Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass

Direct Laser Writing of Silica Nanoparticle Nanocomposites: Probing Mechanical Reinforcement and Understanding Structural Color from Design Parameters

Nanocomposite materials have been thoroughly exploited in additive manufacturing, as a means to alter physical, chemical, and optical properties of resulting structures. Herein, nanocomposite materials suitable for direct laser writing (DLW) by two-photon polymerization are presented. These materials, comprising silica nanoparticles, bring significant added value to the technology through physical reinforcement and controllable photonic properties. Incorporation into acrylate photoresists, via a one-step fabrication process, enables the formation of complex structures with large overhangs. The inclusion of 150 nm silica nanoparticles in DLW photoresists at high concentrations, allows for the fabrication of composite microstructures that show reflected color, a product of the relative contributions from the quasi-ordering and random scattering. Using common DLW design parameters, such as slicing distance and structure dimension, a wide gamut of structural color, in solution, using a set concentration of nanoparticles is demonstrated. Numerical modeling is employed to predict the reflected wavelength of the pixel arrays, across the visible spectrum, and this information is used to encode reflected colors into different pixel arrays.

Printing 3D Metallic Structures in Porous Matrix

The fabrication of metallic micro/nanostructures has great potential for advancing optoelectronic microdevices. Over the past decade, femtosecond laser direct writing (FsLDW) technology has played a crucial role in driving progress in this field. In this study, silica gel glass is used as a supporting medium, and FsLDW is employed to reduce gold and palladium ions using 7-Diethylamino-3-thenoylcoumarin (DETC) as a two-photon sensitizer, enabling the printing of conductive multilayered and 3D metallic structures. How the pore size of the silica gel glass affects the electrical conductivity of printed metal wires is systematically examined. This 3D printing method is versatile and offers expanded opportunities for applying metallic micro/nanostructures in optoelectronic devices.

Nanoparticle Assembly: From Self-Organization to Controlled Micropatterning for Enhanced Functionalities

Nanoparticles form long-range micropatterns via self-assembly or directed self-assembly with superior mechanical, electrical, optical, magnetic, chemical, and other functional properties for broad applications, such as structural supports, thermal exchangers, optoelectronics, microelectronics, and robotics. The precisely defined particle assembly at the nanoscale with simultaneously scalable patterning at the microscale is indispensable for enabling functionality and improving the performance of devices. This article provides a comprehensive review of nanoparticle assembly formed primarily via the balance of forces at the nanoscale (e.g., van der Waals, colloidal, capillary, convection, and chemical forces) and nanoparticle-template interactions (e.g., physical confinement, chemical functionalization, additive layer-upon-layer). The review commences with a general overview of nanoparticle self-assembly, with the state-of-the-art literature review and motivation. It subsequently reviews the recent progress in nanoparticle assembly without the presence of surface templates. Manufacturing techniques for surface template fabrication and their influence on nanoparticle assembly efficiency and effectiveness are then explored. The primary focus is the spatial organization and orientational preference of nanoparticles on non-templated and pre-templated surfaces in a controlled manner. Moreover, the article discusses broad applications of micropatterned surfaces, encompassing various fields. Finally, the review concludes with a summary of manufacturing methods, their limitations, and future trends in nanoparticle assembly.

Universal selective transfer printing via micro-vacuum force

Transfer printing of inorganic thin-film semiconductors has attracted considerable attention to realize high-performance soft electronics on unusual substrates. However, conventional transfer technologies including elastomeric transfer printing, laser-assisted transfer, and electrostatic transfer still have challenging issues such as stamp reusability, additional adhesives, and device damage. Here, a micro-vacuum assisted selective transfer is reported to assemble micro-sized inorganic semiconductors onto unconventional substrates. 20 μm-sized micro-hole arrays are formed via laser-induced etching technology on a glass substrate. The vacuum controllable module, consisting of a laser-drilled glass and hard-polydimethylsiloxane micro-channels, enables selective modulation of micro-vacuum suction force on microchip arrays. Ultrahigh adhesion switchability of 3.364 × 106, accomplished by pressure control during the micro-vacuum transfer procedure, facilitates the pick-up and release of thin-film semiconductors without additional adhesives and chip damage. Heterogeneous integration of III-V materials and silicon is demonstrated by assembling microchips with diverse shapes and sizes from different mother wafers on the same plane. Multiple selective transfers are implemented by independent pressure control of two separate vacuum channels with a high transfer yield of 98.06%. Finally, flexible micro light-emitting diodes and transistors with uniform electrical/optical properties are fabricated via micro-vacuum assisted selective transfer.

A monolithic microfluidic probe for ambient mass spectrometry imaging of biological tissues

Ambient mass spectrometry imaging (MSI) is a powerful technique that allows for the simultaneous mapping of hundreds of molecules in biological samples under atmospheric conditions, requiring minimal sample preparation. We have developed nanospray desorption electrospray ionization (nano-DESI), a liquid extraction-based ambient ionization technique, which has proven to be sensitive and capable of achieving high spatial resolution. We have previously described an integrated microfluidic probe, which simplifies the nano-DESI setup, but is quite difficult to fabricate. Herein, we introduce a facile and scalable strategy for fabricating microfluidic devices for nano-DESI MSI applications. Our approach involves the use of selective laser-assisted etching (SLE) of fused silica to create a monolithic microfluidic probe (SLE-MFP). Unlike the traditional photolithography-based fabrication, SLE eliminates the need for the wafer bonding process and allows for automated, scalable fabrication of the probe. The chamfered design of the sampling port and ESI emitter significantly reduces the amount of polishing required to fine-tune the probe thereby streamlining and simplifying the fabrication process. We have also examined the performance of a V-shaped probe, in which only the sampling port is fabricated using SLE technology. The V-shaped design of the probe is easy to fabricate and provides an opportunity to independently optimize the size and shape of the electrospray emitter. We have evaluated the performance of SLE-MFP by imaging mouse tissue sections. Our results demonstrate that SLE technology enables the fabrication of robust monolithic microfluidic probes for MSI experiments. This development expands the capabilities of nano-DESI MSI and makes the technique more accessible to the broader scientific community.

