High-speed manufacturing of highly regular femtosecond laser-induced periodic surface structures: physical origin of regularity

Enhanced osteointegration and osteogenesis of osteoblast cells by laser-induced surface modification of Ti implants

Dental and orthopedic implants have become routine medical technologies for tooth replacement and bone fixation. Despite significant progress in implantology, achieving sufficient osseointegration remains a challenge, often leading to implant failure over the long term. Nanotechnology offers the potential to mimic the natural patterns of living tissues, providing a promising platform for tissue engineering and implant surface design. Among the various methods for developing nanostructures, High-Regular Laser-Induced Periodic Surface Structures (HR-LIPSS) techniques stand out for their ability to fabricate highly ordered nanostructures with excellent long-range repeatability and production efficiency. In this study, we utilized an innovative technical approach to generate traditional laser-induced superficial LIPSS nanostructures, followed by detailed surface analysis using classical microscopy and physicochemical methods. Our findings demonstrate for the first time that nanostructured LIPSS surfaces can significantly enhance cell adhesion and proliferation while providing an optimal environment for cell metabolism. Given the high reproducibility, low cost, and potential of HR-LIPSS techniques to support cell growth and differentiation, this novel technology has the potential to impact both the industrial development of new implants and clinical outcomes after implantation.

Laser-Induced Periodic Surface Structures and Their Application for Gas Sensing

Semiconducting metal oxides are widely used for solar cells, photo-catalysis, bio-active materials and gas sensors. Besides the material properties of the semiconductor being used, the specific surface topology of the sensors determines device performance. This study presents different approaches for increasing the sensing area of semiconducting metal oxide gas sensors. Micro- and nanopatterned laser-induced periodic surface structures (LIPSSs) are generated on silicon, Si/SiO2 and glass substrates. The surface morphologies of the fabricated samples are examined by FE SEM. We selected the nanostructuring and characterization of nanostructured source Ni/Au and Ti/Au films prepared on glass using laser ablation as the most suitable of the investigated approaches. Surface structures produced on glass by backside ablation provide 100 nm features with a high surface area; they are also transparent and have high resistivity. The value of the hydrogen sensitivity in the range concentrations from 100 to 500 ppm was recorded using transmittance measurements to be twice as great for the nanostructured target TiO2/Au as compared to the NiO/Au. It was found that such transparent materials present additional possibilities for producing optical gas sensors.

Influence of Laser Treatment of Ti6Al4V on the Behavior of Biological Cells

This article explores the enhancement of material surface properties of Ti6Al4V, potentially applicable to dental implants, through ultra-short pulse laser systems. This study investigates potential connections between surface wettability and biocompatibility, addressing the challenge of improving variability in material properties with specific laser treatment. Several designed microstructures were manufactured using a picosecond laser system. After that, the wettability of these structures was measured using the sessile drop method. The basic behavior and growth activity of biological cells (MG-63 cell line) on treated surfaces were also analyzed. While the conducted tests did not conclusively establish correlations between wettability and biocompatibility, the results indicated that laser treatment of Ti6Al4V could effectively enlarge the active surface to better biological cell colonization and adhesion and provide a focused moving orientation. This outcome suggests the potential application of laser treatment in producing special dental implants to mitigate the issues during and following implantation.

Regulation of laser-induced nanogratings by tuning the Marangoni-plasmon-coupled effect

Laser-induced subwavelength nanogratings on films find widespread applications in enhancing a spectrum through surface plasmon excitation. It is challenging to achieve high uniformity, diversity, and controllability due to the intricate interplay between two basic mechanisms in laser nanostructuring: the Marangoni effect and surface plasmon polaritons (SPPs). We tune the coupled effect on Ge2Sb2Te5 films by adjusting the laser polarization, whose component controls the two effects' strength ratio. The Marangoni effect dominates when the SPPs' direction mismatches with the growing direction of nanogratings. Tuning this competition relationship helps to create nanogratings with tunable duty cycle and distribution, which are significant for light modulation applications. A highly efficient direct writing method with a line-shaped laser beam is employed to create large-area regular nanogratings by enhancing the effect tuning. We demonstrate diverse Au nanogratings with the aid of a lift-off operation and apply them in surface plasmon-coupled emission (SPCE), showcasing exceptional enhancement and narrowing performance.

Bi-stability in femtosecond laser ablation by MHz bursts

In this work, a bi-stable behavior of laser ablation efficiency and quality was controlled by fluence and burst length. The plasma shielding of incoming laser radiation caused sudden jumps with a significant decrease in ablation efficiency for every even number of pulses in the burst. The attenuation of incoming laser radiation by plasma created by the previous pulse was incorporated into the toy model of burst ablation efficiency. The mathematical recurrence relation has been derived for the first time, binding ablation efficiency for the next pulse with the efficiency of the previous pulse, which predicts bi-stability, as well as sudden jumps occurring in ablation efficiency depending on the number of pulses in burst with the response to changes of the control parameter of peak laser fluence in the pulse. The modeling results using new recurrence relation showed stable and bi-stable ablation efficiency depending on burst fluence and the number of pulses, which agreed well with experimental data. The extremely efficient laser ablation has been achieved by optimizing the shielding effect using three pulses in the burst.

Laser-Induced Periodic Surface Structures on Layered GaSe Crystals: Structural Coloring and Infrared Antireflection

We study structural and morphological transformations caused by multipulse femtosecond-laser exposure of Bridgman-grown ϵ-phase GaSe crystals, a van der Waals semiconductor promising for nonlinear optics and optoelectronics. We unveil, for the first time, the laser-driven self-organization regimes in GaSe allowing the formation of regular laser-induced periodic surface structures (LIPSSs) that originate from interference of the incident radiation and interface surface plasmon waves. LIPSSs formation causes transformation of the near-surface layer to amorphous Ga2Se3 at negligible oxidation levels, evidenced from comprehensive structural characterization. LIPSSs imprinted on both output crystal facets provide a 1.2-fold increase of the near-IR transmittance, while the ability to control local periodicity by processing parameters enables multilevel structural color marking of the crystal surface. Our studies highlight direct fs-laser patterning as a multipurpose application-ready technology for precise nanostructuring of promising van der Waals semiconductors, whose layered structure restricts application of common nanofabrication approaches.

