Towards single-molecule nanomechanical mass spectrometry

Site-Specific Integration of Hexagonal Boron Nitride Quantum Emitters on 2D DNA Origami Nanopores

Optical emitters in hexagonal boron nitride (hBN) are promising probes for single-molecule sensing platforms. When engineered in nanoparticle form, they can be integrated as detectors in nanodevices, yet positional control at the nanoscale is lacking. Here we demonstrate the functionalization of DNA origami nanopores with optically active hBN nanoparticles (NPs) with nanometer precision. The NPs are active under three wavelengths of visible illumination and display both stable and blinking emission, enabling their accurate localization by using wide-field optical nanoscopy. Correlative opto-structural characterization reveals deterministic binding of bright, multicolor hBN NPs at the pore rim due to π-π stacking interactions at site-specific locations on the DNA origami. Our work provides a scalable, bottom-up approach toward deterministic assembly of solid-state emitters on arbitrary structural elements based on DNA origami. Such a nanoscale arrangement of optically active components can advance the development of single-molecule platforms, including optical nanopores and nanochannel sensors.

A Hybrid Orbitrap-Nanoelectromechanical Systems Approach for the Analysis of Individual, Intact Proteins in Real Time

Nanoelectromechanical systems (NEMS)-based mass spectrometry (MS) is an emerging technique that enables determination of the mass of individual adsorbed particles by driving nanomechanical devices at resonance and monitoring the real-time changes in their resonance frequencies induced by each single molecule adsorption event. We incorporate NEMS into an Orbitrap mass spectrometer and report our progress towards leveraging the single-molecule capabilities of the NEMS to enhance the dynamic range of conventional MS instrumentation and to offer new capabilities for performing deep proteomic analysis of clinically relevant samples. We use the hybrid instrument to deliver E. coli GroEL molecules (801 kDa) to the NEMS devices in their native, intact state. Custom ion optics are used to focus the beam down to 40 μm diameter with a maximum flux of 25 molecules/second. The mass spectrum obtained with NEMS-MS shows good agreement with the known mass of GroEL.

Coherent acoustic vibrations of Au nanoblocks and their modulation by Al2O3 layer deposition

Coherent acoustic phonons induced in metallic nanostructures have attracted tremendous attention owing to their unique optomechanical characteristics. The frequency of the acoustic phonon vibration is highly sensitive to the material adsorption on metallic nanostructures and, therefore, the acoustic phonon offers a promising platform for ultrasensitive mass sensors. However, the physical origin of acoustic frequency modulation by material adsorption has been partially unexplored so far. In this study, we prepared Al2O3-deposited Au nanoblocks and measured their acoustic phonon frequencies using time-resolved pump-probe measurements. By precisely controlling the thickness of the Al2O3 layer, we systematically investigated the relation between the acoustic phonon frequency and the deposited Al2O3 amounts. The time-resolved measurements revealed that the acoustic breathing modes were predominantly excited in the Au nanoblocks, and their frequencies increased with the increment of the Al2O3 thickness. From the relationship between the acoustic phonon frequency and the Al2O3 thickness, we revealed that the acoustic phonon frequency modulation is attributed to the density change of the whole sample. Our results would provide fruitful information for developing quantitative mass sensing devices based on metallic nanostructures.

Dielectric Detection of Single Nanoparticles Using a Microwave Resonator Integrated with a Nanopore

The characterization of individual nanoparticles in a liquid constitutes a critical challenge for the environmental, material, and biological sciences. To detect nanoparticles, electronic approaches are especially desirable owing to their compactness and lower costs. While electronic detection in the form of resistive-pulse sensing has enabled the acquisition of geometric properties of various analytes, impedimetric measurements to obtain dielectric signatures of nanoparticles have scarcely been reported. To explore this orthogonal sensing modality, we developed an impedimetric sensor based on a microwave resonator with a nanoscale sensing gap surrounding a nanopore built on a 220 nm silicon nitride membrane. The microwave resonator has a coplanar waveguide configuration with a resonance frequency of approximately 6.6 GHz. The approach of single nanoparticles near the sensing region and their translocation through the nanopores induced sudden changes in the impedance of the structure. The impedance changes, in turn, were picked up by the phase response of the microwave resonator. We worked with 100 and 50 nm polystyrene nanoparticles to observe single-particle events. Our current implementation was limited by the nonuniform electric field at the sensing region. This work provides a complementary sensing modality for nanoparticle characterization, where the dielectric response, rather than ionic current, determines the signal.

Simultaneous Optical and Mechanical Sensing Based on Optomechanical Resonators

Optical and mechanical resonators have each been abundantly employed in sensing applications, albeit following separate development. Here we show that bringing together optical and mechanical resonances in a unique sensing device significantly improves the sensor performance. To that purpose, we employ nanoscale optomechanical disk resonators that simultaneously support high quality optical and mechanical modes localized in tiny volumes, which provide extraordinary sensitivities. We perform environmental sensing, but the conclusions of our work extend to other sensing applications. First, we determine optical and mechanical responsivities to temperature and relative humidity changes. Second, by characterizing mechanical and optical frequency stabilities, we determine the corresponding limits of detection. Mechanical modes appear more sensitive to relative humidity changes, while optical modes appear more sensitive to temperature ones, reaching, respectively, 0.05% and 0.6 mK of independent resolution. We then prove that simultaneous optical and mechanical monitoring enables disentangling both effects and demonstrates 0.1% and 1 mK resolution, even considering that both parameters may change at the same time. Finally, we highlight the importance of actively tracking the optical mode when optomechanical sensor devices. Not doing so enforces tedious independent calibration, influences the device sensitivity during the experiment, and shortens the sensing range. The present work hence clarifies the requirements for the optimal operation of optomechanical sensors, which will be of importance for chemical and biological sensing.