Simultaneous detection of dopamine and ascorbic acid by using a thread-based microfluidic device and multiple pulse amperometry

This study presents a novel approach for the simultaneous detection of ascorbic acid (AA) and dopamine (DA) using an affordable and user-friendly microfluidic device. Microfluidic devices, when combined with electrochemical detectors like screen-printed electrodes (SPEs), offer numerous advantages such as portability, high sample throughput, and low reagent consumption. In this study, a 3D-printed microfluidic device called a μTED was developed, utilizing textile threads as microfluidic channels and an unmodified SPE as the amperometric detector. The method employed multiple pulse amperometry (MPA) with carefully selected potential values (+0.65 V and -0.10 V). The reduction current signals generated by dopamine o-quinone were used to calculate a correction factor for the oxidation signals of ascorbic acid, enabling simultaneous quantification. The developed microfluidic device ensured a stable flow rate of the carrier solution at 1.19 μL s-1, minimizing the consumption of samples and reagents (injection volume of 2.0 μL). Under the optimized experimental conditions, a linear range from 50 to 900 μmol L-1 was achieved for both DA and AA. The obtained sensitivities were 2.24 μA L mmol-1 for AA and 5.09 μA L mmol-1 for DA, with corresponding limits of detection (LOD) of 2.60 μmol L-1 and 1.54 μmol L-1, respectively. To confirm the effectiveness of the proposed method, it was successfully applied to analyze AA and DA in a commercial blood serum sample spiked at three different concentration levels, with a medium recovery rate of 70%. Furthermore, the MPA technique demonstrated its simplicity by enabling the simultaneous determination of AA and DA without the need for prior separation steps or the use of chemically modified electrodes.

A review on inertial microfluidic fabrication methods

In recent decades, there has been significant interest in inertial microfluidics due to its high throughput, ease of fabrication, and no need for external forces. The focusing efficiency of inertial microfluidic systems relies entirely on the geometrical features of microchannels because hydrodynamic forces (inertial lift forces and Dean drag forces) are the main driving forces in inertial microfluidic devices. In the past few years, novel microchannel structures have been propounded to improve particle manipulation efficiency. However, the fabrication of these unconventional structures has remained a serious challenge. Although researchers have pushed forward the frontiers of microfabrication technologies, the fabrication techniques employed for inertial microfluidics have not been discussed comprehensively. This review introduces the microfabrication approaches used for creating inertial microchannels, including photolithography, xurography, laser cutting, micromachining, microwire technique, etching, hot embossing, 3D printing, and injection molding. The advantages and disadvantages of these methods have also been discussed. Then, the techniques are reviewed regarding resolution, structures, cost, and materials. This review provides a thorough insight into the manufacturing methods of inertial microchannels, which could be helpful for future studies to improve the harvesting yield and resolution by choosing a proper fabrication technique.

Polarisation-independent ultrafast laser selective etching processing in fused silica

In fused silica, ultrafast laser assisted etching enables high chemical etching rates (>300 μm h^-1) by setting a light polarisation linear and perpendicular to the beam writing direction. However, for many non-planar surfaces and 3D structures, dynamic polarisation control is difficult or not yet possible to implement. In this contribution, we identify a laser inscription regime in which high etching rates are accomplished independently of the light polarisation. In this regime (<15 pulses per μm), we measure etching rates ∼300 μm h^-1 (4 hours in NaOH) including femtosecond-pulse energies corresponding to type II modifications. Few pulse inscriptions show a low degree of anisotropy as compared to higher number of pulses, thus enabling the polarisation insensitivity whose mechanisms are discussed. To demonstrate the capabilities of the processing, we fabricate curved and square-wave microchannels together with a complex 3D geometrical structure (stellated octahedron) containing an inter-plane arrangement with challenging angles (45°), which are difficult to achieve even employing dynamic polarisation control.

High-speed microgroove processing of glass by expanding the high-temperature region formed by transient and selective laser absorption

Microgroove processing of glass is important in many fields, however, it is difficult to achieve the processing with a high speed. In this study, we developed a novel method for the high-speed microgroove processing of glass using two types of lasers, namely a femtosecond laser and a near-infrared continuous-wave (CW) laser. A single femtosecond laser pulse was initially focused on the surface of the material, enabling the area to absorb the CW laser, which is otherwise not absorbed by the glass. The CW laser was then scanned along the material surface, expanding the machined hole to form a groove. The resulting grooves, with a width of approximately 10 µm and depths of up to 350 µm, can be machined with a scanning speed of up to 200 mm/s, 25 times faster than conventional methods. This method exhibits the potential to improve the industrial application of fast laser microprocessing of glass.

A 3D Miniaturized Glass Magnetic-Active Centrifugal Micropump Fabricated by SLE Process and Laser Welding

A miniaturized pump to manipulate liquid flow in microchannels is the key component of microfluidic devices. Many researchers have demonstrated active microfluidic pumps, but most of them still required additional large peripherals to operate their micropumps. In addition, those micropumps were made of polymer materials so that their application may be limited to a variety of fields that require harsh conditions at high pressures and temperatures or organic solvents and acid/base. In this work, we present a 3D miniaturized magnetic-driven glass centrifugal pump for microfluidic devices. The pump consists of a volute structure and a 3D impeller integrated with two magnet disks of Φ1 mm. The 3D pump structure was 13 mm × 10.5 mm × 3 mm, and it was monolithically fabricated in a fused silica sheet by selective laser-induced etching (SLE) technology using a femtosecond laser. The pump operation requires only one motor rotating two magnets. It was Φ42 mm × 54 mm and powered by a battery. To align the shaft of the motor to the center of the 3D glass pump chip, a housing containing the motor and the chip was fabricated, and the overall size of the proposed micropump device was 95 mm × 70 mm × 75 mm. Compared with other miniaturized pumps, ours was more compact and portable. The output pressure of the fabricated micropump was between 215 Pa and 3104 Pa, and the volumetric flow rate range was 0.55 mL/min and 7.88 mL/min. The relationship between the motor RPM and the impeller RPM was analyzed, and the flow rate was able to be controlled by the RPM. With its portability, the proposed pump can be applied to produce an integrated and portable microfluidic device for point-of-care analysis.

