1
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Yu C, Cao J, Zhu S, Dai Z. Preparation and Modeling of Graphene Bubbles to Obtain Strain-Induced Pseudomagnetic Fields. MATERIALS (BASEL, SWITZERLAND) 2024; 17:2889. [PMID: 38930258 PMCID: PMC11204662 DOI: 10.3390/ma17122889] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/30/2024] [Revised: 06/08/2024] [Accepted: 06/11/2024] [Indexed: 06/28/2024]
Abstract
It has been both theoretically predicted and experimentally demonstrated that strain can effectively modulate the electronic states of graphene sheets through the creation of a pseudomagnetic field (PMF). Pressurizing graphene sheets into bubble-like structures has been considered a viable approach for the strain engineering of PMFs. However, the bubbling technique currently faces limitations such as long manufacturing time, low durability, and challenges in precise control over the size and shape of the pressurized bubble. Here, we propose a rapid bubbling method based on an oxygen plasma chemical reaction to achieve rapid induction of out-of-plane deflections and in-plane strains in graphene sheets. We introduce a numerical scheme capable of accurately resolving the strain field and resulting PMFs within the pressurized graphene bubbles, even in cases where the bubble shape deviates from perfect spherical symmetry. The results provide not only insights into the strain engineering of PMFs in graphene but also a platform that may facilitate the exploration of the strain-mediated electronic behaviors of a variety of other 2D materials.
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Affiliation(s)
- Chuanli Yu
- Department of Mechanics and Engineering Science, State Key Laboratory for Turbulence and Complex Systems, College of Engineering, Peking University, Beijing 100871, China; (C.Y.); (J.C.)
| | - Jiacong Cao
- Department of Mechanics and Engineering Science, State Key Laboratory for Turbulence and Complex Systems, College of Engineering, Peking University, Beijing 100871, China; (C.Y.); (J.C.)
| | - Shuze Zhu
- Center for X-Mechanics, Department of Engineering Mechanics, Institute of Applied Mechanics, Zhejiang University, Hangzhou 310000, China;
| | - Zhaohe Dai
- Department of Mechanics and Engineering Science, State Key Laboratory for Turbulence and Complex Systems, College of Engineering, Peking University, Beijing 100871, China; (C.Y.); (J.C.)
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2
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Pezone R, Anzinger S, Baglioni G, Wasisto HS, Sarro PM, Steeneken PG, Vollebregt S. Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones. MICROSYSTEMS & NANOENGINEERING 2024; 10:27. [PMID: 38384678 PMCID: PMC10879197 DOI: 10.1038/s41378-024-00656-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/04/2023] [Revised: 11/02/2023] [Accepted: 12/14/2023] [Indexed: 02/23/2024]
Abstract
Since the performance of micro-electro-mechanical system (MEMS)-based microphones is approaching fundamental physical, design, and material limits, it has become challenging to improve them. Several works have demonstrated graphene's suitability as a microphone diaphragm. The potential for achieving smaller, more sensitive, and scalable on-chip MEMS microphones is yet to be determined. To address large graphene sizes, graphene-polymer heterostructures have been proposed, but they compromise performance due to added polymer mass and stiffness. This work demonstrates the first wafer-scale integrated MEMS condenser microphones with diameters of 2R = 220-320 μm, thickness of 7 nm multi-layer graphene, that is suspended over a back-plate with a residual gap of 5 μm. The microphones are manufactured with MEMS compatible wafer-scale technologies without any transfer steps or polymer layers that are more prone to contaminate and wrinkle the graphene. Different designs, all electrically integrated are fabricated and characterized allowing us to study the effects of the introduction of a back-plate for capacitive read-out. The devices show high mechanical compliances Cm = 0.081-1.07 μmPa-1 (10-100 × higher than the silicon reported in the state-of-the-art diaphragms) and pull-in voltages in the range of 2-9.5 V. In addition, to validate the proof of concept, we have electrically characterized the graphene microphone when subjected to sound actuation. An estimated sensitivity of S1kHz = 24.3-321 mV Pa-1 for a Vbias = 1.5 V was determined, which is 1.9-25.5 × higher than of state-of-the-art microphone devices while having a ~9 × smaller area.
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Affiliation(s)
- Roberto Pezone
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | | | - Gabriele Baglioni
- Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Delft, the Netherlands
| | | | - Pasqualina M. Sarro
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Delft, the Netherlands
- Department of Precision and Microsystems Engineering (PME), Delft University of Technology, Delft, The Netherlands
| | - Sten Vollebregt
- Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands
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3
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Wan Z, Li C, Liu R, Zhou W, Fan W, Huang C, Liu Y. Probing Thermal Transport on a Suspended Ti 3C 2T x MXene Film via a Photothermally Actuated Resonator. ACS APPLIED MATERIALS & INTERFACES 2024; 16:4999-5008. [PMID: 38241705 DOI: 10.1021/acsami.3c16291] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/21/2024]
Abstract
Two-dimensional (2D) Ti3C2Tx MXene materials show great potential in electrochemical and flexible sensors due to their high electrical conductivity, good chemical stability, and special delaminated structure. However, their thermal properties were rarely studied, which remarkably affect the stability and safety of various devices. Here, we fabricated a suspended MXene drum resonator photothermally driven by a sinusoidally modulated laser, measured the thermal time constant by demodulating the thermomechanical motion, and then calculated the thermal conductivity and thermal diffusivity of the MXene film. Experiments show the thermal conductivity of the film increases from 3.10 to 3.58 W/m·K while the thermal diffusivity from 1.06 × 10-6 to 1.22 × 10-6 m2/s when temperature increases from 300 to 360 K. We also confirm the film thermal conductivity is mainly contributed by phonon transport rather than electron transport. Furthermore, the relationship between the mechanical and thermal properties of the MXene films was disclosed. The thermal conductivity decreases when film strain increases, caused by enhanced phonon scattering and softening of high-frequency phonons. The measurements provide a noninvasive method to analyze the thermal characteristics of suspended MXene films, which can be further extended to the thermal properties of other 2D materials.
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Affiliation(s)
- Zhen Wan
- School of Instrumentation Science and Optoelectronics Engineering, Beihang University, Beijing 100191, China
| | - Cheng Li
- School of Instrumentation Science and Optoelectronics Engineering, Beihang University, Beijing 100191, China
- Research Institute of Beihang University in Shenzhen, Shenzhen 518055, China
| | - Ronghui Liu
- School of Chemistry, Beijing Advanced Innovation Center for Biomedical Engineering, Beihang University, Beijing 100191, China
| | - Wei Zhou
- School of Chemistry, Beijing Advanced Innovation Center for Biomedical Engineering, Beihang University, Beijing 100191, China
| | - Wenjing Fan
- School of Instrumentation Science and Optoelectronics Engineering, Beihang University, Beijing 100191, China
| | - Chuanxue Huang
- School of Chemistry, Beijing Advanced Innovation Center for Biomedical Engineering, Beihang University, Beijing 100191, China
| | - Yang Liu
- School of Instrumentation Science and Optoelectronics Engineering, Beihang University, Beijing 100191, China
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4
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Torkashvand Z, Shayeganfar F, Ramazani A. Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices. MICROMACHINES 2024; 15:175. [PMID: 38398905 PMCID: PMC10890696 DOI: 10.3390/mi15020175] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/04/2023] [Revised: 12/27/2023] [Accepted: 12/28/2023] [Indexed: 02/25/2024]
Abstract
The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical devices and sensing. During the last decades, using suspended 2D membranes integrated with MEMS and NEMS emerged high-performance sensitivities in mass and gas sensors, accelerometers, pressure sensors, and microphones. Actively sensing minute changes in the surrounding environment is provided by means of MEMS/NEMS sensors, such as sensing in passive modes of small changes in momentum, temperature, and strain. In this review, we discuss the materials preparation methods, electronic, optical, and mechanical properties of 2D materials used in NEMS and MEMS devices, fabrication routes besides device operation principles.
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Affiliation(s)
- Ziba Torkashvand
- Department of Physics and Energy Engineering, Amirkabir University of Technology, Tehran 15875-4413, Iran; (Z.T.); (F.S.)
| | - Farzaneh Shayeganfar
- Department of Physics and Energy Engineering, Amirkabir University of Technology, Tehran 15875-4413, Iran; (Z.T.); (F.S.)
| | - Ali Ramazani
- Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
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5
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Astakhov AM, Petrovskii VS, Frolkina MA, Markina AA, Muratov AD, Valov AF, Avetisov VA. Spontaneous Vibrations and Stochastic Resonance of Short Oligomeric Springs. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 14:41. [PMID: 38202496 PMCID: PMC10780788 DOI: 10.3390/nano14010041] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/20/2023] [Revised: 12/15/2023] [Accepted: 12/21/2023] [Indexed: 01/12/2024]
Abstract
There is growing interest in molecular structures that exhibit dynamics similar to bistable mechanical systems. These structures have the potential to be used as two-state operating units for various functional purposes. Particularly intriguing are the bistable systems that display spontaneous vibrations and stochastic resonance. Previously, via molecular dynamics simulations, it was discovered that short pyridine-furan springs in water, when subjected to stretching with power loads, exhibit the bistable dynamics of a Duffing oscillator. In this study, we extend these simulations to include short pyridine-pyrrole and pyridine-furan springs in a hydrophobic solvent. Our findings demonstrate that these systems also display the bistable dynamics, accompanied by spontaneous vibrations and stochastic resonance activated by thermal noise.
