Temporal color mixing and dynamic beam shaping with silicon metasurfaces

Chiral Kirigami for Bend-Tolerant Reconfigurable Hologram with Continuously Variable Chirality Measures

Despite the commonality of static holograms, the holography with multiple information layers and reconfigurable grey-scale images at communication frequencies remain a confluence of scientific challenges. One well-known difficulty is the simultaneous modulation of phase and amplitude of electromagnetic wavefronts with a high modulation depth. A less appreciated challenge is scrambling of the information and images with hologram bending. Here, this work shows that chirality-guided pixelation of plasmonic kirigami sheets enables tunable multiplexed holography at terahertz (THz) frequencies. The convex and concave structures with slanted Au strips exhibit gradual variations in geometries facilitating modulation of light ellipticity reaching 40 deg. Real-time switching of 3D images of the letter "M" and the Mona Lisa demonstrates the possibility of complex grey-scale information content and importance of continuously variable mirror asymmetry. Microscale chirality measures of each pixel experiences little change with bending while retaining controllable reconfigurability upon stretching, which translates to remarkable resilience of chiral holograms to bending. Simplicity of their design with local chirality measures opens the door to information technologies with fault-tolerant THz encryption, wearable holographic devices, and new communication technologies.

Dynamic light manipulation via silicon-organic slot metasurfaces

Active metasurfaces provide the opportunity for fast spatio-temporal control of light. Among various tuning methods, organic electro-optic materials provide some unique advantages due to their fast speed and large nonlinearity, along with the possibility of using fabrication techniques based on infiltration. In this letter, we report a silicon-organic platform where organic electro-optic material is infiltrated into the narrow gaps of slot-mode metasurfaces with high quality factors. The mode confinement into the slot enables the placement of metallic electrodes in close proximity, thus enabling tunability at lower voltages. We demonstrate the maximum tuning sensitivity of 0.16nm/V, the maximum extinction ratio of 38% within ± 17V voltage at telecommunication wavelength. The device has 3dB bandwidth of 3MHz. These results provide a path towards tunable silicon-organic hybrid metasurfaces at CMOS-level voltages.

High-Efficiency Dynamic Terahertz Deflector Utilizing a Mechanically Tunable Metasurface

Terahertz (THz) wave manipulation, especially the beam deflection, plays an essential role in various applications, such as next-generation communication, space exploration, and high-resolution imaging. Current THz optical components and devices are hampered by their large bulk sizes and passive responses, limiting the development of high-performance, miniaturized THz microsystems. Tunable metasurfaces offer a powerful dynamic optical platform for controlling the propagation of electromagnetic waves. In this article, we presented a mechanically tunable metasurface (MTM), which can achieve terahertz beam deflection and vary the intensity of the anomalous reflected terahertz wave by changing the air gap between the metallic resonator (MR) array with phase discontinuities and Au ground plane. The absence of lossy spacer materials substantially enhances deflection efficiency. The device was fabricated by a combination of the surface and bulk-micromachining processes. The THz beam steering capability was characterized using terahertz time domain spectroscopy. When the air gap is 50 μm, the maximum deflection coefficient reaches 0.60 at 0.61 THz with a deflection angle of ~44.5°, consistent with theoretical predictions. We further established an electrically tunable miniaturized THz device for dynamic beam steering by introducing a micro voice coil motor to control the air gap continuously. It is shown that our designed MTM demonstrates a high modulation depth of deflection coefficient (~ 62.5%) in the target steered angle at the operating frequency. Our results showcase the potential of the proposed MTM as a platform for high-efficiency THz beam manipulation.

Varifocal Metalenses: Harnessing Polarization-Dependent Superposition for Continuous Focal Length Control

Traditional varifocal lenses are bulky and mechanically complex. Emerging active metalenses promise compactness and design flexibility but face issues like mechanical tuning reliability and nonlinear focal length tuning due to additional medium requirements. In this work, we propose a varifocal metalens design based on superimposing light intensity distributions from two orthogonal polarization states. This approach enables continuous and precise focal length control within the visible spectrum, while maintaining relatively high focusing efficiencies (∼41% in simulation and ∼28% in measurement) and quality. In experimental validation, the metalens exhibited flexible tunability, with the focal length continuously adjustable between two spatial positions upon variation of the incident polarization angle. The MTF results showed high contrast reproduction and sharp imaging, with a Strehl ratio of >0.7 for all polarization angles. With compactness, design flexibility, and high focusing quality, the proposed varifocal metalens holds potential for diverse applications, advancing adaptive and versatile optical devices.

3D Imprinting of Voxel-Level Structural Colors in Lithium Niobate Crystal

Advanced coloration methods are of pivotal importance in science, technology, and engineering. However, 3D structural colors that are critical for emerging multidimensional information representation and recording are rarely achievable. Here, a facile voxel-level programmable 3D structural coloration in the bulk lithium niobate (LiNbO3 ) crystal is reported. This is achieved by engineering wavelength-selective interference between ordinary (O) and extraordinary (E) light in the crystal matrix. To induce effective phase contrast between O and E light for establishing the highly localized interference across the visible band, the presence of a pulse-internal-coupling effect is revealed in the single-pulse ultrafast laser-crystal interaction and an ultrafast-laser-induced micro-amorphization (MA) strategy is thus developed to manipulate local matrix structure. Consequently, micro-nanoscale colorful voxels can be fast inscribed into any spatial position of the crystal matrix in one step. It is demonstrated that the colors can be flexibly manipulated and quickly extracted in 3D space. Multidimensional MA-color data storage with large capacity, high writing and readout speed, long lifetime, and excellent stability under harsh conditions is achieved. The present principle enables multifunctional 3D structural coloration devices inside high-refractive-index transparent dielectrics and can serve as a general platform to innovate next-generation information optics.

Integrated metasurfaces for re-envisioning a near-future disruptive optical platform

Metasurfaces have been continuously garnering attention in both scientific and industrial fields, owing to their unprecedented wavefront manipulation capabilities using arranged subwavelength artificial structures. To date, research has mainly focused on the full control of electromagnetic characteristics, including polarization, phase, amplitude, and even frequencies. Consequently, versatile possibilities of electromagnetic wave control have been achieved, yielding practical optical components such as metalenses, beam-steerers, metaholograms, and sensors. Current research is now focused on integrating the aforementioned metasurfaces with other standard optical components (e.g., light-emitting diodes, charged-coupled devices, micro-electro-mechanical systems, liquid crystals, heaters, refractive optical elements, planar waveguides, optical fibers, etc.) for commercialization with miniaturization trends of optical devices. Herein, this review describes and classifies metasurface-integrated optical components, and subsequently discusses their promising applications with metasurface-integrated optical platforms including those of augmented/virtual reality, light detection and ranging, and sensors. In conclusion, this review presents several challenges and prospects that are prevalent in the field in order to accelerate the commercialization of metasurfaces-integrated optical platforms.