Live single cell imaging assays in glass microwells produced by laser-induced deep etching

Miniaturization of cell culture substrates enables controlled analysis of living cells in confined micro-scale environments. This is particularly suitable for imaging individual cells over time, as they can be monitored without escaping the imaging field-of-view (FoV). Glass materials are ideal for most microscopy applications. However, with current methods used in life sciences, glass microfabrication is limited in terms of either freedom of design, quality, or throughput. In this work, we introduce laser-induced deep etching (LIDE) as a method for producing glass microwell arrays for live single cell imaging assays. We demonstrate novel microwell arrays with deep, high-aspect ratio wells that have rounded, dimpled or flat bottom profiles in either single-layer or double-layer glass chips. The microwells are evaluated for microscopy-based analysis of long-term cell culture, clonal expansion, laterally organized cell seeding, subcellular mechanics during migration and immune cell cytotoxicity assays of both adherent and suspension cells. It is shown that all types of microwells can support viable cell cultures and imaging with single cell resolution, and we highlight specific benefits of each microwell design for different applications. We believe that high-quality glass microwell arrays enabled by LIDE provide a great option for high-content and high-resolution imaging-based live cell assays with a broad range of potential applications within life sciences.

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV irradiation at ~280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis.

Poly-Alanine-ε-Caprolacton-Methacrylate as Scaffold Material with Tuneable Biomechanical Properties for Osteochondral Implants

An aging population and injury-related damage of the bone substance lead to an increasing need of innovative materials for the regeneration of osteochondral defects. Biodegradable polymers form the basis for suitable artificial implants intended for bone replacement or bone augmentation. The great advantage of these structures is the site-specific implant design, which leads to a considerable improvement in patient outcomes and significantly reduced post-operative regeneration times. Thus, biomechanical and biochemical parameters as well as the rate of degradation can be set by the selection of the polymer system and the processing technology. Within this study, we developed a polymer platform based on the amino acid Alanine and ε-Caprolacton for use as raw material for osteochondral implants. The biomechanical and degradation properties of these Poly-(Alanine-co-ε-Caprolacton)-Methacrylate (ACM) copolymers can be adjusted by changing the ratio of the monomers. Fabrication of artificial structures for musculo-skeletal tissue engineering was done by Two-Photon-Polymerization (2PP), which represents an innovative technique for generating defined scaffolds with tailor-made mechanical and structural properties. Here we show the synthesis, physicochemical characterization, as well as first results for structuring ACM using 2PP technology. The data demonstrate the high potential of ACM copolymers as precursors for the fabrication of biomimetic implants for bone-cartilage reconstruction.

Materials and methods for droplet microfluidic device fabrication

Since the first reports two decades ago, droplet-based systems have emerged as a compelling tool for microbiological and (bio)chemical science, with droplet flow providing multiple advantages over standard single-phase microfluidics such as removal of Taylor dispersion, enhanced mixing, isolation of droplet contents from surfaces, and the ability to contain and address individual cells or biomolecules. Typically, a droplet microfluidic device is designed to produce droplets with well-defined sizes and compositions that flow through the device without interacting with channel walls. Successful droplet flow is fundamentally dependent on the microfluidic device - not only its geometry but moreover how the channel surfaces interact with the fluids. Here we summarise the materials and fabrication techniques required to make microfluidic devices that deliver controlled uniform droplet flow, looking not just at physical fabrication methods, but moreover how to select and modify surfaces to yield the required surface/fluid interactions. We describe the various materials, surface modification techniques, and channel geometry approaches that can be used, and give examples of the decision process when determining which material or method to use by describing the design process for five different devices with applications ranging from field-deployable chemical analysers to water-in-water droplet creation. Finally we consider how droplet microfluidic device fabrication is changing and will change in the future, and what challenges remain to be addressed in the field.

Time-Resolved Imaging of Femtosecond Laser-Induced Plasma Expansion in a Nitrogen Microjet

We report on the study of ultrafast laser-induced plasma expansion dynamics in a gas microjet. To this purpose, we focused femtosecond laser pulses on a nitrogen jet produced through a homemade De Laval micronozzle. The laser excitation led to plasma generation with a characteristic spectral line emission at 391 nm. By following the emitted signal with a detection system based on an intensified charge-coupled device (ICCD) we captured the two-dimensional spatial evolution of the photo-excited nitrogen ions with a temporal resolution on the nanosecond time scale. We fabricated the micronozzle on a fused silica substrate by femtosecond laser micromachining. This technique enabled high accuracy and three-dimensional capabilities, thus, providing an ideal platform for developing glass-based microfluidic structures for application to plasma physics and ultrafast spectroscopy.

High-Throughput Continuous-Flow Separation in a Micro Free-Flow Electrophoresis Glass Chip Based on Laser Microfabrication

Micro free-flow electrophoresis (μFFE) provides a rapid and straightforward route for the high-performance online separation and purification of targeted liquid samples in a mild manner. However, the facile fabrication of a μFFE device with high throughput and high stability remains a challenge due to the technical barriers of electrode integration and structural design for the removal of bubbles for conventional methods. To address this, the design and fabrication of a high-throughput μFFE chip are proposed using laser-assisted chemical etching of glass followed by electrode integration and subsequent low-temperature bonding. The careful design of the height ratio of the separation chamber and electrode channels combined with a high flow rate of buffer solution allows the efficient removal of electrolysis-generated bubbles along the deep electrode channels during continuous-flow separation. The introduction of microchannel arrays further enhances the stability of on-chip high-throughput separation. As a proof-of-concept, high-performance purification of fluorescein sodium solution with a separation purity of ~97.9% at a voltage of 250 V from the mixture sample solution of fluorescein sodium and rhodamine 6G solution is demonstrated.

4D Printing of Liquid Crystals: What's Right for Me?

Recent years have seen major advances in the developments of both additive manufacturing concepts and responsive materials. When combined as 4D printing, the process can lead to functional materials and devices for use in health, energy generation, sensing, and soft robots. Among responsive materials, liquid crystals, which can deliver programmed, reversible, rapid responses in both air and underwater, are a prime contender for additive manufacturing, given their ease of use and adaptability to many different applications. In this paper, selected works are compared and analyzed to come to a didactical overview of the liquid crystal-additive manufacturing junction. Reading from front to back gives the reader a comprehensive understanding of the options and challenges in the field, while researchers already experienced in either liquid crystals or additive manufacturing are encouraged to scan through the text to see how they can incorporate additive manufacturing or liquid crystals into their own work. The educational text is closed with proposals for future research in this crossover field.

