Active optical metasurfaces: comprehensive review on physics, mechanisms, and prospective applications

Metasurface-enabled 3D imaging via local bright spot gray scale matching using the structured light dot array

Three-dimensional (3D) imaging is widely utilized in various applications, such as light detection, autonomous vehicles, and machine vision. However, conventional 3D imaging systems often rely on bulky optical components. Metasurfaces, as next-generation optical devices, possess flexible wavefront modulation capabilities and excellent combination with computer vision algorithms. Here, we propose a large field-of-view (FOV) structured light dot array projection device based on a metasurface, covering a 2π-FOV, for projecting coded point clouds in Fourier space. We explore a local bright spot gray scale matching algorithm for depth extraction, enabling 3D imaging. This algorithm simplifies the data processing flow and optimizes depth extraction and feature matching processes through a customized region gray scale comparison. As a result, it effectively reduces computational complexity and enhances tolerance to image quality fluctuations. The proposed approach provides new possibilities for developing compact and high-performance planar 3D optical imaging devices, which will drive the advancement of fields such as computer vision and artificial intelligence.

Near-Unity All-Optical Modulation of Third-Harmonic Generation with a Fano-Resonant Dielectric Metasurface

We demonstrate all-optical modulation with a near-unity contrast of nonlinear light generation in a dielectric metasurface. We study third-harmonic generation from silicon Fano-resonant metasurfaces excited by femtosecond pulses at 1480 nm wavelength. We modulate the metasurface resonance by free carrier excitation induced by absorption of an 800 nm pump pulse, leading to up to 93% suppression of third-harmonic generation. Modulation and recovery occur on (sub)picosecond time scales. According to the Drude model, the pump-induced refractive index change blue-shifts the metasurface resonance away from the generation pulse, causing a strong modulation of third-harmonic conversion efficiency. The principle holds great promise for spatiotemporal programmability of nonlinear light generation.

Electrically tunable space-time metasurfaces at optical frequencies

Active metasurfaces enable dynamic manipulation of the scattered electromagnetic wavefront by spatially varying the phase and amplitude across arrays of subwavelength scatterers, imparting momentum to outgoing light. Similarly, periodic temporal modulation of active metasurfaces allows for manipulation of the output frequency of light. Here we combine spatial and temporal modulation in electrically modulated reflective metasurfaces operating at 1,530 nm to generate and diffract a spectrum of sidebands at megahertz frequencies. Temporal modulation with tailored waveforms enables the design of a spectrum of sidebands. By impressing a spatial phase gradient on the metasurface, we can diffract selected combinations of sideband frequencies. Combining active temporal and spatial variation can enable unique optical functions, such as frequency mixing, harmonic beam steering or shaping, and breaking of Lorentz reciprocity.

Engineering of Active and Passive Loss in High-Quality-Factor Vanadium Dioxide-Based BIC Metasurfaces

Active functionalities of metasurfaces are of growing interest in nanophotonics. The main strategy employed to date is spectral resonance tuning affecting predominantly the far-field response. However, this barely influences other essential resonance properties like near-field enhancement, signal modulation, quality factor, and absorbance, which are all vital for numerous applications. Here we introduce an active metasurface approach that combines temperature-tunable losses in vanadium dioxide with far-field coupling tunable symmetry-protected bound states in the continuum. This method enables exceptional precision in independently controlling both radiative and nonradiative losses. Consequently, it allows for the adjustment of both the far-field response and, notably, the near-field characteristics like local field enhancement and absorbance. We experimentally demonstrate continuous tuning from under- through critical- to overcoupling, achieving quality factors of 200 and a relative switching contrast of 78%. Our research marks a significant step toward highly tunable metasurfaces, controlling both near- and far-field properties.

Voltage-controlled nonlinear optical properties in gold nanofilms via electrothermal effect

Dynamic control of the optical properties of gold nanostructures is crucial for advancing photonics technologies spanning optical signal processing, on-chip light sources and optical computing. Despite recent advances in tunable plasmons in gold nanostructures, most studies are limited to the linear or static regime, leaving the dynamic manipulation of nonlinear optical properties unexplored. This study demonstrates the voltage-controlled Kerr nonlinear optical response of gold nanofilms via the electrothermal effect. By applying relatively low voltages (~10 V), the nonlinear absorption coefficient and refractive index are reduced by 40.4% and 33.1%, respectively, due to the increased damping coefficient of gold nanofilm. Furthermore, a voltage-controlled all-fiber gold nanofilm saturable absorber is fabricated and used in mode-locked fiber lasers, enabling reversible wavelength-tuning and operation regimes switching (e.g., mode-locking-Q-switched mode-locking). These findings advance the understanding of electrically controlled nonlinear optical responses in gold nanofilms and offer a flexible approach for controlling fiber laser operations.