Analysis of influential factors of image reconstruction quality in structured illumination imaging and its application in laser microprocessing

Due to the huge demand for higher resolution and stable imaging from fluorescent labeling biological systems and life systems, there has been much research and development of structured light illumination imaging (SIM). Despite this, further investigating the possible applications of SIM in other fields is still meaningful. In this paper, super-resolution observation of non-fluorescent samples by a SIM system under reflective illumination is analyzed. The simulation of SIM imaging and image reconstruction is carried out by using an open-source program, and the influences of the structural parameters of the illumination light (fringe direction, phase, and intensity uniformity of the cosine structured light), the optical parameters of the imaging system (selection of the optical transfer function) and the anti-vibration characteristics of the platform on the super-resolution imaging effect are studied. Finally, by optimizing the above influential factors according to simulation results, successful application of SIM in laser processing process monitoring is demonstrated in the experiment. We believe that our research results will provide some reference for the application of SIM in other similar scenarios.

Hierarchical Structuring of Black Silicon Wafers by Ion-Flow-Stimulated Roughening Transition: Fundamentals and Applications for Photovoltaics

Ion-flow-stimulated roughening transition is a phenomenon that may prove useful in the hierarchical structuring of nanostructures. In this work, we have investigated theoretically and experimentally the surface texturing of single-crystal and multi-crystalline silicon wafers irradiated using ion-beam flows. In contrast to previous studies, ions had relatively low energies, whereas flow densities were high enough to induce a quasi-liquid state in the upper silicon layers. The resulting surface modifications reduced the wafer light reflectance to values characteristic of black silicon, widely used in solar energetics. Features of nanostructures on different faces of silicon single crystals were studied numerically based on the mesoscopic Monte Carlo model. We established that the formation of nano-pyramids, ridges, and twisting dune-like structures is due to the stimulated roughening transition effect. The aforementioned variety of modified surface morphologies arises due to the fact that the effects of stimulated surface diffusion of atoms and re-deposition of free atoms on the wafer surface from the near-surface region are manifested to different degrees on different Si faces. It is these two factors that determine the selection of the allowable "trajectories" (evolution paths) of the thermodynamic system along which its Helmholtz free energy, F, decreases, concomitant with an increase in the surface area of the wafer and the corresponding changes in its internal energy, U (dU>0), and entropy, S (dS>0), so that dF=dU - TdS<0, where T is the absolute temperature. The basic theoretical concepts developed were confirmed in experimental studies, the results of which showed that our method could produce, abundantly, black silicon wafers in an environmentally friendly manner compared to traditional chemical etching.

Design of Surfaces with Persistent Antimicrobial Properties on Stainless Steel Developed Using Femtosecond Laser Texturing for Application in "High Traffic" Objects

Metal-based high-touch surfaces used for diverse applications in everyday use, like handrails, playground grab handles, doorknobs, ATM touch pads, and desks, are the most common targets for pollution with a variety of microbes; there is thus a need to improve their antimicrobial properties, an issue which has become a challenge in recent years, particularly after the COVID-19 pandemic. According to the World Health Organization (WHO), drug-resistant pathogens are one of the main concerns to global health today, as they lead to longer hospital stays and increased medical costs. Generally, the development of antimicrobial surfaces is related to the utilization of chemical methods via deposition on surfaces in the forms of various types of coatings. However, the addition of chemical substances onto a surface can induce unwanted effects, since it causes surface chemistry changes and, in some cases, cannot provide long-lasting results. A novel approach of utilising ultra-short laser radiation for the treatment of metallic surfaces by inducing a variety of micro- and nanostructuration is elaborated upon in the current research, estimating the optimum relation between the wettability and roughness characteristics for the creation of antimicrobial properties for such high-touch surfaces. In the current study, AISI 304-304L stainless steel metal was used as a benchmark material. Surface texturing via laser ablation with femtosecond laser pulses is an effective method, since it enables the formation of a variety of surface patterns, along with the creation of bimodal roughness, in one-step processing. In this investigation, a precise approach toward developing hydrophobic stainless steel surfaces with tunable adherence using femtosecond laser-induced modification is described. The impact of basic femtosecond laser processing parameters, like the scanning velocity, laser energy, and wettability properties of the laser-processed stainless steel samples, are examined. It is identified that the topography and morphology of laser-induced surface structures can be efficiently changed by adapting the laser processing parameters to create structures, which facilitate the transfer of surface properties from extremely low to high surface wettability.

Impact of film thickness in laser-induced periodic structures on amorphous Si films

We report self-organized periodic nanostructures on amorphous silicon thin films by femtosecond laser-induced oxidation. The dependence of structural periodicity on the thickness of silicon films and the substrate materials is investigated. The results reveal that when silicon film is 200 nm, the period of self-organized nanostructures is close to the laser wavelength and is insensitive to the substrates. In contrast, when the silicon film is 50 nm, the period of nanostructures is much shorter than the laser wavelength, and is dependent on the substrates. Furthermore, we demonstrate that, for the thick silicon films, quasi-cylindrical waves dominate the formation of periodic nanostructures, while for the thin silicon films, the formation originates from slab waveguide modes. Finite-difference time-domain method-based numerical simulations support the experimental discoveries.

Scanning Strategies in Laser Surface Texturing: A Review

Laser surface texturing (LST) is one of the most promising technologies for controllable surface structuring and the acquisition of specific physical surface properties needed in functional surfaces. The quality and processing rate of the laser surface texturing strongly depend on the correct choice of a scanning strategy. In this paper, a comparative review of the classical and recently developed scanning strategies of laser surface texturing is presented. The main attention is paid to maximal processing rate, precision and existing physical limitations. Possible ways of further development of the laser scanning strategies are proposed.

Optical near fields for ablation of periodic structures

The formation mechanism of laser-induced periodic surface structures (LIPSS) has been a key to high-resolution sub-diffraction lithography or high-efficiency large-area nanotexturing. We show the evolution of LIPSS formation from a nanohole seed structure to high-spatial-frequency LIPSS by using a tightly focused and rectangular-shaped laser beam with different shape-polarization orientations. Formation of LIPSS based on light intensity distribution without invoking any long-range electromagnetic modes achieved quantitative match between modeling and experiment. Our results clearly show the entire step-like and deterministic process of LIPSS evolution based on experimental data and numerical simulations, revealing the dominant structural near-field enhancement on the ripple formation. A rectangular-shaped beam with an aspect ratio of 7:3 was used to break the symmetry of a circularly shaped focus. By azimuthally rotating the orientation of the focal spot and the polarization, it is possible to visualize the far-field effect for the initial seed structure formation and the competition between the far and near fields in the subsequent structure evolution.

