1
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Cupertino A, Shin D, Guo L, Steeneken PG, Bessa MA, Norte RA. Centimeter-scale nanomechanical resonators with low dissipation. Nat Commun 2024; 15:4255. [PMID: 38762589 PMCID: PMC11102468 DOI: 10.1038/s41467-024-48183-7] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/28/2023] [Accepted: 04/22/2024] [Indexed: 05/20/2024] Open
Abstract
High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the length-to-thickness ratio of these devices, leaving a largely unexplored regime in nano-engineering. We present nanomechanical resonators that extend centimeters in length yet retain nanometer thickness. We explore this expanded design space using an optimization approach which judiciously employs fast millimeter-scale simulations to steer the more computationally intensive centimeter-scale design optimization. By employing delicate nanofabrication techniques, our approach ensures high-yield realization, experimentally confirming room-temperature quality factors close to theoretical predictions. The synergy between nanofabrication, design optimization guided by machine learning, and precision engineering opens a solid-state path to room-temperature quality factors approaching 10 billion at kilohertz mechanical frequencies - comparable to the performance of leading cryogenic resonators and levitated nanospheres, even under significantly less stringent temperature and vacuum conditions.
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Affiliation(s)
- Andrea Cupertino
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Dongil Shin
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
- Department of Materials Science and Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Leo Guo
- Department of Microelectronics, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Peter G Steeneken
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
- Department of Quantum Nanoscience, Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Miguel A Bessa
- School of Engineering, Brown University, 184 Hope St., Providence, RI, 02912, USA.
| | - Richard A Norte
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands.
- Department of Quantum Nanoscience, Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands.
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2
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Pezone R, Anzinger S, Baglioni G, Wasisto HS, Sarro PM, Steeneken PG, Vollebregt S. Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones. Microsyst Nanoeng 2024; 10:27. [PMID: 38384678 PMCID: PMC10879197 DOI: 10.1038/s41378-024-00656-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/04/2023] [Revised: 11/02/2023] [Accepted: 12/14/2023] [Indexed: 02/23/2024]
Abstract
Since the performance of micro-electro-mechanical system (MEMS)-based microphones is approaching fundamental physical, design, and material limits, it has become challenging to improve them. Several works have demonstrated graphene's suitability as a microphone diaphragm. The potential for achieving smaller, more sensitive, and scalable on-chip MEMS microphones is yet to be determined. To address large graphene sizes, graphene-polymer heterostructures have been proposed, but they compromise performance due to added polymer mass and stiffness. This work demonstrates the first wafer-scale integrated MEMS condenser microphones with diameters of 2R = 220-320 μm, thickness of 7 nm multi-layer graphene, that is suspended over a back-plate with a residual gap of 5 μm. The microphones are manufactured with MEMS compatible wafer-scale technologies without any transfer steps or polymer layers that are more prone to contaminate and wrinkle the graphene. Different designs, all electrically integrated are fabricated and characterized allowing us to study the effects of the introduction of a back-plate for capacitive read-out. The devices show high mechanical compliances Cm = 0.081-1.07 μmPa-1 (10-100 × higher than the silicon reported in the state-of-the-art diaphragms) and pull-in voltages in the range of 2-9.5 V. In addition, to validate the proof of concept, we have electrically characterized the graphene microphone when subjected to sound actuation. An estimated sensitivity of S1kHz = 24.3-321 mV Pa-1 for a Vbias = 1.5 V was determined, which is 1.9-25.5 × higher than of state-of-the-art microphone devices while having a ~9 × smaller area.
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Affiliation(s)
- Roberto Pezone
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | | | - Gabriele Baglioni
- Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Delft, the Netherlands
| | | | - Pasqualina M. Sarro
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Delft, the Netherlands
- Department of Precision and Microsystems Engineering (PME), Delft University of Technology, Delft, The Netherlands
| | - Sten Vollebregt
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
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3
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Houmes MJA, Baglioni G, Šiškins M, Lee M, Esteras DL, Ruiz AM, Mañas-Valero S, Boix-Constant C, Baldoví JJ, Coronado E, Blanter YM, Steeneken PG, van der Zant HSJ. Magnetic order in 2D antiferromagnets revealed by spontaneous anisotropic magnetostriction. Nat Commun 2023; 14:8503. [PMID: 38129381 PMCID: PMC10739885 DOI: 10.1038/s41467-023-44180-4] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/06/2023] [Accepted: 12/04/2023] [Indexed: 12/23/2023] Open
Abstract
The temperature dependent order parameter provides important information on the nature of magnetism. Using traditional methods to study this parameter in two-dimensional (2D) magnets remains difficult, however, particularly for insulating antiferromagnetic (AF) compounds. Here, we show that its temperature dependence in AF MPS3 (M(II) = Fe, Co, Ni) can be probed via the anisotropy in the resonance frequency of rectangular membranes, mediated by a combination of anisotropic magnetostriction and spontaneous staggered magnetization. Density functional calculations followed by a derived orbital-resolved magnetic exchange analysis confirm and unravel the microscopic origin of this magnetization-induced anisotropic strain. We further show that the temperature and thickness dependent order parameter allows to deduce the material's critical exponents characterising magnetic order. Nanomechanical sensing of magnetic order thus provides a future platform to investigate 2D magnetism down to the single-layer limit.
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Affiliation(s)
- Maurits J A Houmes
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands.
| | - Gabriele Baglioni
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Makars Šiškins
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Martin Lee
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Dorye L Esteras
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Alberto M Ruiz
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Samuel Mañas-Valero
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Carla Boix-Constant
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Jose J Baldoví
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Eugenio Coronado
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Yaroslav M Blanter
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
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4
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Baglioni G, Šiškins M, Houmes M, Lee M, Shin DH, Mañas-Valero S, Coronado E, Blanter YM, van der Zant HSJ, Steeneken PG. Thermo-Magnetostrictive Effect for Driving Antiferromagnetic Two-Dimensional Material Resonators. Nano Lett 2023; 23:6973-6978. [PMID: 37466285 PMCID: PMC10416344 DOI: 10.1021/acs.nanolett.3c01610] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/28/2023] [Revised: 07/14/2023] [Indexed: 07/20/2023]
Abstract
Magnetostrictive coupling has recently attracted interest as a sensitive method for studying magnetism in two-dimensional (2D) materials by mechanical means. However, its application in high-frequency magnetic actuators and transducers requires rapid modulation of the magnetic order, which is difficult to achieve with external magnets, especially when dealing with antiferromagnets. Here, we optothermally modulate the magnetization in antiferromagnetic 2D material membranes of metal phosphor trisulfides (MPS3), to induce a large high-frequency magnetostrictive driving force. From the analysis of the temperature-dependent resonance amplitude, we provide evidence that the force is due to a thermo-magnetostrictive effect, which significantly increases near the Neél temperature, due to the strong temperature dependence of the magnetization. By studying its angle dependence, we find the effect is observed to follow anisotropic magnetostriction of the crystal lattice. The results show that the thermo-magnetostrictive effect results in a strongly enhanced thermal expansion force near the critical temperature of magnetostrictive 2D materials, which can enable more efficient actuation of nano-magnetomechanical devices and can also provide a route for studying the high-frequency coupling among magnetic, mechanical, and thermodynamic degrees of freedom down to the 2D limit.
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Affiliation(s)
- Gabriele Baglioni
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Makars Šiškins
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Maurits Houmes
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Martin Lee
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Dong Hoon Shin
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Samuel Mañas-Valero
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
- Instituto
de Ciencia Molecular (ICMol), Universitat
de Valencia, Catedrático José Beltrán 2, 46980 Paterna, Spain
| | - Eugenio Coronado
- Instituto
de Ciencia Molecular (ICMol), Universitat
de Valencia, Catedrático José Beltrán 2, 46980 Paterna, Spain
| | - Yaroslav M. Blanter
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, 2628 CJ Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
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5
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Baglioni G, Pezone R, Vollebregt S, Cvetanović Zobenica K, Spasenović M, Todorović D, Liu H, Verbiest GJ, van der Zant HSJ, Steeneken PG. Ultra-sensitive graphene membranes for microphone applications. Nanoscale 2023; 15:6343-6352. [PMID: 36916300 DOI: 10.1039/d2nr05147h] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10-15 dB lower than that featured by current MEMS microphones.