Color coded metadevices toward programmed terahertz switching

Terahertz modulators play a critical role in high-speed wireless communication, non-destructive imaging, and so on, which have attracted a large amount of research interest. Nevertheless, all-optical terahertz modulation, an ultrafast dynamical control approach, remains to be limited in terms of encoding and multifunction. Here we experimentally demonstrated an optical-programmed terahertz switching realized by combining optical metasurfaces with the terahertz metasurface, resulting in 2-bit dual-channel terahertz encoding. The terahertz metasurface, made up of semiconductor islands and artificial microstructures, enables effective all-optical programming by providing multiple frequency channels with ultrafast modulation at the nanosecond level. Meanwhile, optical metasurfaces covered in terahertz metasurface alter the spatial light field distribution to obtain color code. According to the time-domain coupled mode theory analysis, the energy dissipation modes in terahertz metasurface can be independently controlled by color excitation, which explains the principle of 2-bit encoding well. This work establishes a platform for all-optical programmed terahertz metadevices and may further advance the application of composite metasurface in terahertz manipulation.

Sub-1-Volt Electrically Programmable Optical Modulator Based on Active Tamm Plasmon

Reconfigurable optical devices hold great promise for advancing high-density optical interconnects, photonic switching, and memory applications. While many optical modulators based on active materials have been demonstrated, it is challenging to achieve a high modulation depth with a low operation voltage in the near-infrared (NIR) range, which is a highly sought-after wavelength window for free-space communication and imaging applications. Here, electrically switchable Tamm plasmon coupled with poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS) is introduced. The device allows for a high modulation depth across the entire NIR range by fully absorbing incident light even under epsilon near zero conditions. Optical modulation exceeding 88% is achieved using a CMOS-compatible voltage of ±1 V. This modulation is facilitated by precise electrical control of the charge carrier density through an electrochemical doping/dedoping process. Additionally, the potential applications of the device are extended for a non-volatile multi-memory state optical device, capable of rewritable optical memory storage and exhibiting long-term potentiation/depression properties with neuromorphic behavior.

All-optical free-space routing of upconverted light by metasurfaces via nonlinear interferometry

All-optical modulation yields the promise of high-speed information processing. In this field, metasurfaces are rapidly gaining traction as ultrathin multifunctional platforms for light management. Among the featured functionalities, they enable light-wavefront manipulation and more recently demonstrated the ability to perform light-by-light manipulation through nonlinear optical processes. Here, by employing a nonlinear periodic metasurface, we demonstrate the all-optical routing of telecom photons upconverted to the visible range. This is achieved via the interference between two frequency-degenerate upconversion processes, namely, third-harmonic and sum-frequency generation, stemming from the interaction of a pump pulse with its frequency-doubled replica. By tuning the relative phase and polarization between these two pump beams, we route the upconverted signal among the diffraction orders of the metasurface with a modulation efficiency of up to 90%. This can be achieved by concurrently engineering the nonlinear emission of the individual elements (meta-atoms) of the metasurface along with its pitch. Owing to the phase control and ultrafast dynamics of the underlying nonlinear processes, free-space all-optical routing could be potentially performed at rates close to the employed optical frequencies divided by the quality factor of the optical resonances at play. Our approach adds a further twist to optical interferometry, which is a key enabling technique employed in a wide range of applications, such as homodyne detection, radar interferometry, light detection and ranging technology, gravitational-wave detection and molecular photometry. In particular, the nonlinear character of light upconversion combined with phase sensitivity is extremely appealing for enhanced imaging and biosensing.

