Coupling graphene mechanical resonators to superconducting microwave cavities

Unveiling the tradeoff between device scale and surface nonidealities for an optimized quality factor at room temperature in 2D MoS2 nanomechanical resonators

A high quality (Q) factor is essential for enhancing the performance of resonant nanoelectromechanical systems (NEMS). NEMS resonators based on two-dimensional (2D) materials such as molybdenum disulfide (MoS2) have high frequency tunability, large dynamic range, and high sensitivity, yet room-temperature Q factors are typically less than 1000. Here, we systematically investigate the effects of device size and surface nonidealities on Q factor by measuring 52 dry-transferred fully clamped circular MoS2 NEMS resonators with diameters ranging from 1 μm to 8 μm, and optimize the Q factor by combining these effects with the strain-modulated dissipation model. We find that Q factor first increases and then decreases with diameter, with an optimized room-temperature Q factor up to 3315 ± 115 for a 2-μm-diameter device. Through extensive characterization and analysis using Raman spectroscopy, atomic force microscopy, and scanning electron microscopy, we demonstrate that surface nonidealities such as wrinkles, residues, and bubbles are especially significant for decreasing Q factor, especially for larger suspended membranes, while resonators with flat and smooth surfaces typically have larger Q factors. To further optimize Q factors, we measure and model Q factor dependence on the gate voltage, showing that smaller DC and radio-frequency (RF) driving voltages always lead to a higher Q factor, consistent with the strain-modulated dissipation model. This optimization of the Q factor delineates a straightforward and promising pathway for designing high-Q 2D NEMS resonators for ultrasensitive transducers, efficient RF communications, and low-power memory and computing.

Achieving Ultrawide Tunability in Monolithically Fabricated Si Nanoresonator Devices

Nanoresonators are powerful and versatile tools promising to revolutionize a wide range of technological areas by delivering unparalleled performance in physical, chemical, biological sensing, signal and information processing, quantum computation, etc., via their high-frequency resonant vibration and rich dynamic behavior. Having the ability to tune the resonance frequency and dynamic behavior at the application stage promises further improvement in their effectiveness and enables novel applications. However, achieving significant room-temperature tunability in conventional (monolithically fabricated) nanoresonators is considered challenging. Here we demonstrate ultrawide electrostatic tuning (∼70%) of (initial) resonance-frequency (∼7% V-1) at room temperature in a monolithically fabricated ultrathin Si nanoresonator (width ∼ 40 nm, length ∼ 200 μm) device. Extreme electrostatic tuning of nonlinear behavior is also demonstrated by canceling the cubic-nonlinear coefficient and subsequently flipping its sign. Thus, these results are expected to provide remarkable operational flexibility and new capabilities to microfabricated resonators, which will benefit many technological areas.

Probing Linear to Nonlinear Damping in 2D Semiconductor Nanoelectromechanical Resonators toward a Unified Quality Factor Model

In resonant nanoelectromechanical systems (NEMS), the quality (Q) factor is essential for sensing, communication, and computing applications. While a large vibrational amplitude is useful for increasing the signal-to-noise ratio, the damping in this regime is more complex because both linear and nonlinear damping are important, and an accurate model for Q has not been fully explored. Here, we demonstrate that by combining the time-domain ringdown and frequency-domain resonance measurements, we extract the accurate Q for two-dimensional (2D) MoS2 and MoTe2 NEMS resonators at different vibration amplitudes. In particular, in the transition region between linear and nonlinear damping, Q can be precisely extracted by fitting to the ringdown characteristics. By varying AC driving, we tune the Q by ΔQ/Q = 269% and extract the nonlinear damping coefficient. We develop the dissipation model that well captures the linear to nonlinear damping, providing important insights for accurately modeling and optimizing Q in 2D NEMS resonators.

Negative cavity photon spectral function in an optomechanical system with two parametrically-driven mechanical modes

We propose an experimentally feasible optomechanical scheme to realize a negative cavity photon spectral function (CPSF) which is equivalent to a negative absorption. The system under consideration is an optomechanical system consisting of two mechanical (phononic) modes which are linearly coupled to a common cavity mode via the radiation pressure while parametrically driven through the coherent time-modulation of their spring coefficients. Using the equations of motion for the cavity retarded Green's function obtained in the framework of the generalized linear response theory, we show that in the red-detuned and weak-coupling regimes a frequency-dependent effective cavity damping rate (ECDR) corresponding to a negative CPSF can be realized by controlling the cooperativities and modulation parameters while the system still remains in the stable regime. Nevertheless, such a negativity which acts as an optomechanical gain never occurs in a standard (an unmodulated bare) cavity optomechanical system. Besides, we find that the presence of two modulated mechanical degrees of freedom provides more controllability over the magnitude and bandwidth of the negativity of CPSF, in comparison to the setup with a single modulated mechanical oscillator. Interestingly, the introduced negativity may open a new platform to realize an extraordinary (modified) optomechanically induced transparency (in which the input signal is amplified in the output) leading to a perfect tunable optomechanical filter with switchable bandwidth which can be used as an optical transistor.

Significant Enhanced Mechanical Properties of Suspended Graphene Film by Stacking Multilayer CVD Graphene Films

Suspended graphene film is of great significance for building high-performance electrical devices. However, fabricating large-area suspended graphene film with good mechanical properties is still a challenge, especially for the chemical vapor deposition (CVD)-grown graphene films. In this work, the mechanical properties of suspended CVD-grown graphene film are investigated systematically for the first time. It is found that monolayer graphene film is hard to maintain on circular holes with a diameter of tens of micrometers, which can be improved greatly by increasing the layer of graphene films. The mechanical properties of CVD-grown multilayer graphene films suspended on a circular hole with a diameter of 70 µm can be increased by 20%, and multilayer graphene films prepared by layer-layer stacking process can be increased by up to 400% for the same size. The corresponding mechanism was also discussed in detail, which might pave the way for building high-performance electrical devices based on high-strength suspended graphene film.