Two-step hybrid process of movable part inside glass substrate using ultrafast laser

We demonstrate a two-step hybrid process for fabricating movable parts inside glass substrate using the selective laser-induced etching (SLE) process that is consisted of laser-direct writing and wet chemical etching. To obtain an influence by the optical characteristics of a glass substrate when fabricating a 3D microstructure using the SLE, we analyzed the relationship of their dimensions between the designed and the fabricated devices. Two 3D microfluidic devices are designed and fabricated on glass substrates as the demonstrations of the hybrid process: a 3D microfluidic valve device with a movable plug and a 3D microfluidic mixer with a rotatable impeller and multilayer microchannels. The valving plug and the impeller of each device are successfully moved and rotated. The smallest structure is a pillar of the impeller device, and its size is 29 μm (diameter) × 277 μm (height). We expect this study to be extended to potential applications in 3D glass microfabrication and microfluidic systems.

Chemical etching of fused silica after modification with two-pulse bursts of femtosecond laser

Bursts of femtosecond laser pulses were used to record internal modifications inside fused silica for selective chemical etching. Two-pulse bursts with a variable energy ratio between those pulses at a fixed inter-pulse duration of 14.5 ns were applied for the first time. The selective chemical etching rate of the laser-modified material with the burst of two pulses was compared to the single-pulse regime when etching in HF and KOH etchants. The advantage of the burst-mode processing was demonstrated when etching was performed in the KOH solution. More regular nanogratings were formed, and the etching initiation was more stable when burst pulses were applied for fused silica modification. The vertical planar structures were obtained using the two-pulse bursts with an energy ratio of 1:2, increasing the etching rate by more than 35% compared to the single-pulse processing. The highest ever reported selectivity of 1:2000 was demonstrated by introducing the two-pulse burst mode.

Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications

Laser has been demonstrated to be a mature and versatile tool that presents great flexibility and applicability for the precision engineering of a wide range of materials over other established micromachining techniques. Past decades have witnessed its rapid development and extensive applications ranging from scientific researches to industrial manufacturing. Transparent hard materials remain several major technical challenges for conventional laser processing techniques due to their high hardness, great brittleness, and low optical absorption. A variety of hybrid laser processing technologies, such as laser-induced plasma-assisted ablation, laser-induced backside wet etching, and etching assisted laser micromachining, have been developed to overcome these barriers by introducing additional medium assistance or combining different process steps. This article reviews the basic principles and characteristics of these hybrid technologies. How these technologies are used to precisely process transparent hard materials and their recent advancements are introduced. These hybrid technologies show remarkable benefits in terms of efficiency, accuracy, and quality for the fabrication of microstructures and functional devices on the surface of or inside the transparent hard substrates, thus enabling widespread applications in the fields of microelectronics, bio-medicine, photonics, and microfluidics. A summary and outlook of the hybrid laser technologies are also highlighted.

Ultrashort pulsed laser backside ablation of fused silica

We report on the fabrication of rectangular microchannels with vertical sidewalls in fused silica by laser backside ablation. A 515 nm femtosecond laser is focused by an objective with a NA of 0.5 through the sample on the glass/air interface, allowing processing from the backside into the bulk material. Experimental investigations reveal a logarithmically increasing depth of the channels with an increasing number of scans, while keeping the focal position fixed. A certain number of scans has to be applied to generate rectangular shaped channels while their depth can be controlled by the applied fluence from 2.64 µm to 13.46 µm and a corresponding ablation roughness R_a between 0.20 µm and 0.33 µm. The channel width can be set directly via the number of parallel ablated lines demonstrated in a range from 10 µm to 50 µm. By adjusting the focal position after each scan the channel depth can be extended to 49.77 µm while maintaining a rectangular channel geometry. Finally, concentric rings are ablated to demonstrate the flexibility of the direct writing process.

Ionic Carbazole-Based Water-Soluble Two-Photon Photoinitiator and the Fabrication of Biocompatible 3D Hydrogel Scaffold

Two-photon polymerization of a three-dimensional (3D) hydrogel structure has been widely applied in biological tissue engineering. For improving the biocompatibility of hydrogel structures, a new kind of ionic carbazole water-soluble photoinitiator was prepared to realize the fabrication of a 3D hydrogel structure in aqueous phase. 3,6-Bis[2-(1-methyl-pyridinium)vinyl]-9-methyl-carbazole diiodide (BMVMC) and cucurbit[7]uril (CB7) have been employed to generate a complex with better water solubility by host-guest interactions. The binding ratio of the complex was demonstrated to be 1:1 through the characterization of isothermal titration calorimetry (ITC). The two-photon absorption (TPA) cross section of the complex increases to 2500 GM compared with the 750 GM of the BMVMC molecule. Then, an aqueous-phase photoresist was obtained using the CB7/BMVMC complex as the photoinitiator and poly(ethylene glycol) diacrylate (PEGda) as the hydrogel monomer. Two-photon fabrication capability in aqueous phase has been studied using the as-prepared photoresist. A low laser threshold of 3.7 mW as well as a high resolution of 180 nm are achieved. Benefiting from the fluorescence properties of the photoinitiator, we can achieve the confocal fluorescence images without any assistance of fluorescent probes. Subsequently, a 3D engineered hydrogel scaffold microstructure was fabricated by the two-photon polymerization technology, whose biocompatibility was demonstrated by culturing the structure with living cells of L929. The BMVMC-CB7 complex and the as-prepared photoresist are demonstrated to have good biocompatibility, which is prospective for further application in tissue engineering.