Two-Color Spatially Resolved Tuning of Polymer-Coated Metasurfaces

For the realization of truly reconfigurable metasurface technologies, dynamic spatial tuning of the metasurface resonance is required. Here we report the use of organic photoswitches as a means for the light-induced spatial tuning of metasurface resonances. Coating of a dielectric metasurface, hosting high-quality-factor resonances, with a spiropyran (SPA)-containing polymer enabled dynamic resonance tuning up to 4 times the resonance full-width at half-maximum with arbitrary spatial precision. A major benefit of employing photoswitches is the broad toolbox of chromophores available and the unique optical properties of each. In particular, SPA and azobenzene (AZO) photoswitches can both be switched with UV light but exhibit opposite refractive index changes. When applied to the metasurface, SPA induced a red shift in the metasurface resonance with a figure of merit of 97 RIU-1, while AZO caused a blue shift in the resonance with an even greater sensitivity of 100 RIU-1. Critically, SPA and AZO can be individually recovered with red and blue light, respectively. To exploit this advantage, we coated a dielectric metasurface with spatially offset SPA- and AZO-containing polymers to demonstrate wavelength-dependent, spatially resolved control over the metasurface resonance tuning.

Electrically tunable dual polarization states of light using lithium niobate-based nanograting

Tuning polarization states of light electrically has unique advantages in the integration of optoelectronic devices. Here, a lithium niobate-based nanograting is proposed to dynamically tune the polarization state of both the reflected and transmitted lights simultaneously in the near-infrared range. By judiciously designing the nanograting, a quasi-bound state in the continuum (qBIC) is excited under the excitation of an obliquely incident plane wave. The excited mode with a high quality-factor and enhanced local electric field can respond to a refractive index change in nanograting structures as small as 10-4 level, which can be generated with a low external voltage via the electro-optic effect. As a result, both the polarization states of reflected and transmitted lights can be dynamically tuned from a right circular polarization to a linear polarization state. The proposed lithium niobate-based nanograting for tuning dual polarization states of light with a qBIC mode suggests a promising electrical scheme for achieving high speed optoelectronic devices.

A visible-near-infrared transparent miniaturized frequency-selective metasurface with a microwave transmission window

In this work, we propose a meshed miniaturized frequency-selective metasurface (MMFSM), which is insensitive to the incidence microwave angle and has great optical imaging quality by extending the effective length of the aperture within the periodic unit and replacing large metal parts with different metallic meshes. Experimental results indicated that our MMFSM had an average normalized transmittance of 87.2% in the visible-near-infrared band, a passband loss of 1.446 dB, and an oblique incidence stabilization angle of 50° (the passband loss was less than 2.38 dB). These are excellent characteristics required for applications in the optics and communication fields.

Designing Metasurfaces for Efficient Solar Energy Conversion

Metasurfaces have recently emerged as a promising technological platform, offering unprecedented control over light by structuring materials at the nanoscale using two-dimensional arrays of subwavelength nanoresonators. These metasurfaces possess exceptional optical properties, enabling a wide variety of applications in imaging, sensing, telecommunication, and energy-related fields. One significant advantage of metasurfaces lies in their ability to manipulate the optical spectrum by precisely engineering the geometry and material composition of the nanoresonators' array. Consequently, they hold tremendous potential for efficient solar light harvesting and conversion. In this Review, we delve into the current state-of-the-art in solar energy conversion devices based on metasurfaces. First, we provide an overview of the fundamental processes involved in solar energy conversion, alongside an introduction to the primary classes of metasurfaces, namely, plasmonic and dielectric metasurfaces. Subsequently, we explore the numerical tools used that guide the design of metasurfaces, focusing particularly on inverse design methods that facilitate an optimized optical response. To showcase the practical applications of metasurfaces, we present selected examples across various domains such as photovoltaics, photoelectrochemistry, photocatalysis, solar-thermal and photothermal routes, and radiative cooling. These examples highlight the ways in which metasurfaces can be leveraged to harness solar energy effectively. By tailoring the optical properties of metasurfaces, significant advancements can be expected in solar energy harvesting technologies, offering new practical solutions to support an emerging sustainable society.

Storage and retrieval of electromagnetic waves in a metasurface based on bound states in the continuum by conductivity modulation

In this study, we develop a time-varying metasurface based on the bound states in the continuum (BIC) with variable conductors, to store electromagnetic waves. The storage and retrieval of electromagnetic waves are demonstrated numerically through dynamic switching between quasi-BIC and BIC states by modulating the variable conductors. The storage efficiency exhibits oscillatory behaviors with respect to the timing of storage and retrieval. These behaviors can be attributed to the interference of a resonant mode and a static mode that is formed by direct current. In addition, the storage efficiency of a single-layer metasurface can reach 35% under ideal conditions.

