All-solid-state spatial light modulator with independent phase and amplitude control for three-dimensional LiDAR applications

The rise of electrically tunable metasurfaces

Metasurfaces, which offer a diverse range of functionalities in a remarkably compact size, have captured the interest of both scientific and industrial sectors. However, their inherent static nature limits their adaptability for their further applications. Reconfigurable metasurfaces have emerged as a solution to this challenge, expanding the potential for diverse applications. Among the series of tunable devices, electrically controllable devices have garnered particular attention owing to their seamless integration with existing electronic equipment. This review presents recent progress reported with respect to electrically tunable devices, providing an overview of their technological development trajectory and current state of the art. In particular, we analyze the major tuning strategies and discuss the applications in spatial light modulators, tunable optical waveguides, and adaptable emissivity regulators. Furthermore, the challenges and opportunities associated with their implementation are explored, thereby highlighting their potential to bridge the gap between electronics and photonics to enable the development of groundbreaking optical systems.

An Electrochemically Programmable Metasurface with Independently Controlled Metasurface Pixels at Optical Frequencies

Metasurfaces have revolutionized optical technologies by offering powerful, compact, and versatile solutions to control light. Conducting polymers, characterized by their conjugated molecular structures, facilitate charge transport and exhibit interesting electrical, optical, and mechanical properties. Integrating conducting polymers with optical metasurfaces can unlock new opportunities and functionalities in modern optics. In this work, we demonstrate an electrochemically programmable metasurface with independently controlled metasurface pixels at optical frequencies. Electrochemical modulation of locally conjugated polyaniline on gold nanorods, which are arranged on addressable electrodes according to the Pancharatnam-Berry phase design, enables dynamic control over the metasurface pixels into programmable configurations. With the same metasurface device, we showcase diverse optical functions, including dynamic beam diffraction and varifocal lensing along and off the optical axis. The synergy between flat optics and conducting polymer science holds immense potential to enhance the performance and function versatility of metasurfaces, paving the way for innovative optical applications.

Active Beam Steering Enabled by Photonic-Crystal Surface-Emitting Laser

Emitting light toward on-demand directions is important for various optoelectronic applications, such as optical communication, displaying, and ranging. However, almost all existing directional emitters are assemblies of passive optical antennae and external light sources, which are usually bulky and fragile and show unendurable loss of light power. Here we theoretically propose and experimentally demonstrate a conceptual design of a directional emitter, by using a single surface-emitting laser source itself to achieve dynamically controlled beam steering. The laser is built on photonic crystals that operate near the band edges in the continuum. By shrinking laser sizes to tens-of-wavelength, the optical modes quantize in three-dimensional momentum space, and each of them directionally radiates toward the far-field. Further utilizing the luminescence spectrum shifting effect under current injection, we consecutively select a sequence of modes into lasing action and show the laser maintaining single-mode operation with line widths at a minimum of 1.8 MHz and an emitting power of ∼10 milliwatts, and we demonstrate fast beam steering across a range of 3.2° × 4° on a time scale of 500 ns. Our work proposes a method for on-chip active beam steering for the development of automotive, industrial, and robotic applications.

Enhancing 2D Photonics and Optoelectronics with Artificial Microstructures

By modulating subwavelength structures and integrating functional materials, 2D artificial microstructures (2D AMs), including heterostructures, superlattices, metasurfaces and microcavities, offer a powerful platform for significant manipulation of light fields and functions. These structures hold great promise in high-performance and highly integrated optoelectronic devices. However, a comprehensive summary of 2D AMs remains elusive for photonics and optoelectronics. This review focuses on the latest breakthroughs in 2D AM devices, categorized into electronic devices, photonic devices, and optoelectronic devices. The control of electronic and optical properties through tuning twisted angles is discussed. Some typical strategies that enhance light-matter interactions are introduced, covering the integration of 2D materials with external photonic structures and intrinsic polaritonic resonances. Additionally, the influences of external stimuli, such as vertical electric fields, enhanced optical fields and plasmonic confinements, on optoelectronic properties is analysed. The integrations of these devices are also thoroughly addressed. Challenges and future perspectives are summarized to stimulate research and development of 2D AMs for future photonics and optoelectronics.

Dynamic Hyperspectral Holography Enabled by Inverse-Designed Metasurfaces with Oblique Helicoidal Cholesterics

Metasurfaces are flat arrays of nanostructures that allow exquisite control of phase and amplitude of incident light. Although metasurfaces offer new active element for both fundamental science and applications, the challenge still remains to overcome their low information capacity and passive nature. Here, by integrating an inverse-designed-metasurface with oblique helicoidal cholesteric liquid crystal (ChOH), simultaneous spatial and spectral tunable metasurfaces with a high information capacity for dynamic hyperspectral holography, are demonstrated. The inverse design facilitates a single-phase map encoding of ten independent holographic images at different wavelengths. ChOH provides precise spectral modulation with narrow bandwidth and wide tunable regime in response to programmed stimuli, thus enabling dynamic switching of the multicolor holography. The results provide simple and generalizable principles for the rational design of interactive metasurfaces that will find numerous applications, including security platform.

Reconfigurable Micro/Nano-Optical Devices Based on Phase Transitions: From Materials, Mechanisms to Applications

In recent years, numerous efforts have been devoted to exploring innovative micro/nano-optical devices (MNODs) with reconfigurable functionality, which is highly significant because of the progressively increasing requirements for next-generation photonic systems. Fortunately, phase change materials (PCMs) provide an extremely competitive pathway to achieve this goal. The phase transitions induce significant changes to materials in optical, electrical properties or shapes, triggering great research interests in applying PCMs to reconfigurable micro/nano-optical devices (RMNODs). More specifically, the PCMs-based RMNODs can interact with incident light in on-demand or adaptive manners and thus realize unique functions. In this review, RMNODs based on phase transitions are systematically summarized and comprehensively overviewed from materials, phase change mechanisms to applications. The reconfigurable optical devices consisting of three kinds of typical PCMs are emphatically introduced, including chalcogenides, transition metal oxides, and shape memory alloys, highlighting the reversible state switch and dramatic contrast of optical responses along with designated utilities generated by phase transition. Finally, a comprehensive summary of the whole content is given, discussing the challenge and outlooking the potential development of the PCMs-based RMNODs in the future.