Towards High-Efficiency Photon Trapping in Thin-Film Perovskite Solar Cells Using Etched Fractal Metadevices

Reflective loss is one of the main factors contributing to power conversion efficiency limitation in thin-film perovskite solar cells. This issue has been tackled through several approaches, such as anti-reflective coatings, surface texturing, or superficial light-trapping metastructures. We report detailed simulation-based investigations on the photon trapping capabilities of a standard Methylammonium Lead Iodide (MAPbI3) solar cell, with its top layer conveniently designed as a fractal metadevice, to reach a reflection value R<0.1 in the visible domain. Our results show that, under certain architecture configurations, reflection values below 0.1 are obtained throughout the visible domain. This represents a net improvement when compared to the 0.25 reflection yielded by a reference MAPbI3 having a plane surface, under identical simulation conditions. We also present the minimum architectural requirements of the metadevice by comparing it to simpler structures of the same family and performing a comparative study. Furthermore, the designed metadevice presents low power dissipation and exhibits approximately similar behavior regardless of the incident polarization angle. As a result, the proposed system is a viable candidate for being a standard requirement in obtaining high-efficiency perovskite solar cells.

Recent Advances in Tunable Metasurfaces and Their Application in Optics

Metasurfaces can be opportunely and specifically designed to manipulate electromagnetic wavefronts. In recent years, a large variety of metasurface-based optical devices such as planar lenses, beam deflectors, polarization converters, and so on have been designed and fabricated. Of particular interest are tunable metasurfaces, which allow the modulation of the optical response of a metasurface; for instance, the variation in the focal length of a converging metalens. Response tunability can be achieved through external sources that modify the permittivity of the materials constituting the nanoatoms, the substrate, or both. The modulation sources can be classified into electromagnetic fields, thermal sources, mechanical stressors, and electrical bias. Beside this, we will consider optical modulation and multiple approach tuning strategies. A great variety of tunable materials have been used in metasurface engineering, such as transparent conductive oxides, ferroelectrics, phase change materials, liquid crystals, and semiconductors. The possibility of tuning the optical properties of these metamaterials is very important for several applications spanning from basic optics to applied optics for communications, depth sensing, holographic displays, and biochemical sensors. In this review, we summarize the recent progress on electro-optical magnetic, mechanical, and thermal tuning of metasurfaces actually fabricated and experimentally tested in recent years. At the end of the review, a short section on possible future perspectives and applications is included.

Variational-based approach to investigate Fano resonant plasmonic metasurfaces

Considering the widespread applications of resonant phenomena in metasurfaces to bend, slow, concentrate, guide and manipulate lights, it is important to gain deep analytical insight into different types of resonances. Fano resonance and its special case electromagnetically induced transparency (EIT) which are realized in coupled resonators, have been the subject of many studies due to their high-quality factor and strong field confinement. In this paper, an efficient approach based on Floquet modal expansion is presented to accurately predict the electromagnetic response of two-dimensional/one-dimensional Fano resonant plasmonic metasurfaces. Unlike the previously reported methods, this method is valid over a wide frequency range for different types of coupled resonators and can be applied to practical structures where the array is placed on one or more dielectric layers. Given that the formulation is written in a comprehensive and flexible way, both metal-based and graphene-based plasmonic metasurfaces under normal/oblique incident waves are investigated, and it is demonstrated that this method can be posed as an accurate tool for the design of diverse practical tunable/untunable metasurfaces.

Polarization-dependent reconfigurable light field manipulation by liquid-immersion metasurface

Traditional grating lenses can accumulate phase for adjusting wavefronts, and plasmonic resonances can be excited in metasurfaces with discrete structures for optical field modulation. Diffractive and plasma optics have been developing in parallel, with easy processing, small size, and dynamic control advantages. Due to theoretical hybridization, structural design can combine advantages and show great potential value. Changing the shape and size of the flat metasurface can easily produce light field reflections, but changes in height are rarely cross-explored. We propose a graded metasurface with a single-structure periodic arrangement, which can mix the effects of plasmonic resonance and grating diffraction. As for solvents of different polarities, strong polarization-dependent beam reflections are produced, enabling versatile beam convergence and deflection. Dielectric/metal nanostructures with selective hydrophobic/hydrophilic properties can be arranged by the structural material specification to selectively settle the location of the solution in a liquid environment. Furthermore, the wetted metasurface is actively triggered to achieve spectral control and initiate polarization-dependent beam steering in the broadband visible light region. Actively reconfigurable polarization-dependent beam steering has potential applications in tunable optical displays, directional emission, beam manipulation and processing, and sensing technologies.

Excitonic Beam Steering in an Active van der Waals Metasurface

Two-dimensional transition metal dichalcogenides (2D TMDCs) are promising candidates for ultrathin active nanophotonic elements due to the strong tunable excitonic resonances that dominate their optical response. Here, we demonstrate dynamic beam steering by an active van der Waals metasurface that leverages large complex refractive index tunability near excitonic resonances in monolayer molybdenum diselenide (MoSe₂). Through varying the radiative and nonradiative rates of the excitons, we can dynamically control both the reflection amplitude and phase profiles, resulting in an excitonic phased array metasurface. Our experiments show reflected light steering to angles between -30° and 30° at different resonant wavelengths corresponding to the A exciton and B exciton. This active van der Waals metasurface relies solely on the excitonic resonances of the monolayer MoSe₂ material rather than geometric resonances of patterned nanostructures, suggesting the potential to harness the tunability of excitonic resonances for wavefront shaping in emerging photonic applications.

Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength

Plasmonic photodetectors have received increasing attention because their detection properties can be designed by tailoring their metal structures on surfaces without using any additional components. Reconfiguration of the plasmonic resonant state in a photodetector is relevant for various applications, including investigating in situ adaptive detection property changes, depending on the situation, and performing single-pixel spectroscopy in geometrically limited regions. However, the spectral responsivity change with conventional reconfiguration methods is relatively small. Here, we propose a plasmonic photodetector that reconfigures its spectral responsivity with electromechanical deformation instead of bias tuning. The photodetector consists of a gold plasmonic grating formed on an n-type silicon cantilever, and the spectral responsivity is reconfigured by electromechanically scanning at an incident angle to the grating on the cantilever. The photodetector exhibits peak shifts in spectral responsivity in a wavelength range from 1250 to 1310 nm after electromechanical reconfiguration. Finally, for potential future applications, we demonstrate near-infrared spectroscopy using the photodetector. This photodetector has the potential to be adopted as a near-infrared spectrometer in industrial silicon imaging systems because its structure enables subbandgap photodetection on silicon by a Schottky junction.