Femtosecond laser-induced nano- and microstructuring of Cu electrodes for CO2 electroreduction in acetonitrile medium

The dependency of CO₂ reduction rate in acetonitrile-Bu₄NClO₄ solution on cathodes, which were modified by laser induction of a copper surface, was studied. The topography of laser-induced periodic surface structures (LIPSS) → grooves → spikes was successively formed by a certain number of pulses. It was proved that for a higher number of laser pulses, the surface area of the copper cathode increases and preferred platy orientation of the copper surface on [022] crystallografic direction and larger fluence values increase. At the same time, the content of copper (I) oxide on the surface of the copper cathode increases. Also, the tendency to larger fluency values is observed. It promotes the increase of cathodic current density for CO₂ reduction, which reaches values of 14 mA cm^-2 for samples with spikes surface structures at E = - 3.0 V upon a stable process.

Nanoscale control of non-reciprocal ripple writing

Femtosecond laser-induced deep-subwavelength structures have attracted much attention as a nanoscale surface texturization technique. A better understanding of the formation conditions and period control is required. Herein, we report a method of non-reciprocal writing via a tailored optical far-field exposure, where the period of ripples varies along different scanning directions, and achieve a continuous manipulation of the period from 47 to 112 nm (±4 nm) for a 100-nm-thick indium tin oxide (ITO) on glass. A full electromagnetic model was developed to demonstrate the redistributed localized near-field at different stages of ablation with nanoscale precision. It explains the formation of ripples and the asymmetry of the focal spot determines the non-reciprocity of ripple writing. Combined with beam shaping techniques, we achieved non-reciprocal writing (regarding scanning direction) using an aperture-shaped beam. The non-reciprocal writing is expected to open new paths for precise and controllable nanoscale surface texturing.

Highly Regular LIPSS on Thin Molybdenum Films: Optimization and Generic Criteria

A systematic experimental study was performed to determine laser irradiation conditions for the large-area fabrication of highly regular laser-induced periodic surface structures (HR-LIPSS) on a 220 nm thick Mo film deposited on fused silica. The LIPSS were fabricated by scanning a linearly polarized, spatially Gaussian laser beam at 1030 nm wavelength and 1.4 ps pulse duration over the sample surface at 1 kHz repetition rate. Scanning electron microscope images of the produced structures were analyzed using the criterion of the dispersion of the LIPSS orientation angle (DLOA). Favorable conditions, in terms of laser fluence and beam scanning overlaps, were identified for achieving DLOA values <10∘. To gain insight into the material behavior under these irradiation conditions, a theoretical analysis of the film heating was performed, and surface plasmon polariton excitation is discussed. A possible effect of the film dewetting from the dielectric substrate is deliberated.

Periodic Surface Structuring of Copper with Spherical and Cylindrical Lenses

The use of a cylindrical lens in femtosecond laser surface structuring is receiving attention to improve the processing efficiency. Here, we investigate the structures produced on a copper target, in air, by exploiting both spherical and cylindrical lenses for beam focusing, aiming at elucidating similarities and differences of the two approaches. The morphological features of the surface structures generated by ≈180 fs laser pulses at 1030 nm over areas of 8 × 8 mm² were analyzed. For the spherical lens, micron-sized parallel channels are formed on the target surface, which is covered by subwavelength ripples and nanoparticles. Instead, the cylindrical lens leads to a surface decorated with ripples and nanoparticles with a negligible presence of micro-channels. Moreover, the morphological features achieved by focusing ≈180 fs laser pulses at 515 nm with the cylindrical lens and varying the scanning parameters were also studied. The experimental results evidence a direct effect of the hatch distance used in the scanning process on the target surface that contains dark and bright bands corresponding to regions where the rippled surface contains a richer decoration or a negligible redeposition of nanoparticles. Our findings can be of interest in large area surface structuring for the selection of the more appropriate focusing configuration according to the final application of the structured surface.

Dynamics of Sliding Friction between Laser-Induced Periodic Surface Structures (LIPSS) on Stainless Steel and PMMA Microspheres

In this work, we investigated the sliding friction measured between poly(methyl methacrylate) (PMMA) colloidal probes with two different diameters D (1.5 and 15 μm) and laser-induced periodic surface structures (LIPSS) on stainless steel with periodicities Λ of 0.42 and 0.9 μm, when the probes are elastically driven along two directions, perpendicular and parallel to the LIPSS. The time evolution of the friction shows the characteristic features of a reverse stick-slip mechanism recently reported on periodic gratings. The morphologies of colloidal probes and modified steel surfaces are geometrically convoluted in the atomic force microscopy (AFM) topographies simultaneously recorded with the friction measurements. The LIPSS periodicity is only revealed with smaller probes (D = 1.5 μm) and when Λ takes the largest value of 0.9 μm. The average value of the friction force is found to be proportional to the normal load, with a coefficient of friction μ varying between 0.23 and 0.54. The values of μ are rather independent of the direction of motion, and they reach their maximum when the small probe is scanned on the LIPSS with the larger periodicity. The friction is also found to decrease with increasing velocity in all cases, which is attributed to the corresponding decrease of the viscoelastic contact time. These results can be used to model the sliding contacts formed by a set of spherical asperities of different sizes driven on a rough solid surface.

Quasicylindrical Waves for Ordered Nanostructuring

Laser-induced self-organization of periodic nanostructures on highly absorbing materials is widely understood to be due to interference between laser and surface plasmon polaritons (SPPs) that are excited by initial surface roughness. The structure order naturally emerges from the propagation phase of SPPs. Here, we reveal an unexplored mechanism that is predominantly induced by quasicylindrical waves (QCWs) with negligible contributions from SPPs. This mechanism features a new principle of order emergence in growth of periodic nanostructures through short-range electromagnetic interactions between QCWs and marginal nanofringes. In this scenario, the periodicity of nanostructures is not simply determined by the electromagnetic wavelength. With suppressed long-range interactions, the formation of nanostructures shows a domino-like growth process, thus significantly improving structure uniformity. An in situ microscopic observation is performed to characterize the temporal dynamics of structural growth and verify the new mechanism. Further, the QCWs are directly observed in experiments, which are theoretically supported by a scattering model.