Complex-Amplitude Programmable Versatile Metasurface Platform Driven by Guided Wave

Metasurfaces have shown unparalleled controllability of electromagnetic (EM) waves. However, most of the metasurfaces need external spatial feeding sources, which renders practical implementation quite challenging. Here, a low-profile programmable metasurface with 0.05λ0 thickness driven by guided waves is proposed to achieve dynamic control of both amplitude and phase simultaneously. The metasurface is fed by a guided wave traveling in a substrate-integrated waveguide, avoiding external spatial sources and complex power divider networks. By manipulating the state of the p-i-n diodes embedded in each meta-atom, the proposed metasurface enables 1-bit amplitude switching between radiating and nonradiating states, as well as a 1-bit phase switching between 0° and 180°. As a proof of concept, two advanced functionalities, namely, low sidelobe-level beam scanning and Airy beam generation, are experimentally demonstrated with a single platform operating in the far- and near-field respectively. Such complex-amplitude, programmable, and low-profile metasurfaces can overcome integration limitations of traditional metasurfaces, and open up new avenues for more accurate and advanced EM wave control within an unprecedented degree of freedom.

Nonvolatile Phase-Only Transmissive Spatial Light Modulator with Electrical Addressability of Individual Pixels

Active metasurfaces with tunable subwavelength-scale nanoscatterers are promising platforms for high-performance spatial light modulators (SLMs). Among the tuning methods, phase-change materials (PCMs) are attractive because of their nonvolatile, threshold-driven, and drastic optical modulation, rendering zero-static power, crosstalk immunity, and compact pixels. However, current electrically controlled PCM-based metasurfaces are limited to global amplitude modulation, which is insufficient for SLMs. Here, an individual-pixel addressable, transmissive metasurface is experimentally demonstrated using the low-loss PCM Sb2Se3 and doped silicon nanowire heaters. The nanowires simultaneously form a diatomic metasurface, supporting a high-quality-factor (∼406) quasi-bound-state-in-the-continuum mode. A global phase-only modulation of ∼0.25π (∼0.2π) in simulation (experiment) is achieved, showing ten times enhancement. A 2π phase shift is further obtained using a guided-mode resonance with enhanced light-Sb2Se3 interaction. Finally, individual-pixel addressability and SLM functionality are demonstrated through deterministic multilevel switching (ten levels) and tunable far-field beam shaping. Our work presents zero-static power transmissive phase-only SLMs, enabled by electrically controlled low-loss PCMs and individual meta-molecule addressable metasurfaces.

Silicon-based high-resolution and low-power-consumption two-dimensional beam scanner integrated with hybrid wavelength-tunable laser diode

Optical phased array (OPA) is a useful device for achieving the solid-state beam scanner required in compact light detection and ranging. However, conventional OPAs actively control the phase difference between arrays. Therefore, power consumption is extremely high in a high-resolution OPA. Herein, we fabricated a passive OPA with a 128-channel silicon arrayed waveguide and Si-dot grating antennas with large apertures. Moreover, we integrated a hybrid wavelength-tunable laser diode with a passive OPA. The field of view was 43.9° × 10.4°, and the FWHM of the beam width was 0.233° × 0.0495°. The power consumption per antenna was 0.397 mW.

GaAs Mid-IR Electrically Tunable Metasurfaces

In this work, we explore III-V based metal-semiconductor-metal structures for tunable metasurfaces. We use an epitaxial transfer technique to transfer a III-V thin film directly on metallic surfaces, realizing III-V metal-semiconductor-metal (MSM) structures without heavily doped semiconductors as substitutes for metal layers. The device platform consists of gold metal layers with a p-i-n GaAs junction. The target resonance wavelength can be tuned by modifying the geometry of the top metal grating on the GaAs, while systematic resonance tunability has been shown through the modulation of various carrier concentration injections in the mid-IR range. Electrically tunable metasurfaces with multilevel biasing can serve as a fundamental building block for electrically tunable metasurfaces. We believe that our demonstration can contribute to understanding the optical tuning of III-V under various biased conditions, inducing changes in metasurfaces.

Dynamic light manipulation via silicon-organic slot metasurfaces

Active metasurfaces provide the opportunity for fast spatio-temporal control of light. Among various tuning methods, organic electro-optic materials provide some unique advantages due to their fast speed and large nonlinearity, along with the possibility of using fabrication techniques based on infiltration. In this letter, we report a silicon-organic platform where organic electro-optic material is infiltrated into the narrow gaps of slot-mode metasurfaces with high quality factors. The mode confinement into the slot enables the placement of metallic electrodes in close proximity, thus enabling tunability at lower voltages. We demonstrate the maximum tuning sensitivity of 0.16nm/V, the maximum extinction ratio of 38% within ± 17V voltage at telecommunication wavelength. The device has 3dB bandwidth of 3MHz. These results provide a path towards tunable silicon-organic hybrid metasurfaces at CMOS-level voltages.

Dynamical control of nanoscale light-matter interactions in low-dimensional quantum materials

Tip-enhanced nano-spectroscopy and -imaging have significantly advanced our understanding of low-dimensional quantum materials and their interactions with light, providing a rich insight into the underlying physics at their natural length scale. Recently, various functionalities of the plasmonic tip expand the capabilities of the nanoscopy, enabling dynamic manipulation of light-matter interactions at the nanoscale. In this review, we focus on a new paradigm of the nanoscopy, shifting from the conventional role of imaging and spectroscopy to the dynamical control approach of the tip-induced light-matter interactions. We present three different approaches of tip-induced control of light-matter interactions, such as cavity-gap control, pressure control, and near-field polarization control. Specifically, we discuss the nanoscale modifications of radiative emissions for various emitters from weak to strong coupling regime, achieved by the precise engineering of the cavity-gap. Furthermore, we introduce recent works on light-matter interactions controlled by tip-pressure and near-field polarization, especially tunability of the bandgap, crystal structure, photoluminescence quantum yield, exciton density, and energy transfer in a wide range of quantum materials. We envision that this comprehensive review not only contributes to a deeper understanding of the physics of nanoscale light-matter interactions but also offers a valuable resource to nanophotonics, plasmonics, and materials science for future technological advancements.

High-Resolution Metalens Imaging with Sequential Artificial Intelligence Models

An analysis of the optical response of a GaN-based metalens was conducted alongside the utilization of two sequential artificial intelligence (AI) models in addressing the occasional issues of blurriness and color cast in captured images. The optical loss of the metalens in the blue spectral range was found to have resulted in the color cast of images. Autoencoder and CodeFormer sequential models were employed in order to correct the color cast and reconstruct image details, respectively. Said sequential models successfully addressed the color cast and reconstructed details for all of the allocated face image categories. Subsequently, the CIE 1931 chromaticity diagrams and peak signal-to-noise ratio analysis provided numerical evidence of the AI models' effectiveness in image reconstruction. Furthermore, the AI models can still repair the image without blue information. Overall, the integration of metalens and artificial intelligence models marks a breakthrough in enhancing the performance of full-color metalens-based imaging systems.

