Electrically driven reprogrammable phase-change metasurface reaching 80% efficiency

Optoelectronic Devices for In-Sensor Computing

The demand for accurate perception of the physical world leads to a dramatic increase in sensory nodes. However, the transmission of massive and unstructured sensory data from sensors to computing units poses great challenges in terms of power-efficiency, transmission bandwidth, data storage, time latency, and security. To efficiently process massive sensory data, it is crucial to achieve data compression and structuring at the sensory terminals. In-sensor computing integrates perception, memory, and processing functions within sensors, enabling sensory terminals to perform data compression and data structuring. Here, vision sensors are adopted as an example and discuss the functions of electronic, optical, and optoelectronic hardware for visual processing. Particularly, hardware implementations of optoelectronic devices for in-sensor visual processing that can compress and structure multidimensional vision information are examined. The underlying resistive switching mechanisms of volatile/nonvolatile optoelectronic devices and their processing operations are explored. Finally, a perspective on the future development of optoelectronic devices for in-sensor computing is provided.

An Electrochemically Programmable Metasurface with Independently Controlled Metasurface Pixels at Optical Frequencies

Metasurfaces have revolutionized optical technologies by offering powerful, compact, and versatile solutions to control light. Conducting polymers, characterized by their conjugated molecular structures, facilitate charge transport and exhibit interesting electrical, optical, and mechanical properties. Integrating conducting polymers with optical metasurfaces can unlock new opportunities and functionalities in modern optics. In this work, we demonstrate an electrochemically programmable metasurface with independently controlled metasurface pixels at optical frequencies. Electrochemical modulation of locally conjugated polyaniline on gold nanorods, which are arranged on addressable electrodes according to the Pancharatnam-Berry phase design, enables dynamic control over the metasurface pixels into programmable configurations. With the same metasurface device, we showcase diverse optical functions, including dynamic beam diffraction and varifocal lensing along and off the optical axis. The synergy between flat optics and conducting polymer science holds immense potential to enhance the performance and function versatility of metasurfaces, paving the way for innovative optical applications.

Design and Development of Metasurface Materials for Enhancing Photodetector Properties

Recently, metasurface-based photodetectors (metaphotodetectors) have been developed and applied in various fields. Metasurfaces are artificial materials with unique properties that have emerged over the past decade, and photodetectors are powerful tools used to quantify incident electromagnetic wave information by measuring changes in the conductivity of irradiated materials. Through an efficient microstructural design, metasurfaces can effectively regulate numerous characteristics of electromagnetic waves and have demonstrated unique advantages in various fields, including holographic projection, stealth, biological image enhancement, biological sensing, and energy absorption applications. Photodetectors play a crucial role in military and civilian applications; therefore, efficient photodetectors are essential for optical communications, imaging technology, and spectral analysis. Metaphotodetectors have considerably improved sensitivity and noise-equivalent power and miniaturization over conventional photodetectors. This review summarizes the advantages of metaphotodetectors based on five aspects. Furthermore, the applications of metaphotodetectors in various fields including military and civil applications, are systematically discussed. It highlights the potential future applications and developmental trends of metasurfaces in metaphotodetectors, provides systematic guidance for their development, and establishes metasurfaces as a promising technology.

Reconfigurable image processing metasurfaces with phase-change materials

Optical metasurfaces have enabled analog computing and image processing within sub-wavelength footprints, and with reduced power consumption and faster speeds. While various image processing metasurfaces have been demonstrated, most of the considered devices are static and lack reconfigurability. Yet, the ability to dynamically reconfigure processing operations is key for metasurfaces to be used within practical computing systems. Here, we demonstrate a passive edge-detection metasurface operating in the near-infrared regime whose response can be drastically modified by temperature variations smaller than 10 °C around a CMOS-compatible temperature of 65 °C. Such reconfigurability is achieved by leveraging the insulator-to-metal phase transition of a thin layer of vanadium dioxide, which strongly alters the metasurface nonlocal response. Importantly, this reconfigurability is accompanied by performance metrics-such as numerical aperture, efficiency, isotropy, and polarization-independence - close to optimal, and it is combined with a simple geometry compatible with large-scale manufacturing. Our work paves the way to a new generation of ultra-compact, tunable and passive devices for all-optical computation, with potential applications in augmented reality, remote sensing and bio-medical imaging.

Electrically Reconfigurable Phase-Change Transmissive Metasurface

Programmable and reconfigurable optics hold significant potential for transforming a broad spectrum of applications, spanning space explorations to biomedical imaging, gas sensing, and optical cloaking. The ability to adjust the optical properties of components like filters, lenses, and beam steering devices could result in dramatic reductions in size, weight, and power consumption in future optoelectronic devices. Among the potential candidates for reconfigurable optics, chalcogenide-based phase change materials (PCMs) offer great promise due to their non-volatile and analogue switching characteristics. Although PCM have found widespread use in electronic data storage, these memory devices are deeply sub-micron-sized. To incorporate phase change materials into free-space optical components, it is essential to scale them up to beyond several hundreds of microns while maintaining reliable switching characteristics. This study demonstrated a non-mechanical, non-volatile transmissive filter based on low-loss PCMs with a 200 × 200 µm2 switching area. The device/metafilter can be consistently switched between low- and high-transmission states using electrical pulses with a switching contrast ratio of 5.5 dB. The device was reversibly switched for 1250 cycles before accelerated degradation took place. The work represents an important step toward realizing free-space reconfigurable optics based on PCMs.

Timoshenko-Ehrenfest Beam-Based Reconfigurable Elastic Metasurfaces for Multifunctional Wave Manipulation

Herein, a Timoshenko-Ehrenfest beam-based reconfigurable elastic metasurface is introduced that can perform multifunctional wave phenomena within a single substrate, featuring high transmission in the ultrabroadband frequency range. Conventional elastic metasurfaces are typically limited to specific purposes and frequencies, thereby imposing significant constraints on their practical application. The approach involves assembly-components with various geometries on a substrate for reconfigurability, enabling to easily control and implement multifunctional wave phenomena, including anomalous-refraction, focusing, self-acceleration, and total-reflection. This is the first study on elastic metasurfaces to theoretically analyze the dispersion relation based on the Timoshenko-Ehrenfest beam theory, which considers shear deformations and rotational inertia. The analytical model is validated by demonstrating an excellent agreement with numerical and experimental results. The findings include full-wave harmonic simulations and experimentally visualized fields for measuring various wave modulations. Furthermore, the practicality of the system is verified by significantly enhancing the piezoelectric energy harvesting performance within the focusing configuration. It is believed that the reconfigurable elastic metasurface and analytical model based on the Timoshenko-Ehrenfest beam theory have vast applications such as structural health monitoring, wireless sensing, and Internet of Things.