Influence of Heat Accumulation on Morphology Debris Deposition and Wetting of LIPSS on Steel upon High Repetition Rate Femtosecond Pulses Irradiation

The fabrication of laser-induced periodic surface structures (LIPSS) over extended areas at high processing speeds requires the use of high repetition rate femtosecond lasers. It is known that industrially relevant materials such as steel experience heat accumulation when irradiated at repetition rates above some hundreds of kHz, and significant debris redeposition can take place. However, there are few studies on how the laser repetition rate influences both the debris deposition and the final LIPSS morphology. In this work, we present a study of fs laser-induced fabrication of low spatial frequency LIPSS (LSFL), with pulse repetition rates ranging from 10 kHz to 2 MHz on commercially available steel. The morphology of the laser-structured areas as well as the redeposited debris was characterized by scanning electron microscopy (SEM) and µ-Raman spectroscopy. To identify repetition rate ranges where heat accumulation is present during the irradiations, we developed a simple heat accumulation model that solves the heat equation in 1 dimension implementing a Forward differencing in Time and Central differencing in Space (FTCS) scheme. Contact angle measurements with water demonstrated the influence of heat accumulation and debris on the functional wetting behavior. The findings are directly relevant for the processing of metals using high repetition rate femtosecond lasers, enabling the identification of optimum conditions in terms of desired morphology, functionality, and throughput.

Uniformity evaluation of laser-induced periodic surface structures formed by two-color double-pulse femtosecond laser irradiation

The Perpendicular Period and Phase Scanning (P³S) method can evaluate the uniformity of a laser-induced periodic surface structure (LIPSS). P³S assesses the uniformity of LIPSS using the standard deviation of the peak period and the average of the phase difference in the direction perpendicular to LIPSS. The P³S method demonstrates that LIPSS formed by two-color double-pulse irradiation is reduced to a quarter of the period dispersion, and the average phase difference of LIPSS is also reduced compared to the single-pulse irradiation. In addition, a 3D electromagnetic particle-in-cell simulation was performed to evaluate the possibility of an improved uniformity of LIPSS. The results confirm that the two-color double-pulse irradiation produces a uniform LIPSS and validates the effectiveness of the P³S method to assess the uniformity of LIPSS.

Laser Fabrication of Highly Ordered Nanocomposite Subwavelength Gratings

Optical nanogratings are widely used for different optical, photovoltaic, and sensing devices. However, fabrication methods of highly ordered gratings with the period around optical wavelength range are usually rather expensive and time consuming. In this article, we present high speed single-step approach for fabrication of highly ordered nanocomposite gratings with a period of less than 355 nm. For the purpose, we used commercially available nanosecond-pulsed fiber laser system operating at the wavelength of 355 nm. One-dimensional and two-dimensional nanostructures can be formed by direct laser treatment with different scan speed and intensity. These structures exhibit not only dispersing, but also anisotropic properties. The obtained results open perspectives for easier mass production of polarization splitters and filters, planar optics, and also for security labeling.

Large-Area Fabrication of LIPSS for Wetting Control Using Multi-Parallel Femtosecond Laser Processing

In this research, the wetting property control of a stainless-steel surface, structured using parallel processing via an array of 64-femtosecond laser beams, is presented. The scanning of an 8 × 8-beam array over the sample was used to uniformly cover the large areas with LIPSS. The static water contact angle and the LIPSS period dependence on processing parameters were investigated. The wettability control of water droplets on laser-patterned stainless steel, ranging from contact angles of ~63°, similar to those of the plain surface, to the superhydrophobic surface with contact angles > 150°, was achieved. The relationship between the static water contact angle and the LIPSS parameters in the Fourier plane was investigated.

Learning PDE to Model Self-Organization of Matter

A self-organization hydrodynamic process has recently been proposed to partially explain the formation of femtosecond laser-induced nanopatterns on Nickel, which have important applications in optics, microbiology, medicine, etc. Exploring laser pattern space is difficult, however, which simultaneously (i) motivates using machine learning (ML) to search for novel patterns and (ii) hinders it, because of the few data available from costly and time-consuming experiments. In this paper, we use ML to predict novel patterns by integrating partial physical knowledge in the form of the Swift-Hohenberg (SH) partial differential equation (PDE). To do so, we propose a framework to learn with few data, in the absence of initial conditions, by benefiting from background knowledge in the form of a PDE solver. We show that in the case of a self-organization process, a feature mapping exists in which initial conditions can safely be ignored and patterns can be described in terms of PDE parameters alone, which drastically simplifies the problem. In order to apply this framework, we develop a second-order pseudospectral solver of the SH equation which offers a good compromise between accuracy and speed. Our method allows us to predict new nanopatterns in good agreement with experimental data. Moreover, we show that pattern features are related, which imposes constraints on novel pattern design, and suggest an efficient procedure of acquiring experimental data iteratively to improve the generalization of the learned model. It also allows us to identify the limitations of the SH equation as a partial model and suggests an improvement to the physical model itself.

Texturing Technologies for Plastics Injection Molding: A Review

Texturing is an engineering technology that can be used to enable surface functionalization in the plastics injection molding industry. A texture is defined as the geometrical modification of the topography by addition of surface features that are characterized by a smaller scale than the overall surface dimensions. Texturing is added to products to create novel functionalities of plastic products and tools, which can be exploited to modify interactions with other materials in contact with the surface. The geometry, dimensions, and positioning on the surface define the function of a texture and its properties. This work reviews and discuss the wide range of texturing technologies available in the industry. The advantages and limitations of each technology are presented to support the development of new surface engineering applications in the plastics manufacturing industry.

Laser-Driven One- and Two-Dimensional Subwavelength Periodic Patterning of Thin Films Made of a Metal-Organic MoS2 Precursor

Laser-based surface processing is an established way for the maskless generation of surface structures and functionalities on a large variety of materials. Laser-driven periodic surface texturing and structuring of thin films is reported for metallic-, semiconductive-, and polymeric films. Here, we introduce subwavelength surface patterning of metal-organic thin films of [Mo₂S₄(S₂CNⁿBu₂)₂], a MoS₂ precursor. Accurate control of one- and two-dimensional (1D and 2D) periodic patterns is achieved on silicon wafers with a pulsed 532 nm ns laser. With suitable combinations of laser polarization, laser pulse energy, the thickness of the SiO₂ passivation layer, and the MoS₂ precursor's thin film thickness, high-quality 1D and 2D self-organized periodic structures are obtained in virtually unlimited areas. The material redistribution related to the pattern formation is thermally driven at low laser energies. Increasing pulse energies beyond a threshold level, in our experiments a factor of 2, fully converts the precursor to MoS₂.