Mass spectrometry-based methods to characterize highly heterogeneous biopharmaceuticals, vaccines, and nonbiological complex drugs at the intact-mass level

The intact-mass MS measurements are becoming increasingly popular in characterization of a range of biopolymers, especially those of interest to biopharmaceutical industry. However, as the complexity of protein therapeutics and other macromolecular medicines increases, the new challenges arise, one of which is the high levels of structural heterogeneity that are frequently exhibited by such products. The very notion of the molecular mass measurement loses its clear and intuitive meaning when applied to an extremely heterogenous system that cannot be characterized by a unique mass, but instead requires that a mass distribution be considered. Furthermore, convoluted mass distributions frequently give rise to unresolved ionic signal in mass spectra, from which little-to-none meaningful information can be extracted using standard approaches that work well for homogeneous systems. However, a range of technological advances made in the last decade, such as the hyphenation of intact-mass MS measurements with front-end separations, better integration of ion mobility in MS workflows, development of an impressive arsenal of gas-phase ion chemistry tools to supplement MS methods, as well as the revival of the charge detection MS and its triumphant entry into the field of bioanalysis already made impressive contributions towards addressing the structural heterogeneity challenge. An overview of these techniques is accompanied by critical analysis of the strengths and weaknesses of different approaches, and a brief overview of their applications to specific classes of biopharmaceutical products, vaccines, and nonbiological complex drugs.

Photothermal Microscopy and Spectroscopy with Nanomechanical Resonators

In nanomechanical photothermal absorption spectroscopy and microscopy, the measured substance becomes a part of the detection system itself, inducing a nanomechanical resonance frequency shift upon thermal relaxation. Suspended, nanometer-thin ceramic or 2D material resonators are innately highly sensitive thermal detectors of localized heat exchanges from substances on their surface or integrated into the resonator itself. Consequently, the combined nanoresonator-analyte system is a self-measuring spectrometer and microscope responding to a substance's transfer of heat over the entire spectrum for which it absorbs, according to the intensity it experiences. Limited by their own thermostatistical fluctuation phenomena, nanoresonators have demonstrated sufficient sensitivity for measuring trace analyte as well as single particles and molecules with incoherent light or focused and wide-field coherent light. They are versatile in their design, support various sampling methods-potentially including hydrated sample encapsulation-and hyphenation with other spectroscopic methods, and are capable in a wide range of applications including fingerprinting, separation science, and surface sciences.

High Accuracy Protein Identification: Fusion of Solid-State Nanopore Sensing and Machine Learning

Proteins are arguably one of the most important class of biomarkers for health diagnostic purposes. Label-free solid-state nanopore sensing is a versatile technique for sensing and analyzing biomolecules such as proteins at single-molecule level. While molecular-level information on size, shape, and charge of proteins can be assessed by nanopores, the identification of proteins with comparable sizes remains a challenge. Here, solid-state nanopore sensing is combined with machine learning to address this challenge. The translocations of four similarly sized proteins is assessed using amplifiers with bandwidths (BWs) of 100 kHz and 10 MHz, the highest bandwidth reported for protein sensing, using nanopores fabricated in <10 nm thick silicon nitride membranes. F-values of up to 65.9% and 83.2% (without clustering of the protein signals) are achieved with 100 kHz and 10 MHz BW measurements, respectively, for identification of the four proteins. The accuracy of protein identification is further enhanced by classifying the signals into different clusters based on signal attributes, with F-value and specificity of up to 88.7% and 96.4%, respectively, for combinations of four proteins. The combined use of high bandwidth instruments, advanced clustering and machine learning methods allows label-free identification of proteins with high accuracy.

Five Low-Noise Stable Oscillators Referenced to the Same Multimode AlN/Si MEMS Resonator

We report on the first experimental demonstration of five self-sustaining feedback oscillators referenced to a single multimode resonator, using piezoelectric aluminum nitride on silicon (AlN/Si) microelectromechanical systems (MEMS) technology. Integrated piezoelectric transduction enables efficient readout of five resonance modes of the same AlN/Si MEMS resonator, at 10, 30, 65, 95, and 233 MHz with quality ( Q ) factors of 18 600, 4350, 4230, 2630, and 2138, respectively, at room temperature. Five stable self-sustaining oscillators are built, each referenced to one of these high- Q modes, and their mode-dependent phase noise and frequency stability (Allan deviation) are measured and analyzed. The 10, 30, 65, 95, and 233 MHz oscillators exhibit low phase noise of -116, -100, -105, -106, and -92 dBc/Hz at 1 kHz offset frequency, respectively. The 65 MHz oscillator yields the Allan deviation of 4×10-9 and 2×10-7 at 1 and 1000 s averaging time, respectively. The 10 MHz oscillator's low phase noise holds strong promise for clock and timing applications. The five oscillators' overall promising performance suggests suitability for multimode resonant sensing and real-time frequency tracking. This work also elucidates mode dependency in oscillator noise and stability, one of the key attributes of mode-engineerable resonators.

Atmospheric-Pressure Mass Spectrometry by Single-Mode Nanoelectromechanical Systems

Weighing particles above the megadalton mass range has been a persistent challenge in commercial mass spectrometry. Recently, nanoelectromechanical systems-based mass spectrometry (NEMS-MS) has shown remarkable performance in this mass range, especially with the advance of performing mass spectrometry under entirely atmospheric conditions. This advance reduces the overall complexity and cost while increasing the limit of detection. However, this technique required the tracking of two mechanical modes and the accurate knowledge of mode shapes that may deviate from their ideal values, especially due to air damping. Here, we used a NEMS architecture with a central platform, which enables the calculation of mass by single-mode measurements. Experiments were conducted using polystyrene and gold nanoparticles to demonstrate the successful acquisition of mass spectra using a single mode with an improved areal capture efficiency. This advance represents a step forward in NEMS-MS, bringing it closer to becoming a practical application for the mass sensing of nanoparticles.