Magnetically driven rotary microfilter fabricated by two-photon polymerization for multimode filtering of particles

In this Letter, a magnetically driven rotary microfilter that enables switching the modes of filtering and passing is fabricated in microfluidic devices via two-photon polymerization using a femtosecond laser for selective filtering of particles. The high-quality integration of a microfilter is ensured by accurately formulating the magnetic photoresist and optimizing the processing parameters. By changing the direction of the external magnetic field, the fabricated microfilter can be remotely manipulated to rotate by desired angles, thereby achieving the "filtering" or "passing" mode on demand. Taking advantage of this property, the magnetically rotary microfilter realizes multi-mode filtering functions such as capturing 8 µm particles/passing the 2.5 µm particles and passing both particles. More importantly, the responsive characteristic increases the reusability of the microchip. The lab-on-chip devices integrated with remotely rotary microfilters by the femtosecond laser two-photon polymerization with the functional photoresist will offer extensive applications in chemical and biological studies.

Direct Laser Interference Patterning of Diffraction Gratings in Safrofilcon-A Hydrogel: Fabrication and Hydration Assessment

Refractive index modification by laser micro-structuration of diffractive optical devices in ophthalmic polymers has recently been applied for refractive correction in the fields of optics and ophthalmology. In this work, Safrofilcon-A hydrogel, used as soft contact lenses, was processed by direct laser interference patterning (DLIP) to fabricate linear periodic patterns on the surface of the samples. Periodic modulation of the surface was attained under two-beam interference by using a Q-switched laser source with emission at 263 nm and 4 ns pulse duration. Features of processed areas were studied as a function of both the interference spatial period and the laser fluence. Optical confocal microscopy used to evaluate the topography of the processed samples showed that both structured height and surface roughness increased with laser fluence. Static water contact angle (WCA) measurements were carried out with deionized water droplets on the structured areas to evaluate the hydration properties of DLIP structures. It was observed that the laser structured areas induced a delay in the hydration process. Finally, microstructural changes induced in the structured areas were assessed by confocal micro-Raman spectroscopy showing that at low laser fluences the polymer structure remained almost unaltered. In addition, Raman spectra of hydrated samples recovered the original shape of areas structured at low laser fluence.

Hydrodynamic particle focusing enhanced by femtosecond laser deep grooving at low Reynolds numbers

Microfluidic focusing of particles (both synthetic and biological), which enables precise control over the positions of particles in a tightly focused stream, is a prerequisite step for the downstream processing, such as detection, trapping and separation. In this study, we propose a novel hydrodynamic focusing method by taking advantage of open v-shaped microstructures on a glass substrate engraved by femtosecond pulse (fs) laser. The fs laser engraved microstructures were capable of focusing polystyrene particles and live cells in rectangular microchannels at relatively low Reynolds numbers (Re). Numerical simulations were performed to explain the mechanisms of particle focusing and experiments were carried out to investigate the effects of groove depth, groove number and flow rate on the performance of the groove-embedded microchannel for particle focusing. We found out that 10-µm polystyrene particles are directed toward the channel center under the effects of the groove-induced secondary flows in low-Re flows, e.g. Re < 1. Moreover, we achieved continuous focusing of live cells with different sizes ranging from 10 to 15 µm, i.e. human T-cell lymphoma Jurkat cells, rat adrenal pheochromocytoma PC12 cells and dog kidney MDCK cells. The glass grooves fabricated by fs laser are expected to be integrated with on-chip detection components, such as contact imaging and fluorescence lifetime-resolved imaging, for various biological and biomedical applications, where particle focusing at a relatively low flow rate is desirable.

Selective etching of 10 MHz repetition rate fs-laser inscribed tracks in YAG

We investigated fs-laser structuring of YAG crystals at high writing velocities up to 100 mm/s using a commercial 10 MHz fs-laser system supplied by Coherent Inc. and selective etching of these structures for fabrication of ultrahigh aspect ratio microchannels. Usage of a diluted acid mixture of 22% H3PO4 and 24% H2SO4 accelerated the etching process significantly to an etching parameter D of 11.2 μm2/s, which is three times higher than previously reported. Additionally, the selectivity of the etching process was increased by an order of magnitude.

Hybrid LPG-FBG Based High-Resolution Micro Bending Strain Sensor

Sensitivity and reliability are essential factors for the practical implementation of a wearable sensor. This study explores the possibility of using a hybrid high-resolution Bragg grating sensor for achieving a fast response to dynamic, continuous motion and Bragg signal pattern monitoring measurement. The wavelength shift pattern for real-time monitoring in picometer units was derived by using femtosecond laser Bragg grating processing on an optical wave path with long-period grating. The possibility of measuring the demodulation system's Bragg signal pattern on the reflection spectrum of the femtosecond laser precision Bragg process and the long-period grating was confirmed. By demonstrating a practical method of wearing the sensor, the application of wearables was also explored. It is possible to present the applicability of sophisticated micro transformation measurement applications in picometer units.

Optical Fiber Sensors by Direct Laser Processing: A Review

The consolidation of laser micro/nano processing technologies has led to a continuous increase in the complexity of optical fiber sensors. This new avenue offers novel possibilities for advanced sensing in a wide set of application sectors and, especially in the industrial and medical fields. In this review, the most important transducing structures carried out by laser processing in optical fiber are shown. The work covers different types of fiber Bragg gratings with an emphasis in the direct-write technique and their most interesting inscription configurations. Along with gratings, cladding waveguide structures in optical fibers have reached notable importance in the development of new optical fiber transducers. That is why a detailed study is made of the different laser inscription configurations that can be adopted, as well as their current applications. Microcavities manufactured in optical fibers can be used as both optical transducer and hybrid structure to reach advanced soft-matter optical sensing approaches based on optofluidic concepts. These in-fiber cavities manufactured by femtosecond laser irradiation followed by chemical etching are promising tools for biophotonic devices. Finally, the enhanced Rayleigh backscattering fibers by femtosecond laser dots inscription are also discussed, as a consequence of the new sensing possibilities they enable.