Dynamically Tunable Optical Cavities with Embedded Nematic Liquid Crystalline Networks

Tunable metal-insulator-metal (MIM) Fabry-Pérot (FP) cavities that can dynamically control light enable novel sensing, imaging and display applications. However, the realization of dynamic cavities incorporating stimuli-responsive materials poses a significant engineering challenge. Current approaches rely on refractive index modulation and suffer from low dynamic tunability, high losses, and limited spectral ranges, and require liquid and hazardous materials for operation. To overcome these challenges, a new tuning mechanism employing reversible mechanical adaptations of a polymer network is proposed, and dynamic tuning of optical resonances is demonstrated. Solid-state temperature-responsive optical coatings are developed by preparing a monodomain nematic liquid crystalline network (LCN) and are incorporated between metallic mirrors to form active optical microcavities. LCN microcavities offer large, reversible and highly linear spectral tuning of FP resonances reaching wavelength-shifts up to 40 nm via thermomechanical actuation while featuring outstanding repeatability and precision over more than 100 heating-cooling cycles. This degree of tunability allows for reversible switching between the reflective and the absorbing states of the device over the entire visible and near-infrared spectral regions, reaching large changes in reflectance with modulation efficiency ΔR = 79%.

Directional Scattering Switching from an All-Dielectric Phase Change Metasurface

All-dielectric metasurfaces are a blooming field with a wide range of new applications spanning from enhanced imaging to structural color, holography, planar sensors, and directionality scattering. These devices are nanopatterned structures of sub-wavelength dimensions whose optical behavior (absorption, reflection, and transmission) is determined by the dielectric composition, dimensions, and environment. However, the functionality of these metasurfaces is fixed at the fabrication step by the geometry and optical properties of the dielectric materials, limiting their potential as active reconfigurable devices. Herein, a reconfigurable all-dielectric metasurface based on two high refractive index (HRI) materials like silicon (Si) and the phase-change chalcogenide antimony triselenide (Sb₂Se₃) for the control of scattered light is proposed. It consists of a 2D array of Si-Sb₂Se₃-Si sandwich disks embedded in a SiO₂ matrix. The tunability of the device is provided through the amorphous-to-crystalline transition of Sb₂Se₃. We demonstrate that in the Sb₂Se₃ amorphous state, all the light can be transmitted, as it is verified using the zero-backward condition, while in the crystalline phase most of the light is reflected due to a resonance whose origin is the contribution of the electric (ED) and magnetic (MD) dipoles and the anapole (AP) of the nanodisks. By this configuration, a contrast in transmission (ΔT) of 0.81 at a wavelength of 980 nm by governing the phase of Sb₂Se₃ can be achieved.

Fast modulation of surface plasmons based on the photothermal effect of nonvolatile solid thin films

Nonvolatile phase change materials owing to their robust stability and reversibility have shown significant potential in nanophotonic switches and memory devices. However, their performances deteriorate as the thickness decreases below 10 nm due to the local deformation induced by the phase change, which makes them less compatible with plasmonic nanogaps. Here, we address this issue by photothermally modulating the refractive index of germanium antimony telluride (GST) placed in plasmonic nanogaps, which tunes plasmon resonances in the visible region below the melting point of GST, making such optical switching highly reversible at a rate of up to hundreds of ∼kHz. They are also demonstrated to modulate the waveguiding efficiency of propagating surface plasmons, which is based on the photothermal modulation of plasmons with the assistance of GST. Such hybrid nanoplasmonic system with cost-effective fabrication and efficient operation method provides a promising route towards integrated nanophotonic chips.

Humidity-Responsive RGB-Pixels via Swelling of 3D Nanoimprinted Polyvinyl Alcohol

Humidity-responsive structural coloration is actively investigated to realize real-time humidity sensors for applications in smart farming, food storage, and healthcare management. Here, humidity-tunable nano pixels are investigated with a 700 nm resolution that demonstrates full standard RGB (sRGB) gamut coverage with a millisecond-response time. The color pixels are designed as Fabry-Pérot (F-P) etalons which consist of an aluminum mirror substrate, humidity-responsive polyvinyl alcohol (PVA) spacer, and a top layer of disordered silver nanoparticles (NPs). The measured volume change of the PVA reaches up to 62.5% when the relative humidity (RH) is manipulated from 20 to 90%. The disordered silver NP layer permits the penetration of water molecules into the PVA layer, enhancing the speed of absorption and swelling down to the millisecond level. Based on the real-time response of the hydrogel-based F-P etalons with a high-throughput 3D nanoimprint technique, a high-resolution multicolored color print that can have potential applications in display technologies and optical encryption, is demonstrated.

Nano-electromechanical spatial light modulator enabled by asymmetric resonant dielectric metasurfaces

Spatial light modulators (SLMs) play essential roles in various free-space optical technologies, offering spatio-temporal control of amplitude, phase, or polarization of light. Beyond conventional SLMs based on liquid crystals or microelectromechanical systems, active metasurfaces are considered as promising SLM platforms because they could simultaneously provide high-speed and small pixel size. However, the active metasurfaces reported so far have achieved either limited phase modulation or low efficiency. Here, we propose nano-electromechanically tunable asymmetric dielectric metasurfaces as a platform for reflective SLMs. Exploiting the strong asymmetric radiation of perturbed high-order Mie resonances, the metasurfaces experimentally achieve a phase-shift close to 290^∘, over 50% reflectivity, and a wavelength-scale pixel size. Electrical control of diffraction patterns is also achieved by displacing the Mie resonators using nano-electro-mechanical forces. This work paves the ways for future exploration of the asymmetric metasurfaces and for their application to the next-generation SLMs.

This work experimentally demonstrates nano-electromechanically tunable asymmetric dielectric metasurfaces. The metasurfaces enable large phase tuning, high reflection, a wavelength-scale pixel size, and electrical control of diffraction patterns.