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Affiliation(s)
- Alexey M. Astakhov
- Semenov Federal Research Center for Chemical Physics, Russian Academy of Sciences, 119991 Moscow, Russia
- Design Center for Molecular Machines, 119991 Moscow, Russia
| | - Vladislav S. Petrovskii
- Semenov Federal Research Center for Chemical Physics, Russian Academy of Sciences, 119991 Moscow, Russia
- Design Center for Molecular Machines, 119991 Moscow, Russia
| | - Maria A. Frolkina
- Semenov Federal Research Center for Chemical Physics, Russian Academy of Sciences, 119991 Moscow, Russia
- Design Center for Molecular Machines, 119991 Moscow, Russia
| | - Anastasia A. Markina
- Semenov Federal Research Center for Chemical Physics, Russian Academy of Sciences, 119991 Moscow, Russia
- Design Center for Molecular Machines, 119991 Moscow, Russia
| | - Alexander D. Muratov
- Semenov Federal Research Center for Chemical Physics, Russian Academy of Sciences, 119991 Moscow, Russia
- Design Center for Molecular Machines, 119991 Moscow, Russia
| | - Alexander F. Valov
- Semenov Federal Research Center for Chemical Physics, Russian Academy of Sciences, 119991 Moscow, Russia
- Design Center for Molecular Machines, 119991 Moscow, Russia
| | - Vladik A. Avetisov
- Semenov Federal Research Center for Chemical Physics, Russian Academy of Sciences, 119991 Moscow, Russia
- Design Center for Molecular Machines, 119991 Moscow, Russia
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6
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Cho C, Zhang Z, Kim JM, Ma PJ, Haque MF, Snapp P, Nam S. Spatial Tuning of Light-Matter Interaction via Strain-Gradient-Induced Polarization in Freestanding Wrinkled 2D Materials. NANO LETTERS 2023; 23:9340-9346. [PMID: 37796972 PMCID: PMC10603806 DOI: 10.1021/acs.nanolett.3c02550] [Citation(s) in RCA: 3] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/08/2023] [Revised: 09/28/2023] [Indexed: 10/07/2023]
Abstract
To date, controlled deformation of two-dimensional (2D) materials has been extensively demonstrated with substrate-supported structures. However, interfacial effects arising from these supporting materials may suppress or alter the unique behavior of the deformed 2D materials. To address interfacial effects, we report, for the first time, the formation of a micrometer-scale freestanding wrinkled structure of 2D material without any encapsulation layers where we observed the enhanced light-matter interactions with a spatial modulation. Freestanding wrinkled monolayer WSe2 exhibited about a 330% enhancement relative to supported wrinkled WSe2 quantified through photoinduced force microscopy. Spatial modulation and enhancement of light interaction in the freestanding wrinkled structures are attributed to the enhanced strain-gradient effect (i.e., out-of-plane polarization) enabled by removing the constraining support and proximate dielectrics. Our findings offer an additional degree of freedom to modulate the out-of-plane polarization and enhance the out-of-plane light-matter interaction in 2D materials.
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Affiliation(s)
- Chullhee Cho
- Department
of Mechanical Science and Engineering, University
of Illinois Urbana−Champaign, Urbana, Illinois 61801, United States
- Cryogenics
and Fluids Branch, NASA Goddard Space Flight
Center, Greenbelt, Maryland 20771, United States
| | - Zhichao Zhang
- Department
of Mechanical Science and Engineering, University
of Illinois Urbana−Champaign, Urbana, Illinois 61801, United States
| | - Jin Myung Kim
- Department
of Mechanical and Aerospace Engineering, University of California, Irvine, Irvine, California 92697, United States
| | - Peiwen J. Ma
- Department
of Mechanical and Aerospace Engineering, University of California, Irvine, Irvine, California 92697, United States
| | - Md Farhadul Haque
- Department
of Mechanical Science and Engineering, University
of Illinois Urbana−Champaign, Urbana, Illinois 61801, United States
| | - Peter Snapp
- Department
of Mechanical Science and Engineering, University
of Illinois Urbana−Champaign, Urbana, Illinois 61801, United States
- Detectors
Systems Branch, NASA Goddard Space Flight
Center, Greenbelt, Maryland 20771, United States
| | - SungWoo Nam
- Department
of Mechanical and Aerospace Engineering, University of California, Irvine, Irvine, California 92697, United States
- Department
of Materials Science Engineering, University
of California, Irvine, Irvine, California 92697, United States
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7
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Kim JH, Rosenfeld J, Kim YC, Choe S, Composto RJ, Lee D, Dreyfus R. Polymer-Grafted, Gold Nanoparticle-Based Nano-Capsules as Reversible Colorimetric Tensile Strain Sensors. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2023; 19:e2300361. [PMID: 37140078 DOI: 10.1002/smll.202300361] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/12/2023] [Revised: 03/29/2023] [Indexed: 05/05/2023]
Abstract
Colloidal colorimetric microsensors enable the in-situ detection of mechanical strains within materials. Enhancing the sensitivity of these sensors to small scale deformation while enabling reversibility of the sensing capability would expand their utility in applications including biosensing and chemical sensing. In this study, we introduce the synthesis of colloidal colorimetric nano-sensors using a simple and readily scalable fabrication method. Colloidal nano sensors are prepared by emulsion-templated assembly of polymer-grafted gold nanoparticles (AuNP). To direct the adsorption of AuNP to the oil-water interface of emulsion droplets, AuNP (≈11nm) are functionalized with thiol-terminated polystyrene (PS, Mn = 11k). These PS-grafted gold nanoparticles are suspended in toluene and subsequently emulsified to form droplets with a diameter of ≈30µm. By evaporating the solvent of the oil-inwater emulsion, we form nanocapsules (AuNC) (diameter < 1µm) decorated by PS-grafted AuNP. To test mechanical sensing, the AuNC are embedded in an elastomer matrix. The addition of a plasticizer reduces the glass transition temperature of the PS brushes, and in turn imparts reversible deformability to the AuNC. The plasmonic peak of the AuNC shifts towards lower wavelengths upon application of uniaxial tensile tension, indicating increased inter-nanoparticle distance, and reverts back as the tension is released.
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Affiliation(s)
- Jae-Hyun Kim
- Department of Chemical and Biomolecular Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, 19104, USA
| | - Joseph Rosenfeld
- Department of Chemical and Biomolecular Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, 19104, USA
| | - Ye Chan Kim
- Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, 19104, USA
| | - Sean Choe
- Complex Assemblies of Soft Matter Laboratory (COMPASS), UMI 3254, CNRS-Solvay-University of Pennsylvania, CRTB, Bristol, PA, 19007, USA
| | - Russell J Composto
- Department of Chemical and Biomolecular Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, 19104, USA
- Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, 19104, USA
| | - Daeyeon Lee
- Department of Chemical and Biomolecular Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, 19104, USA
| | - Rémi Dreyfus
- Complex Assemblies of Soft Matter Laboratory (COMPASS), UMI 3254, CNRS-Solvay-University of Pennsylvania, CRTB, Bristol, PA, 19007, USA
- Laboratoire Nanotechnologies Nanosystemes (LN2), CNRS - Université de Sherbrooke, Quebec, J1K 0A5, Canada
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8
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Liu Y, Li C, Shi X, Wu Z, Fan S, Wan Z, Han S. High-Sensitivity Graphene MOEMS Resonant Pressure Sensor. ACS APPLIED MATERIALS & INTERFACES 2023. [PMID: 37307273 DOI: 10.1021/acsami.3c04520] [Citation(s) in RCA: 3] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/14/2023]
Abstract
Nanomechanical resonators made from suspended graphene exhibit high sensitivity toward pressure variations. Nevertheless, these devices exhibit significant energy loss in nonvacuum environments due to air damping, as well as inevitably weak gas leakage within the reference cavity because of the slight permeation of graphene. We present a new type of graphene resonant pressure sensor utilizing micro-opto-electro-mechanical systems technology, which features a multilayer graphene membrane that is sealed in vacuum and adhered to pressure-sensitive silicon film with grooves. This approach innovatively employs an indirectly sensitive method, exhibiting 60 times smaller energy loss in atmosphere, and solving the long-standing issue of gas permeation between the substrate and graphene. Notably, the proposed sensor exhibits a high pressure sensitivity of 1.7 Hz/Pa, which is 5 times higher than the sensitivity of the silicon counterparts. Also, the all-optical encapsulating cavity structure contributes a high signal-to-noise ratio of 6.9 × 10-5 Pa-1 and a low temperature drift (0.014%/◦C). The proposed method offers a promising solution for long-term stability and energy loss suppression of pressure sensors using two-dimensional materials as the sensitive membrane.
