaching up to 7800 J m^-2 . Furthermore, the fracture energy, tensile modulus, and thermal conductivity can be tuned together by controlling the microstructure of LM composites. Finally, the bonding technique is used to integrate LM composites with functional electronic components without encapsulation or clamping, allowing for extreme deformations while maintaining exceptional thermal and electrical conductivity. These findings can accelerate the adoption of LM composites into complex soft robotic and electronic systems where strong, reliable bonding between diverse materials and components is required.

Printable Metal-Polymer Conductors for Local Drug Delivery

Safe and effective local drug delivery is challenging due to complex physiological barriers that limit the entry of drugs. Here, we report the metal-polymer conductors (MPCs) for local drug delivery via iontophoresis or electroporation. The MPCs are stretchable, conductive, and biocompatible. The flexible MPCs of different geometries are used both on a dry, flat surface (skin) and a moist, curved surface (cornea) with conformability. Conformal integration with the tissues enables good mechanical/electrical properties and realizes application of electrical voltage to the target areas for local drug delivery. By iontophoresis and electroporation, the MPCs achieve efficient delivery of doxorubicin and siRNA, leading to tumor regression and inhibition of corneal neovascularization, respectively. Our work presents an efficient strategy to harness the power of the MPCs to broaden the scope of local drug delivery to dry and wet organs with different surface topography.

Mucosa-interfacing electronics

The surface mucosa that lines many of our organs houses myriad biometric signals and, therefore, has great potential as a sensor-tissue interface for high-fidelity and long-term biosensing. However, progress is still nascent for mucosa-interfacing electronics owing to challenges with establishing robust sensor-tissue interfaces; device localization, retention and removal; and power and data transfer. This is in sharp contrast to the rapidly advancing field of skin-interfacing electronics, which are replacing traditional hospital visits with minimally invasive, real-time, continuous and untethered biosensing. This Review aims to bridge the gap between skin-interfacing electronics and mucosa-interfacing electronics systems through a comparison of the properties and functions of the skin and internal mucosal surfaces. The major physiological signals accessible through mucosa-lined organs are surveyed and design considerations for the next generation of mucosa-interfacing electronics are outlined based on state-of-the-art developments in bio-integrated electronics. With this Review, we aim to inspire hardware solutions that can serve as a foundation for developing personalized biosensing from the mucosa, a relatively uncharted field with great scientific and clinical potential.

Robust Impact Effect and Super-Lyophobic Reduced Galinstan on Polymers Applied for Energy Harvester

In this paper, we present a novel reduced Galinstan-based microfluidic energy harvester, which can converse kinetic energy to electricity from an arbitrary vibration source. Firstly, the wetting behaviors of reduced Galinstan are performed, which shows a robust impact effect on polymer substrates. Moreover, the electric circuit model of the reduced Galinstan-based energy harvester is made and discussed by the use of the EDLCs (electrical double layer capacitors). After modeling, the microfluidic energy harvester with coplanar microfluidic channels is designed and fabricated. Finally, the performance of the microfluidic energy harvester is investigated, which can harvest multi-direction vibration energy. The experiment results demonstrate that the novel reduced Galinstan-based microfluidic energy harvester is suitably and uniquely applied in a complex vibration environment.

Metamaterial Absorbers: From Tunable Surface to Structural Transformation

Since the first demonstration, remarkable progress has been made in the theoretical analysis, structural design, numerical simulation, and potential applications of metamaterial absorbers (MAs). With the continuous advancement of novel materials and creative designs, the absorption of MAs is significantly improved over a wide frequency spectrum from microwaves to the optical regime. Further, the integration of active elements into the MA design allows the dynamical manipulation of electromagnetic waves, opening a new platform to push breakthroughs in metadevices. In the last several years, numerous efforts have been devoted to exploring innovative approaches for incorporating tunability to MAs, which is highly desirable because of the progressively increasing demand on designing versatile metadevices. Here, a comprehensive and systematical overview of active MAs with adaptive and on-demand manner is presented, highlighting innovative materials and unique strategies to precisely control the electromagnetic response. In addition to the mainstream method by manipulating periodic patterns, two additional approaches, including tailoring dielectric spacer and transforming overall structure are called back. Following this, key parameters, such as operating frequency, relative tuning range, and switching speed are summarized and compared to guide for optimum design. Finally, potential opportunities in the development of active MAs are discussed.