Recent Advances in Tunable Metasurfaces: Materials, Design, and Applications

Metasurfaces, a two-dimensional (2D) form of metamaterials constituted by planar meta-atoms, exhibit exotic abilities to tailor electromagnetic (EM) waves freely. Over the past decade, tremendous efforts have been made to develop various active materials and incorporate them into functional devices for practical applications, pushing the research of tunable metasurfaces to the forefront of nanophotonics. Those active materials include phase change materials (PCMs), semiconductors, transparent conducting oxides (TCOs), ferroelectrics, liquid crystals (LCs), atomically thin material, etc., and enable intriguing performances such as fast switching speed, large modulation depth, ultracompactness, and significant contrast of optical properties under external stimuli. Integration of such materials offers substantial tunability to the conventional passive nanophotonic platforms. Tunable metasurfaces with multifunctionalities triggered by various external stimuli bring in rich degrees of freedom in terms of material choices and device designs to dynamically manipulate and control EM waves on demand. This field has recently flourished with the burgeoning development of physics and design methodologies, particularly those assisted by the emerging machine learning (ML) algorithms. This review outlines recent advances in tunable metasurfaces in terms of the active materials and tuning mechanisms, design methodologies, and practical applications. We conclude this review paper by providing future perspectives in this vibrant and fast-growing research field.

MEMS Tunable Metasurfaces Based on Gap Plasmon or Fabry-Pérot Resonances

Tunable metasurfaces promise to enable adaptive optical systems with complex functionalities. Among possible realizations, a recent platform combining microelectromechanical systems (MEMS) with gap-surface plasmon (GSP) metasurfaces offers high modulation efficiency, broadband operation, and fast response. We compare tunable metasurfaces operating in GSP and Fabry-Pérot (FP) regions by investigating polarization-independent blazed gratings both numerically and experimentally. Peak efficiency is calculated to be ∼75% in both cases (∼40% in measurements), while the operation bandwidth is found larger when operating in the GSP region. Advantages of operating in the FP region include relaxed assembly requirements and operation tolerances. Additionally, simulation and experimental results show that coupling between neighboring unit cells increases for larger air gaps, resulting in deteriorated efficiency. We believe the presented analysis provides important guidelines for designing tunable metasurfaces for diverse applications in miniaturized adaptive optical systems.

Electro-Optical Modulation in High Q Metasurface Enhanced with Liquid Crystal Integration

Electro-optical tuning metasurfaces are particularly attractive since they open up routes for dynamic reconfiguration. The electro-optic (EO) modulation strength essentially depends on the sensitivity to the EO-induced refractive index changes. In this paper, lithium niobate (LiNbO₃) metasurfaces integrated with liquid crystals (LCs) are theoretically investigated. Cylinder arrays are proposed to support quasi-bound states in the continuum (quasi-BICs). The quasi-BIC resonances can significantly enhance the lifetime of photons and the local field, contributing to the EO-refractive index changes. By integrating metasurfaces with LCs, the combined influence of the LC reorientation and the Pockels electro-optic effect of LiNbO₃ is leveraged to tune the transmitted wavelength and phase spectrum around the quasi-BIC wavelength, resulting in an outstanding tuning sensitivity up to Δλ/ΔV ≈ 0.6 nm/V and relieving the need of high voltage. Furthermore, the proposed structure can alleviate the negative influence of sidewall tilt on device performance. The results presented in this work can foster wide application and prospects for the implementation of tunable displays, light detection and ranging (LiDAR), and spatial light modulators (SLMs).

Light-driven single-cell rotational adhesion frequency assay

The interaction between cell surface receptors and extracellular ligands is highly related to many physiological processes in living systems. Many techniques have been developed to measure the ligand-receptor binding kinetics at the single-cell level. However, few techniques can measure the physiologically relevant shear binding affinity over a single cell in the clinical environment. Here, we develop a new optical technique, termed single-cell rotational adhesion frequency assay (scRAFA), that mimics in vivo cell adhesion to achieve label-free determination of both homogeneous and heterogeneous binding kinetics of targeted cells at the subcellular level. Moreover, the scRAFA is also applicable to analyze the binding affinities on a single cell in native human biofluids. With its superior performance and general applicability, scRAFA is expected to find applications in study of the spatial organization of cell surface receptors and diagnosis of infectious diseases.

SUPPLEMENTARY INFORMATION

The online version contains supplementary material available at 10.1186/s43593-022-00020-4.

Beam steering at the nanosecond time scale with an atomically thin reflector

Techniques to mold the flow of light on subwavelength scales enable fundamentally new optical systems and device applications. The realization of programmable, active optical systems with fast, tunable components is among the outstanding challenges in the field. Here, we experimentally demonstrate a few-pixel beam steering device based on electrostatic gate control of excitons in an atomically thin semiconductor with strong light-matter interactions. By combining the high reflectivity of a MoSe₂ monolayer with a graphene split-gate geometry, we shape the wavefront phase profile to achieve continuously tunable beam deflection with a range of 10°, two-dimensional beam steering, and switching times down to 1.6 nanoseconds. Our approach opens the door for a new class of atomically thin optical systems, such as rapidly switchable beam arrays and quantum metasurfaces operating at their fundamental thickness limit.

Andersen et al. have demonstrated a new type of beam steering device based on the excitonic response of an atomically thin semiconductor. Using electrostatic gates, the authors achieved tunable steering with switching times on the nanosecond scale.

Active electrochemical high-contrast gratings as on/off switchable and color tunable pixels

To be viable for display applications, active structural colors must be electrically tunable, on/off switchable, and reversible. Independently controlling the first two functions, however, is difficult because of causality that ties the real and imaginary parts of the optical constants or changing overlap of fields during structural variations. Here, we demonstrate an active reflective color pixel that encompasses separate mechanisms to achieve both functions reversibly by electrochemically depositing and dissolving Cu inside the dielectric grating slits on a Pt electrode with ΔV < 3 V. Varying the modal interference via Cu occupancy in the slits changes the CIE space coverage by up to ~72% under cross-polarized imaging. In the same pixel, depolarization and absorption by the dissolving porous Cu switches the color off with a maximum contrast of ~97%. Exploiting these results, we demonstrate an active color-switching display and individually addressable on/off pixel matrix that highlights their potential in reflective display applications.

Two key display operations, color tuning and on/off switching, are achieved with reflective structural colors by changing the modal interference conditions and absorption via electrochemical control of Cu occupancy inside dielectric grating slits.