Metasurfaces for generating higher-order Poincaré beams by polarization-selective focusing and overall elimination of co-polarization components

Focused higher-order Poincaré (HOP) beams are of particular interest because they facilitate understanding the exotic properties of structured light and their applications in classical physics and quantum information. However, generating focused HOP beams using metasurfaces is challenging. In this study, we proposed a metasurface design comprising two sets of metal nanoslits for generating coaxially focused HOP beams. The nanoslits were interleaved on equispaced alternating rings. The initial rings started at the two adjacent Fresnel zones to provide opposite propagation phases for overall elimination of the co-polarization components. With the designed hyperbolic and helical profiles of the geometric phases, the two vortices of the opposite cross-circular-polarizations were formed and selectively focused, realizing HOP beams of improved quality. Simulations and experimental results demonstrated the feasibility of the proposed metasurface design. This study is of significance in the integration of miniaturized optical devices and enriches the application areas of metasurfaces.

Graphene-Enabled Tunable Phase Gradient Metasurface for Broadband Dispersion Manipulation of Terahertz Wave

With the increasing demand for the miniaturization and flexibility of optical devices, graphene-based metasurfaces have emerged as a promising ideal design platform for realizing planar and tunable electromagnetic or optical devices. In this paper, we propose a tunable metasurface with low-dispersion phase gradient characteristics that is composed of an array of double-layer graphene ribbons sandwiched with a thin insulating layer and a polymer substrate layer with a gold ground plane. As two typical proof-of-concept examples, metasurfaces act as a planar prism and a planar lens, respectively, and the corresponding performances of tunable broadband dispersion are demonstrated through full-wave simulation experiments. By changing the Fermi level of each graphene ribbon individually to introduce abrupt phase shifts along the metasurface, the broadband continuous dispersion effect of abnormal reflection and beam focusing is achieved within a terahertz (THz) frequency region from 3.0 THz to 4.0 THz, and the dispersion results can be freely regulated by reconfiguring the sequence of Fermi levels via the bias voltage. The presented graphene metasurface provides an avenue for the dispersion manipulation of a broadband terahertz wave and may have great prospects in the fields of optics, imaging, and wireless communication.

Active control of resonant asymmetric transmission based on topological edge states in paired photonic crystals with a Ge2Sb2Te5 film

For many high-precision applications such as filtering, sensing, and photodetection, active control of resonant responses of metasurfaces is crucial. Herein, we demonstrate that active control of resonant asymmetric transmission can be realized based on the topological edge state (TES) of an ultra-thin G e 2 S b 2 T e 5 (GST) film in a photonic crystal grating (PCG). The PCG is composed of two pairs of one-dimensional photonic crystals (PCs) separated by a GST film. The phase change of the GST film re-distributes the field distributions of the PCG; thus active control of narrowband asymmetric transmission can be achieved due to the switch of the on-off state of the TES. According to multipole decompositions, the appearance and disappearance of the synergistically reduced dipole modes are responsible for the high-contrast asymmetric transmission of the PCG. In addition, the asymmetric transmission performances are robust to the variation of structural parameters, and good unidirectional transmission performances with a high peak transmission and high contrast ratio can be balanced, as the layer number of the two PCs is set as four. By changing the crystallization fraction of GST, the peak transmission and peak contrast ratio of asymmetric transmission can be flexibly tuned with the resonance locations kept almost the same.

A Review on Micro-LED Display Integrating Metasurface Structures

Micro-LED display technology has been considered a promising candidate for near-eye display applications owing to its superior performance, such as having high brightness, high resolution, and high contrast. However, the realization of polarized and high-efficiency light extraction from Micro-LED arrays is still a significant problem to be addressed. Recently, by exploiting the capability of metasurfaces in wavefront modulation, researchers have achieved many excellent results by integrating metasurface structures with Micro-LEDs, including improving the light extraction efficiency, controlling the emission angle to achieve directional emission, and obtaining polarized Micro-LEDs. In this paper, recent progressions on Micro-LEDs integrated with metasurface structures are reviewed in the above three aspects, and the similar applications of metasurface structures in organic LEDs, quantum dot LEDs, and perovskite LEDs are also summarized.