Muscle-Inspired Linear Actuators by Electrochemical Oxidation of Liquid Metal Bridges

Progress in artificial muscles relies on new architectures that combine soft matter with transduction mechanisms for converting controlled stimuli into mechanical work. Liquid metal, in particular eutectic gallium-indium (EGaIn), is promising for creating an artificial muscle since it is intrinsically deformable and capable of generating significant force and shape change through low voltage stimulation. In this work, a muscle-inspired structure for designing liquid metal actuators is presented, where EGaIn droplets are configured with copper pads to linearly contract. By theory and experiments, it is demonstrated that this design enables higher work densities and stress, making it a favorable actuator at smaller length scales. Furthermore, higher frequency (up to 5 Hz) operation is achieved by prestretching an antagonistic pair of actuators, where energy bistability enables fast-switching actuation. Overall, this muscle-inspired architecture shows a unique combination of low voltage operation, higher energy density at smaller scales, structural scalability, and higher frequency actuation.

Textile-Integrated Liquid Metal Electrodes for Electrophysiological Monitoring

Next generation textile-based wearable sensing systems will require flexibility and strength to maintain capabilities over a wide range of deformations. However, current material sets used for textile-based skin contacting electrodes lack these key properties, which hinder applications such as electrophysiological sensing. In this work, a facile spray coating approach to integrate liquid metal nanoparticle systems into textile form factors for conformal, flexible, and robust electrodes is presented. The liquid metal system employs functionalized liquid metal nanoparticles that provide a simple "peel-off to activate" means of imparting conductivity. The spray coating approach combined with the functionalized liquid metal system enables the creation of long-term reusable textile-integrated liquid metal electrodes (TILEs). Although the TILEs are dry electrodes by nature, they show equal skin-electrode impedances and sensing capabilities with improved wearability compared to commercial wet electrodes. Biocompatibility of TILEs in an in vivo skin environment is demonstrated, while providing improved sensing performance compared to previously reported textile-based dry electrodes. The "spray on dry-behave like wet" characteristics of TILEs opens opportunities for textile-based wearable health monitoring, haptics, and augmented/virtual reality applications that require the use of flexible and conformable dry electrodes.

Femtosecond Laser-Induced Supermetalphobicity for Design and Fabrication of Flexible Tactile Electronic Skin Sensor

Pursuing flexible tactile electronic skin sensors with superior comprehensive performances is highly desired in practical applications. However, current flexible tactile electronic skin sensors suffer insufficient flexibility and sensitivity, as well as high-cost and low-efficiency in fabrication, and are susceptible to contamination in sensing performances. Here, a highly sensitive all-flexible tactile sensor (AFTS) is presented with capacitive sensing that combines a double-side micropyramids dielectric layer and a liquid metal (LM) electrode. The design and fabrication of LM-based AFTS are based on supermetalphobicity induced by femtosecond laser. The supermetalphobic micropyramids lead to a high sensitivity up to 2.78 kPa^-1, an ultralow limit of detection of ∼3 Pa, a fast response time of 80 ms, and an excellent durability of cyclic load over 10 000 times. The used femtosecond laser enables programmable, high-efficiency, low-cost, and large-scale fabrication of supermetalphobic double-side micropyramids, which is difficult to implement using conventional techniques. Furthermore, the outer substrates are treated by a femtosecond laser, endowing the AFTS with excellent antifouling performance and stable sensing signals in the highly humid environment. Successful monitoring of human physiological and motion signals demonstrates the potential of our developed AFTS for wearable biomonitoring applications.

Flexible Pressure Sensors with Combined Spraying and Self-Diffusion of Carbon Nanotubes

High-performance wearable sensors are required for applications in medical health and human-machine interaction, but their application has limited owing to the trade-off between sensitivity, pressure range, and durability. Herein, we propose the combined spraying and self-diffusion process of carbon nanotubes (CNTs) to balance and improve these parameters with the CNTs spontaneously diffusing into the film surface before the film curing. The obtained sensor not only achieves high sensitivity (155.54 kPa^-1) and ultrawide pressure detection range (0.1-500 kPa) but also exhibits exceptional durability (over 12,000 pressure cycles at a high pressure of 300 kPa). In addition, the sensor exhibits a fast response (25 ms), good stability, and full flexibility. This process is a general approach that may improve the performance of various types of thin film piezoresistive sensors. Besides, the fabricated sensors can be flexibly scaled into sensor arrays and communicate with smart devices to achieve wireless smart monitoring. At present, the sensor shows broad application prospects in the fields of intelligent medical health and motion sensing.