Hierarchical, Self-Assembled Metasurfaces via Exposure-Controlled Reflow of Block Copolymer-Derived Nanopatterns

Nanopatterning for the fabrication of optical metasurfaces entails a need for high-resolution approaches like electron beam lithography that cannot be readily scaled beyond prototyping demonstrations. Block copolymer thin film self-assembly offers an attractive alternative for producing periodic nanopatterns across large areas, yet the pattern feature sizes are fixed by the polymer molecular weight and composition. Here, a general strategy is reported which overcomes the limitation of the fixed feature size by treating the copolymer thin film as a hierarchical resist, in which the nanoscale pattern motif is defined by self-assembly. Feature sizes can then be tuned by thermal reflow controlled locally by irradiative cross-linking or chemical alteration using lithographic ultraviolet light or electron beam exposure. Using blends of polystyrene-block-poly(methylmethacrylate) (PS-b-PMMA) with PS and PMMA homopolymers, we demonstrate both self-assembled PS grating and hexagonal hole patterns; exposure-controlled reflow is then used to reduce the hole diameter by as much as 50% or increase the PS grating linewidth by more than 180%. Transferring these nanopatterns, or their inverse obtained by a lift-off approach, into silicon yields structural colors that may be prescriptively controlled based on the nanoscale feature size. Furthermore, patterned exposure enables area-selective feature size control, yielding uniform structural color patterns across centimeter square areas. Electron beam lithography is also used to show that the lithographic resolution of this selective-area control can be extended to the nanoscale dimensions of the self-assembled features. The exposure-controlled reflow approach demonstrated here takes a pivotal step toward fabricating complex, hierarchical optical metasurfaces using scalable self-assembly methods.

Thin film block copolymer self-assembly for nanophotonics

The nanophotonic engineering of light-matter interactions has profoundly changed research behind the design and fabrication of optical materials and devices. Metasurfaces-arrays of subwavelength nanostructures that interact resonantly with electromagnetic radiation-have emerged as an integral nanophotonic platform for a new generation of ultrathin lenses, displays, polarizers and other devices. Their success hinges on advances in lithography and nanofabrication in recent decades. While existing nanolithography techniques are suitable for basic research and prototyping, issues of cost, throughput, scalability, and substrate compatibility may preclude their use for many metasurface applications. Patterning via spontaneous self-assembly of block copolymer thin films offers an enticing alternative for nanophotonic manufacturing that is rapid, inexpensive, and applicable to large areas and diverse substrates. This review discusses the advantages and disadvantages of block copolymer-based nanopatterning and highlights recent progress in their use for broadband antireflection, surface enhanced Raman spectroscopy, and other nanophotonic applications. Recent advances in diversification of self-assembled block copolymer nanopatterns and improved processes for enhanced scalability of self-assembled nanopatterning using block copolymers are also discussed, with a spotlight on directions for future research that would enable a wider array of nanophotonic applications.

Electro-optic high-speed optical beam shifting based on a lithium niobate tapered waveguide

We propose an electro-optic on-chip beam shifting device based on gradient microstructured electrodes and an optical tapered waveguide fabricated using lithium niobate (LN). The distribution of refractive index variations of the optical waveguide can be electro-optically defined and tailored by the designed gradient microstructured electrodes, which directs the beam propagation and shifting. The length of the beam shifting device is 18 mm and the width of the waveguide is gradually increased from 8 μm to 80 μm. The functionality of the beam shifting device is experimentally demonstrated, and it is observed that it has an electro-optic tunability of 0.41 μm/V, and a high-speed response time of 19 ns (λ=1310 nm). This study can provide potential applications in optical switching and modulation, beam scanning and ranging, optical spatial communications, etc.

Tunable structured light with flat optics

Flat optics has emerged as a key player in the area of structured light and its applications, owing to its subwavelength resolution, ease of integration, and compact footprint. Although its first generation has revolutionized conventional lenses and enabled anomalous refraction, new classes of meta-optics can now shape light and dark features of an optical field with an unprecedented level of complexity and multifunctionality. Here, we review these efforts with a focus on metasurfaces that use different properties of input light-angle of incidence and direction, polarization, phase distribution, wavelength, and nonlinear behavior-as optical knobs for tuning the output response. We discuss ongoing advances in this area as well as future challenges and prospects. These recent developments indicate that optically tunable flat optics is poised to advance adaptive camera systems, microscopes, holograms, and portable and wearable devices and may suggest new possibilities in optical communications and sensing.

MEMS cantilever-controlled plasmonic colors for sustainable optical displays

Conventional optical displays using indium tin oxide and liquid crystal materials present challenges for long-term sustainability. We show here a cost-effective and complementary metal-oxide semiconductor (CMOS)-compatible fast and full-range electrically controlled RGB color display. This is achieved by combining transmission-based plasmonic metasurfaces with MEMS (microelectromechanical systems) technology, using only two common materials: aluminum and silicon oxide. White light is filtered into RGB components by plasmonic metasurfaces made of aluminum nanohole arrays. The transmission through each color filter is modulated by MEMS miniaturized cantilevers fabricated with aluminum and silicon oxide on top of the color filters. We show that the relative transmission of a color subpixel can be freely modulated from 35 to 100%. The pixels can also operate well above 800 Hz for future ultrafast displays. Our work provides a road to future circular economic goals by exploiting advances in structural colors and MEMS technologies to innovate optical displays.

Full 2π tunable phase modulation using avoided crossing of resonances

Active metasurfaces have been proposed as one attractive means of achieving high-resolution spatiotemporal control of optical wavefronts, having applications such as LIDAR and dynamic holography. However, achieving full, dynamic phase control has been elusive in metasurfaces. In this paper, we unveil an electrically tunable metasurface design strategy that operates near the avoided crossing of two resonances, one a spectrally narrow, over-coupled resonance and the other with a high resonance frequency tunability. This strategy displays an unprecedented upper limit of 4π range of dynamic phase modulation with no significant variations in optical amplitude, by enhancing the phase tunability through utilizing two coupled resonances. A proof-of-concept metasurface is justified analytically and verified numerically in an experimentally accessible platform using quasi-bound states in the continuum and graphene plasmon resonances, with results showing a 3π phase modulation capacity with a uniform reflection amplitude of ~0.65.

Full-range birefringence control with piezoelectric MEMS-based metasurfaces

Dynamic polarization control is crucial for emerging highly integrated photonic systems with diverse metasurfaces being explored for its realization, but efficient, fast, and broadband operation remains a cumbersome challenge. While efficient optical metasurfaces (OMSs) involving liquid crystals suffer from inherently slow responses, other OMS realizations are limited either in the operating wavelength range (due to resonances involved) or in the range of birefringence tuning. Capitalizing on our development of piezoelectric micro-electro-mechanical system (MEMS) based dynamic OMSs, we demonstrate reflective MEMS-OMS dynamic wave plates (DWPs) with high polarization conversion efficiencies (∼75%), broadband operation (∼100 nm near the operating wavelength of 800 nm), fast responses (<0.4 milliseconds) and full-range birefringence control that enables completely encircling the Poincaré sphere along trajectories determined by the incident light polarization and DWP orientation. Demonstrated complete electrical control over light polarization opens new avenues in further integration and miniaturization of optical networks and systems.