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Affiliation(s)
- Gabriele Baglioni
- Kavli Institute of Nanoscience, Delft University of Technology, The Netherlands.
| | - Roberto Pezone
- Laboratory of Electronic Components, Technology and Materials, Delft University of Technology, The Netherlands
| | - Sten Vollebregt
- Laboratory of Electronic Components, Technology and Materials, Delft University of Technology, The Netherlands
| | - Katarina Cvetanović Zobenica
- Center for Microelectronic Technologies, Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Serbia
| | - Marko Spasenović
- Center for Microelectronic Technologies, Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Serbia
| | | | - Hanqing Liu
- Department of Precision and Microsystems Engineering, Delft University of Technology, The Netherlands
| | - Gerard J Verbiest
- Department of Precision and Microsystems Engineering, Delft University of Technology, The Netherlands
| | | | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology, The Netherlands.
- Department of Precision and Microsystems Engineering, Delft University of Technology, The Netherlands
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6
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Chen X, Ammu SK, Masania K, Steeneken PG, Alijani F. Diamagnetic Composites for High-Q Levitating Resonators. Adv Sci (Weinh) 2022; 9:e2203619. [PMID: 36180390 PMCID: PMC9661851 DOI: 10.1002/advs.202203619] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 06/22/2022] [Revised: 08/19/2022] [Indexed: 06/16/2023]
Abstract
Levitation offers extreme isolation of mechanical systems from their environment, while enabling unconstrained high-precision translation and rotation of objects. Diamagnetic levitation is one of the most attractive levitation schemes because it allows stable levitation at room temperature without the need for a continuous power supply. However, dissipation by eddy currents in conventional diamagnetic materials significantly limits the application potential of diamagnetically levitating systems. Here, a route toward high-Q macroscopic levitating resonators by substantially reducing eddy current damping using graphite particle based diamagnetic composites is presented. Resonators that feature quality factors Q above 450 000 and vibration lifetimes beyond one hour are demonstrated, while levitating above permanent magnets in high vacuum at room temperature. The composite resonators have a Q that is >400 times higher than that of diamagnetic graphite plates. By tuning the composite particle size and density, the dissipation reduction mechanism is investigated, and the Q of the levitating resonators is enhanced. Since their estimated acceleration noise is as low as some of the best superconducting levitating accelerometers at cryogenic temperatures, the high Q and large mass of the presented composite resonators positions them as one of the most promising technologies for next generation ultra-sensitive room temperature accelerometers.
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Affiliation(s)
- Xianfeng Chen
- Department of Precision and Microsystems EngineeringDelft University of TechnologyMekelweg 2Delft2628 CDThe Netherlands
| | - Satya K. Ammu
- Shaping Matter LabFaculty of Aerospace EngineeringDelft University of TechnologyDelft2629 HSThe Netherlands
| | - Kunal Masania
- Shaping Matter LabFaculty of Aerospace EngineeringDelft University of TechnologyDelft2629 HSThe Netherlands
| | - Peter G. Steeneken
- Department of Precision and Microsystems EngineeringDelft University of TechnologyMekelweg 2Delft2628 CDThe Netherlands
- Kavli Institute of NanoscienceDelft University of TechnologyLorentzweg 1Delft2628 CJThe Netherlands
| | - Farbod Alijani
- Department of Precision and Microsystems EngineeringDelft University of TechnologyMekelweg 2Delft2628 CDThe Netherlands
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7
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Lee M, Renshof JR, van Zeggeren KJ, Houmes MJA, Lesne E, Šiškins M, van Thiel TC, Guis RH, van Blankenstein MR, Verbiest GJ, Caviglia AD, van der Zant HSJ, Steeneken PG. Ultrathin Piezoelectric Resonators Based on Graphene and Free-Standing Single-Crystal BaTiO 3. Adv Mater 2022; 34:e2204630. [PMID: 36039705 DOI: 10.1002/adma.202204630] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/23/2022] [Revised: 08/27/2022] [Indexed: 06/15/2023]
Abstract
Suspended piezoelectric thin films are key elements enabling high-frequency filtering in telecommunication devices. To meet the requirements of next-generation electronics, it is essential to reduce device thickness for reaching higher resonance frequencies. Here, the high-quality mechanical and electrical properties of graphene electrodes are combined with the strong piezoelectric performance of the free-standing complex oxide, BaTiO3 (BTO), to create ultrathin piezoelectric resonators. It is demonstrated that the device can be brought into mechanical resonance by piezoelectric actuation. By sweeping the DC bias voltage on the top graphene electrode, the BTO membrane is switched between the two poled ferroelectric states. Remarkably, ferroelectric hysteresis is also observed in the resonance frequency, magnitude and Q-factor of the first membrane mode. In the bulk acoustic mode, the device vibrates at 233 GHz. This work demonstrates the potential of combining van der Waals materials with complex oxides for next-generation electronics, which not only opens up opportunities for increasing filter frequencies, but also enables reconfiguration by poling, via ferroelectric memory effect.
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Affiliation(s)
- Martin Lee
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Johannes R Renshof
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Kasper J van Zeggeren
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Maurits J A Houmes
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Edouard Lesne
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Makars Šiškins
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Thierry C van Thiel
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Ruben H Guis
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft, 2628 CD, The Netherlands
| | - Mark R van Blankenstein
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Gerard J Verbiest
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft, 2628 CD, The Netherlands
| | - Andrea D Caviglia
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft, 2628 CD, The Netherlands
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8
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Dutta S, Chen Z, Kaiser E, Matamoros PM, Steeneken PG, Verbiest GJ. Ultrasound Pulse Emission Spectroscopy Method to Characterize Xylem Conduits in Plant Stems. Research (Wash D C) 2022; 2022:9790438. [PMID: 36204251 PMCID: PMC9513830 DOI: 10.34133/2022/9790438] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/03/2022] [Accepted: 08/22/2022] [Indexed: 11/22/2022] Open
Abstract
Although it is well known that plants emit acoustic pulses under drought stress, the exact origin of the waveform of these ultrasound pulses has remained elusive. Here, we present evidence for a correlation between the characteristics of the waveform of these pulses and the dimensions of xylem conduits in plants. Using a model that relates the resonant vibrations of a vessel to its dimension and viscoelasticity, we extract the xylem radii from the waveforms of ultrasound pulses and show that these are correlated and in good agreement with optical microscopy. We demonstrate the versatility of the method by applying it to shoots of ten different vascular plant species. In particular, for Hydrangea quercifolia, we further extract vessel element lengths with our model and compare them with scanning electron cryomicroscopy. The ultrasonic, noninvasive characterization of internal conduit dimensions enables a breakthrough in speed and accuracy in plant phenotyping and stress detection.
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Affiliation(s)
- Satadal Dutta
- Department of Precision and Microsystems Engineering, Faculty of 3ME, TU Delft, Mekelweg 2, 2628CD Delft, Netherlands
| | - Zhiyi Chen
- Horticulture and Product Physiology, Department of Plant Sciences, Wageningen University and Research, Droevendaalsesteeg 1, 6708PB Wageningen, Netherlands
| | - Elias Kaiser
- Horticulture and Product Physiology, Department of Plant Sciences, Wageningen University and Research, Droevendaalsesteeg 1, 6708PB Wageningen, Netherlands
| | - Priscilla Malcolm Matamoros
- Horticulture and Product Physiology, Department of Plant Sciences, Wageningen University and Research, Droevendaalsesteeg 1, 6708PB Wageningen, Netherlands
| | - Peter G. Steeneken
- Department of Precision and Microsystems Engineering, Faculty of 3ME, TU Delft, Mekelweg 2, 2628CD Delft, Netherlands
| | - Gerard J. Verbiest
- Department of Precision and Microsystems Engineering, Faculty of 3ME, TU Delft, Mekelweg 2, 2628CD Delft, Netherlands
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9
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Abstract
Nonlinearities are inherent to the dynamics of two-dimensional materials. Phenomena-like intermodal coupling already arise at amplitudes of only a few nanometers, and a range of unexplored effects still awaits to be harnessed. Here, we demonstrate a route for generating mechanical frequency combs in graphene resonators undergoing symmetry-breaking forces. We use electrostatic force to break the membrane's out-of-plane symmetry and tune its resonance frequency toward a one-to-two internal resonance, thus achieving strong coupling between two of its mechanical modes. When increasing the drive level, we observe splitting of the fundamental resonance peak, followed by the emergence of a frequency comb regime. We attribute the observed physics to a nonsymmetric restoring potential and show that the frequency comb regime is mediated by Neimark bifurcation of the periodic solution. These results demonstrate that mechanical frequency combs and chaotic dynamics in 2D material resonators can emerge near internal resonances due to symmetry-breaking.