High quality factor metasurfaces for two-dimensional wavefront manipulation

The strong interaction of light with micro- and nanostructures plays a critical role in optical sensing, nonlinear optics, active optical devices, and quantum optics. However, for wavefront shaping, the required local control over light at a subwavelength scale limits this interaction, typically leading to low-quality-factor optical devices. Here, we demonstrate an avenue towards high-quality-factor wavefront shaping in two spatial dimensions based on all-dielectric higher-order Mie-resonant metasurfaces. We design and experimentally realize transmissive band stop filters, beam deflectors and high numerical aperture radial lenses with measured quality factors in the range of 202-1475 at near-infrared wavelengths. The excited optical mode and resulting wavefront control are both local, allowing versatile operation with finite apertures and oblique illumination. Our results represent an improvement in quality factor by nearly two orders of magnitude over previous localized mode designs, and provide a design approach for a new class of compact optical devices.

Dynamic Spectral Modulation on Meta-Waveguides Utilizing Liquid Crystal

The integration of metasurfaces and optical waveguides is gradually attracting the attention of researchers because it allows for more efficient manipulation and guidance of light. However, most of the existing studies focus on passive devices, which lack dynamic modulation. This work utilizes the meta-waveguides with liquid crystal(LC) to modulate the on-chip spectrum, which is the first experimentally verified, to the authors' knowledge. By applying a voltage, the refractive index of the liquid crystal surrounding the meta-waveguides can be tuned, resulting in a blue shift of the spectrum. The simulation shows that the 18.4 dB switching ratio can be achieved at 1550 nm. The meta-waveguides are prepared using electron beam lithography (EBL), and the improved transmittance of the spectrum in the short wavelength is experimentally verified, which is consistent with the simulation trend. At 1551.64 nm wavelength, the device achieves a switching ratio of ≈16 dB with an active area of 8 µm × 0.4 µm. Based on this device, an optoelectronic computing architecture for the Hadamard matrix product and a novel wavelength selection switch are proposed. This work offers a promising avenue for on-chip dynamic modulation in integrated photonics, which has the advantage of a compact active area, fast response time, and low energy consumption compared to conventional thermal-light modulation.

Hydrogel-Loaded Exosomes: A Promising Therapeutic Strategy for Musculoskeletal Disorders

Clinical treatment strategies for musculoskeletal disorders have been a hot research topic. Accumulating evidence suggests that hydrogels loaded with MSC-derived EVs show great potential in improving musculoskeletal injuries. The ideal hydrogels should be capable of promoting the development of new tissues and simulating the characteristics of target tissues, with the properties matching the cell-matrix constituents of autologous tissues. Although there have been numerous reports of hydrogels loaded with MSC-derived EVs for the repair of musculoskeletal injuries, such as intervertebral disc injury, tendinopathy, bone fractures, and cartilage injuries, there are still many hurdles to overcome before the clinical application of modified hydrogels. In this review, we focus on the advantages of the isolation technique of EVs in combination with different types of hydrogels. In this context, the efficacy of hydrogels loaded with MSC-derived EVs in different musculoskeletal injuries is discussed in detail to provide a reference for the future application of hydrogels loaded with MSC-derived EVs in the clinical treatment of musculoskeletal injuries.

Fast non-iterative algorithm for 3D point-cloud holography

Recently developed iterative and deep learning-based approaches to computer-generated holography (CGH) have been shown to achieve high-quality photorealistic 3D images with spatial light modulators. However, such approaches remain overly cumbersome for patterning sparse collections of target points across a photoresponsive volume in applications including biological microscopy and material processing. Specifically, in addition to requiring heavy computation that cannot accommodate real-time operation in mobile or hardware-light settings, existing sampling-dependent 3D CGH methods preclude the ability to place target points with arbitrary precision, limiting accessible depths to a handful of planes. Accordingly, we present a non-iterative point cloud holography algorithm that employs fast deterministic calculations in order to efficiently allocate patches of SLM pixels to different target points in the 3D volume and spread the patterning of all points across multiple time frames. Compared to a matched-performance implementation of the iterative Gerchberg-Saxton algorithm, our algorithm's relative computation speed advantage was found to increase with SLM pixel count, reaching >100,000x at 512 × 512 array format.

Hybrid silicon-organic Huygens' metasurface for phase modulation

Spatial light modulators have desirable applications in sensing and free space communication because they create an interface between the optical and electronic realms. Electro-optic modulators allow for high-speed intensity manipulation of an electromagnetic wavefront. However, most surfaces of this sort pose limitations due to their ability to modulate intensity rather than phase. Here we investigate an electro-optic modulator formed from a silicon-organic Huygens' metasurface. In a simulation-based study, we discover a metasurface design immersed in high-performance electro-optic molecules that can achieve near-full resonant transmission with phase coverage over the full 2π range. Through the electro-optic effect, we show 140 ∘ (0.79π) modulation over a range of -100 to 100 V at 1330 nm while maintaining near-constant transmitted field intensity (between 0.66 and 0.8). These results potentiate the fabrication of a high-speed spatial light modulator with the resolved parameters.

Revisiting the Design Strategies for Metasurfaces: Fundamental Physics, Optimization, and Beyond

Over the last two decades, the capabilities of metasurfaces in light modulation with subwavelength thickness have been proven, and metasurfaces are expected to miniaturize conventional optical components and add various functionalities. Herein, various metasurface design strategies are reviewed thoroughly. First, the scalar diffraction theory is revisited to provide the basic principle of light propagation. Then, widely used design methods based on the unit-cell approach are discussed. The methods include a set of simplified steps, including the phase-map retrieval and meta-atom unit-cell design. Then, recently emerging metasurfaces that may not be accurately designed using unit-cell approach are introduced. Unconventional metasurfaces are examined where the conventional design methods fail and finally potential design methods for such metasurfaces are discussed.