2D-materials-integrated optoelectromechanics: recent progress and future perspectives

The discovery of two-dimensional (2D) materials has gained worldwide attention owing to their extraordinary optical, electrical, and mechanical properties. Due to their atomic layer thicknesses, the emerging 2D materials have great advantages of enhanced interaction strength, broad operating bandwidth, and ultralow power consumption for optoelectromechanical coupling. The van der Waals (vdW) epitaxy or multidimensional integration of 2D material family provides a promising platform for on-chip advanced nano-optoelectromechanical systems (NOEMS). Here, we provide a comprehensive review on the nanomechanical properties of 2D materials and the recent advances of 2D-materials-integrated nano-electromechanical systems and nano-optomechanical systems. By utilizing active nanophotonics and optoelectronics as the interface, 2D active NOEMS and their coupling effects are particularly highlighted at the 2D atomic scale. Finally, we share our viewpoints on the future perspectives and key challenges of scalable 2D-materials-integrated active NOEMS for on-chip miniaturized, lightweight, and multifunctional integration applications.

Nanomechanical Resonators: Toward Atomic Scale

The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including one-dimensional (1D) nanowires/nanotubes and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained effort have been devoted to creating mechanical devices toward the ultimate limit of miniaturization─genuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-to-atomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.

Simultaneous ground-state cooling of identical mechanical oscillators by Lyapunov control

The simultaneous cooling of multiple mechanical oscillators in the cavity optomechanical system has aroused people's attention and may be applicable in the quantum information process. In this paper, a scheme to realize the simultaneous ground-state cooling of two identical mechanical oscillators is proposed, where the frequency of one of the oscillators is designed according to Lyapunov control. By this method, the dark mode can effectively couple with the bright mode so that the two identical oscillators can be simultaneously cooled to their ground state. Extending this scheme into multiple identical mechanical oscillators, we show that simultaneous cooling can also be achieved.

Superconducting Vortex-Charge Measurement Using Cavity Electromechanics

As the magnetic field penetrates the surface of a superconductor, it results in the formation of flux vortices. It has been predicted that the flux vortices will have a charged vortex core and create a dipolelike electric field. Such a charge trapping in vortices is particularly enhanced in high-T_c superconductors (HTS). Here, we integrate a mechanical resonator made of a thin flake of HTS Bi₂Sr₂CaCu₂O_8+δ into a microwave circuit to realize a cavity-electromechanical device. Due to the exquisite sensitivity of cavity-based devices to the external forces, we directly detect the charges in the flux vortices by measuring the electromechanical response of the mechanical resonator. Our measurements reveal the strength of surface electric dipole moment due to a single vortex core to be approximately 30 |e|a_B, equivalent to a vortex charge per CuO₂ layer of 3.7 × 10^-2|e|, where a_B is the Bohr radius and e is the electronic charge.

Strain-Modulated Dissipation in Two-Dimensional Molybdenum Disulfide Nanoelectromechanical Resonators

Resonant nanoelectromechanical systems (NEMS) based on two-dimensional (2D) materials such as molybdenum disulfide (MoS₂) are interesting for highly sensitive mass, force, photon, or inertial transducers, as well as for fundamental research approaching the quantum limit, by leveraging the mechanical degree of freedom in these atomically thin materials. For these mechanical resonators, the quality factor (Q) is essential, yet the mechanism and tuning methods for energy dissipation in 2D NEMS resonators have not been fully explored. Here, we demonstrate that by tuning static strain and vibration-induced strain in suspended MoS₂ using gate voltages, we can effectively tune the Q in 2D MoS₂ NEMS resonators. We further show that for doubly clamped resonators, the Q increases with larger DC gate voltage, while fully clamped drumhead resonators show the opposite trend. Using DC gate voltages, we can tune the Q by ΔQ/Q = 448% for fully clamped resonators, and by ΔQ/Q = 369% for doubly clamped resonators. We develop the strain-modulated dissipation model for these 2D NEMS resonators, which is verified against our measurement data for 8 fully clamped resonators and 7 doubly clamped resonators. We find that static tensile strain decreases dissipation while vibration-induced strain increases dissipation, and the actual dependence of Q on DC gate voltage depends on the competition between these two effects, which is related to the device boundary condition. Such strain dependence of Q is useful for optimizing the resonance linewidth in 2D NEMS resonators toward low-power, ultrasensitive, and frequency-selective devices for sensing and signal processing.

A Review on Graphene-Based Nano-Electromechanical Resonators: Fabrication, Performance, and Applications

The emergence of graphene and other two-dimensional materials overcomes the limitation in the characteristic size of silicon-based micro-resonators and paved the way in the realization of nano-mechanical resonators. In this paper, we review the progress to date of the research on the fabrication methods, resonant performance, and device applications of graphene-based nano-mechanical resonators, from theoretical simulation to experimental results, and summarize both the excitation and detection schemes of graphene resonators. In recent years, the applications of graphene resonators such as mass sensors, pressure sensors, and accelerometers gradually moved from theory to experiment, which are specially introduced in this review. To date, the resonance performance of graphene-based nano-mechanical resonators is widely studied by theoretical approaches, while the corresponding experiments are still in the preliminary stage. However, with the continuous progress of the device fabrication and detection technique, and with the improvement of the theoretical model, suspended graphene membranes will widen the potential for ultralow-loss and high-sensitivity mechanical resonators in the near future.

Fabry-Perot interferometric calibration of van der Waals material-based nanomechanical resonators

One of the challenges in integrating nanomechanical resonators made from van der Waals materials in optoelectromechanical technologies is characterizing their dynamic properties from vibrational displacement. Multiple calibration schemes using optical interferometry have tackled this challenge. However, these techniques are limited only to optically thin resonators with an optimal vacuum gap height and substrate for interferometric detection. Here, we address this limitation by implementing a modeling-based approach via multilayer thin-film interference for in situ, non-invasive determination of the resonator thickness, gap height, and motional amplitude. This method is demonstrated on niobium diselenide drumheads that are electromotively driven in their linear regime of motion. The laser scanning confocal configuration enables a resolution of hundreds of picometers in motional amplitude for circular and elliptical devices. The measured thickness and spacer height, determined to be in the order of tens and hundreds of nanometers, respectively, are in excellent agreement with profilometric measurements. Moreover, the transduction factor estimated from our method agrees with the result of other studies that resolved Brownian motion. This characterization method, which applies to both flexural and acoustic wave nanomechanical resonators, is robust because of its scalability to thickness and gap height, and any form of reflecting substrate.