Dynamic polarization control is crucial for intelligent optical systems, from imaging to sensing. The authors demonstrate efficient and broadband MEMS-based dynamic optical metasurface wave plates with full-range and fast birefringence tunability.

Ultracompact Nanophotonics: Light Emission and Manipulation with Metasurfaces

Internet of Things (IoT) technology is prosperous for the betterment of human well-being. With the expeditious needs of miniature functional devices and systems for adaptive optics and light manipulation at will, relevant sensing techniques are thus in the urgent stage of development. Extensive developments in ultrathin artificial structures, namely metasurfaces, are paving the way for the next-generation devices. A bunch of tunable and reconfigurable metasurfaces with diversified catalogs of mechanisms have been developed recently, enabling dynamic light modulation on demand. On the other hand, monolithic integration of metasurfaces and light-emitting sources form ultracompact meta-devices as well as exhibiting desired functionalities. Photon-matter interaction provides revolution in more compact meta-devices, manipulating light directly at the source. This study presents an outlook on this merging paradigm for ultracompact nanophotonics with metasurfaces, also known as metaphotonics. Recent advances in the field hold great promise for the novel photonic devices with light emission and manipulation in simplicity.

Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication

Miniature varifocal lenses are crucial for many applications requiring compact optical systems. Here, utilizing electro-mechanically actuated 0.5-mm aperture infrared Alvarez meta-optics, we demonstrate 3.1 mm (200 diopters) focal length tuning with an actuation voltage below 40 V. This constitutes the largest focal length tuning in any low-power electro-mechanically actuated meta-optic, enabled by the high energy density in comb-drive actuators producing large displacements at relatively low voltage. The demonstrated device is produced by a novel nanofabrication process that accommodates meta-optics with a larger aperture and has improved alignment between meta-optics via flip-chip bonding. The whole fabrication process is CMOS compatible and amenable to high-throughput manufacturing.

Active optical metasurfaces: comprehensive review on physics, mechanisms, and prospective applications

Optical metasurfaces with subwavelength thickness hold considerable promise for future advances in fundamental optics and novel optical applications due to their unprecedented ability to control the phase, amplitude, and polarization of transmitted, reflected, and diffracted light. Introducing active functionalities to optical metasurfaces is an essential step to the development of next-generation flat optical components and devices. During the last few years, many attempts have been made to develop tunable optical metasurfaces with dynamic control of optical properties (e.g., amplitude, phase, polarization, spatial/spectral/temporal responses) and early-stage device functions (e.g., beam steering, tunable focusing, tunable color filters/absorber, dynamic hologram, etc) based on a variety of novel active materials and tunable mechanisms. These recently-developed active metasurfaces show significant promise for practical applications, but significant challenges still remain. In this review, a comprehensive overview of recently-reported tunable metasurfaces is provided which focuses on the ten major tunable metasurface mechanisms. For each type of mechanism, the performance metrics on the reported tunable metasurface are outlined, and the capabilities/limitations of each mechanism and its potential for various photonic applications are compared and summarized. This review concludes with discussion of several prospective applications, emerging technologies, and research directions based on the use of tunable optical metasurfaces. We anticipate significant new advances when the tunable mechanisms are further developed in the coming years.

High-Quality-Factor Silicon-on-Lithium Niobate Metasurfaces for Electro-optically Reconfigurable Wavefront Shaping

Dynamically reconfigurable metasurfaces promise compact and lightweight spatial light modulation for many applications, including LiDAR, AR/VR, and LiFi systems. Here, we design and computationally investigate high-quality-factor silicon-on-lithium niobate metasurfaces with electrically driven, independent control of its constituent nanobars for full phase tunability with high tuning efficiency. Free-space light couples to guided modes within each nanobar via periodic perturbations, generating quality factors exceeding 30,000 while maintaining a bar spacing of <λ/1.5. We achieve nearly 2π phase variation with an applied bias not exceeding ±25 V, maintaining a reflection efficiency above 91%. Using full-field simulations, we demonstrate a high-angle (51°) switchable beamsplitter with a diffracted efficiency of 93% and an angle-tunable beamsteerer, spanning 18-31°, with up to 86% efficiency, all using the same metasurface device. Our platform provides a foundation for highly efficient wavefront-shaping devices with a wide dynamic tuning range capable of generating nearly any transfer function.

Tunable dielectric metasurfaces by structuring the phase-change material

Metasurfaces have made great progress in the last decade for generating miniature and integrated optical devices. The optical properties of metasurfaces can be tuned dynamically by integrating with phase-change materials. However, the efficiency of tunable metasurfaces remains a bit low, which is a disadvantage for the realistic applications of metasurfaces. Here, we demonstrate the tunable dielectric metasurfaces by structuring the phase-change material Ge₂Sb₂Te₅. The unit cell of metasurface is composed of several Ge₂Sb₂Te₅ nanopillars with different geometric parameters, and the incident light interacts with different nanopillars at diverse phases of Ge₂Sb₂Te₅, leading to various functions. By elaborately arranging the Ge₂Sb₂Te₅ nanopillars, various tunable optical devices have been realized, including tunable beam steering, reconfigurable metalens and switchable wave plate. The refractive direction, focal length and polarization state can be tuned through the phase transition of Ge₂Sb₂Te₅. The phase-change metasurfaces based on Ge₂Sb₂Te₅ nanostructures could be used in cameras, optical microscopy and adaptive optics.

Enhancement of Luminous Intensity Emission from Incoherent LED Light Sources within the Detection Angle of 10° Using Metalenses

In this work, we present metalenses (MLs) designed to enhance the luminous intensity of incoherent light-emitting diodes (LEDs) within the detection angles of 0° and 10°. The detection angle of 0° refers to the center of the LED. Because the light emitted from LEDs is incoherent and expressed as a surface light source, they are numerically described as a set of point sources and calculated using incoherent summation. The titanium dioxide (TiO2) and amorphous silicon (a-Si) nanohole meta-atoms are designed; however, the full 2π phase coverage is not reached. Nevertheless, because the phase modulation at the edge of the ML is important, an ML is successfully designed. The typical phase profile of the ML enhances the luminous intensity at the center, and the phase profile is modified to increase the luminous intensity in the target detection angle region. Far field simulations are conducted to calculate the luminous intensity after 25 m of propagation. We demonstrate an enhancement of the luminous intensity at the center by 8551% and 2115% using TiO2 and a-Si MLs, respectively. Meanwhile, the TiO2 and a-Si MLs with the modified phase profiles enhance the luminous intensity within the detection angle of 10° by 263% and 30%, respectively.