Formation of Nano- and Micro-Scale Surface Features Induced by Long-Range Femtosecond Filament Laser Ablation

In this work, we study the characteristics of femtosecond-filament-laser-matter interactions and laser-induced periodic surface structures (LIPSS) at a beam-propagation distance up to 55 m. The quantification of the periodicity of filament-induced self-organized surface structures was accomplished by SEM and AFM measurements combined with the use of discrete two-dimensional fast Fourier transform (2D-FFT) analysis, at different filament propagation distances. The results show that the size of the nano-scale surface features increased with ongoing laser filament processing and, further, periodic ripples started to form in the ablation-spot center after irradiation with five spatially overlapping pulses. The effective number of irradiating filament pulses per spot area affected the developing surface texture, with the period of the low spatial frequency LIPSS reducing notably at a high pulse number. The high regularity of the filament-induced ripples was verified by the demonstration of the angle-of-incidence-dependent diffraction of sunlight. This work underlines the potential of long-range femtosecond filamentation for energy delivery at remote distances, with suppressed diffraction and long depth focus, which can be used in biomimetic laser surface engineering and remote-sensing applications.

Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds

It is always a great challenge to bridge the nano- and macro-worlds in nanoscience, for instance, manufacturing uniform nanogratings on a whole wafer in seconds instead of hours even days. Here, we demonstrate a single-step while extremely high-throughput femtosecond laser scanning technique to obtain wafer-scale, highly regular nanogratings on semiconductor-on-metal thin films. Our technique takes advantage of long-range surface plasmons-laser interference, which is regulated by a self-initiated seed. By controlling the scanning speed, two types of nanogratings are readily manufactured, which are produced by either oxidation or ablation. We achieve a record manufacturing speed (>1 cm² s^-1), with tunable periodicity of Λ < 1 µm. The fractional variation of their periodicity is evaluated to be as low as ∆Λ/Λ ≈ 0.5%. Furthermore, by utilizing the semiconductor-on-metal film-endowed interference effects, an extremely high energy efficiency is achieved via suppressing light reflection during femtosecond laser nano-processing. As the fabricated nanogratings exhibit multi-functionality, we exemplify their practical applications in highly sensitive refractive index sensing, vivid structural colors, and durable superhydrophilicity.

Classification of Preeclamptic Placental Extracellular Vesicles Using Femtosecond Laser Fabricated Nanoplasmonic Sensors

Placental extracellular vesicles (EVs) play an essential role in pregnancy by protecting and transporting diverse biomolecules that aid in fetomaternal communication. However, in preeclampsia, they have also been implicated in contributing to disease progression. Despite their potential clinical value, current technologies cannot provide a rapid and effective means of differentiating between healthy and diseased placental EVs. To address this, a fabrication process called laser-induced nanostructuring of SERS-active thin films (LINST) was developed to produce scalable nanoplasmonic substrates that provide exceptional Raman signal enhancement and allow the biochemical fingerprinting of EVs. After validating the performance of LINST substrates with chemical standards, placental EVs from tissue explant cultures were characterized, demonstrating that preeclamptic and normotensive placental EVs have classifiably distinct Raman spectra following the application of advanced machine learning algorithms. Given the abundance of placental EVs in maternal circulation, these findings encourage immediate exploration of surface-enhanced Raman spectroscopy (SERS) of EVs as a promising method for preeclampsia liquid biopsies, while this novel fabrication process will provide a versatile and scalable substrate for many other SERS applications.

Vivid Structural Color Macropatterns Created by Flexible Nanopainting of Ultrafast Lasers

Structural colors based on the macro- or nanostructure formation are ubiquitous in nature, having great prospects in many fields as a result of their environmentally friendly and long-term stable characteristics compared to pigments or dyes. However, the current fabrication techniques still face challenges for the generation of high-quality structural color patterns, especially at the macroscale, in an efficient way. Here, we demonstrate a method that exploits a flexible scanning process of generating macropatterns to convert the contour profiles into well-defined sub-micrometer grating structures with unprecedented vivid structural colors, at high speed and low cost on the graphene oxide film. The nature of dynamic beam shaping of the laser line spot allows us to flexibly construct the complex patterns at high speed, in sharp contrast to the traditional point-by-point laser processing. Moreover, the multicolor display of the patterns can be carried out by simply modulating the laser polarization to change the orientation of the sub-micrometer structures, and this nanopainting strategy is further explored to flexibly design the composite image for potential anti-counterfeiting applications.

Influence of Periodic Non-Uniformities of Well-Structured Sapphire Surface by LIPSS on the Alignment of Nematic Liquid Crystal

In this study, we report on the alignment properties of nematic liquid crystals on various transparent structured sapphire layers formed by laser-induced periodic surface structures (LIPSS). One-dimensional LIPSS (1D-LSFL) are generated by infrared femtosecond laser pulses along parallel lines covering an area of 5 × 5 mm², with a line spacing that is varied between 7 and 17 µm. These periodic structures, employed as alignment layers, have a spatial periodicity of about 980 nm, a modulation depth of about 100 nm, and exhibit a high quality due to being characterized by a high degree of homogeneity and parallelism of the structured features. It is found that such alignment layers of the sapphire surface lead to a decreasing azimuthal anchoring energy, when the width of the unstructured gap is increased. Modifying the sapphire surface by an ITO-coating with further deposition of a polyimide film increases the azimuthal anchoring energy by a factor of about four up to W_φ ~ 4.25 × 10⁻⁶ J/m², when the minimum width of the unstructured gap is 7 µm. Comprehensive measurements and comparisons of the azimuthal anchoring energy as well as the pretilt angle for the 1D-LSFL, unstructured gaps, and entire areas depending on the width of unstructured gaps are presented and discussed.