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Affiliation(s)
- Yujian Liu
- School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China
| | - Cheng Li
- School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China
- Shenzhen Institute of Beihang University, Shenzhen 518063, China
| | - Xiaodong Shi
- Institute of Materials Research and Engineering, Agency for Science, Technology and Research (A★STAR), 138634 Singapore
| | - Zhengwei Wu
- Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
| | - Shangchun Fan
- School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China
| | - Zhen Wan
- School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China
| | - Song Han
- School of Innovation and Entrepreneurship, Southern University of Science and Technology, Shenzhen 518055, China
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9
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Zhao H, Wang Y, Zhou Y. Accelerating the Gas-Solid Interactions for Conductometric Gas Sensors: Impacting Factors and Improvement Strategies. MATERIALS (BASEL, SWITZERLAND) 2023; 16:3249. [PMID: 37110096 PMCID: PMC10146907 DOI: 10.3390/ma16083249] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/05/2023] [Revised: 04/18/2023] [Accepted: 04/19/2023] [Indexed: 06/19/2023]
Abstract
Metal oxide-based conductometric gas sensors (CGS) have showcased a vast application potential in the fields of environmental protection and medical diagnosis due to their unique advantages of high cost-effectiveness, expedient miniaturization, and noninvasive and convenient operation. Of multiple parameters to assess the sensor performance, the reaction speeds, including response and recovery times during the gas-solid interactions, are directly correlated to a timely recognition of the target molecule prior to scheduling the relevant processing solutions and an instant restoration aimed for subsequent repeated exposure tests. In this review, we first take metal oxide semiconductors (MOSs) as the case study and conclude the impact of the semiconducting type as well as the grain size and morphology of MOSs on the reaction speeds of related gas sensors. Second, various improvement strategies, primarily including external stimulus (heat and photons), morphological and structural regulation, element doping, and composite engineering, are successively introduced in detail. Finally, challenges and perspectives are proposed so as to provide the design references for future high-performance CGS featuring swift detection and regeneration.
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10
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Calis M, Lloyd D, Boddeti N, Bunch JS. Adhesion of 2D MoS 2 to Graphite and Metal Substrates Measured by a Blister Test. NANO LETTERS 2023; 23:2607-2614. [PMID: 37011413 DOI: 10.1021/acs.nanolett.2c04886] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/19/2023]
Abstract
Using a blister test, we measured the work of separation between MoS2 membranes from metal, semiconductor, and graphite substrates. We found a work of separation ranging from 0.11 ± 0.05 J/m2 for chromium to 0.39 ± 0.1 J/m2 for graphite substrates. In addition, we measured the work of adhesion of MoS2 membranes over these substrates and observed a dramatic difference between the work of separation and adhesion, which we attribute to adhesion hysteresis. Due to the prominent role that adhesive forces play in the fabrication and functionality of devices made from 2D materials, an experimental determination of the work of separation and adhesion as provided here will help guide their development.
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Affiliation(s)
- Metehan Calis
- Boston University, Department of Mechanical Engineering, Boston, Massachusetts 02215, United States
| | - David Lloyd
- Analog Garage, Analog Devices Inc., Boston, Massachusetts 02110, United States
| | - Narasimha Boddeti
- Washington State University, School of Mechanical and Materials Engineering, Pullman, Washington 99163, United States
| | - J Scott Bunch
- Boston University, Department of Mechanical Engineering, Boston, Massachusetts 02215, United States
- Boston University, Division of Materials Science and Engineering, Brookline, Massachusetts 02446, United States
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11
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Baglioni G, Pezone R, Vollebregt S, Cvetanović Zobenica K, Spasenović M, Todorović D, Liu H, Verbiest GJ, van der Zant HSJ, Steeneken PG. Ultra-sensitive graphene membranes for microphone applications. NANOSCALE 2023; 15:6343-6352. [PMID: 36916300 DOI: 10.1039/d2nr05147h] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10-15 dB lower than that featured by current MEMS microphones.
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Affiliation(s)
- Gabriele Baglioni
- Kavli Institute of Nanoscience, Delft University of Technology, The Netherlands.
| | - Roberto Pezone
- Laboratory of Electronic Components, Technology and Materials, Delft University of Technology, The Netherlands
| | - Sten Vollebregt
- Laboratory of Electronic Components, Technology and Materials, Delft University of Technology, The Netherlands
| | - Katarina Cvetanović Zobenica
- Center for Microelectronic Technologies, Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Serbia
| | - Marko Spasenović
- Center for Microelectronic Technologies, Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Serbia
| | | | - Hanqing Liu
- Department of Precision and Microsystems Engineering, Delft University of Technology, The Netherlands
| | - Gerard J Verbiest
- Department of Precision and Microsystems Engineering, Delft University of Technology, The Netherlands
| | | | - Peter G Steeneken
- Kavli Institute of Nanoscience, Delft University of Technology, The Netherlands.
- Department of Precision and Microsystems Engineering, Delft University of Technology, The Netherlands
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12
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Manninen J, Laitinen A, Massel F, Hakonen P. Mechanical Detection of the De Haas-van Alphen Effect in Graphene. NANO LETTERS 2022; 22:9869-9875. [PMID: 36511693 PMCID: PMC9801430 DOI: 10.1021/acs.nanolett.2c02655] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/30/2022] [Revised: 11/30/2022] [Indexed: 06/17/2023]
Abstract
In our work, we study the dynamics of a graphene Corbino disk supported by a gold mechanical resonator in the presence of a magnetic field. We demonstrate here that our graphene/gold mechanical structure exhibits a nontrivial resonance frequency dependence on the applied magnetic field, showing how this feature is indicative of the de Haas-van Alphen effect in the graphene Corbino disk. Relying on the mechanical resonances of the Au structure, our detection scheme is essentially independent of the material considered and can be applied for dHvA measurements on any conducting 2D material. In particular, the scheme is expected to be an important tool in studies of centrosymmetric transition metal dichalcogenide (TMD) crystals, shedding new light on hidden magnetization and interaction effects.
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Affiliation(s)
- Juuso Manninen
- Low
Temperature Laboratory, Department of Applied Physics, Aalto University, PO
Box 15100, AaltoFI-00076, Finland
- QTF
Centre of Excellence, Department of Applied Physics, Aalto University, PO Box 15100, AaltoFI-00076, Finland
| | - Antti Laitinen
- Department
of Physics, Harvard University, Cambridge, Massachusetts02138, United States
| | - Francesco Massel
- Department
of Physics, Nanoscience Center, University
of Jyväskylä, JyväskyläFIN 40014, Finland
- Department
of Science and Industry Systems, University
of South-Eastern Norway, PO Box 235, Kongsberg3616, Norway
| | - Pertti Hakonen
- Low
Temperature Laboratory, Department of Applied Physics, Aalto University, PO
Box 15100, AaltoFI-00076, Finland
- QTF
Centre of Excellence, Department of Applied Physics, Aalto University, PO Box 15100, AaltoFI-00076, Finland
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13
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Lei Y, Zhang T, Lin YC, Granzier-Nakajima T, Bepete G, Kowalczyk DA, Lin Z, Zhou D, Schranghamer TF, Dodda A, Sebastian A, Chen Y, Liu Y, Pourtois G, Kempa TJ, Schuler B, Edmonds MT, Quek SY, Wurstbauer U, Wu SM, Glavin NR, Das S, Dash SP, Redwing JM, Robinson JA, Terrones M. Graphene and Beyond: Recent Advances in Two-Dimensional Materials Synthesis, Properties, and Devices. ACS NANOSCIENCE AU 2022; 2:450-485. [PMID: 36573124 PMCID: PMC9782807 DOI: 10.1021/acsnanoscienceau.2c00017] [Citation(s) in RCA: 7] [Impact Index Per Article: 3.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/04/2022] [Revised: 08/22/2022] [Accepted: 08/23/2022] [Indexed: 12/30/2022]
Abstract
Since the isolation of graphene in 2004, two-dimensional (2D) materials research has rapidly evolved into an entire subdiscipline in the physical sciences with a wide range of emergent applications. The unique 2D structure offers an open canvas to tailor and functionalize 2D materials through layer number, defects, morphology, moiré pattern, strain, and other control knobs. Through this review, we aim to highlight the most recent discoveries in the following topics: theory-guided synthesis for enhanced control of 2D morphologies, quality, yield, as well as insights toward novel 2D materials; defect engineering to control and understand the role of various defects, including in situ and ex situ methods; and properties and applications that are related to moiré engineering, strain engineering, and artificial intelligence. Finally, we also provide our perspective on the challenges and opportunities in this fascinating field.