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Affiliation(s)
- Ata Keşkekler
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft 2628 CD, The Netherlands
| | - Hadi Arjmandi-Tash
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft 2628 CD, The Netherlands
| | - Peter G. Steeneken
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft 2628 CD, The Netherlands
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg
1, Delft 2628 CJ, The Netherlands
| | - Farbod Alijani
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft 2628 CD, The Netherlands
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10
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Rosłoń IE, Japaridze A, Steeneken PG, Dekker C, Alijani F. Probing nanomotion of single bacteria with graphene drums. Nat Nanotechnol 2022; 17:637-642. [PMID: 35437320 DOI: 10.1038/s41565-022-01111-6] [Citation(s) in RCA: 4] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/03/2021] [Accepted: 03/02/2022] [Indexed: 06/14/2023]
Abstract
Motion is a key characteristic of every form of life1. Even at the microscale, it has been reported that colonies of bacteria can generate nanomotion on mechanical cantilevers2, but the origin of these nanoscale vibrations has remained unresolved3,4. Here, we present a new technique using drums made of ultrathin bilayer graphene, where the nanomotion of single bacteria can be measured in its aqueous growth environment. A single Escherichia coli cell is found to generate random oscillations with amplitudes of up to 60 nm, exerting forces of up to 6 nN to its environment. Using mutant strains that differ by single gene deletions that affect motility, we are able to pinpoint the bacterial flagella as the main source of nanomotion. By real-time tracing of changes in nanomotion on administering antibiotics, we demonstrate that graphene drums can perform antibiotic susceptibility testing with single-cell sensitivity. These findings deepen our understanding of processes underlying cellular dynamics, and pave the way towards high-throughput and parallelized rapid screening of the effectiveness of antibiotics in bacterial infections with graphene devices.
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Affiliation(s)
- Irek E Rosłoń
- Delft University of Technology, Delft, the Netherlands
| | | | | | - Cees Dekker
- Delft University of Technology, Delft, the Netherlands
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11
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Hagendoorn Y, Pandraud G, Vollebregt S, Morana B, Sarro PM, Steeneken PG. Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films. Materials (Basel) 2022; 15:ma15103723. [PMID: 35629749 PMCID: PMC9146350 DOI: 10.3390/ma15103723] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/01/2022] [Revised: 05/12/2022] [Accepted: 05/19/2022] [Indexed: 02/05/2023]
Abstract
Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graphene on a SiO2 layer on a silicon wafer by employing a Pt thin film as catalyst. We pattern the platinum film, after which a CVD graphene layer is grown at the interface between the SiO2 and the Pt. After removing the Pt, Raman spectroscopy demonstrates the local growth of monolayer graphene on SiO2. By tuning the CVD process, we were able to fully cover 4-inch oxidized silicon wafers with transfer-free monolayer graphene, a result that is not easily obtained using other methods. By adding Ta structures, local graphene growth on SiO2 is selectively blocked, allowing the controlled graphene growth on areas selected by mask design.
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Affiliation(s)
- Yelena Hagendoorn
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands; (Y.H.); (G.P.); (S.V.); (B.M.); (P.M.S.)
| | - Gregory Pandraud
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands; (Y.H.); (G.P.); (S.V.); (B.M.); (P.M.S.)
| | - Sten Vollebregt
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands; (Y.H.); (G.P.); (S.V.); (B.M.); (P.M.S.)
| | - Bruno Morana
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands; (Y.H.); (G.P.); (S.V.); (B.M.); (P.M.S.)
| | - Pasqualina M. Sarro
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands; (Y.H.); (G.P.); (S.V.); (B.M.); (P.M.S.)
| | - Peter G. Steeneken
- Precision and Microsystems Engineering Department, Delft University of Technology, 2628 CD Delft, The Netherlands
- Correspondence:
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12
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Pezone R, Baglioni G, Sarro PM, Steeneken PG, Vollebregt S. Sensitive Transfer-Free Wafer-Scale Graphene Microphones. ACS Appl Mater Interfaces 2022; 14:21705-21712. [PMID: 35475352 PMCID: PMC9100512 DOI: 10.1021/acsami.2c03305] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/22/2022] [Accepted: 04/12/2022] [Indexed: 06/14/2023]
Abstract
During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires breakthrough device concepts, geometries, and materials. Graphene is an attractive material for enabling these breakthroughs due to its flexibility, strength, nanometer thinness, and high electrical conductivity. Here, we demonstrate that transfer-free 7 nm thick multilayer graphene (MLGr) membranes with diameters ranging from 85-155 to 300 μm can be used to detect sound and show a mechanical compliance up to 92 nm Pa-1, thus outperforming commercially available MEMS microphones of 950 μm with compliances around 3 nm Pa-1. The feasibility of realizing larger membranes with diameters of 300 μm and even higher compliances is shown, although these have lower yields. We present a process for locally growing graphene on a silicon wafer and realizing suspended membranes of patterned graphene across through-silicon holes by bulk micromachining and sacrificial layer etching, such that no transfer is required. This transfer-free method results in a 100% yield for membranes with diameters up to 155 μm on 132 fabricated drums. The device-to-device variations in the mechanical compliance in the audible range (20-20000 Hz) are significantly smaller than those in transferred membranes. With this work, we demonstrate a transfer-free method for realizing wafer-scale multilayer graphene membranes that is compatible with high-volume manufacturing. Thus, limitations of transfer-based methods for graphene microphone fabrication such as polymer contamination, crack formation, wrinkling, folding, delamination, and low-tension reproducibility are largely circumvented, setting a significant step on the route toward high-volume production of graphene microphones.
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Affiliation(s)
- Roberto Pezone
- Laboratory
of Electronic Components, Technology and Materials (ECTM), Department
of Microelectronics, Delft University of
Technology, 2628 CD Delft, The Netherlands
| | - Gabriele Baglioni
- Kavli
Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, 2628 CD Delft, The Netherlands
| | - Pasqualina M. Sarro
- Laboratory
of Electronic Components, Technology and Materials (ECTM), Department
of Microelectronics, Delft University of
Technology, 2628 CD Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, 2628 CD Delft, The Netherlands
- Department
of Precision and Microsystems Engineering (PME), Delft University of Technology, 2628 CD Delft, The Netherlands
| | - Sten Vollebregt
- Laboratory
of Electronic Components, Technology and Materials (ECTM), Department
of Microelectronics, Delft University of
Technology, 2628 CD Delft, The Netherlands
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13
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Lee M, Robin MP, Guis RH, Filippozzi U, Shin DH, van Thiel TC, Paardekooper SP, Renshof JR, van der Zant HSJ, Caviglia AD, Verbiest GJ, Steeneken PG. Self-Sealing Complex Oxide Resonators. Nano Lett 2022; 22:1475-1482. [PMID: 35119289 PMCID: PMC8880390 DOI: 10.1021/acs.nanolett.1c03498] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/09/2021] [Revised: 01/27/2022] [Indexed: 06/14/2023]
Abstract
Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nanomechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing.
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Affiliation(s)
- Martin Lee
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Martin P. Robin
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
| | - Ruben H. Guis
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
| | - Ulderico Filippozzi
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Dong Hoon Shin
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Thierry C. van Thiel
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Stijn P. Paardekooper
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
| | - Johannes R. Renshof
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Andrea D. Caviglia
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Gerard J. Verbiest
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
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14
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Šiškins M, Sokolovskaya E, Lee M, Mañas-Valero S, Davidovikj D, van der Zant HSJ, Steeneken PG. Tunable Strong Coupling of Mechanical Resonance between Spatially Separated FePS 3 Nanodrums. Nano Lett 2022; 22:36-42. [PMID: 34919402 PMCID: PMC8759088 DOI: 10.1021/acs.nanolett.1c03010] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/04/2021] [Revised: 12/03/2021] [Indexed: 05/20/2023]
Abstract
Coupled nanomechanical resonators made of two-dimensional materials are promising for processing information with mechanical modes. However, the challenge for these systems is to control the coupling. Here, we demonstrate strong coupling of motion between two suspended membranes of the magnetic 2D material FePS3. We describe a tunable electromechanical mechanism for control over both the resonance frequency and the coupling strength using a gate voltage electrode under each membrane. We show that the coupling can be utilized for transferring data between drums by amplitude modulation. Finally, we also study the temperature dependence of the coupling and how it is affected by the antiferromagnetic phase transition characteristic of this material. The presented electrical coupling of resonant magnetic 2D membranes holds the promise of transferring mechanical energy over a distance at low electrical power, thus enabling novel data readout and information processing technologies.