Monolithic 3D micromixer with an impeller for glass microfluidic systems

The performance of micromixers, namely their mixing efficiency and throughput, is a critical component in increasing the overall efficiency of microfluidic systems (e.g., lab-on-a-chip and μ-TAS). Most previously reported high-performance micromixers use active elements with some external power to induce turbulence, or contain long and complex fluidic channels with obstacles to increase diffusion. In this paper, we introduce a new type of 3D impeller micromixer built within a single fused silica substrate. The proposed device is composed of microchannels with three inlets and a tank, with a mixing impeller passively rotated by axial flow. The passive micromixer is directly fabricated inside a glass plate using a selective laser-induced etching technique. The mixing tank, with its rotating shaft and 3D pitched blade impeller, exists within a micro-cavity with a volume of only 0.28 mm3. A mixing efficiency of 99% is achieved in mixing experiments involving three dye colours over flow rates ranging from 1.5-30 mL min-1, with the same flow rates also applied to a sodium hydroxide-based bromothymol blue indicator and a hydrochloric acid chemical solution. To verify the reliable performance of the proposed device, we compare the mixing index with a general self-circulation-type chamber mixer to demonstrate the improved mixing efficiency achieved by rotating the impeller. No cracking or breakage of the device is observed under high inner pressures or when the maximum flow rate is applied to the mixer. The proposed microfluidic system based on a compact built-in 3D micromixer with an impeller opens the door to robust, highly efficient, and high-throughput glass-based platforms for micro-centrifuges, cell sorters, micro-turbines, and micro-pumps.

Direct Laser Writing of Four-Dimensional Structural Color Microactuators Using a Photonic Photoresist

With the advent of direct laser writing using two-photon polymerization, the generation of high-resolution three-dimensional microstructures has increased dramatically. However, the development of stimuli-responsive photoresists to create four-dimensional (4D) microstructures remains a challenge. Herein, we present a supramolecular cholesteric liquid crystalline photonic photoresist for the fabrication of 4D photonic microactuators, such as pillars, flowers, and butterflies, with submicron resolution. These micron-sized features display structural color and shape changes triggered by a variation of humidity or temperature. These findings serve as a roadmap for the design and creation of high-resolution 4D photonic microactuators.

Functionalized multiscale visual models to unravel flow and transport physics in porous structures

The fluid flow, species transport, and chemical reactions in geological formations are the chief mechanisms in engineering the exploitation of fossil fuels and geothermal energy, the geological storage of carbon dioxide (CO₂), and the disposal of hazardous materials. Porous rock is characterized by a wide surface area, where the physicochemical fluid-solid interactions dominate the multiphase flow behavior. A variety of visual models with differences in dimensions, patterns, surface properties, and fabrication techniques have been widely utilized to simulate and directly visualize such interactions in porous media. This review discusses the six categories of visual models used in geological flow applications, including packed beds, Hele-Shaw cells, synthesized microchips (also known as microfluidic chips or micromodels), geomaterial-dominated microchips, three-dimensional (3D) microchips, and nanofluidics. For each category, critical technical points (such as surface chemistry and geometry) and practical applications are summarized. Finally, we discuss opportunities and provide a framework for the development of custom-built visual models.

Improvement of Etching Anisotropy in Fused Silica by Double-Pulse Fabrication

Femtosecond laser-induced selective etching (FLISE) is a promising technology for fabrication of a wide range of optical, mechanical and microfluidic devices. Various etching conditions, together with significant process optimisations, have already been demonstrated. However, the FLISE technology still faces severe limitations for a wide range of applications due to limited processing speed and polarization-dependent etching. In this article, we report our novel results on the double-pulse processing approach on the improvement of chemical etching anisotropy and >30% faster processing speed in fused silica. The effects of pulse delay and pulse duration were investigated for further understanding of the relations between nanograting formation and etching. The internal sub-surface modifications were recorded with double cross-polarised pulses of a femtosecond laser, and a new nanograting morphology (grid-like) was demonstrated by precisely adjusting the processing parameters in a narrow processing window. It was suggested that this grid-like morphology impacts the etching anisotropy, which could be improved by varying the delay between two orthogonally polarized laser pulses.

Mass production of thin-walled hollow optical fibers enables disposable optofluidic laser immunosensors

Disposable biosensors are of great importance in disease diagnosis due to their inherent merits of no cross-contamination and ease of use. Optofluidic laser (OFL) sensors are a new category of sensitive biosensors; however, it is challenging to cost-effectively mass-produce them to achieve disposability. Here, we report a disposable optofluidic laser immunosensor based on thin-walled hollow optical fibers (HOFs). Using a fiber draw tower, the fabrication parameters, including drawing speed and gas flow rate, are explored, and the HOF geometry is precisely controlled, which allows identical laser microring resonators to be distributed along the fibers. The disposable OFL immunosensor detects the protein concentration in the HOF through a wash-free immunoassay. Enabled by the disposable sensors, the statistical characteristics of 80 tests for each concentration greatly reduces the bioassay uncertainty. A low coefficient of variation (CV) of 3.3% confirms the high reproducibility of the disposable HOF-OFL sensors, and the mean of the normal distribution of the logarithmic OFL intensity serves as the sensing output. A limit of detection of 11 nM within a short assay time of 15 min is achieved. These disposable immunosensors possess the advantages of low cost, high reproducibility, fast assay, and low-volume consumption of sample and reagents. We believe that this work will inspire disposable optofluidics through the mass production of multifunctional microstructured optical fibers.

Microchannels inside bulk PMMA generated by femtosecond laser using adaptive beam shaping

In this contribution, we report on the generation of internal microchannels with basically unlimited channel length inside of PMMA bulk material by femtosecond laser. A precisely controllable and stable circular channel cross section is obtained by using a spatial light modulator to compensate the writing depth depending spherical aberration. Furthermore, the generation of a rotatable elliptical input beam by adaptive optics ensures a fitting of the beam shaping to the writing direction. In this study, we report on both, the effect of the ellipticity of the input beam and the effect of a correction of the spherical aberration on the circularity of the resulting internal microchannels. Moreover, we demonstrate the application of this writing technique by creating microfluidic testing structures inside of a transparent standard polymer.

Fabrication of Silicon Microfluidic Chips for Acoustic Particle Focusing Using Direct Laser Writing

We have developed a fast and simple method for fabricating microfluidic channels in silicon using direct laser writing. The laser microfabrication process was optimised to generate microfluidic channels with vertical walls suitable for acoustic particle focusing by bulk acoustic waves. The width of the acoustic resonance channel was designed to be 380 µm, branching into a trifurcation with 127 µm wide side outlet channels. The optimised settings used to make the microfluidic channels were 50% laser radiation power, 10 kHz pulse frequency and 35 passes. With these settings, six chips could be ablated in 5 h. The microfluidic channels were sealed with a glass wafer using adhesive bonding, diced into individual chips, and a piezoelectric transducer was glued to each chip. With acoustic actuation at 2.03 MHz a half wavelength resonance mode was generated in the microfluidic channel, and polystyrene microparticles (10 µm diameter) were focused along the centre-line of the channel. The presented fabrication process is especially interesting for research purposes as it opens up for rapid prototyping of silicon-glass microfluidic chips for acoustofluidic applications.