Dynamic Color Generation with Electrically Tunable Thin Film Optical Coatings

Thin film optical coatings have a wide range of industrial applications from displays and lighting to photovoltaic cells. The realization of electrically tunable thin film optical coatings in the visible wavelength range is particularly important to develop energy efficient and dynamic color filters. Here, we experimentally demonstrate dynamic color generation using electrically tunable thin film optical coatings that consist of two different phase change materials (PCMs). The proposed active thin film nanocavity excites the Fano resonance that results from the coupling of a broadband and a narrowband absorber made up of phase change materials. The Fano resonance is then electrically tuned by structural phase switching of PCM layers to demonstrate active color filters covering the entire visible spectrum. In contrast to existing thin film optical coatings, the developed electrically tunable PCM based Fano resonant thin optical coatings have several advantages in tunable displays and active nanophotonic applications.

Metasurface-Driven Optically Variable Devices

Optically variable devices (OVDs) are in tremendous demand as optical indicators against the increasing threat of counterfeiting. Conventional OVDs are exposed to the danger of fraudulent replication with advances in printing technology and widespread copying methods of security features. Metasurfaces, two-dimensional arrays of subwavelength structures known as meta-atoms, have been nominated as a candidate for a new generation of OVDs as they exhibit exceptional behaviors that can provide a more robust solution for optical anti-counterfeiting. Unlike conventional OVDs, metasurface-driven OVDs (mOVDs) can contain multiple optical responses in a single device, making them difficult to reverse engineered. Well-known examples of mOVDs include ultrahigh-resolution structural color printing, various types of holography, and polarization encoding. In this review, we discuss the new generation of mOVDs. The fundamentals of plasmonic and dielectric metasurfaces are presented to explain how the optical responses of metasurfaces can be manipulated. Then, examples of monofunctional, tunable, and multifunctional mOVDs are discussed. We follow up with a discussion of the fabrication methods needed to realize these mOVDs, classified into prototyping and manufacturing techniques. Finally, we provide an outlook and classification of mOVDs with respect to their capacity and security level. We believe this newly proposed concept of OVDs may bring about a new era of optical anticounterfeit technology leveraging the novel concepts of nano-optics and nanotechnology.

NEMS-tunable dielectric chiral metasurfaces

Active control of strong chiroptical responses in metasurfaces can offer new opportunities for optical polarization engineering. Plasmonic active chiral metasurfaces have been investigated before, but their tunable chiroptical responses is limited due to inherent loss of plasmonic resonances, thus stimulating research in low loss active dielectric chiral metasurfaces. Among diverse tuning methods, electrically tunable dielectric chiral metasurfaces are promising thanks to their potential for on-chip integration. Here, we experimentally demonstrate nano-electromechanically tunable dielectric chiral metasurfaces with reflective circular dichroism (CD). We show a difference between absolute reflection under circulary polarized incident light with orthogonal polarization of over 0.85 in simulation and over 0.45 experimentally. The devices enable continuous control of CD by induced electrostatic forces from 0.45 to 0.01 with an electrical bias of 3V. This work highlights the potential of nano-electromechanically tunable metasurfaces for scalable optical polarization modulators.

Facile full-color printing with a single transparent ink

Structural colors are promising candidates for their antifading and eco-friendly characteristics. However, high cost and complicated processing inevitably hinder their development. Here, we propose a facile full-color structural-color inkjet printing strategy with a single transparent ink from the common polymer materials. This structural color arisen from total internal reflections is prepared by digitally printing the dome-shaped microstructure (microdome) with well-controlled morphology. By controlling the ink volume and substrate wettability, the microdome color can be continuously regulated across whole visible regions. The gamut, saturation, and lightness of the printed structural-color image are precisely adjusted via the programmable arrangement of different microdomes. With the advantages of simple manufacturing and widely available inks, this color printing approach presents great potential in imaging, decoration, sensing, and biocompatible photonics.

Dielectric Metalens: Properties and Three-Dimensional Imaging Applications

Recently, optical dielectric metasurfaces, ultrathin optical skins with densely arranged dielectric nanoantennas, have arisen as next-generation technologies with merits for miniaturization and functional improvement of conventional optical components. In particular, dielectric metalenses capable of optical focusing and imaging have attracted enormous attention from academic and industrial communities of optics. They can offer cutting-edge lensing functions owing to arbitrary wavefront encoding, polarization tunability, high efficiency, large diffraction angle, strong dispersion, and novel ultracompact integration methods. Based on the properties, dielectric metalenses have been applied to numerous three-dimensional imaging applications including wearable augmented or virtual reality displays with depth information, and optical sensing of three-dimensional position of object and various light properties. In this paper, we introduce the properties of optical dielectric metalenses, and review the working principles and recent advances in three-dimensional imaging applications based on them. The authors envision that the dielectric metalens and metasurface technologies could make breakthroughs for a wide range of compact optical systems for three-dimensional display and sensing.

Full Color and Grayscale Painting with 3D Printed Low-Index Nanopillars

Sculpting nanostructures into different geometries in either one or two dimensions produces a wide range of colorful elements in microscopic prints. However, achieving different shades of gray and control of color saturation remain challenging. Here, we report a complete approach to color and grayscale generation based on the tuning of a single nanostructure geometry. Through two-photon polymerization lithography, we systematically investigated color generation from the basic single nanopillar geometry in low-refractive-index (n < 1.6) material. Grayscale and full color palettes were achieved that allow decomposition onto hue, saturation, and brightness values. This approach enabled the "painting" of arbitrary colorful and grayscale images by mapping desired prints to precisely controllable parameters during 3D printing. We further extend our understanding of the scattering properties of the low-refractive-index nanopillar to demonstrate grayscale inversion and color desaturation and steganography at the level of single nanopillars.

Dynamic piezoelectric MEMS-based optical metasurfaces

Optical metasurfaces (OMSs) have shown unprecedented capabilities for versatile wavefront manipulations at the subwavelength scale. However, most well-established OMSs are static, featuring well-defined optical responses determined by OMS configurations set during their fabrication, whereas dynamic OMS configurations investigated so far often exhibit specific limitations and reduced reconfigurability. Here, by combining a thin-film piezoelectric microelectromechanical system (MEMS) with a gap-surface plasmon-based OMS, we develop an electrically driven dynamic MEMS-OMS platform that offers controllable phase and amplitude modulation of the reflected light by finely actuating the MEMS mirror. Using this platform, we demonstrate MEMS-OMS components for polarization-independent beam steering and two-dimensional (2D) focusing with high modulation efficiencies (~50%), broadband operation (~20% near the operating wavelength of 800 nanometers), and fast responses (<0.4 milliseconds). The developed MEMS-OMS platform offers flexible solutions for realizing complex dynamic 2D wavefront manipulations that could be used in reconfigurable and adaptive optical networks and systems.