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Affiliation(s)
- Makars Šiškins
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Email for M.Š.:
| | - Ekaterina Sokolovskaya
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Martin Lee
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Samuel Mañas-Valero
- Instituto
de Ciencia Molecular (ICMol), Universitat
de València, c/Catedrático
José Beltrán 2, 46980 Paterna, Spain
| | - Dejan Davidovikj
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628
CD Delft, The Netherlands
- Email for P.G.S.:
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15
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Shin D, Cupertino A, de Jong MHJ, Steeneken PG, Bessa MA, Norte RA. Spiderweb Nanomechanical Resonators via Bayesian Optimization: Inspired by Nature and Guided by Machine Learning. Adv Mater 2022; 34:e2106248. [PMID: 34695265 DOI: 10.1002/adma.202106248] [Citation(s) in RCA: 7] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/10/2021] [Revised: 10/20/2021] [Indexed: 06/13/2023]
Abstract
From ultrasensitive detectors of fundamental forces to quantum networks and sensors, mechanical resonators are enabling next-generation technologies to operate in room-temperature environments. Currently, silicon nitride nanoresonators stand as a leading microchip platform in these advances by allowing for mechanical resonators whose motion is remarkably isolated from ambient thermal noise. However, to date, human intuition has remained the driving force behind design processes. Here, inspired by nature and guided by machine learning, a spiderweb nanomechanical resonator is developed that exhibits vibration modes, which are isolated from ambient thermal environments via a novel "torsional soft-clamping" mechanism discovered by the data-driven optimization algorithm. This bioinspired resonator is then fabricated, experimentally confirming a new paradigm in mechanics with quality factors above 1 billion in room-temperature environments. In contrast to other state-of-the-art resonators, this milestone is achieved with a compact design that does not require sub-micrometer lithographic features or complex phononic bandgaps, making it significantly easier and cheaper to manufacture at large scales. These results demonstrate the ability of machine learning to work in tandem with human intuition to augment creative possibilities and uncover new strategies in computing and nanotechnology.
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Affiliation(s)
- Dongil Shin
- Faculty of Mechanical, Maritime and Materials Engineering, Department of Materials Science and Engineering, Delft University of Technology, Delft, 2628 CD, The Netherlands
- Faculty of Mechanical, Maritime and Materials Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, 2628 CD, The Netherlands
| | - Andrea Cupertino
- Faculty of Mechanical, Maritime and Materials Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, 2628 CD, The Netherlands
| | - Matthijs H J de Jong
- Faculty of Mechanical, Maritime and Materials Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, 2628 CD, The Netherlands
- Faculty of Applied Sciences, Department of Quantum Nanoscience, Kavli Institute of Nanoscience, Delft University of Technology, Delft, 2628 CD, The Netherlands
| | - Peter G Steeneken
- Faculty of Mechanical, Maritime and Materials Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, 2628 CD, The Netherlands
- Faculty of Applied Sciences, Department of Quantum Nanoscience, Kavli Institute of Nanoscience, Delft University of Technology, Delft, 2628 CD, The Netherlands
| | - Miguel A Bessa
- Faculty of Mechanical, Maritime and Materials Engineering, Department of Materials Science and Engineering, Delft University of Technology, Delft, 2628 CD, The Netherlands
| | - Richard A Norte
- Faculty of Mechanical, Maritime and Materials Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, 2628 CD, The Netherlands
- Faculty of Applied Sciences, Department of Quantum Nanoscience, Kavli Institute of Nanoscience, Delft University of Technology, Delft, 2628 CD, The Netherlands
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16
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López-Cabrelles J, Mañas-Valero S, Vitórica-Yrezábal IJ, Šiškins M, Lee M, Steeneken PG, van der Zant HSJ, Mínguez Espallargas G, Coronado E. Chemical Design and Magnetic Ordering in Thin Layers of 2D Metal-Organic Frameworks (MOFs). J Am Chem Soc 2021; 143:18502-18510. [PMID: 34723487 PMCID: PMC8587609 DOI: 10.1021/jacs.1c07802] [Citation(s) in RCA: 13] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/26/2021] [Indexed: 11/28/2022]
Abstract
Through rational chemical design, and thanks to the hybrid nature of metal-organic frameworks (MOFs), it is possible to prepare molecule-based 2D magnetic materials stable at ambient conditions. Here, we illustrate the versatility of this approach by changing both the metallic nodes and the ligands in a family of layered MOFs that allows the tuning of their magnetic properties. Specifically, the reaction of benzimidazole-type ligands with different metal centers (MII = Fe, Co, Mn, Zn) in a solvent-free synthesis produces a family of crystalline materials, denoted as MUV-1(M), which order antiferromagnetically with critical temperatures that depend on M. Furthermore, the incorporation of additional substituents in the ligand results in a novel system, denoted as MUV-8, formed by covalently bound magnetic double layers interconnected by van der Waals interactions, a topology that is very rare in the field of 2D materials and unprecedented for 2D magnets. These layered materials are robust enough to be mechanically exfoliated down to a few layers with large lateral dimensions. Finally, the robustness and crystallinity of these layered MOFs allow the fabrication of nanomechanical resonators that can be used to detect─through laser interferometry─the magnetic order in thin layers of these 2D molecule-based antiferromagnets.
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Affiliation(s)
- Javier López-Cabrelles
- Instituto
de Ciencia Molecular (ICMol), Universidad
de Valencia, c/Catedrático
José Beltrán, 2, 46980 Paterna, Spain
| | - Samuel Mañas-Valero
- Instituto
de Ciencia Molecular (ICMol), Universidad
de Valencia, c/Catedrático
José Beltrán, 2, 46980 Paterna, Spain
| | | | - Makars Šiškins
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Martin Lee
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Guillermo Mínguez Espallargas
- Instituto
de Ciencia Molecular (ICMol), Universidad
de Valencia, c/Catedrático
José Beltrán, 2, 46980 Paterna, Spain
| | - Eugenio Coronado
- Instituto
de Ciencia Molecular (ICMol), Universidad
de Valencia, c/Catedrático
José Beltrán, 2, 46980 Paterna, Spain
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17
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Dolleman R, Chakraborty D, Ladiges DR, van der Zant HSJ, Sader JE, Steeneken PG. Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit. Nano Lett 2021; 21:7617-7624. [PMID: 34461013 PMCID: PMC8461654 DOI: 10.1021/acs.nanolett.1c02237] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/10/2021] [Revised: 08/23/2021] [Indexed: 06/13/2023]
Abstract
The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high-frequency motion. This effect is particularly large in low-mass graphene membranes, which makes them promising candidates for pressure-sensing applications. Here, we study the squeeze-film effect in single-layer graphene resonators and find that their resonance frequency is lower than expected from models assuming ideal compression. To understand this deviation, we perform Boltzmann and continuum finite-element simulations and propose an improved model that includes the effects of gas leakage and can account for the observed pressure dependence of the resonance frequency. Thus, this work provides further understanding of the squeeze-film effect and provides further directions into optimizing the design of squeeze-film pressure sensors from 2D materials.