Compact and modular system architecture for a nano-resonator-mass spectrometer

Mass measurements in the mega-to giga-Dalton range are essential for the characterization of natural and synthetic nanoparticles, but very challenging to perform using conventional mass spectrometers. Nano-electro-mechanical system (NEMS) based MS has demonstrated unique capabilities for the analysis of ultra-high mass analytes. Yet, system designs to date included constraints transferred from conventional MS instruments, such as ion guides and high vacuum requirements. Encouraged by other reports, we investigated the influence of pressure on the performances of the NEMS sensor and the aerodynamic focusing lens that equipped our first-generation instrument. We thus realized that the NEMS spectrometer could operate at significantly higher pressures than anticipated without compromising particle focusing nor mass measurement quality. Based on these observations, we designed and constructed a new NEMS-MS prototype considerably more compact than our original system, and which features an improved aerodynamic lens alignment concept, yielding superior particle focusing. We evaluated this new prototype by performing nanoparticle deposition to characterize aerodynamic focusing, and mass measurements of calibrated gold nanoparticles samples. The particle capture efficiency showed nearly two orders of magnitude improvement compared to our previous prototype, while operating at two orders of magnitude greater pressure, and without compromising mass resolution.

Nanomechanical hydrodynamic force sensing using suspended microfluidic channels

Microfluidics has demonstrated high versatility in the analysis of in-flow particles and can even achieve mechanical properties measurements of biological cells by applying hydrodynamic forces. However, there is currently no available technique that enables the direct measurement and tracking of these hydrodynamic forces acting on a flowing particle. In this work, we introduce a novel method for the direct measurement of the hydrodynamic force actuating on an in-flow particle based on the analysis of the induced resonance changes of suspended microchannel resonators (SMRs). This hydrodynamic force sensitivity depends on the device used; therefore, we considered the geometry and materials to advance this dependency on the SMR resonance frequency.

Mode specific dynamics for the acoustic vibrations of a gold nanoplate

The vibrational modes of semiconductor and metal nanostructures occur in the MHz to GHz frequency range, depending on dimensions. These modes are at the heart of nano-optomechanical devices, and understanding how they dissipate energy is important for applications of the devices. In this paper ultrafast transient absorption microscopy has been used to examine the breathing modes of a single gold nanoplate, where up to four overtones were observed. Analysis of the frequencies and amplitudes of the modes using a simple continuum mechanics model shows that the system behaves as a free plate, even though it is deposited onto a surface with no special preparation. The overtones decay faster than the fundamental mode, which is not predicted by continuum mechanics calculations of mode damping due to radiation of sound waves. Possible reasons for this effect include frequency dependent thermoelastic effects in the nanoplate, and/or flow of acoustic energy out of the excitation region.

Beating thermal noise in a dynamic signal measurement by a nanofabricated cavity optomechanical sensor

Thermal fluctuations often impose both fundamental and practical measurement limits on high-performance sensors, motivating the development of techniques that bypass the limitations imposed by thermal noise outside cryogenic environments. Here, we theoretically propose and experimentally demonstrate a measurement method that reduces the effective transducer temperature and improves the measurement precision of a dynamic impulse response signal. Thermal noise-limited, integrated cavity optomechanical atomic force microscopy probes are used in a photothermal-induced resonance measurement to demonstrate an effective temperature reduction by a factor of ≈25, i.e., from room temperature down as low as ≈12 K, without cryogens. The method improves the experimental measurement precision and throughput by >2×, approaching the theoretical limit of ≈3.5× improvement for our experimental conditions. The general applicability of this method to dynamic measurements leveraging thermal noise-limited harmonic transducers will have a broad impact across a variety of measurement platforms and scientific fields.

Graphene nano-electromechanical mass sensor with high resolution at room temperature

The inherent properties of 2D materials-light mass, high out-of-plane flexibility, and large surface area-promise great potential for precise and accurate nanomechanical mass sensing, but their application is often hampered by surface contamination. Here we demonstrate a tri-layer graphene nanomechanical resonant mass sensor with sub-attogram resolution at room temperature, fabricated by a bottom-up process. We found that Joule-heating is effective in cleaning the graphene membrane surface, which results in a large improvement in the stability of the resonance frequency. We characterized the sensor by depositing Cr metal using a stencil mask and found a mass-resolution that is sufficient to weigh very small particles, like large proteins and protein complexes, with potential applications in the fields of nanobiology and medicine.

Protein adsorption by nanomechanical mass spectrometry: Beyond the real-time molecular weighting

During past decades, enormous progress in understanding the mechanisms of the intermolecular interactions between the protein and surface at the single-molecule level has been achieved. These advances could only be possible by the ongoing development of highly sophisticated experimental methods such as atomic force microscopy, optical microscopy, surface plasmon resonance, ellipsometry, quartz crystal microbalance, conventional mass spectrometry, and, more recently, the nanomechanical systems. Here, we highlight the main findings of recent studies on the label-free single-molecule (protein) detection by nanomechanical systems including those focusing on the protein adsorption on various substrate surfaces. Since the nanomechanical techniques are capable of detecting and manipulating proteins even at the single-molecule level, therefore, they are expected to open a new way of studying the dynamics of protein functions. It is noteworthy that, in contrast to other experimental methods, where only given protein properties like molecular weight or protein stiffness can be determined, the nanomechanical systems enable a real-time measurement of the multiple protein properties (e.g., mass, stiffness, and/or generated surface stress), making them suitable for the study of protein adsorption mechanisms. Moreover, we also discuss the possible future trends in label-free detection and analysis of dynamics of protein complexes with these nanomechanical systems.

Nanomechanical Resonators: Toward Atomic Scale

The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including one-dimensional (1D) nanowires/nanotubes and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained effort have been devoted to creating mechanical devices toward the ultimate limit of miniaturization─genuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-to-atomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.

Recent Advances in Nanomechanical Membrane-Type Surface Stress Sensors towards Artificial Olfaction

Nanomechanical sensors have gained significant attention as powerful tools for detecting, distinguishing, and identifying target analytes, especially odors that are composed of a complex mixture of gaseous molecules. Nanomechanical sensors and their arrays are a promising platform for artificial olfaction in combination with data processing technologies, including machine learning techniques. This paper reviews the background of nanomechanical sensors, especially conventional cantilever-type sensors. Then, we focus on one of the optimized structures for static mode operation, a nanomechanical Membrane-type Surface stress Sensor (MSS), and discuss recent advances in MSS and their applications towards artificial olfaction.