High-Speed Plasmonic Electro-Optic Beam Deflectors

Highly integrated active nanophotonics addressing both device footprint and operation speed demands is a key enabling technology for the next generation optical networks. Plasmonic systems have proven to be a serious contender to alleviate current performance limitations in electro-optic devices. Here, we demonstrate a plasmonic optical phased array (OPA) consisting of two 10 μm long plasmonic phase shifters, utilized to control the far-field radiation pattern of two subwavelength-separated emitters for aliasing-free beam steering with an angular range of ±5° and flat frequency response up to 18 GHz (with the potential bandwidth of 1.2 THz). Extreme optical and electrostatic field confinement with great spatial overlap results in high phase modulation efficiency (V_πL = 0.24 Vcm). The demonstrated approach of using plasmonic lithium niobate technology for optical beam manipulation offers inertia-free, robust, ultracompact, and high-speed beam steering.

Nanophotonics for light detection and ranging technology

Light detection and ranging (LiDAR) technology, a laser-based imaging technique for accurate distance measurement, is considered one of the most crucial sensor technologies for autonomous vehicles, artificially intelligent robots and unmanned aerial vehicle reconnaissance. Until recently, LiDAR has relied on light sources and detectors mounted on multiple mechanically rotating optical transmitters and receivers to cover an entire scene. Such an architecture gives rise to limitations in terms of the imaging frame rate and resolution. In this Review, we examine how novel nanophotonic platforms could overcome the hardware restrictions of existing LiDAR technologies. After briefly introducing the basic principles of LiDAR, we present the device specifications required by the industrial sector. We then review a variety of LiDAR-relevant nanophotonic approaches such as integrated photonic circuits, optical phased antenna arrays and flat optical devices based on metasurfaces. The latter have already demonstrated exceptional functional beam manipulation properties, such as active beam deflection, point-cloud generation and device integration using scalable manufacturing methods, and are expected to disrupt modern optical technologies. In the outlook, we address the upcoming physics and engineering challenges that must be overcome from the viewpoint of incorporating nanophotonic technologies into commercially viable, fast, ultrathin and lightweight LiDAR systems.

Electrochemically controlled metasurfaces with high-contrast switching at visible frequencies

Recently in nanophotonics, a rigorous evolution from passive to active metasurfaces has been witnessed. This advancement not only brings forward interesting physical phenomena but also elicits opportunities for practical applications. However, active metasurfaces operating at visible frequencies often exhibit low performance due to design and fabrication restrictions at the nanoscale. In this work, we demonstrate electrochemically controlled metasurfaces with high intensity contrast, fast switching rate, and excellent reversibility at visible frequencies. We use a conducting polymer, polyaniline (PANI), that can be locally conjugated on preselected gold nanorods to actively control the phase profiles of the metasurfaces. The optical responses of the metasurfaces can be in situ monitored and optimized by controlling the PANI growth of subwavelength dimension during the electrochemical process. We showcase electrochemically controlled anomalous transmission and holography with good switching performance. Such electrochemically powered optical metasurfaces lay a solid basis to develop metasurface devices for real-world optical applications.

Nano-electromechanical Tuning of Dual-Mode Resonant Dielectric Metasurfaces for Dynamic Amplitude and Phase Modulation

Planar all-dielectric photonic crystals or metasurfaces host various resonant eigenmodes including leaky guided mode resonances (GMR) and bound states in the continuum (BIC). Engineering these resonant modes can provide new opportunities for diverse applications. Particularly, electrical control of the resonances will boost development of the applications by making them tunable. Here, we experimentally demonstrate nano-electromechanical tuning of both the GMR and the quasi-BIC modes in the telecom wavelength range. With electrostatic forces induced by a few volts, the devices achieve spectral shifts over 5 nm, absolute intensity modulation over 40%, and modulation speed exceeding 10 kHz. We also show that the interference between two resonances enables the enhancement of the phase response when two modes are overlapped in spectrum. A phase shift of 144° is experimentally observed with a bias of 4 V. Our work suggests a direct route toward optical modulators through the engineering of GMRs and quasi-BIC resonances.

Challenges in nanofabrication for efficient optical metasurfaces

Optical metasurfaces have raised immense expectations as cheaper and lighter alternatives to bulk optical components. In recent years, novel components combining multiple optical functions have been proposed pushing further the level of requirement on the manufacturing precision of these objects. In this work, we study in details the influence of the most common fabrication errors on the optical response of a metasurface and quantitatively assess the tolerance to fabrication errors based on extensive numerical simulations. We illustrate these results with the design, fabrication and characterization of a silicon nanoresonator-based metasurface that operates as a beam deflector in the near-infrared range.

Tunable wave plates based on phase-change metasurfaces

Wave plates based on metasurfaces have attracted intensive attention over the past decade owing to their compactness and design flexibility. Although various wave plates have been designed, their working wavelengths are fixed once they are made. Here we present a study on tunable wave plates based on phase-change metasurfaces made of Ge₂Sb₂Te₅ nanopillar structures. The Ge₂Sb₂Te₅ nanopillars can work as a high-efficiency transmissive half- or quarter-wave plate depending on their structural parameters. The working wavelength of wave plate can be tuned via the phase transition of Ge₂Sb₂Te₅. Moreover, the polarization state of the transmitted light at a fixed wavelength can be modified by changing the crystallinity of Ge₂Sb₂Te₅. The features suggest that tunable wave plates may have applications in optical modulators, molecular detection, and polarimetric imaging.

Kerr Metasurface Enabled by Metallic Quantum Wells

Optical metasurfaces have emerged as promising candidates for multifunctional devices. Dynamically reconfigurable metasurfaces have been introduced by employing phase-change materials or by applying voltage, heat, or strain. While existing metasurfaces exhibit appealing properties, they do not express any significant nonlinear effects due to the negligible nonlinear responses from the typical materials used to build the metasurface. In this work, we propose and experimentally demonstrate one kind of Kerr metasurface that shows strong intensity-dependent responses. The Kerr metasurface is composed of a top layer of gold antennas, a dielectric spacer, and a ground layer of metallic quantum wells (MQWs). Because of the large Kerr nonlinearity supported by the MQWs, the effective optical properties of the MQWs can change from metallic to dielectric with increasing of the input intensity, leading to dramatic modifications of the metasurface responses. This opens up new routes for potential applications in the field of nonlinear optics.