Regulating Morphology and Composition of Laser-Induced Periodic Structures on Titanium Films with Femtosecond Laser Wavelength and Ambient Environment

Recently, highly uniform thermochemical laser-induced periodic surface structures (TLIPSS) have attracted significant research attention due to their practical applicability for upscalable fabrication of periodic surface morphologies important for surface functionalization, diffraction optics, sensors, etc. When processed by femtosecond (fs) laser pulses in oxygen-containing environments, TLIPSS are formed on the material surface as parallel protrusions upon local oxidation in the maxima of the periodic intensity pattern coming from interference of the incident and scattered waves. From an application point of view, it is important to control both the TLIPSS period and nanoscale morphology of the formed protrusions that can be expectedly achieved by scalable shrinkage of the laser-processing wavelength as well as by varying the ambient environment. However, so far, the fabrication of uniform TLIPSS was reported only for near-IR wavelength in air. In this work, TLIPSS formation on the surface of titanium (Ti) films was systematically studied using near-IR (1026 nm), visible (513 nm) and UV (256 nm) wavelengths revealing linear scalability of the protrusion period versus the fs-laser wavelength. By changing the ambient environment from air to vacuum (10⁻² atm) and pressurized nitrogen gas (2.5 atm) we demonstrate tunability of the composition and morphology of the Ti TLIPSS protrusions. In particular, Raman spectroscopy revealed formation of TiN together with dominating TiO₂ (rutile phase) in the TLIPSS protrusions produced in the nitrogen-rich atmosphere.

Ten Open Questions about Laser-Induced Periodic Surface Structures

Laser-induced periodic surface structures (LIPSS) are a simple and robust route for the nanostructuring of solids that can create various surface functionalities featuring applications in optics, medicine, tribology, energy technologies, etc. While the current laser technologies already allow surface processing rates at the level of m2/min, industrial applications of LIPSS are sometimes hampered by the complex interplay between the nanoscale surface topography and the specific surface chemistry, as well as by limitations in controlling the processing of LIPSS and in the long-term stability of the created surface functions. This Perspective article aims to identify some open questions about LIPSS, discusses the pending technological limitations, and sketches the current state of theoretical modelling. Hereby, we intend to stimulate further research and developments in the field of LIPSS for overcoming these limitations and for supporting the transfer of the LIPSS technology into industry.

Thermochemical Laser-Induced Periodic Surface Structures Formation by Femtosecond Laser on Hf Thin Films in Air and Vacuum

Thermochemical laser-induced periodic surface structures (TLIPSS) are a relatively new type of periodic structures formed in the focal area of linear polarized laser radiation by the thermally stimulated reaction of oxidation. The high regularity of the structures and the possibility of forming high-ordered structures over a large area open up possibilities for the practical application for changing the optical and physical properties of materials surface. Since the mechanism of formation of these structures is based on a chemical oxidation reaction, an intriguing question involves the influence of air pressure on the quality of structure formation. This paper presents the results on the TLIPSS formation on a thin hafnium film with fs IR laser radiation at various ambient air pressures from 4 Torr to 760 Torr. Despite the decrease in the oxygen content in the ambient environment by two orders of magnitude, the formation of high-ordered TLIPSS (dispersion in the LIPSS orientation angle δθ < 5°) with a period of ≈700 nm occurs within a wide range of parameters variation (laser power, scanning speed). This behavior of TLIPSS formation is in agreement with experimental data obtained earlier on the study of the kinetics of high-temperature oxidation of hafnium at various oxygen pressures.

Superwicking Functionality of Femtosecond Laser Textured Aluminum at High Temperatures

An advanced superwicking aluminum material based on a microgroove surface structure textured with both laser-induced periodic surface structures and fine microholes was produced by direct femtosecond laser nano/microstructuring technology. The created material demonstrates excellent wicking performance in a temperature range of 23 to 120 °C. The experiments on wicking dynamics show a record-high velocity of water spreading that achieves about 450 mm/s at 23 °C and 320 mm/s at 120 °C when the spreading water undergoes intensive boiling. The lifetime of classic Washburn capillary flow dynamics shortens as the temperature increases up to 80 °C. The effects of evaporation and boiling on water spreading become significant above 80 °C, resulting in vanishing of Washburn's dynamics. Both the inertial and visco-inertial flow regimes are insignificantly affected by evaporation at temperatures below the boiling point of water. The boiling effect on the inertial regime is small at 120 °C; however, its effect on the visco-inertial regime is essential. The created material with effective wicking performance under water boiling conditions can find applications in Maisotsenko cycle (M-cycle) high-temperature heat/mass exchangers for enhancing power generation efficiency that is an important factor in reducing CO2 emissions and mitigation of the global climate change.

Oxidation ruled transition from normal to anomalous periodic structures with femtosecond laser irradiation on Cr/Si films

Elucidation of the underlying physics for laser-induced periodic surface structures (LIPSSs) is of great importance for their controllable fabrication. We here demonstrate a periodic structure transition from normal to anomalous morphology, upon femtosecond laser irradiation on 50-nm thick Cr/Si films in an air pressure-tunable chamber. As the air pressure gradually decreases, the amount of surface oxide induced by preceding laser pulses is found to reduce, and eventually triggering the structure evolution from the anomalously oriented subwavelength to normally oriented deep-subwavelength LIPSSs. The intriguing structure transition is explained in terms of the competitive excitation between the transverse-electric scattered surface wave and transverse-magnetic hybrid plasmon wave, which is ruled by the thickness of the preformed oxide layer indeed.

Regular Nanowire Formation on Fe-Based Metal Glass by Manipulation of Surface Waves

We report the formation of a sole long nanowire structure and the regular nanowire arrays inside a groove on the surface of Fe-based metallic glass upon irradiation of two temporally delayed femtosecond lasers with the identical linear polarization parallel and perpendicular to the groove, respectively. The regular structure formation can be well observed within the delay time of 20 ps for a given total laser fluence of F = 30 mJ/cm² and within a total laser fluence range of F = 30–42 mJ/cm² for a given delay time of 5 ps. The structural features, including the unit width and distribution period, are measured on a one-hundred nanometer scale, much less than the incident laser wavelength of 800 nm. The degree of structure regularity sharply contrasts with traditional observations. To comprehensively understand such phenomena, we propose a new physical model by considering the spin angular momentum of surface plasmon and its enhanced inhomogeneous magnetization for the ferromagnetic metal. Therefore, an intensive TE polarized magnetic surface wave is excited to result in the nanometer-scaled energy fringes and the ablative troughs. The theory is further verified by the observation of nanowire structure disappearance at the larger time delays of two laser pulses.