Reconfigurable Micro/Nano-Optical Devices Based on Phase Transitions: From Materials, Mechanisms to Applications

In recent years, numerous efforts have been devoted to exploring innovative micro/nano-optical devices (MNODs) with reconfigurable functionality, which is highly significant because of the progressively increasing requirements for next-generation photonic systems. Fortunately, phase change materials (PCMs) provide an extremely competitive pathway to achieve this goal. The phase transitions induce significant changes to materials in optical, electrical properties or shapes, triggering great research interests in applying PCMs to reconfigurable micro/nano-optical devices (RMNODs). More specifically, the PCMs-based RMNODs can interact with incident light in on-demand or adaptive manners and thus realize unique functions. In this review, RMNODs based on phase transitions are systematically summarized and comprehensively overviewed from materials, phase change mechanisms to applications. The reconfigurable optical devices consisting of three kinds of typical PCMs are emphatically introduced, including chalcogenides, transition metal oxides, and shape memory alloys, highlighting the reversible state switch and dramatic contrast of optical responses along with designated utilities generated by phase transition. Finally, a comprehensive summary of the whole content is given, discussing the challenge and outlooking the potential development of the PCMs-based RMNODs in the future.

Nonvolatile Phase-Only Transmissive Spatial Light Modulator with Electrical Addressability of Individual Pixels

Active metasurfaces with tunable subwavelength-scale nanoscatterers are promising platforms for high-performance spatial light modulators (SLMs). Among the tuning methods, phase-change materials (PCMs) are attractive because of their nonvolatile, threshold-driven, and drastic optical modulation, rendering zero-static power, crosstalk immunity, and compact pixels. However, current electrically controlled PCM-based metasurfaces are limited to global amplitude modulation, which is insufficient for SLMs. Here, an individual-pixel addressable, transmissive metasurface is experimentally demonstrated using the low-loss PCM Sb2Se3 and doped silicon nanowire heaters. The nanowires simultaneously form a diatomic metasurface, supporting a high-quality-factor (∼406) quasi-bound-state-in-the-continuum mode. A global phase-only modulation of ∼0.25π (∼0.2π) in simulation (experiment) is achieved, showing ten times enhancement. A 2π phase shift is further obtained using a guided-mode resonance with enhanced light-Sb2Se3 interaction. Finally, individual-pixel addressability and SLM functionality are demonstrated through deterministic multilevel switching (ten levels) and tunable far-field beam shaping. Our work presents zero-static power transmissive phase-only SLMs, enabled by electrically controlled low-loss PCMs and individual meta-molecule addressable metasurfaces.

Configurable dual-topological-interface-states induced reflection in hybrid multilayers consisting of a Ge2Sb2Te5 film

Active control of induced reflection is crucial for many potential applications ranging from slowing light to biosensing devices. However, most previous approaches require patterned nanostructures to achieve controllable induced reflection, which hinders their further applications due to complicated architectures. Herein, we propose a lithography-free multilayered structure to achieve the induced reflection through the coupling of dual-topological-interface-states. The multilayers consist of two one-dimensional (1D) photonic crystals (PCs) and an Ag film separated by a Spacer, topological edge state (TES) and topological Tamm state (TTS) can be excited simultaneously and their coupling induces the reflection window. The coupled-oscillator model is proposed to mimic the coupling between the TES and TTS, and the analytical results are in good agreement with finite element method (FEM). In addition, the TES-TTS induced reflection is robust to the variation of structural parameters. By integrating an ultra-thin phase-change film of Ge2Sb2Te5 (GST) into the multilayers, the induced reflection can be switched through the phase transition of the GST film. The multipole decomposition reveals that the vanished reflection window is arising from the disappearance of TTS associated with the toroidal dipole (TD) mode.

Electrostatic steering of thermal emission with active metasurface control of delocalized modes

We theoretically describe and experimentally demonstrate a graphene-integrated metasurface structure that enables electrically-tunable directional control of thermal emission. This device consists of a dielectric spacer that acts as a Fabry-Perot resonator supporting long-range delocalized modes bounded on one side by an electrostatically tunable metal-graphene metasurface. By varying the Fermi level of the graphene, the accumulated phase of the Fabry-Perot mode is shifted, which changes the direction of absorption and emission at a fixed frequency. We directly measure the frequency- and angle-dependent emissivity of the thermal emission from a fabricated device heated to 250 °C. Our results show that electrostatic control allows the thermal emission at 6.61 μm to be continuously steered over 16°, with a peak emissivity maintained above 0.9. We analyze the dynamic behavior of the thermal emission steerer theoretically using a Fano interference model, and use the model to design optimized thermal steerer structures.

Sub-1-Volt Electrically Programmable Optical Modulator Based on Active Tamm Plasmon

Reconfigurable optical devices hold great promise for advancing high-density optical interconnects, photonic switching, and memory applications. While many optical modulators based on active materials have been demonstrated, it is challenging to achieve a high modulation depth with a low operation voltage in the near-infrared (NIR) range, which is a highly sought-after wavelength window for free-space communication and imaging applications. Here, electrically switchable Tamm plasmon coupled with poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS) is introduced. The device allows for a high modulation depth across the entire NIR range by fully absorbing incident light even under epsilon near zero conditions. Optical modulation exceeding 88% is achieved using a CMOS-compatible voltage of ±1 V. This modulation is facilitated by precise electrical control of the charge carrier density through an electrochemical doping/dedoping process. Additionally, the potential applications of the device are extended for a non-volatile multi-memory state optical device, capable of rewritable optical memory storage and exhibiting long-term potentiation/depression properties with neuromorphic behavior.