Tunable Strong Coupling of Mechanical Resonance between Spatially Separated FePS3 Nanodrums

Coupled nanomechanical resonators made of two-dimensional materials are promising for processing information with mechanical modes. However, the challenge for these systems is to control the coupling. Here, we demonstrate strong coupling of motion between two suspended membranes of the magnetic 2D material FePS₃. We describe a tunable electromechanical mechanism for control over both the resonance frequency and the coupling strength using a gate voltage electrode under each membrane. We show that the coupling can be utilized for transferring data between drums by amplitude modulation. Finally, we also study the temperature dependence of the coupling and how it is affected by the antiferromagnetic phase transition characteristic of this material. The presented electrical coupling of resonant magnetic 2D membranes holds the promise of transferring mechanical energy over a distance at low electrical power, thus enabling novel data readout and information processing technologies.

Discrete breathers and energy localization in a nonlinear honeycomb lattice

Discrete breathers (DBs) in nonlinear lattices have attracted much attention in the past decades. In this work, we focus on the formation of DBs and their induced energy localization in the nonlinear honeycomb lattice derived from graphene. The key step is to construct a reduced system (RS) with only a few degrees of freedom, which contains one central site and its three nearest neighbors. The fixed points and periodic orbits of the RS can be obtained from the Poincaré section of the dynamics. Our main finding is that the long-running DB solution of the full honeycomb system corresponds to the periodic orbit given by one of the fixed points of RS, where the central site and its nearest neighbors vibrate inversely. When the initial condition deviates from this fixed point, the local vibration is attracted to it after a short transient process. When the initial condition is assigned to other fixed points of the RS, the initial excitation energy flows to the other part of the full system quickly, resulting in a delocalized wave propagation. Another main finding is that the long-lived DB solutions emerge only when the initial excitation energy is larger than a threshold value, above which the frequency of the DB exceeds the phonon band edge. The excitation energy generally dissipates from the local region due to the interactions between the DB and phonons near the Γ point in the dispersion relation. These results provide a holistic physical picture for the DB solutions in two-dimensional nonlinear lattices with complex potentials, which will be crucial to the understanding of energy localization in the realistic two-dimensional materials.

Graphene-Based Nanoelectromechanical Periodic Array with Tunable Frequency

Phononic crystals (PnCs) have attracted much attention due to their great potential for dissipation engineering and propagation manipulation of phonons. Notably, the excellent electrical and mechanical properties of graphene make it a promising material for nanoelectromechanical resonators. Transferring a graphene flake to a prepatterned periodic mechanical structure enables the realization of a PnC with on-chip scale. Here, we demonstrate a nanoelectromechanical periodic array by anchoring a graphene membrane to a 9 × 9 array of standing nanopillars. The device exhibits a quasi-continuous frequency spectrum with resonance modes distributed from ∼120 MHz to ∼980 MHz. Moreover, the resonant frequencies of these modes can be electrically tuned by varying the voltage applied to the gate electrode sitting underneath. Simulations suggest that the observed band-like spectrum provides an experimental evidence for PnC formation. Our architecture has large fabrication flexibility, offering a promising platform for investigations on PnCs with electrical accessibility and tunability.

Realization of a Graphene/PMMA Acoustic Capacitive Sensor Released by Silicon Dioxide Sacrificial Layer

We report the realization of an acoustic capacitive microphone formed by graphene/poly(methyl methacrylate) (PMMA). It is the first time that the ultra-large graphene/PMMA membrane suspended fully over the cavity has been fabricated by releasing the silicon dioxide sacrificial layer underneath the membrane. The novelty in the fabrication method is that the silicon dioxide layer has been etched by hydrogen fluoride vapor from the back of the partly etched silicon substrate. Using the new process, the ultra-large graphene/PMMA membrane, with a diameter to thickness ratio of 7800, has been suspended over the cavity with a 2 μm air gap. The spacing of 2 μm is the minimum gap over the graphene-based acoustic capacitive microphones which have been reported so far. The static deformation of the suspended graphene/PMMA membrane after silicon dioxide has been etched is estimated to be 270 nm. The aspect ratio of the membrane's diameter over its static deformation is around 13,000, which shows that the graphene/PMMA membrane with a diameter of a few millimeters can be transferred and suspended over the substrate with relatively small deformation by releasing the sacrificial silicon dioxide layer. The dynamic behavior of the device under electrostatic actuation has been characterized. The acoustic response of the graphene/PMMA capacitive microphone has been measured, and the sensitivity has been observed to be -47.5 dB V (4.22 mV/Pa) ± 10%. The strain in the graphene/PMMA membrane is estimated to be 0.034%.

Ultrawide Frequency Tuning of Atomic Layer van der Waals Heterostructure Electromechanical Resonators

We report on the experimental demonstration of atomically thin molybdenum disulfide (MoS₂)-graphene van der Waals (vdW) heterostructure nanoelectromechanical resonators with ultrawide frequency tuning. With direct electrostatic gate tuning, these vdW resonators exhibit exceptional tunability, in general, Δf/f₀ > 200%, for continuously tuning the same device and the same mode (e.g., from ∼23 to ∼107 MHz), up to Δf/f₀ ≈ 370%, the largest fractional tuning range in such resonators to date. This remarkable electromechanical resonance tuning is investigated by two different analytical models and finite element simulations. Furthermore, we carefully perform clear control experiments and simulations to elucidate the difference in frequency tuning between the heterostructure and single-material resonators. At a given initial strain level, the tuning range depends on the two-dimensional (2D) Young's moduli of the constitutive crystals; devices built on materials with lower 2D moduli show wider tuning ranges. This study exemplifies that vdW heterostructure resonators can retain unconventionally broad, continuous tuning, which is promising for voltage-controlled, tunable nanosystems.

Large-Size Suspended Mono-Layer Graphene Film Transfer Based on the Inverted Floating Method

Suspended graphene can perfectly present the excellent material properties of graphene, which has a good application prospect in graphene sensors. The existing suspended graphene pressure sensor has several problems that need to be solved, one of which is the fabrication of a suspended sample. It is still very difficult to obtain large-size suspended graphene films with a high integrity that are defect-free. Based on the simulation and analysis of the kinetic process of the traditional suspended graphene release process, a novel setup for large-size suspended graphene release was designed based on the inverted floating method (IFM). The success rate of the single-layer suspended graphene with a diameter of 200 μm transferred on a stainless-steel substrate was close to 50%, which is greatly improved compared with the traditional impregnation method. The effects of the defects and burrs around the substrate cavity on the stress concentration of graphene transfer explain why the transfer success rate of large-size suspended graphene is not high. This research lays the foundation for providing large-size suspended graphene films in the area of graphene high-precision sensors.