Ultrasensitive detection of local acoustic vibrations at room temperature by plasmon-enhanced single-molecule fluorescence

Sensitive detection of local acoustic vibrations at the nanometer scale has promising potential applications involving miniaturized devices in many areas, such as geological exploration, military reconnaissance, and ultrasound imaging. However, sensitive detection of weak acoustic signals with high spatial resolution at room temperature has become a major challenge. Here, we report a nanometer-scale system for acoustic detection with a single molecule as a probe based on minute variations of its distance to the surface of a plasmonic gold nanorod. This system can extract the frequency and amplitude of acoustic vibrations with experimental and theoretical sensitivities of 10 pm Hz^−1/2 and 10 fm Hz^−1/2, respectively. This approach provides a strategy for the optical detection of acoustic waves based on molecular spectroscopy without electromagnetic interference. Moreover, such a small nano-acoustic detector with 40-nm size can be employed to monitor acoustic vibrations or read out the quantum states of nanomechanical devices.

.Sensitive detection of weak acoustic signals at nanometer scale is challenging. Here, the authors present an acoustic detection system based on a single molecule as a probe, where frequency and amplitude of acoustic vibrations can be extracted from its minute variations in distance to the surface of a plasmonic gold nanorod.

Atmospheric Pressure Mass Spectrometry of Single Viruses and Nanoparticles by Nanoelectromechanical Systems

Mass spectrometry of intact nanoparticles and viruses can serve as a potent characterization tool for material science and biophysics. Inaccessible by widespread commercial techniques, the mass of single nanoparticles and viruses (>10MDa) can be readily measured by nanoelectromechanical systems (NEMS)-based mass spectrometry, where charged and isolated analyte particles are generated by electrospray ionization (ESI) in air and transported onto the NEMS resonator for capture and detection. However, the applicability of NEMS as a practical solution is hindered by their miniscule surface area, which results in poor limit-of-detection and low capture efficiency values. Another hindrance is the necessity to house the NEMS inside complex vacuum systems, which is required in part to focus analytes toward the miniscule detection surface of the NEMS. Here, we overcome both limitations by integrating an ion lens onto the NEMS chip. The ion lens is composed of a polymer layer, which charges up by receiving part of the ions incoming from the ESI tip and consequently starts to focus the analytes toward an open window aligned with the active area of the NEMS electrostatically. With this integrated system, we have detected the mass of gold and polystyrene nanoparticles under ambient conditions and with two orders-of-magnitude improvement in capture efficiency compared to the state-of-the-art. We then applied this technology to obtain the mass spectrum of SARS-CoV-2 and BoHV-1 virions. With the increase in analytical throughput, the simplicity of the overall setup, and the operation capability under ambient conditions, the technique demonstrates that NEMS mass spectrometry can be deployed for mass detection of engineered nanoparticles and biological samples efficiently.

Label-free detection of single nanoparticles with disordered nanoisland surface plasmon sensor

We report sensing of single nanoparticles using disordered metallic nanoisland substrates supporting surface plasmon polaritons (SPPs). Speckle patterns arising from leakage radiation of elastically scattered SPPs provide a unique fingerprint of the scattering microstructure at the sensor surface. Experimental measurements of the speckle decorrelation are presented and shown to enable detection of sorption of individual gold nanoparticles and polystyrene beads. Our approach is verified through bright-field and fluorescence imaging of particles adhering to the nanoisland substrate.

Recent Progress on Single-Molecule Detection Technologies for Food Safety

Rapid and sensitive detection technologies for food contaminants play vital roles in food safety. Due to the complexity of the food matrix and the trace amount distribution, traditional methods often suffer from unsatisfying accuracy, sensitivity, or specificity. In past decades, single-molecule detection (SMD) has emerged as a way to realize the rapid and ultrasensitive measurement with low sample consumption, showing a great potential in food contaminants detection. For instance, based on the nanopore technique, simple and effective methods for single-molecule analysis of food contaminants have been developed. To our knowledge, there has been a rare review that focuses on SMD techniques for food safety. The present review attempts to cover some typical SMD methods in food safety, including electrochemistry, optical spectrum, and atom force microscopy. Then, recent applications of these techniques for detecting food contaminants such as biotoxins, pesticides, heavy metals, and illegal additives are reviewed. Finally, existing research challenges and future trends of SMD in food safety are also tentatively proposed.

Quality factor control of mechanical resonators using variable phononic bandgap on periodic microstructures

The quality factor (Q-factor) is an important parameter for mechanical resonant sensors, and the optimal values depend on its application. Therefore, Q-factor control is essential for microelectromechanical systems (MEMS). Conventional methods have some restrictions, such as additional and complicated equipment or nanoscale dimensions; thus, structural methods are one of the reasonable solutions for simplifying the system. In this study, we demonstrate Q-factor control using a variable phononic bandgap by changing the length of the periodic microstructure. For this, silicon microstructure is used because it has both periodicity and a spring structure. The bandgap change is experimentally confirmed by measuring the Q-factors of mechanical resonators with different resonant frequencies. The bandgap range varies depending on the extended structure length, followed by a change in the Q-factor value. In addition, the effects of the periodic structure on the Q-factor enhancement and the influence of stress on the structural length were evaluated. Although microstructures can improve the Q-factors irrespective of periodicity; the result of the periodic microstructure is found to be efficient. The proposed method is feasible as the novel Q-factor control technique has good compatibility with conventional MEMS.

Fabricating Silicon Resonators for Analysing Biological Samples

The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve new and improved functionality. However, despite their ability to achieve assay sensitivities that rival or exceed conventional standards, silicon-based microelectromechanical systems remain underutilised for biological and biomedical applications. Although microelectromechanical resonators and actuators do not always exhibit optimal performance in liquid due to electrical double layer formation and high damping, these issues have been solved with some innovative fabrication processes or alternative experimental approaches. This paper focuses on several examples of silicon-based resonating devices with a brief look at their fundamental sensing elements and key fabrication steps, as well as current and potential biological/biomedical applications.