Multi-band reprogrammable phase-change metasurface spectral filters for on-chip spectrometers

Active optical metasurfaces provide a platform for dynamic and real-time manipulation of light at subwavelength scales. However, most active metasurfaces are unable to simultaneously possess a wide wavelength tuning range and narrow resonance peaks, thereby limiting further advancements in the field of high-precision sensing or detection. In the paper, we proposed a reprogrammable active metasurface that employs the non-volatile phase change material Ge2Sb2Te5 and demonstrated its excellent performance in on-chip spectrometer. The active metasurfaces support magnetic modes and feature Friedrich-Wintgen quasi bound states in the continuum, capable of achieving multi-resonant near-perfect absorption, a multilevel tuning range, and narrowband performance in the infrared band. Meanwhile, we numerically investigated the coupling phenomenon and the intrinsic relationship between different resonance modes under various structural parameters. Furthermore, using the active metasurfaces as tunable filters and combined with compressive sensing algorithms, we successfully reconstructed various types of spectral signals with an average fidelity rate exceeding 0.99, utilizing only 51 measurements with a single nanostructure. A spectral resolution of 0.5 nm at a center wavelength 2.538 µm is predicted when the crystallization fractions of GST change from 0 to 20%. This work has promising potential in on-site matter inspection and point-of-care (POC) testing.

Tunable VO2 cavity enables multispectral manipulation from visible to microwave frequencies

Optical materials capable of dynamically manipulating electromagnetic waves are an emerging field in memories, optical modulators, and thermal management. Recently, their multispectral design preliminarily attracts much attention, aiming to enhance their efficiency and integration of functionalities. However, the multispectral manipulation based on these materials is challenging due to their ubiquitous wavelength dependence restricting their capacity to narrow wavelengths. In this article, we cascade multiple tunable optical cavities with selective-transparent layers, enabling a universal approach to overcoming wavelength dependence and establishing a multispectral platform with highly integrated functions. Based on it, we demonstrate the multispectral (ranging from 400 nm to 3 cm), fast response speed (0.9 s), and reversible manipulation based on a typical phase change material, vanadium dioxide. Our platform involves tandem VO2-based Fabry-Pérot (F-P) cavities enabling the customization of optical responses at target bands independently. It can achieve broadband color-changing capacity in the visible region (a shift of ~60 nm in resonant wavelength) and is capable of freely switching between three typical optical models (transmittance, reflectance, and absorptance) in the infrared to microwave regions with drastic amplitude tunability exceeding 0.7. This work represents a state-of-art advance in multispectral optics and material science, providing a critical approach for expanding the multispectral manipulation ability of optical systems.

Physiochemical Coupled Dynamic Nanosphere Lithography Enabling Multiple Metastructures from Single Mask

Metastructures are widely used in photonic devices, energy conversion, and biomedical applications. However, to fabricate multiple patterns continuously in single etching protocol with highly tunable photonic properties is challenging. Here, a simple and robust dynamic nanosphere lithography is proposed by inserting a spacer between the nanosphere assembly and the wafer. The nanosphere diameter decrease and uneven penetration of the spacer during etching lead to a dynamic masking process. Coupled anisotropic physical ion sputtering and ricocheting with isotropic chemical radical etching achieve highly tunable structures with various 3D patterns continuously forming through a single etching process. Specifically, the nanosphere diameters define the periodicity, the etched spacer forms the upper parts, and the wafer forms the lower parts. Each part of the structure is highly tunable through changing nanosphere diameter, spacer thickness, and etch conditions. Using this protocol, numerous structures of varying sizes including nanomushrooms, nanocones, nanopencils, and nanoneedles with diverse shapes are realized as proof of concepts. The broadband antireflection ability of the nanostructures and their use in surface-enhanced Raman spectroscopy are also demonstrated for practical application. This method substantially simplifies the fabrication procedure of various metastructures, paving the way for its application in multiple disciplines especially in photonic devices.

Tunable Tamm plasmon cavity as a scalable biosensing platform for surface enhanced resonance Raman spectroscopy

Surface enhanced Resonance Raman spectroscopy (SERRS) is a powerful technique for enhancing Raman spectra by matching the laser excitation wavelength with the plasmonic resonance and the absorption peak of biomolecules. Here, we propose a tunable Tamm plasmon polariton (TPP) cavity based on a metal on distributed Bragg reflector (DBR) as a scalable sensing platform for SERRS. We develop a gold film-coated ultralow-loss phase change material (Sb2S3) based DBR, which exhibits continuously tunable TPP resonances in the optical wavelengths. We demonstrate SERRS by matching the TPP resonance with the absorption peak of the chromophore molecule at 785 nm wavelength. We use this platform to detect cardiac Troponin I protein (cTnI), a biomarker for early diagnosis of cardiovascular disease, achieving a detection limit of 380 fM. This scalable substrate shows great promise as a next-generation tunable biosensing platform for detecting disease biomarkers in body fluids for routine real-time clinical diagnosis.

Valley-conserved topological integrated antenna for 100-Gbps THz 6G wireless

The topological phase revolutionized wave transport, enabling integrated photonic interconnects with sharp light bending on a chip. However, the persistent challenge of momentum mismatch during intermedium topological mode transitions due to material impedance inconsistency remains. We present a 100-Gbps topological wireless communication link using integrated photonic devices that conserve valley momentum. The valley-conserved silicon topological waveguide antenna achieves a 12.2-dBi gain, constant group delay across a 30-GHz bandwidth and enables active beam steering within a 36° angular range. The complementary metal oxide semiconductor-compatible valley-conserved devices represent a major milestone in hybrid electronic-photonic-based topological wireless communications, enabling terabit-per-second backhaul communication, high throughput, and intermedium transport of information carriers, vital for the future of communication from the sixth to X generation.