Ultrathin Tunable Optomechanical Metalens

Reconfigurable metasurfaces offer great promises to enhance photonics technology by combining integration with improved functionalities. Recently, reconfigurability in otherwise static metasurfaces has been achieved by modifying the electric permittivity of the meta-atoms themselves or their immediate surrounding. Yet, it remains challenging to achieve significant and fast tunability without increasing bulkiness. Here, we demonstrate an ultrathin tunable metalens whose focal distance can be changed through optomechanical control with moderate continuous wave intensities. We achieve fast focal length changes of more than 5% with response time of the order of 10 μs.

Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength

Plasmonic photodetectors have received increasing attention because their detection properties can be designed by tailoring their metal structures on surfaces without using any additional components. Reconfiguration of the plasmonic resonant state in a photodetector is relevant for various applications, including investigating in situ adaptive detection property changes, depending on the situation, and performing single-pixel spectroscopy in geometrically limited regions. However, the spectral responsivity change with conventional reconfiguration methods is relatively small. Here, we propose a plasmonic photodetector that reconfigures its spectral responsivity with electromechanical deformation instead of bias tuning. The photodetector consists of a gold plasmonic grating formed on an n-type silicon cantilever, and the spectral responsivity is reconfigured by electromechanically scanning at an incident angle to the grating on the cantilever. The photodetector exhibits peak shifts in spectral responsivity in a wavelength range from 1250 to 1310 nm after electromechanical reconfiguration. Finally, for potential future applications, we demonstrate near-infrared spectroscopy using the photodetector. This photodetector has the potential to be adopted as a near-infrared spectrometer in industrial silicon imaging systems because its structure enables subbandgap photodetection on silicon by a Schottky junction.

Stress-Induced Inversion of Linear Dichroism by 4,4'-Bipyridine Rotation in a Superelastic Organic Single Crystal

The molecular crystals that manifest unusual mechanical properties have attracted growing attention. Herein, we prepared an organic single crystal that shows bidirectional superelastic transformation in response to shear stress. Single-crystal X-ray diffractions revealed this crystal-twinning related shape change is owed to a stress-controlled 90° rotation of 4,4'-bipyridine around the hydrogen bonds of a chiral organic trimer. As a consequence of the 90° shift in the aromatic plane, an interconversion of crystallographic a-, b-axes (a→b' and b→a') was detected. The molecular rotations changed the anisotropic absorption of linearly polarized light. Therefore, a stress-induced inversion of linear dichroism spectra was demonstrated for the first time. This study reveals the superior mechanical flexibilities of single crystals can be realized by harnessing the molecular rotations and this superelastic crystal may find applications in optical switching and communications.

Metasurface Enabled On-Chip Generation and Manipulation of Vector Beams from Vertical Cavity Surface-Emitting Lasers

Metasurface polarization optics that consist of 2D array of birefringent nano-antennas have proven remarkable capabilities to generate and manipulate vectorial fields with subwavelength resolution and high efficiency. Integrating this new type of metasurface with the standard vertical cavity surface-emitting laser (VCSEL) platform enables an ultracompact and powerful solution to control both phase and polarization properties of the laser on a chip, which allows to structure a VCSEL into vector beams with on-demand wavefronts. Here, this concept is demonstrated by directly generating versatile vector beams from commercially available VCSELs through on-chip integration of high-index dielectric metasurfaces. Experimentally, the versatility of the approach for the development of vectorial VCSELs are validated by implementing a variety of functionalities, including directional emission of multibeam with specified polarizations, vectorial holographic display, and vector vortex beams generations. Notably, the proposed vectorial VCSELs integrated with a single layer of beam shaping metasurface bypass the requirements of multiple cascaded optical components, and thus have the potential to promote the advancements of ultracompact, lightweight, and scalable vector beams sources, enriching and expanding the applications of VCSELs in optical communications, laser manipulation and processing, information encryption, and quantum optics.

Electrically programmable solid-state metasurfaces via flash localised heating

In the last decades, metasurfaces have attracted much attention because of their extraordinary light-scattering properties. However, their inherently static geometry is an obstacle to many applications where dynamic tunability in their optical behaviour is required. Currently, there is a quest to enable dynamic tuning of metasurface properties, particularly with fast tuning rate, large modulation by small electrical signals, solid state and programmable across multiple pixels. Here, we demonstrate electrically tunable metasurfaces driven by thermo-optic effect and flash-heating in silicon. We show a 9-fold change in transmission by <5 V biasing voltage and the modulation rise-time of <625 µs. Our device consists of a silicon hole array metasurface encapsulated by transparent conducting oxide as a localised heater. It allows for video frame rate optical switching over multiple pixels that can be electrically programmed. Some of the advantages of the proposed tuning method compared with other methods are the possibility to apply it for modulation in the visible and near-infrared region, large modulation depth, working at transmission regime, exhibiting low optical loss, low input voltage requirement, and operating with higher than video-rate switching speed. The device is furthermore compatible with modern electronic display technologies and could be ideal for personal electronic devices such as flat displays, virtual reality holography and light detection and ranging, where fast, solid-state and transparent optical switches are required.