Electrically Tunable Reflective Metasurfaces with Continuous and Full-Phase Modulation for High-Efficiency Wavefront Control at Visible Frequencies

All-dielectric optical metasurfaces can locally control the amplitude and phase of light at the nanoscale, enabling arbitrary wavefront shaping. However, lack of postfabrication tunability has limited the true potential of metasurfaces for many applications. Here, we utilize a thin liquid crystal (LC) layer as a tunable medium surrounding the metasurface to achieve a phase-only spatial light modulator (SLM) with high reflection in the visible frequency, exhibiting active and continuous resonance tuning with associated 2π phase control and uncoupled amplitude. Dynamic wavefront shaping is demonstrated by programming 96 individually addressable electrodes with a small pixel pitch of ∼1 μm. The small pixel size is facilitated by the reduced LC thickness, strongly suppressing cross-talk among pixels. This device is used to demonstrate dynamic beam steering with a wide field-of-view and high absolute diffraction efficiencies. We believe that our demonstration may help realize next-generation, high-resolution SLMs, with wide applications in dynamic holography, tunable optics, and light detection and ranging (LiDAR), to mention a few.

Simultaneous Control of Spectral And Directional Emissivity with Gradient Epsilon-Near-Zero InAs Photonic Structures

Controlling both the spectral bandwidth and directionality of emitted thermal radiation is a fundamental challenge in contemporary photonics. Recent work has shown that materials with a spatial gradient in the frequency range of their epsilon-near-zero (ENZ) response can support broad spectrum directionality in their emissivity, enabling high total radiance to specific angles of incidence. However, this capability is limited spectrally and directionally by the availability of materials with phonon-polariton resonances over long-wave infrared wavelengths. Here, an approach is designed and experimentally demonstrated using doped III-V semiconductors that can simultaneously tailor spectral peak, bandwidth, and directionality of infrared emissivity. InAs-based gradient ENZ photonic structures that exhibit broadband directional emission with varying spectral bandwidths and directional ranges as a function of their doping concentration profile and thickness are epitaxially grown and characterized. Due to its easy-to-fabricate geometry, it is believed that this approach provides a versatile photonic platform to dynamically control broadband spectral and directional emissivity for a range of emerging applications in heat transfer and infrared sensing.

A universal metasurface antenna to manipulate all fundamental characteristics of electromagnetic waves

Metasurfaces have promising potential to revolutionize a variety of photonic and electronic device technologies. However, metasurfaces that can simultaneously and independently control all electromagnetics (EM) waves' properties, including amplitude, phase, frequency, polarization, and momentum, with high integrability and programmability, are challenging and have not been successfully attempted. Here, we propose and demonstrate a microwave universal metasurface antenna (UMA) capable of dynamically, simultaneously, independently, and precisely manipulating all the constitutive properties of EM waves in a software-defined manner. Our UMA further facilitates the spatial- and time-varying wave properties, leading to more complicated waveform generation, beamforming, and direct information manipulations. In particular, the UMA can directly generate the modulated waveforms carrying digital information that can fundamentally simplify the architecture of information transmitter systems. The proposed UMA with unparalleled EM wave and information manipulation capabilities will spark a surge of applications from next-generation wireless systems, cognitive sensing, and imaging to quantum optics and quantum information science.

Trichannel Spin-Selective Metalenses

Metalenses have the potential to revolutionize optical devices into the next generation of consumer devices. Through new inventive strategies, metalenses with advanced functionalities have been released to integrate multiple responses into a single flat device. Here, we design metalenses that are sensitive to the incident spin angular momentum to provide three distinct modes based on the handedness of the incident and transmitted light. Propagation phase is employed to encode a hyperbolic lens phase to the metalens, while geometric phase is exploited for additional spin-selective properties. We experimentally demonstrate two different metalenses: the co-polarized channels function as a standard metalens, while the cross-polarized channels (1) deflect and (2) introduce orbital angular momentum to the transmitted light. We experimentally characterize the metalenses and prove their use for spin-selective imaging of visible light. We envision that such trichannel metalenses could be employed in chiral bioimaging, optical computing, and computer vision.

Programmable Wavefront Control in the Visible Spectrum Using Low-Loss Chalcogenide Phase-Change Metasurfaces

All-dielectric metasurfaces provide unique solutions for advanced wavefront manipulation of light with complete control of amplitude and phase at sub-wavelength scales. One limitation, however, for most of these devices is the lack of any post-fabrication tunability of their response. To break this limit, a promising approach is employing phase-change materials (PCMs), which provide fast, low energy, and non-volatile means to endow metasurfaces with a switching mechanism. In this regard, great advancements have been done in the mid-infrared and near-infrared spectrum using different chalcogenides. In the visible spectral range, however, very few devices have demonstrated full phase manipulation, high efficiencies, and reversible optical modulation. In this work, a programmable all-dielectric Huygens' metasurface made of antimony sulfide (Sb2 S3 ) PCM is experimentally demonstrated, a low loss and high-index material in the visible spectral range with a large contrast (≈0.5) between its amorphous and crystalline states. ≈2π phase modulation is shown with high associated transmittance and it is used to create programmable beam-steering devices. These novel chalcogenide PCM metasurfaces have the potential to emerge as a platform for next-generation spatial light modulators and to impact application areas such as programmable and adaptive flat optics, light detection and ranging (LiDAR), and many more.

Greatly Enhanced Resonant Exciton-Trion Conversion in Electrically Modulated Atomically Thin WS2 at Room Temperature

Excitonic resonance in atomically thin semiconductors offers a favorite platform to study 2D nanophotonics in both classical and quantum regimes and promises potentials for highly tunable and ultra-compact optical devices. The understanding of charge density dependent exciton-trion conversion is the key for revealing the underlaying physics of optical tunability. Nevertheless, the insufficient and inefficient light-matter interactions hinder the observation of trionic phenomenon and the development of excitonic devices for dynamic power-efficient electro-optical applications. Here, by engaging an optical cavity with atomically thin transition metal dichalcogenides (TMDCs), greatly enhanced exciton-trion conversion is demonstrated at room temperature (RT) and achieve electrical modulation of reflectivity of ≈40% at exciton and 7% at trion state, which correspondingly enables a broadband large phase tuning in monolayer tungsten disulfide. Besides the absorptive conversion, ≈100% photoluminescence conversion from excitons to trions is observed at RT, illustrating a clear physical mechanism of an efficient exciton-trion conversion for extraordinary optical performance. The results indicate that both excitons and trions can play significant roles in electrical modulation of the optical parameters of TMDCs at RT. The work shows the real possibility for realizing electrical tunable and multi-functional ultra-thin optical devices using 2D materials.