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Affiliation(s)
- Robin
J. Dolleman
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands
- ARC
Centre of Excellence in Exciton Science, School of Mathematics and
Statistics, The University of Melbourne, Melbourne, Victoria 3010, Australia
| | - Debadi Chakraborty
- ARC
Centre of Excellence in Exciton Science, School of Mathematics and
Statistics, The University of Melbourne, Melbourne, Victoria 3010, Australia
| | - Daniel R. Ladiges
- ARC
Centre of Excellence in Exciton Science, School of Mathematics and
Statistics, The University of Melbourne, Melbourne, Victoria 3010, Australia
- Center
for Computational Sciences and Engineering, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, United States
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands
| | - John E. Sader
- ARC
Centre of Excellence in Exciton Science, School of Mathematics and
Statistics, The University of Melbourne, Melbourne, Victoria 3010, Australia
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
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18
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Afanasiev D, Hortensius JR, Matthiesen M, Mañas-Valero S, Šiškins M, Lee M, Lesne E, van der Zant HSJ, Steeneken PG, Ivanov BA, Coronado E, Caviglia AD. Controlling the anisotropy of a van der Waals antiferromagnet with light. Sci Adv 2021; 7:eabf3096. [PMID: 34078601 PMCID: PMC8172129 DOI: 10.1126/sciadv.abf3096] [Citation(s) in RCA: 26] [Impact Index Per Article: 8.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/17/2020] [Accepted: 04/16/2021] [Indexed: 05/26/2023]
Abstract
Van der Waals magnets provide an ideal playground to explore the fundamentals of low-dimensional magnetism and open opportunities for ultrathin spin-processing devices. The Mermin-Wagner theorem dictates that as in reduced dimensions isotropic spin interactions cannot retain long-range correlations, the long-range spin order is stabilized by magnetic anisotropy. Here, using ultrashort pulses of light, we control magnetic anisotropy in the two-dimensional van der Waals antiferromagnet NiPS3 Tuning the photon energy in resonance with an orbital transition between crystal field split levels of the nickel ions, we demonstrate the selective activation of a subterahertz magnon mode with markedly two-dimensional behavior. The pump polarization control of the magnon amplitude confirms that the activation is governed by the photoinduced magnetic anisotropy axis emerging in response to photoexcitation of ground state electrons to states with a lower orbital symmetry. Our results establish pumping of orbital resonances as a promising route for manipulating magnetic order in low-dimensional (anti)ferromagnets.
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Affiliation(s)
- Dmytro Afanasiev
- Kavli Institute of Nanoscience, Delft University of Technology, P.O. Box 5046, 2600 GA Delft, Netherlands.
- Department of Physics, University of Regensburg, Regensburg, Germany
| | - Jorrit R Hortensius
- Kavli Institute of Nanoscience, Delft University of Technology, P.O. Box 5046, 2600 GA Delft, Netherlands
| | - Mattias Matthiesen
- Kavli Institute of Nanoscience, Delft University of Technology, P.O. Box 5046, 2600 GA Delft, Netherlands
| | - Samuel Mañas-Valero
- Instituto de Ciencia Molecular (ICMol), Universitat de Valencia Catedrático José Beltrán 2, 46980 Paterna, Spain
| | - Makars Šiškins
- Kavli Institute of Nanoscience, Delft University of Technology, P.O. Box 5046, 2600 GA Delft, Netherlands
| | - Martin Lee
- Kavli Institute of Nanoscience, Delft University of Technology, P.O. Box 5046, 2600 GA Delft, Netherlands
| | - Edouard Lesne
- Kavli Institute of Nanoscience, Delft University of Technology, P.O. Box 5046, 2600 GA Delft, Netherlands
| | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology, P.O. Box 5046, 2600 GA Delft, Netherlands
| | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology, P.O. Box 5046, 2600 GA Delft, Netherlands
| | - Boris A Ivanov
- Institute of Magnetism, National Academy of Sciences and Ministry of Education and Science, 03142 Kyiv, Ukraine
| | - Eugenio Coronado
- Instituto de Ciencia Molecular (ICMol), Universitat de Valencia Catedrático José Beltrán 2, 46980 Paterna, Spain
| | - Andrea D Caviglia
- Kavli Institute of Nanoscience, Delft University of Technology, P.O. Box 5046, 2600 GA Delft, Netherlands
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19
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Romijn J, Dolleman RJ, Singh M, van der Zant HSJ, Steeneken PG, Sarro PM, Vollebregt S. Multi-layer graphene pirani pressure sensors. Nanotechnology 2021; 32:335501. [PMID: 33971630 DOI: 10.1088/1361-6528/abff8e] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/03/2021] [Accepted: 05/10/2021] [Indexed: 06/12/2023]
Abstract
The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are required, but also minimization of the suspended strip dimensions is essential to maximize the responsivity and minimize the power consumption. Due to this, nanomaterials are especially attractive for this application. Here, we demonstrate the use of a multi-layer suspended graphene strip as a Pirani pressure sensor and compare its behavior with existing models. A clear pressure dependence of the strip's electrical resistance is observed, with a maximum relative change of 2.75% between 1 and 1000 mbar and a power consumption of 8.5 mW. The use of graphene enables miniaturization of the device footprint by 100 times compared to state-of-the-art. Moreover, miniaturization allows for lower power consumption and/or higher responsivity and the sensor's nanogap enables operation near atmospheric pressure that can be used in applications such as barometers for altitude measurement. Furthermore, we demonstrate that the sensor response depends on the type of gas molecules, which opens up the way to selective gas sensing applications. Finally, the graphene synthesis technology is compatible with wafer-scale fabrication, potentially enabling future chip-level integration with readout electronics.
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Affiliation(s)
- Joost Romijn
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, The Netherlands
| | | | - Manvika Singh
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, The Netherlands
| | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, The Netherlands
| | - Peter G Steeneken
- Kavli Institute of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, The Netherlands
- Department of Precision and Microsystems Engineering (PME), Delft University of Technology, The Netherlands
| | - Pasqualina M Sarro
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, The Netherlands
| | - Sten Vollebregt
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, The Netherlands
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20
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Keşkekler A, Shoshani O, Lee M, van der Zant HSJ, Steeneken PG, Alijani F. Tuning nonlinear damping in graphene nanoresonators by parametric-direct internal resonance. Nat Commun 2021; 12:1099. [PMID: 33597524 PMCID: PMC7889630 DOI: 10.1038/s41467-021-21334-w] [Citation(s) in RCA: 14] [Impact Index Per Article: 4.7] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/08/2020] [Accepted: 01/18/2021] [Indexed: 11/09/2022] Open
Abstract
Mechanical sources of nonlinear damping play a central role in modern physics, from solid-state physics to thermodynamics. The microscopic theory of mechanical dissipation suggests that nonlinear damping of a resonant mode can be strongly enhanced when it is coupled to a vibration mode that is close to twice its resonance frequency. To date, no experimental evidence of this enhancement has been realized. In this letter, we experimentally show that nanoresonators driven into parametric-direct internal resonance provide supporting evidence for the microscopic theory of nonlinear dissipation. By regulating the drive level, we tune the parametric resonance of a graphene nanodrum over a range of 40–70 MHz to reach successive two-to-one internal resonances, leading to a nearly two-fold increase of the nonlinear damping. Our study opens up a route towards utilizing modal interactions and parametric resonance to realize resonators with engineered nonlinear dissipation over wide frequency range. Nonlinear dissipation is frequently observed in nanomechanical resonators, but its microscopic origin remains unclear. Here, nonlinear damping is found to be enhanced in graphene nanodrums close to internal resonance conditions, providing insights on the mechanisms at the basis of this phenomenon.
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Affiliation(s)
- Ata Keşkekler
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft, 2628 CD, The Netherlands.
| | - Oriel Shoshani
- Department of Mechanical Engineering, Ben-Gurion University of Negev, Beersheba, Israel
| | - Martin Lee
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Peter G Steeneken
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft, 2628 CD, The Netherlands.,Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - Farbod Alijani
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft, 2628 CD, The Netherlands.
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21
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Rosłoń IE, Dolleman RJ, Licona H, Lee M, Šiškins M, Lebius H, Madauß L, Schleberger M, Alijani F, van der Zant HSJ, Steeneken PG. High-frequency gas effusion through nanopores in suspended graphene. Nat Commun 2020; 11:6025. [PMID: 33247123 PMCID: PMC7695699 DOI: 10.1038/s41467-020-19893-5] [Citation(s) in RCA: 15] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/04/2020] [Accepted: 10/29/2020] [Indexed: 12/02/2022] Open
Abstract
Porous, atomically thin graphene membranes have interesting properties for filtration and sieving applications. Here, graphene membranes are used to pump gases through nanopores using optothermal forces, enabling the study of gas flow through nanopores at frequencies above 100 kHz. At these frequencies, the motion of graphene is closely linked to the dynamic gas flow through the nanopore and can thus be used to study gas permeation at the nanoscale. By monitoring the time delay between the actuation force and the membrane mechanical motion, the permeation time-constants of various gases through pores with diameters from 10–400 nm are shown to be significantly different. Thus, a method is presented for differentiating gases based on their molecular mass and for studying gas flow mechanisms. The presented microscopic effusion-based gas sensing methodology provides a nanomechanical alternative for large-scale mass-spectrometry and optical spectrometry based gas characterisation methods. Atomically thin porous graphene is promising for filtration and sieving applications. Here the authors, using a laser-actuated micro-drum device of bilayer graphene with controlled number of nanopores, and measuring the permeation rate of different gases, show that it can also be used for permeation-based sensing.