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Affiliation(s)
- Yu Lei
- Department
of Physics, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Center
for Atomically Thin Multifunctional Coatings, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Institute
of Materials Research, Tsinghua Shenzhen
International Graduate School, Shenzhen, Guangdong 518055, China,Center
for 2-Dimensional and Layered Materials, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Tianyi Zhang
- Center
for 2-Dimensional and Layered Materials, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Department
of Material Science and Engineering, The
Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Yu-Chuan Lin
- Center
for Atomically Thin Multifunctional Coatings, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Center
for 2-Dimensional and Layered Materials, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Department
of Material Science and Engineering, The
Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Tomotaroh Granzier-Nakajima
- Department
of Physics, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Center
for 2-Dimensional and Layered Materials, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - George Bepete
- Department
of Physics, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Center
for Atomically Thin Multifunctional Coatings, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Center
for 2-Dimensional and Layered Materials, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Department
of Chemistry, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Dorota A. Kowalczyk
- Department
of Solid State Physics, Faculty of Physics and Applied Informatics, University of Lodz, Pomorska 149/153, Lodz 90-236, Poland
| | - Zhong Lin
- Department
of Physics, University of Washington, Seattle, Washington 98195, United States
| | - Da Zhou
- Department
of Physics, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Center
for 2-Dimensional and Layered Materials, The Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Thomas F. Schranghamer
- Department
of Engineering Science and Mechanics, Pennsylvania
State University, University Park, Pennsylvania 16802, United States
| | - Akhil Dodda
- Department
of Engineering Science and Mechanics, Pennsylvania
State University, University Park, Pennsylvania 16802, United States
| | - Amritanand Sebastian
- Department
of Engineering Science and Mechanics, Pennsylvania
State University, University Park, Pennsylvania 16802, United States
| | - Yifeng Chen
- Department
of Materials Science and Engineering, National
University of Singapore, 9 Engineering Drive, Singapore 117456, Singapore
| | - Yuanyue Liu
- Texas
Materials Institute and Department of Mechanical Engineering, The University of Texas at Austin, Austin, Texas 78712, United States
| | | | - Thomas J. Kempa
- Department
of Chemistry, Johns Hopkins University, Baltimore, Maryland 21287, United States
| | - Bruno Schuler
- nanotech@surfaces
Laboratory, Empa − Swiss Federal
Laboratories for Materials Science and Technology, Dübendorf 8600, Switzerland
| | - Mark T. Edmonds
- School
of Physics and Astronomy, Monash University, Clayton, Victoria 3800, Australia
| | - Su Ying Quek
- Department
of Materials Science and Engineering, National
University of Singapore, 9 Engineering Drive, Singapore 117456, Singapore
| | - Ursula Wurstbauer
- Institute
of Physics, University of Münster, Wilhelm-Klemm-Str. 10, Münster 48149, Germany
| | - Stephen M. Wu
- Department
of Electrical and Computer Engineering & Department of Physics
and Astronomy, University of Rochester, Rochester, New York 14627, United States
| | - Nicholas R. Glavin
- Air
Force
Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Dayton, Ohio 45433, United States
| | - Saptarshi Das
- Center
for Atomically Thin Multifunctional Coatings, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Center
for 2-Dimensional and Layered Materials, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Department
of Material Science and Engineering, The
Pennsylvania State University, University Park, Pennsylvania 16802, United States,Department
of Engineering Science and Mechanics, Pennsylvania
State University, University Park, Pennsylvania 16802, United States
| | - Saroj Prasad Dash
- Department
of Microtechnology and Nanoscience, Chalmers
University of Technology, Göteborg SE-412 96, Sweden
| | - Joan M. Redwing
- Center
for 2-Dimensional and Layered Materials, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Department
of Material Science and Engineering, The
Pennsylvania State University, University Park, Pennsylvania 16802, United States
| | - Joshua A. Robinson
- Center
for Atomically Thin Multifunctional Coatings, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Center
for 2-Dimensional and Layered Materials, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Department
of Material Science and Engineering, The
Pennsylvania State University, University Park, Pennsylvania 16802, United States,
| | - Mauricio Terrones
- Department
of Physics, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Center
for Atomically Thin Multifunctional Coatings, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Center
for 2-Dimensional and Layered Materials, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Department
of Material Science and Engineering, The
Pennsylvania State University, University Park, Pennsylvania 16802, United States,Department
of Chemistry, The Pennsylvania State University, University Park, Pennsylvania 16802, United States,Research
Initiative for Supra-Materials and Global Aqua Innovation Center, Shinshu University, 4-17-1Wakasato, Nagano 380-8553, Japan,
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14
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Saeed M, Palacios P, Wei MD, Baskent E, Fan CY, Uzlu B, Wang KT, Hemmetter A, Wang Z, Neumaier D, Lemme MC, Negra R. Graphene-Based Microwave Circuits: A Review. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2022; 34:e2108473. [PMID: 34957614 DOI: 10.1002/adma.202108473] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/21/2021] [Revised: 12/21/2021] [Indexed: 06/14/2023]
Abstract
Over the past two decades, research on 2D materials has received much interest. Graphene is the most promising candidate regarding high-frequency applications thus far due to is high carrier mobility. Here, the research about the employment of graphene in micro- and millimeter-wave circuits is reviewed. The review starts with the different methodologies to grow and transfer graphene, before discussing the way graphene-based field-effect-transistors (GFETs) and diodes are built. A review on different approaches for realizing these devices is provided before discussing the employment of both GFETs and graphene diodes in different micro- and millimeter-wave circuits, showing the possibilities but also the limitations of this 2D material for high-frequency applications.
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Affiliation(s)
- Mohamed Saeed
- Chair of High Frequency Electronics, RWTH Aachen University, Koppernikusstr. 16, 52074, Aachen, Germany
| | - Paula Palacios
- Chair of High Frequency Electronics, RWTH Aachen University, Koppernikusstr. 16, 52074, Aachen, Germany
| | - Muh-Dey Wei
- Chair of High Frequency Electronics, RWTH Aachen University, Koppernikusstr. 16, 52074, Aachen, Germany
| | - Eyyub Baskent
- Chair of High Frequency Electronics, RWTH Aachen University, Koppernikusstr. 16, 52074, Aachen, Germany
| | - Chun-Yu Fan
- Chair of High Frequency Electronics, RWTH Aachen University, Koppernikusstr. 16, 52074, Aachen, Germany
| | - Burkay Uzlu
- AMO GmbH, Otto-Blumenthal-Str. 25, 52074, Aachen, Germany
- Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074, Aachen, Germany
| | - Kun-Ta Wang
- AMO GmbH, Otto-Blumenthal-Str. 25, 52074, Aachen, Germany
- Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074, Aachen, Germany
| | - Andreas Hemmetter
- AMO GmbH, Otto-Blumenthal-Str. 25, 52074, Aachen, Germany
- Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074, Aachen, Germany
| | - Zhenxing Wang
- AMO GmbH, Otto-Blumenthal-Str. 25, 52074, Aachen, Germany
| | - Daniel Neumaier
- AMO GmbH, Otto-Blumenthal-Str. 25, 52074, Aachen, Germany
- Chair of Smart Sensor Systems, University of Wuppertal, Lise-Meitner-Str. 13, 42119, Wuppertal, Germany
| | - Max C Lemme
- AMO GmbH, Otto-Blumenthal-Str. 25, 52074, Aachen, Germany
- Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 25, 52074, Aachen, Germany
| | - Renato Negra
- Chair of High Frequency Electronics, RWTH Aachen University, Koppernikusstr. 16, 52074, Aachen, Germany
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15
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Ying Y, Zhang ZZ, Moser J, Su ZJ, Song XX, Guo GP. Sliding nanomechanical resonators. Nat Commun 2022; 13:6392. [PMID: 36302768 PMCID: PMC9613885 DOI: 10.1038/s41467-022-34144-5] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/26/2022] [Accepted: 10/11/2022] [Indexed: 11/09/2022] Open
Abstract
The motion of a vibrating object is determined by the way it is held. This simple observation has long inspired string instrument makers to create new sounds by devising elegant string clamping mechanisms, whereby the distance between the clamping points is modulated as the string vibrates. At the nanoscale, the simplest way to emulate this principle would be to controllably make nanoresonators slide across their clamping points, which would effectively modulate their vibrating length. Here, we report measurements of flexural vibrations in nanomechanical resonators that reveal such a sliding motion. Surprisingly, the resonant frequency of vibrations draws a loop as a tuning gate voltage is cycled. This behavior indicates that sliding is accompanied by a delayed frequency response of the resonators, making their dynamics richer than that of resonators with fixed clamping points. Our work elucidates the dynamics of nanomechanical resonators with unconventional boundary conditions, and offers opportunities for studying friction at the nanoscale from resonant frequency measurements. The motion of a vibrating object is set by the way it is held. Here, the authors show a nanomechanical resonator reversibly slides on its supporting substrate as it vibrates and exploit this unconventional dynamics to quantify friction at the nanoscale.
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Affiliation(s)
- Yue Ying
- CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei, Anhui, 230026, China.,CAS Center for Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei, Anhui, 230026, China
| | - Zhuo-Zhi Zhang
- CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei, Anhui, 230026, China.,CAS Center for Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei, Anhui, 230026, China
| | - Joel Moser
- School of Optoelectronic Science and Engineering, Soochow University, Suzhou, Jiangsu, 215006, China. .,Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province, Soochow University, Suzhou, Jiangsu, 215006, China.
| | - Zi-Jia Su
- CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei, Anhui, 230026, China.,CAS Center for Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei, Anhui, 230026, China
| | - Xiang-Xiang Song
- CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei, Anhui, 230026, China. .,CAS Center for Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei, Anhui, 230026, China.
| | - Guo-Ping Guo
- CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei, Anhui, 230026, China. .,CAS Center for Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei, Anhui, 230026, China. .,Origin Quantum Computing Company Limited, Hefei, Anhui, 230088, China.
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16
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Photothermal Responsivity of van der Waals Material-Based Nanomechanical Resonators. NANOMATERIALS 2022; 12:nano12152675. [PMID: 35957105 PMCID: PMC9370576 DOI: 10.3390/nano12152675] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/07/2022] [Revised: 07/30/2022] [Accepted: 07/31/2022] [Indexed: 02/04/2023]
Abstract
Nanomechanical resonators made from van der Waals materials (vdW NMRs) provide a new tool for sensing absorbed laser power. The photothermal response of vdW NMRs, quantified from the resonant frequency shifts induced by optical absorption, is enhanced when incorporated in a Fabry–Pérot (FP) interferometer. Along with the enhancement comes the dependence of the photothermal response on NMR displacement, which lacks investigation. Here, we address the knowledge gap by studying electromotively driven niobium diselenide drumheads fabricated on highly reflective substrates. We use a FP-mediated absorptive heating model to explain the measured variations of the photothermal response. The model predicts a higher magnitude and tuning range of photothermal responses on few-layer and monolayer NbSe2 drumheads, which outperform other clamped vdW drum-type NMRs at a laser wavelength of 532 nm. Further analysis of the model shows that both the magnitude and tuning range of NbSe2 drumheads scale with thickness, establishing a displacement-based framework for building bolometers using FP-mediated vdW NMRs.