A Quick Method for Predicting Reflectance Spectra of Nanophotonic Devices via Artificial Neural Network

Nanophotonics use the interaction between light and subwavelength structures to design nanophotonic devices and to show unique optical, electromagnetic, and acoustic properties that natural materials do not have. However, this usually requires considerable expertise and a lot of time-consuming electromagnetic simulations. With the continuous development of artificial intelligence, people are turning to deep learning for designing nanophotonic devices. Deep learning models can continuously fit the correlation function between the input parameters and output, using models with weights and biases that can obtain results in milliseconds to seconds. In this paper, we use finite-difference time-domain for simulations, and we obtain the reflectance spectra from 2430 different structures. Based on these reflectance spectra data, we use neural networks for training, which can quickly predict unseen structural reflectance spectra. The effectiveness of this method is verified by comparing the predicted results to the simulation results. Almost all results maintain the main trend, the MSE of 94% predictions are below 10-3, all are below 10-2, and the MAE of 97% predictions are below 2 × 10-2. This approach can speed up device design and optimization, and provides reference for scientific researchers.

Hybrid silicon-organic Huygens' metasurface for phase modulation

Spatial light modulators have desirable applications in sensing and free space communication because they create an interface between the optical and electronic realms. Electro-optic modulators allow for high-speed intensity manipulation of an electromagnetic wavefront. However, most surfaces of this sort pose limitations due to their ability to modulate intensity rather than phase. Here we investigate an electro-optic modulator formed from a silicon-organic Huygens' metasurface. In a simulation-based study, we discover a metasurface design immersed in high-performance electro-optic molecules that can achieve near-full resonant transmission with phase coverage over the full 2π range. Through the electro-optic effect, we show 140 ∘ (0.79π) modulation over a range of -100 to 100 V at 1330 nm while maintaining near-constant transmitted field intensity (between 0.66 and 0.8). These results potentiate the fabrication of a high-speed spatial light modulator with the resolved parameters.

Roadmap for phase change materials in photonics and beyond

Phase Change Materials (PCMs) have demonstrated tremendous potential as a platform for achieving diverse functionalities in active and reconfigurable micro-nanophotonic devices across the electromagnetic spectrum, ranging from terahertz to visible frequencies. This comprehensive roadmap reviews the material and device aspects of PCMs, and their diverse applications in active and reconfigurable micro-nanophotonic devices across the electromagnetic spectrum. It discusses various device configurations and optimization techniques, including deep learning-based metasurface design. The integration of PCMs with Photonic Integrated Circuits and advanced electric-driven PCMs are explored. PCMs hold great promise for multifunctional device development, including applications in non-volatile memory, optical data storage, photonics, energy harvesting, biomedical technology, neuromorphic computing, thermal management, and flexible electronics.

Broadband Achromatic Metalens for Tunable Focused Vortex Beam Generation in the Near-Infrared Range

Vortex beams accompanied with orbital angular momentum have attracted significant attention in research fields due to their formidable capabilities in various crucial applications. However, conventional devices for generating vortex beams still suffer from bulky sizes, high cost, and confined performances. Metalens, as an advanced platform to arbitrarily control the optical waves, has promising prospects to address the predicament for conventional devices. Although great progress has been demonstrated in the applications of vortex beams, they are still confronted with fixed functionality after fabrication that severely hinders their application range. In this work, the phase-change material of Ge2Sb2Te5 (GST) is employed to design the meta-atoms to realize tunable optical responses. Moreover, the focused vortex beam can be accomplished by superimposing a helical phase and hyperbolic phase, and the chromatic aberrations in near-infrared (NIR) range can be corrected by introducing an additional phase compensation. And the design strategy is validated by two different metalenses (BAMTF-1 and BAMTF-2). The numerical results indicate that the chromatic aberrations for two metalens can be corrected in 1.33-1.60 μm covering the telecom range. Moreover, the average focusing efficiency of BAMTF-1 is 51.4%, and that of BAMTF-2 is 39.9%, indicating the favorable performances of designed BAMTF. More importantly, their average focal lengths have a relative tuning range of 38.82% and 33.17% by altering the crystallization ratio of GST, respectively. This work may provide a significant scheme for on-chip and tunable devices for NIR imaging and communication systems.

Review: tunable nanophotonic metastructures

Tunable nanophotonic metastructures offer new capabilities in computing, networking, and imaging by providing reconfigurability in computer interconnect topologies, new optical information processing capabilities, optical network switching, and image processing. Depending on the materials and the nanostructures employed in the nanophotonic metastructure devices, various tuning mechanisms can be employed. They include thermo-optical, electro-optical (e.g. Pockels and Kerr effects), magneto-optical, ionic-optical, piezo-optical, mechano-optical (deformation in MEMS or NEMS), and phase-change mechanisms. Such mechanisms can alter the real and/or imaginary parts of the optical susceptibility tensors, leading to tuning of the optical characteristics. In particular, tunable nanophotonic metastructures with relatively large tuning strengths (e.g. large changes in the refractive index) can lead to particularly useful device applications. This paper reviews various tunable nanophotonic metastructures' tuning mechanisms, tuning characteristics, tuning speeds, and non-volatility. Among the reviewed tunable nanophotonic metastructures, some of the phase-change-mechanisms offer relatively large index change magnitude while offering non-volatility. In particular, Ge-Sb-Se-Te (GSST) and vanadium dioxide (VO2) materials are popular for this reason. Mechanically tunable nanophotonic metastructures offer relatively small changes in the optical losses while offering large index changes. Electro-optically tunable nanophotonic metastructures offer relatively fast tuning speeds while achieving relatively small index changes. Thermo-optically tunable nanophotonic metastructures offer nearly zero changes in optical losses while realizing modest changes in optical index at the expense of relatively large power consumption. Magneto-optically tunable nanophotonic metastructures offer non-reciprocal optical index changes that can be induced by changing the magnetic field strengths or directions. Tunable nanophotonic metastructures can find a very wide range of applications including imaging, computing, communications, and sensing. Practical commercial deployments of these technologies will require scalable, repeatable, and high-yield manufacturing. Most of these technology demonstrations required specialized nanofabrication tools such as e-beam lithography on relatively small fractional areas of semiconductor wafers, however, with advanced CMOS fabrication and heterogeneous integration techniques deployed for photonics, scalable and practical wafer-scale fabrication of tunable nanophotonic metastructures should be on the horizon, driven by strong interests from multiple application areas.