Two-dimensional suprawavelength periodic surface structuring of a ZnO single crystal with a UV femtosecond laser

Herein, we report on the one-step formation of a novel microstructure on the surface of crystalline ZnO in ambient air excited by a single femtosecond laser beam (central wavelength 400 nm, pulse duration 35fs), which has photon energy close to the bandgap of ZnO. A two-dimensional surface structure with a controlled period of ∼2-6 μm is observed, with its orientation independent on the status of laser polarization (linear, circular, or elliptical polarization). We find that the orientation of this two-dimensional structure is defined by the direction of the crystal a and c axes. This structural period of ∼2-6 micrometers and the independence of its orientation on the laser polarization are in sharp contrast with the traditional laser induced periodic surface structure (LIPSS). In the meantime, surface cracks with a feature size of ∼30 nm are observed at the bottom of the valley of the two-dimensional structure and theoretical results show there exists strong electric field enhancement on the cracks under 400 nm femtosecond laser irradiation. In view of these unusual features, we attribute the formation of this two-dimensional structure to the mechanical cracking of the ZnO crystal along its (11-20) and (0001) planes induced by the multiple-cyclic heating due to linear absorption of the femtosecond pulses.

Squared Focal Intensity Distributions for Applications in Laser Material Processing

Tailored intensity profiles within the focal spot of the laser beam offer great potential for a well-defined control of the interaction process between laser radiation and material, and thus for improving the processing results. The present paper discusses a novel refractive beam-shaping element that provides different squared intensity distributions converted from the Gaussian output beam of the utilized femtosecond (fs) laser. Using the examples of surface structuring of stainless-steel on the micro- and nano-scale, the suitability of the beam-shaping element for fs-laser material processing with a conventional f-Theta lens is demonstrated. In this context, it was shown that the experimental structuring results are in good agreement with beam profile measurements and numerical simulations of the beam-shaping unit. In addition, the experimental results reveal the improvement of laser processing in terms of a significantly reduced processing time during surface nano-structuring and the possibility to control the ablation geometry during the fabrication of micro-channels.

Bitmap and vectorial hologram recording by using femtosecond laser pulses

In this paper, we present two approaches for recording a quasi-hologram on the steel surface by femtosecond laser pulses. The recording process is done by rotating the polarization of the laser beam by a half-wave plate or a spatial light modulator (SLM), so we can control the spatial orientation of the formed laser-induced periodic surface structures (LIPSS). Two different approaches are shown, which use vector and bitmap images to record the hologram. For the first time to our knowledge, we managed to record a hologram of a bitmap image by continuously adjusting the laser beam polarization by SLM during scanning. The developed method can substantially improve hologram recording technology by eliminating complex processing procedures, which can lead to increasing the fabrication speed and reducing the cost.

Laser Processing of Hard and Ultra-Hard Materials for Micro-Machining and Surface Engineering Applications

Polycrystalline diamonds, polycrystalline cubic boron nitrides and tungsten carbides are considered difficult to process due to their superior mechanical (hardness, toughness) and wear properties. This paper aims to review the recent progress in the use of lasers to texture hard and ultra-hard materials to a high and reproducible quality. The effect of wavelength, beam type, pulse duration, fluence, and scanning speed is extensively reviewed, and the resulting laser mechanisms, induced damage, surface integrity, and existing challenges discussed. The cutting performance of different textures in real applications is examined, and the key influence of texture size, texture geometry, area ratio, area density, orientation, and solid lubricants is highlighted. Pulsed laser ablation (PLA) is an established method for surface texturing. Defects include melt debris, unwanted allotropic phase transitions, recast layer, porosity, and cracking, leading to non-uniform mechanical properties and surface roughness in fabricated textures. An evaluation of the main laser parameters indicates that shorter pulse durations (ns—fs), fluences greater than the ablation threshold, and optimised multi-pass scanning speeds can deliver sufficient energy to create textures to the required depth and profile with minimal defects. Surface texturing improves the tribological performance of cutting tools in dry conditions, reducing coefficient of friction (COF), cutting forces, wear, machining temperature, and adhesion. It is evident that cutting conditions (feed speed, workpiece material) have a primary role in the performance of textured tools. The identified gaps in laser surface texturing and texture performance are detailed to provide future trends and research directions in the field.

Rewritable and Tunable Laser-Induced Optical Gratings in Phase-Change Material Films

Laser-induced periodic surface structures (LIPSS) can be fabricated in virtually all types of solid materials and show great promise for efficient and scalable production of surface patterns with applications in various fields from photonics to engineering. While the majority of LIPSS manifest as modifications of the surface relief, in special cases, laser impact can also lead to periodic modulation of the material phase state. Here, we report on the fabrication of high-quality periodic structures in the films of phase-change material Ge₂Sb₂Te₅ (GST). Due to considerable contrast of the refractive index of GST in its crystalline and amorphous states, the fabricated structures provide strong spatial modulation of the optical properties, which facilitates their applications. By changing the excitation laser wavelength, we observe the scaling of the grating period as well as transition between formation of different types of LIPSS. We optimize the laser exposure routine to achieve large-scale high-quality phase-change gratings with controllable period and demonstrate their reversible tunability through intermediate amorphization steps. Our results reveal the prospects of fast and rewritable fabrication of high-quality periodic structures for photonics and can serve as a guideline for further development of phase-change material-based optical elements.

Morphological Study of Nanostructures Induced by Direct Femtosecond Laser Ablation on Diamond

High spatial frequency laser induced periodic surface structure (HSFL) morphology induced by femtosecond laser with 230 fs pulse duration, 250 kHz repetition rate at 1030 nm wavelength on CVD diamond surface is investigated and discussed. The spatial modification was characterized and analyzed by Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM) and 2D-Fast Fourier Transform (2D-FFT). We studied the effect of pulse number and laser power on the spatial development of nanostructures, and also deduced the impact of thermal accumulation effect on their morphology. A generalized plasmonic model has been used to follow the optical evolution of the irradiated surface and to determine the periodic value of the nanostructures. We suggest that non-thermal melting and plasmonic excitation are the main processes responsible for the formation of HSFL-type nanostructures.

Formation of Titanium Nitride, Titanium Carbide, and Silicon Carbide Surfaces by High Power Femtosecond Laser Treatment

Coatings based on titanium nitrides, titanium carbides and silicon carbides can optimize the surface properties of titanium or silicon for various applications ranging from biocompatibility to chemical stability and durability. Here, we investigated a high power (100 W) high pulse repetition rate femtosecond laser process (λ=1030 nm, τ=750 fs, f=1 MHz) for the treatment of titanium and silicon in atmospheres of argon, nitrogen, methane, ethene and acetylene. In a nitrogen atmosphere, a homogeneous coating of TiON is formed on titanium. In an ethene/argon atmosphere coatings of TiOC and SiC are formed on Ti and Si, respectively. The process allows a fast surface transformation with a process rate of 0.33 cm²  s^-1 and a high spatial resolution below 0.5 mm with a minimal heat affected zone at the same time. In contrast to low repetition rate femtosecond laser processed samples, the surfaces are more robust against mechanical impact. At the same time, the surfaces reveal a distinct microstructure in comparison to coatings obtained by vapor deposition techniques.