Metasurface-Enhanced Infrared Spectroscopy: An Abundance of Materials and Functionalities

Infrared spectroscopy provides unique information on the composition and dynamics of biochemical systems by resolving the characteristic absorption fingerprints of their constituent molecules. Based on this inherent chemical specificity and the capability for label-free, noninvasive, and real-time detection, infrared spectroscopy approaches have unlocked a plethora of breakthrough applications for fields ranging from environmental monitoring and defense to chemical analysis and medical diagnostics. Nanophotonics has played a crucial role for pushing the sensitivity limits of traditional far-field spectroscopy by using resonant nanostructures to focus the incident light into nanoscale hot-spots of the electromagnetic field, greatly enhancing light-matter interaction. Metasurfaces composed of regular arrangements of such resonators further increase the design space for tailoring this nanoscale light control both spectrally and spatially, which has established them as an invaluable toolkit for surface-enhanced spectroscopy. Starting from the fundamental concepts of metasurface-enhanced infrared spectroscopy, a broad palette of resonator geometries, materials, and arrangements for realizing highly sensitive metadevices is showcased, with a special focus on emerging systems such as phononic and 2D van der Waals materials, and integration with waveguides for lab-on-a-chip devices. Furthermore, advanced sensor functionalities of metasurface-based infrared spectroscopy, including multiresonance, tunability, dielectrophoresis, live cell sensing, and machine-learning-aided analysis are highlighted.

Highly Tunable Cascaded Metasurfaces for Continuous Two-Dimensional Beam Steering

Cascaded metasurfaces can exhibit powerful dynamic light manipulation by mechanically tuning the far-field interactions in the layers. However, in most current designs, the metasurfaces are separated by gaps smaller than a wavelength to form a total phase profile, representing the direct accumulation of the phase profiles of each layer. Such small gap sizes may not only conflict with the far-field conditions but also pose great difficulties for practical implementations. To overcome this limitation, a design paradigm taking advantage of a ray-tracing scheme that allows the cascaded metasurfaces to operate optimally at easily achievable gap sizes is proposed. Enabled by the relative lateral translation of two cascaded metasurfaces, a continuous two-dimensional (2D) beam-steering device for 1064 nm light is designed as a proof of concept. Simulation results demonstrate tuning ranges of ±45° for biaxial deflection angles within ±3.5 mm biaxial translations, while keeping the divergence of deflected light less than 0.007°. The experimental results agree well with theoretical predictions, and a uniform optical efficiency is observed. The  generializeddesign paradigm can pave a way towards myriad tunable cascaded metasurface devices for various applications, including but not limited to light detection and ranging (LiDAR) and free space optical communication.

Integrated metasurfaces for re-envisioning a near-future disruptive optical platform

Metasurfaces have been continuously garnering attention in both scientific and industrial fields, owing to their unprecedented wavefront manipulation capabilities using arranged subwavelength artificial structures. To date, research has mainly focused on the full control of electromagnetic characteristics, including polarization, phase, amplitude, and even frequencies. Consequently, versatile possibilities of electromagnetic wave control have been achieved, yielding practical optical components such as metalenses, beam-steerers, metaholograms, and sensors. Current research is now focused on integrating the aforementioned metasurfaces with other standard optical components (e.g., light-emitting diodes, charged-coupled devices, micro-electro-mechanical systems, liquid crystals, heaters, refractive optical elements, planar waveguides, optical fibers, etc.) for commercialization with miniaturization trends of optical devices. Herein, this review describes and classifies metasurface-integrated optical components, and subsequently discusses their promising applications with metasurface-integrated optical platforms including those of augmented/virtual reality, light detection and ranging, and sensors. In conclusion, this review presents several challenges and prospects that are prevalent in the field in order to accelerate the commercialization of metasurfaces-integrated optical platforms.

Electrical Phase Modulation Based on Mid-Infrared Intersubband Polaritonic Metasurfaces

Electrically reconfigurable metasurfaces that overcome the static limitations in controlling the fundamental properties of scattered light are opening new avenues for functional flat optics. This work proposes and experimentally demonstrates electrically phase-tunable mid-infrared metasurfaces based on the polaritonic coupling of Stark-tunable intersubband transitions in semiconductor heterostructures and electromagnetic modes in plasmonic nanoresonators. In the applied voltage range of -3 to +3 V, the local phase tuning of the light reflects from the metasurface, which enables the electrical control of the polarization state and wavefront of the reflected wave. Electrical beam polarization control, electrical beam diffraction control, and electrical beam steering are experimentally demonstrated as applications for local phase tunability. The proposed electrically tunable metasurfaces can easily tune the operating wavelength and function at relatively low voltages, which will enable various applications in the mid-infrared region.

X-ray-to-visible light-field detection through pixelated colour conversion

Light-field detection measures both the intensity of light rays and their precise direction in free space. However, current light-field detection techniques either require complex microlens arrays or are limited to the ultraviolet-visible light wavelength ranges^1-4. Here we present a robust, scalable method based on lithographically patterned perovskite nanocrystal arrays that can be used to determine radiation vectors from X-rays to visible light (0.002-550 nm). With these multicolour nanocrystal arrays, light rays from specific directions can be converted into pixelated colour outputs with an angular resolution of 0.0018°. We find that three-dimensional light-field detection and spatial positioning of light sources are possible by modifying nanocrystal arrays with specific orientations. We also demonstrate three-dimensional object imaging and visible light and X-ray phase-contrast imaging by combining pixelated nanocrystal arrays with a colour charge-coupled device. The ability to detect light direction beyond optical wavelengths through colour-contrast encoding could enable new applications, for example, in three-dimensional phase-contrast imaging, robotics, virtual reality, tomographic biological imaging and satellite autonomous navigation.

Excitonic Beam Steering in an Active van der Waals Metasurface

Two-dimensional transition metal dichalcogenides (2D TMDCs) are promising candidates for ultrathin active nanophotonic elements due to the strong tunable excitonic resonances that dominate their optical response. Here, we demonstrate dynamic beam steering by an active van der Waals metasurface that leverages large complex refractive index tunability near excitonic resonances in monolayer molybdenum diselenide (MoSe₂). Through varying the radiative and nonradiative rates of the excitons, we can dynamically control both the reflection amplitude and phase profiles, resulting in an excitonic phased array metasurface. Our experiments show reflected light steering to angles between -30° and 30° at different resonant wavelengths corresponding to the A exciton and B exciton. This active van der Waals metasurface relies solely on the excitonic resonances of the monolayer MoSe₂ material rather than geometric resonances of patterned nanostructures, suggesting the potential to harness the tunability of excitonic resonances for wavefront shaping in emerging photonic applications.