Recent developments in Chalcogenide phase change material-based nanophotonics

There is now a deep interest in actively reconfigurable nanophotonics as they will enable the next generation of optical devices. Of the various alternatives being explored for reconfigurable nanophotonics, Chalcogenide phase change materials (PCMs) are considered highly promising owing to the nonvolatile nature of their phase change. Chalcogenide PCM nanophotonics can be broadly classified into integrated photonics (with guided wave light propagation) and Meta-optics (with free space light propagation). Despite some early comprehensive reviews, the pace of development in the last few years has shown the need for a topical review. Our comprehensive review covers recent progress on nanophotonic architectures, tuning mechanisms, and functionalities in tunable PCM Chalcogenides. In terms of integrated photonics, we identify novel PCM nanoantenna geometries, novel material utilization, the use of nanostructured waveguides, and sophisticated excitation pulsing schemes. On the meta-optics front, the breadth of functionalities has expanded, enabled by exploring design aspects for better performance. The review identifies immediate, and intermediate-term challenges and opportunities in (1) the development of novel chalcogenide PCM, (2) advance in tuning mechanism, and (3) formal inverse design methods, including machine learning augmented inverse design, and provides perspectives on these aspects. The topical review will interest researchers in further advancing this rapidly growing subfield of nanophotonics.

The electro-optic spatial light modulator of lithium niobate metasurface based on plasmonic quasi-bound states in the continuum

Metasurface has attracted massive interest owing to its ability to control light arbitrarily in a wide range of applications, such as high-speed imaging, optical interconnection, and spectroscopy. Here we propose a free space light modulator combined with a gold grating metasurface based on lithium niobate (LiNbO3). The quasi-bound states in the continuum (quasi-BIC) are achieved in the metasurface. In addition, the plasmonic quasi-BIC and the guided-mode resonance (GMR) can be modulated by controlling the polarization of the incident light without any geometric adjustment. Thus, the working wavelength range from 1480 nm to 1620 nm was achieved, and the maximum resonance depth reached about 51% at the resonant wavelength. In addition, the insertion loss of the device was -2.8 dB at a wavelength of 1510 nm. Furthermore, the dynamic modulation speed reached up to 190 MHz and the highest signal-to-noise ratio (SNR) could reach about 49 dB at a frequency of 65 MHz. The data showed potential for the material for applications such as near-infrared imaging, beam steering, and free-space optical communication links.

Toward Accurate Thermal Modeling of Phase Change Material-Based Photonic Devices

Reconfigurable or programmable photonic devices are rapidly growing and have become an integral part of many optical systems. The ability to selectively modulate electromagnetic waves through electrical stimuli is crucial in the advancement of a variety of applications from data communication and computing devices to environmental science and space explorations. Chalcogenide-based phase-change materials (PCMs) are one of the most promising material candidates for reconfigurable photonics due to their large optical contrast between their different solid-state structural phases. Although significant efforts have been devoted to accurate simulation of PCM-based devices, in this paper, three important aspects which have often evaded prior models yet having significant impacts on the thermal and phase transition behavior of these devices are highlighted: the enthalpy of fusion, the heat capacity change upon glass transition, as well as the thermal conductivity of liquid-phase PCMs. The important topic of switching energy scaling in PCM devices, which also helps explain why the three above-mentioned effects have long been overlooked in electronic PCM memories but only become important in photonics, is further investigated. These findings offer insight to facilitate accurate modeling of PCM-based photonic devices and can inform the development of more efficient reconfigurable optics.

Programmable nanophotonic planar resonator filter-absorber based on phase-change InSbTe

Reconfigurable plasmonic-photonic electromagnetic devices have been incessantly investigated for their great ability to optically modulate through external stimuli to meet today's emerging needs, with chalcogenide phase-change materials being promising candidates due to their remarkably unique electrical and optics, enabling new perspectives in recent photonic applications. In this work, we propose a reconfigurable resonator using planar layers of stacked ultrathin films based on Metal-dielectric-PCM, which we designed and analyzed numerically by the Finite Element Method (FEM). The structure is based on thin films of Gold (Au), aluminum oxide (Al2O3), and PCM (In3SbTe2) used as substrate. The modulation between the PCM phases (amorphous and crystalline) allows the alternation from the filter to the absorber structure in the infrared (IR) spectrum (1000-2500 nm), with an efficiency greater than 70% in both cases. The influence of the thickness of the material is also analyzed to verify tolerances for manufacturing errors and dynamically control the efficiency of transmittance and absorptance peaks. The physical mechanisms of field coupling and transmitted/absorbed power density are investigated. We also analyzed the effects on polarization angles for Transversal Electric (TE) and Transversal Magnetic (TM) polarized waves for both cases.

Programmable Wavefront Control in the Visible Spectrum Using Low-Loss Chalcogenide Phase-Change Metasurfaces

All-dielectric metasurfaces provide unique solutions for advanced wavefront manipulation of light with complete control of amplitude and phase at sub-wavelength scales. One limitation, however, for most of these devices is the lack of any post-fabrication tunability of their response. To break this limit, a promising approach is employing phase-change materials (PCMs), which provide fast, low energy, and non-volatile means to endow metasurfaces with a switching mechanism. In this regard, great advancements have been done in the mid-infrared and near-infrared spectrum using different chalcogenides. In the visible spectral range, however, very few devices have demonstrated full phase manipulation, high efficiencies, and reversible optical modulation. In this work, a programmable all-dielectric Huygens' metasurface made of antimony sulfide (Sb2 S3 ) PCM is experimentally demonstrated, a low loss and high-index material in the visible spectral range with a large contrast (≈0.5) between its amorphous and crystalline states. ≈2π phase modulation is shown with high associated transmittance and it is used to create programmable beam-steering devices. These novel chalcogenide PCM metasurfaces have the potential to emerge as a platform for next-generation spatial light modulators and to impact application areas such as programmable and adaptive flat optics, light detection and ranging (LiDAR), and many more.

Broadband Mechanically Tunable Metasurface Reflectivity Modulator in the Visible Spectrum

Reflectivity modulation is a critical feature for applications in telecommunications, 3D imaging and printing, advanced laser machining, or portable displays. Tunable metasurfaces have recently emerged as a promising implementation for miniaturized and high-performance tunable optical components. Commonly, metasurface response tuning is achieved by electro-optical effects. In this work, we demonstrate reflectivity modulation based on a nanostructured, mechanically tunable, metasurface, consisting of an amorphous silicon nanopillar array and a suspended amorphous silicon membrane with integrated electrostatic actuators. With a membrane displacement of only 150 nm, we demonstrate reflectivity modulation by Mie resonance enhanced absorption in the pillar array, leading to a reflectivity contrast ratio of 1:3 over the spectral range from 400-530 nm. With fast, low-power electrostatic actuation and a broadband response in the visible spectrum, this mechanically tunable metasurface reflectivity modulator could enable high frame rate dynamic reflective displays.