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17
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Tan D, Cao X, Huang J, Peng Y, Zeng L, Guo Q, Sun N, Bi S, Ji R, Jiang C. Monolayer MXene Nanoelectromechanical Piezo-Resonators with 0.2 Zeptogram Mass Resolution. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2022; 9:e2201443. [PMID: 35619285 PMCID: PMC9353497 DOI: 10.1002/advs.202201443] [Citation(s) in RCA: 6] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/12/2022] [Revised: 04/26/2022] [Indexed: 06/15/2023]
Abstract
2D materials-based nanoelectromechanical resonant systems with high sensitivity can precisely trace quantities of ultra-small mass molecules and therefore are broadly applied in biological analysis, chemical sensing, and physical detection. However, conventional optical and capacitive transconductance schemes struggle to measure high-order mode resonant effectively, which is the scientific key to further achieving higher accuracy and lower noise. In the present study, the different vibrations of monolayer Ti3 C2 Tx MXene piezo-resonators are investigated, and achieve a high-order f2,3 resonant mode with a ≈234.59 ± 0.05 MHz characteristic peak due to the special piezoelectrical structure of the Ti3 C2 Tx MXene layer. The effective measurements of signals have a low thermomechanical motion spectral density (9.66 ± 0.01 fmHz$\frac{{fm}}{{\sqrt {Hz} }}$ ) and an extensive dynamic range (118.49 ± 0.42 dB) with sub-zeptograms resolution (0.22 ± 0.01 zg) at 300 K temperature and 1 atm. Furthermore, the functional groups of the Ti3 C2 Tx MXene with unique adsorption properties enable a high working range ratio of ≈3100 and excellent repeatability. This Ti3 C2 Tx MXene device demonstrates encouraging performance advancements over other nano-resonators and will lead the related engineering applications including high-sensitivity mass detectors.
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Affiliation(s)
- Dongchen Tan
- Key Laboratory for Precision and Non‐traditional Machining Technology of the Ministry of EducationDalian University of TechnologyDalian116024China
| | - Xuguang Cao
- Key Laboratory for Precision and Non‐traditional Machining Technology of the Ministry of EducationDalian University of TechnologyDalian116024China
| | - Jijie Huang
- School of Materials EngineeringPurdue UniversityWest LafayetteIN47907USA
| | - Yan Peng
- Key Laboratory for Precision and Non‐traditional Machining Technology of the Ministry of EducationDalian University of TechnologyDalian116024China
| | - Lijun Zeng
- Key Laboratory for Precision and Non‐traditional Machining Technology of the Ministry of EducationDalian University of TechnologyDalian116024China
| | - Qinglei Guo
- Department of Material Science and EngineeringFrederick Seitz Material Research LaboratoryUniversity of Illinois at Urbana‐ChampaignUrbanaIL61801USA
| | - Nan Sun
- Key Laboratory for Precision and Non‐traditional Machining Technology of the Ministry of EducationDalian University of TechnologyDalian116024China
| | - Sheng Bi
- Key Laboratory for Precision and Non‐traditional Machining Technology of the Ministry of EducationDalian University of TechnologyDalian116024China
| | - Ruonan Ji
- Department of PhysicsNorthwestern Polytechnical UniversityXi'an710072China
| | - Chengming Jiang
- Key Laboratory for Precision and Non‐traditional Machining Technology of the Ministry of EducationDalian University of TechnologyDalian116024China
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18
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Kempt R, Lukas S, Hartwig O, Prechtl M, Kuc A, Brumme T, Li S, Neumaier D, Lemme MC, Duesberg GS, Heine T. Stacking Polymorphism in PtSe 2 Drastically Affects Its Electromechanical Properties. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2022; 9:e2201272. [PMID: 35652199 PMCID: PMC9353474 DOI: 10.1002/advs.202201272] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/18/2022] [Revised: 04/28/2022] [Indexed: 06/15/2023]
Abstract
PtSe2 is one of the most promising materials for the next generation of piezoresistive sensors. However, the large-scale synthesis of homogeneous thin films with reproducible electromechanical properties is challenging due to polycrystallinity. It is shown that stacking phases other than the 1T phase become thermodynamically available at elevated temperatures that are common during synthesis. It is shown that these phases can make up a significant fraction in a polycrystalline thin film and discuss methods to characterize them, including their Seebeck coefficients. Lastly, their gauge factors, which vary strongly and heavily impact the performance of a nanoelectromechanical device are estimated.
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Affiliation(s)
- Roman Kempt
- Chair of Theoretical ChemistryTechnische Universität DresdenBergstrasse 66Dresden01069Germany
| | - Sebastian Lukas
- Chair of Electronic DevicesRWTH Aachen UniversityOtto‐Blumenthal‐Str. 2Aachen52074Germany
| | - Oliver Hartwig
- Insitute of PhysicsFaculty of Electrical Engineering and Information Technology (EIT 2)Universität der Bundeswehr MünchenWerner‐Heisenberg‐Weg 39Neubiberg85577Germany
| | - Maximilian Prechtl
- Insitute of PhysicsFaculty of Electrical Engineering and Information Technology (EIT 2)Universität der Bundeswehr MünchenWerner‐Heisenberg‐Weg 39Neubiberg85577Germany
| | - Agnieszka Kuc
- Helmholtz‐Zentrum Dresden‐RossendorfPermoserstrasse 15Leipzig04318Germany
| | - Thomas Brumme
- Chair of Theoretical ChemistryTechnische Universität DresdenBergstrasse 66Dresden01069Germany
| | - Sha Li
- AMO GmbHAdvanced Microelectronic Center AachenOtto‐Blumenthal‐Str. 25Aachen52074Germany
| | - Daniel Neumaier
- AMO GmbHAdvanced Microelectronic Center AachenOtto‐Blumenthal‐Str. 25Aachen52074Germany
- Chair of Smart Sensor SystemsBergische Universität WuppertalLise‐Meitner‐Str. 13Wuppertal42119Germany
| | - Max C. Lemme
- AMO GmbHAdvanced Microelectronic Center AachenOtto‐Blumenthal‐Str. 25Aachen52074Germany
- Chair of Electronic DevicesRWTH Aachen UniversityOtto‐Blumenthal‐Str. 2Aachen52074Germany
| | - Georg S. Duesberg
- Insitute of PhysicsFaculty of Electrical Engineering and Information Technology (EIT 2)Universität der Bundeswehr MünchenWerner‐Heisenberg‐Weg 39Neubiberg85577Germany
| | - Thomas Heine
- Chair of Theoretical ChemistryTechnische Universität DresdenBergstrasse 66Dresden01069Germany
- Helmholtz‐Zentrum Dresden‐RossendorfPermoserstrasse 15Leipzig04318Germany
- Department of ChemistryYonsei UniversitySeodaemun‐guSeoul120‐749Republic of Korea
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19
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Rahman S, Lu Y. Nano-engineering and nano-manufacturing in 2D materials: marvels of nanotechnology. NANOSCALE HORIZONS 2022; 7:849-872. [PMID: 35758316 DOI: 10.1039/d2nh00226d] [Citation(s) in RCA: 8] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Two-dimensional materials have attracted significant interest and investigation since the marvellous discovery of graphene. Due to their unique physical, mechanical and optical properties, van der Waals (vdW) materials possess extraordinary potential for application in future optoelectronics devices. Nano-engineering and nano-manufacturing in the atomically thin regime has further opened multifarious avenues to explore novel physical properties. Among them, moiré heterostructures, strain engineering and substrate manipulation have created numerous exotic and topological phenomena such as unconventional superconductivity, orbital magnetism, flexible nanoelectronics and highly efficient photovoltaics. This review comprehensively summarizes the three most influential techniques of nano-engineering in 2D materials. The latest development in the marvels of moiré structures in vdW materials is discussed; in addition, topological structures in layered materials and substrate engineering on the nanoscale are thoroughly scrutinized to highlight their significance in micro- and nano-devices. Finally, we conclude with remarks on challenges and possible future directions in the rapidly expanding field of nanotechnology and nanomaterial.
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Affiliation(s)
- Sharidya Rahman
- School of Engineering, College of Engineering and Computer Science, The Australian National University, Canberra, ACT 2601, Australia.
| | - Yuerui Lu
- School of Engineering, College of Engineering and Computer Science, The Australian National University, Canberra, ACT 2601, Australia.
- ARC Centre for Quantum Computation and Communication Technology, Department of Quantum Science, School of Engineering, The Australian National University, Acton, ACT 2601, Australia.
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20
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Moreno-Garcia D, Fan X, Smith AD, Lemme MC, Messina V, Martin-Olmos C, Niklaus F, Villanueva LG. A Resonant Graphene NEMS Vibrometer. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2022; 18:e2201816. [PMID: 35638191 DOI: 10.1002/smll.202201816] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/22/2022] [Revised: 05/09/2022] [Indexed: 06/15/2023]
Abstract
Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.