Electrically switchable metallic polymer metasurface device with gel polymer electrolyte

We present an electrically switchable, compact metasurface device based on the metallic polymer PEDOT:PSS in combination with a gel polymer electrolyte. Applying square-wave voltages, we can reversibly switch the PEDOT:PSS from dielectric to metallic. Using this concept, we demonstrate a compact, standalone, and CMOS compatible metadevice. It allows for electrically controlled ON and OFF switching of plasmonic resonances in the 2-3 µm wavelength range, as well as electrically controlled beam switching at angles up to 10°. Furthermore, switching frequencies of up to 10 Hz, with oxidation times as fast as 42 ms and reduction times of 57 ms, are demonstrated. Our work provides the basis towards solid state switchable metasurfaces, ultimately leading to submicrometer-pixel spatial light modulators and hence switchable holographic devices.

Monocular metasurface camera for passive single-shot 4D imaging

It is a grand challenge for an imaging system to simultaneously obtain multi-dimensional light field information, such as depth and polarization, of a scene for the accurate perception of the physical world. However, such a task would conventionally require bulky optical components, time-domain multiplexing, and active laser illumination. Here, we experimentally demonstrate a compact monocular camera equipped with a single-layer metalens that can capture a 4D image, including 2D all-in-focus intensity, depth, and polarization of a target scene in a single shot under ambient illumination conditions. The metalens is optimized to have a conjugate pair of polarization-decoupled rotating single-helix point-spread functions that are strongly dependent on the depth of the target object. Combined with a straightforward, physically interpretable image retrieval algorithm, the camera can simultaneously perform high-accuracy depth sensing and high-fidelity polarization imaging over an extended depth of field for both static and dynamic scenes in both indoor and outdoor environments. Such a compact multi-dimensional imaging system could enable new applications in diverse areas ranging from machine vision to microscopy.

Electrically programmable solid-state metasurfaces via flash localised heating

In the last decades, metasurfaces have attracted much attention because of their extraordinary light-scattering properties. However, their inherently static geometry is an obstacle to many applications where dynamic tunability in their optical behaviour is required. Currently, there is a quest to enable dynamic tuning of metasurface properties, particularly with fast tuning rate, large modulation by small electrical signals, solid state and programmable across multiple pixels. Here, we demonstrate electrically tunable metasurfaces driven by thermo-optic effect and flash-heating in silicon. We show a 9-fold change in transmission by <5 V biasing voltage and the modulation rise-time of <625 µs. Our device consists of a silicon hole array metasurface encapsulated by transparent conducting oxide as a localised heater. It allows for video frame rate optical switching over multiple pixels that can be electrically programmed. Some of the advantages of the proposed tuning method compared with other methods are the possibility to apply it for modulation in the visible and near-infrared region, large modulation depth, working at transmission regime, exhibiting low optical loss, low input voltage requirement, and operating with higher than video-rate switching speed. The device is furthermore compatible with modern electronic display technologies and could be ideal for personal electronic devices such as flat displays, virtual reality holography and light detection and ranging, where fast, solid-state and transparent optical switches are required.

High-speed optical pulse shaping based on programmable lithium niobate spatial light modulators

Pulse shaping plays a key role in various applications of ultrafast lasers, such as optical communications, laser micromachining, microscopy, and quantum coherent control. Conventional pulse shaping devices based on liquid crystal spatial light modulators (LCSLMs) or digital micromirror devices (DMDs) only have the shaping speed of several hertz to kilohertz, which is not suitable for applications requiring a high-speed response. Here, we demonstrate a high-speed programmable lithium niobate spatial light modulator (LNSLM) with 128 individual modulation channels and a modulation speed that can reach 1 MHz. Then we establish a high-speed LNSLM-based Fourier-transform (FT) pulse shaper to realize high-speed pulse shaping, and the update rate can reach 350 kHz, only limited by the electric circuit. The proposed high-speed pulse shaper scheme opens new avenues for future applications of ultrafast science, such as microscopic imaging, interaction between light and matter, and spectroscopy.

Toward Water-Immersion Programmable Meta-Display

Heading toward next-generation intelligent display, dynamic control capability for meta-devices is critical for real world applications. Beyond the conventional electrical/optical/mechanical/thermal tuning methods, liquid immersion recently has emerged as a facile tuning mechanism which is easily accessible (especially water) and practically implementable for large tuning area. However, due to the longstanding and critical drawback of lacking independent-encoding capability, the state-of-art immersion approach remains incapable of pixel-level programmable switching. Here a water-immersion tuning scheme with pixel-scale programmability for dynamic meta-displays is proposed. Tunable meta-pixels can be engineered to construct spectral selective patterns at prior-/post- immersion states, such that a metasurface enables pixel-level transforming animations for dynamic multifield meta-displays, including near-field dual-nanoprints and far-field dual-holographic displays. The proposed water-immersion programmable approach for meta-display, benefitting from its large tuning area, facile operation and strong repeatability, may find a revolutionary path toward next-generation intelligent display with practical applications in dynamic display/encryption, information anticounterfeit/storage, and optical sensors.

Design of metasurfaces with decoupled amplitude and phase response for spatial light modulation

Spatial light modulators based on metasurfaces have attracted great attention due to their abilities of amplitude and phase modulation. However, the traditional one degree of freedom (1-DOF) tunable metasurfaces are limited by incomplete phase coverage and coupled amplitude and phase modulation. Here, we propose an optimization method for 2-DOF tunable metasurfaces within the framework of temporal coupled mode theory. As a validation of the proposed method, we present a germanium antimony tellurium (GST)-alloy-based 2-DOF tunable reflective metasurface. Full-wave simulation shows that independent modulation of amplitude and phase is realized with full phase coverage and amplitude range from 0 to 0.55. Our proposed design scheme for a 2-DOF tunable metasurface may facilitate the development of high-performance metasurface devices.