Tunable parametric amplification of a graphene nanomechanical resonator in the nonlinear regime

Parametric amplification is widely used in nanoelectro-mechanical systems to enhance the transduced mechanical signals. Although parametric amplification has been studied in different mechanical resonator systems, the nonlinear dynamics involved receives less attention. Taking advantage of the excellent electrical and mechanical properties of graphene, we demonstrate electrical tunable parametric amplification using a doubly clamped graphene nanomechanical resonator. By applying external microwave pumping with twice the resonant frequency, we investigate parametric amplification in the nonlinear regime. We experimentally show that the extracted coefficient of the nonlinear Duffing force α and the nonlinear damping coefficient η vary as a function of external pumping power, indicating the influence of higher-order nonlinearity beyond the Duffing (∼x ³) and van der Pol (∼[Formula: see text]) types in our device. Even when the higher-order nonlinearity is involved, parametric amplification still can be achieved in the nonlinear regime. The parametric gain increases and shows a tendency of saturation with increasing external pumping power. Further, the parametric gain can be electrically tuned by the gate voltage with a maximum gain of 10.2 dB achieved at the gate voltage of 19 V. Our results will benefit studies on nonlinear dynamics, especially nonlinear damping in graphene nanomechanical resonators that has been debated in the community over past decade.

Tuning nonlinear damping in graphene nanoresonators by parametric-direct internal resonance

Mechanical sources of nonlinear damping play a central role in modern physics, from solid-state physics to thermodynamics. The microscopic theory of mechanical dissipation suggests that nonlinear damping of a resonant mode can be strongly enhanced when it is coupled to a vibration mode that is close to twice its resonance frequency. To date, no experimental evidence of this enhancement has been realized. In this letter, we experimentally show that nanoresonators driven into parametric-direct internal resonance provide supporting evidence for the microscopic theory of nonlinear dissipation. By regulating the drive level, we tune the parametric resonance of a graphene nanodrum over a range of 40–70 MHz to reach successive two-to-one internal resonances, leading to a nearly two-fold increase of the nonlinear damping. Our study opens up a route towards utilizing modal interactions and parametric resonance to realize resonators with engineered nonlinear dissipation over wide frequency range.

Nonlinear dissipation is frequently observed in nanomechanical resonators, but its microscopic origin remains unclear. Here, nonlinear damping is found to be enhanced in graphene nanodrums close to internal resonance conditions, providing insights on the mechanisms at the basis of this phenomenon.

Dynamically-enhanced strain in atomically thin resonators

Graphene and related two-dimensional (2D) materials associate remarkable mechanical, electronic, optical and phononic properties. As such, 2D materials are promising for hybrid systems that couple their elementary excitations (excitons, phonons) to their macroscopic mechanical modes. These built-in systems may yield enhanced strain-mediated coupling compared to bulkier architectures, e.g., comprising a single quantum emitter coupled to a nano-mechanical resonator. Here, using micro-Raman spectroscopy on pristine monolayer graphene drums, we demonstrate that the macroscopic flexural vibrations of graphene induce dynamical optical phonon softening. This softening is an unambiguous fingerprint of dynamically-induced tensile strain that reaches values up to ≈4 × 10⁻⁴ under strong non-linear driving. Such non-linearly enhanced strain exceeds the values predicted for harmonic vibrations with the same root mean square (RMS) amplitude by more than one order of magnitude. Our work holds promise for dynamical strain engineering and dynamical strain-mediated control of light-matter interactions in 2D materials and related heterostructures.

Here, the authors use Raman spectroscopy on circular graphene drums to demonstrate dynamical softening of optical phonons induced by the macroscopic flexural motion of graphene, and find evidence that the strain in graphene is enhanced under non-linear driving.

Dissipative bosonic squeezing via frequency modulation and its application in optomechanics

The dissipative squeezing mechanism is an effective method to generate the strong squeezing, which is important in the precision metrology. Here, we propose a practical method to achieve arbitrary bosonic squeezing via introducing frequency modulation into the coupled harmonic resonator model. We analyze the effect of frequency modulation and give the analytical and numerical squeezing results, respectively. To measure the accurate dynamic squeezing in our proposal, we give a more general defination of the relative squeezing degree. Finally, the proposed method is extended to generate the strong mechanical squeezing (>3 dB) in a practical optomechanical system consisting of a graphene mechanical oscillator coupled to a superconducting microwave cavity. The result indicates that the strong mechanical squeezing can be effectively achieved even when the mechanical oscillator is not initially in its ground state. The proposed method expands the study on nonclassical state and does not need the bichromatic microwave driving technology.

Impact of Transduction Scaling Laws on Nanoelectromechanical Systems

We study the electromechanical transduction in nanoelectromechanical actuators and show that the differences in scaling laws for electrical and mechanical effects lead to an overall nontrivial miniaturization behavior. In particular, the previously neglected fringing fields considerably increase electrical forces and improve the stability of nanoscale actuators. This shows that electrostatics does not pose any limitations to the miniaturization of electromechanical systems; in fact, in several respects, nanosystems outperform their microscale counterparts. As a specific example, we consider in-plane actuation of ultrathin slabs and show that devices consisting of a few layers of graphene are feasible, implying that electromechanical resonators operating beyond 40 GHz are possible with currently available technology.

Large Suspended Monolayer and Bilayer Graphene Membranes with Diameter up to 750 µm

In this paper ultra clean monolayer and bilayer Chemical Vapor Deposited (CVD) graphene membranes with diameters up to 500 µm and 750 µm, respectively have been fabricated using Inverted Floating Method (IFM) followed by thermal annealing in vacuum. The yield decreases with size but we show the importance of choosing a good graphene raw material. Dynamic mechanical properties of the membranes at room temperature in different diameters are measured before and after annealing. The quality factor ranges from 200 to 2000 and shows no clear dependence on the size. The resonance frequency is inversely proportional to the diameter of the membranes. We observe a reduction of the effective intrinsic stress in the graphene, as well as of the relative error in the determination of said stress after thermal annealing. These measurements show that it is possible to produce graphene membranes with reproducible and excellent mechanical properties.