Characterization of the Vibration and Strain Energy Density of a Nanobeam under Two-Temperature Generalized Thermoelasticity with Fractional-Order Strain Theory

In this work, fractional-order strain theory was applied to construct a novel model that introduces a thermal analysis of a thermoelastic, isotropic, and homogeneous nanobeam. Under supported conditions of fixed aspect ratios, a two-temperature generalized thermoelasticity theory based on one relaxation time was used. The governing differential equations were solved using the Laplace transform, and their inversions were found by applying the Tzou technique. The numerical solutions and results for a thermoelastic rectangular silicon nitride nanobeam were validated and supported in the case of ramp-type heating. Graphs were used to present the numerical results. The two-temperature model parameter, beam size, ramp-type heat, and beam thickness all have a substantial influence on all of the investigated functions. Moreover, the parameter of the ramp-type heat might be beneficial for controlling the damping of nanobeam energy.

High-Q ultrasensitive integrated photonic sensors based on slot-ring resonator on a 3C-SiC-on-insulator platform

We demonstrate, to the best of our knowledge, the first high-Q silicon carbide (SiC) integrated photonic sensor based on slot-ring resonators on a 3C-SiC-on-insulator (SiCOI) platform. We experimentally demonstrate an intrinsic Q of 17,400 at around 1310 nm wavelength for a slot-ring resonator with 40 µm radius with water cladding. By applying different concentrations of a sodium chloride (NaCl) solution that covers the devices, measured bulk sensitivities of 264-300 nm/RIU (refractive index unit) are achieved in the slot-ring resonator with a 400-450 nm rail width and a 100-200 nm slot width. The device performance for biomolecular layer sensing (BMLS) is proved by the detection of the cardiac biomarker troponin with 248-322 pm/nm surface sensitivity. The reported slot-ring resonators can be of great interest for diverse sensing applications from visible to infrared wavelengths.

Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices

Visualizing eigenmodes is crucial in understanding the behavior of state-of-the-art micromechanical devices. We demonstrate a method to optically map multiple modes of mechanical structures simultaneously. The fast and robust method, based on a modified phase-lock loop, is demonstrated on a silicon nitride membrane and shown to outperform three alternative approaches. Line traces and two-dimensional maps of different modes are acquired. The high quality data enables us to determine the weights of individual contributions in superpositions of degenerate modes.

High resolution imaging of viruses: Scanning probe microscopy and related techniques

Scanning probe microscopy is a group of measurements that provides 3D visualization of viruses in different environmental conditions including liquids and air. Besides 3D topography it is possible to measure the properties like mechanical rigidity and stability, adhesion, tendency to crystallization, surface charge, etc. Choosing the right substrate and scanning parameters makes it much easier to obtain reliable data. Rational interpretation of experimental results should take into account possible artifacts, proper filtering and data presentation using specially designed software packages. Animal and human virus characterization is in the focus of many intensive studies because of their potential harm to higher organisms. The article focuses on high-resolution visualization of plant viruses. Tobacco mosaic virus, potato viruses X and B and others are not dangerous for the human being and are widely used in different applications such as vaccine preparation, construction of building units in nanotechnology and material science applications, nanoparticle production and delivery, and even metrology. The methods of virus's deposition, visualization, and consequent image processing and interpretation are described in details. Specific examples of viruses imaging are illustrated using the FemtoScan Online software, which has typical and all the necessary built-in functions for constructing three-dimensional images, their processing and analysis. Despite visible progress in visualizing the viruses using probe microscopy, many unresolved problems still remain. At present time the probe microscopy data on viruses is not systemized. There is no descriptive atlas of the images and morphology as revealed by this type of high resolution microscopy. It is worth emphasizing that new virus investigation methods will appear due to the progress of science.

Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid

Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Different vibrational modes (bending, torsional, in-plane, and extensional modes) have been exploited to enhance the quality (Q) factors and mass sensing performance in viscous media. Such resonant mass sensors have shown great potential in detecting many kinds of trace analytes in gas and liquid phases, such as chemical vapors, volatile organic compounds, pollutant gases, bacteria, biomarkers, and DNA. The integrated MEMS/NEMS mass sensors will continuously push the detection limit of trace bio/chemical molecules and bring a better understanding of gas/nanomaterial interaction and molecular binding mechanisms.

Towards a Highly Sensitive Piezoelectric Nano-Mass Detection-A Model-Based Concept Study

The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established.

Review on Carbon Nanomaterials-Based Nano-Mass and Nano-Force Sensors by Theoretical Analysis of Vibration Behavior

Carbon nanomaterials, such as carbon nanotubes (CNTs), graphene sheets (GSs), and carbyne, are an important new class of technological materials, and have been proposed as nano-mechanical sensors because of their extremely superior mechanical, thermal, and electrical performance. The present work reviews the recent studies of carbon nanomaterials-based nano-force and nano-mass sensors using mechanical analysis of vibration behavior. The mechanism of the two kinds of frequency-based nano sensors is firstly introduced with mathematical models and expressions. Afterward, the modeling perspective of carbon nanomaterials using continuum mechanical approaches as well as the determination of their material properties matching with their continuum models are concluded. Moreover, we summarize the representative works of CNTs/GSs/carbyne-based nano-mass and nano-force sensors and overview the technology for future challenges. It is hoped that the present review can provide an insight into the application of carbon nanomaterials-based nano-mechanical sensors. Showing remarkable results, carbon nanomaterials-based nano-mass and nano-force sensors perform with a much higher sensitivity than using other traditional materials as resonators, such as silicon and ZnO. Thus, more intensive investigations of carbon nanomaterials-based nano sensors are preferred and expected.

Superconducting Nanoelectromechanical Transducer Resilient to Magnetic Fields

Nanoscale electromechanical coupling provides a unique route toward control of mechanical motions and microwave fields in superconducting cavity electromechanical devices. However, conventional devices composed of aluminum have presented severe constraints on their operating conditions due to the low superconducting critical temperature (1.2 K) and magnetic field (0.01 T) of aluminum. To enhance their potential in device applications, we fabricate a superconducting electromechanical device employing niobium and demonstrate a set of cavity electromechanical dynamics, including back-action cooling and amplification, and electromechanically induced reflection at 4.2 K and in strong magnetic fields up to 0.8 T. Niobium-based electromechanical transducers operating at this temperature could potentially be employed to realize compact, nonreciprocal microwave devices in place of conventional isolators and cryogenic amplifiers. Moreover, with their resilience to magnetic fields, niobium devices utilizing the electromechanical back-action effects could be used to study spin-phonon interactions for nanomechanical spin-sensing.