Temperature and chemical effects on the interfacial energy between a Ga-In-Sn eutectic liquid alloy and nanoscopic asperities

The interfacial energies between a eutectic Ga-In-Sn liquid alloy and single nanoscopic asperities of SiO _x , Au, and PtSi have been determined in the temperature range between room temperature and 90 °C by atomic force spectroscopy. For all asperities used here, we find that the interfacial tension of the eutectic Ga-In-Sn liquid alloy is smaller than its free surface energy by a factor of two (for SiO _x ) to eight (for PtSi). Any significant oxide growth upon heating studied was not detected here, and the measured interfacial energies strongly depend on the chemistry of the asperities. We also observe a weak increase of the interfacial energy as a function of the temperature, which can be explained by the reactivity between SiO _x and Ga and the occurrence of chemical segregation at the liquid alloy surface.

Viscoelastic Metal-in-Water Emulsion Gel via Host-Guest Bridging for Printed and Strain-Activated Stretchable Electrodes

Stretchable conductive electrodes that can be made by printing technology with high resolution is desired for preparing wearable electronics. Printable inks composed of liquid metals are ideal candidates for these applications, but their practical applications are limited by their low stability, poor printability, and low conductivity. Here, thixotropic metal-in-water (M/W) emulsion gels (MWEGs) were designed and developed by stabilizing and bridging liquid metal droplets (LMDs) via a host-guest polymer. In the MWEGs, the hydrophilic main chain of the host-guest polymers emulsified and stabilized LMDs via coordination bonds. The grafted cyclodextrin and adamantane groups formed dynamic inclusion complexes to bridge two neighboring LMDs, leading to the formation of a dynamically cross-linked network of LMDs in the aqueous phase. The MWEGs exhibited viscoelastic and shear-thinning behavior, making them ideal for direct three-dimensional (3D) and screen printing with a high resolution (∼65 μm) to assemble complex patterns consisting of ∼95 wt % liquid metal. When stretching the printed patterns, strong host-guest interactions guaranteed that the entire droplet network was cross-linked, while the brittle oxide shell of the droplets ruptured, releasing the liquid metal core and allowing it to fuse into continuous conductive pathways under an ultralow critical strain (<1.5%). This strain-activated conductivity exceeded 15800 S/cm under a large strain of 800% and exhibited long-term cyclic stability and robustness.

Manipulating liquid metal flow for creating standalone structures with micro-and nano-scale features in a single step

Standalone structures with periodic surface undulations or ripples can be spontaneously created upon flowing a liquid metal, e.g. Ga, over a metallic film, e.g. Pt, Au, etc, through a complex 'wetting-reaction'-driven process. Due to the ability of 3-dimensional patterning at the small length scale in a single step, the liquid metal 'ripple' flow is a promising non-conventional patterning technique. Herein, we examine the effect of a few process parameters, such as distance away from the liquid reservoir, size of the liquid reservoir, and the geometry, thickness, and width of substrate metal film, on the nature of the ripple flow to produce finer patterns with feature sizes of ≤ 2μm. The height and the pitch of the pattern decrease with distance from the liquid reservoir and decrease in the reservoir volume. Furthermore, a decrease in the thickness and width of the substrate film also leads to a decrease in the height and pitch of the ripples. Finally, the application of an external electric field also controls the ripple patterns. By optimizing various parameters, standalone ripple structures of Ga with the height and pitch of ≤ 500 nm are created. As potential applications, the ripple patterns with micro-and nano-scopic features are demonstrated to produce a diffraction grating and a die for micro-stamping.

Scalable and Reconfigurable Green Electronic Textiles with Personalized Comfort Management

Electronic textiles, inherited with the wearability of conventional clothes, are deemed fundamental for emerging wearable electronics, particularly in the Internet of Things era. However, the electronic waste produced by electronic textiles will further exacerbate the severe pollution in traditional textiles. Here, we develop a large-scale green electronic textile using renewable bio-based polylactic acid and sustainable eutectic gallium-indium alloys. The green electronic textile is extremely abrasion resistant and can degrade naturally in the environment even if abrasion produces infinitesimal amounts of microplastics. The mass loss and performance change rates of the reconstituted green electronic textiles are all below 5.4% after going through the full-cycle recycling procedure. This green electronic textile delivers high physiological comfort (including electronic comfort and thermal-moisture comfort), enables wireless power supply (without constraints by, e.g., wires and ports), has 2 orders of magnitude better air and moisture permeability than the body requires, and can lower skin temperature by 5.2 °C.