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Affiliation(s)
- I E Rosłoń
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands. .,Department of Precision and Microsystem Engineering, Faculty 3mE, Delft University of Technology, Mekelweg 2, Delft, 2628 CD, The Netherlands.
| | - R J Dolleman
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands.,Second Institute of Physics, RWTH Aachen University, Aachen, 52074, Germany
| | - H Licona
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - M Lee
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - M Šiškins
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - H Lebius
- CIMAP/GANIL, CEA-CNRS-ENSICAEN-UCN, blvd Henri Becquerel, Caen, F-14070, France
| | - L Madauß
- Faculty of Physics and CENIDE, Universität Duisburg-Essen, Duisburg, 47057, Germany
| | - M Schleberger
- Faculty of Physics and CENIDE, Universität Duisburg-Essen, Duisburg, 47057, Germany
| | - F Alijani
- Department of Precision and Microsystem Engineering, Faculty 3mE, Delft University of Technology, Mekelweg 2, Delft, 2628 CD, The Netherlands
| | - H S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands
| | - P G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, Delft, 2628 CJ, The Netherlands. .,Department of Precision and Microsystem Engineering, Faculty 3mE, Delft University of Technology, Mekelweg 2, Delft, 2628 CD, The Netherlands.
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22
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Šiškins M, Lee M, Wehenkel D, van Rijn R, de Jong TW, Renshof JR, Hopman BC, Peters WSJM, Davidovikj D, van der Zant HSJ, Steeneken PG. Sensitive capacitive pressure sensors based on graphene membrane arrays. Microsyst Nanoeng 2020; 6:102. [PMID: 34567711 PMCID: PMC8433463 DOI: 10.1038/s41378-020-00212-3] [Citation(s) in RCA: 12] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/29/2020] [Revised: 08/12/2020] [Accepted: 09/06/2020] [Indexed: 06/01/2023]
Abstract
The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa-1 mm-2, thereby outperforming the commercial sensors.
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Affiliation(s)
- Makars Šiškins
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Martin Lee
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | | | - Richard van Rijn
- Applied Nanolayers B.V., Feldmannweg 17, 2628 CT Delft, The Netherlands
| | - Tijmen W. de Jong
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Johannes R. Renshof
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Berend C. Hopman
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Willemijn S. J. M. Peters
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Dejan Davidovikj
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
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23
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Šiškins M, Lee M, Mañas-Valero S, Coronado E, Blanter YM, van der Zant HSJ, Steeneken PG. Magnetic and electronic phase transitions probed by nanomechanical resonators. Nat Commun 2020; 11:2698. [PMID: 32483113 PMCID: PMC7264344 DOI: 10.1038/s41467-020-16430-2] [Citation(s) in RCA: 38] [Impact Index Per Article: 9.5] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/23/2020] [Accepted: 04/28/2020] [Indexed: 11/09/2022] Open
Abstract
The reduced dimensionality of two-dimensional (2D) materials results in characteristic types of magnetically and electronically ordered phases. However, only few methods are available to study this order, in particular in ultrathin insulating antiferromagnets that couple weakly to magnetic and electronic probes. Here, we demonstrate that phase transitions in thin membranes of 2D antiferromagnetic FePS3, MnPS3 and NiPS3 can be probed mechanically via the temperature-dependent resonance frequency and quality factor. The observed relation between mechanical motion and antiferromagnetic order is shown to be mediated by the specific heat and reveals a strong dependence of the Néel temperature of FePS3 on electrostatically induced strain. The methodology is not restricted to magnetic order, as we demonstrate by probing an electronic charge-density-wave phase in 2H-TaS2. It thus offers the potential to characterize phase transitions in a wide variety of materials, including those that are antiferromagnetic, insulating or so thin that conventional bulk characterization methods become unsuitable.
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Affiliation(s)
- Makars Šiškins
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands.
| | - Martin Lee
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Samuel Mañas-Valero
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Eugenio Coronado
- Instituto de Ciencia Molecular (ICMol), Universitat de València, c/Catedrático José Beltrán 2, 46980, Paterna, Spain
| | - Yaroslav M Blanter
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands.
| | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands. .,Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands.
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24
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Lemme MC, Wagner S, Lee K, Fan X, Verbiest GJ, Wittmann S, Lukas S, Dolleman RJ, Niklaus F, van der Zant HSJ, Duesberg GS, Steeneken PG. Nanoelectromechanical Sensors Based on Suspended 2D Materials. Research (Wash D C) 2020; 2020:8748602. [PMID: 32766550 PMCID: PMC7388062 DOI: 10.34133/2020/8748602] [Citation(s) in RCA: 36] [Impact Index Per Article: 9.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/11/2020] [Accepted: 04/23/2020] [Indexed: 01/09/2023]
Abstract
The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.
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Affiliation(s)
- Max C. Lemme
- Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany
- AMO GmbH, Advanced Microelectronic Center Aachen (AMICA), Otto-Blumenthal-Str. 25, 52074 Aachen, Germany
| | - Stefan Wagner
- AMO GmbH, Advanced Microelectronic Center Aachen (AMICA), Otto-Blumenthal-Str. 25, 52074 Aachen, Germany
| | - Kangho Lee
- Institute of Physics, Faculty of Electrical Engineering and Information Technology, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany
| | - Xuge Fan
- Division of Micro and Nanosystems, KTH Royal Institute of Technology, Malvinas Väg 10, 10044 Stockholm, Sweden
| | - Gerard J. Verbiest
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, Netherlands
| | | | - Sebastian Lukas
- Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany
| | - Robin J. Dolleman
- 2nd Institute of Physics, RWTH Aachen University, Otto-Blumenthal-Str., 52074 Aachen, Germany
| | - Frank Niklaus
- Division of Micro and Nanosystems, KTH Royal Institute of Technology, Malvinas Väg 10, 10044 Stockholm, Sweden
| | - Herre S. J. van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, Netherlands
| | - Georg S. Duesberg
- Institute of Physics, Faculty of Electrical Engineering and Information Technology, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany
| | - Peter G. Steeneken
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, Netherlands
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, Netherlands
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25
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Šiškins M, Lee M, Alijani F, van Blankenstein MR, Davidovikj D, van der Zant HSJ, Steeneken PG. Highly Anisotropic Mechanical and Optical Properties of 2D Layered As 2S 3 Membranes. ACS Nano 2019; 13:10845-10851. [PMID: 31415148 PMCID: PMC6764108 DOI: 10.1021/acsnano.9b06161] [Citation(s) in RCA: 19] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/05/2019] [Accepted: 08/15/2019] [Indexed: 05/26/2023]
Abstract
Two-dimensional (2D) materials with strong in-plane anisotropy are of interest for enabling orientation-dependent, frequency-tunable, optomechanical devices. However, black phosphorus (bP), the 2D material with the largest anisotropy to date, is unstable as it degrades in air. In this work we show that As2S3 is an interesting alternative, with a similar anisotropy to bP, while at the same time having a much higher chemical stability. We probe the mechanical and optical anisotropy in As2S3 by three distinct angular-resolved experimental methods: Raman spectroscopy, atomic force microscopy (AFM), and resonance frequency analysis. Using a dedicated angle-resolved AFM force-deflection method, an in-plane anisotropy factor of [Formula: see text] is found in the Young's modulus of As2S3 with Ea-axis = 79.1 ± 10.1 GPa and Ec-axis = 47.2 ± 7.9 GPa. The high mechanical anisotropy is also shown to cause up to 65% difference in the resonance frequency, depending on crystal orientation and aspect ratio of membranes.
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Affiliation(s)
- Makars Šiškins
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Martin Lee
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Farbod Alijani
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628
CD Delft, The Netherlands
| | - Mark R. van Blankenstein
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Dejan Davidovikj
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628
CD Delft, The Netherlands
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26
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Abstract
Despite theoretical predictions that graphene should be impermeable to all gases, practical experiments on sealed graphene nanodrums show small leak rates. Thus far, the exact mechanism for this permeation has remained unclear, because different potential leakage pathways have not been studied separately. Here, we demonstrate a sealing method that consists of depositing SiO2 across the edge of suspended multilayer graphene flakes using electron beam-induced deposition. By sealing, leakage along the graphene-SiO2 interface is blocked, which is observed to result in a reduction in permeation rate by a factor of 104. The experiments thus demonstrate that gas flow along the graphene-SiO2 interface tends to dominate the leak rate in unsealed graphene nanodrums. Moreover, the presented sealing method enables the study of intrinsic gas leakage through graphene membranes and can enable hermetic graphene membranes for pressure sensing applications.