A Review on Theory and Modelling of Nanomechanical Sensors for Biological Applications

Over the last decades, nanomechanical sensors have received significant attention from the scientific community, as they find plenty of applications in many different research fields, ranging from fundamental physics to clinical diagnosis. Regarding biological applications, nanomechanical sensors have been used for characterizing biological entities, for detecting their presence, and for characterizing the forces and motion associated with fundamental biological processes, among many others. Thanks to the continuous advancement of micro- and nano-fabrication techniques, nanomechanical sensors have rapidly evolved towards more sensitive devices. At the same time, researchers have extensively worked on the development of theoretical models that enable one to access more, and more precise, information about the biological entities and/or biological processes of interest. This paper reviews the main theoretical models applied in this field. We first focus on the static mode, and then continue on to the dynamic one. Then, we center the attention on the theoretical models used when nanomechanical sensors are applied in liquids, the natural environment of biology. Theory is essential to properly unravel the nanomechanical sensors signals, as well as to optimize their designs. It provides access to the basic principles that govern nanomechanical sensors applications, along with their intrinsic capabilities, sensitivities, and fundamental limits of detection.

Fundamental limits and optimal estimation of the resonance frequency of a linear harmonic oscillator

All physical oscillators are subject to thermodynamic and quantum perturbations, fundamentally limiting measurement of their resonance frequency. Analyses assuming specific ways of estimating frequency can underestimate the available precision and overlook unconventional measurement regimes. Here we derive a general, estimation-method-independent Cramer Rao lower bound for a linear harmonic oscillator resonance frequency measurement uncertainty, seamlessly accounting for the quantum, thermodynamic and instrumental limitations, including Fisher information from quantum backaction- and thermodynamically-driven fluctuations. We provide a universal and practical maximum-likelihood frequency estimator reaching the predicted limits in all regimes, and experimentally validate it on a thermodynamically-limited nanomechanical oscillator. Low relative frequency uncertainty is obtained for both very high bandwidth measurements (≈ 10-5 for τ = 30 μs ) and measurements using thermal fluctuations alone (<10-6). Beyond nanomechanics, these results advance frequency-based metrology across physical domains.

Microcantilever: Dynamical Response for Mass Sensing and Fluid Characterization

A microcantilever is a suspended micro-scale beam structure supported at one end which can bend and/or vibrate when subjected to a load. Microcantilevers are one of the most fundamental miniaturized devices used in microelectromechanical systems and are ubiquitous in sensing, imaging, time reference, and biological/biomedical applications. They are typically built using micro and nanofabrication techniques derived from the microelectronics industry and can involve microelectronics-related materials, polymeric materials, and biological materials. This work presents a comprehensive review of the rich dynamical response of a microcantilever and how it has been used for measuring the mass and rheological properties of Newtonian/non-Newtonian fluids in real time, in ever-decreasing space and time scales, and with unprecedented resolution.

Synthesis of 3D Dendritic Gold Nanostructures Assisted by a Templated Growth Process: Application to the Detection of Traces of Molecules

Complex architectures like 3D gold dendritic nanostructures were synthesized by an in situ templated growth method using a thin film of a block copolymer [polystyrene-b-poly(4-vinylpyridine)] deposited onto silicon substrates. The overall study has demonstrated the strong link between the morphology, size, and distribution of the structures and the synthetic physicochemical parameters, such as pH, reaction temperature, concentration, and nature of reactants. A nonequilibirum state of the medium has been required to create a fractal growth of the gold structures onto a prepatterned gold-seeded surface and has led to a better control of the structures' surface coverage rate. Those as-prepared nanodendrites have also exhibited high electrocatalytic activity toward a significant enhancement factor, as well as important sensitivity, thanks to tip effects. The electrochemical experiment results have demonstrated efficient adsorption and quantification of very low traces of specific molecules like glutathione or hexadecanethiol.

Dissipation Analysis Methods and Q-Enhancement Strategies in Piezoelectric MEMS Laterally Vibrating Resonators: A Review

Over the last two decades, piezoelectric resonant sensors based on micro-electromechanical systems (MEMS) technologies have been extensively studied as such sensors offer several unique benefits, such as small form factor, high sensitivity, low noise performance and fabrication compatibility with mainstream integrated circuit technologies. One key challenge for piezoelectric MEMS resonant sensors is enhancing their quality factors (Qs) to improve the resolution of these resonant sensors. Apart from sensing applications, large values of Qs are also demanded when using piezoelectric MEMS resonators to build high-frequency oscillators and radio frequency (RF) filters due to the fact that high-Q MEMS resonators favor lowering close-to-carrier phase noise in oscillators and sharpening roll-off characteristics in RF filters. Pursuant to boosting Q, it is essential to elucidate the dominant dissipation mechanisms that set the Q of the resonator. Based upon these insights on dissipation, Q-enhancement strategies can then be designed to target and suppress the identified dominant losses. This paper provides a comprehensive review of the substantial progress that has been made during the last two decades for dissipation analysis methods and Q-enhancement strategies of piezoelectric MEMS laterally vibrating resonators.

Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution

Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated nanoelectromechanical in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 pm/ for a low laser power of 85 μW and a repeatability of 2 nm after five cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields.

Approaching the Strain-Free Limit in Ultrathin Nanomechanical Resonators

Ultrathin mechanical structures are ideal building platforms to pursue the ultimate limit of nanomechanical resonators for applications in sensing, signal processing, and quantum physics. Unfortunately, as the thickness of the vibrating structures is reduced, the built-in strain of the structural materials plays an increased role in determining the mechanical performance of the devices. As a consequence, it is very challenging to fabricate resonators working in the modulus-dominant regime, where their dynamic behavior is exclusively determined by the device geometry. In this Letter, we report ultrathin doubly clamped nanomechanical resonators with aspect ratios as large as L/t ∼5000 and working in the modulus-dominant regime. We observed room temperature thermomechanically induced motion of multiple vibration modes with resonant frequencies closely matching the predicted values of Euler-Bernoulli beam theory under an axial strain of 6.3 × 10^-8. The low strain of the devices enables a record frequency tuning ratio of more than 50 times. These results illustrate a new strategy for the quantitative design of nanomechanical resonators with unprecedented performance.