A Rubik's microfluidic cube

A Rubik's cube as a reconfigurable microfluidic system is presented in this work. Composed of physically interlocking microfluidic blocks, the microfluidic cube enables the on-site design and configuration of custom microfluidics by twisting the faces of the cube. The reconfiguration of the microfluidics could be done by solving an ordinary Rubik's cube with the help of Rubik's cube algorithms and computer programs. An O-ring-aided strategy is used to enable self-sealing and the automatic alignment of the microfluidic cube blocks. Owing to the interlocking mechanics of cube blocks, the proposed microfluidic cube exhibits good reconfigurability and robustness in versatile applications and proves to be a promising candidate for the rapid deployment of microfluidic systems in resource-limited settings.

A Primer on Microfluidics: From Basic Principles to Microfabrication

Microfluidic systems enable manipulating fluids in different functional units which are integrated on a microchip. This chapter describes the basics of microfluidics, where physical effects have a different impact compared to macroscopic systems. Furthermore, an overwiew is given on the microfabrication of these systems. The focus lies on clean-room fabrication methods based on photolithography and soft lithography. Finally, an outlook on advanced maskless micro- and nanofabrication methods is given. Special attention is paid to laser structuring processes.

The Fabrication of Micro/Nano Structures by Laser Machining

Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers' findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.

Efficient quasi-phase-matching in fan-out PPSLT crystal waveguides by femtosecond laser direct writing

We demonstrate second harmonic generations in quasi-phase matched cladding waveguide structures fabricated by direct femtosecond laser writing. Waveguides with circular section are inscribed in z-cut MgO doped stoichiometric lithium tantalate with fan-out χ⁽²⁾ grating structures. The ferroelectric domain-inverted fan-out grating period seamlessly varies from 7.5 to 8.2 µm. Seven individual waveguides with step changed periods are fabricated. The minimum insertion loss of the cladding waveguides is about 0.54 dB at wavelength of 1064 nm. Temperature tuned second harmonic generations of 1064 nm for different quasi phase matched grating periods are demonstrated by using continuous wave and pulsed laser. A comparable normalized conversion efficiency of 3.55%/(W·cm²) is obtained for 7.91 µm period. The maximum power conversion efficiency of 54.3% was obtained under a pump peak power of 282 W.

Tunable microfluidic device fabricated by femtosecond structured light for particle and cell manipulation

Smart devices made of stimuli-responsive (SR) hydrogel can realize accurate shape control with high repeatability attributed to their fast swelling and shrinking upon the change of external stimuli. Integrating these devices into microfluidic chips and utilizing their controllable deformation capability are highly promising approaches to enrich the functions of microfluidic devices and reduce their external apparatuses. Herein we propose and demonstrate a tunable microfluidic device (TMFD) by integrating a pH-sensitive hydrogel microring array into a microchannel. Instantaneous and reversible deformation of the microrings can be finished in less than 200 ms. The array gaps of the microrings are reversibly switched to realize the capture or release of microobjects. In addition, a femtosecond laser holographic processing method is firstly used to pattern and integrate the pH-sensitive hydrogel microrings into a microchannel, and the pH-responsive properties of the hydrogel affected by laser processing dosages are theoretically and experimentally investigated. With this method, the height, diameter (6-16 μm), swelling ratio (35-65%), and diameter change (2-5 μm) can be precisely controlled. As a proof of concept, the filtering of polystyrene particles with multiple sizes and complete trapping of PS particles and cells are demonstrated by these TMFDs. The developed TMFD can be easily integrated by the femtosecond laser holographic processing method, and operates robustly without the need for external precision apparatuses, which hold great promise in the applications of microobject manipulation and biomedical analysis.

Parallel multiphase nanofluidics utilizing nanochannels with partial hydrophobic surface modification and application to femtoliter solvent extraction

In the field of microfluidics, utilizing parallel multiphase flows with immiscible liquid/liquid or gas/liquid interfaces along a microchannel has achieved the integration of various chemical processes for analyses and syntheses. Recently, our group has developed nanofluidics that exploits 100 nm nanochannels to realize ultra-small (aL to fL scale) and highly efficient chemical operations. Novel applications such as single-molecule analyses and single-cell omics are anticipated. However, the formation of parallel multiphase flows in a nanochannel remains challenging. To this end, here we developed a novel method for nanoscale partial hydrophobic surface modification of a nanochannel utilizing a focused ion beam. Hydrophobic and hydrophilic areas could be patterned beside one another even in a 60 nm glass nanochannel. Because this patterning maintained the liquid/liquid interface in the nanochannel based on the difference in wettability, stable aqueous/organic parallel two-phase flow in a 40 fL nanochannel was realized for the first time. Utilizing this flow, nanoscale unit operations involving phase confluence, extraction and phase separation were integrated to demonstrate solvent extraction of a lipid according to the Bligh-Dyer method, which is a broadly used pretreatment process in lipidomics. We accomplished the separation of a lipid and an amino acid in a sample volume of 4 fL (250 times smaller than the pL volume of a single cell) with a processing time of 1 ms (10 000 times faster than that in a microchannel). This study therefore provides a technological breakthrough that advances the field of nanofluidics to allow multiphase chemical processing at fL volumes.

STED Direct Laser Writing of 45 nm Width Nanowire

Controlled fabrication of 45 nm width nanowire using simulated emission depletion (STED) direct laser writing with a rod-shape effective focus spot is presented. In conventional STED direct laser writing, normally a donut-shaped depletion focus is used, and the minimum linewidth is restricted to 55 nm. In this work, we push this limit to sub-50 nm dimension with a rod-shape effective focus spot, which is the combination of a Gaussian excitation focus and twin-oval depletion focus. Effects of photoinitiator type, excitation laser power, and depletion laser power on the width of the nanowire are explored, respectively. Single nanowire with 45 nm width is obtained, which is λ/18 of excitation wavelength and the minimum linewidth in pentaerythritol triacrylate (PETA) photoresist. Our result accelerates the progress of achievable linewidth reduction in STED direct laser writing.