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Affiliation(s)
- Daniel Moreno-Garcia
- Advanced NEMS Group, École Polytechnique Féderale de Lausanne (EPFL), Lausanne, 1015, Switzerland
| | - Xuge Fan
- Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, SE-10044, Sweden
- Adv. Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, Beijing, 100081, China
| | - Anderson D Smith
- Department of Electrical Engineering, Chalmers University of Technology, Gothenburg, 41296, Sweden
| | - Max C Lemme
- Chair of Electronic Devices, Faculty of Electrical Engineering and Information Tech, RWTH Aachen University, 52074, Aachen, Germany
| | - Vincenzo Messina
- Advanced NEMS Group, École Polytechnique Féderale de Lausanne (EPFL), Lausanne, 1015, Switzerland
| | | | - Frank Niklaus
- Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, Stockholm, SE-10044, Sweden
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21
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Knobloch T, Uzlu B, Illarionov YY, Wang Z, Otto M, Filipovic L, Waltl M, Neumaier D, Lemme MC, Grasser T. Improving stability in two-dimensional transistors with amorphous gate oxides by Fermi-level tuning. NATURE ELECTRONICS 2022; 5:356-366. [PMID: 35783488 PMCID: PMC9236902 DOI: 10.1038/s41928-022-00768-0] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/15/2021] [Accepted: 04/22/2022] [Indexed: 06/02/2023]
Abstract
Electronic devices based on two-dimensional semiconductors suffer from limited electrical stability because charge carriers originating from the semiconductors interact with defects in the surrounding insulators. In field-effect transistors, the resulting trapped charges can lead to large hysteresis and device drifts, particularly when common amorphous gate oxides (such as silicon or hafnium dioxide) are used, hindering stable circuit operation. Here, we show that device stability in graphene-based field-effect transistors with amorphous gate oxides can be improved by Fermi-level tuning. We deliberately tune the Fermi level of the channel to maximize the energy distance between the charge carriers in the channel and the defect bands in the amorphous aluminium gate oxide. Charge trapping is highly sensitive to the energetic alignment of the Fermi level of the channel with the defect band in the insulator, and thus, our approach minimizes the amount of electrically active border traps without the need to reduce the total number of traps in the insulator.
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Affiliation(s)
| | - Burkay Uzlu
- AMO GmbH, Aachen, Germany
- Chair of Electronic Devices, RWTH Aachen University, Aachen, Germany
| | - Yury Yu. Illarionov
- Institute for Microelectronics, TU Wien, Vienna, Austria
- Ioffe Institute, Saint Petersburg, Russia
| | | | | | - Lado Filipovic
- Institute for Microelectronics, TU Wien, Vienna, Austria
| | - Michael Waltl
- Christian Doppler Laboratory for Single-Defect Spectroscopy in Semiconductor Devices at the Institute for Microelectronics, TU Wien, Vienna, Austria
| | - Daniel Neumaier
- AMO GmbH, Aachen, Germany
- Chair of Smart Sensor Systems, University of Wuppertal, Wuppertal, Germany
| | - Max C. Lemme
- AMO GmbH, Aachen, Germany
- Chair of Electronic Devices, RWTH Aachen University, Aachen, Germany
| | - Tibor Grasser
- Institute for Microelectronics, TU Wien, Vienna, Austria
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22
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Pezone R, Baglioni G, Sarro PM, Steeneken PG, Vollebregt S. Sensitive Transfer-Free Wafer-Scale Graphene Microphones. ACS APPLIED MATERIALS & INTERFACES 2022; 14:21705-21712. [PMID: 35475352 PMCID: PMC9100512 DOI: 10.1021/acsami.2c03305] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/22/2022] [Accepted: 04/12/2022] [Indexed: 06/14/2023]
Abstract
During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires breakthrough device concepts, geometries, and materials. Graphene is an attractive material for enabling these breakthroughs due to its flexibility, strength, nanometer thinness, and high electrical conductivity. Here, we demonstrate that transfer-free 7 nm thick multilayer graphene (MLGr) membranes with diameters ranging from 85-155 to 300 μm can be used to detect sound and show a mechanical compliance up to 92 nm Pa-1, thus outperforming commercially available MEMS microphones of 950 μm with compliances around 3 nm Pa-1. The feasibility of realizing larger membranes with diameters of 300 μm and even higher compliances is shown, although these have lower yields. We present a process for locally growing graphene on a silicon wafer and realizing suspended membranes of patterned graphene across through-silicon holes by bulk micromachining and sacrificial layer etching, such that no transfer is required. This transfer-free method results in a 100% yield for membranes with diameters up to 155 μm on 132 fabricated drums. The device-to-device variations in the mechanical compliance in the audible range (20-20000 Hz) are significantly smaller than those in transferred membranes. With this work, we demonstrate a transfer-free method for realizing wafer-scale multilayer graphene membranes that is compatible with high-volume manufacturing. Thus, limitations of transfer-based methods for graphene microphone fabrication such as polymer contamination, crack formation, wrinkling, folding, delamination, and low-tension reproducibility are largely circumvented, setting a significant step on the route toward high-volume production of graphene microphones.
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Affiliation(s)
- Roberto Pezone
- Laboratory
of Electronic Components, Technology and Materials (ECTM), Department
of Microelectronics, Delft University of
Technology, 2628 CD Delft, The Netherlands
| | - Gabriele Baglioni
- Kavli
Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, 2628 CD Delft, The Netherlands
| | - Pasqualina M. Sarro
- Laboratory
of Electronic Components, Technology and Materials (ECTM), Department
of Microelectronics, Delft University of
Technology, 2628 CD Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, 2628 CD Delft, The Netherlands
- Department
of Precision and Microsystems Engineering (PME), Delft University of Technology, 2628 CD Delft, The Netherlands
| | - Sten Vollebregt
- Laboratory
of Electronic Components, Technology and Materials (ECTM), Department
of Microelectronics, Delft University of
Technology, 2628 CD Delft, The Netherlands
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23
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Gaihre B, Potes MA, Serdiuk V, Tilton M, Liu X, Lu L. Two-dimensional nanomaterials-added dynamism in 3D printing and bioprinting of biomedical platforms: Unique opportunities and challenges. Biomaterials 2022; 284:121507. [PMID: 35421800 PMCID: PMC9933950 DOI: 10.1016/j.biomaterials.2022.121507] [Citation(s) in RCA: 11] [Impact Index Per Article: 5.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/23/2021] [Revised: 03/17/2022] [Accepted: 04/01/2022] [Indexed: 12/13/2022]
Abstract
The nanomaterials research spectrum has seen the continuous emergence of two-dimensional (2D) materials over the years. These highly anisotropic and ultrathin materials have found special attention in developing biomedical platforms for therapeutic applications, biosensing, drug delivery, and regenerative medicine. Three-dimensional (3D) printing and bioprinting technologies have emerged as promising tools in medical applications. The convergence of 2D nanomaterials with 3D printing has extended the application dynamics of available biomaterials to 3D printable inks and bioinks. Furthermore, the unique properties of 2D nanomaterials have imparted multifunctionalities to 3D printed constructs applicable to several biomedical applications. 2D nanomaterials such as graphene and its derivatives have long been the interest of researchers working in this area. Beyond graphene, a range of emerging 2D nanomaterials, such as layered silicates, black phosphorus, transition metal dichalcogenides, transition metal oxides, hexagonal boron nitride, and MXenes, are being explored for the multitude of biomedical applications. Better understandings on both the local and systemic toxicity of these materials have also emerged over the years. This review focuses on state-of-art 3D fabrication and biofabrication of biomedical platforms facilitated by 2D nanomaterials, with the comprehensive summary of studies focusing on the toxicity of these materials. We highlight the dynamism added by 2D nanomaterials in the printing process and the functionality of printed constructs.
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Affiliation(s)
- Bipin Gaihre
- Department of Physiology and Biomedical Engineering, Mayo Clinic, Rochester, MN, 55905, United States,Department of Orthopedic Surgery, Mayo Clinic, Rochester, MN, 55905, United States
| | - Maria Astudillo Potes
- Department of Physiology and Biomedical Engineering, Mayo Clinic, Rochester, MN, 55905, United States,Department of Orthopedic Surgery, Mayo Clinic, Rochester, MN, 55905, United States
| | - Vitalii Serdiuk
- Department of Physiology and Biomedical Engineering, Mayo Clinic, Rochester, MN, 55905, United States,Department of Orthopedic Surgery, Mayo Clinic, Rochester, MN, 55905, United States
| | - Maryam Tilton
- Department of Physiology and Biomedical Engineering, Mayo Clinic, Rochester, MN, 55905, United States,Department of Orthopedic Surgery, Mayo Clinic, Rochester, MN, 55905, United States
| | - Xifeng Liu
- Department of Physiology and Biomedical Engineering, Mayo Clinic, Rochester, MN, 55905, United States,Department of Orthopedic Surgery, Mayo Clinic, Rochester, MN, 55905, United States
| | - Lichun Lu
- Department of Physiology and Biomedical Engineering, Mayo Clinic, Rochester, MN, 55905, United States; Department of Orthopedic Surgery, Mayo Clinic, Rochester, MN, 55905, United States.