Femtosecond Laser Fabrication of Micro and Nano-Structures on CIGS/ITO Bilayer Films for Thin-Film Solar Cells

Cu(In, Ga)Se₂ (CIGS) thin films have attracted considerable interest as potential photovoltaic solar cells. Moreover, several current studies are focusing on improving their conversion efficiency. This study proposes a method to process micro- and nanostructures onto the surface of CIGS/ITO bilayer films to broaden the field of solar cell application. The bilayer films exhibited optical characteristics different from those of a single-film during processing. Field intensities at different layer positions of the CIGS/ITO bilayer films were analyzed, and different structures were fabricated by varying a set of parameters. Ripples were obtained using a pulse energy of 0.15 μJ and scanning speeds in the range of 0.1-1 mm/s, but after increasing speed to 3-5 mm/s, ripple structures were produced that had a large period of several microns and spatial porous nanostructures. This pattern exhibited low reflectivity. Optimal structures were obtained at a scanning speed of 3.5 mm/s a pulse energy of 0.15 μJ, and a reflectivity lower than 5%. Large areas characterized by micron-sized ripple structures and accompanied by nanoscale porous structures presented high optical performance and efficiency, which can be used to broaden the application of thin film-based solar cells.

Initial Morphology and Feedback Effects on Laser-Induced Periodic Nanostructuring of Thin-Film Metallic Glasses

Surface nanostructuring by femtosecond laser is an efficient way to manipulate surface topography, creating advanced functionalities of irradiated materials. Thin-film metallic glasses obtained by physical vapor deposition exhibit microstructures free from grain boundaries, crystallites and dislocations but also characterized by a nanometric surface roughness. These singular properties make them more resilient to other metals to form laser-induced nanopatterns. Here we investigate the morphological response of Zr65Cu35 alloys under ultrafast irradiation with multipulse feedback. We experimentally demonstrate that the initial columnar microstructure affects the surface topography evolution and conditions the required energy dose to reach desired structures in the nanoscale domain. Double pulses femtosecond laser irradiation is also shown to be an efficient strategy to force materials to form uniform nanostructures even when their thermomechanical properties have a poor predisposition to generate them.

Polystyrene Thin Films Nanostructuring by UV Femtosecond Laser Beam: From One Spot to Large Surface

In this work, direct irradiation by a Ti:Sapphire (100 fs) femtosecond laser beam at third harmonic (266 nm), with a moderate repetition rate (50 and 1000 Hz), was used to create regular periodic nanostructures upon polystyrene (PS) thin films. Typical Low Spatial Frequency LIPSSs (LSFLs) were obtained for 50 Hz, as well as for 1 kHz, in cases of one spot zone, and also using a line scanning irradiation. Laser beam fluence, repetition rate, number of pulses (or irradiation time), and scan velocity were optimized to lead to the formation of various periodic nanostructures. It was found that the surface morphology of PS strongly depends on the accumulation of a high number of pulses (10³ to 10⁷ pulses) at low energy (1 to 20 µJ/pulse). Additionally, heating the substrate from room temperature up to 97 °C during the laser irradiation modified the ripples’ morphology, particularly their amplitude enhancement from 12 nm (RT) to 20 nm. Scanning electron microscopy and atomic force microscopy were used to image the morphological features of the surface structures. Laser-beam scanning at a chosen speed allowed for the generation of well-resolved ripples on the polymer film and homogeneity over a large area.

Laser Nanostructuring for Diffraction Grating Based Surface Plasmon-Resonance Sensors

The surface plasmon resonance properties of highly regular laser-induced periodic surface structures (HR-LIPSSs) on Si, functionalized with Au nanoparticles (NPs), were investigated. In particular, the spectral dependencies of polarized light reflectance at various angles of incidence were measured and discussed. It is found that the deposition of Au NPs on such periodically textured substrates leads to significant enhancement of the plasmon resonance properties, compared to that measured on planar ones. This effect can be used to improve the efficiency of localized-plasmon-resonance-based sensors.

Femtosecond Laser-Induced Periodic Surface Structures on 2D Ti-Fe Multilayer Condensates

2D Ti-Fe multilayer preparation has been attracting increased interest due to its ability to form intermetallic compounds between metallic titanium and metallic iron thin layers. In particular, the TiFe compound can absorb hydrogen gas at room temperature. We applied femtosecond laser pulses to heat Ti-Fe multilayer structures to promote the appearance of intermetallic compounds and generate surface nanostructuring. The surface pattern, known as Laser Induced Periodic Surface Structures (LIPSS), can accelerate the kinetics of chemical interaction between solid TiFe and gaseous hydrogen. The formation of LIPSS on Ti-Fe multilayered thin films were investigated using of scanning electron microscopy, photo-electron spectroscopy and X-ray diffraction. To explore the thermal response of the multiple layered structure and the mechanisms leading to surface patterning after irradiating the compound with single laser pulses, theoretical simulations were conducted to interpret the experimental observations.

Microfabrication and Surface Functionalization of Soda Lime Glass through Direct Laser Interference Patterning

All-purpose glasses are common in many established and emerging industries, such as microelectronics, photovoltaics, optical components, and biomedical devices due to their outstanding combination of mechanical, optical, thermal, and chemical properties. Surface functionalization through nano/micropatterning can further enhance glasses’ surface properties, expanding their applicability into new fields. Although laser structuring methods have been successfully employed on many absorbing materials, the processability of transparent materials with visible laser radiation has not been intensively studied, especially for producing structures smaller than 10 µm. Here, interference-based optical setups are used to directly pattern soda lime substrates through non-lineal absorption with ps-pulsed laser radiation in the visible spectrum. Line- and dot-like patterns are fabricated with spatial periods between 2.3 and 9.0 µm and aspect ratios up to 0.29. Furthermore, laser-induced periodic surface structures (LIPSS) with a feature size of approximately 300 nm are visible within these microstructures. The textured surfaces show significantly modified properties. Namely, the treated surfaces have an increased hydrophilic behavior, even reaching a super-hydrophilic state for some cases. In addition, the micropatterns act as relief diffraction gratings, which split incident light into diffraction modes. The process parameters were optimized to produce high-quality textures with super-hydrophilic properties and diffraction efficiencies above 30%.