Optimization of selective laser-induced etching (SLE) for fabrication of 3D glass microfluidic device with multi-layer micro channels

We present the selective laser-induced etching (SLE) process and design guidelines for the fabrication of three-dimensional (3D) microfluidic channels in a glass. The SLE process consisting of laser direct patterning and wet chemical etching uses different etch rates between the laser modified area and the unmodified area. The etch selectivity is an important factor for the processing speed and the fabrication resolution of the 3D structures. In order to obtain the maximum etching selectivity, we investigated the process window of the SLE process: the laser pulse energy, pulse repetition rate, and scan speed. When using potassium hydroxide (KOH) as a wet etchant, the maximum etch rate of the laser-modified glass was obtained to be 166 μm/h, exhibiting the highest selectivity about 333 respect to the pristine glass. Based on the optimized process window, a 3D microfluidic channel branching to three multilayered channels was successfully fabricated in a 4 mm-thick glass. In addition, appropriate design guidelines for preventing cracks in a glass and calibrating the position of the dimension of the hollow channels were studied.

Femtosecond Laser Micromachining of Fabry-Pérot Interferometers for Magnetic Field Sensing

Fs-laser micromachining is a high precision fabrication technique that can be used to write novel three-dimensional structures, depending on the nature of light-matter interaction. In fused silica, the material modification can lead to (i) an increase of the refractive index around the focal volume, resulting in the formation of optical circuits, or (ii) an enhancement of the etch rate of the laser-affected zones relative to the pristine material, leading to a selective and anisotropic etching reaction that enables fabrication of microfluidic systems. Here, both effects are combined to fabricate a Fabry-Pérot interferometer, where optical waveguides and microfluidic channels are integrated monolithically in a fused silica chip. By filling the channel with a magnetic fluid whose refractive index changes with an external magnetic field, the device can be used as a magnetic field sensor. A linear sensitivity of -0.12 nm/mT is obtained in the 5.0±0.5 to 33.0±0.5 mT range, with the field being applied parallel to the light propagation direction.

3D microfluidics via cyclic olefin polymer-based in situ direct laser writing

In situ direct laser writing (isDLW) strategies that facilitate the printing of three-dimensional (3D) nanostructured components directly inside of, and fully sealed to, enclosed microchannels are uniquely suited for manufacturing geometrically complex microfluidic technologies. Recent efforts have demonstrated the benefits of using micromolding and bonding protocols for isDLW; however, the reliance on polydimethylsiloxane (PDMS) leads to limited fluidic sealing (e.g., operational pressures <50-75 kPa) and poor compatibility with standard organic solvent-based developers. To bypass these issues, here we explore the use of cyclic olefin polymer (COP) as an enabling microchannel material for isDLW by investigating three fundamental classes of microfluidic systems corresponding to increasing degrees of sophistication: (i) "2.5D" functionally static fluidic barriers (10-100 μm in height), which supported uncompromised structure-to-channel sealing under applied input pressures of up to 500 kPa; (ii) 3D static interwoven microvessel-inspired structures (inner diameters < 10 μm) that exhibited effective isolation of distinct fluorescently labelled microfluidic flow streams; and (iii) 3D dynamically actuated microfluidic transistors, which comprised bellowed sealing elements (wall thickness = 500 nm) that could be actively deformed via an applied gate pressure to fully obstruct source-to-drain fluid flow. In combination, these results suggest that COP-based isDLW offers a promising pathway to wide-ranging fluidic applications that demand significant architectural versatility at submicron scales with invariable sealing integrity, such as for biomimetic organ-on-a-chip systems and integrated microfluidic circuits.

Direct writing of optical microresonators in a lab-on-a-chip for label-free biosensing

Whispering gallery mode (WGM) resonators are promising optical structures for microfluidic label-free biosensors mainly due to their high sensitivity, but from a practical point of view they present numerous constraints that make their use in real laboratory diagnosis application difficult. Herein we report on a monolithic lab on a chip fabricated by a hybrid femtosecond laser micromachining approach, for label-free biosensing. It consists of a polymer WGM microresonator sensor integrated inside a glass microfluidic chip, presenting a refractive index change sensitivity of 61 nm per RIU. The biosensing capabilities of the device have been demonstrated by exploiting the biotin-streptavidin binding affinity, obtaining a measurable minimum surface density increase of 67 × 10³ molecules per μm².

Geometric Determinants of In-Situ Direct Laser Writing

Direct laser writing (DLW) is a three-dimensional (3D) manufacturing technology that offers significant geometric versatility at submicron length scales. Although these characteristics hold promise for fields including organ modeling and microfluidic processing, difficulties associated with facilitating the macro-to-micro interfaces required for fluid delivery have limited the utility of DLW for such applications. To overcome this issue, here we report an in-situ DLW (isDLW) strategy for creating 3D nanostructured features directly inside of—and notably, fully sealed to—sol-gel-coated elastomeric microchannels. In particular, we investigate the role of microchannel geometry (e.g., cross-sectional shape and size) in the sealing performance of isDLW-printed structures. Experiments revealed that increasing the outward tapering of microchannel sidewalls improved fluidic sealing integrity for channel heights ranging from 10 μm to 100 μm, which suggests that conventional microchannel fabrication approaches are poorly suited for isDLW. As a demonstrative example, we employed isDLW to 3D print a microfluidic helical coil spring diode and observed improved flow rectification performance at higher pressures—an indication of effective structure-to-channel sealing. We envision that the ability to readily integrate 3D nanostructured fluidic motifs with the entire luminal surface of elastomeric channels will open new avenues for emerging applications in areas such as soft microrobotics and biofluidic microsystems.

Laser-treated glass platform for rapid wicking-driven transport and particle separation in bio microfluidics

In this work, we present a laser-based fabrication technique for direct patterning of micro-channels consisting of interconnected micro-cracks on soda-lime glass.