Deep ultraviolet hydrogel based on 2D cobalt-doped titanate

Birefringent optical elements that work in deep ultraviolet (DUV) region become increasingly important these years. However, most of the DUV optical elements have fixed birefringence which is hard to be tuned. Here, we invent a birefringence-tunable optical hydrogel with mechano-birefringence effect in the DUV region, based on two-dimensional (2D) low-cobalt-doped titanate. This 2D oxide material has an optical anisotropy factor of 1.5 × 10^-11 C² J^-1 m^-1, larger than maximum value obtained previously, leading to an extremely large specific magneto-optical Cotton-Mouton coefficient of 3.9 × 10⁶ T^-2 m^-1. The extremely large coefficient enables the fabrication of birefringent hydrogel in a small magnetic field with an ultra-low concentration of 2D oxide material. The hydrogel can stably and continuously modulate 303 nm DUV light with large phase tunability by varying the strain (compression or stretching) from 0 to 50%. Our work opens the door to design and fabricate new proof-of-concept DUV birefringence-tunable element, as demonstrated by optical hydrogels capable of DUV modulation by mechanical stimuli.

Dielectric Mie voids: confining light in air

Manipulating light on the nanoscale has become a central challenge in metadevices, resonant surfaces, nanoscale optical sensors, and many more, and it is largely based on resonant light confinement in dispersive and lossy metals and dielectrics. Here, we experimentally implement a novel strategy for dielectric nanophotonics: Resonant subwavelength localized confinement of light in air. We demonstrate that voids created in high-index dielectric host materials support localized resonant modes with exceptional optical properties. Due to the confinement in air, the modes do not suffer from the loss and dispersion of the dielectric host medium. We experimentally realize these resonant Mie voids by focused ion beam milling into bulk silicon wafers and experimentally demonstrate resonant light confinement down to the UV spectral range at 265 nm (4.68 eV). Furthermore, we utilize the bright, intense, and naturalistic colours for nanoscale colour printing. Mie voids will thus push the operation of functional high-index metasurfaces into the blue and UV spectral range. The combination of resonant dielectric Mie voids with dielectric nanoparticles will more than double the parameter space for the future design of metasurfaces and other micro- and nanoscale optical elements. In particular, this extension will enable novel antenna and structure designs which benefit from the full access to the modal field inside the void as well as the nearly free choice of the high-index material for novel sensing and active manipulation strategies.

Manipulating Dual Bound States in the Continuum for Efficient Spatial Light Modulator

Spatial light modulators (SLMs) that could control diverse optical properties are highly demanded by many optoelectronic systems. Recently, the integration of nonlinear χ⁽²⁾ materials and metasurfaces has been recognized as a promising strategy for next-generation SLMs. However, their modulation efficiency still encounters challenges due to low quality factor and weak light-matter interaction. Here, we demonstrate an efficient SLM by manipulating the dual bound state in continuum (BIC) with the assistance of a binary-pore anodic alumina oxide template technique. The coexistence of symmetry-protected BIC and Fabry-Pérot BIC is obtained by a desirable sandwich configuration with a BIC metasurface and EO polymer, which efficiently restrain radiative loss and generate a strong quasi-BIC resonance. The assembled SLM with large absorption and Q-factor delivers a modulation depth of 77% and an f_3 dB of nearly 100 MHz. This dual BIC metasurface provides potential for applications including switches, LIDAR, augmented and virtual reality, and so on.

Tunable Light Field Modulations with Chip- and Fiber-Compatible Monolithic Dielectric Metasurfaces

Metasurfaces with a high engineering degree of freedom are promising building blocks for applications in metalenses, beam deflectors, metaholograms, sensing, and many others. Though the fundamental and technological challenges, proposing tunable metasurfaces is still possible. Previous efforts in this field are mainly taken on designing sophisticated structures with active materials introduced. Here, we present a generic kind of monolithic dielectric metasurfaces for tunable light field modulations. Changes in the period number and surrounding refractive index enable discrete and continuous modulations of spatial light fields, respectively. We exemplify this concept in monolithic Lithium Niobate metasurfaces for tunable metalenses and beam deflectors. The utilization of monolithic dielectric materials facilitates the ready integration of the metasurfaces with both chip and optical fiber platforms. This concept is not limited by the availability of active materials or expensive and time-consuming fabrication techniques, which can be applied to any transparent dielectric materials and various optical platforms.

Single-shot 3D imaging with point cloud projection based on metadevice

Three-dimensional (3D) imaging is a crucial information acquisition technology for light detection, autonomous vehicles, gesture recognition, machine vision, and other applications. Metasurface, as a subwavelength scale two-dimensional array, offers flexible control of optical wavefront owing to abundant design freedom. Metasurfaces are promising for use as optical devices because they have large field of view and powerful functionality. In this study, we propose a flat optical device based on a single-layer metasurface to project a coded point cloud in the Fourier space and explore a sophisticated matching algorithm to achieve 3D reconstruction, offering a complete technical roadmap for single-shot detection. We experimentally demonstrate that the depth accuracy of our system is smaller than 0.24 mm at a measurement distance of 300 mm, indicating the feasibility of the submillimetre measurement platform. Our method can pave the way for practical applications such as surface shape detection, gesture recognition, and personal authentication.

Y-Z cut lithium niobate longitudinal piezoelectric resonant photoelastic modulator

The capability to modulate the intensity of an optical beam has scientific and practical significance. In this work, we demonstrate Y-Z cut lithium niobate acousto-optic modulators with record-high modulation efficiency, requiring only 1.5 W/cm² for 100% modulation at 7 MHz. These modulators use a simple fabrication process; coating the top and bottom surfaces of a thin lithium niobate wafer with transparent electrodes. The fundamental shear acoustic mode of the wafer is excited through the transparent electrodes by applying voltage with frequency corresponding to the resonant frequency of this mode, confining an acoustic standing wave to the electrode region. Polarization of light propagating through this region is modulated at the applied frequency. Polarization modulation is converted to intensity modulation by placing the modulator between polarizers. To showcase an important application space for this modulator, we integrate it with a standard image sensor and demonstrate 4 megapixel time-of-flight imaging.

Topological beaming of light

Nanophotonic light emitters are key components in numerous application areas because of their compactness and versatility. Here, we propose a topological beam emitter structure that takes advantage of submicrometer footprint size, small divergence angle, high efficiency, and adaptable beam shaping capability. The proposed structure consists of a topological junction of two guided-mode resonance gratings inducing a leaky Jackiw-Rebbi state resonance. The leaky Jackiw-Rebbi state leads to in-plane optical confinement with funnel-like energy flow and enhanced emission probability, resulting in highly efficient optical beam emission. In addition, the structure allows adaptable beam shaping for any desired positive definite profiles by means of Dirac mass distribution control, which can be directly encoded in lattice geometry parameters. Therefore, the proposed approach provides highly desirable properties for efficient micro-light emitters and detectors in various applications including display, solid-state light detection and ranging, laser machining, label-free sensors, optical interconnects, and telecommunications.