Cavity electromechanics with parametric mechanical driving

Microwave optomechanical circuits have been demonstrated to be powerful tools for both exploring fundamental physics of macroscopic mechanical oscillators, as well as being promising candidates for on-chip quantum-limited microwave devices. In most experiments so far, the mechanical oscillator is either used as a passive element and its displacement is detected using the superconducting cavity, or manipulated by intracavity fields. Here, we explore the possibility to directly and parametrically manipulate the mechanical nanobeam resonator of a cavity electromechanical system, which provides additional functionality to the toolbox of microwave optomechanics. In addition to using the cavity as an interferometer to detect parametrically modulated mechanical displacement and squeezed thermomechanical motion, we demonstrate that this approach can realize a phase-sensitive parametric amplifier for intracavity microwave photons. Future perspectives of optomechanical systems with a parametrically driven mechanical oscillator include exotic bath engineering with negative effective photon temperatures, or systems with enhanced optomechanical nonlinearities.

Microwave circuits are interesting tools for microwave optomechanics and quantum information processing. Here, the authors demonstrate a phase-sensitive microwave amplifier by using parametric frequency modulation of a MHz mechanical nanobeam integrated in a superconducting microwave cavity.

Stochastic Stress Jumps Due to Soliton Dynamics in Two-Dimensional van der Waals Interfaces

The creation and movement of dislocations determine the nonlinear mechanics of materials. At the nanoscale, the number of dislocations in structures become countable, and even single defects impact material properties. While the impact of solitons on electronic properties is well studied, the impact of solitons on mechanics is less understood. In this study, we construct nanoelectromechanical drumhead resonators from Bernal stacked bilayer graphene and observe stochastic jumps in frequency. Similar frequency jumps occur in few-layer but not twisted bilayer or monolayer graphene. Using atomistic simulations, we show that the measured shifts are a result of changes in stress due to the creation and annihilation of individual solitons. We develop a simple model relating the magnitude of the stress induced by soliton dynamics across length scales, ranging from <0.01 N/m for the measured 5 μm diameter to ∼1.2 N/m for the 38.7 nm simulations. These results demonstrate the sensitivity of 2D resonators are sufficient to probe the nonlinear mechanics of single dislocations in an atomic membrane and provide a model to understand the interfacial mechanics of different kinds of van der Waals structures under stress, which is important to many emerging applications such as engineering quantum states through electromechanical manipulation and mechanical devices like highly tunable nanoelectromechanical systems, stretchable electronics, and origami nanomachines.

Gate Tunable Cooperativity between Vibrational Modes

Coupling between a mechanical resonator and optical cavities, microwave resonators, or other mechanical resonators have been used to observe interesting effects from sideband cooling to coherent manipulation of phonons. Here we demonstrate strong coupling between different vibrational modes of MoS₂ drum resonators at room temperature. We observe intermodal as well as intramodal coupling. Cooperativity, a measure of coupling between the two modes, can be tuned by more than an order of magnitude by changing the direct current gate bias. The large measured cooperativity of about 900 at room temperature indicates that the phonon population can be coherently transferred between the modes for more than 500 cycles. This coherent oscillation is of great interest in studying quantum effects in macroscopic objects.

Misfit strain-induced energy dissipation for graphene/MoS2 heterostructure nanomechanical resonators

Misfit strain is inevitable in various heterostructures like the graphene/MoS₂ van der Waals heterostructure. Although the misfit strain effect on electronic and other physical properties have been well studied, it is still unclear how the misfit strain will affect the performance of the nanomechanical resonator based on the graphene/MoS₂ heterostructure. By performing molecular dynamics simulations, we disclose a misfit strain-induced decoupling phenomenon between the graphene layer and the MoS₂ layer during the resonant oscillation of the heterostructure. A direct relationship between the misfit strain and the decoupling mechanism is successfully established through the retraction force analysis. We further suggest to use the graphene/MoS₂/graphene sandwich heterostructure for the nanomechanical resonator application, which is able to prevent the misfit strain-related decoupling phenomenon. These results provide valuable information for the future application of the graphene/MoS₂ heterostructure in the nanomechanical resonator field.

Optomechanical Measurement of Thermal Transport in Two-Dimensional MoSe2 Lattices

Nanomechanical resonators have emerged as sensors with exceptional sensitivities. These sensing capabilities open new possibilities in the studies of the thermodynamic properties in condensed matter. Here, we use mechanical sensing as a novel approach to measure the thermal properties of low-dimensional materials. We measure the temperature dependence of both the thermal conductivity and the specific heat capacity of a transition metal dichalcogenide monolayer down to cryogenic temperature, something that has not been achieved thus far with a single nanoscale object. These measurements show how heat is transported by phonons in two-dimensional systems. Both the thermal conductivity and the specific heat capacity measurements are consistent with predictions based on first-principles.

The effect of strain on effective Duffing nonlinearity in the CVD-MoS2 resonator

We demonstrate all electrical measurements on NEMS devices fabricated using CVD grown monolayer MoS2. The as-grown monolayer film of MoS2 on top of the SiO2/Si wafer is processed to fabricate arrays and individual NEMS devices without the complex pick and transfer techniques associated with graphene. The electromechanical properties of the devices are on par with those fabricated using the exfoliation method. The frequency response of these devices is then used as a probe to estimate the linear thermal expansion coefficient of the material and evaluate the effect of strain on the effective Duffing nonlinearity in the devices.

GHz nanomechanical resonator in an ultraclean suspended graphene p-n junction

We demonstrate high-frequency mechanical resonators in ballistic graphene p-n junctions. Fully suspended graphene devices with two bottom gates exhibit ballistic bipolar behavior after current annealing. We determine the graphene mass density and built-in tension for different current annealing steps by comparing the measured mechanical resonant response to a simplified membrane model. In a graphene membrane with high built-in tension, but still of macroscopic size with dimensions 3 × 1 μm2, a record resonance frequency of 1.17 GHz is observed after the final current annealing step. We further compare the resonance response measured in the unipolar with the one in the bipolar regime. Remarkably, the resonant signals are strongly enhanced in the bipolar regime.