Electrical Phase Modulation Based on Mid-Infrared Intersubband Polaritonic Metasurfaces

Electrically reconfigurable metasurfaces that overcome the static limitations in controlling the fundamental properties of scattered light are opening new avenues for functional flat optics. This work proposes and experimentally demonstrates electrically phase-tunable mid-infrared metasurfaces based on the polaritonic coupling of Stark-tunable intersubband transitions in semiconductor heterostructures and electromagnetic modes in plasmonic nanoresonators. In the applied voltage range of -3 to +3 V, the local phase tuning of the light reflects from the metasurface, which enables the electrical control of the polarization state and wavefront of the reflected wave. Electrical beam polarization control, electrical beam diffraction control, and electrical beam steering are experimentally demonstrated as applications for local phase tunability. The proposed electrically tunable metasurfaces can easily tune the operating wavelength and function at relatively low voltages, which will enable various applications in the mid-infrared region.

Tunable metalensing based on plasmonic resonators embedded on thermosresponsive hydrogel

Metalenses of adjustable power and ultrathin flat zoom lens system have emerged as a promising and key photonic device for integrated optics and advanced reconfigurable optical systems. Nevertheless, realizing an active metasurface retaining lensing functionality in the visible frequency regime has not been fully explored to design reconfigurable optical devices. Here, we present a focal tunable metalens and intensity tunable metalens in the visible frequency regime through the control of the hydrophilic and hydrophobic behavior of freestanding thermoresponsive hydrogel. The metasurface is comprised of plasmonic resonators embedded on the top of hydrogel which serves as dynamically reconfigurable metalens. It is shown that the focal length can be continuously tuned by adjusting the phase transition of hydrogel, the results reveal that the device is diffraction limited in different states of hydrogel. In addition, the versatility of hydrogel-based metasurfaces is further explored to design intensity tunable metalens, that can dynamically tailor the transmission intensity and confined it into the same focal spot under different states, i.e., swollen and collapsed. It is anticipated that the non-toxicity and biocompatibility make the hydrogel-based active metasurfaces suitable for active plasmonic devices with ubiquitous roles in biomedical imaging, sensing, and encryption systems.

A universal metasurface transfer technique for heterogeneous integration

Metasurfaces offer a versatile platform for engineering the wavefront of light using nanostructures with subwavelength dimensions and hold great promise for dramatically miniaturizing conventional optical elements due to their small footprint and broad functionality. However, metasurfaces so far have been mainly demonstrated on bulky and planar substrates that are often orders of magnitude thicker than the metasurface itself. Conventional substrates not only nullify the reduced footprint advantage of metasurfaces, but also limit their application scenarios. The bulk substrate also determines the metasurface dielectric environment, with potentially undesired optical effects that undermine the optical performance. Here we develop a universal polymer-assisted transfer technique to tackle this challenge by decoupling the substrate employed on the fabrication of metasurfaces from that used for the target application. As an example, Huygens' metasurfaces with 120 nm thickness in the visible range (532 nm) are demonstrated to be transferred onto a 100 nm thick freestanding SiNx membrane while maintaining excellent structural integrity and optical performance of diffraction-limited focusing. This transfer method not only enables the thinnest dielectric metalens to the best of our knowledge, but also opens up new opportunities in integrating cascaded and multilayer metasurfaces, as well as the heterogeneous integration with nonconventional substrates and various electronic/photonic devices.

Electrically programmable solid-state metasurfaces via flash localised heating

In the last decades, metasurfaces have attracted much attention because of their extraordinary light-scattering properties. However, their inherently static geometry is an obstacle to many applications where dynamic tunability in their optical behaviour is required. Currently, there is a quest to enable dynamic tuning of metasurface properties, particularly with fast tuning rate, large modulation by small electrical signals, solid state and programmable across multiple pixels. Here, we demonstrate electrically tunable metasurfaces driven by thermo-optic effect and flash-heating in silicon. We show a 9-fold change in transmission by <5 V biasing voltage and the modulation rise-time of <625 µs. Our device consists of a silicon hole array metasurface encapsulated by transparent conducting oxide as a localised heater. It allows for video frame rate optical switching over multiple pixels that can be electrically programmed. Some of the advantages of the proposed tuning method compared with other methods are the possibility to apply it for modulation in the visible and near-infrared region, large modulation depth, working at transmission regime, exhibiting low optical loss, low input voltage requirement, and operating with higher than video-rate switching speed. The device is furthermore compatible with modern electronic display technologies and could be ideal for personal electronic devices such as flat displays, virtual reality holography and light detection and ranging, where fast, solid-state and transparent optical switches are required.

Recent Advances in Reconfigurable Metasurfaces: Principle and Applications

Metasurfaces have shown their great capability to manipulate electromagnetic waves. As a new concept, reconfigurable metasurfaces attract researchers' attention. There are many kinds of reconfigurable components, devices and materials that can be loaded on metasurfaces. When cooperating with reconfigurable structures, dynamic control of the responses of metasurfaces are realized under external excitations, offering new opportunities to manipulate electromagnetic waves dynamically. This review introduces some common methods to design reconfigurable metasurfaces classified by the techniques they use, such as special materials, semiconductor components and mechanical devices. Specifically, this review provides a comparison among all the methods mentioned and discusses their pros and cons. Finally, based on the unsolved problems in the designs and applications, the challenges and possible developments in the future are discussed.