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Affiliation(s)
- Martin Lee
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Dejan Davidovikj
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Banafsheh Sajadi
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
| | - Makars Šiškins
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Farbod Alijani
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
- E-mail:
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27
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Dolleman R, Belardinelli P, Houri S, van der Zant HSJ, Alijani F, Steeneken PG. High-Frequency Stochastic Switching of Graphene Resonators Near Room Temperature. Nano Lett 2019; 19:1282-1288. [PMID: 30681865 PMCID: PMC6391039 DOI: 10.1021/acs.nanolett.8b04862] [Citation(s) in RCA: 19] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/05/2018] [Revised: 01/25/2019] [Indexed: 05/05/2023]
Abstract
Stochastic switching between the two bistable states of a strongly driven mechanical resonator enables detection of weak signals based on probability distributions, in a manner that mimics biological systems. However, conventional silicon resonators at the microscale require a large amount of fluctuation power to achieve a switching rate in the order of a few hertz. Here, we employ graphene membrane resonators of atomic thickness to achieve a stochastic switching rate of 4.1 kHz, which is 100 times faster than current state-of-the-art. The (effective) temperature of the fluctuations is approximately 400 K, which is 3000 times lower than the state-of-the-art. This shows that these membranes are potentially useful to transduce weak signals in the audible frequency domain. Furthermore, we perform numerical simulations to understand the transition dynamics of the resonator and use analytical expressions to investigate the relevant scaling parameters that allow high-frequency, low-temperature stochastic switching to be achieved in mechanical resonators.
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Affiliation(s)
- Robin
J. Dolleman
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Pierpaolo Belardinelli
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Samer Houri
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Farbod Alijani
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
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28
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Sartori AF, Belardinelli P, Dolleman RJ, Steeneken PG, Ghatkesar MK, Buijnsters JG. Inkjet-Printed High-Q Nanocrystalline Diamond Resonators. Small 2019; 15:e1803774. [PMID: 30566284 DOI: 10.1002/smll.201803774] [Citation(s) in RCA: 12] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/13/2018] [Revised: 11/09/2018] [Indexed: 06/09/2023]
Abstract
Diamond is a highly desirable material for state-of-the-art micro-electromechanical (MEMS) devices, radio-frequency filters and mass sensors, due to its extreme properties and robustness. However, the fabrication/integration of diamond structures into Si-based components remain costly and complex. In this work, a lithography-free, low-cost method is introduced to fabricate diamond-based micro-resonators: a modified home/office desktop inkjet printer is used to locally deposit nanodiamond ink as ∅50-60 µm spots, which are grown into ≈1 µm thick nanocrystalline diamond film disks by chemical vapor deposition, and suspended by reactive ion etching. The frequency response of the fabricated structures is analyzed by laser interferometry, showing resonance frequencies in the range of ≈9-30 MHz, with Q-factors exceeding 104 , and (f0 × Q) figure of merit up to ≈2.5 × 1011 Hz in vacuum. Analysis in controlled atmospheres shows a clear dependence of the Q-factors on gas pressure up until 1 atm, with Q ∝ 1/P. When applied as mass sensors, the inkjet-printed diamond resonators yield mass responsivities up to 981 Hz fg-1 after Au deposition, and ultrahigh mass resolution up to 278 ± 48 zg, thus outperforming many similar devices produced by traditional top-down, lithography-based techniques. In summary, this work demonstrates the fabrication of functional high-performance diamond-based micro-sensors by direct inkjet printing.
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Affiliation(s)
- André F Sartori
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628, CD, Delft, The Netherlands
| | - Pierpaolo Belardinelli
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628, CD, Delft, The Netherlands
| | - Robin J Dolleman
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628, CD, Delft, The Netherlands
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628, CJ, Delft, The Netherlands
| | - Peter G Steeneken
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628, CD, Delft, The Netherlands
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628, CJ, Delft, The Netherlands
| | - Murali K Ghatkesar
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628, CD, Delft, The Netherlands
| | - Josephus G Buijnsters
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628, CD, Delft, The Netherlands
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29
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Dolleman RJ, Houri S, Chandrashekar A, Alijani F, van der Zant HSJ, Steeneken PG. Opto-thermally excited multimode parametric resonance in graphene membranes. Sci Rep 2018; 8:9366. [PMID: 29921917 PMCID: PMC6008417 DOI: 10.1038/s41598-018-27561-4] [Citation(s) in RCA: 32] [Impact Index Per Article: 5.3] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/20/2018] [Accepted: 06/01/2018] [Indexed: 11/08/2022] Open
Abstract
In the field of nanomechanics, parametric excitations are of interest since they can greatly enhance sensing capabilities and eliminate cross-talk. Above a certain threshold of the parametric pump, the mechanical resonator can be brought into parametric resonance. Here we demonstrate parametric resonance of suspended single-layer graphene membranes by an efficient opto-thermal drive that modulates the intrinsic spring constant. With a large amplitude of the optical drive, a record number of 14 mechanical modes can be brought into parametric resonance by modulating a single parameter: the pre-tension. A detailed analysis of the parametric resonance allows us to study nonlinear dynamics and the loss tangent of graphene resonators. It is found that nonlinear damping, of the van der Pol type, is essential to describe the high amplitude parametric resonance response in atomically thin membranes.
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Affiliation(s)
- Robin J Dolleman
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands.
| | - Samer Houri
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
- NTT Basic Research Laboratories, NTT Corporation, 3-1, Morinosato Wakamiya, Atsugi, Kanagawa, 243-0198, Japan
| | - Abhilash Chandrashekar
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Farbod Alijani
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands.
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands.
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30
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Abstract
For the study and application of graphene membranes, it is essential to have means to control their resonance frequency and temperature. Here, we present an on-chip heater platform for local tuning of in-plane tension in graphene mechanical resonators. By Joule heating of a metallic suspension ring we show thermomechanical resonance frequency tuning in a few-layer (FL) graphene nanodrum, which is accompanied by an increase in its quality factor, which we attribute to the increase of the in-plane tension. The in situ control of temperature, in-plane tension, resonance frequency, and quality factor of suspended two-dimensional (2D) nanodrums makes this device a unique platform for investigating the origin of dissipation in these ultrathin structures and can be of fundamental importance for studying the thermal properties of 2D materials. Moreover, by simultaneously controlling the heater and the backgate voltage, we can independently control the resonance frequency and quality factor, which is of great importance for applications in sensors and resonant mechanical filters.
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Affiliation(s)
- Dejan Davidovikj
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- E-mail:
| | - Menno Poot
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Physik
Department, Technische Universität
München, 85748 Garching, Germany
- Institute
for Advanced Study, Universität München, 85748 Garching, Germany
- E-mail:
| | - Santiago J. Cartamil-Bueno
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
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31
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Davidovikj D, Scheepers PH, van der Zant HSJ, Steeneken PG. Static Capacitive Pressure Sensing Using a Single Graphene Drum. ACS Appl Mater Interfaces 2017; 9:43205-43210. [PMID: 29164848 DOI: 10.1021/acsami.7b17487] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/05/2023]
Abstract
To realize nanomechanical graphene-based pressure sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electromechanical systems, gets increasingly challenging as one starts shrinking the dimensions of these devices because the expected responsivity of such devices is below 0.1 aF/Pa. To overcome the challenges of detecting small capacitance changes, we design an electrical readout device fabricated on top of an insulating quartz substrate, maximizing the contribution of the suspended membrane to the total capacitance of the device. The capacitance of the drum is further increased by reducing the gap size to 110 nm. Using an external pressure load, we demonstrate the successful detection of capacitance changes of a single graphene drum down to 50 aF, and pressure differences down to 25 mbar.