Nano-electromechanical Drumhead Resonators from Two-Dimensional Material Bimorphs

Atomic membranes of monolayer 2D materials represent the ultimate limit in the size of nano-electromechanical systems. However, new properties and new functionalities emerge by looking at the interface between layers in heterostructures of 2D materials. Here, we demonstrate the integration of 2D heterostructures as tunable nano-electromechanical systems, exploring the competition between the mechanics of the ultrathin membrane and the incommensurate van der Waals interface. We fabricate electrically contacted 5 or 6 μm circular drumheads of suspended heterostructure membranes of monolayer graphene on monolayer molybdenum disulfide (MoS₂), which we call a 2D bimorph. We characterize the mechanical resonance through electrostatic actuation and laser interferometry detection. The 2D bimorphs have resonance frequencies of 5-20 MHz and quality factors of 50-700, comparable to resonators from monolayer or few-layer 2D materials. The frequencies and eigenmode shapes of the higher harmonics display split degenerate modes, showing that the 2D bimorphs behave as membranes with asymmetric tension. The devices display dynamic ranges of 44 dB, with an additional nonlinearity in the dissipation at small drive. Under electrostatic frequency tuning, devices display a small tuning of ∼20% compared with graphene resonators, which have >100%. In addition, the tuning shows a kink that deviates from the tensioned membrane model for atomic membranes and corresponds with a changing in stress of 14 mN/m. A model that accounts for this tuning behavior is the onset of interlayer slip in the heterostructure, allowing the tension in the membrane to relax. Using density functional theory simulations, we find that the change in stress at the kink is much larger than the predicted energy barrier for interlayer slip of 0.102 mN/m in an incommensurate 2D heterostructure but smaller than the energy barrier for an aligned graphene bilayer of 35 mN/m, suggesting a local pinning effect at ripples or folds in the heterostructure. Finally, we observe an asymmetry in tuning of the full width at half-maximum that does not exist in monolayer resonators. These findings demonstrate a new class of nano-electromechanical systems from 2D heterostructures and unravel the complex interaction of membrane morphology versus interlayer adhesion and slip on the mechanics of incommensurate van der Waals interfaces.

Quantum nondemolition measurement of mechanical motion quanta

The fields of optomechanics and electromechanics have facilitated numerous advances in the areas of precision measurement and sensing, ultimately driving the studies of mechanical systems into the quantum regime. To date, however, the quantization of the mechanical motion and the associated quantum jumps between phonon states remains elusive. For optomechanical systems, the coupling to the environment was shown to make the detection of the mechanical mode occupation difficult, typically requiring the single-photon strong-coupling regime. Here, we propose and analyse an electromechanical setup, which allows us to overcome this limitation and resolve the energy levels of a mechanical oscillator. We found that the heating of the membrane, caused by the interaction with the environment and unwanted couplings, can be suppressed for carefully designed electromechanical systems. The results suggest that phonon number measurement is within reach for modern electromechanical setups.

Although electro-and optomechanics has recently moved towards the quantum regime, the quantized energy spectrum of a mechanical oscillator has not been directly observed. Here Dellantonio et al. propose an electromechanical setup with a membrane resonator that could enable phonon number measurements.

Ultrasensitive Displacement Noise Measurement of Carbon Nanotube Mechanical Resonators

Mechanical resonators based on a single carbon nanotube are exceptional sensors of mass and force. The force sensitivity in these ultralight resonators is often limited by the noise in the detection of the vibrations. Here, we report on an ultrasensitive scheme based on a RLC resonator and a low-temperature amplifier to detect nanotube vibrations. We also show a new fabrication process of electromechanical nanotube resonators to reduce the separation between the suspended nanotube and the gate electrode down to ∼150 nm. These advances in detection and fabrication allow us to reach [Formula: see text] displacement sensitivity. Thermal vibrations cooled cryogenically at 300 mK are detected with a signal-to-noise ratio as high as 17 dB. We demonstrate [Formula: see text] force sensitivity, which is the best force sensitivity achieved thus far with a mechanical resonator. Our work is an important step toward imaging individual nuclear spins and studying the coupling between mechanical vibrations and electrons in different quantum electron transport regimes.

Frequency Tuning of Graphene Nanoelectromechanical Resonators via Electrostatic Gating

In this article, we report on a comprehensive modeling study of frequency tuning of graphene resonant nanoelectromechanical systems (NEMS) via electrostatic coupling forces induced by controlling the voltage of a capacitive gate. The model applies to both doubly clamped graphene membranes and circumference-clamped circular drumhead device structures. Frequency tuning of these devices can be predicted by considering both capacitive softening and elastic stiffening. It is shown that the built-in strain in the device strongly dictates the frequency tuning behavior and tuning range. We also find that doubly clamped graphene resonators can have a wider frequency tuning range, while circular drumhead devices have higher initial resonance frequency with same device characteristic parameters. Further, the parametric study in this work clearly shows that a smaller built-in strain, smaller depth of air gap or cavity, and larger device size or characteristic length (e.g., length for doubly clamped devices, and diameter for circular drumheads) help achieve a wider range of electrostatic frequency tunability. This study builds a solid foundation that can offer important device fabrication and design guidelines for achieving radio frequency components (e.g., voltage controlled oscillators and filters) with the desired frequencies and tuning ranges.

On-chip Heaters for Tension Tuning of Graphene Nanodrums

For the study and application of graphene membranes, it is essential to have means to control their resonance frequency and temperature. Here, we present an on-chip heater platform for local tuning of in-plane tension in graphene mechanical resonators. By Joule heating of a metallic suspension ring we show thermomechanical resonance frequency tuning in a few-layer (FL) graphene nanodrum, which is accompanied by an increase in its quality factor, which we attribute to the increase of the in-plane tension. The in situ control of temperature, in-plane tension, resonance frequency, and quality factor of suspended two-dimensional (2D) nanodrums makes this device a unique platform for investigating the origin of dissipation in these ultrathin structures and can be of fundamental importance for studying the thermal properties of 2D materials. Moreover, by simultaneously controlling the heater and the backgate voltage, we can independently control the resonance frequency and quality factor, which is of great importance for applications in sensors and resonant mechanical filters.

On-chip temporal focusing of elastic waves in a phononic crystal waveguide

The ability to manipulate acoustic and elastic waveforms in continuous media has attracted significant research interest and is crucial for practical applications ranging from biological imaging to material characterization. Although several spatial focusing techniques have been developed, these systems require sophisticated resonant structures with narrow bandwidth, which limit their practical applications. Here we demonstrate temporal pulse manipulation in a dispersive one-dimensional phononic crystal waveguide, which enables the temporal control of ultrasonic wave propagation. On-chip pulse focusing is realized at a desired time and position with chirped input pulses that agree perfectly with the theoretical prediction. Moreover, traveling four-wave mixing experiments are implemented, providing a platform on which to realize novel nonlinear phenomena in the system. Incorporating this dispersive pulse engineering scheme into nonlinear phononic crystal architecture opens up the possibility of investigating novel phenomena such as phononic solitons.