Weighing synthetic polymers of ultra-high molar mass and polymeric nanomaterials: What can we learn from charge detection mass spectrometry?

Advances in soft ionization techniques for mass spectrometry (MS) of polymeric materials make it possible to determine the masses of intact molecular ions exceeding megadaltons. Interfacing MS with separation and fragmentation methods has additionally led to impressive advances in the ability to structurally characterize polymers. Even if the gap to the megadalton range has been bridged by MS for polymers standards, the MS-based analysis for more complex polymeric materials is still challenging. Charge detection mass spectrometry (CDMS) is a single-molecule method where the mass and the charge of each ion are directly determined from individual measurements. The entire molecular mass distribution of a polymer sample can be thus accurately measured. Described in this perspective paper is how molecular weight distribution as well as charge distribution can provide new insights into the structural and compositional studies of synthetic polymers and polymeric nanomaterials in the megadalton to gigadalton range of molecular weight. The recent multidimensional CDMS studies involving couplings with separation and dissociation techniques will be presented. And, finally, an outlook for the future avenues of the CDMS technique in the field of synthetic polymers of ultra-high molar mass and polymeric nanomaterials will be provided.

Mass Spectrometry of Heavy Analytes and Large Biological Aggregates by Monitoring Changes in the Quality Factor of Nanomechanical Resonators in Air

Nanomechanical resonators are routinely used for identification of various analytes such as biological and chemical molecules, viruses, or bacteria cells from the frequency response. This identification based on the multimode frequency shift measurement is limited to the analyte of mass that is much lighter than the resonator mass. Hence, the analyte can be modeled as a point particle and, as such, its stiffness and nontrivial binding effects such as surface stress can be neglected. For heavy analytes (>MDa), this identification, however, leads to incorrectly estimated masses. Using a well-known frequency response of the nanomechanical resonator in air, we show that the heavy analyte can be identified without a need for highly challenging analysis of the analyte position, stiffness, and/or binding effects just by monitoring changes in the quality factor (Q-factor) of a single harmonic frequency. A theory with a detailed procedure of mass extraction from the Q-factor is developed. In air, the Q-factor depends on the analyte mass and known air damping, while the impact of the intrinsic dissipation is negligibly small. We find that the highest mass sensitivity (for considered resonator dimensions ∼zg) can be achieved for the rarely measured lateral mode, whereas the commonly detected flexural mode yields the lowest sensitivity. Validity of the proposed procedure is confirmed by extracting the mass of heavy analytes (>GDa) made of protein and Escherichia coli bacteria cells, and the ragweed pollen nanoparticle adsorbed on the surface of the nanomechanical resonator(s) in air, of which the required changes in the Q-factor were previously experimentally measured. Our results open a doorway for rapid detection of viruses and bacteria cells using standard nanomechanical mass sensors.

Local and Non-Local Invasive Measurements on Two Quantum Spins Coupled via Nanomechanical Oscillations

Symmetry plays the central role in the structure of quantum states of bipartite (or many-body) fermionic systems. Typically, symmetry leads to the phenomenon of quantum coherence and correlations (entanglement) inherent to quantum systems only. In the present work, we study the role of symmetry (i.e., quantum correlations) in invasive quantum measurements. We consider the influence of a direct or indirect measurement process on a composite quantum system. We derive explicit analytical expressions for the case of two quantum spins positioned on both sides of the quantum cantilever. The spins are coupled indirectly to each others via their interaction with a magnetic tip deposited on the cantilever. Two types of quantum witnesses can be considered, which quantify the invasiveness of a measurement on the systems’ quantum states: (i) A local quantum witness stands for the consequence on the quantum spin states of a measurement done on the cantilever, meaning we first perform a measurement on the cantilever, and subsequently a measurement on a spin. (ii) The non-local quantum witness signifies the response of one spin if a measurement is done on the other spin. In both cases the disturbance must involve the cantilever. However, in the first case, the spin-cantilever interaction is linear in the coupling constant Ω , where as in the second case, the spin-spin interaction is quadratic in Ω . For both cases, we find and discuss analytical results for the witness.

Helium focused ion beam irradiation with subsequent chemical etching for the fabrication of nanostructures

In this paper we demonstrate a nanofabrication technique based on local ion irradiation of silicon dioxide with a focused helium ion beam. The wet etching of silicon dioxide irradiated with a focused helium ion beam is described in a two-dimensional case both numerically and experimentally. We suggest a model for the etching process based on the distribution of ion induced defects in the irradiated material. The profile of the surface of the etched silicon dioxide is simulated and compared with the results from scanning electron microscopy. Fabrication of a suspended nanostring with a diameter of less than 20 nm by means of etching ion-irradiated material is demonstrated.

Acoustic Vibrations of Al Nanocrystals: Size, Shape, and Crystallinity Revealed by Single-Particle Transient Extinction Spectroscopy

Acoustic vibrations in plasmonic nanoparticles, monitored by an all-optical means, have attracted significant increasing interest because they provide unique insight into the mechanical properties of these metallic nanostructures. Al nanostructures are a recently emerging alternative to noble metal nanoparticles, because their broad wavelength tunability and high natural abundance make them ideal for many potential applications. Here, we investigate the acoustic vibrations of individual Al nanocrystals using a combination of electron microscopy and single-particle transient extinction spectroscopy, made possible with a low-pulse energy, high sensitivity, and probe-wavelength-tunable, single-particle transient extinction microscope. For chemically synthesized, faceted Al nanocrystals, the observed vibration frequency scales with the inverse particle diameter. In contrast, triangularly shaped Al nanocrystals support two distinct frequencies, corresponding to their in- and out-of-plane breathing modes. Unlike ensemble measurements, which measure average properties, measuring the damping time of the acoustic vibrations for individual particles enables us to investigate variations of the quality factor on the particle-to-particle level. Surprisingly, we find a large variation in quality factors even for nanocrystals of similar size and shape. This observed heterogeneity appears to result from substantially varying degrees of nanoparticle crystallinity even for chemically synthesized nanocrystals.