TiN-GST-TiN all-optical reflection modulator for the 2 µm wave band reaching 85% efficiency

In this study, we present an all-optical reflection modulator for the 2 µm communication band exploiting a nanogear-array metasurface and phase-change-material G e ₂ S b ₂ T e ₅ (GST). The reflectance of the structure can be manipulated by altering the phase of GST by employing optical stimuli, and this paper provides details on the optical and opto-thermal modeling techniques of GST. A numerical investigation reveals that the metastructure exhibits a conspicuous changeover from ∼99% absorption to very poor interaction with the operating light depending on the switching states of the GST, ending up with 85% modulation depth and only 0.58 dB insertion loss. Due to noticeable differences in optical responses, we can demonstrate a high extinction ratio of 28 dB and a commendable figure of merit of 49, so far the best modulation performance in this wavelength window, to our knowledge. In addition, real-time tracking of reflectance during phase transition manifests high-speed switching expending low energy per cycle, of the order of sub-nJ. Hence, given its overall performance, the device will be a paradigm for optical modulators for upcoming 2 µm communication technology.

Recent Progress in Reconfigurable and Intelligent Metasurfaces: A Comprehensive Review of Tuning Mechanisms, Hardware Designs, and Applications

Intelligent metasurfaces have gained significant importance in recent years due to their ability to dynamically manipulate electromagnetic (EM) waves. Their multifunctional characteristics, realized by incorporating active elements into the metasurface designs, have huge potential in numerous novel devices and exciting applications. In this article, recent progress in the field of intelligent metasurfaces are reviewed, focusing particularly on tuning mechanisms, hardware designs, and applications. Reconfigurable and programmable metasurfaces, classified as space gradient, time modulated, and space-time modulated metasurfaces, are discussed. Then, reconfigurable intelligent surfaces (RISs) that can alter their wireless environments, and are considered as a promising technology for sixth-generation communication networks, are explored. Next, the recent progress made in simultaneously transmitting and reflecting reconfigurable intelligent surfaces (STAR-RISs) that can achieve full-space EM wave control are summarized. Finally, the perspective on the challenges and future directions of intelligent metasurfaces are presented.

Meta-Optics-Empowered Switchable Integrated Mode Converter Based on the Adjoint Method

Monolithic integrated mode converters with high integration are essential to photonic integrated circuits (PICs), and they are widely used in next-generation optical communications and complex quantum systems. It is expected that PICs will become more miniaturized, multifunctional, and intelligent with the development of micro/nano-technology. The increase in design space makes it difficult to realize high-performance device design based on traditional parameter sweeping or heuristic design, especially in the optimal design of reconfigurable PIC devices. Combining the mode coupling theory and adjoint calculation method, we proposed a design method for a switchable mode converter. The device could realize the transmission of TE0 mode and the conversion from TE0 to TE1 mode with a footprint of 0.9 × 7.5 μm² based on the phase change materials (PCMs). We also found that the mode purity could reach 78.2% in both states at the working wavelength of 1.55 μm. The designed method will provide a new impetus for programmable photonic integrated devices and find broad application prospects in communication, optical neural networks, and sensing.

Recent Advances in Tunable Metasurfaces: Materials, Design, and Applications

Metasurfaces, a two-dimensional (2D) form of metamaterials constituted by planar meta-atoms, exhibit exotic abilities to tailor electromagnetic (EM) waves freely. Over the past decade, tremendous efforts have been made to develop various active materials and incorporate them into functional devices for practical applications, pushing the research of tunable metasurfaces to the forefront of nanophotonics. Those active materials include phase change materials (PCMs), semiconductors, transparent conducting oxides (TCOs), ferroelectrics, liquid crystals (LCs), atomically thin material, etc., and enable intriguing performances such as fast switching speed, large modulation depth, ultracompactness, and significant contrast of optical properties under external stimuli. Integration of such materials offers substantial tunability to the conventional passive nanophotonic platforms. Tunable metasurfaces with multifunctionalities triggered by various external stimuli bring in rich degrees of freedom in terms of material choices and device designs to dynamically manipulate and control EM waves on demand. This field has recently flourished with the burgeoning development of physics and design methodologies, particularly those assisted by the emerging machine learning (ML) algorithms. This review outlines recent advances in tunable metasurfaces in terms of the active materials and tuning mechanisms, design methodologies, and practical applications. We conclude this review paper by providing future perspectives in this vibrant and fast-growing research field.

Nonvolatile multi-level adjustable optical switch based on the phase change material

For the advantages of the faster computation speed and lower energy consumption, all-optical computation has attracted great attention compared with the traditional electric computation method. Optical switches are the critical elementary units of optical computation devices. However, the traditional optical switches have two shortcomings, expending the outside energy to keep the switch state and the weak multi-level adjustable ability, which greatly restrict the realization of the large-scale photonic integrated circuits and optical spiking neural networks. In this paper, we use a subwavelength grating slot-ridge (SWGSR) waveguides on the silicon platform to design a nonvolatile multi-level adjustable optical switch based on the phase change material Ge₂Sb₂Te₅ (GST). Changing the phase state of GST can modulate the transmission of the optical switch, and the change of the optical transmittance of the optical switch is about 70%, which is much higher than that of previous optical switches. As no static power is required to maintain the phase state, it can find promising applications in optical switch matrices and reconfigurable optical spiking neural networks.

Electrically Driven Reprogrammable Vanadium Dioxide Metasurface Using Binary Control for Broadband Beam Steering

Resonant optical phased arrays are a promising way to reach fully reconfigurable metasurfaces in the optical and near-infrared (NIR) regimes with low energy consumption, low footprint, and high reliability. Continuously tunable resonant structures suffer from inherent drawbacks such as low phase range, amplitude-phase correlation, or extreme sensitivity that makes precise control at the individual element level very challenging. We computationally investigate 1-bit (binary) control as a mechanism to bypass these issues. We consider a metasurface for beam steering using a nanoresonator antenna and explore the theoretical capabilities of such phased arrays. A thermally realistic structure based on vanadium dioxide sandwiched in a metal-insulator-metal structure is proposed and optimized using inverse design to enhance its performance at 1550 nm. Continuous beam steering over 90° range is successfully achieved using binary control, with excellent agreement with predictions based on the theoretical first-principles description of phased arrays. Furthermore, a broadband response from 1500 to 1700 nm is achieved. The robustness to the design manufacturing imperfections is also demonstrated. This simplified approach can be implemented to optimize tunable nanophotonic phased array metasurfaces based on other materials or phased shifting mechanisms for various functionalities.