Here the authors demonstrate the temporal control of ultrasonic wave propagation in a one-dimensional phononic crystal waveguide. Four-wave mixing experiments are implemented, providing a platform on which to realize novel nonlinear phenomena in the system.

Electrothermally Tunable Graphene Resonators Operating at Very High Temperature up to 1200 K

The unique negative thermal expansion coefficient and remarkable thermal stability of graphene make it an ideal candidate for nanoelectromechanical systems (NEMS) with electrothermal tuning. We report on the first experimental demonstration of electrothermally tuned single- and few-layer graphene NEMS resonators operating in the high frequency (HF) and very high frequency (VHF) bands. In single-, bi-, and trilayer (1L, 2L, and 3L) graphene resonators with carefully controlled Joule heating, we have demonstrated remarkably broad frequency tuning up to Δ f/ f₀ ≈ 310%. Simultaneously, device temperature variations imposed by Joule heating are monitored using Raman spectroscopy; we find that the device temperature increases from 300 K up to 1200 K, which is the highest operating temperature known to date for electromechanical resonators. Using the measured frequency and temperature variations, we further extract both thermal expansion coefficients and thermal conductivities of these devices. Comparison with graphene electrostatic gate tuning indicates that electrothermal tuning is more efficient. The results clearly suggest that the unique negative thermal expansion coefficient of graphene and its excellent tolerance to very high temperature can be exploited for engineering highly tunable and robust graphene transducers for harsh and extreme environments.

Recent progress in the assembly of nanodevices and van der Waals heterostructures by deterministic placement of 2D materials

Designer heterostructures can now be assembled layer-by-layer with unmatched precision thanks to the recently developed deterministic placement methods to transfer two-dimensional (2D) materials. This possibility constitutes the birth of a very active research field on the so-called van der Waals heterostructures. Moreover, these deterministic placement methods also open the door to fabricate complex devices, which would be otherwise very difficult to achieve by conventional bottom-up nanofabrication approaches, and to fabricate fully-encapsulated devices with exquisite electronic properties. The integration of 2D materials with existing technologies such as photonic and superconducting waveguides and fiber optics is another exciting possibility. Here, we review the state-of-the-art of the deterministic placement methods, describing and comparing the different alternative methods available in the literature, and we illustrate their potential to fabricate van der Waals heterostructures, to integrate 2D materials into complex devices and to fabricate artificial bilayer structures where the layers present a user-defined rotational twisting angle.

Snap-through transition of buckled graphene membranes for memcapacitor applications

Using computational and theoretical approaches, we investigate the snap-through transition of buckled graphene membranes. Our main interest is related to the possibility of using the buckled membrane as a plate of capacitor with memory (memcapacitor). For this purpose, we performed molecular-dynamics (MD) simulations and elasticity theory calculations of the up-to-down and down-to-up snap-through transitions for membranes of several sizes. We have obtained expressions for the threshold switching forces for both up-to-down and down-to-up transitions. Moreover, the up-to-down threshold switching force was calculated using the density functional theory (DFT). Our DFT results are in general agreement with MD and analytical theory findings. Our systematic approach can be used for the description of other structures, including nanomechanical and biological ones, experiencing the snap-through transition.

Static Capacitive Pressure Sensing Using a Single Graphene Drum

To realize nanomechanical graphene-based pressure sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electromechanical systems, gets increasingly challenging as one starts shrinking the dimensions of these devices because the expected responsivity of such devices is below 0.1 aF/Pa. To overcome the challenges of detecting small capacitance changes, we design an electrical readout device fabricated on top of an insulating quartz substrate, maximizing the contribution of the suspended membrane to the total capacitance of the device. The capacitance of the drum is further increased by reducing the gap size to 110 nm. Using an external pressure load, we demonstrate the successful detection of capacitance changes of a single graphene drum down to 50 aF, and pressure differences down to 25 mbar.

Parametric amplification in MoS2 drum resonator

Parametric amplification is widely used in diverse areas from optics to electronic circuits to enhance low level signals by varying relevant system parameters. Parametric amplification has also been performed in several micro-nano resonators including nano-electromechanical system (NEMS) resonators based on a two-dimensional (2D) material. Here, we report the enhancement of mechanical response in a MoS₂ drum resonator using degenerate parametric amplification. We use parametric pumping to modulate the spring constant of the MoS₂ resonator and achieve a 10 dB amplitude gain. We also demonstrate quality factor enhancement in the resonator with parametric amplification. We investigate the effect of cubic nonlinearity on parametric amplification and show that it limits the gain of the mechanical resonator. Amplifying ultra-small displacements at room temperature and understanding the limitations of the amplification in these devices is key for using these devices for practical applications.

High Quality Factor Graphene-Based Two-Dimensional Heterostructure Mechanical Resonator

Ultralight mechanical resonators based on low-dimensional materials are well suited as exceptional transducers of minuscule forces or mass changes. However, the low dimensionality also provides a challenge to minimize resistive losses and heating. Here, we report on a novel approach that aims to combine different two-dimensional (2D) materials to tackle this challenge. We fabricated a heterostructure mechanical resonator consisting of few layers of niobium diselenide (NbSe₂) encapsulated by two graphene sheets. The hybrid membrane shows high quality factors up to 245,000 at low temperatures, comparable to the best few-layer graphene mechanical resonators. In contrast to few-layer graphene resonators, the device shows reduced electrical losses attributed to the lower resistivity of the NbSe₂ layer. The peculiar low-temperature dependence of the intrinsic quality factor points to dissipation over two-level systems which in turn relax over the electronic system. Our high sensitivity readout is enabled by coupling the membrane to a superconducting cavity which allows for the integration of the hybrid mechanical resonator as a sensitive and low loss transducer in future quantum circuits.

Energy-dependent path of dissipation in nanomechanical resonators

Energy decay plays a central role in a wide range of phenomena, such as optical emission, nuclear fission, and dissipation in quantum systems. Energy decay is usually described as a system leaking energy irreversibly into an environmental bath. Here, we report on energy decay measurements in nanomechanical systems based on multilayer graphene that cannot be explained by the paradigm of a system directly coupled to a bath. As the energy of a vibrational mode freely decays, the rate of energy decay changes abruptly to a lower value. This finding can be explained by a model where the measured mode hybridizes with other modes of the resonator at high energy. Below a threshold energy, modes are decoupled, resulting in comparatively low decay rates and giant quality factors exceeding 1 million. Our work opens up new possibilities to manipulate vibrational states, engineer hybrid states with mechanical modes at completely different frequencies, and to study the collective motion of this highly tunable system.