A 5-nV/√Hz Chopper Negative-R Stabilization Preamplifier for Audio Applications

This paper presents a low-noise and low-power audio preamplifier. The proposed low-noise preamplifier employs a delay-time chopper stabilization (CHS) technique and a negative-R circuit, both in the auxiliary amplifier to cancel the non-idealities of the main amplifier. The proposed technique makes it possible to mitigate the preamplifier 1/f noise and thermal noise and improve its linearity. The low-noise preamplifier is implemented in 65 nm complementary metal-oxide semiconductor (CMOS) technology. The supply voltage is 1.2 V, while the power consumption is 159 µW, and the core area is 192 µm². The proposed circuit of the preamplifier was fabricated and measured. From the measurement results over a signal bandwidth of 20 kHz, it achieves a signal-to-noise ratio (SNR) of 80 dB, an equivalent-input referred noise of 5 nV/√Hz and a noise efficiency factor (NEF) of 1.9 within the frequency range from 1 Hz to 20 kHz.

A Chopper Stabilization Audio Instrumentation Amplifier for IoT Applications

A low-noise instrumentation amplifier dedicated to a nano- and micro-electro-mechanical system (M&NEMS) microphone for the use in Internet of Things (IoT) applications is presented. The piezoresistive sensor and the electronic interface are respectively, silicon nanowires and an instrumentation amplifier. To design an instrumentation amplifier for IoT applications, different trade-offs are discussed like power consumption, gain, noise and sensitivity. Because the most critical noisy block is the amplifier, a delay-time chopper stabilization (CHS) technique is implemented around it to eliminate its offset and 1/f noise. The low-noise instrumentation amplifier is implemented in a 65-nm CMOS (Complementary metal–oxide–semiconductor) technology. The supply voltage is 2.5 V while the power consumption is 0.4 mW and the core area is 1 mm2. The circuit of the M&NEMS microphone and the amplifier was fabricated and measured. From measurement results over a signal bandwidth of 20 kHz, it achieves a signal-to-noise ratio (SNR) of 77 dB.

Full Electrostatic Control of Nanomechanical Buckling

Buckling of mechanical structures results in bistable states with spatial separation, a feature desirable for sensing, shape configuration, and mechanical computation. Although different approaches have been developed to access buckling at microscopic scales, such as heating or prestressing beams, little attention has been paid so far to dynamically control all the parameters critical for the bifurcation-the compressive stress and the lateral force on the beam. Here, we develop an all-electrostatic architecture to control the compressive force, as well as the direction and amount of buckling, without significant heat generation on micro- or nanostructures. With this architecture, we demonstrated fundamental aspects of device function and dynamics. By applying voltages at any of the digital electronics standards, we have controlled the direction of buckling. Lateral deflections as large as 12% of the beam length were achieved. By modulating the compressive stress and lateral electrostatic force acting on the beam, we tuned the potential energy barrier between the postbifurcation stable states and characterized snap-through transitions between these states. The proposed architecture opens avenues for further studies in actuators, shape-shifting devices, thermodynamics of information, and dynamical chaos.

Hybrid Shape Memory Alloy-Based Nanomechanical Resonators for Ultrathin Film Elastic Properties Determination and Heavy Mass Spectrometry

Micro-/nanomechanical resonators are often used in material science to measure the elastic properties of ultrathin films or mass spectrometry to estimate the mass of various chemical and biological molecules. Measurements with these sensors utilize changes in the resonant frequency of the resonator exposed to an investigated quantity. Their sensitivities are, therefore, determined by the resonant frequency. The higher resonant frequency and, correspondingly, higher quality factor (Q-factor) yield higher sensitivity. In solution, the resonant frequency (Q-factor) decreases causing a significant lowering of the achievable sensitivity. Hence, the nanomechanical resonator-based sensors mainly operate in a vacuum. Identification by nanomechanical resonator also requires an additional reference measurement on the identical unloaded resonator making experiments, due to limiting achievable accuracies in current nanofabrication processes, yet challenging. In addition, the mass spectrometry by nanomechanical resonator can be routinely performed for light analytes (i.e., analyte is modelled as a point particle). For heavy analytes such as bacteria clumps neglecting their stiffness result in a significant underestimation of determined mass values. In this work, we demonstrate the extraordinary capability of hybrid shape memory alloy (SMA)-based nanomechanical resonators to i) notably tune the resonant frequencies and improve Q-factor of the resonator immersed in fluid, ii) determine the Young’s (shear) modulus of prepared ultrathin film only from frequency response of the resonator with sputtered film, and iii) perform heavy analyte mass spectrometry by monitoring shift in frequency of just a single vibrational mode. The procedures required to estimate the Young’s (shear) modulus of ultrathin film and the heavy analyte mass from observed changes in the resonant frequency caused by a phase transformation in SMA are developed and, afterward, validated using numerical simulations. The present results demonstrate the outstanding potential and capability of high frequency operating hybrid SMA-based nanomechanical resonators in sensing applications that can be rarely achieved by current nanomechanical resonator-based sensors.

Mass loading effects in the acoustic vibrations of gold nanoplates

The breathing modes of single suspended gold nanoplates have been examined by transient absorption microscopy. These vibrational modes show very high quality factors which means that their frequencies can be accurately measured. Measurements performed before and after removing the organic layer that coats the as synthesized nanoplates show significant increases in frequency, which are consistent with removal of a few nm of organic material from the nanoplate surface. Experiments were also performed after depositing polymer beads on the sample. These measurements show a decrease in frequency in the region of the beads. This implies that adding a localized mass to the nanoplate hybridizes the vibrational normal modes, creating a new breathing mode which has a maximum amplitude at the bead. The nanoplate resonators have a mass sensing detection limit of ca. 10 attograms, which is comparable to the best results that have been achieved with plasmonic nanoparticles.