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Affiliation(s)
- Dejan Davidovikj
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Paul H Scheepers
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Department of Precision and Microsystems Engineering, Delft University of Technology , Mekelweg 2, 2628 CD Delft, The Netherlands
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32
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Agarwal V, Dutta S, Annema AJ, Hueting RJE, Steeneken PG, Nauta B. Low power wide spectrum optical transmitter using avalanche mode LEDs in SOI CMOS technology. Opt Express 2017; 25:16981-16995. [PMID: 28789197 DOI: 10.1364/oe.25.016981] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/17/2017] [Accepted: 05/22/2017] [Indexed: 06/07/2023]
Abstract
This paper presents a low power monolithically integrated optical transmitter with avalanche mode light emitting diodes in a 140 nm silicon-on-insulator CMOS technology. Avalanche mode LEDs in silicon exhibit wide-spectrum electroluminescence (400 nm < λ < 850 nm), which has a significant overlap with the responsivity of silicon photodiodes. This enables monolithic CMOS integration of optocouplers, for e.g. smart power applications requiring high data rate communication with a large galvanic isolation. To ensure a certain minimum number of photons per data pulse (or per bit), light emitting diode drivers must be robust against process, operating conditions and temperature variations of the light emitting diode. Combined with the avalanche mode light emitting diode's steep current-voltage curve at relatively high breakdown voltages, this conventionally results in high power consumption and significant heating. The presented transmitter circuit is intrinsically robust against these issues, thereby enabling low power operation.
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Cartamil-Bueno SJ, Steeneken PG, Centeno A, Zurutuza A, van der Zant HSJ, Houri S. Colorimetry Technique for Scalable Characterization of Suspended Graphene. Nano Lett 2016; 16:6792-6796. [PMID: 27709957 DOI: 10.1021/acs.nanolett.6b02416] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/11/2023]
Abstract
Previous statistical studies on the mechanical properties of chemical-vapor-deposited (CVD) suspended graphene membranes have been performed by means of measuring individual devices or with techniques that affect the material. Here, we present a colorimetry technique as a parallel, noninvasive, and affordable way of characterizing suspended graphene devices. We exploit Newton's rings interference patterns to study the deformation of a double-layer graphene drum 13.2 μm in diameter when a pressure step is applied. By studying the time evolution of the deformation, we find that filling the drum cavity with air is 2-5 times slower than when it is purged.
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Affiliation(s)
- Santiago J Cartamil-Bueno
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands
| | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands
| | - Alba Centeno
- Graphenea SA , 20018 Donostia-San Sebastián, Spain
| | | | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands
| | - Samer Houri
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands
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34
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Abstract
Membranes of suspended two-dimensional materials show a large variability in mechanical properties, in part due to static and dynamic wrinkles. As a consequence, experiments typically show a multitude of nanomechanical resonance peaks, which make an unambiguous identification of the vibrational modes difficult. Here, we probe the motion of graphene nanodrum resonators with spatial resolution using a phase-sensitive interferometer. By simultaneously visualizing the local phase and amplitude of the driven motion, we show that unexplained spectral features represent split degenerate modes. When taking these into account, the resonance frequencies up to the eighth vibrational mode agree with theory. The corresponding displacement profiles, however, are remarkably different from theory, as small imperfections increasingly deform the nodal lines for the higher modes. The Brownian motion, which is used to calibrate the local displacement, exhibits a similar mode pattern. The experiments clarify the complicated dynamic behavior of suspended two-dimensional materials, which is crucial for reproducible fabrication and applications.
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Affiliation(s)
- Dejan Davidovikj
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Jesse J Slim
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Santiago J Cartamil-Bueno
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Warner J Venstra
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628 CJ, Delft, The Netherlands
- Quantified Air, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
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35
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Abstract
The operating principle of squeeze-film pressure sensors is based on the pressure dependence of a membrane's resonance frequency, caused by the compression of the surrounding gas which changes the resonator stiffness. To realize such sensors, not only strong and flexible membranes are required, but also minimization of the membrane's mass is essential to maximize responsivity. Here, we demonstrate the use of a few-layer graphene membrane as a squeeze-film pressure sensor. A clear pressure dependence of the membrane's resonant frequency is observed, with a frequency shift of 4 MHz between 8 and 1000 mbar. The sensor shows a reproducible response and no hysteresis. The measured responsivity of the device is 9000 Hz/mbar, which is a factor 45 higher than state-of-the-art MEMS-based squeeze-film pressure sensors while using a 25 times smaller membrane area.
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Affiliation(s)
- Robin J Dolleman
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands
| | - Dejan Davidovikj
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands
| | - Santiago J Cartamil-Bueno
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands
| | - Herre S J van der Zant
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands
| | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology , Lorentzweg 1, 2628CJ, Delft, The Netherlands
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36
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van den Ende D, Kamminga JD, Boersma A, Andritsch T, Steeneken PG. Voltage-controlled surface wrinkling of elastomeric coatings. Adv Mater 2013; 25:3438-3442. [PMID: 23703838 DOI: 10.1002/adma.201300459] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/28/2013] [Revised: 03/29/2013] [Indexed: 06/02/2023]
Abstract
Wrinkling of elastomeric coatings by an electric field is reported. The associated changes in the coating's optical properties yield switchable mirrors and windows. The field Ec needed to induce wrinkling is a factor of 4.4 lower than the theoretically predicted value, which is attributed to space-charge injection.
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37
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van Beek JT, van Delden MH, van Dijken A, van Eerd P, Jansman AB, Kemmeren AL, Rijks TG, Steeneken PG, den Toonder J, Ulenaers MJ, den Dekker A, Lok P, Pulsford N, van Straten F, van Teeffelen L, de Coster J, Puers R. High-Q integrated RF passives and RF-MEMS on silicon. ACTA ACUST UNITED AC 2011. [DOI: 10.1557/proc-783-b3.1] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/13/2022]
Abstract
ABSTRACTA technology platform is described for the integration of low-loss inductors, capacitors, and MEMS capacitors on a high-resistivity Si substrate. Using this platform the board space area taken up by e.g. a DCS PA output impedance matching circuit can be reduced by 50%. The losses of passive components that are induced by the semi-conducting Si substrate can effectively be suppressed using a combination of surface amorphisation and the use of poly crystalline Si substrates. A MEM switchable capacitor with a capacitance switching factor of 40 and an actuation voltage of 5V is demonstrated. A continuous tuneable dual-gap capacitor is demonstrated with a tuning ratio of 9 using actuation voltages below 15V.
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Steeneken PG, Tjeng LH, Sawatzky GA, Tanaka A, Tjernberg O, Ghiringhelli G, Brookes NB, Nugroho AA, Menovsky AA. Crossing the gap from p- to n-type doping: nature of the states near the chemical potential in La(2)-(x)Sr(x)CuO(4) and Nd(2-x)Ce(x)CuO(4-delta). Phys Rev Lett 2003; 90:247005. [PMID: 12857219 DOI: 10.1103/physrevlett.90.247005] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/02/2003] [Indexed: 05/24/2023]
Abstract
We report on an x-ray absorption and resonant photoemission study on single crystals of the high-T(c) cuprates La2-xSrxCuO4 and Nd(2-x)Ce(x)CuO(4-delta). Using an intrinsic energy reference, we find that the chemical potential of La2-xSrxCuO4 lies near the top of the La2CuO4 valence band whereas in Nd(2-x)Ce(x)CuO(4-delta) it is situated near the bottom of the Nd2CuO4 conduction band. The data clearly establish that the introduction of Ce in Nd2CuO4 results in electrons being doped into the CuO2 planes. We infer that the states closest to the chemical potential have a Cu 3d(10) singlet origin in Nd(2-x)Ce(x)CuO(4-delta) and a 3d(9)L singlet origin in La2-xSrxCuO4.
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Affiliation(s)
- P G Steeneken
- MSC, University of Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands
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Steeneken PG, Tjeng LH, Elfimov I, Sawatzky GA, Ghiringhelli G, Brookes NB, Huang DJ. Exchange splitting and charge carrier spin polarization in EuO. Phys Rev Lett 2002; 88:047201. [PMID: 11801161 DOI: 10.1103/physrevlett.88.047201] [Citation(s) in RCA: 39] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [What about the content of this article? (0)] [Affiliation(s)] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/28/2001] [Indexed: 05/23/2023]
Abstract
High quality thin films of the ferromagnetic semiconductor EuO have been prepared and were studied using a new form of spin-resolved spectroscopy. We observed large changes in the electronic structure across the Curie and metal-insulator transition temperature. We found that these are caused by the exchange splitting of the conduction band in the ferromagnetic state, which is as large as 0.6 eV. We also present strong evidence that the bottom of the conduction band consists mainly of majority spins. This implies that doped charge carriers in EuO are practically fully spin polarized.
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Affiliation(s)
- P G Steeneken
- Solid State Physics Laboratory, Materials Science Centre, University of Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands
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