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24
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Preparation of a Vertical Graphene-Based Pressure Sensor Using PECVD at a Low Temperature. MICROMACHINES 2022; 13:mi13050681. [PMID: 35630148 PMCID: PMC9146447 DOI: 10.3390/mi13050681] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/09/2022] [Revised: 04/24/2022] [Accepted: 04/25/2022] [Indexed: 11/16/2022]
Abstract
Flexible pressure sensors have received much attention due to their widespread potential applications in electronic skins, health monitoring, and human-machine interfaces. Graphene and its derivatives hold great promise for two-dimensional sensing materials, owing to their superior properties, such as atomically thin, transparent, and flexible structure. The high performance of most graphene-based pressure piezoresistive sensors relies excessively on the preparation of complex, post-growth transfer processes. However, the majority of dielectric substrates cannot hold in high temperatures, which can induce contamination and structural defects. Herein, a credibility strategy is reported for directly growing high-quality vertical graphene (VG) on a flexible and stretchable mica paper dielectric substrate with individual interdigital electrodes in plasma-enhanced chemical vapor deposition (PECVD), which assists in inducing electric field, resulting in a flexible, touchable pressure sensor with low power consumption and portability. Benefitting from its vertically directed graphene microstructure, the graphene-based sensor shows superior properties of high sensitivity (4.84 KPa-1) and a maximum pressure range of 120 KPa, as well as strong stability (5000 cycles), which makes it possible to detect small pulse pressure and provide options for preparation of pressure sensors in the future.
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25
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26
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Lagutin AS, Vasil’ev AA. Solid-State Gas Sensors. JOURNAL OF ANALYTICAL CHEMISTRY 2022. [DOI: 10.1134/s1061934822020083] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]
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27
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Lee M, Robin MP, Guis RH, Filippozzi U, Shin DH, van Thiel TC, Paardekooper SP, Renshof JR, van der Zant HSJ, Caviglia AD, Verbiest GJ, Steeneken PG. Self-Sealing Complex Oxide Resonators. NANO LETTERS 2022; 22:1475-1482. [PMID: 35119289 PMCID: PMC8880390 DOI: 10.1021/acs.nanolett.1c03498] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/09/2021] [Revised: 01/27/2022] [Indexed: 06/14/2023]
Abstract
Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nanomechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing.
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Affiliation(s)
- Martin Lee
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Martin P. Robin
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
| | - Ruben H. Guis
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
| | - Ulderico Filippozzi
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Dong Hoon Shin
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Thierry C. van Thiel
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Stijn P. Paardekooper
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
| | - Johannes R. Renshof
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Andrea D. Caviglia
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Gerard J. Verbiest
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
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28
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Carvalho AF, Kulyk B, Fernandes AJS, Fortunato E, Costa FM. A Review on the Applications of Graphene in Mechanical Transduction. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2022; 34:e2101326. [PMID: 34288155 DOI: 10.1002/adma.202101326] [Citation(s) in RCA: 17] [Impact Index Per Article: 8.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/16/2021] [Revised: 04/26/2021] [Indexed: 05/26/2023]
Abstract
A pressing need to develop low-cost, environmentally friendly, and sensitive sensors has arisen with the advent of the always-connected paradigm of the internet-of-things (IoT). In particular, mechanical sensors have been widely studied in recent years for applications ranging from health monitoring, through mechanical biosignals, to structure integrity analysis. On the other hand, innovative ways to implement mechanical actuation have also been the focus of intense research in an attempt to close the circle of human-machine interaction, and move toward applications in flexible electronics. Due to its potential scalability, disposability, and outstanding properties, graphene has been thoroughly studied in the field of mechanical transduction. The applications of graphene in mechanical transduction are reviewed here. An overview of sensor and actuator applications is provided, covering different transduction mechanisms such as piezoresistivity, capacitive sensing, optically interrogated displacement, piezoelectricity, triboelectricity, electrostatic actuation, chemomechanical and thermomechanical actuation, as well as thermoacoustic emission. A critical review of the main approaches is presented within the scope of a wider discussion on the future of this so-called wonder material in the field of mechanical transduction.
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Affiliation(s)
- Alexandre F Carvalho
- I3N-Aveiro, Department of Physics, University of Aveiro, Aveiro, 3810-193, Portugal
| | - Bohdan Kulyk
- I3N-Aveiro, Department of Physics, University of Aveiro, Aveiro, 3810-193, Portugal
| | | | - Elvira Fortunato
- I3N/CENIMAT, Materials Science Department, Faculty of Sciences and Technology, Universidade NOVA de Lisboa and CEMOP/UNINOVA, Caparica, 2829-516, Portugal
| | - Florinda M Costa
- I3N-Aveiro, Department of Physics, University of Aveiro, Aveiro, 3810-193, Portugal
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29
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Šiškins M, Sokolovskaya E, Lee M, Mañas-Valero S, Davidovikj D, van der Zant HSJ, Steeneken PG. Tunable Strong Coupling of Mechanical Resonance between Spatially Separated FePS 3 Nanodrums. NANO LETTERS 2022; 22:36-42. [PMID: 34919402 PMCID: PMC8759088 DOI: 10.1021/acs.nanolett.1c03010] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/04/2021] [Revised: 12/03/2021] [Indexed: 05/20/2023]
Abstract
Coupled nanomechanical resonators made of two-dimensional materials are promising for processing information with mechanical modes. However, the challenge for these systems is to control the coupling. Here, we demonstrate strong coupling of motion between two suspended membranes of the magnetic 2D material FePS3. We describe a tunable electromechanical mechanism for control over both the resonance frequency and the coupling strength using a gate voltage electrode under each membrane. We show that the coupling can be utilized for transferring data between drums by amplitude modulation. Finally, we also study the temperature dependence of the coupling and how it is affected by the antiferromagnetic phase transition characteristic of this material. The presented electrical coupling of resonant magnetic 2D membranes holds the promise of transferring mechanical energy over a distance at low electrical power, thus enabling novel data readout and information processing technologies.
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Affiliation(s)
- Makars Šiškins
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Email for M.Š.:
| | - Ekaterina Sokolovskaya
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Martin Lee
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Samuel Mañas-Valero
- Instituto
de Ciencia Molecular (ICMol), Universitat
de València, c/Catedrático
José Beltrán 2, 46980 Paterna, Spain
| | - Dejan Davidovikj
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628
CD Delft, The Netherlands
- Email for P.G.S.:
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30
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Cho JH, Cayll D, Behera D, Cullinan M. Towards Repeatable, Scalable Graphene Integrated Micro-Nano Electromechanical Systems (MEMS/NEMS). MICROMACHINES 2021; 13:27. [PMID: 35056192 PMCID: PMC8777989 DOI: 10.3390/mi13010027] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/20/2021] [Revised: 12/11/2021] [Accepted: 12/14/2021] [Indexed: 01/21/2023]
Abstract
The demand for graphene-based devices is rapidly growing but there are significant challenges for developing scalable and repeatable processes for the manufacturing of graphene devices. Basic research on understanding and controlling growth mechanisms have recently enabled various mass production approaches over the past decade. However, the integration of graphene with Micro-Nano Electromechanical Systems (MEMS/NEMS) has been especially challenging due to performance sensitivities of these systems to the production process. Therefore, ability to produce graphene-based devices on a large scale with high repeatability is still a major barrier to the commercialization of graphene. In this review article, we discuss the merits of integrating graphene into Micro-Nano Electromechanical Systems, current approaches for the mass production of graphene integrated devices, and propose solutions to overcome current manufacturing limits for the scalable and repeatable production of integrated graphene-based devices.
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Affiliation(s)
| | | | | | - Michael Cullinan
- Department of Mechanical Engineering, The University of Texas at Austin, 204 E Dean Keeton St, Austin, TX 78712, USA; (J.H.C.); (D.C.); (D.B.)
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31
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Avetisov VA, Frolkina MA, Markina AA, Muratov AD, Petrovskii VS. Short Pyridine-Furan Springs Exhibit Bistable Dynamics of Duffing Oscillators. NANOMATERIALS 2021; 11:nano11123264. [PMID: 34947612 PMCID: PMC8707925 DOI: 10.3390/nano11123264] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 11/08/2021] [Revised: 11/25/2021] [Accepted: 11/26/2021] [Indexed: 11/16/2022]
Abstract
The intensive development of nanodevices acting as two-state systems has motivated the search for nanoscale molecular structures whose dynamics are similar to those of bistable mechanical systems, such as Euler arches and Duffing oscillators. Of particular interest are the molecular structures capable of spontaneous vibrations and stochastic resonance. Recently, oligomeric molecules that were a few nanometers in size and exhibited the bistable dynamics of an Euler arch were identified through molecular dynamics simulations of short fragments of thermo-responsive polymers subject to force loading. In this article, we present molecular dynamics simulations of short pyridine-furan springs a few nanometers in size and demonstrate the bistable dynamics of a Duffing oscillator with thermally-activated spontaneous vibrations and stochastic resonance.
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32
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Ferrari PF, Kim S, van der Zande AM. Dissipation from Interlayer Friction in Graphene Nanoelectromechanical Resonators. NANO LETTERS 2021; 21:8058-8065. [PMID: 34559536 DOI: 10.1021/acs.nanolett.1c02369] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
A unique feature of two-dimensional (2D) materials is the ultralow friction at their van der Waals interfaces. A key question in a new generation of 2D heterostructure-based nanoelectromechanical systems (NEMS) is how the low friction interfaces will affect the dynamic performance. Here, we apply the exquisite sensitivity of graphene nanoelectromechanical drumhead resonators to compare the dissipation from monolayer, Bernal-stacked bilayer, and twisted bilayer graphene membranes. We find a significant difference in the average quality factors of three resonator types: 53 for monolayer, 40 for twisted and 31 for Bernal-stacked membranes. We model this difference as a combination of change in stiffness and additional dissipation from interlayer friction during motion. We find even the lowest frictions measured on sliding 2D interfaces are sufficient to alter dissipation in 2D NEMS. This model provides a generalized approach to quantify dissipation in NEMS based on 2D heterostructures which incorporate interlayer slip and friction.