Electro-active metaobjective from metalenses-on-demand

Switchable metasurfaces can actively control the functionality of integrated metadevices with high efficiency and on ultra-small length scales. Such metadevices include active lenses, dynamic diffractive optical elements, or switchable holograms. Especially, for applications in emerging technologies such as AR (augmented reality) and VR (virtual reality) devices, sophisticated metaoptics with unique functionalities are crucially important. In particular, metaoptics which can be switched electrically on or off will allow to change the routing, focusing, or functionality in general of miniaturized optical components on demand. Here, we demonstrate metalenses-on-demand made from metallic polymer plasmonic nanoantennas which are electrically switchable at CMOS (complementary metal-oxide-semiconductor) compatible voltages of ±1 V. The nanoantennas exhibit plasmonic resonances which can be reversibly switched ON and OFF via the applied voltage, utilizing the optical metal-to-insulator transition of the metallic polymer. Ultimately, we realize an electro-active non-volatile multi-functional metaobjective composed of two metalenses, whose unique optical states can be set on demand. Overall, our work opens up the possibility for a new level of electro-optical elements for ultra-compact photonic integration.

Design of a three-phase amplitude macro-pixel full-color complex spatial light modulator with an in-cell geometric phase retardation layer

Complex spatial light modulation, which can simultaneously control the amplitude and phase of light, is an essential optical technology for holographic display. We propose a twisted nematic liquid crystal (TNLC) mode with an in-cell type embedded geometric phase (GP) plate for full-color complex spatial light modulation. The proposed architecture provides an achromatic full-color complex light modulation capability in the far-field plane. The feasibility and working characteristics of the design are validated through numerical simulation.

Metasurface-driven full-space structured light for three-dimensional imaging

Structured light (SL)-based depth-sensing technology illuminates the objects with an array of dots, and backscattered light is monitored to extract three-dimensional information. Conventionally, diffractive optical elements have been used to form laser dot array, however, the field-of-view (FOV) and diffraction efficiency are limited due to their micron-scale pixel size. Here, we propose a metasurface-enhanced SL-based depth-sensing platform that scatters high-density ~10 K dot array over the 180° FOV by manipulating light at subwavelength-scale. As a proof-of-concept, we place face masks one on the beam axis and the other 50° apart from axis within distance of 1 m and estimate the depth information using a stereo matching algorithm. Furthermore, we demonstrate the replication of the metasurface using the nanoparticle-embedded-resin (nano-PER) imprinting method which enables high-throughput manufacturing of the metasurfaces on any arbitrary substrates. Such a full-space diffractive metasurface may afford ultra-compact depth perception platform for face recognition and automotive robot vision applications.

3D depth sensing with structured light enables simultaneous imaging of multiple objects, but has limited field of view and low efficiency. Here, the authors demonstrate 3D imaging with scattered light from a metasurface composed of periodic supercells, covering a 180° field of view with a high-density dot array.

Nano-electromechanical spatial light modulator enabled by asymmetric resonant dielectric metasurfaces

Spatial light modulators (SLMs) play essential roles in various free-space optical technologies, offering spatio-temporal control of amplitude, phase, or polarization of light. Beyond conventional SLMs based on liquid crystals or microelectromechanical systems, active metasurfaces are considered as promising SLM platforms because they could simultaneously provide high-speed and small pixel size. However, the active metasurfaces reported so far have achieved either limited phase modulation or low efficiency. Here, we propose nano-electromechanically tunable asymmetric dielectric metasurfaces as a platform for reflective SLMs. Exploiting the strong asymmetric radiation of perturbed high-order Mie resonances, the metasurfaces experimentally achieve a phase-shift close to 290^∘, over 50% reflectivity, and a wavelength-scale pixel size. Electrical control of diffraction patterns is also achieved by displacing the Mie resonators using nano-electro-mechanical forces. This work paves the ways for future exploration of the asymmetric metasurfaces and for their application to the next-generation SLMs.

This work experimentally demonstrates nano-electromechanically tunable asymmetric dielectric metasurfaces. The metasurfaces enable large phase tuning, high reflection, a wavelength-scale pixel size, and electrical control of diffraction patterns.

Metasurface-enhanced light detection and ranging technology

Deploying advanced imaging solutions to robotic and autonomous systems by mimicking human vision requires simultaneous acquisition of multiple fields of views, named the peripheral and fovea regions. Among 3D computer vision techniques, LiDAR is currently considered at the industrial level for robotic vision. Notwithstanding the efforts on LiDAR integration and optimization, commercially available devices have slow frame rate and low resolution, notably limited by the performance of mechanical or solid-state deflection systems. Metasurfaces are versatile optical components that can distribute the optical power in desired regions of space. Here, we report on an advanced LiDAR technology that leverages from ultrafast low FoV deflectors cascaded with large area metasurfaces to achieve large FoV (150°) and high framerate (kHz) which can provide simultaneous peripheral and central imaging zones. The use of our disruptive LiDAR technology with advanced learning algorithms offers perspectives to improve perception and decision-making process of ADAS and robotic systems.

Recent Advances in Tunable Metasurfaces: Materials, Design, and Applications

Metasurfaces, a two-dimensional (2D) form of metamaterials constituted by planar meta-atoms, exhibit exotic abilities to tailor electromagnetic (EM) waves freely. Over the past decade, tremendous efforts have been made to develop various active materials and incorporate them into functional devices for practical applications, pushing the research of tunable metasurfaces to the forefront of nanophotonics. Those active materials include phase change materials (PCMs), semiconductors, transparent conducting oxides (TCOs), ferroelectrics, liquid crystals (LCs), atomically thin material, etc., and enable intriguing performances such as fast switching speed, large modulation depth, ultracompactness, and significant contrast of optical properties under external stimuli. Integration of such materials offers substantial tunability to the conventional passive nanophotonic platforms. Tunable metasurfaces with multifunctionalities triggered by various external stimuli bring in rich degrees of freedom in terms of material choices and device designs to dynamically manipulate and control EM waves on demand. This field has recently flourished with the burgeoning development of physics and design methodologies, particularly those assisted by the emerging machine learning (ML) algorithms. This review outlines recent advances in tunable metasurfaces in terms of the active materials and tuning mechanisms, design methodologies, and practical applications. We conclude this review paper by providing future perspectives in this vibrant and fast-growing research field.