A 6G meta-device for 3D varifocal

The sixth-generation (6G) communication technology is being developed in full swing and is expected to be faster and better than the fifth generation. The precise information transfer directivity and the concentration of signal strength are the key topics of 6G technology. We report the synthetic phase design of rotary doublet Airy beam and triplet Gaussian beam varifocal meta-devices to fully control the terahertz beam's propagation direction and coverage area. The focusing spot can be delivered to arbitrary positions in a two-dimensional plane or a three-dimensional space. The highly concentrated signal can be delivered to a specific position, and the transmission direction can be adjusted freely to enable secure, flexible, and high-directivity 6G communication systems. This technology avoids the high costs associated with extensive use of active components. 6G communication systems, wireless power transfer, zoom imaging, and remote sensing will benefit from large-scale adoption of such a technology.

Graphene-based Pancharatnam-Berry phase metasurface in the terahertz domain for dynamically independent amplitude and phase manipulation

Dynamic and independent amplitude and phase manipulation are the paramount demand for many advanced wavefronts engineering applications. Currently, the coupling issue between the amplitude and phase hinders the efficient modulation wavefront's further implementation. This paper proposes and numerically demonstrates the bi-layer stacked graphene Pancharatnam-Berry (P-B) phase metasurface and mono-layer graphene P-B phase metasurface to address the above problem. The simulation results show that the proposed models can achieve the independent control amplitude and phase and significantly reduce their coupling strength. Our findings offer a flexible and straightforward method for precise wave reconstruction applications such as holography, optical tweezers, and high-resolution imaging.

Synthesizing ultrafast optical pulses with arbitrary spatiotemporal control

The ability to control the instantaneous state of light, from high-energy pulses down to the single-photon level, is an indispensable requirement in photonics. This has, for example, facilitated spatiotemporal probing and coherent control of ultrafast light-matter interactions, and enabled capabilities such as generation of exotic states of light with complexity, or at wavelengths, that are not easily accessible. Here, by leveraging the multifunctional control of light at the nanoscale offered by metasurfaces embedded in a Fourier transform setup, we present a versatile approach to synthesize ultrafast optical transients with arbitrary control over its complete spatiotemporal evolution. Our approach, supporting an ultrawide bandwidth with simultaneously high spectral and spatial resolution, enables ready synthesis of complex states of structured space-time wave packets. We expect our results to offer unique capabilities in coherent ultrafast light-matter interactions and facilitate applications in microscopy, communications, and nonlinear optics.

Electrically tunable metasurface for dual-band spatial light modulation using the epsilon-near-zero effect

Electro-tunable metasurfaces have attracted much attention for the active control of incident light at the nanoscale by engineering sub-wavelength meta-atoms. In this Letter, for the first time, to the best of our knowledge, a grating-assisted dual-band metasurface for spatial light modulation is reported that can operate in two crucial telecommunication wavelength bands, i.e., C-band and O-band. The proposed device consists of a silicon-nitride nanograting on top of a silicon-indium-tin-oxide (ITO)-alumina-gold stack. Effective medium theory combined with a modal analysis is used to study the guided-mode resonance dips at 1.55 µm and 1.31 µm in the reflectance spectra. We leverage the epsilon-near-zero effect of ITO by applying an external bias voltage to introduce large modal loss, which leads to the disappearance of the resonance dips at those wavelengths. We obtain a high modulation depth of ∼22.3 dB at 1.55 µm and ∼19.5 dB at 1.31 µm with an applied bias of -4 V and -5 V, respectively. Thus, the proposed metasurface may help to realize dual-band active nanophotonic devices.