Shortwave infrared single-pixel spectral imaging based on a GSST phase-change metasurface

Shortwave infrared (SWIR) spectral imaging obtains spectral fingerprints corresponding to overtones of molecular vibrations invisible to conventional silicon-based imagers. However, SWIR imaging is challenged by the excessive cost of detectors. Single-pixel imaging based on compressive sensing can alleviate the problem but meanwhile presents new difficulties in spectral modulations, which are prerequisite in compressive sampling. In this work, we theoretically propose a SWIR single-pixel spectral imaging system with spectral modulations based on a Ge₂Sb₂Se₄Te₁ (GSST) phase-change metasurface. The transmittance spectra of the phase-change metasurface are tuned through wavelength shifts of multipole resonances by varying crystallinities of GSST, validated by the multipole decompositions and electromagnetic field distributions. The spectral modulations constituted by the transmittance spectra corresponding to the 11 phases of GSST are sufficient for the compressive sampling on the spectral domain of SWIR hyperspectral images, indicated by the reconstruction in false color and point spectra. Moreover, the feasibility of optimization on phase-change metasurface via coherence minimization is demonstrated through the designing of the GSST pillar height. The concept of spectral modulation with phase-change metasurface overcomes the static limitation in conventional modulators, whose integratable and reconfigurable features may pave the way for high-efficient, low-cost, and miniaturized computational imaging based on nanophotonics.

Mid-infrared reconfigurable all-dielectric metasurface based on Ge2Sb2Se4Te1 phase-change material

In this paper, a reconfigurable all-dielectric metasurface based on Ge₂Sb₂Se₄Te₁ (GSST) phase-change material is proposed. By changing GSST from amorphous state to crystalline state, the metasurface can achieve high circular dichroism (CD) and wideband polarization conversion for circularly polarized waves in the mid-infrared (MIR) band. The maximum CD value reaches 0.95 at 74 THz, and circular polarization conversion efficiency is more than 90% in the wideband range of 41 THz - 48 THz. In addition, based on Pancharatnam-Berry phase, three kinds of wavefront manipulation of light have been realized: abnormal refraction, orbital angular momentum vortex beam and orbital angular momentum vortex beam splitting. This work has potential applications in the future MIR optical integrated system.

Chiral light sources get a helping hand

Resonant metasurfaces pave the way for more compact sources of pure chiral light.

Tunable Infrared Detection, Radiative Cooling and Infrared-Laser Compatible Camouflage Based on a Multifunctional Nanostructure with Phase-Change Material

The nanostructure composed of nanomaterials and subwavelength units offers flexible design freedom and outstanding advantages over conventional devices. In this paper, a multifunctional nanostructure with phase-change material (PCM) is proposed to achieve tunable infrared detection, radiation cooling and infrared (IR)-laser compatible camouflage. The structure is very simple and is modified from the classic metal-dielectric-metal (MIM) multilayer film structure. We innovatively composed the top layer of metals with slits, and introduced a non-volatile PCM Ge₂Sb₂Te₅ (GST) for selective absorption/radiation regulation. According to the simulation results, wide-angle and polarization-insensitive dual-band infrared detection is realized in the four-layer structure. The transformation from infrared detection to infrared stealth is realized in the five-layer structure, and laser stealth is realized in the atmospheric window by electromagnetic absorption. Moreover, better radiation cooling is realized in the non-atmospheric window. The proposed device can achieve more than a 50% laser absorption rate at 10.6 μm while ensuring an average infrared emissivity below 20%. Compared with previous works, our proposed multifunctional nanostructures can realize multiple applications with a compact structure only by changing the temperature. Such ultra-thin, integratable and multifunctional nanostructures have great application prospects extending to various fields such as electromagnetic shielding, optical communication and sensing.

High resolution multispectral spatial light modulators based on tunable Fabry-Perot nanocavities

Spatial light modulators (SLMs) are the most relevant technology for dynamic wavefront manipulation. They find diverse applications ranging from novel displays to optical and quantum communications. Among commercial SLMs for phase modulation, Liquid Crystal on Silicon (LCoS) offers the smallest pixel size and, thus, the most precise phase mapping and largest field of view (FOV). Further pixel miniaturization, however, is not possible in these devices due to inter-pixel cross-talks, which follow from the high driving voltages needed to modulate the thick liquid crystal (LC) cells that are necessary for full phase control. Newly introduced metasurface-based SLMs provide means for pixel miniaturization by modulating the phase via resonance tuning. These devices, however, are intrinsically monochromatic, limiting their use in applications requiring multi-wavelength operation. Here, we introduce a novel design allowing small pixel and multi-spectral operation. Based on LC-tunable Fabry-Perot nanocavities engineered to support multiple resonances across the visible range (including red, green and blue wavelengths), our design provides continuous 2π phase modulation with high reflectance at each of the operating wavelengths. Experimentally, we realize a device with 96 pixels (~1 μm pitch) that can be individually addressed by electrical biases. Using it, we first demonstrate multi-spectral programmable beam steering with FOV~18° and absolute efficiencies exceeding 40%. Then, we reprogram the device to achieve multi-spectral lensing with tunable focal distance and efficiencies ~27%. Our design paves the way towards a new class of SLM for future applications in displays, optical computing and beyond.

Multifunctional and Transformative Metaphotonics with Emerging Materials

Future technologies underpinning multifunctional physical and chemical systems and compact biological sensors will rely on densely packed transformative and tunable circuitry employing nanophotonics. For many years, plasmonics was considered as the only available platform for subwavelength optics, but the recently emerged field of resonant metaphotonics may provide a versatile practical platform for nanoscale science by employing resonances in high-index dielectric nanoparticles and metasurfaces. Here, we discuss the recently emerged field of metaphotonics and describe its connection to material science and chemistry. For tunabilty, metaphotonics employs a variety of the recently highlighted materials such as polymers, perovskites, transition metal dichalcogenides, and phase change materials. This allows to achieve diverse functionalities of metasystems and metasurfaces for efficient spatial and temporal control of light by employing multipolar resonances and the physics of bound states in the continuum. We anticipate expanding applications of these concepts in nanolasers, tunable metadevices, metachemistry, as well as a design of a new generation of chemical and biological ultracompact sensing devices.