Coupling graphene nanomechanical motion to a single-electron transistor

Graphene-based electromechanical resonators have attracted great interest recently because of the outstanding mechanical and electrical properties of graphene and their various applications. However, the coupling between mechanical motion and charge transport has not been explored in graphene. Herein, we studied the mechanical properties of a suspended 50 nm wide graphene nanoribbon, which also acts as a single-electron transistor (SET) at low temperatures. Using the SET as a sensitive detector, we found that the resonance frequency could be tuned from 82 MHz to 100 MHz and the quality factor exceeded 30 000. The strong charge-mechanical coupling was demonstrated by observing the SET induced ∼140 kHz resonance frequency shifts and mechanical damping. We also found that the SET can enhance the nonlinearity of the resonator. Our SET-coupled graphene mechanical resonator could approach an ultra-sensitive mass resolution of ∼0.55 × 10^-21 g and a force sensitivity of ∼1.9 × 10^-19 N (Hz)^-1/2, and can be further improved. These properties indicate that our device is a good platform for both fundamental physical studies and potential applications.

Real-Time Measurement of Nanotube Resonator Fluctuations in an Electron Microscope

Mechanical resonators based on low-dimensional materials provide a unique platform for exploring a broad range of physical phenomena. The mechanical vibrational states are indeed extremely sensitive to charges, spins, photons, and adsorbed masses. However, the roadblock is often the readout of the resonator, because the detection of the vibrational states becomes increasingly difficult for smaller resonators. Here, we report an unprecedentedly sensitive method to detect nanotube resonators with effective masses in the 10^-20 kg range. We use the beam of an electron microscope to resolve the mechanical fluctuations of a nanotube in real-time for the first time. We obtain full access to the thermally driven Brownian motion of the resonator, both in space and time domains. Our results establish the viability of carbon nanotube resonator technology at room temperature and pave the way toward the observation of novel thermodynamics regimes and quantum effects in nanomechanics.

Coherent Phonon Rabi Oscillations with a High-Frequency Carbon Nanotube Phonon Cavity

Phonon-cavity electromechanics allows the manipulation of mechanical oscillations similar to photon-cavity systems. Many advances on this subject have been achieved in various materials. In addition, the coherent phonon transfer (phonon Rabi oscillations) between the phonon cavity mode and another oscillation mode has attracted many interest in nanoscience. Here, we demonstrate coherent phonon transfer in a carbon nanotube phonon-cavity system with two mechanical modes exhibiting strong dynamical coupling. The gate-tunable phonon oscillation modes are manipulated and detected by extending the red-detuned pump idea of photonic cavity electromechanics. The first- and second-order coherent phonon transfers are observed with Rabi frequencies 591 and 125 kHz, respectively. The frequency quality factor product fQ_m ∼ 2 × 10¹² Hz achieved here is larger than k_BT_base/h, which may enable the future realization of Rabi oscillations in the quantum regime.

Measurements of nanoresonator-qubit interactions in a hybrid quantum electromechanical system

Experiments to probe the basic quantum properties of motional degrees of freedom of mechanical systems have developed rapidly over the last decade. One promising approach is to use hybrid electromechanical systems incorporating superconducting qubits and microwave circuitry. However, a critical challenge facing the development of these systems is to achieve strong coupling between mechanics and qubits while simultaneously reducing coupling of both the qubit and mechanical mode to the environment. Here we report measurements of a qubit-coupled mechanical resonator system consisting of an ultra-high-frequency nanoresonator and a long coherence-time superconducting transmon qubit, embedded in a superconducting coplanar waveguide cavity. It is demonstrated that the nanoresonator and transmon have commensurate energies and transmon coherence times are one order of magnitude larger than for all previously reported qubit-coupled nanoresonators. Moreover, we show that numerical simulations of this new hybrid quantum system are in good agreement with spectroscopic measurements and suggest that the nanoresonator in our device resides at low thermal occupation number, near its ground state, acting as a dissipative bath seen by the qubit. We also outline how this system could soon be developed as a platform for implementing more advanced experiments with direct relevance to quantum information processing and quantum thermodynamics, including the study of nanoresonator quantum noise properties, reservoir engineering, and nanomechanical quantum state generation and detection.

Tunable phonon-cavity coupling in graphene membranes

A major achievement of the past decade has been the realization of macroscopic quantum systems by exploiting the interactions between optical cavities and mechanical resonators. In these systems, phonons are coherently annihilated or created in exchange for photons. Similar phenomena have recently been observed through phonon-cavity coupling-energy exchange between the modes of a single system mediated by intrinsic material nonlinearity. This has so far been demonstrated primarily for bulk crystalline, high-quality-factor (Q > 10(5)) mechanical systems operated at cryogenic temperatures. Here, we propose graphene as an ideal candidate for the study of such nonlinear mechanics. The large elastic modulus of this material and capability for spatial symmetry breaking via electrostatic forces is expected to generate a wealth of nonlinear phenomena, including tunable intermodal coupling. We have fabricated circular graphene membranes and report strong phonon-cavity effects at room temperature, despite the modest Q factor (∼100) of this system. We observe both amplification into parametric instability (mechanical lasing) and the cooling of Brownian motion in the fundamental mode through excitation of cavity sidebands. Furthermore, we characterize the quenching of these parametric effects at large vibrational amplitudes, offering a window on the all-mechanical analogue of cavity optomechanics, where the observation of such effects has proven elusive.

Dynamical strong coupling and parametric amplification of mechanical modes of graphene drums

Mechanical resonators are ubiquitous in modern information technology. With the possibility of coupling them to electromagnetic and plasmonic modes, they hold promise as the key building blocks in future quantum information technology. Graphene-based resonators are of interest for technological applications due to their high resonant frequencies, multiple mechanical modes and low mass. The tension-mediated nonlinear coupling between various modes of the resonator can be excited in a controllable manner. Here we engineer a graphene resonator with large frequency tunability at low temperatures, resulting in a large intermodal coupling strength. We observe the emergence of new eigenmodes and amplification of the coupled modes using red and blue parametric excitation, respectively. We demonstrate that the dynamical intermodal coupling is tunable. A cooperativity of 60 between two resonant modes of ∼100 MHz is achieved in the strong coupling regime. The ability to dynamically control the coupling between the high-frequency eigenmodes of a mechanical system opens up the possibility of quantum mechanical experiments at low temperatures.