Recent Advances in Tunable Metasurfaces: Materials, Design, and Applications

Metasurfaces, a two-dimensional (2D) form of metamaterials constituted by planar meta-atoms, exhibit exotic abilities to tailor electromagnetic (EM) waves freely. Over the past decade, tremendous efforts have been made to develop various active materials and incorporate them into functional devices for practical applications, pushing the research of tunable metasurfaces to the forefront of nanophotonics. Those active materials include phase change materials (PCMs), semiconductors, transparent conducting oxides (TCOs), ferroelectrics, liquid crystals (LCs), atomically thin material, etc., and enable intriguing performances such as fast switching speed, large modulation depth, ultracompactness, and significant contrast of optical properties under external stimuli. Integration of such materials offers substantial tunability to the conventional passive nanophotonic platforms. Tunable metasurfaces with multifunctionalities triggered by various external stimuli bring in rich degrees of freedom in terms of material choices and device designs to dynamically manipulate and control EM waves on demand. This field has recently flourished with the burgeoning development of physics and design methodologies, particularly those assisted by the emerging machine learning (ML) algorithms. This review outlines recent advances in tunable metasurfaces in terms of the active materials and tuning mechanisms, design methodologies, and practical applications. We conclude this review paper by providing future perspectives in this vibrant and fast-growing research field.

MEMS Tunable Metasurfaces Based on Gap Plasmon or Fabry-Pérot Resonances

Tunable metasurfaces promise to enable adaptive optical systems with complex functionalities. Among possible realizations, a recent platform combining microelectromechanical systems (MEMS) with gap-surface plasmon (GSP) metasurfaces offers high modulation efficiency, broadband operation, and fast response. We compare tunable metasurfaces operating in GSP and Fabry-Pérot (FP) regions by investigating polarization-independent blazed gratings both numerically and experimentally. Peak efficiency is calculated to be ∼75% in both cases (∼40% in measurements), while the operation bandwidth is found larger when operating in the GSP region. Advantages of operating in the FP region include relaxed assembly requirements and operation tolerances. Additionally, simulation and experimental results show that coupling between neighboring unit cells increases for larger air gaps, resulting in deteriorated efficiency. We believe the presented analysis provides important guidelines for designing tunable metasurfaces for diverse applications in miniaturized adaptive optical systems.

Broadband mid-infrared metalens with polarization-controlled at-will chromatic dispersion

Mid-infrared metalenses are promising for potential applications in a range of fields, including molecular detection, imaging, and optical sensing. To fulfil the different requirements of these diverse application scenarios, engineering of the ability to control the chromatic dispersion of these lenses at will is vitally important. Herein, we demonstrate broadband mid-infrared metalenses with polarization-controlled at-will chromatic dispersion capability based on all-silicon metasurfaces. Both polarization-insensitive and polarization-sensitive mid-infrared metalenses with at-will chromatic dispersion capabilities are demonstrated numerically for operation at wavelengths ranging from 3.75 μm to 4.75 μm. The average focusing efficiency of all these metalenses exceeds 40% in the wavelength range of interest, and the highest focusing efficiency ranges up to 67%. The mid-infrared metalenses with at-will chromatic dispersion proposed here may be beneficial for mid-infrared sensing, communications, and imaging applications in the future.

Inverse design of perimeter-controlled InAs-assisted metasurface for two-dimensional dynamic beam steering

The current commercially viable light detection and ranging systems demand continuous, full-scene, and dynamic two-dimensional point scanning, while featuring large aperture size to ensure long distance operation. However, the biasing architecture of large-area arrays with numerous individually controlled tunable elements is substantially complicated. Herein, inverse design of a perimeter-controlled active metasurface for two-dimensional dynamic beam steering at mid-infrared regime is theoretically presented. The perimeter-control approach simplifies biasing architecture by allowing column-row addressing of the elements. The metasurface consists of a periodic array of plasmonic patch nanoantennas in a metal-insulator-metal configuration, wherein two active layers of indium arsenide are incorporated into its building block. The metasurface profile facilitates wide phase modulation of ≈ 355 ° on the reflected light at the individual element level through applying independent voltages to its respective columns and rows. The multi-objective genetic algorithm (GA) for optimizing user-defined metrics toward shaping desired far-zone radiation pattern is implemented. It is demonstrated that multi-objective GA yields better results for directivity and spatial resolution of perimeter-controlled metasurface by identifying the design tradeoffs inherent to the system, compared to the single-objective optimizer. A high directivity and continuous beam scanning with full and wide field-of-view along the azimuth and elevation angles are respectively maintained.