Nanomaterial integrated 3D printing for biomedical applications

3D printing technology, otherwise known as additive manufacturing, has provided a promising tool for manufacturing customized biomaterials for tissue engineering and regenerative medicine applications. A vast variety of biomaterials including metals, ceramics, polymers, and composites are currently being used as base materials in 3D printing. In recent years, nanomaterials have been incorporated into 3D printing polymers to fabricate innovative, versatile, multifunctional hybrid materials that can be used in many different applications within the biomedical field. This review focuses on recent advances in novel hybrid biomaterials composed of nanomaterials and 3D printing technologies for biomedical applications. Various nanomaterials including metal-based nanomaterials, metal-organic frameworks, upconversion nanoparticles, and lipid-based nanoparticles used for 3D printing are presented, with a summary of the mechanisms, functional properties, advantages, disadvantages, and applications in biomedical 3D printing. To finish, this review offers a perspective and discusses the challenges facing the further development of nanomaterials in biomedical 3D printing.

Influence of microstructural alterations of liquid metal and its interfacial interactions with rubber on multifunctional properties of soft composite materials

Liquid metal (LM)-based polymer composites are currently new breakthrough and emerging classes of soft multifunctional materials (SMMs) having immense transformative potential for soft technological applications. Currently, room-temperature LMs, mostly eutectic gallium‑indium and Galinstan alloys are used to integrate with soft polymer due to their outstanding properties such as high conductivity, fluidity, low adhesion, high surface tension, low cytotoxicity, etc. The microstructural alterations and interfacial interactions controlling the efficient integration of LMs with rubber are the most critical aspects for successful implementation of multifunctionality in the resulting material. In this review article, a fundamental understanding of microstructural alterations of LMs to the formation of well-defined percolating networks inside an insulating rubber matrix has been established by exploiting several existing theoretical and experimental studies. Furthermore, effects of the chemical modifications of an LM surface and its interfacial interactions on the compatibility between solid rubber and fluid filler phase have been discussed. The presence of thin oxide layer on the LM surface and the effects and challenges it poses to the adequate functionalization of these materials have been discussed. Plausible applications of SMMs in different soft matter technologies, like soft robotics, flexible electronics, soft actuators, sensors, etc. have been provided. Finally, the current technical challenges and further prospective to the development of SMMs using non‑silicone rubbers have been critically discussed. This review is anticipated to infuse a new impetus to the associated research communities for the development of next generation SMMs.

Liquid-Metal-Coated Magnetic Particles toward Writable, Nonwettable, Stretchable Circuit Boards, and Directly Assembled Liquid Metal-Elastomer Conductors

Liquid metal is a promising conductor material for producing soft and stretchable circuit "boards" that can enable next-generation electronics by electrically connecting and mechanically supporting electronic components. While liquid metal in general can be used to fabricate soft and stretchable circuits, magnetic liquid metal is appealing because it can be used for self-healing electronics and actuators by external magnetic fields. Liquid metal can be rendered into particles that can then be used for sensors and catalysts through sonication. We used this feature to produce "novel" conductive and magnetic particles. Mixing ferromagnetic iron particles into the liquid metal (gallium) produces conductive ferrofluids that can be rendered into gallium-coated iron particles by sonication. The gallium shell of the particles is extremely soft, while the rigid iron core can induce high friction in response to mechanical pressure; thus, hand-sintering of the particles can be used to directly write the conductive traces when the particles are cast as a film on elastic substrates. The surface topography of the particles can be manipulated by forming GaOOH crystals through sonication in DI water, thus resulting in nonwettable circuit boards. These gallium-coated iron particles dispersed in uncured elastomer can be assembled to form conductive microwires with the application of magnetic fields.

Shielded soft force sensors

Force and strain sensors made of soft materials enable robots to interact intelligently with their surroundings. Capacitive sensing is widely adopted thanks to its low power consumption, fast response, and facile fabrication. Capacitive sensors are, however, susceptible to electromagnetic interference and proximity effects and thus require electrical shielding. Shielding has not been previously implemented in soft capacitive sensors due to the parasitic capacitance between the shield and sensing electrodes, which changes when the sensor is deformed. We address this crucial challenge by patterning the central sensing elastomer layer to control its compressibility. One design uses an ultrasoft silicone foam, and the other includes microchannels filled with liquid metal and air. The force resolution is sub-mN both in normal and shear directions, yet the sensor withstands large forces (>20 N), demonstrating a wide dynamic range. Performance is unaffected by nearby high DC and AC electric fields and even electric sparks.

Capacitive soft force sensors require electrical shielding from electromagnetic interference, but this shielding can mess with the effectiveness of the sensing electrodes. Here, Aksoy et al. solve this problem by patterning the central sensing elastomer layer to control its compressibility.