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Affiliation(s)
- Paolo F Ferrari
- Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, United States
| | - SunPhil Kim
- Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, United States
| | - Arend M van der Zande
- Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, United States
- Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, United States
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33
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Wu C, Peng J, Pu W, Lu S, Zhang C, Wu N, Sun Z, Zhang H, Wang HT. Elastic Properties of High-Symmetry Sb 4O 6 Cage-Molecular Crystal. J Phys Chem Lett 2021; 12:9011-9019. [PMID: 34515494 DOI: 10.1021/acs.jpclett.1c02160] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
The cubic-phase antimony trioxide (α-Sb2O3) is a room-temperature stable molecular crystal, composed of cage-like tetraantimony hexoxide (Sb4O6) molecules. Despite its versatile functionality, the van der Waals (vdW) bond-dominated nanomechanics is still unclear. Here, the bending plate-like linear behaviors of high-quality α-Sb2O3 nanoflakes were observed using the nanoindentation method. It is found that the cage-molecular crystal owns a very low in-plane Young's modulus of 14.9 ± 0.8 GPa and a remarkable maximum tensile strain of 6.0-8.8%, corresponding to a rupture strength of 0.89-1.31 GPa. Elucidated by the atomistic simulations, the compliant elastic modulus and the unexpectedly strong rupture strain are associated with the high-symmetry vdW bonding structure. The vdW nanomechanics is of fundamental and technological relevance to nanoelectronics.
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Affiliation(s)
- Congcong Wu
- School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Pudong, Shanghai 201210, China
| | - Jun Peng
- School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Pudong, Shanghai 201210, China
| | - Weiwen Pu
- School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Pudong, Shanghai 201210, China
| | - Shengnan Lu
- School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Pudong, Shanghai 201210, China
| | - Chao Zhang
- School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Pudong, Shanghai 201210, China
- Shanghai Institute of Microsystem and Information Technology, 865 Changning Road, Shanghai 200050, China
| | - Nan Wu
- School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Pudong, Shanghai 201210, China
| | - Zhaoru Sun
- School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Pudong, Shanghai 201210, China
| | - Hongti Zhang
- School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Pudong, Shanghai 201210, China
| | - Hung-Ta Wang
- School of Physical Science and Technology, ShanghaiTech University, 393 Middle Huaxia Road, Pudong, Shanghai 201210, China
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34
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Dolleman R, Chakraborty D, Ladiges DR, van der Zant HSJ, Sader JE, Steeneken PG. Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit. NANO LETTERS 2021; 21:7617-7624. [PMID: 34461013 PMCID: PMC8461654 DOI: 10.1021/acs.nanolett.1c02237] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/10/2021] [Revised: 08/23/2021] [Indexed: 06/13/2023]
Abstract
The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high-frequency motion. This effect is particularly large in low-mass graphene membranes, which makes them promising candidates for pressure-sensing applications. Here, we study the squeeze-film effect in single-layer graphene resonators and find that their resonance frequency is lower than expected from models assuming ideal compression. To understand this deviation, we perform Boltzmann and continuum finite-element simulations and propose an improved model that includes the effects of gas leakage and can account for the observed pressure dependence of the resonance frequency. Thus, this work provides further understanding of the squeeze-film effect and provides further directions into optimizing the design of squeeze-film pressure sensors from 2D materials.
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Affiliation(s)
- Robin
J. Dolleman
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands
- ARC
Centre of Excellence in Exciton Science, School of Mathematics and
Statistics, The University of Melbourne, Melbourne, Victoria 3010, Australia
| | - Debadi Chakraborty
- ARC
Centre of Excellence in Exciton Science, School of Mathematics and
Statistics, The University of Melbourne, Melbourne, Victoria 3010, Australia
| | - Daniel R. Ladiges
- ARC
Centre of Excellence in Exciton Science, School of Mathematics and
Statistics, The University of Melbourne, Melbourne, Victoria 3010, Australia
- Center
for Computational Sciences and Engineering, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, United States
| | - Herre S. J. van der Zant
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands
| | - John E. Sader
- ARC
Centre of Excellence in Exciton Science, School of Mathematics and
Statistics, The University of Melbourne, Melbourne, Victoria 3010, Australia
| | - Peter G. Steeneken
- Kavli
Institute of Nanoscience, Delft University
of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlands
- Department
of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands
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35
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Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning. SENSORS 2021; 21:s21113795. [PMID: 34070885 PMCID: PMC8198744 DOI: 10.3390/s21113795] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/25/2021] [Revised: 05/21/2021] [Accepted: 05/26/2021] [Indexed: 11/16/2022]
Abstract
Most accelerometers today are based on the capacitive principle. However, further miniaturization for micro integration of those sensors leads to a poorer signal-to-noise ratio due to a small total area of the capacitor plates. Thus, other transducer principles should be taken into account to develop smaller sensors. This paper presents the development and realization of a miniaturized accelerometer based on the tunneling effect, whereas its highly sensitive effect regarding the tunneling distance is used to detect small deflections in the range of sub-nm. The spring-mass-system is manufactured by a surface micro-machining foundry process. The area of the shown polysilicon (PolySi) sensor structures has a size smaller than 100 µm × 50 µm (L × W). The tunneling electrodes are placed and patterned by a focused ion beam (FIB) and gas injection system (GIS) with MeCpPtMe3 as a precursor. A dual-beam system enables maximum flexibility for post-processing of the spring-mass-system and patterning of sharp tips with radii in the range of a few nm and initial distances between the electrodes of about 30-300 nm. The use of metal-organic precursor material platinum carbon (PtC) limits the tunneling currents to about 150 pA due to the high inherent resistance. The measuring range is set to 20 g. The sensitivity of the sensor signal, which depends exponentially on the electrode distance due to the tunneling effect, ranges from 0.4 pA/g at 0 g in the sensor operational point up to 20.9 pA/g at 20 g. The acceleration-equivalent thermal noise amplitude is calculated to be 2.4-3.4 mg/Hz. Electrostatic actuators are used to lead the electrodes in distances where direct quantum tunneling occurs.
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Zhang X, Beyer A. Mechanics of free-standing inorganic and molecular 2D materials. NANOSCALE 2021; 13:1443-1484. [PMID: 33434243 DOI: 10.1039/d0nr07606f] [Citation(s) in RCA: 14] [Impact Index Per Article: 4.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
The discovery of graphene has triggered a great interest in inorganic as well as molecular two-dimensional (2D) materials. In this review, we summarize recent progress in the mechanical characterization of free-standing 2D materials, such as graphene, hexagonal boron nitride (hBN), transition metal-dichalcogenides, MXenes, black phosphor, carbon nanomembranes (CNMs), 2D polymers, 2D metal organic frameworks (MOFs) and covalent organic frameworks (COFs). Elastic, fracture, bending and interfacial properties of these materials have been determined using a variety of experimental techniques including atomic force microscopy based nanoindentation, in situ tensile/fracture testing, bulge testing, Raman spectroscopy, Brillouin light scattering and buckling-based metrology. Additionally, we address recent advances of 2D materials in a variety of mechanical applications, including resonators, microphones and nanoelectromechanical sensors. With the emphasis on progress and challenges in the mechanical characterization of inorganic and molecular 2D materials, we expect a continuous growth of interest and more systematic experimental work on the mechanics of such ultrathin nanomaterials.
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Affiliation(s)
- Xianghui Zhang
- Physics of Supramolecular Systems and Surfaces, Bielefeld University, 33615 Bielefeld, Germany.
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Saeed M, Alshammari Y, Majeed SA, Al-Nasrallah E. Chemical Vapour Deposition of Graphene-Synthesis, Characterisation, and Applications: A Review. Molecules 2020; 25:E3856. [PMID: 32854226 PMCID: PMC7503287 DOI: 10.3390/molecules25173856] [Citation(s) in RCA: 46] [Impact Index Per Article: 11.5] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/08/2020] [Revised: 08/17/2020] [Accepted: 08/18/2020] [Indexed: 12/11/2022] Open
Abstract
Graphene as the 2D material with extraordinary properties has attracted the interest of research communities to master the synthesis of this remarkable material at a large scale without sacrificing the quality. Although Top-Down and Bottom-Up approaches produce graphene of different quality, chemical vapour deposition (CVD) stands as the most promising technique. This review details the leading CVD methods for graphene growth, including hot-wall, cold-wall and plasma-enhanced CVD. The role of process conditions and growth substrates on the nucleation and growth of graphene film are thoroughly discussed. The essential characterisation techniques in the study of CVD-grown graphene are reported, highlighting the characteristics of a sample which can be extracted from those techniques. This review also offers a brief overview of the applications to which CVD-grown graphene is well-suited, drawing particular attention to its potential in the sectors of energy and electronic devices.
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Affiliation(s)
- Maryam Saeed
- Energy and Building Research Centre, Kuwait Institute for Scientific Research, P.O. Box 24885, Safat 13109, Kuwait;
| | - Yousef Alshammari
- Waikato Centre for Advanced Materials, School of Engineering, The University of Waikato, Hamilton 3240, New Zealand;
| | - Shereen A. Majeed
- Department of Chemistry, Kuwait University, P.O. Box 5969, Safat 13060, Kuwait;
| | - Eissa Al-Nasrallah
- Energy and Building Research Centre, Kuwait Institute for Scientific Research, P.O. Box 24885, Safat 13109, Kuwait;
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